CN112262522B - 线性电动机、运输设备和生产设备 - Google Patents

线性电动机、运输设备和生产设备 Download PDF

Info

Publication number
CN112262522B
CN112262522B CN201980039278.0A CN201980039278A CN112262522B CN 112262522 B CN112262522 B CN 112262522B CN 201980039278 A CN201980039278 A CN 201980039278A CN 112262522 B CN112262522 B CN 112262522B
Authority
CN
China
Prior art keywords
unit
core
side core
excitation
movable element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201980039278.0A
Other languages
English (en)
Chinese (zh)
Other versions
CN112262522A (zh
Inventor
中正治
铃木纪博
出口哲
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority claimed from PCT/JP2019/023109 external-priority patent/WO2019240132A1/ja
Publication of CN112262522A publication Critical patent/CN112262522A/zh
Application granted granted Critical
Publication of CN112262522B publication Critical patent/CN112262522B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02KDYNAMO-ELECTRIC MACHINES
    • H02K41/00Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02Linear motors; Sectional motors
    • H02K41/03Synchronous motors; Motors moving step by step; Reluctance motors
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02KDYNAMO-ELECTRIC MACHINES
    • H02K41/00Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02Linear motors; Sectional motors
    • H02K41/03Synchronous motors; Motors moving step by step; Reluctance motors
    • H02K41/031Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02KDYNAMO-ELECTRIC MACHINES
    • H02K7/00Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
    • H02K7/06Means for converting reciprocating motion into rotary motion or vice versa
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02PCONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
    • H02P25/00Arrangements or methods for the control of AC motors characterised by the kind of AC motor or by structural details
    • H02P25/02Arrangements or methods for the control of AC motors characterised by the kind of AC motor or by structural details characterised by the kind of motor
    • H02P25/06Linear motors
    • H02P25/064Linear motors of the synchronous type
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02PCONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
    • H02P6/00Arrangements for controlling synchronous motors or other dynamo-electric motors using electronic commutation dependent on the rotor position; Electronic commutators therefor
    • H02P6/006Controlling linear motors
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02KDYNAMO-ELECTRIC MACHINES
    • H02K2213/00Specific aspects, not otherwise provided for and not covered by codes H02K2201/00 - H02K2211/00
    • H02K2213/03Machines characterised by numerical values, ranges, mathematical expressions or similar information
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02KDYNAMO-ELECTRIC MACHINES
    • H02K9/00Arrangements for cooling or ventilating
    • H02K9/22Arrangements for cooling or ventilating by solid heat conducting material embedded in, or arranged in contact with, the stator or rotor, e.g. heat bridges

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Linear Motors (AREA)
  • Non-Mechanical Conveyors (AREA)
CN201980039278.0A 2018-06-12 2019-06-11 线性电动机、运输设备和生产设备 Active CN112262522B (zh)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP2018112135 2018-06-12
JP2018-112135 2018-06-12
JP2019107411A JP7271323B2 (ja) 2018-06-12 2019-06-07 リニアモータ、搬送装置、及び生産装置
JP2019-107411 2019-06-07
PCT/JP2019/023109 WO2019240132A1 (ja) 2018-06-12 2019-06-11 リニアモータ、搬送装置、及び生産装置

Publications (2)

Publication Number Publication Date
CN112262522A CN112262522A (zh) 2021-01-22
CN112262522B true CN112262522B (zh) 2024-05-07

Family

ID=68919716

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201980039278.0A Active CN112262522B (zh) 2018-06-12 2019-06-11 线性电动机、运输设备和生产设备

Country Status (4)

Country Link
US (1) US11843300B2 (https=)
JP (1) JP7271323B2 (https=)
KR (1) KR102593127B1 (https=)
CN (1) CN112262522B (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113001563A (zh) * 2021-03-10 2021-06-22 北京华能新锐控制技术有限公司 感应式电磁驱动巡检机器人
CN218829567U (zh) * 2022-11-29 2023-04-07 瑞声科技(南京)有限公司 多动子直驱传输系统
WO2025199626A1 (en) * 2024-03-27 2025-10-02 Ats Corporation Electromagnetic motor conveyor track section with modular electronics

