CN211005710U - Exhaust system suitable for jumbo size single crystal - Google Patents
Exhaust system suitable for jumbo size single crystal Download PDFInfo
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- CN211005710U CN211005710U CN201921204057.8U CN201921204057U CN211005710U CN 211005710 U CN211005710 U CN 211005710U CN 201921204057 U CN201921204057 U CN 201921204057U CN 211005710 U CN211005710 U CN 211005710U
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- 239000013078 crystal Substances 0.000 title claims abstract description 64
- CREMABGTGYGIQB-UHFFFAOYSA-N carbon carbon Chemical compound C.C CREMABGTGYGIQB-UHFFFAOYSA-N 0.000 claims description 3
- 239000011203 carbon fibre reinforced carbon Substances 0.000 claims description 3
- 239000002131 composite material Substances 0.000 claims description 3
- 238000007599 discharging Methods 0.000 claims description 3
- 238000000034 method Methods 0.000 abstract description 19
- 238000000746 purification Methods 0.000 abstract description 11
- 230000009286 beneficial effect Effects 0.000 abstract 1
- 238000012423 maintenance Methods 0.000 abstract 1
- 238000004140 cleaning Methods 0.000 description 11
- 230000005611 electricity Effects 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 3
- 206010033799 Paralysis Diseases 0.000 description 2
- 238000002425 crystallisation Methods 0.000 description 2
- 230000008025 crystallization Effects 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005265 energy consumption Methods 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
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Abstract
The utility model provides an exhaust system suitable for large-size single crystal, which comprises a single crystal furnace bottom plate and an exhaust pipeline, wherein the exhaust pipeline is connected with the single crystal furnace bottom plate, and the exhaust system also comprises an exhaust port and an exhaust port plugging device, wherein the exhaust port is connected with the single crystal furnace bottom plate and is communicated with the exhaust pipeline, so that oxides can be conveniently discharged; the air outlet plugging device is rotationally connected with the air outlet, and the air outlet plugging device opens or closes the air outlet to control the quantity of the opened air outlets of the air exhaust system. The beneficial effects of the utility model are that simple structure, easy maintenance has gas vent plugging device and pipeline plugging device, can carry out the shutoff to gas vent and pipeline for the gas vent can be divided and open and close in batches, has self-purification device in the gas vent pipeline, at the assurance stove top normal operating in-process, cleans the oxide that the interior continuous deposit of stove got off, makes stove top normal operating, and opens the gas vent in batches, reduces the consumption, reduces the power consumption cost, guarantees single crystal quality.
Description
Technical Field
The utility model belongs to the technical field of vertical pulling single crystal, especially, relate to an exhaust system suitable for jumbo size single crystal.
Background
A240-mm-plus-310-mm large-size single crystal needs to be pulled, a larger single crystal furnace and a thermal field comprising a 29-34-inch thermal field are needed, and in the actual operation process, the large-size thermal field has a larger volatilization area than a 28-inch thermal field, and the operation time is prolonged along with the increase of the material loading, so that a larger amount of volatile matters are generated in the operation process of the single crystal furnace, an exhaust port is easy to block, the exhaust system is easy to be paralyzed, and the power consumption is increased and the electricity consumption cost is increased due to 4 exhaust.
Exhaust system principle: volatile matters are discharged out of the furnace body through a furnace body exhaust system, the general exhaust system is designed at the bottom of the furnace, 4 exhaust ports are designed, and every two exhaust ports are connected into the same main pipeline through branch pipelines. The oxide is conveyed to an exhaust pipeline outside the furnace body through an exhaust duct inside the furnace body and is finally discharged out of the furnace body, the oxide flows through the region where the exhaust duct inside the furnace body is connected with the exhaust pipeline outside the furnace body and is located at a cold-hot connection position, the oxide is deposited and adsorbed at the position, and the exhaust port is blocked at last due to the fact that the oxide is accumulated more and more after the operation time is long, so that the exhaust system is paralyzed, and the crystallization and the quality are. In the conventional operation process, the pipeline is blocked, the crystallization of the furnace platform is poor, and the normal operation cannot be continued. The next furnace can only be started after the pipeline is cleaned after the furnace is stopped.
