CN112134125A - Device and method for generating ultraviolet light based on sum frequency amplified by fundamental frequency - Google Patents
Device and method for generating ultraviolet light based on sum frequency amplified by fundamental frequency Download PDFInfo
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- 238000000034 method Methods 0.000 title claims abstract description 34
- 239000013078 crystal Substances 0.000 claims abstract description 100
- 238000006243 chemical reaction Methods 0.000 claims abstract description 25
- 229910009372 YVO4 Inorganic materials 0.000 claims abstract description 12
- 239000004065 semiconductor Substances 0.000 claims abstract description 6
- 238000005086 pumping Methods 0.000 claims abstract description 5
- 230000003321 amplification Effects 0.000 claims description 13
- 238000003199 nucleic acid amplification method Methods 0.000 claims description 13
- 230000000694 effects Effects 0.000 claims description 10
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 238000010521 absorption reaction Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000007547 defect Effects 0.000 description 2
- 229910013321 LiB3O5 Inorganic materials 0.000 description 1
- JNDMLEXHDPKVFC-UHFFFAOYSA-N aluminum;oxygen(2-);yttrium(3+) Chemical compound [O-2].[O-2].[O-2].[Al+3].[Y+3] JNDMLEXHDPKVFC-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000002860 competitive effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 229910019655 synthetic inorganic crystalline material Inorganic materials 0.000 description 1
- QWVYNEUUYROOSZ-UHFFFAOYSA-N trioxido(oxo)vanadium;yttrium(3+) Chemical compound [Y+3].[O-][V]([O-])([O-])=O QWVYNEUUYROOSZ-UHFFFAOYSA-N 0.000 description 1
- 229910019901 yttrium aluminum garnet Inorganic materials 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
- H01S3/0092—Nonlinear frequency conversion, e.g. second harmonic generation [SHG] or sum- or difference-frequency generation outside the laser cavity
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/09—Processes or apparatus for excitation, e.g. pumping
- H01S3/091—Processes or apparatus for excitation, e.g. pumping using optical pumping
- H01S3/094—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light
- H01S3/0941—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light of a laser diode
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/106—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity
- H01S3/108—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity using non-linear optical devices, e.g. exhibiting Brillouin or Raman scattering
- H01S3/109—Frequency multiplication, e.g. harmonic generation
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- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
Abstract
The invention relates to a laser light source, aiming at solving the problem of the selection limitation of frequency doubling 532nm crystals in the traditional method for generating 266nm 2+2 and ensuring the conversion efficiency of 266nm, the invention discloses a device and a method for generating ultraviolet light based on sum frequency amplified by base frequency, wherein after laser pulse passes through frequency doubling crystals and a color mirror, the residual 1064nm base frequency light is reflected by the color mirror and then enters Nd: YVO4Crystal, pumping light output by 808nm semiconductor pump laser pumps Nd: YVO through dichroic mirror4Crystal, the rest 1064nm basic frequency light passes through the Nd: YVO4The crystal is incident to the dichroic mirror after being amplified and then is incident to the frequency tripling crystal after being transmitted; 532nm frequency doubling light reaches the double-color mirror after being reflected by the reflecting mirror and then is reflected to the frequency tripling crystal to generate 355nm ultraviolet light. The invention is mainlyThe method is applied to design and manufacture occasions.
Description
Technical Field
The invention relates to a laser light source, in particular to a high-power ultraviolet laser light source, and particularly relates to a device and a method for generating ultraviolet light based on sum frequency amplified by fundamental frequency.
Background
The ultraviolet laser has excellent performances of high single photon energy, concentrated energy, high resolution ratio and the like, is widely applied to high-precision mechanical part processing, material detection and biomedical technology, and has great market prospect and development potential. Therefore, the development of a high-stability and high-efficiency ultraviolet picosecond laser light source is an important direction for researchers to pay attention at present.
