CN112301413B - Exhaust system and exhaust method suitable for drawing large-size single crystals - Google Patents
Exhaust system and exhaust method suitable for drawing large-size single crystals Download PDFInfo
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- CN112301413B CN112301413B CN201910689783.1A CN201910689783A CN112301413B CN 112301413 B CN112301413 B CN 112301413B CN 201910689783 A CN201910689783 A CN 201910689783A CN 112301413 B CN112301413 B CN 112301413B
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- 239000013078 crystal Substances 0.000 title claims abstract description 72
- 238000000034 method Methods 0.000 title claims abstract description 28
- 238000004140 cleaning Methods 0.000 claims description 25
- 238000000746 purification Methods 0.000 claims description 15
- CREMABGTGYGIQB-UHFFFAOYSA-N carbon carbon Chemical compound C.C CREMABGTGYGIQB-UHFFFAOYSA-N 0.000 claims description 3
- 239000011203 carbon fibre reinforced carbon Substances 0.000 claims description 3
- 239000002131 composite material Substances 0.000 claims description 3
- 238000007599 discharging Methods 0.000 claims description 3
- 230000005611 electricity Effects 0.000 abstract description 9
- 238000012423 maintenance Methods 0.000 abstract 1
- 239000003039 volatile agent Substances 0.000 description 4
- 238000009825 accumulation Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 206010033799 Paralysis Diseases 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 2
- 238000002425 crystallisation Methods 0.000 description 2
- 230000008025 crystallization Effects 0.000 description 2
- 238000005265 energy consumption Methods 0.000 description 2
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
Classifications
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention provides an exhaust system suitable for large-size single crystals, which comprises a single crystal furnace bottom plate, an exhaust pipeline, an exhaust port and an exhaust port plugging device, wherein the exhaust pipeline is connected with the single crystal furnace bottom plate; the exhaust port plugging device is rotationally connected with the exhaust port, and is used for opening or closing the exhaust port and controlling the opening quantity of the exhaust port of the exhaust system. The invention has the advantages of simple structure and convenient maintenance, and is provided with the exhaust port plugging device and the pipeline plugging device, so that the exhaust port and the pipeline can be plugged, the exhaust port can be opened and closed in batches, the exhaust pipeline is internally provided with the self-purifying device, and the oxides continuously deposited in the furnace are cleaned off in the normal operation process of the furnace table, so that the furnace table can normally operate, the exhaust port is opened in batches, the power consumption is reduced, the electricity consumption cost is reduced, and the single crystal quality is ensured.
Description
Technical Field
The invention belongs to the technical field of Czochralski crystals, and particularly relates to an exhaust system and an exhaust method suitable for pulling large-size crystals.
Background
The large-size single crystal with the size of 240-310mm is drawn, a larger single crystal furnace and a thermal field comprising 29-34 inches of thermal field are required to be equipped, the actual operation process is carried out, the large-size thermal field is larger than the 28 inches of thermal field due to the volatilization area, the operation time is prolonged along with the increase of the feeding amount, a larger amount of volatile matters can be generated in the operation process of the single crystal furnace, the exhaust port is easy to block, the exhaust system is paralyzed, the power consumption is increased due to 4 exhaust ports, and the electricity cost is increased.
Exhaust system principle: the volatile matter is discharged out of the furnace body through a furnace body exhaust system, the general exhaust system is designed at the bottom of the furnace, the total number of exhaust ports is 4, and every two groups of exhaust ports are connected into the same main pipeline through a separation pipeline. Oxide can be conveyed to an exhaust pipeline outside the furnace body through an exhaust pipe in the furnace body and finally discharged out of the furnace body, and in a joint area of the exhaust pipe in the furnace and the exhaust pipeline outside the furnace body, the oxide is deposited and adsorbed at the joint position, and the oxide is accumulated for a long time to block an exhaust port, so that an exhaust system is paralyzed, and crystallization and quality are finally affected. The pipeline is blocked in the conventional operation process, the furnace table is poor in crystallization, and normal operation cannot be continued. And the next furnace can be started only after the pipeline is cleaned after the furnace is stopped.