Disclosure of Invention
In view of the above problem, the to-be-solved problem of the utility model is to provide an exhaust system suitable for jumbo size single crystal, when czochralski crystal, in guaranteeing the stove top normal operating in-process, clean the oxide that the interior continuous deposition of stove got off, prevent that the oxide from piling up too much and plugging up exhaust duct, influence stove top normal operating.
In order to solve the technical problem, the utility model discloses a technical scheme is: an exhaust system suitable for large-size single crystals, which comprises a single crystal furnace bottom plate, an exhaust pipeline, an exhaust port and an exhaust port plugging device, wherein the exhaust pipeline is connected with the single crystal furnace bottom plate,
the exhaust port is connected with the bottom plate of the single crystal furnace and communicated with an exhaust pipeline, so that oxides can be conveniently discharged;
the air outlet plugging device is rotationally connected with the air outlet, and the air outlet plugging device opens or closes the air outlet to control the quantity of the opened air outlets of the air exhaust system.
Further, exhaust system still includes pipeline plugging device, and pipeline plugging device rotates with exhaust duct and is connected, and pipeline plugging device opens or closes exhaust duct, is convenient for handle volatile substance clearance to exhaust duct.
Furthermore, the exhaust duct is provided with a discharge opening, the discharge opening and the duct plugging device are sequentially arranged along the flowing direction of the oxide, and the discharge opening is used for discharging the deposited oxide.
Further, the air outlet plugging device comprises an air outlet blind plate and a driving device, the air outlet blind plate is rotatably connected with the air outlet, the air outlet blind plate is connected with the driving device, and the driving device controls the air outlet blind plate to act to open or close the air outlet.
Furthermore, the pipeline plugging device comprises a pipeline blind plate, the pipeline blind plate is rotatably connected with the exhaust pipeline, the pipeline blind plate is connected with a driving device, and the driving device controls the pipeline blind plate to act to open or plug the exhaust pipeline.
Furthermore, the pipeline plugging device comprises a pipeline blind plate and a first driving device, the pipeline blind plate is rotatably connected with the exhaust pipeline, the pipeline blind plate is connected with the first driving device, and the first driving device controls the pipeline blind plate to act to open or plug the exhaust pipeline.
Further, exhaust system still includes from purifier, and in exhaust duct was located to self purifier, along the direction of oxide circulation, self purifier, bin outlet and pipeline plugging device set gradually, clear up the oxide of deposit in the exhaust duct.
Furthermore, the exhaust port blind plate is made of a carbon-carbon composite material.
Due to the adoption of the technical scheme, the exhaust system suitable for large-size single crystals is simple in structure and convenient to maintain, the exhaust port plugging device and the pipeline plugging device are provided, the exhaust port and the pipeline can be plugged, the exhaust port can be opened and closed in batches, the exhaust port always keeps smooth in the straight-pulling single crystal process, meanwhile, the exhaust pipeline is internally provided with the self-purification device, deposited oxides in the exhaust pipeline can be cleaned, in the process of ensuring the normal operation of the furnace platform, the oxides continuously deposited in the furnace are cleaned, the furnace platform is normally operated, the exhaust port is opened in batches, the power consumption is reduced, the electricity consumption cost is reduced, and the single crystal quality is ensured.
Drawings
Fig. 1 is a schematic structural diagram of an embodiment of the present invention;
fig. 2 is a schematic view of an operating state of the blind plate at the exhaust port according to an embodiment of the present invention.
In the figure:
1. exhaust port blind plate 2, exhaust port 3 and bottom plate
4. Self-purification device 5, discharge opening 6 and pipeline blind plate
7. Exhaust duct 8, total exhaust duct
Detailed Description
The invention will be further described with reference to the accompanying drawings and specific embodiments.