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62203550A (ja) * 1986-02-28 1987-09-08 Toshiro Higuchi リニアステツプモ−タ
KR20120102435A (ko) * 2011-03-08 2012-09-18 주식회사 성진로얄모션 선형 전동기
JP2013034385A (ja) * 2012-11-19 2013-02-14 Hitachi Ltd 推力発生機構
CN102986124A (zh) * 2010-07-12 2013-03-20 昕芙旎雅有限公司 可动铁芯型线性运动驱动器
WO2015056847A1 (en) * 2013-10-16 2015-04-23 Korea Electrotechnology Research Institute Magnetically levitated transportation apparatus
JP2015213394A (ja) * 2014-05-02 2015-11-26 キヤノン株式会社 搬送システム

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3818342B2 (ja) * 1997-10-06 2006-09-06 株式会社安川電機 リニアモータ
JP3945149B2 (ja) 2000-11-06 2007-07-18 株式会社日立製作所 リニアモータとその製造方法
JP3809381B2 (ja) 2002-01-28 2006-08-16 キヤノン株式会社 リニアモータ、ステージ装置、露光装置及びデバイス製造方法
JP2004146492A (ja) * 2002-10-23 2004-05-20 Canon Inc Euv露光装置
WO2006098500A1 (ja) * 2005-03-18 2006-09-21 Rigaku Corporation 磁気装置
JP2009005516A (ja) 2007-06-22 2009-01-08 Mitsubishi Electric Corp ブレーキ装置
KR102192244B1 (ko) * 2013-12-30 2020-12-17 삼성디스플레이 주식회사 기판 이송장치
JP6028013B2 (ja) * 2014-12-25 2016-11-16 Thk株式会社 リニアモータ
JP6740088B2 (ja) * 2016-11-07 2020-08-12 キヤノン株式会社 リニアモータ
DE102019211986B4 (de) * 2019-08-09 2025-07-31 Physik Instrumente (PI) SE & Co KG Magnetische Führungsvorrichtung

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62203550A (ja) * 1986-02-28 1987-09-08 Toshiro Higuchi リニアステツプモ−タ
CN102986124A (zh) * 2010-07-12 2013-03-20 昕芙旎雅有限公司 可动铁芯型线性运动驱动器
KR20120102435A (ko) * 2011-03-08 2012-09-18 주식회사 성진로얄모션 선형 전동기
JP2013034385A (ja) * 2012-11-19 2013-02-14 Hitachi Ltd 推力発生機構
WO2015056847A1 (en) * 2013-10-16 2015-04-23 Korea Electrotechnology Research Institute Magnetically levitated transportation apparatus
JP2015213394A (ja) * 2014-05-02 2015-11-26 キヤノン株式会社 搬送システム

Also Published As

Publication number Publication date
KR102593127B1 (ko) 2023-10-24
US11843300B2 (en) 2023-12-12
JP2019216591A (ja) 2019-12-19
CN112262522A (zh) 2021-01-22
JP7271323B2 (ja) 2023-05-11
US20210099067A1 (en) 2021-04-01
KR20210008041A (ko) 2021-01-20

Similar Documents

Publication Publication Date Title
CN101978585B (zh) 多自由度传动装置以及载物台装置
CN112262522B (zh) 线性电动机、运输设备和生产设备
KR20250060934A (ko) 이송 장치 및 이송 장치를 제조하는 방법
JP2002064968A (ja) 可動コイル型リニアモータを内蔵したスライド装置
US7239049B2 (en) Moving magnet type linear actuator
EP0421529B1 (en) Linear motor and positioning device comprising at least one linear motor
TWI505608B (zh) Linear motors and platform devices
US20240283345A1 (en) Double-sided linear motor
WO2005062447A1 (ja) ムービングマグネット形リニアアクチュエータ
US20240055970A1 (en) Linear motor, transport apparatus, and production apparatus
JP4321033B2 (ja) リニアモータ装置
CN108011489B (zh) 多单元微行程音圈直线电机
JP2018078668A (ja) リニアモータ
JPH0522924A (ja) 平面モータ装置
JPH0741992B2 (ja) 磁気浮上搬送装置
JP4438372B2 (ja) 可動磁石形リニアアクチュエータ
JP3793871B2 (ja) ステージ装置
JP2002096233A (ja) リニアスライダ
JP2004064874A (ja) 高加速度形リニアモータ
JP2004350419A (ja) リニアモータ
JP2020178529A (ja) リニアモータおよび物品の製造方法
JPH0615441Y2 (ja) 磁気浮上装置
JP2000099152A (ja) Xy軸ヘッド位置決め装置
JPH04181705A (ja) コイル作動方法およびコイル構造体

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant