CN203820930U - Exhaust pipeline dredging device for single crystal furnace - Google Patents
Exhaust pipeline dredging device for single crystal furnace Download PDFInfo
- Publication number
- CN203820930U CN203820930U CN201420109254.2U CN201420109254U CN203820930U CN 203820930 U CN203820930 U CN 203820930U CN 201420109254 U CN201420109254 U CN 201420109254U CN 203820930 U CN203820930 U CN 203820930U
- Authority
- CN
- China
- Prior art keywords
- joint flange
- exhaust duct
- single crystal
- gas exhaust
- corrugated tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000013078 crystal Substances 0.000 title claims abstract description 34
- 238000004140 cleaning Methods 0.000 claims abstract description 18
- 230000007246 mechanism Effects 0.000 claims abstract description 10
- 230000003750 conditioning effect Effects 0.000 claims description 22
- 238000003032 molecular docking Methods 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 5
- 230000000903 blocking effect Effects 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 42
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- 238000000034 method Methods 0.000 description 4
- 230000004888 barrier function Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000004323 axial length Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000000740 bleeding effect Effects 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229940095709 flake product Drugs 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000033764 rhythmic process Effects 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model discloses an exhaust pipeline dredging device for a single crystal furnace. According to the technical scheme, the exhaust pipeline dredging device is arranged at the lower parts of the exhaust pipelines of the single crystal furnace and comprises cleaning mechanisms positioned at the lower parts of the exhaust pipelines, wherein the cleaning mechanisms are same in structure; each cleaning mechanism comprises a corrugated pipe, a cleaning plate and upper and lower connecting flanges butted with each other, the bottom of each exhaust pipeline is fixedly connected with the upper connecting flange, the lower connecting flange is fixedly connected with the upper end of the corrugated pipe, an impact rod is arranged at the lower end of the cleaning plate and is positioned in the corrugated pipe, the cleaning plate is positioned in the central hole of the upper and lower connecting flanges, the lower end of the corrugated pipe is fixedly connected with a corrugated pipe connecting flange, and the lower part of the corrugated pipe connecting flange is fixedly connected with a closed flange. According to the exhaust pipeline dredging device, once the situation that gas is non-smoothly exhausted is discovered in a production process of the single crystal furnace, the impact rods connected with the cleaning plates can be driven to move up and down at any time to loosen volatile matters in the exhaust pipelines, so that the volatile matters are discharged along with the exhausted gas and are prevented from blocking the exhaust pipelines.
Description
Technical field
The utility model relates to a kind of gas barrier for monocrystalline road, particularly single crystal growing furnace gas exhaust duct dredger.
Background technology
Silicon single crystal flake is a kind of important semiconductor material, produces silicon single crystal flake and first will produce silicon single crystal bar by single crystal growing furnace, then process silicon single crystal flake product by subsequent handlings such as sections.Direct-pulling type monocrystal stove, in produce single crystal process, can produce a large amount of volatile matters, and volatile matter enters pump-line by the gas exhaust duct of bottom of furnace body, then from pump-line, takes discharge by vacuum pump away, and common single crystal growing furnace gas barrier as shown in Figure 3.In exhaust process, volatile matter gas has left the hot environment in single crystal growing furnace and has entered after pipeline, catches a cold and solidifies rapidly, is very easily deposited on gas exhaust duct inwall, and the phenomenon that volatile matter gathering can cause gas exhaust duct to stop up, affects single crystal growing furnace and vacuumize efficiency.Particularly when producing heavily-doped silicon rod due to a large amount of volatilizations of doping agent, the blocked phenomenon of gas exhaust duct more easily occurs, needs blowing out cleaning when serious, affect normally carrying out of rhythm of production, and cleaning work bothers consuming time.
Utility model content
The purpose of this utility model is the drawback for prior art, and a kind of volatile matter that is easy to clear up gas exhaust duct inwall bonding is provided, thereby effectively prevents the single crystal growing furnace gas exhaust duct dredger that gas exhaust duct stops up.
Problem described in the utility model realizes with following technical proposals:
A kind of single crystal growing furnace gas exhaust duct dredger, special feature is: it is arranged on the gas exhaust duct bottom of single crystal growing furnace, described device is comprised of the cleaning mechanism that lays respectively at each gas exhaust duct bottom, each cleaning mechanism that overlaps same structure comprises respectively upper joint flange, the lower joint flange of corrugated tube, conditioning disk and docking mutually, the affixed upper joint flange in bottom of described each gas exhaust duct, the affixed corrugated tube of lower joint flange upper end, conditioning disk lower end is provided with impact bar, impact bar is positioned at corrugated tube, and conditioning disk is positioned at the centre hole of upper and lower joint flange; The affixed corrugated tube joint flange in described corrugated tube lower end, the affixed closure fange in corrugated tube joint flange bottom.