Disclosure of Invention
In view of the above problems, the present invention is to provide an exhaust system and an exhaust method suitable for pulling large-sized single crystals, which can clean the oxides deposited continuously in the furnace during the normal operation of the furnace table during the Czochralski single crystal pulling process, and prevent the excessive accumulation of oxides from blocking the exhaust pipeline, thereby affecting the normal operation of the furnace table.
In order to solve the technical problems, the invention adopts the following technical scheme: an exhaust system suitable for drawing large-size single crystals comprises a single crystal furnace bottom plate, an exhaust pipeline, an exhaust port and an exhaust port plugging device, wherein the exhaust pipeline is connected with the single crystal furnace bottom plate,
the exhaust port is connected with the bottom plate of the single crystal furnace and communicated with the exhaust pipeline, so that oxide is conveniently discharged;
the exhaust port plugging device is rotationally connected with the exhaust port, and is used for opening or closing the exhaust port and controlling the opening quantity of the exhaust port of the exhaust system.
Further, the exhaust system further comprises a pipeline plugging device, the pipeline plugging device is rotationally connected with the exhaust pipeline, and the pipeline plugging device is opened or closed for the exhaust pipeline, so that volatile matters at the exhaust pipeline can be cleaned conveniently.
Further, the exhaust pipeline is provided with a discharge port, the discharge port and the pipeline plugging device are sequentially arranged along the flowing direction of the oxide, and the discharge port is used for discharging the deposited oxide.
Further, the exhaust port plugging device comprises an exhaust port blind plate and a driving device, wherein the exhaust port blind plate is rotationally connected with the exhaust port, the exhaust port blind plate is connected with the driving device, and the driving device controls the exhaust port blind plate to act so as to open or close the exhaust port.
Further, the pipeline plugging device comprises a pipeline blind plate, the pipeline blind plate is rotationally connected with the exhaust pipeline, the pipeline blind plate is connected with a driving device, and the driving device controls the pipeline blind plate to act to open or plug the exhaust pipeline.
Further, the pipeline plugging device comprises a pipeline blind plate and a first driving device, the pipeline blind plate is rotationally connected with the exhaust pipeline, the pipeline blind plate is connected with the first driving device, and the first driving device controls the pipeline blind plate to act to open or plug the exhaust pipeline.
Further, the exhaust system further comprises a self-purification device which is arranged in the exhaust pipeline along the flowing direction of the oxide, and the self-purification device, the discharge hole and the pipeline plugging device are sequentially arranged to clean the oxide deposited in the exhaust pipeline.
Further, the blind plate of the exhaust port is made of carbon-carbon composite materials.
An exhaust method suitable for pulling large-size single crystals, in which an exhaust port is opened in batches to perform exhaust during pulling of single crystals, comprising the steps of:
s1: opening at least one exhaust port, closing the rest exhaust ports, and carrying out Czochralski crystal pulling;
s2: when the opened exhaust port is piled up by oxide, rotating the exhaust port blind plate, closing the opened exhaust port, opening at least one of the closed exhaust ports in the step S1, and carrying out Czochralski single crystal, and simultaneously, closing the pipeline blind plate in the exhaust pipeline corresponding to the closed exhaust port, and cleaning the exhaust pipeline by the action of the self-cleaning device;
s3: repeating the step S2, closing the opened exhaust port after the opened exhaust port is accumulated by oxide, opening at least one closed exhaust port in the step S2, and carrying out Czochralski crystal, and simultaneously closing a pipeline blind plate in an exhaust pipeline corresponding to the closed exhaust port, and cleaning the exhaust pipeline by the action of a self-cleaning device;
s4: and repeating the step S3 until the Czochralski crystal is ended.
Further, after the exhaust pipe is cleaned by the self-cleaning device in step S2, step S3 and step S4, the deposited oxide is discharged from the discharge port.
