CN105629364B - Wavelength selective super-surface device - Google Patents
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- CN105629364B CN105629364B CN201610195282.4A CN201610195282A CN105629364B CN 105629364 B CN105629364 B CN 105629364B CN 201610195282 A CN201610195282 A CN 201610195282A CN 105629364 B CN105629364 B CN 105629364B
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- 239000000758 substrate Substances 0.000 claims abstract description 13
- 239000002086 nanomaterial Substances 0.000 claims abstract description 11
- 239000011148 porous material Substances 0.000 claims description 22
- 238000001228 spectrum Methods 0.000 claims description 11
- 239000000463 material Substances 0.000 claims description 10
- 239000002184 metal Substances 0.000 claims description 10
- 229910052751 metal Inorganic materials 0.000 claims description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 9
- 238000010276 construction Methods 0.000 claims description 8
- 238000009826 distribution Methods 0.000 claims description 8
- 230000001413 cellular effect Effects 0.000 claims description 7
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 7
- 229910052737 gold Inorganic materials 0.000 claims description 7
- 239000010931 gold Substances 0.000 claims description 7
- 238000012360 testing method Methods 0.000 claims description 7
- 238000013461 design Methods 0.000 claims description 6
- 238000000034 method Methods 0.000 claims description 5
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 4
- 229910052710 silicon Inorganic materials 0.000 claims description 4
- 239000010703 silicon Substances 0.000 claims description 4
- 239000000377 silicon dioxide Substances 0.000 claims description 4
- 239000010409 thin film Substances 0.000 claims description 4
- 239000000203 mixture Substances 0.000 claims description 3
- 229910001316 Ag alloy Inorganic materials 0.000 claims description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 2
- 229910000881 Cu alloy Inorganic materials 0.000 claims description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 2
- 230000000295 complement effect Effects 0.000 claims description 2
- 229910052802 copper Inorganic materials 0.000 claims description 2
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- 238000005457 optimization Methods 0.000 claims description 2
- 229910052709 silver Inorganic materials 0.000 claims description 2
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- 230000005611 electricity Effects 0.000 claims 1
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Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/204—Filters in which spectral selection is performed by means of a conductive grid or array, e.g. frequency selective surfaces
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- Spectroscopy & Molecular Physics (AREA)
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- Optics & Photonics (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
Abstract
The invention discloses a wavelength selective super-surface device, which belongs to the technical field of metamaterials and comprises a substrate and a super-surface, wherein the substrate and the super-surface are sequentially arranged from bottom to top, and the super-surface is formed by an anisotropic nano unit structure array. The super surface comprises a plurality of electromagnetic regions, the shapes and the sizes of the nano structures in the same electromagnetic region are the same, the shapes and the sizes of the nano structures in different electromagnetic regions are different, and the nano structure array in each electromagnetic region only generates preset electromagnetic response to electromagnetic waves with specific wavelengths, so that the wavelength selection is realized. The invention can make the incident light with different wavelengths generate OAM (orbital angular momentum) with different topological charges, and the ultrathin multi-wavelength optical device designed on the basis of the invention has wide application in future wireless communication systems.
Description
Technical field
The present invention relates to Meta Materials research field more particularly to a kind of super surface devices of wavelength selective.
Background technique
With the development of communication technology, due to the limitation of conventional coding and Channel Technology, the appearance of traditional fibre system
Amount and spectrum efficiency have been approached the limit, are unable to satisfy the demand of transmission bulk information, moreover, send the safety of data
Property is also faced with stern challenge.In order to solve this problem, further lifting system capacity and spectrum efficiency, meet future
Mobile data services transmit data increasing demand and need to explore revolutionary innovative technology.Orbital angular momentum in recent years
(OAM) research of technology is concerned, and due to the safety of good orthogonality and carrying information, is allowed in same carrier frequency
Upper transmission multi-channel electromagnetic whirlpool wave improves capacity and the safety of transmission information by encoded information and multiplexing technique,
Such as OAM can be used for too bit free space data transmission, can carry out in a fiber the multiplexing of too bit-scale with
And information transmission is carried out in free space.Therefore the application of OAM in wireless communications has started global research boom.
In order to make OAM play bigger effect in communication system, the device for being switched fast OAM mode comes into being, typical
Switching and to regulate and control the device of OAM light beam include spiral light modulation, Q- plate, computer hologram and circular grating, but the above device
Part adjusts OAM mode without fast and easy since size is larger.Therefore, research and development generate and convert the miniaturized optical of OAM light beam
Device is necessary in future optical communication.Recently, the super surface of the two-dimensional material planar optical device new as one,
It is verified that can be used to adjust phase distribution by the shape and azimuth for changing its structural unit, by cellular construction arrangement
Array, which is formed by miscellaneous super surface, can produce OAM light beam in the case where linear polarization and circularly polarized light are incident, but cannot be
It is converted under the incident electromagnetic wave irradiation of different wave length.Therefore, how different OAM light is generated using a kind of optical device
Beam and how a large amount of OAM light beam to be efficiently separated and be detected be huge challenge that current technology faces.
