CN214012956U - Pressure control system and reaction furnace - Google Patents
Pressure control system and reaction furnace Download PDFInfo
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- CN214012956U CN214012956U CN202022940301.6U CN202022940301U CN214012956U CN 214012956 U CN214012956 U CN 214012956U CN 202022940301 U CN202022940301 U CN 202022940301U CN 214012956 U CN214012956 U CN 214012956U
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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Abstract
The utility model discloses a pressure control system and a reaction furnace, wherein the pressure control system comprises a reaction chamber, a cooling device, an air extractor, a first control valve and a second control valve, and the reaction chamber is provided with a first opening; the cooling device is communicated with the first opening and is used for cooling the gas flowing out of the first opening, and the cooling device is provided with a second opening and a third opening through which the cooled gas flows out; the air extracting device is communicated with the second opening and is used for adjusting the air pressure in the reaction chamber; the first control valve is connected with the second opening and used for controlling the opening and closing of the second opening; the second control valve is connected to the third opening and used for controlling the opening and closing of the third opening. The pressure control system is simple in structure and easy to realize.
Description
Technical Field
The utility model relates to a solar wafer makes the field, especially relates to pressure control system and reacting furnace.
Background
The existing reaction furnace for manufacturing the solar cell comprises a reaction chamber, the pressure balance in the reaction chamber needs to be maintained in the production process, in addition, when an abnormal condition occurs, the waste gas in the reaction chamber needs to be discharged, and the related control system in the related technology has a complex structure and is difficult to meet the requirement of actual production.
SUMMERY OF THE UTILITY MODEL
The utility model discloses aim at solving one of the technical problem that exists among the prior art at least. Therefore, the utility model provides a pressure control system can simplify the structure, reduce cost.
The utility model also discloses an use above-mentioned pressure control system's reacting furnace.
According to the utility model discloses pressure control system of first embodiment includes:
a reaction chamber having a first opening;
a cooling device in communication with the first opening for cooling the gas flowing out of the first opening, the cooling device having a second opening and a third opening through which the cooled gas flows out;
the air extracting device is communicated with the second opening and is used for adjusting the air pressure in the reaction chamber;
a first control valve connected to the second opening for controlling the opening and closing of the second opening;
and the second control valve is connected with the third opening and used for controlling the opening and closing of the third opening.
According to the utility model discloses pressure control system has following beneficial effect at least:
the cooling device can cool the high-temperature gas discharged from the reaction chamber, and avoids the damage to the air extractor. When the reactor works normally, the first control valve is opened, the second control valve is closed, and the air extraction device can maintain the low-pressure environment in the reaction chamber. When an abnormality occurs in the reaction chamber, the first control valve is closed, the second control valve is opened, and the waste gas can be directly discharged from the third opening of the cooling device.
According to some embodiments of the invention, the pressure control system further comprises:
an exhaust pipe;
the two ends of the first connecting pipe are respectively communicated with the air exhaust device and the exhaust pipe;
and two ends of the second connecting pipe are respectively communicated with the second control valve and the exhaust pipe.
According to some embodiments of the invention, the pressure control system further comprises a third connecting pipe, the two ends of the third connecting pipe communicate with the first control valve and the air extraction device, respectively.
According to some embodiments of the invention, the cooling device further has a fourth opening, the pressure control system further comprises a pressure detection device, the pressure detection device being connected to the fourth opening.
According to some embodiments of the invention, the second opening and the third opening are located on opposite sides of the cooling device, and the fourth opening is located between the second opening and the third opening.
According to the utility model discloses a some embodiments, air exhaust device includes constant speed vacuum pump and converter, the converter with constant speed vacuum pump electricity is connected, can be based on the pressure value that pressure measurement device detected the acquisition is adjusted the rotational speed of constant speed vacuum pump.
According to some embodiments of the invention, the cooling device comprises:
the first shell is provided with a first cavity, a cooling medium inlet and a cooling medium outlet, and the cooling medium inlet and the cooling medium outlet are communicated with the first cavity;
the second shell is connected with the first shell and is provided with a second cavity communicated with the first opening;
the third shell is connected with the first shell and is provided with a third cavity communicated with the air exhaust device;
and the air passing pipe is arranged in the first cavity in a penetrating way, and two ends of the air passing pipe are respectively communicated with the second cavity and the third cavity.
According to some embodiments of the present invention, the air duct comprises a plurality of air ducts arranged in parallel.
According to some embodiments of the utility model, still include the stop valve, the stop valve connect in cooling device with between the air exhaust device, be used for control cooling device with air exhaust device's break-make.
According to the utility model discloses the reaction furnace of second embodiment, include pressure control system.