Due to the adoption of the technical scheme, the exhaust system suitable for drawing large-size single crystals is simple in structure and convenient to maintain, the exhaust system is provided with the exhaust port plugging device and the pipeline plugging device, the exhaust port and the pipeline can be plugged, the exhaust port can be opened and closed in batches, the exhaust port is always kept smooth in the process of pulling single crystals, meanwhile, the exhaust pipeline is internally provided with the self-purification device, deposited oxides in the exhaust pipeline can be cleaned, the oxides continuously deposited in the furnace are cleaned in the normal operation process of the furnace, the furnace is enabled to normally operate, the exhaust port is opened in batches, the power consumption is reduced, the electricity consumption cost is lowered, and the quality of single crystals is ensured.
Drawings
FIG. 1 is a schematic diagram of an embodiment of the present invention;
FIG. 2 is a schematic diagram illustrating the operation of the blind plate at the exhaust port according to an embodiment of the present invention.
In the figure:
1. blind plate 2, air vent 3 and bottom plate
4. Self-purification device 5, discharge opening 6 and pipeline blind plate
7. Exhaust duct 8, main exhaust duct
Detailed Description
The invention will be further described with reference to the drawings and the specific examples.
Fig. 1 shows a schematic structural diagram of an embodiment of the present invention, specifically shows the structure of the present embodiment, and the present embodiment relates to an exhaust system and an exhaust method suitable for pulling a large-size single crystal, which are used in a process of pulling a single crystal, and in a process of ensuring normal operation of a furnace table, cleaning away oxides continuously deposited in the furnace, preventing excessive accumulation of oxides from blocking an exhaust pipe, affecting normal operation of the furnace table, and simultaneously, in a process of pulling a single crystal, opening an exhaust port in batches, cleaning oxide deposits in the exhaust pipe in batches, ensuring normal operation of the furnace table, reducing power consumption, reducing electricity cost, and ensuring quality of the single crystal.
Specifically, as shown in fig. 1, the exhaust system suitable for drawing large-size single crystals comprises a single crystal furnace bottom plate 3 and an exhaust pipeline 7, wherein the exhaust pipeline 7 is connected with the single crystal furnace bottom plate 3, the bottom plate 3 is arranged so as to separate the single crystal furnace and the exhaust system into two spaces, the spaces are not mutually interfered, the exhaust pipeline 7 is convenient to install, and the exhaust pipeline 7 is used for discharging oxides in the process of pulling the single crystals; the exhaust system also comprises an exhaust port 2 and an exhaust port plugging device, wherein the exhaust port 2 is connected with the single crystal furnace bottom plate 3, and the exhaust port 2 is communicated with an exhaust pipeline 7, so that oxide volatile matters can be conveniently discharged, and oxide volatile matters flow is discharged from the exhaust port 2 through the exhaust pipeline 7; the exhaust port plugging device is rotationally connected with the exhaust port 2, the exhaust port plugging device is used for opening or closing the exhaust port 2, controlling the number of the exhaust ports of the exhaust system to be opened, the exhaust port plugging device can be used for automatically opening or closing the exhaust port 2, controlling the number of the exhaust ports 2 to be opened in the process of pulling up single crystals by the exhaust system, reducing the electricity cost and the power consumption under the condition of ensuring the normal operation of a furnace table, cleaning an exhaust pipeline of deposited oxide without stopping and cleaning, improving the working efficiency and ensuring the quality of the single crystals.