At present, because no gain medium directly generating ultraviolet wave band exists, ultraviolet laser is mainly obtained by utilizing laser with 1 micron wave band through nonlinear frequency conversion. The traditional commonly used method for generating ultraviolet 266nm is to quadruple frequency at 1064nm by using a nonlinear crystal. Typically, neodymium-doped yttrium vanadate (Nd: YVO)4) Or a neodymium-doped yttrium aluminum garnet (Nd: YAG) crystal generates 1064nm fundamental frequency light, then green light with the wavelength of 532nm is generated by frequency multiplication of a nonlinear crystal (2), then the fundamental frequency light is filtered by a dichroic mirror (12), and then the green light with the wavelength of 532nm is multiplied by a quadruple frequency crystal (11) to generate 266nm, namely the traditional quadruple frequency method of 2+ 2. 2013, Yosuke Orii et al, using 15mm LiB3O5(LBO) frequency doubling and 15mm CsLiB6O10(CLBO) quadruple frequency gives picosecond laser light with a single pulse energy of 45 μ J and a total conversion efficiency of 30%. In the same year as the above-mentioned publication,
et al use beta-BaB2O4(BBO) crystal quadruple frequency obtains picosecond laser with average power of 530mW, and the total conversion efficiency is 22.7%. The nonlinear crystal used for doubling frequency of 532nm needs larger refractive index difference, so the crystal selection is limited, and compared with competitive crystals, BBO and CLBO have larger defects. The BBO crystal is easy to degrade under the irradiation of ultraviolet light, and has high two-photon absorption and a very small allowable angle; CLBO crystals are extremely deliquescent, require special handling and are expensive. However, at present, no nonlinear crystal with better performance is used for doubling the frequency of 532nm, so a more appropriate nonlinear frequency conversion method needs to be found to improve the selection space of the nonlinear crystal and improve the conversion efficiency of 266 nm.
Disclosure of Invention
In order to overcome the defects of the prior art, the invention aims to solve the problem of selection limitation of frequency doubling 532nm crystals in the traditional method for generating 2+2 of 266nm, ensure the conversion efficiency of 266nm and provide a device and a method for improving the output efficiency of generating ultraviolet 266nm based on fundamental frequency amplification and sum frequency. For this purpose,the invention adopts the technical scheme that a fundamental frequency amplification-based sum frequency ultraviolet light generating device has the following structure: laser pulses output by a 1064nm laser pass through a frequency doubling crystal to generate 532nm frequency doubling light and residual 1064nm basic frequency light, after the 532nm frequency doubling light and the residual 1064nm pass through a dichroic mirror, the 532nm frequency doubling light is separated from the residual 1064nm, the 532nm frequency doubling light is transmitted, and the residual 1064nm basic frequency light is reflected; the rest 1064nm fundamental frequency light is reflected by the dichroic mirror and then enters Nd: YVO4Crystal, pumping light output by 808nm semiconductor pump laser pumps Nd: YVO through dichroic mirror4Crystal, the rest 1064nm basic frequency light passes through the Nd: YVO4The crystal is incident to the dichroic mirror after being amplified and then is incident to the frequency tripling crystal after being transmitted; 532nm frequency doubling light reaches the double-color mirror after being reflected by the reflecting mirror and then is reflected to the triple frequency doubling crystal, and the sum frequency effect is generated with amplified 1064nm light to generate 355nm ultraviolet light; and the residual 1064nm fundamental light after frequency tripling and 355nm ultraviolet light generated by frequency tripling are incident into a quadruple frequency crystal to generate a sum frequency effect, so that 266nm ultraviolet light is generated.
The output pulse width of the 1064nm laser is in the picosecond or nanosecond range.
The frequency doubling crystal is a nonlinear crystal which doubles frequency of 1064nm to 532 nm; the frequency tripling crystal is a nonlinear crystal which generates 355nm by carrying out frequency summation of 1064nm and 532 nm; the quadruple frequency crystal is a nonlinear crystal which generates 266nm by carrying out frequency summation of 1064nm and 355 nm.
Based on the fundamental frequency amplification sum frequency ultraviolet light generation method, after 532nm light generated by frequency multiplication reaches the highest efficiency, 1064nm fundamental frequency light is separated and amplified, so that 532nm frequency multiplication light and 1064nm fundamental frequency light with the highest power are obtained simultaneously; then, 532nm frequency doubling light and amplified 1064nm fundamental frequency light are incident to a frequency tripling crystal for conversion; then 1064nm and the triple frequency 355nm are incident into the quadruple frequency crystal according to a certain photon number ratio to generate 266nm ultraviolet light.
The invention has the characteristics and beneficial effects that:
the invention adopts the sum frequency of 2+1+1 to generate 266nm, and separates out 1064nm fundamental frequency light for amplification after the frequency doubling of 2. According to the invention, crystals such as LBO and BBO can be used in the sum frequency process, and the selection limitation of BBO and CLBO is broken through. And the problem that the conversion efficiency is reduced due to the excessively low residual energy of the 1064nm fundamental frequency light in the sum frequency process can be effectively solved, the power of the 1064nm fundamental frequency light is improved while the 532nm frequency doubling light power is ensured, so that the conversion efficiency of 266nm is improved, and meanwhile, the lengths of the triple frequency and quadruple frequency LBO crystals can be shortened, so that the influence of absorption and walk-off effects on 266nm laser pulses is reduced, and the beam quality is improved. The method is simple to operate, scientific and effective and high in practicability.