Fig. 1 shows the utility model relates to a structural schematic diagram of an embodiment, specifically show the structure of this embodiment, this embodiment relates to an exhaust system suitable for jumbo size single crystal, be used for czochralski crystal in-process, in guaranteeing stove top normal operating in-process, clean the oxide that the interior continuous deposition of stove got off, prevent that the oxide from piling up too much and plugging up the exhaust duct, influence the normal clear of stove top, and simultaneously, in czochralski crystal in-process, the gas vent is opened in batches, the oxide deposit in the exhaust duct is cleared up in batches, guarantee the normal operating of stove top, the power consumption is reduced, reduce the power consumption cost, guarantee the quality of single crystal.
Specifically, the exhaust system suitable for the large-size single crystal comprises a single crystal furnace bottom plate 3 and an exhaust pipeline 7, wherein the exhaust pipeline 7 is connected with the single crystal furnace bottom plate 3, the single crystal furnace and the exhaust system are conveniently divided into two spaces by the arrangement of the bottom plate 3, the two spaces are not interfered with each other, and the installation of the exhaust pipeline 7 is convenient, and the exhaust pipeline 7 is used for discharging oxides in the process of pulling the single crystal; the exhaust system also comprises an exhaust port 2 and an exhaust port plugging device, wherein the exhaust port 2 is connected with the single crystal furnace bottom plate 3, the exhaust port 2 is communicated with an exhaust pipeline 7, so that oxide volatile matters can be conveniently discharged, and oxide volatile matter airflow is discharged from the exhaust port 2 through the exhaust pipeline 7; the air outlet plugging device is rotatably connected with the air outlet 2, the air outlet plugging device is opened or closed to the air outlet 2, the quantity of the air outlets opened by the exhaust system is controlled, the air outlets 2 can be automatically opened or closed by the air outlet plugging device, the quantity of the air outlets 2 opened by the exhaust system in the Czochralski crystal pulling process is controlled, under the condition of ensuring the normal operation of a furnace platform, the electricity consumption cost is reduced, the power consumption is reduced, meanwhile, an exhaust pipeline of deposited oxides can be cleaned, the shutdown cleaning is not needed, the working efficiency is improved, and the quality of single crystals is ensured.
The bottom plate 3 is of a plate-shaped structure, and a plurality of through holes are formed in the bottom plate 3, the shapes of the through holes are matched with those of the exhaust ports 2, so that the exhaust ports 2 can be conveniently installed; the exhaust port 2 is of a tubular structure, two ends of the exhaust port are opened, one end of the exhaust port 2 is fixedly connected with the bottom plate 3, the other end of the exhaust port 2 is rotatably provided with an exhaust port packaging device, and an exhaust pipeline 7 is fixedly arranged at the opposite position of the other side of the bottom plate 3, so that the exhaust port 2 is communicated with the exhaust pipeline 7 through a through hole in the bottom plate 3 to discharge oxide volatile matters; each exhaust port 2 corresponds to one exhaust duct 7, and the other ends of the plurality of exhaust ducts 7 are connected to a main exhaust duct 8 to form an oxide volatile matter discharge passage. The number of the exhaust ports 2 is selected according to actual requirements, and may be four, six, or more, and is not specifically required here. The exhaust port 2 can be fixedly connected with the bottom plate 3 through connecting pieces such as bolts and the like, can also be integrally formed with the bottom plate 3, or can be in other fixed connection modes, and is selected according to actual requirements, and no specific requirements are made here.
The cross section of the exhaust port 2 may be circular, square, irregular or other shapes, and is selected according to actual requirements, and is not specifically required here.