The bottom plate 3 is of a plate-shaped structure, and a plurality of through holes are formed in the bottom plate 3, and the shapes of the through holes are matched with those of the exhaust ports 2, so that the exhaust ports 2 are convenient to install; the exhaust port 2 is of a tubular structure, two ends of the exhaust port 2 are open, one end of the exhaust port 2 is fixedly connected with the bottom plate 3, the other end of the exhaust port 2 is rotatably provided with an exhaust port packaging device, and an exhaust pipeline 7 is fixedly arranged at the opposite position of the other side of the bottom plate 3, so that the exhaust port 2 is communicated with the exhaust pipeline 7 through a through hole on the bottom plate 3 to discharge oxide volatile matters; each exhaust port 2 corresponds to one exhaust pipe 7, and the other ends of the plurality of exhaust pipes 7 are connected with a total exhaust pipe 8 to form an oxide volatile discharge passage. The number of the exhaust ports 2 is selected according to actual requirements, and may be four, six, or more, and is not particularly limited herein. The exhaust port 2 can be fixedly connected with the bottom plate 3 through a connecting piece such as a bolt, can be integrally formed with the bottom plate 3, or can be selected according to actual requirements in other fixed connection modes, and specific requirements are not required here.
The cross-sectional shape of the exhaust port 2 may be circular, square, irregular, or other, and is selected according to practical requirements, but no specific requirement is made here.
An exhaust port plugging device is arranged at the air inlet end of the exhaust port 2, and can automatically open or close the exhaust port 2, so that the number of the openings of the exhaust port 2 in an exhaust system can be conveniently controlled. The exhaust port plugging device comprises an exhaust port blind plate 1 and a driving device, wherein the exhaust port blind plate 1 is rotationally connected with an exhaust port 2, the exhaust port blind plate 1 is connected with the driving device, and the driving device controls the exhaust port blind plate 1 to act so as to open or close the exhaust port 2. The exhaust port blind plate 1 is of a plate-shaped structure, and the shape and the size of the exhaust port blind plate are matched with those of the air inlet port of the exhaust port 2, so that the exhaust port blind plate 1 can conveniently seal the exhaust port 2; in order to reduce the introduction of impurities in the crystal pulling system by the vent blind plate 1, the vent blind plate 1 is made of a carbon-carbon composite material. The exhaust port blind plate 1 is rotationally connected with the exhaust port 2 through a rotating shaft, so that the exhaust port blind plate 1 can rotate relative to the exhaust port 2, the rotating shaft is connected with a driving device, the driving device drives the rotating shaft to rotate, the exhaust port blind plate 1 rotates, the driving device is preferably a motor, an output shaft of the motor is connected with the rotating shaft through a coupler, the rotating shaft is driven to rotate, and then the exhaust port blind plate is driven to rotate, so that the exhaust port can be opened and closed.
The exhaust system further comprises a pipeline plugging device, the pipeline plugging device is installed on the exhaust pipeline 7 along the flow direction of oxide volatile matters, the pipeline plugging device is rotationally connected with the exhaust pipeline 7 and can rotate relative to the exhaust pipeline 7, the pipeline plugging device can open or close the exhaust pipeline 7, and oxide volatile matters deposited at the position of the exhaust pipeline 7 can be cleaned conveniently. The pipeline plugging device comprises a pipeline blind plate 6, wherein the pipeline blind plate 6 is rotationally connected with an exhaust pipeline 7, the pipeline blind plate 6 is connected with a driving device, and the driving device controls the pipeline blind plate 6 to act to open or plug the exhaust pipeline 7. The pipeline blind plate 6 is of a plate-shaped structure, and is rotationally connected with the exhaust pipeline 7 through a rotating shaft, so that the pipeline blind plate 6 can rotate relative to the exhaust pipeline 7, the exhaust pipeline 7 is plugged or opened, the shape and the size of the pipeline blind plate 6 are consistent with those of the exhaust pipeline 7, the pipeline blind plate 6 can tightly plug the exhaust pipeline 7, and deposited oxides in the exhaust pipeline 7 are convenient to clean. Here, the duct blind plate 6 and the exhaust port blind plate 1 are controlled by a driving device, which is connected with the rotation shaft of the duct blind plate 6 and the rotation shaft of the exhaust port blind plate 1 through a coupling, respectively, to control the actions of the duct blind plate 6 and the exhaust port blind plate 1, preferably, the motor is a biaxial motor.