Additional aspects and advantages of the invention will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the invention.
Drawings
The invention will be further described with reference to the following drawings and examples, in which:
fig. 1 is a schematic perspective view of a pressure control system according to an embodiment of the present invention;
FIG. 2 is a schematic perspective view of the pressure control system of FIG. 1 in another orientation;
FIG. 3 is a front view of the pressure control system of FIG. 1;
FIG. 4 is a schematic perspective view of the cooling apparatus of FIG. 1;
FIG. 5 is a cross-sectional view of the cooling device of FIG. 4;
fig. 6 is a schematic perspective view of a plurality of pressure control systems combined according to an embodiment of the present invention.
Detailed Description
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the drawings are exemplary only for the purpose of explaining the present invention, and should not be construed as limiting the present invention.
In the description of the present invention, it should be understood that the orientation or positional relationship indicated with respect to the orientation description, such as up, down, front, rear, left, right, etc., is based on the orientation or positional relationship shown in the drawings, and is only for convenience of description and simplification of description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention.
In the description of the present invention, a plurality of means is one or more, a plurality of means is two or more, and the terms greater than, less than, exceeding, etc. are understood as not including the number, and the terms greater than, less than, within, etc. are understood as including the number. If the first and second are described for the purpose of distinguishing technical features, they are not to be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated or implicitly indicating the precedence of the technical features indicated.
In the description of the present invention, unless there is an explicit limitation, the words such as setting, installation, connection, etc. should be understood in a broad sense, and those skilled in the art can reasonably determine the specific meanings of the above words in combination with the specific contents of the technical solution.
In the description of the present invention, reference to the description of the terms "one embodiment," "some embodiments," "an illustrative embodiment," "an example," "a specific example," or "some examples" or the like means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
Referring to fig. 1 to 3, the pressure control system according to the embodiment of the present invention includes a reaction chamber 100, a cooling device 200, an air extractor 300, a first control valve 400 and a second control valve 500, wherein the reaction chamber 100 has an inner cavity for the solar cell to participate in the reaction, and a first opening 110 communicated with the inner cavity, and the reaction chamber 100 has the functions of temperature rise and vacuum pressure maintaining. The cooling device 200 is in communication with the first opening 110 of the reaction chamber 100, and has an air passage, a second opening 210 and a third opening 220, and the second opening 210 and the third opening 220 are both in communication with the air passage. The high-temperature gas in the reaction chamber 100 flows out of the first opening 110 and then enters the gas channel of the cooling device 200, and is cooled during the flowing process in the gas channel, and the cooled gas selectively flows out of the second opening 210 or the third opening 220. The gas-extracting device 300 is communicated with the second opening 210, and can extract the gas in the reaction chamber 100, thereby adjusting the pressure in the reaction chamber 100. The first control valve 400 is connected to the second opening 210 of the cooling device 200, and controls the opening and closing of the second opening 210. The second control valve 500 is connected to the third opening 220 of the cooling device 200, and controls the opening and closing of the third opening 220. The first control valve 400 and the second control valve 500 can be selectively opened to realize the switching of the air paths.
The reaction chamber 100 may be a cylindrical reaction chamber in the figure, and one end (e.g., the front end in the figure) of the reaction chamber is extended with a pipe 120, and the front end of the pipe 120 is provided with the first opening 110. The air inlet of the cooling device 200 is connected to the first opening 110 through a fourth connection pipe 650 so that the cooling device 200 is spaced apart from the reaction chamber 100 by a certain distance, and other components such as a reaction chamber door are installed between the cooling device and the reaction chamber.
The pumping device 300 may be a vacuum pump capable of continuously pumping air to maintain a low pressure environment in the reaction chamber 100. When the first control valve 400 is opened and the second control valve 500 is closed, the gas-extracting device 300 can extract the gas in the reaction chamber 100 through the second opening 210 of the cooling device 200; when the first control valve 400 is closed and the second control valve 500 is opened, the cooled gas is directly discharged from the third opening 220 without passing through the gas exhaust device 300, and is suitable for discharging the exhaust gas when an abnormal condition occurs in the reaction chamber 100.
The reaction chamber 100, the pumping device 300, the first control valve 400, and the second control valve 500 may be any known technique.
In the above embodiment, the cooling device 200 can cool the high temperature gas exhausted from the reaction chamber 100, so as to avoid damage to the gas exhausting device 300. In normal operation, the first control valve 400 is opened, the second control valve 500 is closed, and the pumping device 300 can maintain a low pressure environment in the reaction chamber 100. When an abnormality occurs in the reaction chamber 100, the first control valve 400 is closed, the second control valve 500 is opened, and the exhaust gas can be directly discharged from the third opening 220 of the cooling device 200, which is simple in structure.
