CN112344977A - Sensing and positioning system used in high-temperature furnace chamber - Google Patents
Sensing and positioning system used in high-temperature furnace chamber Download PDFInfo
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- CN112344977A CN112344977A CN202110020719.1A CN202110020719A CN112344977A CN 112344977 A CN112344977 A CN 112344977A CN 202110020719 A CN202110020719 A CN 202110020719A CN 112344977 A CN112344977 A CN 112344977A
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- cooling
- channel
- position sensor
- sensing
- water
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D11/00—Component parts of measuring arrangements not specially adapted for a specific variable
-
- G—PHYSICS
- G08—SIGNALLING
- G08C—TRANSMISSION SYSTEMS FOR MEASURED VALUES, CONTROL OR SIMILAR SIGNALS
- G08C17/00—Arrangements for transmitting signals characterised by the use of a wireless electrical link
- G08C17/02—Arrangements for transmitting signals characterised by the use of a wireless electrical link using a radio link
Abstract
The application discloses a sensing and positioning system used in a high-temperature furnace chamber, which comprises a cooling body and a position sensor arranged on the cooling body, wherein a signal transmitting and receiving channel for avoiding the position sensor to transmit and receive signals is arranged on the cooling body; and a cooling channel for circulating a cooling medium is arranged in the cooling body. The cooling body for the sensing and positioning system in the high-temperature furnace chamber does not influence the emission and the receiving signals of the position sensor. The sensing and positioning system used in the high-temperature furnace chamber can cool the position sensor arranged on the high-temperature equipment in the working process of the high-temperature equipment, and the heat resistance and the working stability of the position sensor are improved.
Description
Technical Field
The invention relates to the technical field of sensor cooling, in particular to a sensing positioning system in a high-temperature welding furnace for a semiconductor device.
Background
The sensor among the prior art often will use on high temperature equipment or in the high temperature environment, but the sensor generally can't stand high temperature for a long time, and high temperature can make the sensor life-span descend by a wide margin to can influence the accuracy degree of sensor, make poor stability when using.
Therefore, there is a need for a sensing and positioning system for use in a high temperature furnace chamber that can cool the sensor to improve the performance of the position sensor.
Disclosure of Invention
An object of this application is to provide a be used for sensing positioning system in high temperature furnace chamber, can cool down the processing to its position sensor, prolong position sensor's life-span, improve position sensor's job stabilization nature.
A sensing and positioning system used in a high-temperature furnace chamber comprises a cooling body and a position sensor arranged on the cooling body, wherein a signal transmitting and receiving channel for avoiding the position sensor to transmit and receive signals is arranged on the cooling body; and a cooling channel for circulating a cooling medium is arranged in the cooling body.
In the above scheme, the cooling body for the sensing and positioning system in the high-temperature furnace chamber does not influence the emission and receiving signals of the position sensor, and the sensing and positioning system in the high-temperature furnace chamber cools the position sensor in the working process of high-temperature equipment, so that the heat resistance and the working stability of the position sensor are improved, and when the high-temperature equipment stops heating and is cooled to the room temperature, the cooling body stops cooling the position sensor, thereby saving energy.
In a possible implementation, the signal transmission and reception channel is a through slot provided in the cooling body;
the position sensor is arranged on the notch at one end of the through groove.
In the above scheme, the through groove can avoid the signal of the position sensor.
In one possible embodiment, the position sensor comprises a base body and a signal transmitting and connecting part; the signal transmitting and connecting part is embedded in the through groove, and the base body is limited on the notch of the through groove.
In the above-described aspect, the signal emitting end of the position sensor emits a signal along the through groove, and the position of the object to be detected below the through groove is detected.
In a possible embodiment, the cooling channel comprises a water cooling channel, and a water inlet joint and a water outlet joint which are communicated with the cooling channel are connected to the cooling body.
In the above scheme, the water cooling channel is arranged, and the cooling body is cooled through water cooling, so that the temperature of the position sensor is reduced. Water is introduced into the water cooling channel, cold water enters the water inlet connector, and the cold water cools the cooling body and discharges the hot water from the water outlet connector.
In a possible embodiment, the water cooling channel extends along the extension direction of the through groove.
In one possible embodiment, the water cooling channel comprises a water inlet channel parallel to the through-groove and a water return channel parallel to the through-groove;
the water inlet channel is communicated with the water return channel.
In the above scheme, the through groove and the position sensor are further cooled, the temperature of a signal transmission environment is also ensured, and the stability of signal transmission is further ensured.
In a possible embodiment, the cooling channel comprises an air cooling channel, and the cooling body is provided with an air inlet joint communicated with the air cooling channel.
In the above scheme, set up the air conditioning passageway, further use the cold gas to cool down position sensor, improve the cooling effect, further improve position sensor's job stabilization nature and life-span.
In a possible embodiment, the air cooling channel is in communication with the through slot.
In the above-described aspect, since the air cooling does not affect the position sensor transmission signal, the through-groove can be used for cooling, and not only the structure can be made simpler and the cooling effect can be made better, but also the through-groove can be cleaned. Meanwhile, the air cooling structure can blow volatile substances away from the position sensor, so that the position sensor is prevented from being out of order due to the adhesion of the volatile substances.
In one possible embodiment, the air cooling passage includes a first air cooling passage parallel to the through slot and a transition passage communicating the first air cooling passage and the through slot.
In a possible embodiment, the cooling body is provided with a flange portion; the air inlet joint, the water inlet joint and the water outlet joint are arranged on the cooling body and are positioned on the same side of the flange part.
In the scheme, the connection is convenient, the structure is simple and compact, and the sensing and positioning system used in the high-temperature furnace chamber has very small volume.
The cooling body for the sensing and positioning system in the high-temperature furnace chamber is provided with the signal transmitting and receiving channel, and does not influence the transmitting and receiving signals of the position sensor. The sensing and positioning system used in the high-temperature furnace chamber can cool the position sensor arranged on the high-temperature equipment in the working process of the high-temperature equipment, and the heat resistance and the working stability of the position sensor are improved.
Drawings
FIG. 1 is a schematic structural diagram of a sensing and positioning system for a high temperature furnace chamber according to an embodiment of the present disclosure;
FIG. 2 is a first cross-sectional view of a sensing and positioning system for a high temperature furnace chamber according to an embodiment of the present application, in which arrow A indicates the transmission and receiving paths of a signal transmitting end, and arrow B indicates the flowing direction of cooling air;
fig. 3 is a second cross-sectional view of a sensing and positioning system for a high temperature furnace chamber according to an embodiment of the present application, wherein arrows indicate the flow direction of cold water.
Reference numerals:
the cooling structure comprises a cooling body 1, a through groove 11, a water cooling channel 12, a water inlet channel 121, a water return channel 122, a water inlet joint 123, a water outlet joint 124, an air cooling channel 13, an air inlet joint 131, a first air cooling channel 132, a switching channel 133, a position sensor 2 and a flange part 3.
In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings used in the description of the embodiments of the present application will be briefly introduced below; the accompanying drawings, which are included to provide a further understanding of the application and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the application and together with the description serve to explain the application and not to limit the application.
Detailed Description
The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are some, but not all, embodiments of the present application. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
The terminology used in the embodiments of the present application is for the purpose of describing particular embodiments only and is not intended to be limiting of the application. As used in the examples of this application and the appended claims, the singular forms "a", "an", and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise.
It should be understood that the term "and/or" as used herein is merely one type of association that describes an associated object, meaning that three relationships may exist, e.g., a and/or B may mean: a exists alone, A and B exist simultaneously, and B exists alone. In addition, the character "/" herein generally indicates that the former and latter related objects are in an "or" relationship.
It should be noted that the terms "upper", "lower", "left", "right", and the like used in the embodiments of the present application are described in terms of the angles shown in the drawings, and should not be construed as limiting the embodiments of the present application. In addition, in this context, it will also be understood that when an element is referred to as being "on" or "under" another element, it can be directly on "or" under "the other element or be indirectly on" or "under" the other element via an intermediate element.