An air outlet plugging device is installed at the air inlet end of the air outlet 2, and the air outlet plugging device can automatically open or close the air outlet 2, so that the quantity of the opened air outlets 2 in an air exhaust system can be conveniently controlled. The air outlet plugging device comprises an air outlet blind plate 1 and a driving device, wherein the air outlet blind plate 1 is rotationally connected with an air outlet 2, the air outlet blind plate 1 is connected with the driving device, and the driving device controls the air outlet blind plate 1 to act to open or close the air outlet 2. The exhaust port blind plate 1 is of a plate-shaped structure, the shape and the size of the exhaust port blind plate are matched with those of an air inlet port of the exhaust port 2, and the exhaust port blind plate 1 can conveniently plug the exhaust port 2; in order to reduce the introduction of impurities into the crystal pulling system by the exhaust port blind plate 1, the exhaust port blind plate 1 is made of a carbon-carbon composite material. The air outlet blind plate 1 is rotatably connected with the air outlet 2 through a rotating shaft, the air outlet blind plate 1 can rotate relative to the air outlet 2, the rotating shaft is connected with a driving device, the driving device drives the rotating shaft to rotate, the air outlet blind plate 1 rotates, the driving device is preferably a motor, an output shaft of the motor is connected with the rotating shaft through a coupler, the rotating shaft is driven to rotate, the air outlet blind plate is driven to rotate, and the air outlet is opened and closed.
The exhaust system further comprises a pipeline plugging device, the pipeline plugging device is installed on the exhaust pipeline 7 along the flow direction of the oxide volatile matter airflow, and the pipeline plugging device is rotatably connected with the exhaust pipeline 7 and can rotate relative to the exhaust pipeline 7, so that the pipeline plugging device can open or close the exhaust pipeline 7, and oxide volatile matters deposited on the exhaust pipeline 7 can be cleaned conveniently. The pipeline plugging device comprises a pipeline blind plate 6, wherein the pipeline blind plate 6 is rotatably connected with an exhaust pipeline 7, the pipeline blind plate 6 is connected with a driving device, and the driving device controls the pipeline blind plate 6 to act to open or plug the exhaust pipeline 7. This pipeline blind plate 6 is platelike structure, rotates through pivot and exhaust duct 7 to be connected for pipeline blind plate 6 can rotate exhaust duct 7 relatively, carries out the shutoff or opens exhaust duct 7, and the shape and size of this pipeline blind plate 6 is unanimous with exhaust duct 7's shape and size, makes pipeline blind plate 6 can be tight with exhaust duct 7 shutoff, is convenient for clear up the sedimentary oxide in the exhaust duct 7. Here, the duct blind plate 6 and the exhaust port blind plate 1 are controlled by a driving device, the driving device is respectively connected with a rotating shaft of the duct blind plate 6 and a rotating shaft of the exhaust port blind plate 1 through a coupler, and respectively controls the duct blind plate 6 and the exhaust port blind plate 1 to act, and preferably, the motor is a double-shaft motor.
In addition, another structure of the pipeline plugging device is as follows: the pipeline plugging device comprises a pipeline blind plate 6 and a first driving device, the pipeline blind plate 6 is rotatably connected with an exhaust pipeline 7, the pipeline blind plate 6 is connected with the first driving device, the first driving device controls the pipeline blind plate 6 to move, the exhaust pipeline 7 is opened or plugged, here, the pipeline blind plate 6 is of a plate-shaped structure and is rotatably connected with the exhaust pipeline 7 through a rotating shaft, the rotating shaft is connected with the first driving device through a shaft coupling, the first driving device drives the rotating shaft to rotate, and then the pipeline blind plate 6 is driven to rotate, so that plugging or opening of the exhaust pipeline 7 is realized. Here, the first driving means is a motor.
Further optimize the scheme, be equipped with bin outlet 5 at exhaust duct 7, the sedimentary oxide discharge exhaust duct 7 after the clearance of being convenient for, bin outlet 5 sets gradually along the orientation that the oxide volatile matter flows with pipeline plugging device, bin outlet 5 is used for sedimentary oxide to discharge, make gas vent blind plate 1 seal the back with the gas vent, pipeline blind plate 6 seals exhaust duct 7, make accumulational oxide be in the space that pipeline blind plate 6 and exhaust duct 7 and gas vent blind plate 1 constitute, be convenient for clear up sedimentary oxide, can not lead to the fact the influence to single crystal system of drawing and total exhaust duct 8.