Referring to fig. 1 to 3, as a modification of the above-described pressure control system, the pressure control system further includes an exhaust pipe 610, a first connection pipe 620, and a second connection pipe 630. One end of the exhaust pipe 610 is connected with a three-way joint 660, one end of the first connection pipe 620 is communicated with the air outlet of the air extractor 300, and the other end is communicated with the exhaust pipe 610 through the three-way joint 660. One end of the second connection pipe 630 is communicated with the air outlet of the second control valve 500, and the other end is connected with the exhaust pipe 610 through a three-way joint 660. Therefore, the gas pumped by the air pumping device 300 and the gas directly discharged from the third opening 220 are discharged through the exhaust pipe 610, so that the pollution to the air caused by the direct discharge of the gas is avoided, and the two gas paths share one exhaust pipe 610, which is beneficial to simplifying the structure.
The pressure control system may further include a third connection pipe 640, one end of the third connection pipe 640 is communicated with the air outlet of the first control valve 400, and the other end of the third connection pipe 640 is communicated with the air inlet of the air exhaust device 300, so that the limitation on the installation position of the air exhaust device 300 may be reduced.
Referring to fig. 1 to 3, as an improvement of the above-mentioned pressure control system, the cooling device 200 further has a fourth opening 230, the pressure control system further includes a pressure detection device 700, the pressure detection device 700 is connected to the fourth opening 230 for detecting the air pressure in the air passage of the cooling device 200, and since the air passage of the cooling device 200 is communicated with the inner cavity of the reaction chamber 100, the air pressure in the reaction chamber 100 can be known. The pressure detection device 700 may be a known pressure sensor.
Referring to fig. 4, as an improvement of the pressure control system, the second opening 210 and the third opening 220 are located at opposite sides (for example, left and right sides) of the cooling device 200, and the fourth opening 230 is located between the second opening 210 and the third opening 220, so that the air extractor 300, the first connection pipe 620, the second connection pipe 630, and the third connection pipe 640 having relatively large volumes are located at both sides of the cooling device 200, and the pressure detector 700 having a small volume is located at the middle, thereby enabling the reasonable placement of the components.
As an improvement of the pressure control system, the air extractor 300 includes a constant speed vacuum pump and a frequency converter, the frequency converter is electrically connected to the constant speed vacuum pump, and the rotating speed of the constant speed vacuum pump can be adjusted based on the pressure value detected by the pressure detector 700, so as to maintain the pressure in the reaction chamber 100 stable. In this embodiment, the cooperation of constant speed vacuum pump and converter can realize variable frequency speed governing, and the pressure stability in the reaction chamber 100 can be realized through the rotational speed of adjusting the constant speed vacuum pump, need not to supply a large amount of nitrogen gas from the outside, has reduced use cost by a wide margin. In addition, in combination with the real-time detection of the pressure value by the pressure detection device 700, the rapid response to the pressure fluctuation in the reaction chamber 100 can be realized.
Referring to fig. 4 and 5, in the pressure control system, the cooling device 200 includes a first housing 240, a second housing 250, a third housing 260, and a gas passing pipe 270, the first housing 240, the second housing 250, and the third housing 260 are all cylindrical structures, and the second housing 250 and the third housing 260 are respectively located at two opposite ends of the first housing 240.
The first housing 240 has a first cavity 241, a cooling medium inlet 242 and a cooling medium outlet 243, the cooling medium inlet 242 and the cooling medium outlet 243 are both communicated with the first cavity 241, the cooling medium may be water, which enters the first cavity 241 through the water inlet pipe and the cooling medium inlet 242, which are not shown, cools the high-temperature gas and then flows out through the cooling medium outlet 243 and the water outlet pipe, which are not shown, so that the cooling water can be continuously supplemented, and the cooling effect is ensured.
The second housing 250 is connected to an end of the first housing 240 facing the reaction chamber 100, and has a second cavity 251 communicated with the first opening 110, the second cavity 251 is separated from the first cavity 241 by a first partition 280, and the first partition 280 has a through hole. Correspondingly, the third casing 260 is connected to the end of the first casing 240 facing the air extractor 300, and has a third cavity 261 communicated with the air extractor 300, the third cavity 261 is separated from the first cavity 241 by a second partition 290, and the second partition 290 also has a through hole. The air passing pipe 270 penetrates through the first cavity 241, and two ends of the air passing pipe are respectively inserted into through holes inserted in the first partition 280 and the second partition 290, so that the second cavity 251 and the third cavity 261 are communicated through the air passing pipe 270, and the cooling medium in the first cavity 241 cannot enter the second cavity 251 and the third cavity 261. When the high-temperature gas flows in the gas passing pipe 270, heat may be transferred to the cooling medium through the gas passing pipe 270 and then taken away by the flowing cooling medium. Since the air passing pipe 270 is immersed in the cooling medium, the outer circumferential surface thereof is sufficiently contacted with the cooling medium, and the cooling efficiency can be improved.