In addition, another structure of the pipeline plugging device is as follows: the pipeline plugging device comprises a pipeline blind plate 6 and a first driving device, wherein the pipeline blind plate 6 is rotationally connected with an exhaust pipeline 7, the first driving device controls the pipeline blind plate 6 to act and open or plug the exhaust pipeline 7, the pipeline blind plate 6 is of a plate-shaped structure and is rotationally connected with the exhaust pipeline 7 through a rotating shaft, the rotating shaft is connected with the first driving device through a coupler, and the first driving device drives the rotating shaft to rotate so as to drive the pipeline blind plate 6 to rotate, so that the exhaust pipeline 7 is plugged or opened. Here, the first driving means is a motor.
Further optimizing scheme is equipped with bin outlet 5 at exhaust duct 7, the sedimentary oxide exhaust duct 7 after the clearance of being convenient for, bin outlet 5 and pipeline plugging device set gradually along the direction that oxide volatile flows, bin outlet 5 is used for sedimentary oxide to discharge for exhaust port blind plate 1 seals the gas vent back, pipeline blind plate 6 seals exhaust duct 7, make the accumulational oxide be in the space that pipeline blind plate 6 and exhaust duct 7 and exhaust port blind plate 1 constitute, be convenient for clear up sedimentary oxide, can not cause the influence to straight pull single crystal system and total exhaust duct 8.
The exhaust system further comprises a self-purification device 4, wherein the self-purification device 4 is arranged in the exhaust pipeline 7, and the self-purification device 4, the discharge opening 5 and the pipeline plugging device are sequentially arranged along the flowing direction of oxide volatile matters to clean oxide deposited in the exhaust pipeline 7. The setting of self-cleaning device 4 can clear up the oxide in the exhaust duct 7, and the oxide after the clearance flows along exhaust duct 7 to discharge from bin outlet 5, and the pipeline blind plate 6 is held back the oxide after the clearance, avoids the oxide after the clearance to get into total exhaust duct 8, causes total exhaust duct 8 to block up.
The exhaust pipelines 7 corresponding to each exhaust port 2 are provided with a pipeline plugging device and a self-purifying device 4, and a discharge port 5 is arranged at the same time, so that the exhaust pipelines 7 can be cleaned conveniently.
As shown in fig. 2, a motor in the self-purification device 4 controls the action of a worm and gear, a driving device controls the action of the exhaust port blind plate 1, a part of the exhaust port blind plates 1 are opened in the operation process of a furnace table, the rest of the exhaust port blind plates 1 are rotated back, the exhaust port 2 is blocked, and the single crystal is pulled straight; when the exhaust port 2 which is opened after a period of operation is blocked, the unblocked exhaust port blind plates 1 are unscrewed to enable volatile matters to be normally discharged, the exhaust port 2 is closed by the unscrewing of the exhaust port blind plates 1 of the two blocked exhaust ports 2, meanwhile, the pipeline blind plates 1 at the exhaust pipeline connected with the exhaust ports 2 are closed, a self-cleaning device 4 arranged on the exhaust pipeline is opened, a motor rotates to drive a worm to rotate, meanwhile, the turbine is controlled to rotate by 360 degrees through a gear meshed with the turbine, a cleaning rod and a cleaning head fixed on a shaft of the turbine are driven to rotate by 360 degrees in the rotating process of the turbine, finally, the purpose of cleaning the pipeline wall is achieved, and cleaned oxide is discharged from a discharge port 5 on the exhaust pipeline.
The exhaust system suitable for drawing large-size single crystals further comprises a control device, wherein the control device is respectively connected with a driving device of the exhaust port blind plate 1, a driving device of the pipeline blind plate 6 and a driving device of the self-cleaning device 4 through wires or in a wireless mode, the control device is electrically connected with a pressure sensor in the crystal pulling system, an edited program is preset in the control device, the control device performs analysis and judgment according to signals transmitted by the pressure sensor, the actions of the exhaust port blind plate 1, the pipeline blind plate 6 and the self-cleaning device 4 are respectively controlled, the opening and closing of the exhaust port 2, the opening and closing of the exhaust pipeline 7 and the action of the self-cleaning device 4 are performed, the purpose that the exhaust port 2 is opened in batches to discharge oxide volatile matters is achieved, the energy consumption is reduced, and the electricity cost is reduced.