The exhaust system further comprises a self-purification device 4, the self-purification device 4 is arranged in the exhaust pipeline 7, the self-purification device 4, the discharge opening 5 and the pipeline plugging device are sequentially arranged along the flowing direction of oxide volatile matters, and oxide deposited in the exhaust pipeline 7 is cleaned. From purifier 4's setting, can clear up the oxide in exhaust duct 7, the oxide after the clearance flows along exhaust duct 7 to discharge from bin outlet 5, pipeline blind plate 6 is held back the oxide after the clearance, and the oxide after avoiding the clearance gets into total exhaust duct 8, causes total exhaust duct 8 to block up.
All install pipeline plugging device and self purification device 4 on the exhaust duct 7 that each gas vent 2 corresponds, be equipped with bin outlet 5 simultaneously, be convenient for clear up exhaust duct 7.
As shown in fig. 2, a motor in a self-purification device 4 controls a worm gear to act, a driving device controls an exhaust port blind plate 1 to act, a part of the exhaust port blind plate 1 is opened in the running process of a furnace platform, and the rest of the exhaust port blind plates 1 are rotated back to seal an exhaust port 2 for pulling a single crystal; when the exhaust port 2 opened after running for a period of time is blocked, the unblocked exhaust port blind plate 1 is unscrewed to normally discharge volatile matters, the exhaust port blind plates 1 of the two blocked exhaust ports 2 are screwed back to close the exhaust ports 2, meanwhile, the pipeline blind plate 1 at the exhaust pipeline connected with the exhaust ports 2 is closed, a self-cleaning device 4 installed on the exhaust pipeline is started, a motor rotates to drive a worm to rotate, the gear meshed with the turbine controls the turbine to rotate for 360 degrees, the rotating process of the turbine can drive a cleaning rod and a cleaning head which are fixed on the shaft of the turbine to rotate for 360 degrees, and finally, the aim of cleaning the pipeline wall is achieved, and the cleaned oxide is discharged from a discharge port 5 on the exhaust pipeline.
The exhaust system suitable for the large-size single crystal further comprises a control device, the control device is respectively and electrically connected with a driving device of the exhaust port blind plate 1, a driving device of the pipeline blind plate 6 and a driving device of the self-cleaning device 4 through wires or wireless, the control device is electrically connected with a pressure sensor in the crystal pulling system, an edited program is preset in the control device, the control device analyzes and judges according to signals transmitted by the pressure sensor, and respectively controls the exhaust port blind plate 1, the pipeline blind plate 6 and the self-cleaning device 4 to act, so that the exhaust port 2 is opened and closed, the exhaust pipeline 7 is opened and closed, and the self-cleaning device 4 acts, the exhaust port 2 is opened in batches to discharge oxide volatile matters, the energy consumption is reduced, and the electricity consumption cost is reduced.
An exhaust method suitable for large-size single crystals, in the process of pulling the single crystals, an exhaust port 2 is opened in batches for exhausting, so that the electricity cost is reduced, the power consumption is reduced, an exhaust pipeline 7 can be cleaned without stopping, and the production efficiency is improved, and the method specifically comprises the following steps:
s1: at least one exhaust port 2 is opened, the rest exhaust ports 2 are closed, and the monocrystal is pulled straightly, so that the energy consumption and the electricity consumption cost are reduced;
s2: after pulling is carried out for a period of time, when the opened exhaust port 2 is blocked by oxide accumulation, the gas pressure in the Czochralski single crystal pulling system is changed to affect the quality of the Czochralski single crystal, the opened exhaust port 2 is closed, at least one of the closed exhaust ports 2 in the step S1 is opened, and the volatile oxide is discharged by the exhaust port which is not opened, wherein the exhaust port 2 and the exhaust pipeline are not blocked, and the Czochralski single crystal pulling is carried out without affecting the quality of the Czochralski single crystal; meanwhile, the pipeline blind plate 6 in the exhaust pipeline 7 corresponding to the closed exhaust port 2 is closed, the self-purification device 4 acts to clean the exhaust pipeline 7, and oxides accumulated in the exhaust pipeline 7 are cleaned, so that the subsequent continuous use is facilitated, the cleaning of the exhaust pipeline 7 is not required to be carried out when the machine is stopped, and the production efficiency is improved; after the self-purification device 4 cleans the exhaust pipeline, the accumulated oxides are discharged from the discharge opening 5;
s3: repeating the step S2, when the opened exhaust port 2 in the step S2 is deposited with oxides, rotating the exhaust port blind plate 1 to close the opened exhaust port 2, opening at least one closed exhaust port 2 in the step S2, that is, opening at least one closed exhaust port 2 in the step S2, performing czochralski crystal pulling, and at the same time, closing the pipe blind plate 6 in the exhaust pipe corresponding to the closed exhaust port 2, and operating the self-cleaning device 4 to clean the exhaust pipe 7; that is, at least one exhaust port 2 is ensured to be opened in the Czochralski single crystal, and the rest exhaust ports 2 are closed, so that the Czochralski single crystal is pulled; after the self-purification device 4 cleans the exhaust pipeline, the deposited oxide is discharged from the discharge opening 5;
s4: the step S3 is repeated until the pulling of the single crystal is finished.
