CN112382590A - Hand-crossing correction system and method for braiding equipment - Google Patents

Hand-crossing correction system and method for braiding equipment Download PDF

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Publication number
CN112382590A
CN112382590A CN202011259392.5A CN202011259392A CN112382590A CN 112382590 A CN112382590 A CN 112382590A CN 202011259392 A CN202011259392 A CN 202011259392A CN 112382590 A CN112382590 A CN 112382590A
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CN
China
Prior art keywords
head
correction system
jackscrew
base
calibration block
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Pending
Application number
CN202011259392.5A
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Chinese (zh)
Inventor
曹宇轩
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Huatian Technology Nanjing Co Ltd
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Huatian Technology Nanjing Co Ltd
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Priority to CN202011259392.5A priority Critical patent/CN112382590A/en
Publication of CN112382590A publication Critical patent/CN112382590A/en
Pending legal-status Critical Current

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67126Apparatus for sealing, encapsulating, glassing, decapsulating or the like
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

The invention relates to the technical field of chip packaging, and discloses a hand-crossing correction system and method for braiding equipment, wherein the system comprises: the device comprises a base, a fixed seat, a camera, a calibration block, a placing head and a pickup head; the placing head is arranged above the picking head; the placing head is fixed on the fixed seat; the fixed seat is arranged on the base; the camera is arranged in the X direction of the joint position between the placing head and the picking head; and a calibration block for observing a Y direction of a transfer position between the placing head and the picking head in the X direction. When the device is used, the X direction of the connecting position can be directly observed by using the camera, the calibration block is arranged at the connecting position, the position of the camera does not need to be adjusted, the Y direction can be directly observed by using the novel calibration block, meanwhile, the position of the placing head can be accurately adjusted through the arrangement of the jackscrew, and the rapid and accurate calibration can be realized.