Example one
Referring to fig. 1-3, the present embodiment provides a sensing and positioning system for use in a high temperature furnace chamber, comprising a cooling body 1 and a position sensor 2. The cooling body 1 is provided with a signal transmitting and receiving channel for transmitting and receiving signals by the avoidance position sensor 2. A cooling channel for circulating a cooling medium is arranged in the cooling body 1. The position sensor 2 may be a photoelectric sensor, an infrared position sensor, or the like, and is not limited herein. The cooling body for sensing positioning system in high temperature furnace chamber does not influence position sensor transmission and received signal for sensing positioning system in high temperature furnace chamber opens and cools off position sensor in the high temperature equipment course of operation, has promoted position sensor's heat resistance and job stabilization nature, and when high temperature equipment stopped to heat and cooled down to the room temperature, this cooling body stopped cooling position sensor to the energy saving.
In a possible implementation, the signal transmission and reception channel is a through slot 11 provided in the cooling body 1; the position sensor 2 is disposed on a notch at one end of the through groove 11. The position sensor 2 comprises a base body and a signal transmitting and connecting part; the signal transmitting and connecting part is embedded in the through groove 11, and the base body is limited on the notch of the through groove 11. The through groove 11 can avoid the signal of the position sensor, so that the signal transmitting end of the position sensor transmits the signal along the through groove 11, and the position of the detected object below the groove is detected.
In a possible embodiment, the cooling channel comprises a water cooling channel 12, and a water inlet joint 123 and a water outlet joint 124 which are communicated with the cooling channel are connected to the cooling body 1. The water cooling channel 12 is provided to cool the cooling body 1 by water cooling, thereby lowering the temperature of the position sensor. The water cooling channel 12 is filled with water, the water inlet joint 123 is filled with cold water, and the cold water cools the cooling body 1 and then discharges the hot water from the water outlet joint 124. The water cooling passage 12 extends along the extending direction of the through groove 11. The water cooling channel 12 comprises a water inlet channel 121 parallel to the through groove 11 and a water return channel 122 parallel to the through groove 11; the water inlet channel 121 is communicated with the water return channel 122. Further, the through groove 11 and the position sensor are both cooled, the temperature of a signal transmission environment is also guaranteed, and the stability of signal transmission is further guaranteed.
In a possible embodiment, the cooling channel comprises an air cooling channel 13, and the cooling body 1 is provided with an air inlet joint 131 communicated with the air cooling channel 13. Set up the air conditioning passageway, further use the cold gas to cool down position sensor, improve the cooling effect, further improve position sensor's job stabilization nature and life-span.
In a possible embodiment, the air cooling channel 13 communicates with the through slot 11. Since the air cooling does not affect the position sensor transmission signal, the through groove 11 can be used for cooling, the structure can be simplified, the cooling effect can be improved, and the through groove 11 can be cleaned. Meanwhile, the air cooling structure can blow volatile substances away from the position sensor, so that the position sensor is prevented from being out of order due to the adhesion of the volatile substances.
Further, the air cooling passage 13 includes a first air cooling passage 132 parallel to the through slot 11 and a transition passage 133 communicating the first air cooling passage 132 and the through slot 11.
In a possible embodiment, the cooling body is provided with a flange portion 3; the air inlet joint 131, the water inlet joint 123 and the water outlet joint 124 are arranged on the cooling body and are positioned on the same side of the flange part 3. The connection is convenient, the structure is simple and compact, and the sensing and positioning system used in the high-temperature furnace chamber has very small volume.
While the present embodiments have been described with reference to the accompanying drawings, it is to be understood that the invention is not limited to the precise embodiments described above, which are meant to be illustrative and not restrictive, and that various changes may be made therein by those skilled in the art without departing from the spirit and scope of the invention as defined by the appended claims.
Claims (10)
1. A sensing and positioning system used in a high-temperature furnace chamber is characterized by comprising a cooling body and a position sensor arranged on the cooling body, wherein a signal transmitting and receiving channel for avoiding the position sensor to transmit and receive signals is arranged on the cooling body; and a cooling channel for circulating a cooling medium is arranged in the cooling body.
2. The sensing and positioning system for inside a furnace chamber of claim 1, wherein the signal transmitting and receiving channel is a through slot disposed in the cooling body;
the position sensor is arranged on a notch at one end of the through groove.
3. The system of claim 1, wherein the position sensor comprises a base and a signal transmitting and receiving portion; the signal transmitting and connecting part is embedded in the through groove, and the base body is limited on the notch of the through groove.
