CN112387636A - 一种光学元件的自动清洁设备和系统 - Google Patents
一种光学元件的自动清洁设备和系统 Download PDFInfo
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- CN112387636A CN112387636A CN202011172983.9A CN202011172983A CN112387636A CN 112387636 A CN112387636 A CN 112387636A CN 202011172983 A CN202011172983 A CN 202011172983A CN 112387636 A CN112387636 A CN 112387636A
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- 230000003287 optical effect Effects 0.000 title claims abstract description 166
- 238000004140 cleaning Methods 0.000 title claims abstract description 120
- 230000007246 mechanism Effects 0.000 claims abstract description 107
- 238000001514 detection method Methods 0.000 claims abstract description 54
- 239000004744 fabric Substances 0.000 claims description 18
- 239000007788 liquid Substances 0.000 claims description 11
- 235000020637 scallop Nutrition 0.000 claims description 6
- 230000004888 barrier function Effects 0.000 claims description 5
- 241000237503 Pectinidae Species 0.000 claims description 4
- 230000000903 blocking effect Effects 0.000 claims description 3
- 241000883990 Flabellum Species 0.000 description 7
- 238000000034 method Methods 0.000 description 7
- 238000007789 sealing Methods 0.000 description 6
- 238000005286 illumination Methods 0.000 description 5
- 239000012535 impurity Substances 0.000 description 4
- 230000009471 action Effects 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 241000237509 Patinopecten sp. Species 0.000 description 2
- 230000003749 cleanliness Effects 0.000 description 2
- 230000006378 damage Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 239000011553 magnetic fluid Substances 0.000 description 2
- 239000003595 mist Substances 0.000 description 2
- 150000003839 salts Chemical class 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 230000007306 turnover Effects 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 239000000443 aerosol Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 239000004576 sand Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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- B08B1/143—
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
Abstract
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CN202011172983.9A CN112387636B (zh) | 2020-10-28 | 2020-10-28 | 一种光学元件的自动清洁设备和系统 |
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CN202011172983.9A CN112387636B (zh) | 2020-10-28 | 2020-10-28 | 一种光学元件的自动清洁设备和系统 |
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CN112387636A true CN112387636A (zh) | 2021-02-23 |
CN112387636B CN112387636B (zh) | 2021-08-24 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113441465A (zh) * | 2021-05-27 | 2021-09-28 | 成都飞机工业(集团)有限责任公司 | 一种直线光栅尺用清洁装置及其使用方法 |
Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20020028640A1 (en) * | 1999-08-05 | 2002-03-07 | Barnhart Gunnar A. | Method and apparatus for cleaning a surface of a microelectronic substrate |
US20070132989A1 (en) * | 2005-12-12 | 2007-06-14 | Julian Kaller | Devices and methods for inspecting optical elements with a view to contamination |
US20080001101A1 (en) * | 2006-06-30 | 2008-01-03 | Asml Netherlands B.V. | Lithographic apparatus comprising a cleaning arrangement, cleaning arrangement and method for cleaning a surface to be cleaned |
DE102014200219A1 (de) * | 2014-01-09 | 2015-07-09 | Application Solutions (Electronics and Vision) Ltd. | Vorrichtung zur Reinigung eines optischen Elements eines Kamerasystems |
CN106269707A (zh) * | 2016-09-07 | 2017-01-04 | 京东方科技集团股份有限公司 | 一种掩膜版的清洁方法及清洁装置 |
CN106424062A (zh) * | 2016-11-17 | 2017-02-22 | 浙江国自机器人技术有限公司 | 一种光伏组件清洗方法 |
CN107051924A (zh) * | 2017-04-21 | 2017-08-18 | 上海卓易科技股份有限公司 | 一种车载摄像头去污方法及装置 |
CN108453079A (zh) * | 2018-05-15 | 2018-08-28 | 广州富森环保科技股份有限公司 | 一种板件清洗装置 |
CN108941061A (zh) * | 2018-05-18 | 2018-12-07 | 中国人民解放军国防科技大学 | 光学元件的定量化清洁装置及方法 |
CN109099855A (zh) * | 2017-06-20 | 2018-12-28 | 福特全球技术公司 | 车辆清洁度检测系统和方法 |
CN209969563U (zh) * | 2018-12-26 | 2020-01-21 | 西安铂力特增材技术股份有限公司 | 3d打印设备光学元件保护镜片自动清洁装置 |
CN210596576U (zh) * | 2019-07-17 | 2020-05-22 | 佛山市金尚丰纺织有限公司 | 一种污渍检测清洗装置 |
-
2020
- 2020-10-28 CN CN202011172983.9A patent/CN112387636B/zh active Active
Patent Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20020028640A1 (en) * | 1999-08-05 | 2002-03-07 | Barnhart Gunnar A. | Method and apparatus for cleaning a surface of a microelectronic substrate |
US20070132989A1 (en) * | 2005-12-12 | 2007-06-14 | Julian Kaller | Devices and methods for inspecting optical elements with a view to contamination |
US20080001101A1 (en) * | 2006-06-30 | 2008-01-03 | Asml Netherlands B.V. | Lithographic apparatus comprising a cleaning arrangement, cleaning arrangement and method for cleaning a surface to be cleaned |
DE102014200219A1 (de) * | 2014-01-09 | 2015-07-09 | Application Solutions (Electronics and Vision) Ltd. | Vorrichtung zur Reinigung eines optischen Elements eines Kamerasystems |
CN106269707A (zh) * | 2016-09-07 | 2017-01-04 | 京东方科技集团股份有限公司 | 一种掩膜版的清洁方法及清洁装置 |
CN106424062A (zh) * | 2016-11-17 | 2017-02-22 | 浙江国自机器人技术有限公司 | 一种光伏组件清洗方法 |
CN107051924A (zh) * | 2017-04-21 | 2017-08-18 | 上海卓易科技股份有限公司 | 一种车载摄像头去污方法及装置 |
CN109099855A (zh) * | 2017-06-20 | 2018-12-28 | 福特全球技术公司 | 车辆清洁度检测系统和方法 |
CN108453079A (zh) * | 2018-05-15 | 2018-08-28 | 广州富森环保科技股份有限公司 | 一种板件清洗装置 |
CN108941061A (zh) * | 2018-05-18 | 2018-12-07 | 中国人民解放军国防科技大学 | 光学元件的定量化清洁装置及方法 |
CN209969563U (zh) * | 2018-12-26 | 2020-01-21 | 西安铂力特增材技术股份有限公司 | 3d打印设备光学元件保护镜片自动清洁装置 |
CN210596576U (zh) * | 2019-07-17 | 2020-05-22 | 佛山市金尚丰纺织有限公司 | 一种污渍检测清洗装置 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113441465A (zh) * | 2021-05-27 | 2021-09-28 | 成都飞机工业(集团)有限责任公司 | 一种直线光栅尺用清洁装置及其使用方法 |
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CN112387636B (zh) | 2021-08-24 |
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Inventor after: Li Mengqing Inventor after: Song Lei Inventor after: Xiong Zhun Inventor after: Wu Chunfeng Inventor after: Li Qiang Inventor after: Hu Liming Inventor after: Peng Xiaokang Inventor after: Zhang Guiqing Inventor after: Jiang Yongliang Inventor before: Li Mengqing Inventor before: Xiong Zhun Inventor before: Song Lei Inventor before: Wu Chunfeng Inventor before: Li Qiang Inventor before: Hu Liming Inventor before: Peng Xiaokang Inventor before: Zhang Guiqing Inventor before: Jiang Yongliang |
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