An exhaust method suitable for drawing large-size single crystals, in the process of pulling the single crystals, the exhaust port 2 is opened in batches for exhausting, so that the electricity cost is reduced, the power consumption is reduced, the exhaust pipeline 7 can be cleaned without stopping the machine, the production efficiency is improved, and the method specifically comprises the following steps:
s1: at least one exhaust port 2 is opened, the rest exhaust ports 2 are closed, and the single crystal is pulled, so that the energy consumption and the electricity cost are reduced;
s2: after pulling is carried out for a period of time, when the opened exhaust ports 2 are blocked by oxide accumulation, the gas pressure in the Czochralski crystal system is changed, the quality of the Czochralski crystal is influenced, the opened exhaust ports 2 are closed, at least one of the closed exhaust ports 2 in the step S1 is opened, oxide volatile matters are discharged through the exhaust ports which are not opened, and at the moment, the exhaust ports 2 and an exhaust pipeline are not blocked, so that the Czochralski crystal is carried out, and the quality of the Czochralski crystal is not influenced; meanwhile, the pipeline blind plate 6 in the exhaust pipeline 7 corresponding to the closed exhaust port 2 is closed, the self-purification device 4 acts to clean the exhaust pipeline 7, oxides accumulated in the exhaust pipeline 7 are cleaned, subsequent continuous use is facilitated, cleaning of the exhaust pipeline 7 is not needed to be performed during shutdown, and production efficiency is improved; after the self-purification device 4 cleans the exhaust pipeline, the accumulated oxide is discharged from the discharge port 5;
s3: repeating the step S2, rotating the exhaust port blind plate 1 to close the opened exhaust ports 2 after the opened exhaust ports 2 in the step S2 are accumulated by oxides, opening at least one of the closed exhaust ports 2 in the step S2, namely at least one of the closed exhaust ports 2 in the step S2, performing Czochralski single crystal pulling, and simultaneously closing the pipeline blind plate 6 in the exhaust pipeline corresponding to the closed exhaust ports 2, and cleaning the exhaust pipeline 7 by the action of the self-cleaning device 4; that is, at least one vent 2 is ensured to be opened in the Czochralski single crystal, and the remaining vent 2 is closed, so that the Czochralski single crystal is pulled; after the self-purification device 4 cleans the exhaust pipeline, the deposited oxide is discharged from the discharge port 5;
s4: and repeating the step S3 until the Czochralski crystal is ended.
Specifically, the exhaust method suitable for pulling large-size single crystals is applied to an exhaust system suitable for pulling large-size single crystals, four exhaust ports 2 are set, when pulling the single crystals, the exhaust port blind plate 1 is rotated firstly, two exhaust ports 2 are opened, oxide volatiles enter the total exhaust pipeline 8 from the two opened exhaust ports along the exhaust pipeline 7 and are exhausted, the oxide volatiles accumulate in the exhaust pipeline 7 along with the time, the exhaust of the oxide volatiles is influenced, the quality of the pulled single crystals is influenced, the exhaust port blind plate 1 is rotated, the opened exhaust port 2 is closed, the exhaust port blind plate 1 at the two initially closed exhaust ports is rotated, the exhaust port 2 is opened, and the exhaust of the oxide volatiles is carried out; the pipe blind 6 in the exhaust pipe 7 connected to the two exhaust ports 2 that have been closed is rotated, the exhaust pipe 7 is closed, the self-cleaning device 4 is operated, cleaning of the exhaust pipe 7 is performed, and the cleaned oxide deposit is discharged from the discharge port of the exhaust pipe 7, so that the exhaust pipe 7 is reused. And the exhaust port 2 is opened in batches to discharge oxide volatile matters, so that the power consumption is reduced, the electricity consumption cost is reduced, and the production efficiency is improved.