Summary of the invention
Technical problem to be solved by the present invention lies in view of the deficiencies of the prior art, it is super to provide a kind of wavelength selective
Surface device, the super surface include multiple electromagnetic spectrums, and each electromagnetic spectrum only generates the electromagnetic wave for being incident to the region
Preset electromagnetic response, to realize the selectivity to wavelength.
The technical solution used to solve the technical problems of the present invention is that:A kind of super surface device of wavelength selective, including from
The substrate successively arranged and the super surface being made of anisotropy nanocell structures array on down, the super surface include more
The nanostructure shape of a electromagnetic spectrum, same electromagnetic spectrum is identical with size, and the nanostructure shape of different electromagnetic spectrums is not
With or the identical size of shape it is different, i.e., the nano-pore structure array of each electromagnetic spectrum only produces the electromagnetic wave for being incident to the region
Raw preset electromagnetic response, the anisotropy nanostructure is etched on super thin metal or medium, can also directly be made
Make in substrate, characteristic size is less than wavelength, and arrangement spacing is less than half-wavelength;Wherein its thickness of super thin metal Tg
Value range is:δ<Tg<λ/15 (λ is lambda1-wavelength, and δ is the skin depth of metal,μ0=4 π × 10-7H/
M, ω are circular frequency, σ0For the conductivity of metal);The ultra-thin medium thickness is less than lambda1-wavelength.
Wherein, the super surface is plane or curved surface.
Wherein, the anisotropy nanostructure includes:Hole or its complementary structure.
Wherein, the anisotropy nanostructured pattern includes:It is rectangle, ellipse, cross, I-shaped or polygon
Shape.
Wherein, the metal includes:Gold, silver, copper, billon, silver alloy or copper alloy.
Wherein, the medium includes:The material transparent in service band such as the semiconductors such as silicon, silica and fluoride
Material.
Wherein, the base material is the materials transparent in service band such as semiconductors and fluoride such as silicon, silica
Material.
Wherein, if the nano-pore cellular construction is produced on medium, dielectric material may be the same or different with base material.
Wherein, the substrate thickness 0<Ts<λ, λ are lambda1-wavelength.
Wherein, the substrate surface is plane or curved surface.
Wherein, the thickness T of the super surface device of the wavelength selectivity is smaller than wavelength.
Wherein, the super surface device of the wavelength selectivity is suitable for visible light and near infrared region.
Compared with prior art, the beneficial effects of the present invention are:
The present invention passes through the light for cleverly designing selective permeable different wave length, generates and focus different OAM light
Beam, and the present invention is novel in design, it is small in size, it is light-weight, there is enlightening significance to wireless communication technology field and be widely applied
Prospect.
Detailed description of the invention
Fig. 1 is the structural diagram of the present invention;
Fig. 2 is the relational graph of wavelength and transmission coefficient and nano-pore structure unit size;
Fig. 3 is design drawing of the invention;
Fig. 4 is the electromagnetism distributed simulation result of OAM light beam that is converted under different wave length and focusing;
Fig. 5 is the interference pattern of RCP light and the OAM light beam of focusing under different wave length;
Fig. 6 is the scanning electron microscope (SEM) photograph of sample of the present invention;
Fig. 7 is Sample testing device figure of the present invention;
Fig. 8 is sample tests figure of the present invention.
Specific embodiment
With reference to the accompanying drawing and specific embodiment the present invention is described in detail, but protection scope of the present invention is not
It is only limitted to following example, should include the full content in claims.And those skilled in the art are from one below
The full content in claim can be realized in embodiment.
The embodiment of the present invention 1 is by taking preferred rectangle nano-pore cellular construction as an example, as shown in Figure 1, the wavelength selective is super
Surface includes the substrate 1 successively arranged from bottom to top, super surface 2.The super surface is by two kinds of rectangle nanometers in gold thin film
Hole 3,4 is arranged in array composition according to certain way.Wherein substrate thickness is Ts;Gold thin film with a thickness of Tg;Rectangle nano-pore 3
Width along x-axis is w1, along a length of L1 of y-axis, period p1;Rectangle nano-pore 4 is w2 along the width of x-axis, along a length of L2 of y-axis,
Period is p2.