Specifically, the exhaust method applicable to the large-size single crystal is characterized in that an exhaust system applicable to the large-size single crystal is applied to exhaust oxide volatile matters in the process of pulling the single crystal, four exhaust ports 2 are set, when the single crystal is pulled, firstly, an exhaust port blind plate 1 is rotated, two exhaust ports 2 are opened, the oxide volatile matters enter a main exhaust pipeline 8 along an exhaust pipeline 7 and are exhausted, the oxide volatile matters are accumulated in the exhaust pipeline 7 along with the advance of time, the exhaust of the oxide volatile matters is influenced, the quality of the pulled single crystal is influenced, then, the exhaust port blind plate 1 is rotated, the opened exhaust ports 2 are closed, meanwhile, the exhaust port blind plates 1 at the two initially closed exhaust ports are rotated, the exhaust ports 2 are opened, and the oxide volatile matters are exhausted; the duct blind plate 6 in the exhaust duct 7 connected to the two exhaust ports 2 which have been closed is rotated to close the exhaust duct 7, the self-cleaning device 4 is operated to clean the exhaust duct 7, and the cleaned oxide deposit is discharged from the discharge port of the exhaust duct 7 to reuse the exhaust duct 7. And the exhaust port 2 is opened in batches to discharge volatile matters of the oxides, so that the power consumption is reduced, the electricity consumption cost is reduced, and the production efficiency is improved.
The embodiments of the present invention have been described in detail, but the description is only for the preferred embodiments of the present invention and should not be construed as limiting the scope of the present invention. All the equivalent changes and improvements made according to the application scope of the present invention should still fall within the patent coverage of the present invention.
Claims (8)
1. An exhaust system suitable for large-size single crystals comprises a single crystal furnace bottom plate and an exhaust pipeline, wherein the exhaust pipeline is connected with the single crystal furnace bottom plate, and the exhaust system is characterized in that: also comprises an air outlet and an air outlet plugging device, wherein,
the exhaust port is connected with the bottom plate of the single crystal furnace and communicated with the exhaust pipeline, so that oxides can be conveniently discharged;
the air outlet plugging device is rotationally connected with the air outlet, and the air outlet plugging device opens or closes the air outlet to control the quantity of the opened air outlets of the air exhaust system.
2. An exhaust system for large-sized single crystals as set forth in claim 1, wherein: the exhaust system further comprises a pipeline plugging device, the pipeline plugging device is connected with the exhaust pipeline in a rotating mode, and the pipeline plugging device is used for opening or closing the exhaust pipeline and is convenient to clean volatile matters in the exhaust pipeline.
3. An exhaust system for large-sized single crystals as set forth in claim 2, wherein: the exhaust duct is provided with a discharge opening, the discharge opening and the duct plugging device are sequentially arranged along the flowing direction of the oxides, and the discharge opening is used for discharging deposited oxides.