Above-mentioned single crystal growing furnace gas exhaust duct dredger, described closure fange center is provided with connecting hole, and described impact bar lower end is provided with connected unit, and connected unit is threaded with connecting hole.
Above-mentioned single crystal growing furnace gas exhaust duct dredger, described conditioning disk consists of major diameter dish and minor diameter dish, and major diameter dish is positioned at the centre hole of joint flange, and the diameter of major diameter dish mates with the centre hole internal diameter of upper joint flange; Minor diameter dish is positioned at the centre hole of lower joint flange, and the diameter of minor diameter dish mates with the centre hole internal diameter of lower joint flange.
Above-mentioned single crystal growing furnace gas exhaust duct dredger, the diameter of the major diameter dish of described conditioning disk is less than gas exhaust duct diameter 1-2 millimeter.
The utility model for single crystal growing furnace in process of production the easy fouling blockage problem of gas exhaust duct improve, designed a kind of gas exhaust duct dredger.Described device arranges in gas exhaust duct bottom the corrugated tube being communicated with it, is provided with conditioning disk in corrugated tube, and conditioning disk can move up and down along gas exhaust duct.Once this device finds that in single crystal growing furnace production process vapor pipe exhaust is not smooth, can drive at any time the impact bar that connects conditioning disk to move up and down, the volatile matter in loosening gas exhaust duct, makes volatile matter with the discharge of bleeding, and prevents that volatile matter from stopping up gas exhaust duct.Employing the beneficial effects of the utility model are: can prevent the volatile matter fouling in gas exhaust duct, the work of cleaning gas exhaust duct is simple and easy to do, effectively eliminates line clogging hidden danger.The utility model is simple in structure, and scrap build is easy to implement, and this design is particularly suitable for single crystal growing furnace heavily-doped silicon rod and produces.
Accompanying drawing explanation
Below in conjunction with accompanying drawing, the utility model is described in further detail.
Fig. 1 is structural representation of the present utility model;
Fig. 2 is the partial enlarged view at Figure 1A place;
Fig. 3 is the gas exhaust duct schematic diagram of single crystal growing furnace before improving.
In figure, each list of reference numerals is: 1, single crystal growing furnace, 2, gas exhaust duct, 3, upper joint flange, 4, lower joint flange, 5, corrugated tube, 6, conditioning disk, 7, impact bar, 7-1, connected unit, 8, pump-line, 9, corrugated tube joint flange, 10, closure fange, 10-1, connecting hole.
Embodiment
Referring to Fig. 1, the utility model is arranged on the bottom of the gas exhaust duct 2 of single crystal growing furnace 1, and in single crystal growing furnace, volatile gases is drawn into pump-line 8 discharges through each gas exhaust duct.Described device is comprised of the cleaning mechanism that lays respectively at each gas exhaust duct bottom, and each structure of overlapping cleaning mechanism is identical.Every cover cleaning mechanism comprises upper joint flange 3, the lower joint flange 4 of corrugated tube 5, conditioning disk 6, docking mutually.The affixed upper joint flange 3 in bottom of described each gas exhaust duct 2, the upper end of lower joint flange and corrugated tube is affixed.In the lower end of conditioning disk 6, be provided with impact bar 7, impact bar is positioned at corrugated tube.The affixed corrugated tube joint flange 9 in corrugated tube lower end, the affixed closure fange 10 in corrugated tube joint flange bottom, by closure fange by the lower end closed of corrugated tube.Impact bar depending on cleaned gas exhaust duct depth dimensions, makes impact bar and conditioning disk under the effect of external force, probe in gas exhaust duct and to move up and down together with the axial length of conditioning disk, cleaning gas exhaust duct inwall.Conditioning disk 6 is step-like, and it consists of major diameter dish and minor diameter dish, and major diameter dish is positioned at the centre hole of joint flange 3, and the diameter of major diameter dish mates with the centre hole internal diameter of upper joint flange; Minor diameter dish is positioned at the centre hole of lower joint flange 4, and the diameter of minor diameter dish mates with the centre hole internal diameter of lower joint flange.The step-like structure of conditioning disk can avoid volatile matter to enter in corrugated tube.The diameter of the major diameter dish of conditioning disk is less than gas exhaust duct diameter 1-2 millimeter.
Referring to Fig. 1, Fig. 2, at closure fange center, be provided with connecting hole 10-1, described impact bar lower end is provided with connected unit 7-1, and connected unit is threaded with connecting hole, impact bar and closure fange are fixed, prevented corrugated tube excessive sag under corrugated tube joint flange and closure fange effect.