The specific method is as follows for the production of the super surface device of wavelength selective of the present invention and parameter optimization:
(1) determine and optimize cellular construction dimensional parameters.The resonant properties of single nano-pore are inquired into first, work as a left side
Rounding polarised light (LCP) is incident in nano-pore, can be exchanged into right-circularly polarized light (RCP).The light being converted as shown in Figure 2
The increase of the long L of max transmissive coefficient and resonance wave personal attendant's rectangle nano-pore and increase and amplitude of variation is larger.But change wide
W is converted the variations in transmissivity of light less and blue shift occurs for resonance wavelength.Know what the size difference of cellular construction had
Resonance frequency is different, and then corresponding resonance wavelength is different, refers to Fig. 3.In view of cellular construction transmits in wave-length coverage
Variation, therefore it is convenient for the sake of design two kinds of various sizes of nano-pores, Optimal Parameters are set as:Incident LCP λ=930nm,
W1=40nm, L1=200nm;Incident LCP λ=766nm, w2=80nm, L2=140nm.
(2) super surface is designed.OAM light is generated in order to make the LCP light of different wave length be incident on super surface device of the invention
The OAM light beam of beam and focusing, the predefined phase distribution function on super surface(wherein, k is wave vector, r
For the radius in polar coordinates, f is focal length, and l is topological charge values, and θ is deflection), which is by generating OAM light
The helical phase Φ of beam1=l θ and the phase distribution for generating focusing OAM light beamComposition.By two kinds of nano-pore structures
Unit is arranged according to predefined phase distribution mode, as shown in Figure 1.
(3) emulation testing is carried out to super surface using simulation software.Z=30 μm of setting, by λ=930nm and λ=766nm
LCP light be incident in the region of nano-pore structure array 3 and 4 respectively.As shown in Fig. 4 (a), when the LCP light of λ=930nm is incident
When, produce the OAM light beam of the focusing of topological charge values l=1, Fig. 4 (b) and 4 (c) is respectively its field distribution in x-axis, y-axis
Component.As shown in Fig. 4 (d), when the LCP light of λ=766nm is incident on super surface, it is poly- to produce the OAM that topological charge values are l=2
Defocused laser beam, Fig. 4 (e), 4 (f) be respectively its field distribution in x-axis, the component of y-axis.
Further, by the super surface of linear polarization (LP) light incidence, this LP light is the LCP light and generation by generating OAM light beam
The RCP light of interference forms.The RCP light of transmission and the OAM light beam of focusing interfere, by the whirlpool valve in the interference pattern that generates
Count the topological charge values to determine OAM light beam.(a) and 5 (b), Fig. 5 (a) are that the LP light incidence that wavelength is 930 nm is super referring to figure 5.
Interference pattern caused by surface, whirlpool valve number are one, i.e. the topological charge values l=1 of OAM light beam.Fig. 5 (b) is for wavelength
Interference pattern caused by the super surface of LP light incidence of 766nm, whirlpool valve number is two, i.e. the topological charge values l=of OAM light beam
2。
(4) experimental verification.Super surface sample of the invention is prepared according to above-mentioned design principle, as shown in Figure 1, flat in cleaning
The golden film for plating a layer thickness Tg=50nm in sliding quartz substrate using magnetron sputtering method is thin in gold using focused ion beam lithography
Prepare super surface sample on film, rectangle nano-pore 1 along x-axis wide w1=40nm, along the long L1=200nm of y-axis, along the week of two axis
Phase p1=400nm;The wide w2=80nm of rectangle nano-pore 2, long L2=140nm, period p 2=400nm.Fig. 6 is sweeping for sample
Retouch electron microscope.Sample testing device refers to Fig. 7.
Shown in sample tests such as Fig. 8 (a) -8 (f).Fig. 8 (a) and 8 (d) is sample at Z=32 μm of distance, and wavelength is
Under the LCP light of 930nm and 766nm is incident, the intensity distribution of the OAM focus on light beam of topological charge values l=1 and l=2 is produced respectively
Figure.Fig. 8 (b) and 8 (e) is the experimental result under the conditions of Z=20 μm, it is known that the present invention can be used for generating and focusing different topology
The OAM light beam of charge values.Fig. 8 c and 8 f is Z=23 μm, under the conditions of the LP light of two kinds of wavelength is incident, the OAM light beam and transmission of focusing
RCP light interference pattern, it is known that topological charge values can be determined by the whirlpool valve number in interference pattern.
By the present embodiment it is found that test result and simulation result are very identical, illustrate that the present invention has in different incident lights
The ability of optics switching is carried out under irradiation to OAM mode.Thus the accuracy of the invention using the design of above-mentioned principle is demonstrated
And reliability.
Through the foregoing embodiment, the present invention can be preferably realized.