Referring to fig. 5, the cooling device 200 includes a plurality of draft tubes 270 arranged in parallel, and can increase the flow rate of gas.
In the above-mentioned pressure control system, the pressure control system further includes a non-illustrated stop valve, the stop valve is connected between the cooling device 200 and the air extraction device 300, when the pressure environment in the reaction chamber 100 rises from a lower pressure to a higher pressure, because the vacuum pump cannot be sealed, the exhaust gas in the exhaust pipe 610 may flow back into the reaction chamber 100, the stop valve is used for controlling the on-off of the cooling device 200 and the air extraction device 300, and when the pressure in the reaction chamber 100 needs to be increased, the stop valve is in an off state to prevent the exhaust gas from flowing back.
The utility model also discloses a reacting furnace, including foretell pressure control system. Referring to fig. 6, the reaction furnace may include a plurality of pressure control systems installed above the frame in a vertical direction, contributing to an increase in processing efficiency.
The embodiments of the present invention have been described in detail with reference to the accompanying drawings, but the present invention is not limited to the above embodiments, and various changes can be made without departing from the spirit of the present invention within the knowledge of those skilled in the art. Furthermore, the embodiments of the present invention and features of the embodiments may be combined with each other without conflict.
Claims (10)
1. A pressure control system, comprising:
a reaction chamber having a first opening;
a cooling device in communication with the first opening for cooling the gas flowing out of the first opening, the cooling device having a second opening and a third opening through which the cooled gas flows out;
the air extracting device is communicated with the second opening and is used for adjusting the air pressure in the reaction chamber;
a first control valve connected to the second opening for controlling the opening and closing of the second opening;
and the second control valve is connected with the third opening and used for controlling the opening and closing of the third opening.
2. The pressure control system of claim 1, further comprising:
an exhaust pipe;
the two ends of the first connecting pipe are respectively communicated with the air exhaust device and the exhaust pipe;
and two ends of the second connecting pipe are respectively communicated with the second control valve and the exhaust pipe.
3. The pressure control system of claim 2, further comprising a third connecting tube, both ends of which are respectively communicated with the first control valve and the air exhaust device.
4. The pressure control system of claim 1, wherein the cooling device further has a fourth opening, the pressure control system further comprising a pressure sensing device connected to the fourth opening.
5. The pressure control system of claim 4, wherein the second opening and the third opening are located on opposite sides of the cooling device, and the fourth opening is located between the second opening and the third opening.
6. The pressure control system according to claim 4, wherein the air extracting device comprises a constant speed vacuum pump and a frequency converter, the frequency converter is electrically connected with the constant speed vacuum pump, and the rotating speed of the constant speed vacuum pump can be adjusted based on the pressure value detected by the pressure detecting device.
7. The pressure control system of claim 1, wherein the cooling device comprises:
the first shell is provided with a first cavity, a cooling medium inlet and a cooling medium outlet, and the cooling medium inlet and the cooling medium outlet are communicated with the first cavity;
the second shell is connected with the first shell and is provided with a second cavity communicated with the first opening;
the third shell is connected with the first shell and is provided with a third cavity communicated with the air exhaust device;
and the air passing pipe is arranged in the first cavity in a penetrating way, and two ends of the air passing pipe are respectively communicated with the second cavity and the third cavity.
8. The pressure control system of claim 7, comprising a plurality of said air ducts arranged in parallel.
9. The pressure control system of claim 1, further comprising a shut-off valve connected between the cooling device and the air extractor for controlling the on/off of the cooling device and the air extractor.
10. A reactor furnace comprising the pressure control system of any one of claims 1 to 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022940301.6U CN214012956U (en) | 2020-12-10 | 2020-12-10 | Pressure control system and reaction furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022940301.6U CN214012956U (en) | 2020-12-10 | 2020-12-10 | Pressure control system and reaction furnace |
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| Publication Number | Publication Date |
|---|---|
| CN214012956U true CN214012956U (en) | 2021-08-20 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202022940301.6U Active CN214012956U (en) | 2020-12-10 | 2020-12-10 | Pressure control system and reaction furnace |
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| CN (1) | CN214012956U (en) |
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- 2020-12-10 CN CN202022940301.6U patent/CN214012956U/en active Active
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