4. The sensing and positioning system as claimed in claim 1, wherein the cooling channel comprises a water cooling channel, and the cooling body is connected with a water inlet joint and a water outlet joint which are communicated with the cooling channel.
5. The sensing and positioning system for the inside of a high temperature furnace chamber according to claim 1, wherein the water cooling channel is extended along the extending direction of the through groove.
6. The sensing and positioning system for the inside of a high temperature furnace chamber of claim 1, wherein the water cooling channel comprises a water inlet channel parallel to the through groove and a water return channel parallel to the through groove;
the water inlet channel is communicated with the water return channel.
7. The system of claim 1, wherein the cooling channel comprises an air cooling channel, and the cooling body includes an air inlet connector connected to the air cooling channel.
8. The system of claim 1, wherein the air cooling channel is in communication with the through slot.
9. The system of claim 1, wherein the air cooling passage comprises a first air cooling passage parallel to the through slot and a transition passage connecting the first air cooling passage and the through slot.
10. The system of claim 1, wherein the cooling body is provided with a flange portion;
the air inlet joint, the water inlet joint and the water outlet joint are arranged on the cooling body and are positioned on the same side of the flange part.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110020719.1A CN112344977A (en) | 2021-01-08 | 2021-01-08 | Sensing and positioning system used in high-temperature furnace chamber |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110020719.1A CN112344977A (en) | 2021-01-08 | 2021-01-08 | Sensing and positioning system used in high-temperature furnace chamber |
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| Publication Number | Publication Date |
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| CN112344977A true CN112344977A (en) | 2021-02-09 |
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| CN202110020719.1A Pending CN112344977A (en) | 2021-01-08 | 2021-01-08 | Sensing and positioning system used in high-temperature furnace chamber |
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Citations (7)
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| JP2005283341A (en) * | 2004-03-30 | 2005-10-13 | National Institute Of Advanced Industrial & Technology | Ultrasonic sensor for measuring high-temperature fluid |
| CN201138247Y (en) * | 2007-05-31 | 2008-10-22 | 王健 | Optical continuous temperature measurement system |
| CN104755175A (en) * | 2012-10-25 | 2015-07-01 | 格瑞克明尼苏达有限公司 | Hot melt level sensor and sensor housing |
| CN206362311U (en) * | 2016-12-09 | 2017-07-28 | 西安理工大学 | The laser detector of rotary regenerative air preheater rotor deformation |
| CN206362451U (en) * | 2016-12-20 | 2017-07-28 | 西安理工大学 | Plug-in type air preheater rotor focus infrared detecting device |
| CN107941179A (en) * | 2017-11-16 | 2018-04-20 | 哈尔滨工程大学 | A kind of ultrasound cylinder piston ring oil film thickness measurement device |
| CN209098713U (en) * | 2018-11-07 | 2019-07-12 | 天津市瑞海电子科技有限公司 | High-temp. kiln camera cooling body |
-
2021
- 2021-01-08 CN CN202110020719.1A patent/CN112344977A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005283341A (en) * | 2004-03-30 | 2005-10-13 | National Institute Of Advanced Industrial & Technology | Ultrasonic sensor for measuring high-temperature fluid |
| CN201138247Y (en) * | 2007-05-31 | 2008-10-22 | 王健 | Optical continuous temperature measurement system |
| CN104755175A (en) * | 2012-10-25 | 2015-07-01 | 格瑞克明尼苏达有限公司 | Hot melt level sensor and sensor housing |
| CN206362311U (en) * | 2016-12-09 | 2017-07-28 | 西安理工大学 | The laser detector of rotary regenerative air preheater rotor deformation |
| CN206362451U (en) * | 2016-12-20 | 2017-07-28 | 西安理工大学 | Plug-in type air preheater rotor focus infrared detecting device |
| CN107941179A (en) * | 2017-11-16 | 2018-04-20 | 哈尔滨工程大学 | A kind of ultrasound cylinder piston ring oil film thickness measurement device |
| CN209098713U (en) * | 2018-11-07 | 2019-07-12 | 天津市瑞海电子科技有限公司 | High-temp. kiln camera cooling body |
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Application publication date: 20210209 |
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