CN112124956A

CN112124956A - Multi-station double-sided transfer device and processing system

Info

Publication number: CN112124956A
Application number: CN201910555047.7A
Authority: CN
Inventors: 蔡志国; 江俊龙
Original assignee: Suzhou Weiying Laser Technology Co ltd
Current assignee: Suzhou Weiying Laser Technology Co ltd
Priority date: 2019-06-25
Filing date: 2019-06-25
Publication date: 2020-12-25

Abstract

The invention discloses a multi-station double-sided transfer device and a processing system, wherein the transfer device comprises a transfer station group and a manipulator group, the transfer station group at least comprises a feeding station, a first waiting station, a second waiting station and a discharging station, the feeding station is used for inputting workpieces, the first waiting station is used for placing the workpieces with the first faces to be processed, the second waiting station is used for placing the workpieces with the second faces to be processed, the discharging station is used for outputting the workpieces, the manipulator group comprises at least two manipulators, the manipulator group is used for overturning the workpieces and moving the workpieces among a plurality of stations, and the maximum displacement of any manipulator is two adjacent stations. The transfer device simplifies the double-sided treatment process, improves the double-sided treatment efficiency, has a simple structure, and can effectively shorten the travel distance and the operation time of the manipulator by setting the maximum displacement of any manipulator as two adjacent stations, thereby further improving the double-sided treatment efficiency.

Description

Multi-station double-sided transfer device and processing system

Technical Field

The invention relates to the field of processing equipment, in particular to a multi-station double-sided transfer device and a processing system.

Background

Currently, there are many fields related to double-sided processing of workpieces, for example, in an exposure process of a PCB (printed Circuit board) production process, exposure processing is required on both sides of a PCB board to form a Circuit board having a double-sided printed wiring.

In the prior art, in order to realize double-sided exposure of a PCB, a transfer device is required to overturn two sides of a PCB workpiece and convey the PCB workpiece among a plurality of stations, and the existing transfer device generally has the problems of low efficiency, complex equipment and the like.

Disclosure of Invention

The invention aims to provide a multi-station double-sided transfer device and a processing system, which can effectively improve the efficiency and simplify the equipment.

To achieve one of the above objects, an embodiment of the present invention provides a multi-station double-sided transfer apparatus, used for processing a workpiece, the workpiece comprises a first surface to be processed and a second surface to be processed which are oppositely arranged, the transfer device comprises a transfer station group and a mechanical arm group, the transfer station group at least comprises a feeding station, a first waiting station, a second waiting station and a discharging station, the feeding station is used for inputting workpieces, the first waiting station is used for placing the workpieces with the first surfaces to be processed upwards, the second waiting station is used for placing a workpiece with a second waiting surface facing upwards, the discharging station is used for outputting the workpiece, the manipulator group comprises at least two manipulators, the manipulator group is used for overturning the workpiece and moving the workpiece among the stations, and the maximum displacement of any manipulator is two adjacent stations.

As a further improvement of an embodiment of the present invention, the robot assembly includes an overturning robot or the robot assembly includes both an overturning robot and a translating robot, when the robot assembly includes an overturning robot, the overturning robot is configured to overturn a workpiece by a predetermined angle, and the overturning robot is configured to translate the workpiece between a plurality of stations, when the robot assembly includes both an overturning robot and a translating robot, the overturning robot is configured to overturn the workpiece by at least a predetermined angle, and the translating robot is configured to translate the workpiece between a plurality of stations.

As a further improvement of an embodiment of the present invention, the predetermined angle ranges from 90 to 180 degrees.

As a further improvement of an embodiment of the present invention, the predetermined angle is 90 degrees or 180 degrees.

As a further improvement of the embodiment of the present invention, the manipulator group at least includes a first flipping manipulator and a second flipping manipulator, after the first surface to be processed is processed, the first flipping manipulator fixes the first surface to be processed and flips the workpiece 90 degrees in a direction of a second waiting station, the second flipping manipulator flips 90 degrees in a direction of the first waiting station and faces the second surface to be processed, the second flipping manipulator fixes the second surface to be processed and flips 90 degrees in a direction of the second waiting station, and then the second flipping manipulator places the workpiece at the second waiting station.

As a further improvement of the embodiment of the present invention, the first flipping robot is further configured to translate the workpiece from the feeding station to the first waiting station, and the second flipping robot is further configured to translate the workpiece from the second waiting station to the discharging station.

As a further improvement of the embodiment of the present invention, the robot group includes a first flipping robot and a plurality of translating robots, when the first surface to be processed is processed, the first flipping robot fixes the first surface to be processed and flips the workpiece by 180 degrees so that the second surface to be processed faces upward, and the translating robot fixes the second surface to be processed and moves the workpiece to the second waiting station.

As a further improvement of an embodiment of the present invention, the robot group includes a first translation robot and a second translation robot, the first translation robot translates between the first waiting station and the second waiting station when the first flipping robot translates between the feeding station and the first waiting station, the second translation robot translates between the second waiting station and the discharging station, the first translation robot translates between the feeding station and the first waiting station when the first flipping robot translates between the first waiting station and the second waiting station, and the second translation robot translates between the second waiting station and the discharging station.

As a further improvement of an embodiment of the present invention, the robot group includes a first translation robot that translates between the feeding station and the first waiting station, a second translation robot that translates between the first waiting station and the second waiting station, and a third translation robot that translates between the second waiting station and the discharging station.

As a further improvement of the embodiment of the present invention, the robot group includes an overturning robot and a translating robot, the overturning robot is at least used for overturning a workpiece by a predetermined angle, the translating robot is used for translating the workpiece between a plurality of stations, the overturning robot includes an overturning adsorption surface or two oppositely arranged overturning adsorption surfaces, the translating robot includes a translating adsorption surface, and the overturning adsorption surface and the translating adsorption surface are used for adsorbing the workpiece.

As a further improvement of an embodiment of the present invention, the feeding station, the first waiting station, the second waiting station, and the discharging station are sequentially linearly distributed.

In order to achieve one of the above objects, an embodiment of the present invention provides a multi-station double-sided processing system, including the above-mentioned multi-station double-sided transfer apparatus and a processing apparatus, wherein the processing apparatus is disposed corresponding to the first waiting station and the second waiting station, and the processing apparatus is configured to process the first surface to be processed and the second surface to be processed.

As a further improvement of an embodiment of the present invention, the processing system is an exposure system, an optical inspection system, or a jet printing system.

As a further improvement of the embodiment of the present invention, the processing system is an exposure system, the processing apparatus includes an exposure head and an exposure station group, the exposure station group includes a first exposure station and a second exposure station which are connected, the first exposure station is connected to the first waiting station, the second exposure station is connected to the second waiting station, and the exposure head moves between the first exposure station and the second exposure station.

Compared with the prior art, the invention has the beneficial effects that: the transfer device realizes the turnover and movement of the workpiece through the mechanical arm, simplifies the double-sided treatment process, improves the double-sided treatment efficiency, has a simple structure, has the maximum displacement of any mechanical arm as two adjacent stations, namely the movable area of any mechanical arm is limited, can effectively shorten the advancing distance and the operation time of the mechanical arm, and further improves the double-sided treatment efficiency.

Drawings

Fig. 1 is a perspective view of a transfer device according to an embodiment of the present invention;

fig. 2 is a top perspective view of a transfer device according to an embodiment of the present invention;

FIGS. 3 a-3 m are schematic diagrams illustrating the steps of a first embodiment of the present invention;

FIGS. 4 a-4 o are schematic diagrams illustrating the steps of a second embodiment of the present invention;

FIGS. 5 a-5 n are schematic diagrams illustrating the steps of a third embodiment of the present invention;

FIG. 6 is a perspective view of a processing system according to one embodiment of the present invention;

FIG. 7 is a top perspective view of a processing system according to one embodiment of the present invention;

fig. 8 is a process flow of the exposure system of the first example of the present invention;

fig. 9 is a process flow of the exposure system of the second example of the present invention.

Detailed Description

The present invention will be described in detail below with reference to specific embodiments shown in the drawings. These embodiments are not intended to limit the present invention, and structural, methodological, or functional changes made by those skilled in the art according to these embodiments are included in the scope of the present invention.

In the various drawings of the present invention, some dimensions of structures or portions are exaggerated relative to other structures or portions for convenience of illustration, and thus, are used only to illustrate the basic structure of the subject matter of the present invention.

Also, terms used herein such as "upper," "above," "lower," "below," and the like, denote relative spatial positions of one element or feature with respect to another element or feature as illustrated in the figures for ease of description. The spatially relative positional terms may be intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. For example, if the device in the figures is turned over, elements described as "below" or "beneath" other elements or features would then be oriented "above" the other elements or features. Thus, the exemplary term "below" can encompass both an orientation of above and below. The device may be otherwise oriented (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly.

Referring to fig. 1 and 2, a multi-station double-sided transfer apparatus 100 according to an embodiment of the present invention is shown.

The transfer apparatus 100 of the present embodiment is used for processing a workpiece S, and the workpiece S includes a first surface to be processed Sa and a second surface to be processed Sb which are disposed opposite to each other.

Here, the transfer device 100 is used to perform operations such as movement and turning of the workpiece S between a plurality of stations to perform double-sided processing of the workpiece S.

The transfer device 100 includes a transfer station group 10 and a robot station group 20.

The transfer station group 10 at least includes a feeding station 11, a first waiting station 12, a second waiting station 13 and a discharging station 14.

Here, the feeding station 11, the first waiting station 12, the second waiting station 13, and the discharging station 14 are sequentially and linearly distributed, but in other embodiments, the feeding station 11, the first waiting station 12, the second waiting station 13, and the discharging station 14 may be arranged in other manners, or may be in other numbers of stations, which may be determined according to actual situations.

The feeding station 11 is used for inputting workpieces S.

Here, the feeding station 11 may be connected to a conveyor belt, a conveying roller, or the like to input the workpiece S.

The first waiting station 12 is used for placing the workpiece S with the first to-be-processed surface Sa facing upward.

The second waiting station 13 is used for placing the workpiece S with the second waiting surface Sb facing upward.

Here, the first waiting station 12 and the second waiting station 13 are used for placing the workpiece S to be processed and the processed workpiece S, and the first waiting surface Sa of the workpiece S placed in the first waiting station 12 faces upward, while the second waiting surface Sb of the workpiece S placed in the second waiting station 13 faces upward, so that the processing of the first waiting surface Sa and the second waiting surface Sb, that is, the double-sided processing of the workpiece S can be realized.

It should be noted that the first waiting station 12 and the second waiting station 13 may be two stations that are independent from each other and are arranged in series, or the first waiting station 12 and the second waiting station 13 may be two stations that are independent from each other and are arranged at an interval, that is, another station is also arranged between the first waiting station 12 and the second waiting station 13, or the first waiting station 12 and the second waiting station 13 are the same station, and so on.

The discharge station 14 serves for discharging the workpieces S.

Here, the discharging station 14 may be connected to a conveyor belt, a conveying roller, or the like to output the workpiece S.

The robot group 20 includes at least two robots H, the robot group 20 is used for turning over the workpiece S and moving the workpiece S between a plurality of stations, and the maximum displacement P of any one robot H is two adjacent stations.

Here, "the maximum displacement amount P of any one robot H is two adjacent stations" means that any one robot H moves and/or turns at one station, or any one robot H moves and/or turns between two adjacent stations, that is, the active area of any one robot H is at most two adjacent stations.

In addition, the turning operation is mainly used to assist the switching between the first surface to be processed Sa and the second surface to be processed Sb of the workpiece S, and the moving operation is mainly used to realize the moving of the workpiece S between the plurality of stations, but not limited to this, for example, the turning operation can be realized while the moving operation is also realized, and the turning operation and the moving operation can be realized by the cooperation of the plurality of manipulators H.

Compared with the prior art in which the workpiece S is turned over by a roller turning mechanism or other mechanisms, the transfer apparatus 100 of the present embodiment simplifies the double-sided processing flow, improves the double-sided processing efficiency, and has a simple structure of the transfer apparatus 100.

In addition, the maximum displacement P of any manipulator H in the present embodiment is two adjacent stations, that is, the active area of any manipulator H is limited, which can effectively shorten the travel distance and operation time of the manipulator H, thereby further improving the double-side processing efficiency.

In the present embodiment, the robot group 20 includes the inverting robot H1, or the robot group 20 includes both the inverting robot H1 and the translating robot H2.

Here, the "inverting robot H1" is defined as a robot that can change the angle of the workpiece S, the inverting robot H1 is used to assist the switching between the first surface to be processed Sa and the second surface to be processed Sb of the workpiece S, the "translating robot H2" is defined as a robot that can move the workpiece S between a plurality of stations, and in addition, any of the robots H can also perform gripping, setting down, and the like of the workpiece S by lifting and lowering operations.

The inverting robot H1 may have only the inverting function, or both the inverting and translating functions, and the translating robot H2 may have only the translating function.

When the robot set 20 includes the flipping robot H1, the flipping robot H1 is used to flip the workpiece S by a predetermined angle α, and the flipping robot H1 is used to translate the workpiece S between the stations.

That is, the reverse robot H1 has both the reverse function and the translation function.

When the robot group 20 includes both the inverting robot H1 and the translating robot H2, the inverting robot H1 is at least used to invert the workpiece S by a predetermined angle α, and the translating robot H2 is used to translate the workpiece S between the plurality of stations.

That is, the inverting robot H1 in this case may have only the inverting function, or both the inverting and translating functions, and the translating robot H2 may have only the translating function.

It can be seen that in the embodiments defined in the present invention, the robot group 20 can be combined in various ways, for example, the double-sided processing of the workpiece S can be realized only by the flipping robot H1, or the double-sided processing of the workpiece S can be realized by the cooperation of the flipping robot H1 and the translating robot H2, which can be flexibly selected according to practical situations, and can be adapted to various different types of application environments or various different sizes of application spaces.

It is understood that the inverting robot H1 is necessarily present because switching between the first surface to be processed Sa and the second surface to be processed Sb needs to be performed by the inverting robot H1, and the translation operation may be performed by the translation robot H2 or the inverting robot H1.

In addition, it should be noted that the combination of the manipulators mentioned herein is related to the number and arrangement of the stations, and when the number and arrangement of the stations are changed, the combination of the manipulators is changed accordingly, for example, the above-mentioned two manipulator combinations can be mixed for use.

In the present embodiment, the predetermined angle α at which the inverting robot H1 inverts the workpiece S ranges from 90 to 180 degrees, and preferably, the predetermined angle α is 90 degrees or 180 degrees.

In this embodiment, the inverting robot H1 includes one inverting suction surface H1 ' or two opposing inverting suction surfaces H1 ', and the translating robot H2 includes one translating suction surface H2 ', and the inverting suction surface H1 ' and the translating suction surface H2 ' are used to suck the workpiece S.

Here, when the inverting robot H1 includes two inverting adsorption faces H1' that are oppositely disposed, the work efficiency of the inverting robot H1 can be effectively improved.

The reversed suction surface H1 'and the translational suction surface H2' may be suction cup suction structures, and the workpiece S is sucked and fixed by a vacuum suction method, but not limited thereto.

In addition, the overturning manipulator H1 may be configured to overturn, lift, or translate through a driving device, the translating manipulator H2 may be configured to lift and translate through the driving device, the driving device may be, for example, a driving cylinder, and the specific structure of the driving device may refer to the driving device in the prior art, which is not described herein again.

Hereinafter, a plurality of embodiments of the present invention will be described in detail.

Referring to fig. 3a to 3m, in the first embodiment, the robot group 20 at least includes a first flipping robot H11 and a second flipping robot H12, when the first surface to be processed Sa is processed, the first flipping robot H11 fixes the first surface to be processed Sa and flips the workpiece S90 degrees toward the second waiting station 13, the second flipping robot H12 flips 90 degrees toward the first waiting station 12 and flips the workpiece S90 degrees toward the second waiting station Sb, the second flipping robot H12 fixes the second surface to be processed Sb and flips 90 degrees toward the second waiting station 13, and then the second flipping robot H12 places the workpiece S at the second waiting station 13.

Here, the first flipping robot H11 is also used to translate the workpiece S from the infeed station 11 to the first waiting station 12, and the second flipping robot H12 is also used to translate the workpiece S from the second waiting station 13 to the outfeed station 14.

Fig. 3a to 3m are schematic diagrams illustrating specific steps of the transfer apparatus 100 according to the first embodiment.

The transfer device 100 comprises a feeding station 11, a first waiting station 12, a second waiting station 13, a discharging station 14, a first overturning manipulator H11 and a second overturning manipulator H12, wherein the first overturning manipulator H11 and the second overturning manipulator H12 respectively comprise two overturning adsorption surfaces H1' which are arranged oppositely, and the workpiece S comprises a first surface to be processed Sa and a second surface to be processed Sb which are arranged oppositely.

Here, for the sake of convenience of distinction, the first surface to be processed Sa and the second surface to be processed Sb of the workpiece S are illustrated as different surfaces, that is, the first surface to be processed Sa is a curved surface and the second surface to be processed Sb is a flat surface.

Referring to fig. 3a, when in the initial state, the first flipping robot H11 is located above the first waiting station 12, and the second flipping robot H11 is located above the second waiting station 13;

here, in other embodiments, the first flipping robot H11 in the initial state may also be located above the feeding station 11, and the positions of other robots in the initial state are not limited;

referring to fig. 3b, the first workpiece S1 is conveyed to the feeding station 11, and the first to-be-processed surface Sa of the first workpiece S1 faces upward;

referring to fig. 3c, the first flipping robot H11 translates to above the feeding station 11 and descends to adsorb the first to-be-processed surface Sa of the first workpiece S1, and then the first flipping robot H11 drives the first workpiece S1 to ascend;

referring to fig. 3d, the first turnover manipulator H11 drives the first workpiece S1 to move horizontally above the first waiting station 12, and the second workpiece S2 is conveyed to the feeding station 11;

here, the second workpiece S2 may also be conveyed to the feeding station 11 in other time periods, and the following description is also the same and will not be repeated.

Referring to fig. 3e, the first flipping robot H11 lowers the first workpiece S1 and places the first workpiece S1 on the first processing station 12 with the first to-be-processed side Sa facing upward;

here, after the first workpiece S1 is placed on the first processing station 12, the other device cooperating with the transfer device 100 processes the first workpiece S1, and the first workpiece S1 can be moved to another area for processing, and then returned to the first processing station 12, and the first to-be-processed surface Sa is processed in this case, but not limited thereto.

Referring to fig. 3f, when the processing of the first to-be-processed surface Sa of the first workpiece S1 is completed, the first workpiece S1 returns to the first processing station 12, the first to-be-processed surface Sa faces upward, and the first flipping robot H11 adsorbs the first to-be-processed surface Sa of the first workpiece S1 and ascends to the flipping position;

referring to fig. 3g, the first flipping robot H11 adsorbs the first surface to be processed Sa of the first workpiece S1 and flips the first workpiece S1 by 90 degrees toward the second waiting station 13, that is, at this time, the first flipping robot H11 flips 90 degrees counterclockwise, the second flipping robot H12 flips 90 degrees toward the first waiting station 12 and faces the second surface to be processed Sb, that is, at this time, the second flipping robot H12 flips 90 degrees clockwise, the first flipping robot H11 and the second flipping robot H12 approach each other, the second flipping robot H12 adsorbs the second surface to be processed Sb of the first workpiece S1, the first flipping robot H11 cancels adsorption of the first workpiece S1, and at this time, delivery of the first workpiece S1 from the first flipping robot H11 to the second flipping robot H12 is completed;

here, it should be noted that, at this time, the first workpiece S1 may be prevented from falling off the first inverting robot H11 or the second inverting robot H12 by increasing the suction force, but the present invention is not limited thereto.

Referring to fig. 3H, the second flipping robot H12 adsorbs the second surface to be processed Sb and flips 90 degrees towards the second waiting station 13, that is, at this time, the second flipping robot H12 flips 90 degrees counterclockwise, the first surface to be processed Sa of the first workpiece S1 faces the second waiting station 13, the first flipping robot H11 flips 90 degrees towards the first waiting station 12, that is, at this time, the first flipping robot H11 flips 90 degrees clockwise, the first flipping robot H11 returns to the initial position, and the first flipping robot H11 can enter the next cycle;

referring to fig. 3i, the second flipping robot H12 drives the first workpiece S1 to descend, so that the first workpiece S1 is placed on the second processing station 13, the second surface Sb to be processed faces upward, and the first flipping robot H11 translates to above the feeding station 11;

here, the first inverting robot H11 may also be translated above the feeding station 11 in other time periods.

Referring to fig. 3j, the first flipping robot H11 descends and adsorbs the first to-be-processed surface Sa of the second workpiece S2, and then the first flipping robot H11 drives the second workpiece S2 to ascend, at this time, the first workpiece S1 at the second processing station 13 is processing the second to-be-processed surface Sb;

referring to fig. 3k, the first turnover manipulator H11 drives the second workpiece S2 to move horizontally above the first waiting station 12, and the third workpiece S3 is conveyed to the feeding station 11;

referring to fig. 3l, the first flipping robot H11 drives the second workpiece S2 to descend and place the second workpiece S2 on the first processing station 12 with the first surface to be processed Sa facing upward, when the second surface to be processed Sb of the first workpiece S1 is processed, the first workpiece S1 returns to the second processing station 13 with the second surface to be processed Sb facing upward, and the second flipping robot H12 adsorbs the second surface to be processed Sb of the first workpiece S1;

referring to fig. 3m, the second flipping robot H12 drives the first workpiece S1 to move horizontally above the discharging station 14, and then the second flipping robot H12 descends to place the first workpiece S1 on the discharging station 14, so that the double-sided processing of the first workpiece S1 is completed.

It should be noted that, the operation timing of the first flipping robot H11 and the second flipping robot H12, the inflow timing and the outflow timing of the workpiece S, and the like of the present embodiment may be determined according to actual conditions, and the timing control may be implemented by a timing controller, so that the operation time may be effectively reduced by controlling the sequence of each timing on the premise that the entire process is effectively controlled to be smoothly completed, thereby effectively improving the efficiency.

In addition, the translation operation in this embodiment is also realized by the first flipping robot H11 and the second flipping robot H12, but in other embodiments, the translation of the workpiece S may be realized by adding a translation robot, for example, the translation robot realizes the translation operation between the feeding station 11 and the first processing station 12.

Fig. 4a to 4o are schematic views of a transfer device 100 according to a second embodiment of the present invention, and for convenience of description, similar components are numbered similarly or identically.

In the embodiment, the robot group 20 includes a first flipping robot H11 and a plurality of translating robots H2, when the first surface to be processed Sa of the workpiece S is processed, the first flipping robot H11 fixes the first surface to be processed Sa and flips the workpiece 180 degrees so that the second surface to be processed Sb faces upward, and the translating robot H2 fixes the second surface to be processed Sb and moves the workpiece S to the second waiting station 13.

Here, the robot group 20 includes a first translation robot H21 and a second translation robot H22.

When the first flipping robot H11 translates between the infeed station 11 and the first waiting station 12, the first translating robot H21 translates between the first waiting station 12 and the second waiting station 13, and the second translating robot H22 translates between the second waiting station 13 and the outfeed station 14.

When the first flipping robot H11 translates between the first waiting station 12 and the second waiting station 13, the first translating robot H21 translates between the feeding station 11 and the first waiting station 12, and the second translating robot H22 translates between the second waiting station 13 and the discharging station 14.

That is to say, the manipulator group 20 includes a turnover manipulator H1 and two translation manipulators H2, the turnover manipulator H1 has the turnover and translation functions at the same time, the translation manipulator H2 has the translation function only, and the translation manipulator H2 performs the cooperation operation according to the different translation areas of the turnover manipulator H1.

Fig. 4a to 4o are schematic diagrams illustrating specific steps of a transfer apparatus 100 according to a second embodiment.

The transfer device 100 comprises a feeding station 11, a first waiting station 12, a second waiting station 13, a discharging station 14, a first overturning manipulator H11, a first translating manipulator H21 and a second translating manipulator H22, wherein the first overturning manipulator H11 comprises two oppositely-arranged overturning adsorption surfaces H1 ', the first translating manipulator H21 and the second translating manipulator H22 respectively comprise one translating adsorption surface H2', and a workpiece S comprises a first to-be-processed surface Sa and a second to-be-processed surface Sb which are oppositely arranged.

Referring to fig. 4a, when in the initial state, the first flipping robot H11 is located above the first waiting station 12, the first translating robot H21 is located above the second waiting station 13, and the second translating robot H22 is located above the outfeed station 14.

Referring to fig. 4b, the first workpiece S1 is conveyed to the feeding station 11, the first to-be-processed surface Sa of the first workpiece S1 faces upward, and the first flipping robot H11 translates to above the feeding station 11;

referring to fig. 4c, the first flipping robot H11 descends to adsorb the first surface to be processed Sa of the first workpiece S1, and then the first flipping robot H11 drives the first workpiece S1 to ascend;

referring to fig. 4d, the first turnover manipulator H11 drives the first workpiece S1 to move horizontally above the first waiting station 12, and the second workpiece S2 is conveyed to the feeding station 11;

referring to fig. 4e, the first flipping robot H11 lowers the first workpiece S1 and makes the first workpiece S1 placed on the first processing station 12 with the first to-be-processed side Sa facing upward;

referring to fig. 4f, in the process of waiting for the first surface to be processed Sa, the first flipping robot H11 moves horizontally to above the feeding station 11 and descends to adsorb the first surface to be processed Sa of the second workpiece S2, and then the first flipping robot H11 drives the second workpiece S2 to ascend;

referring to fig. 4g, the first turnover manipulator H11 drives the second workpiece S2 to move horizontally to above the first processing station 12 and turn over by 180 degrees, the second surface Sb to be processed of the second workpiece S2 faces upward, and the third workpiece S3 is conveyed to the feeding station 11;

referring to fig. 4H, when the processing of the first to-be-processed surface Sa of the first workpiece S1 is completed, the first workpiece S1 returns to the first processing station 12, the first to-be-processed surface Sa faces upward, and the first flipping robot H11 adsorbs the first to-be-processed surface Sa of the first workpiece S1 and ascends to the flipping position;

referring to fig. 4i, the first flipping robot H11 flips 180 degrees so that the first workpiece S1 is located above the first flipping robot H11 with the second to-be-processed surface Sb of the first workpiece S1 facing upward, the second workpiece S2 is located below the first flipping robot H11, and the second to-be-processed surface Sb of the second workpiece S2 facing the first waiting station 12;