1. The invention can simultaneously obtain frequency doubling light with the highest power and base frequency light with higher power, thereby effectively improving the conversion efficiency of triple frequency and quadruple frequency;
2. the invention can effectively reduce the risk of nonlinear crystal damage and can realize the high-efficiency output of 266nm ultraviolet light under the condition of 355nm incidence with lower power;
3. the invention can effectively reduce the optimal length of the triple frequency and the quadruple frequency, thereby reducing the influence of time walk-off and space walk-off on the conversion efficiency and improving the quality of output light beams;
4. the components adopted by the invention are very easy to obtain, the operation is simple, and the conversion efficiency can be effectively improved at low cost.
Description of the drawings:
FIG. 1 is a simplified diagram of a fundamental amplification-based sum frequency generation UV 266nm output efficiency enhancement system.
FIG. 2 is a diagram of a conventional "2 + 2" to 266 nm.
Detailed Description
The invention aims to solve the problem of selection limitation of frequency doubling 532nm crystals in the traditional method for generating 2+2 of 266nm, ensure the conversion efficiency of 266nm and provide a method for improving the output efficiency of generating ultraviolet 266nm based on fundamental frequency amplification sum frequency. The invention adopts the sum frequency of 2+1+1 to generate 266nm, and separates out 1064nm fundamental frequency light for amplification after the frequency doubling of 2. According to the method, crystals such as LBO and BBO can be used in the sum frequency process, and the selection limit of BBO and CLBO is broken through. And the problem that the conversion efficiency is reduced due to the excessively low residual energy of the 1064nm fundamental frequency light in the sum frequency process can be effectively solved, the power of the 1064nm fundamental frequency light is improved while the 532nm frequency doubling light power is ensured, so that the conversion efficiency of 266nm is improved, and meanwhile, the lengths of the triple frequency and quadruple frequency LBO crystals can be shortened, so that the influence of absorption and walk-off effects on 266nm laser pulses is reduced, and the beam quality is improved. The method is simple to operate, scientific and effective and high in practicability.
The technical solution of the invention is as follows:
532nm frequency doubling light and residual 1064nm fundamental frequency light are generated after laser pulses output by the 1064nm laser pass through a proper frequency doubling crystal, the frequency doubling efficiency can be adjusted to be highest, after the 532nm and the residual 1064nm pass through a dichroic mirror, the 532nm and the 1064nm are separated, the 532nm frequency doubling light is transmitted, and the residual 1064nm fundamental frequency light is reflected;
the residual 1064nm fundamental frequency light is reflected by the dichroic mirror and then enters the Nd: YVO4The pumping light output by the 808nm semiconductor pump laser pumps the Nd: YVO through the dichroic mirror4And (4) crystals. YVO is generated by passing 1064nm fundamental frequency light through Nd4The crystal is incident to the dichroic mirror after being amplified and then is incident to the frequency tripling crystal after being transmitted;
the 532nm frequency doubling light reaches the double-color mirror after being reflected by the reflecting mirror and then is reflected to the triple frequency doubling crystal, and the sum frequency effect is generated with the amplified 1064nm light to generate 355nm ultraviolet light;
and fourthly, enabling the residual 1064nm fundamental frequency light after the frequency tripling and 355nm ultraviolet light generated by the frequency tripling to enter a quadruple frequency crystal to generate a sum frequency effect and generate 266nm ultraviolet light.
The method of claim 1, wherein the output pulse width of the 1064nm laser is in the picosecond range or in the nanosecond range.
Sixthly, the frequency doubling crystal is a nonlinear crystal such as LBO or BBO crystal and the like which can double frequency 1064nm to 532nm
The frequency tripling crystal is LBO or BBO crystal and the like, and can generate 355nm nonlinear crystal by frequency summation of 1064nm and 532 nm.
The quadruple frequency crystal is LBO or BBO crystal and the like, and 1064nm and 355nm sum frequency can be carried out to generate a 266nm nonlinear crystal.
Ninthly, the 808nm pump laser can be 878nm or 885nm and can be used as pump Nd: YVO4Other wavelength lasers of the crystal.
