CN112289875A - 一种双掺杂谐振腔单行载流子光电二极管 - Google Patents
一种双掺杂谐振腔单行载流子光电二极管 Download PDFInfo
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- CN112289875A CN112289875A CN202011179317.8A CN202011179317A CN112289875A CN 112289875 A CN112289875 A CN 112289875A CN 202011179317 A CN202011179317 A CN 202011179317A CN 112289875 A CN112289875 A CN 112289875A
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- 238000010521 absorption reaction Methods 0.000 claims abstract description 31
- 230000003647 oxidation Effects 0.000 claims abstract description 23
- 238000007254 oxidation reaction Methods 0.000 claims abstract description 23
- 239000000463 material Substances 0.000 claims abstract description 14
- 238000000034 method Methods 0.000 claims abstract description 12
- 230000008569 process Effects 0.000 claims abstract description 8
- 239000002184 metal Substances 0.000 claims description 39
- 238000009792 diffusion process Methods 0.000 claims description 10
- 230000004888 barrier function Effects 0.000 claims description 9
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 6
- 229910000530 Gallium indium arsenide Inorganic materials 0.000 claims description 4
- 238000002310 reflectometry Methods 0.000 claims description 4
- 230000005540 biological transmission Effects 0.000 claims description 3
- 229910052757 nitrogen Inorganic materials 0.000 claims description 3
- 238000003780 insertion Methods 0.000 claims description 2
- 230000037431 insertion Effects 0.000 claims description 2
- 238000009413 insulation Methods 0.000 claims 1
- 230000005684 electric field Effects 0.000 abstract description 9
- 230000004044 response Effects 0.000 abstract description 9
- 230000003071 parasitic effect Effects 0.000 abstract description 3
- 230000009286 beneficial effect Effects 0.000 abstract 1
- 239000000969 carrier Substances 0.000 description 8
- 230000000694 effects Effects 0.000 description 6
- 238000010586 diagram Methods 0.000 description 3
- 239000013307 optical fiber Substances 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 230000031700 light absorption Effects 0.000 description 2
- 239000006096 absorbing agent Substances 0.000 description 1
- 238000007792 addition Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 238000003331 infrared imaging Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 230000001443 photoexcitation Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0232—Optical elements or arrangements associated with the device
- H01L31/02327—Optical elements or arrangements associated with the device the optical elements being integrated or being directly associated to the device, e.g. back reflectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/0352—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their shape or by the shapes, relative sizes or disposition of the semiconductor regions
- H01L31/035272—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their shape or by the shapes, relative sizes or disposition of the semiconductor regions characterised by at least one potential jump barrier or surface barrier
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
- H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by potential barriers, e.g. phototransistors
- H01L31/101—Devices sensitive to infrared, visible or ultraviolet radiation
- H01L31/102—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier
- H01L31/109—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier the potential barrier being of the PN heterojunction type
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- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Light Receiving Elements (AREA)
Abstract
Description
Claims (8)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202011179317.8A CN112289875A (zh) | 2020-10-29 | 2020-10-29 | 一种双掺杂谐振腔单行载流子光电二极管 |
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CN202011179317.8A CN112289875A (zh) | 2020-10-29 | 2020-10-29 | 一种双掺杂谐振腔单行载流子光电二极管 |
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CN112289875A true CN112289875A (zh) | 2021-01-29 |
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CN202011179317.8A Pending CN112289875A (zh) | 2020-10-29 | 2020-10-29 | 一种双掺杂谐振腔单行载流子光电二极管 |
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Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5315128A (en) * | 1993-04-30 | 1994-05-24 | At&T Bell Laboratories | Photodetector with a resonant cavity |
US5389797A (en) * | 1993-02-24 | 1995-02-14 | The United States Of America As Represented By The Secretary Of The Department Of Energy | Photodetector with absorbing region having resonant periodic absorption between reflectors |
US5978401A (en) * | 1995-10-25 | 1999-11-02 | Honeywell Inc. | Monolithic vertical cavity surface emitting laser and resonant cavity photodetector transceiver |
CN105390556A (zh) * | 2015-11-09 | 2016-03-09 | 中国科学院上海微系统与信息技术研究所 | 一种用于单行载流子光电二极管的吸收区结构 |
CN106784123A (zh) * | 2016-11-23 | 2017-05-31 | 苏州苏纳光电有限公司 | 单行载流子光电探测器及其制作方法 |
CN109273552A (zh) * | 2018-08-31 | 2019-01-25 | 东南大学 | 一种单行载流子光电混频器及电磁波相控阵天线接收前端 |
CN110544732A (zh) * | 2019-08-29 | 2019-12-06 | 北京邮电大学 | 一种单行载流子光电二极管 |
-
2020
- 2020-10-29 CN CN202011179317.8A patent/CN112289875A/zh active Pending
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5389797A (en) * | 1993-02-24 | 1995-02-14 | The United States Of America As Represented By The Secretary Of The Department Of Energy | Photodetector with absorbing region having resonant periodic absorption between reflectors |
US5315128A (en) * | 1993-04-30 | 1994-05-24 | At&T Bell Laboratories | Photodetector with a resonant cavity |
US5978401A (en) * | 1995-10-25 | 1999-11-02 | Honeywell Inc. | Monolithic vertical cavity surface emitting laser and resonant cavity photodetector transceiver |
CN105390556A (zh) * | 2015-11-09 | 2016-03-09 | 中国科学院上海微系统与信息技术研究所 | 一种用于单行载流子光电二极管的吸收区结构 |
CN106784123A (zh) * | 2016-11-23 | 2017-05-31 | 苏州苏纳光电有限公司 | 单行载流子光电探测器及其制作方法 |
CN109273552A (zh) * | 2018-08-31 | 2019-01-25 | 东南大学 | 一种单行载流子光电混频器及电磁波相控阵天线接收前端 |
CN110544732A (zh) * | 2019-08-29 | 2019-12-06 | 北京邮电大学 | 一种单行载流子光电二极管 |
Non-Patent Citations (1)
Title |
---|
HOSSEINIFAR, M 等: "Microring-Based Unitraveling Carrier Photodiodes for High Bandwidth-Efficiency Product Photodetection in Optical Communication", 《JOURNAL OF LIGHTWAVE TECHNOLOGY》 * |
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Inventor after: Hao Ran Inventor after: Zhen Zheng Inventor after: Wang Sanfei Inventor after: Tang Kaida Inventor after: Jiang Huaqing Inventor after: Shi Yan Inventor after: Jin Shangzhong Inventor before: Hao Ran Inventor before: Wang Sanfei Inventor before: Zhen Zheng Inventor before: Tang Kaida Inventor before: Jiang Huaqing Inventor before: Shi Yan Inventor before: Jin Shangzhong |
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