4. An exhaust system suitable for a large-sized single crystal according to claim 2 or 3, wherein: the air outlet plugging device comprises an air outlet blind plate and a driving device, the air outlet blind plate is rotatably connected with the air outlet, the air outlet blind plate is connected with the driving device, and the driving device controls the air outlet blind plate to act to open or close the air outlet.
5. An exhaust system for large-sized single crystals as set forth in claim 4, wherein: the pipeline plugging device comprises a pipeline blind plate, the pipeline blind plate is rotatably connected with the exhaust pipeline, the pipeline blind plate is connected with the driving device, and the driving device controls the pipeline blind plate to act to open or plug the exhaust pipeline.
6. An exhaust system suitable for a large-sized single crystal according to claim 2 or 3, wherein: the pipeline plugging device comprises a pipeline blind plate and a first driving device, the pipeline blind plate is rotatably connected with the exhaust pipeline, the pipeline blind plate is connected with the first driving device, and the first driving device controls the pipeline blind plate to act to open or plug the exhaust pipeline.
7. An exhaust system for large-sized single crystals as set forth in claim 3, wherein: exhaust system still includes from purifier, from purifier locates in the exhaust duct, along the direction of oxide circulation, from purifier the bin outlet with pipeline plugging device sets gradually, and is right sedimentary oxide clears up in the exhaust duct.
8. An exhaust system for large-sized single crystals as set forth in claim 4, wherein: the exhaust port blind plate is made of a carbon-carbon composite material.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201921204057.8U CN211005710U (en) | 2019-07-29 | 2019-07-29 | Exhaust system suitable for jumbo size single crystal |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201921204057.8U CN211005710U (en) | 2019-07-29 | 2019-07-29 | Exhaust system suitable for jumbo size single crystal |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112301413A (en) * | 2019-07-29 | 2021-02-02 | 内蒙古中环光伏材料有限公司 | Exhaust system and exhaust method suitable for large-size single crystal |
| CN115254812A (en) * | 2022-06-30 | 2022-11-01 | 晶科能源股份有限公司 | Cleaning device for removing oxides in exhaust pipeline and single crystal furnace |
-
2019
- 2019-07-29 CN CN201921204057.8U patent/CN211005710U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112301413A (en) * | 2019-07-29 | 2021-02-02 | 内蒙古中环光伏材料有限公司 | Exhaust system and exhaust method suitable for large-size single crystal |
| CN112301413B (en) * | 2019-07-29 | 2024-02-23 | 内蒙古中环光伏材料有限公司 | Exhaust system and exhaust method suitable for drawing large-size single crystals |
| CN115254812A (en) * | 2022-06-30 | 2022-11-01 | 晶科能源股份有限公司 | Cleaning device for removing oxides in exhaust pipeline and single crystal furnace |
| CN115254812B (en) * | 2022-06-30 | 2023-06-20 | 晶科能源股份有限公司 | Cleaning device for removing oxide in exhaust pipeline and single crystal furnace |
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Effective date of registration: 20210621 Address after: 300384 No.12 Haitai East Road, Huayuan Industrial Zone, New Technology Industrial Park, Binhai New Area, Tianjin Patentee after: TIANJIN ZHONGHUAN SEMICONDUCTOR Co.,Ltd. Address before: 010070 No.15 Baolier street, Saihan District, Hohhot, Inner Mongolia Autonomous Region Patentee before: INNER MONGOLIA ZHONGHUAN SOLAR MATERIAL Co.,Ltd. |
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Address after: 300384 No.12 Haitai East Road, Huayuan Industrial Zone, New Technology Industrial Park, Binhai New Area, Tianjin Patentee after: TCL Zhonghuan New Energy Technology Co.,Ltd. Address before: 300384 No.12 Haitai East Road, Huayuan Industrial Zone, New Technology Industrial Park, Binhai New Area, Tianjin Patentee before: TIANJIN ZHONGHUAN SEMICONDUCTOR CO.,LTD. |