The principle of the invention is as follows:
in the process of generating 266nm by sum frequency, the traditional process of generating 266nm by 532nm frequency doubling is split into two times of sum frequency of fundamental frequency light with 1064nm, thus reducing the requirement on the refractive index difference of nonlinear crystals, and further using the crystal sum frequency of LBO, BBO and the like. The 1064nm fundamental frequency light participates in each sum frequency process in the process of generating the ultraviolet 266nm laser, and the power of 1064nm determines the conversion rate of 532nm-355nm and 355nm-266nm, namely the optimal crystal length corresponding to the highest conversion efficiency. The 532nm output power determines the highest 355nm output power, which in turn determines the final 266nm output power. Therefore, no method for generating 266nm by '2 +1+ 1' without fundamental frequency amplification and simultaneously giving consideration to the power of 1064nm fundamental frequency light and 532nm frequency doubling light is available, and the conversion efficiency is low.
The fundamental frequency light 1064nm is easily obtained in the nonlinear frequency conversion process, so that the fundamental frequency light 1064nm is separated and amplified after the frequency doubling generation of 532nm reaches the maximum efficiency, and the 532nm frequency doubling light with the maximum power and the 1064nm fundamental frequency light with the larger power can be simultaneously obtained. Then, 532nm frequency doubling light and amplified 1064nm fundamental frequency light are incident to the frequency tripling crystal, so that high conversion efficiency can be realized, and high conversion efficiency can be realized under the condition of short crystal length. And then, the rest 1064nm and the triple frequency 355nm are incident into the quadruple frequency crystal according to a certain photon number ratio to generate 266nm, so that high conversion efficiency can be realized.
The present invention will be described in further detail with reference to the accompanying drawings and specific embodiments.
FIG. 1 is a light path diagram of the method for improving the efficiency of generating ultraviolet 266nm output by sum frequency based on fundamental frequency amplification, and the main innovation of the invention lies in that the sum frequency generates 266nm passingThe 1064nm fundamental frequency light left after frequency doubling in the process is amplified to improve the conversion rate, long-term stability and output efficiency generated by 266 nm. As can be seen, the adopted devices comprise a 1064nm laser, a frequency doubling crystal, a dichroic mirror, a 808nm semiconductor pump laser, and Nd: YVO4Crystal, reflector, frequency tripling crystal and frequency quadrupling crystal.
1. The method comprises the following steps:
532nm frequency doubling light and residual 1064nm fundamental frequency light are generated after laser pulses output by the 1064nm laser (1) pass through a proper frequency doubling crystal (2), the frequency doubling efficiency can be adjusted to be highest, after the 532nm and the residual 1064nm pass through a dichroic mirror (3), the 532nm and the 1064nm are separated, the 532nm frequency doubling light is transmitted, and the residual 1064nm fundamental frequency light is reflected;
the residual 1064nm fundamental frequency light is reflected by the dichroic mirror (3), reflected by the dichroic mirror (4) again and enters the Nd: YVO4A crystal (5), wherein the pumping light output by the 808nm semiconductor pump laser (6) pumps the Nd: YVO through the dichroic mirror (4)4And (5) a crystal. YVO is generated by passing 1064nm fundamental frequency light through Nd4The crystal is incident to the dichroic mirror (7) after being amplified and then is incident to the frequency tripling crystal (8) after being transmitted;
the 532nm frequency doubling light reaches the dichroic mirror (7) after being reflected by the reflecting mirror (9), is reflected to the frequency tripling crystal (8), and generates sum frequency effect with amplified 1064nm to generate 355nm ultraviolet light;
and fourthly, the residual 1064nm fundamental frequency light after the frequency tripling and 355nm ultraviolet light generated by the frequency tripling are incident into a quadruple frequency crystal (10) to generate sum frequency effect and 266nm ultraviolet light.
2. The method according to claim 1, characterized in that the output pulse width of the 1064nm laser (1) is of the order of picoseconds or nanoseconds.
3. The 808nm pump laser (6) can be 878nm or 885nm and the like and can be used as pump Nd: YVO4Other wavelengths of the crystal (5).
4. The method of claim 1, wherein said step of removing is performed in a batch processThe rest 1064nm fundamental frequency light passes through the Nd: YVO4The amplified power of the crystal (5) is not less than 532nm of frequency-doubled optical power.
5. The frequency doubling crystal (2) is a nonlinear crystal such as LBO or BBO crystal which can double frequency 1064nm to 532 nm.
6. The frequency tripling (8) crystal is LBO or BBO crystal and the like, and can generate 355nm nonlinear crystal by frequency summation of 1064nm and 532 nm.