Claims (12)
1. a kind of super surface device of wavelength selective, it is characterised in that:Make different wave length by the structure of the super surface device
Incident light generate and focus different topology lotus OAM (orbital angular momentum), structure includes the base successively arranged from bottom to top
Bottom and the super surface being made of anisotropy nanocell structures array, the super surface include multiple electromagnetic spectrums, same electricity
The nanostructure shape of magnetic area is identical with size, and the nanostructure shape difference or the identical size of shape of different electromagnetic spectrums are not
Together, i.e., the nano-structure array of each electromagnetic spectrum only generates preset electromagnetic response to the electromagnetic wave for being incident to the region,
In, the anisotropy nanostructure is etched on super thin metal or medium, can also be directly produced in substrate, special
It levies size and is less than wavelength, arrangement spacing is less than half-wavelength;Wherein the value range of its thickness of super thin metal Tg is:δ<Tg
<λ/15, λ are lambda1-wavelength, and δ is the skin depth of metal,μ0=4 π × 10-7H/m, ω are circular frequency, σ0
For the conductivity of metal;The ultra-thin medium thickness is less than lambda1-wavelength;
The super surface is arranged in array according to certain way by two kinds of rectangle nano-pores in gold thin film and forms, wherein substrate
With a thickness of Ts;Gold thin film with a thickness of Tg;First rectangle nano-pore (3) is w1 along the width of x-axis, and along a length of L1 of y-axis, the period is
p1;Second rectangle nano-pore (4) is w2 along the width of x-axis, along a length of L2 of y-axis, period p2;
The specific method is as follows for the production of the super surface device of wavelength selective and parameter optimization:
(1) cellular construction dimensional parameters are determined and optimized, the resonant properties of single nano-pore are inquired into first, when left-handed circle
Polarised light, that is, LCP is incident in nano-pore, can be exchanged into right-circularly polarized light (RCP), designs two kinds of various sizes of nano-pores,
Optimal Parameters are set as:Incident LCP λ=930nm, w1=40nm, L1=200nm;Incident LCP λ=766nm, w2=80nm, L2
=140nm;
(2) super surface is designed, in order to make the LCP light of different wave length be incident on the OAM that super surface device generates OAM light beam and focusing
Light beam, the predefined phase distribution function on super surfaceWherein, k is wave vector, and r is in polar coordinates
Radius, f are focal length, and l is topological charge values, and θ is deflection, which is the helical phase Φ by generating OAM light beam1
=l θ and the phase distribution for generating focusing OAM light beamComposition, by two kinds of nano-pore structure units according to predefined
Phase distribution mode arranged;
(3) using simulation software to super surface carry out emulation testing, set Z=30 μm of sample distance, by λ=930nm and λ=
The LCP light of 766nm is incident on respectively in nano-pore structure array region, when the LCP light incidence of λ=930nm, produces topology
The OAM light beam of the focusing of charge values l=1;When the LCP light of λ=766nm is incident on super surface, producing topological charge values is l=2
OAM focus on light beam.
2. the super surface device of a kind of wavelength selective according to claim 1, which is characterized in that the super surface is flat
Face or curved surface.
3. the super surface device of a kind of wavelength selective according to claim 1, which is characterized in that the anisotropy is received
Rice structure include:Hole or its complementary structure.
4. the super surface device of a kind of wavelength selective according to claim 1, which is characterized in that the anisotropy is received
Rice construction geometry pattern include:Ellipse, cross, I-shaped or polygon.
5. the super surface device of a kind of wavelength selective according to claim 1, which is characterized in that the metal includes:
Gold, silver, copper, billon, silver alloy or copper alloy.
6. the super surface device of a kind of wavelength selective according to claim 1, which is characterized in that the medium includes:Silicon,
Silica semiconductor and fluoride.
7. the super surface device of a kind of wavelength selective according to claim 1, which is characterized in that the base material is
Silicon, silica semiconductor and fluoride.
8. the super surface device of a kind of wavelength selective according to claim 1, which is characterized in that if the nano unit knot
Structure is produced on medium, and dielectric material may be the same or different with base material.
9. the super surface device of a kind of wavelength selective according to claim 1, which is characterized in that the substrate thickness 0<
Ts<λ, λ are lambda1-wavelength.
10. the super surface device of a kind of wavelength selective according to claim 1, which is characterized in that the substrate surface is
Plane or curved surface.
11. the super surface device of a kind of wavelength selective according to claim 1, which is characterized in that the wavelength selection
The thickness T of the super surface device of type is less than wavelength.
12. the super surface device of a kind of wavelength selective according to claim 1, which is characterized in that the wavelength selection
The super surface device of type is suitable for visible light and near infrared region.
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CN110954974B (en) * | 2019-11-27 | 2021-09-21 | 中国科学院光电技术研究所 | Full Stokes infrared polarization imager based on super surface |
CN111641046B (en) * | 2020-05-07 | 2021-07-06 | 宁波大学 | Microwave band broadband circular dichroism chirality wave absorber |
CN112859215B (en) * | 2020-12-31 | 2023-07-21 | 中国科学院光电技术研究所 | Quasi-continuous super-surface beam splitter for infrared band |
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