CN112291691A - Mems压电微扬声器、微扬声器单元及电子设备 - Google Patents

Mems压电微扬声器、微扬声器单元及电子设备 Download PDF

Info

Publication number
CN112291691A
CN112291691A CN202011255318.6A CN202011255318A CN112291691A CN 112291691 A CN112291691 A CN 112291691A CN 202011255318 A CN202011255318 A CN 202011255318A CN 112291691 A CN112291691 A CN 112291691A
Authority
CN
China
Prior art keywords
mems piezoelectric
speaker
microphone
micro
mems
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202011255318.6A
Other languages
English (en)
Chinese (zh)
Inventor
邹泉波
俞胜平
张丹阳
赖弘祥
王喆
宋青林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Goertek Microelectronics Inc
Original Assignee
Goertek Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Goertek Inc filed Critical Goertek Inc
Priority to CN202011255318.6A priority Critical patent/CN112291691A/zh
Publication of CN112291691A publication Critical patent/CN112291691A/zh
Priority to PCT/CN2021/129368 priority patent/WO2022100551A1/fr
Pending legal-status Critical Current

Links

Images

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/005—Electrostatic transducers using semiconductor materials
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/02—Loudspeakers
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R2201/00—Details of transducers, loudspeakers or microphones covered by H04R1/00 but not provided for in any of its subgroups
    • H04R2201/003—Mems transducers or their use

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Piezo-Electric Transducers For Audible Bands (AREA)
CN202011255318.6A 2020-11-11 2020-11-11 Mems压电微扬声器、微扬声器单元及电子设备 Pending CN112291691A (zh)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CN202011255318.6A CN112291691A (zh) 2020-11-11 2020-11-11 Mems压电微扬声器、微扬声器单元及电子设备
PCT/CN2021/129368 WO2022100551A1 (fr) 2020-11-11 2021-11-08 Micro haut-parleur piézoélectrique mems, unité de microhaut-parleur et dispositif électronique

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202011255318.6A CN112291691A (zh) 2020-11-11 2020-11-11 Mems压电微扬声器、微扬声器单元及电子设备

Publications (1)

Publication Number Publication Date
CN112291691A true CN112291691A (zh) 2021-01-29

Family

ID=74399327

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202011255318.6A Pending CN112291691A (zh) 2020-11-11 2020-11-11 Mems压电微扬声器、微扬声器单元及电子设备

Country Status (2)

Country Link
CN (1) CN112291691A (fr)
WO (1) WO2022100551A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022100551A1 (fr) * 2020-11-11 2022-05-19 歌尔微电子股份有限公司 Micro haut-parleur piézoélectrique mems, unité de microhaut-parleur et dispositif électronique
WO2023116395A1 (fr) * 2021-12-23 2023-06-29 歌尔微电子股份有限公司 Circuit acoustique intégré d'émission et de réception, puce acoustique et procédé de commande associé, et dispositif habitronique

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2412341Y (zh) * 2000-03-31 2000-12-27 清华大学 用于微麦克风和扬声器的悬臂式振膜结构
CN102595280A (zh) * 2012-01-18 2012-07-18 精拓丽音科技（北京）有限公司 一种带传感器反馈及驱动电路的扬声器集成系统
CN106488366A (zh) * 2015-08-27 2017-03-08 悠声股份有限公司 具有位置传感器的mems扬声器
CN108370483A (zh) * 2015-12-15 2018-08-03 罗伯特·博世有限公司 确定具有电容电极和压电电极的mems麦克风的绝对灵敏度的系统和方法
US20200344555A1 (en) * 2016-02-29 2020-10-29 Vesper Technologies Inc. A piezoelectric mems device for producing a signal indicative of detection of an acoustic stimulus

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014160948A (ja) * 2013-02-20 2014-09-04 Funai Electric Co Ltd イヤホンマイク
CN204906666U (zh) * 2015-07-31 2015-12-23 歌尔声学股份有限公司 一种扬声器模组
KR20200022164A (ko) * 2018-08-22 2020-03-03 주식회사 아모텍 센싱 기능을 갖는 압전 액추에이터 스피커
CN112291691A (zh) * 2020-11-11 2021-01-29 歌尔股份有限公司 Mems压电微扬声器、微扬声器单元及电子设备