7. The quadruple frequency crystal (10) is LBO or BBO crystal and the like, and can generate a nonlinear crystal of 266nm by carrying out sum frequency of 1064nm and 355 nm.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents, improvements and the like that fall within the spirit and principle of the present invention are intended to be included therein.
Claims (4)
1. A fundamental frequency amplification-based sum frequency ultraviolet light generating device is characterized by comprising the following structures: laser pulses output by a 1064nm laser pass through a frequency doubling crystal to generate 532nm frequency doubling light and residual 1064nm basic frequency light, after the 532nm frequency doubling light and the residual 1064nm pass through a dichroic mirror, the 532nm frequency doubling light is separated from the residual 1064nm, the 532nm frequency doubling light is transmitted, and the residual 1064nm basic frequency light is reflected; the rest 1064nm fundamental frequency light is reflected by the dichroic mirror and then enters Nd: YVO4Crystal, pumping light output by 808nm semiconductor pump laser pumps Nd: YVO through dichroic mirror4Crystal, the rest 1064nm basic frequency light passes through the Nd: YVO4The crystal is incident to the dichroic mirror after being amplified and then is incident to the frequency tripling crystal after being transmitted; 532nm frequency doubling light reaches the double-color mirror after being reflected by the reflecting mirror and then is reflected to the triple frequency doubling crystal, and the sum frequency effect is generated with amplified 1064nm light to generate 355nm ultraviolet light; and the residual 1064nm fundamental light after frequency tripling and 355nm ultraviolet light generated by frequency tripling are incident into a quadruple frequency crystal to generate a sum frequency effect, so that 266nm ultraviolet light is generated.
2. The fundamental amplification based sum frequency ultraviolet light generating device as claimed in claim 1, wherein the output pulse width of the 1064nm laser is in the picosecond range or in the nanosecond range.
3. The fundamental frequency amplification based sum frequency generation ultraviolet light device as claimed in claim 1, wherein the frequency doubling crystal is a nonlinear crystal that doubles frequency of 1064nm to 532 nm; the frequency tripling crystal is a nonlinear crystal which generates 355nm by carrying out frequency summation of 1064nm and 532 nm; the quadruple frequency crystal is a nonlinear crystal which generates 266nm by carrying out frequency summation of 1064nm and 355 nm.
4. A method for generating ultraviolet light based on sum frequency amplification of fundamental frequency is characterized in that after 532nm light generated by frequency multiplication reaches the highest efficiency, 1064nm fundamental frequency light is separated and amplified, so that 532nm frequency multiplication light and 1064nm fundamental frequency light with the highest power are obtained simultaneously; then, 532nm frequency doubling light and amplified 1064nm fundamental frequency light are incident to a frequency tripling crystal for conversion; then 1064nm and the triple frequency 355nm are incident into the quadruple frequency crystal according to a certain photon number ratio to generate 266nm ultraviolet light.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114374139A (en) * | 2021-11-30 | 2022-04-19 | 天津大学佐治亚理工深圳学院 | Method for generating femtosecond deep ultraviolet laser based on compensation plate and laser |
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| JP2010054547A (en) * | 2008-08-26 | 2010-03-11 | Lasertec Corp | Ultraviolet laser device |
| CN110932079A (en) * | 2019-12-04 | 2020-03-27 | 富通尼激光科技（东莞）有限公司 | Generation device of fourth harmonic beam |
| CN111048982A (en) * | 2019-11-28 | 2020-04-21 | 北京科益虹源光电技术有限公司 | 355nm ultraviolet light output method and system |
| CN111106520A (en) * | 2019-11-28 | 2020-05-05 | 北京科益虹源光电技术有限公司 | 355nm laser |
-
2020
- 2020-09-22 CN CN202010999737.4A patent/CN112134125B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010054547A (en) * | 2008-08-26 | 2010-03-11 | Lasertec Corp | Ultraviolet laser device |
| CN111048982A (en) * | 2019-11-28 | 2020-04-21 | 北京科益虹源光电技术有限公司 | 355nm ultraviolet light output method and system |
| CN111106520A (en) * | 2019-11-28 | 2020-05-05 | 北京科益虹源光电技术有限公司 | 355nm laser |
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Non-Patent Citations (1)
| Title |
|---|
| D. G. NIKITIN: "Sum frequency generation of UV laser radiation at 266 nm in LBO crystal", OPTICS LETTERS, vol. 41, no. 7, 30 April 2016 (2016-04-30), pages 1660 - 1663 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN114374139A (en) * | 2021-11-30 | 2022-04-19 | 天津大学佐治亚理工深圳学院 | Method for generating femtosecond deep ultraviolet laser based on compensation plate and laser |
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