Description

Hand-crossing correction system and method for braiding equipment
Technical Field
The invention relates to the technical field of chip packaging, in particular to a hand-crossing correction system and method for braiding equipment.
Background
With the development of the technology packaging technology, the size of a packaged chip is required to be smaller and smaller, and the requirements on machine change time and precision are higher. The equipment is from taking the calibration to hand position and adjusting position mode, can not satisfy operating personnel and use, has following problem:
1. referring to fig. 1 and 2, the calibration braider needs to align Flip and Bond suction nozzle 161 from direction X, Y at the handover position of the pick-up Head 16(Flip Head) and the placing Head 6(Bond Head) to realize accurate handover, the camera 3 can only directly display the docking position in the Y direction, the single triple prism 17 needs to be installed in the X direction, and the position of the camera 3 needs to be adjusted, but the height measurement of the Flip Head and the Bond Head is affected;
2. the BondHead is fixed by only two screws 4, the fixed screws are loosened during adjustment, and the BondHead cannot be accurately adjusted through knocking movement;
3. due to the fact that 4 FlipHeads and 16 BondHeads are arranged, the debugging quantity is large, and the efficiency and the effect are not ideal.
Disclosure of Invention
The invention aims to provide a braiding equipment hand-crossing correction system and a braiding equipment hand-crossing correction method so as to improve MI braiding equipment hand-crossing correction efficiency.
In order to achieve the purpose, the invention adopts the following technical scheme:
a braiding device handoff correction system, comprising: the device comprises a base, a fixed seat, a camera, a calibration block, a placing head and a pickup head;
the placing head is arranged above the picking head;
the placing head is fixed on the fixed seat; the fixed seat is arranged on the base;
the camera is arranged in the X direction of the joint position between the placing head and the picking head;
and a calibration block for observing a Y direction of a transfer position between the placing head and the picking head in the X direction.
The invention further improves the following steps: the fixing seat is fixed in the groove of the base through a fixing screw.
The invention further improves the following steps: the size of recess is greater than the size of fixing base, and the fixing base can the adjusting position in the recess.
The invention further improves the following steps: an X-direction jackscrew is arranged on the X-direction thread of the base, and a Y-direction jackscrew is arranged on the Y-direction thread; the ends of the X-direction jackscrew and the Y-direction jackscrew are respectively jacked on the X-direction side surface and the Y-direction side surface of the fixed seat.
The invention further improves the following steps: the X direction and the Y direction are two directions which are perpendicular to each other in a three-axis coordinate system.
The invention further improves the following steps: the X direction and the Y direction are two directions which are both perpendicular to the vertical direction, and the X direction and the Y direction are perpendicular to each other.
The invention further improves the following steps: the calibration block is of a periscope structure.
The invention further improves the following steps: the calibration block is provided with a metal sheet; the calibration block is adsorbed on the pickup head through a magnet; the light inlet of the calibration block is opposite to the connecting position between the placing head and the pick-up head; the light outlet of the calibration block is positioned in the X direction.
The invention further improves the following steps: the fixing seat is arranged on the base through two fixing screws positioned on two sides of the placing head.
A braid equipment hand-crossing correction method comprises the following steps: loosening the fixing base, adjusting X direction jackscrew, Y direction jackscrew, observing through the camera whether X direction place the head and the pickup head aligns, observe through the calibration piece whether Y direction place the head and the pickup head aligns, after X direction and Y direction align, fixed fixing base accomplishes and hands the correction of handing over.
Compared with the prior art, the invention has the beneficial effects that:
1) when the invention is used, the X direction of the connection position can be directly observed by using the camera, the calibration block is arranged at the connection position, the position of the camera does not need to be adjusted, and the Y direction can be directly observed by using the novel calibration block.
2) When the device is used, the X-direction jackscrew and the Y-direction jackscrew are adjusted, whether the X-direction placing head and the pick-up head are aligned or not is observed through the camera, whether the Y-direction placing head and the pick-up head are aligned or not is observed through the calibration block, and after the X-direction and the Y-direction are aligned, two fixing screws are locked to finish the cross-hand correction of the placing head and the pick-up head; according to the invention, a user can directly observe the correction conditions in the X direction and the Y direction in the same direction, and meanwhile, the position of the placing head can be accurately adjusted through the arrangement of the jackscrew, so that the rapid and accurate calibration can be realized.
3) When the BondHead positioning device is used, the BondHead position can be adjusted more efficiently and accurately by installing the correction method, and the BondHead positioning device does not need more debugging and correction steps, so that the positioning efficiency is higher, and the positioning effect is better.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this application, illustrate embodiments of the invention and, together with the description, serve to explain the invention and not to limit the invention. In the drawings:
FIG. 1 is a schematic view of the position of a pick-up head and a placement head;
FIG. 2 is a diagram illustrating a conventional calibration method;
FIG. 3 is a top view of a cross-hand correction system of a braiding apparatus in accordance with the present invention;
FIG. 4 is a bottom view of a braid device handoff correction system of the present invention.
In the figure: 1. a base; 2. a fixed seat; 3. a camera; 4. a set screw; 5. a calibration block; 6. placing a head; 8. carrying out X-direction jackscrew; 10. carrying out Y-direction jackscrew; 16. a pickup head; 161. a suction nozzle; 17; a prism; 18. and a magnet.
Detailed Description
The present invention will be described in detail below with reference to the embodiments with reference to the attached drawings. It should be noted that the embodiments and features of the embodiments in the present application may be combined with each other without conflict.
The following detailed description is exemplary in nature and is intended to provide further details of the invention. Unless otherwise defined, all technical terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of exemplary embodiments according to the invention.
When the braiding equipment works, the chip is picked up from the blue film through the Flip Head, the chip is handed over to the Bond Head after being turned over for 180 degrees, and the Bond Head is placed in the carrier band after receiving the chip from the Flip Head.
Referring to fig. 3 to 4, a hand-crossing correction system of a braiding apparatus according to the present invention includes: the device comprises a base 1, a fixed seat 2, a camera 3, a calibration block 5, a placing head 6 and a pickup head 16;
the placing head 6 is disposed above the pickup head 16; place head 6 and fix on fixing base 2, fixing base 2 is fixed in the recess of base 1 through two set screw 4. The size of the recess is larger than the size of the permanent seat 2, so that the permanent seat can be properly adjusted in position in the recess.
An X-direction jackscrew 8 is arranged on the X-direction thread of the base 1, and a Y-direction jackscrew 10 is arranged on the Y-direction thread; the ends of the X-direction jackscrew 8 and the Y-direction jackscrew 10 are respectively jacked on the X-direction side surface and the Y-direction side surface of the fixed seat 2. The fixing screw 4 is loosened, the position of the fixing seat 2 can be adjusted by screwing the X-direction jackscrew 8 and the Y-direction jackscrew 10, and then the position of the placing head 6 is adjusted. The X direction and the Y direction are two directions which are vertical to each other in a three-axis coordinate system; preferably, the X direction and the Y direction are two directions each perpendicular to the vertical direction, and the X direction and the Y direction are perpendicular to each other.
The calibration block 5 is of a periscope structure; a metal sheet is arranged on the upper surface of the base; when in use, the calibration block 5 is adsorbed on the pickup head 16 through the magnet 18, so that the light inlet of the calibration block 5 is opposite to the Y direction of the connecting position between the placing head 6 and the pickup head 16; the light outlet of the calibration block 5 is positioned in the X direction; the camera 3 is also fixed in the X direction opposite to the handover position; so set up, need not adjust camera 3 position, use calibration block 5 direct observation Y direction. The user, standing in the X direction, can observe the X direction and the Y direction simultaneously by observing the camera 3 and the calibration block 5.
The invention relates to a hand-crossing correction method of braiding equipment, which comprises the following steps:
loosening the two fixing screws 4, adjusting the X-direction jackscrew 8 and the Y-direction jackscrew 10, observing whether the X-direction placing head 6 and the pick-up head 16 are aligned through the camera 3, observing whether the Y-direction placing head 6 and the pick-up head 16 are aligned through the calibration block 5, and locking the two fixing screws 4 after the X-direction and the Y-direction are aligned to finish the hand-crossing correction of the placing head 6 and the pick-up head 16; according to the invention, a user can directly observe the correction conditions in the X direction and the Y direction in the same direction, and meanwhile, the position of the placing head can be accurately adjusted through the arrangement of the jackscrew, so that the rapid and accurate calibration can be realized.
It will be appreciated by those skilled in the art that the invention may be embodied in other specific forms without departing from the spirit or essential characteristics thereof. The embodiments disclosed above are therefore to be considered in all respects as illustrative and not restrictive. All changes which come within the scope of or equivalence to the invention are intended to be embraced therein.