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2412341Y (zh) * 2000-03-31 2000-12-27 清华大学 用于微麦克风和扬声器的悬臂式振膜结构
CN102595280A (zh) * 2012-01-18 2012-07-18 精拓丽音科技（北京）有限公司 一种带传感器反馈及驱动电路的扬声器集成系统
CN106488366A (zh) * 2015-08-27 2017-03-08 悠声股份有限公司 具有位置传感器的mems扬声器
CN108370483A (zh) * 2015-12-15 2018-08-03 罗伯特·博世有限公司 确定具有电容电极和压电电极的mems麦克风的绝对灵敏度的系统和方法
US20200344555A1 (en) * 2016-02-29 2020-10-29 Vesper Technologies Inc. A piezoelectric mems device for producing a signal indicative of detection of an acoustic stimulus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022100551A1 (fr) * 2020-11-11 2022-05-19 歌尔微电子股份有限公司 Micro haut-parleur piézoélectrique mems, unité de microhaut-parleur et dispositif électronique
WO2023116395A1 (fr) * 2021-12-23 2023-06-29 歌尔微电子股份有限公司 Circuit acoustique intégré d'émission et de réception, puce acoustique et procédé de commande associé, et dispositif habitronique

Also Published As

Publication number Publication date
WO2022100551A1 (fr) 2022-05-19

Similar Documents

Publication Publication Date Title
CN107690116B (zh) Mems麦克风组件
JP5325555B2 (ja) マイクロホンユニット
US9602930B2 (en) Dual diaphragm microphone
JP5200737B2 (ja) 差動マイクロホンユニット
JP4779002B2 (ja) Ｐｃｂに音孔が形成されたｍｅｍｓマイクロホンパッケージ
US20100322451A1 (en) MEMS Microphone
US20120300969A1 (en) Microphone unit and voice input device comprising same
CN109413554B (zh) 一种指向性mems麦克风
JP2010136132A (ja) 音声入力装置
US20130028459A1 (en) Monolithic Silicon Microphone
WO2022100551A1 (fr) Micro haut-parleur piézoélectrique mems, unité de microhaut-parleur et dispositif électronique
KR101612851B1 (ko) 초소형 보청기
US11895452B2 (en) Bone conduction microphone
CN211702390U (zh) Mems麦克风和电子产品
US20150189443A1 (en) Silicon Condenser Microphone
KR102117325B1 (ko) 지향성 멤스 마이크로폰 및 이를 포함하는 멤스 마이크로폰 모듈
KR101493335B1 (ko) 단일지향성 멤스 마이크로폰 및 멤스 소자
KR20090053721A (ko) 마이크로폰 시스템, 소리 입력 장치 및 그 제조 방법
US20140367810A1 (en) Open Cavity Substrate in a MEMS Microphone Assembly and Method of Manufacturing the Same
US9420365B2 (en) Silicon condenser microphone
JP2010212904A (ja) マイクロホンユニット
JP4812378B2 (ja) コンデンサマイクロホン
CN116762360A (zh) 声音和振动传感器
CN117616287A (zh) 具有压电读出的紧凑型振动传感器
US11202138B2 (en) Miniature high performance MEMS piezoelectric transducer for in-ear applications

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
TA01 Transfer of patent application right
TA01 Transfer of patent application right

Effective date of registration: 20210706

Address after: 266101 f / F, phase II, Qingdao International Innovation Park, 1 Keyuan Weiyi Road, Laoshan District, Qingdao City, Shandong Province

Applicant after: Geer Microelectronics Co.,Ltd.

Address before: 261031 No. 268 Dongfang Road, Weifang hi tech Development Zone, Shandong, China

Applicant before: GOERTEK Inc.

RJ01 Rejection of invention patent application after publication
RJ01 Rejection of invention patent application after publication

Application publication date: 20210129