The foregoing describes the embodiments of the present invention in detail, but the description is only a preferred embodiment of the present invention and should not be construed as limiting the scope of the invention. All equivalent changes and modifications within the scope of the present invention are intended to be covered by the present invention.
Claims (6)
1. The utility model provides an exhaust system suitable for drawing jumbo size single crystal, includes single crystal growing furnace bottom plate and exhaust duct, exhaust duct with single crystal growing furnace bottom plate connects, its characterized in that: also comprises an exhaust port and an exhaust port plugging device, wherein,
the exhaust port is connected with the single crystal furnace bottom plate and communicated with the exhaust pipeline, so that oxide is conveniently discharged;
the exhaust port plugging device is rotationally connected with the exhaust port, and is used for opening or closing the exhaust port and controlling the opening quantity of the exhaust port of the exhaust system;
the exhaust system further comprises a pipeline plugging device, the pipeline plugging device is rotationally connected with the exhaust pipeline, and the pipeline plugging device is opened or closed for the exhaust pipeline, so that volatile matters at the exhaust pipeline can be cleaned conveniently;
the exhaust pipeline is provided with a discharge port, the discharge port and the pipeline plugging device are sequentially arranged along the flowing direction of the oxide, and the discharge port is used for discharging the deposited oxide;
the exhaust system further comprises a self-purification device, wherein the self-purification device is arranged in the exhaust pipeline, and the self-purification device, the discharge port and the pipeline plugging device are sequentially arranged along the flowing direction of oxides to clean the oxides deposited in the exhaust pipeline;
the exhaust port plugging device comprises an exhaust port blind plate and a driving device, wherein the exhaust port blind plate is rotationally connected with the exhaust port, the exhaust port blind plate is connected with the driving device, and the driving device controls the exhaust port blind plate to act so as to open or close the exhaust port.
2. The exhaust system suitable for pulling large-sized single crystals as set forth in claim 1, wherein: the pipeline plugging device comprises a pipeline blind plate, the pipeline blind plate is rotationally connected with the exhaust pipeline, the pipeline blind plate is connected with the driving device, the driving device controls the pipeline blind plate to act, and the exhaust pipeline is opened or plugged.
3. The exhaust system suitable for pulling large-sized single crystals as set forth in claim 1, wherein: the pipeline plugging device comprises a pipeline blind plate and a first driving device, wherein the pipeline blind plate is rotationally connected with the exhaust pipeline, the pipeline blind plate is connected with the first driving device, and the first driving device controls the pipeline blind plate to act so as to open or plug the exhaust pipeline.
4. The exhaust system suitable for pulling large-sized single crystals as set forth in claim 1, wherein: the blind plate of the exhaust port is made of carbon-carbon composite materials.
5. An exhaust method suitable for drawing large-size single crystals, characterized by: in the process of pulling up single crystals, the exhaust port is opened in batches for exhausting, and the method comprises the following steps:
s1: opening at least one exhaust port, closing the rest exhaust ports, and pulling up single crystals;
s2: when the opened exhaust ports are stacked by oxides, rotating an exhaust port blind plate, closing the opened exhaust ports, opening at least one of the closed exhaust ports in the step S1, and performing Czochralski single crystal, and simultaneously closing a pipeline blind plate in an exhaust pipeline corresponding to the closed exhaust ports, and cleaning the exhaust pipeline by a self-cleaning device;
s3: repeating the step S2, closing the opened exhaust port after the opened exhaust port is accumulated by oxide, opening at least one closed exhaust port in the step S2, and carrying out Czochralski single crystal, wherein a pipeline blind plate in the exhaust pipeline corresponding to the closed exhaust port is closed, and the self-cleaning device acts to clean the exhaust pipeline;
s4: and repeating the step S3 until the Czochralski crystal is ended.
6. The exhaust method suitable for pulling a large-sized single crystal according to claim 5, characterized in that: and after the self-purification device in the step S2, the step S3 and the step S4 cleans the exhaust pipeline, the deposited oxide is discharged from a discharge port.
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