Claims (10)

1. A braiding equipment handoff correction system, comprising: the device comprises a base (1), a fixed seat (2), a camera (3), a calibration block (5), a placing head (6) and a picking head (16);
the placing head (6) is arranged above the picking head (16);
the placing head (6) is fixed on the fixed seat (2); the fixed seat (2) is arranged on the base (1);
the camera (3) is arranged in the X direction of the connection position between the placing head (6) and the picking head (16);
and a calibration block (5) for observing the Y direction of the position of the connection between the placement head (6) and the pickup head (16) in the X direction.
2. A braider hand-crossing correction system according to claim 1, characterized in that the fixing base (2) is fixed in a groove of the base (1) by means of a fixing screw (4).
3. A braiding device handoff correction system according to claim 2, wherein the size of the recess is larger than the size of the holder (2), and the holder is adjustable in position in the recess.
4. The braiding equipment hand-crossing correction system according to claim 2, wherein an X-direction jackscrew (8) is installed on an X-direction thread of the base (1), and a Y-direction jackscrew (10) is installed on a Y-direction thread; the ends of the X-direction jackscrew (8) and the Y-direction jackscrew (10) are respectively jacked on the X-direction side surface and the Y-direction side surface of the fixed seat (2).
5. The braid apparatus handoff correction system of claim 1, wherein the X-direction and the Y-direction are two directions perpendicular to each other in a three-axis coordinate system.
6. The braid apparatus handoff correction system of claim 1, wherein the X-direction and the Y-direction are two directions perpendicular to the vertical direction, and the X-direction and the Y-direction are perpendicular to each other.
7. A braider handoff correction system according to claim 1, characterized in that the alignment block (5) is a periscope arrangement.
8. A braider hands-on correction system according to claim 1, characterized in that the calibration block (5) is provided with a metal sheet; the calibration block (5) is adsorbed on the pickup head (16) through a magnet (18); the light inlet of the calibration block (5) is opposite to the connection position between the placing head (6) and the pick-up head (16); the light outlet of the calibration block (5) is positioned in the X direction.
9. A braider hands-on correction system according to claim 1, characterized in that the fixing base (2) is mounted on the base (1) by means of two fixing screws (4) located on both sides of the placing head (6).
10. A braiding equipment handoff correction method, based on any one of claims 1 to 9, comprising:
loosen fixing base (2), adjust X direction jackscrew (8), Y direction jackscrew (10), observe through camera (3) that whether X direction is placed head (6) and pickup head (16) and is aligned, observe through calibration piece (5) that Y direction is placed head (6) and pickup head (16) and is aligned, after X direction and Y direction are aligned, fixed fixing base (2), the completion is handed the correction.
CN202011259392.5A 2020-11-11 2020-11-11 Hand-crossing correction system and method for braiding equipment Pending CN112382590A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202011259392.5A CN112382590A (en) 2020-11-11 2020-11-11 Hand-crossing correction system and method for braiding equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202011259392.5A CN112382590A (en) 2020-11-11 2020-11-11 Hand-crossing correction system and method for braiding equipment