Adopt design of the present utility model, once find that in single crystal growing furnace production process vapor pipe exhaust is not smooth, utilize the telescopic characteristic of corrugated tube, to closure fange, apply surging force, make impact bar drive conditioning disk to move up and down in gas exhaust duct, become flexible and be attached to the volatile matter on gas exhaust duct inwall, volatile matter is taken away in time with pump-line, prevent fouling obstruction gas exhaust duct.
Claims (4)
1. a single crystal growing furnace gas exhaust duct dredger, it is characterized in that: it is arranged on the gas exhaust duct bottom of single crystal growing furnace, described device is comprised of the cleaning mechanism that lays respectively at each gas exhaust duct bottom, each cleaning mechanism that overlaps same structure comprises respectively corrugated tube (5), conditioning disk (6) and the mutually upper joint flange (3) of docking, lower joint flange (4), the affixed upper joint flange in bottom of described each gas exhaust duct (2), the affixed corrugated tube of lower joint flange upper end, conditioning disk lower end is provided with impact bar, impact bar is positioned at corrugated tube, conditioning disk is positioned at, in the centre hole of lower joint flange, the affixed corrugated tube joint flange in described corrugated tube lower end (9), the affixed closure fange in corrugated tube joint flange bottom (10).
2. single crystal growing furnace gas exhaust duct dredger according to claim 1, is characterized in that, described closure fange center is provided with connecting hole (10-1), and described impact bar lower end is provided with connected unit (7-1), and connected unit is threaded with connecting hole.
3. single crystal growing furnace gas exhaust duct dredger according to claim 2, it is characterized in that, described conditioning disk (6) consists of major diameter dish and minor diameter dish, and major diameter dish is positioned at the centre hole of joint flange (3), and the diameter of major diameter dish mates with the centre hole internal diameter of upper joint flange; Minor diameter dish is positioned at the centre hole of lower joint flange (4), and the diameter of minor diameter dish mates with the centre hole internal diameter of lower joint flange.
4. single crystal growing furnace gas exhaust duct dredger according to claim 3, is characterized in that, the diameter of the major diameter dish of described conditioning disk is less than gas exhaust duct diameter 1-2 millimeter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420109254.2U CN203820930U (en) | 2014-03-12 | 2014-03-12 | Exhaust pipeline dredging device for single crystal furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420109254.2U CN203820930U (en) | 2014-03-12 | 2014-03-12 | Exhaust pipeline dredging device for single crystal furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203820930U true CN203820930U (en) | 2014-09-10 |
Family
ID=51476450
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420109254.2U Expired - Lifetime CN203820930U (en) | 2014-03-12 | 2014-03-12 | Exhaust pipeline dredging device for single crystal furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203820930U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106914460A (en) * | 2017-03-29 | 2017-07-04 | 天通吉成机器技术有限公司 | A kind of single crystal furnace vacuum pipeline method for cleaning |
| CN112301413A (en) * | 2019-07-29 | 2021-02-02 | 内蒙古中环光伏材料有限公司 | Exhaust system and exhaust method suitable for large-size single crystal |
-
2014
- 2014-03-12 CN CN201420109254.2U patent/CN203820930U/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106914460A (en) * | 2017-03-29 | 2017-07-04 | 天通吉成机器技术有限公司 | A kind of single crystal furnace vacuum pipeline method for cleaning |
| CN112301413A (en) * | 2019-07-29 | 2021-02-02 | 内蒙古中环光伏材料有限公司 | Exhaust system and exhaust method suitable for large-size single crystal |
| CN112301413B (en) * | 2019-07-29 | 2024-02-23 | 内蒙古中环光伏材料有限公司 | Exhaust system and exhaust method suitable for drawing large-size single crystals |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20170427 Address after: 055550 Ningjin County, Hebei Province, crystal street, No. 279, Patentee after: NINGJIN SONGGONG ELECTRONIC MATERIAL Co.,Ltd. Address before: 055550 Ningjin County, Hebei Province, crystal street, No. 267, Patentee before: NINGJIN SAIMEI GANGLONG ELECTRONIC MATERIALS CO.,LTD. |
|
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20190624 Address after: 014030 No. 21 Equipment Avenue, New Planning Area, Qingshan District Equipment Park, Baotou City, Inner Mongolia Autonomous Region Patentee after: BAOTOU JINGAO SOLAR ENERGY TECHNOLOGY Co.,Ltd. Address before: 055550 279 Jing Long Street, Ningjin County, Xingtai, Hebei. Patentee before: NINGJIN SONGGONG ELECTRONIC MATERIAL Co.,Ltd. |
|
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20140910 |