Publications (1)

Publication Number Publication Date
CN112382590A true CN112382590A (en) 2021-02-19

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CN202011259392.5A Pending CN112382590A (en) 2020-11-11 2020-11-11 Hand-crossing correction system and method for braiding equipment

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Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5590456A (en) * 1994-12-07 1997-01-07 Lucent Technologies Inc. Apparatus for precise alignment and placement of optoelectric components
JPH09199899A (en) * 1997-01-23 1997-07-31 Hitachi Ltd Electronic part-mounting device
US20030123866A1 (en) * 2001-12-28 2003-07-03 Kabushiki Kaisha Shinkawa Bonding apparatus
US20060209910A1 (en) * 2003-09-22 2006-09-21 Shigeki Fukunaga Method and device for installing light emitting element
WO2015040696A1 (en) * 2013-09-18 2015-03-26 富士機械製造株式会社 Component mounting machine
CN205142680U (en) * 2015-10-23 2016-04-06 宁波舜宇光电信息有限公司 Adjustable attached device
CN108155125A (en) * 2017-12-25 2018-06-12 北京中电科电子装备有限公司 A kind of semiconductor chip paster apparatus
CN109640616A (en) * 2019-01-11 2019-04-16 博众精工科技股份有限公司 High-speed, high precision mounting head
CN110194290A (en) * 2019-06-05 2019-09-03 深圳市诺泰自动化设备有限公司 A kind of rotary type tower chip braider
CN210162758U (en) * 2019-03-29 2020-03-20 深圳市朝阳光科技有限公司 Suction nozzle assembly capable of absorbing compression amount

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5590456A (en) * 1994-12-07 1997-01-07 Lucent Technologies Inc. Apparatus for precise alignment and placement of optoelectric components
JPH09199899A (en) * 1997-01-23 1997-07-31 Hitachi Ltd Electronic part-mounting device
US20030123866A1 (en) * 2001-12-28 2003-07-03 Kabushiki Kaisha Shinkawa Bonding apparatus
US20060209910A1 (en) * 2003-09-22 2006-09-21 Shigeki Fukunaga Method and device for installing light emitting element
WO2015040696A1 (en) * 2013-09-18 2015-03-26 富士機械製造株式会社 Component mounting machine
CN205142680U (en) * 2015-10-23 2016-04-06 宁波舜宇光电信息有限公司 Adjustable attached device
CN108155125A (en) * 2017-12-25 2018-06-12 北京中电科电子装备有限公司 A kind of semiconductor chip paster apparatus
CN109640616A (en) * 2019-01-11 2019-04-16 博众精工科技股份有限公司 High-speed, high precision mounting head
CN210162758U (en) * 2019-03-29 2020-03-20 深圳市朝阳光科技有限公司 Suction nozzle assembly capable of absorbing compression amount
CN110194290A (en) * 2019-06-05 2019-09-03 深圳市诺泰自动化设备有限公司 A kind of rotary type tower chip braider

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