referring to fig. 4j, the first translating robot H21 translates above the first flipping robot H11 with the first translating robot H21 facing the second surface to be processed Sb of the first workpiece S1;

referring to fig. 4k, the first flipping robot H11 and the first translating robot H21 approach each other, the first translating robot H21 adsorbs the second surface to be processed Sb of the first workpiece S1, the first flipping robot H11 cancels the adsorption of the first workpiece S1, and at this time, the first workpiece S1 is delivered from the first flipping robot H11 to the first translating robot H12;

referring to fig. 4l, the first translating robot H21 drives the first workpiece S1 to translate to above the second waiting position 13, and the first turning robot H11 descends to place the second workpiece S2 at the first waiting position 12;

referring to fig. 4m, the first translating robot H21 descends to place the first workpiece S1 at the second waiting station 13, the first to-be-processed surface Sa of the first workpiece S1 faces upward, and the first inverting robot H11 translates to above the feeding station 11;

referring to fig. 4n, the second translation robot H22 translates to above the second waiting station 13, when the second waiting surface Sb of the first workpiece S1 is processed, the first workpiece S1 returns to the second processing station 13, and the second waiting surface Sb faces upward, the second translation robot H22 adsorbs the second waiting surface Sb of the first workpiece S1 and drives the first workpiece S1 to rise;

referring to fig. 4o, the second translation robot H22 moves the first workpiece S1 to translate to above the outfeed station 14, and then the second translation robot H22 descends to place the first workpiece S1 on the outfeed station 14, at which time the double-sided processing of the first workpiece S1 is completed.

Here, it should be noted that, during the processing time period of the first workpiece S1, the first flipping robot H11 may enter the next cycle in advance, i.e., the first flipping robot H11 translates to the feeding station 11 to absorb the second workpiece S2, so that the efficiency may be further improved.

When the robot set 20 comprises a turning robot H1 and two translation robots H2, other embodiments are also possible, for example, a first turning robot H11 translates between the first waiting station 12 and the second waiting station 13, a first translation robot H21 translates between the loading station 11 and the first waiting station 12, and a second translation robot H22 translates between the second waiting station 13 and the unloading station 14, as described in the second embodiment.

For other descriptions of this embodiment, reference may also be made to the description of the first embodiment, which is not repeated herein.

Fig. 5a to 5n are schematic views of a transfer device 100 according to a third embodiment of the present invention, and for convenience of description, similar components are numbered similarly or identically.

Here, the robot group 20 includes a first translation robot H21, a second translation robot H22, and a third translation robot H23, the first translation robot H21 translating between the feeding station 11 and the first waiting station 12, the second translation robot H22 translating between the first waiting station 12 and the second waiting station 13, and the third translation robot H23 translating between the second waiting station 13 and the discharging station 14.

That is, the robot group 20 includes one flipping robot H1 and three translation robots H2, the flipping robot H1 has only the flipping function, and the translation robot H2 has only the translation function.

Fig. 5a to 5n are schematic diagrams illustrating specific steps of a transfer apparatus 100 according to a third embodiment.

The transfer device 100 comprises a feeding station 11, a first waiting station 12, a second waiting station 13, a discharging station 14, a first turning manipulator H11, a first translating manipulator H21, a second translating manipulator H22 and a third translating manipulator H23, wherein the first turning manipulator H11 comprises two turning adsorption surfaces H1 'which are oppositely arranged, the first translating manipulator H21, the second translating manipulator H22 and the third translating manipulator H23 respectively comprise one translating adsorption surface H2', and a workpiece S comprises a first surface to be processed Sa and a second surface to be processed Sb which are oppositely arranged.

Referring to fig. 5a, in the initial state, the first flipping robot H11 is located above the first waiting station 12, the first translating robot H21 is located above the feeding station 11, the second translating robot H22 is located above the second waiting station 13, and the third translating robot H23 is located above the discharging station 14.

Referring to fig. 5b, the first workpiece S1 is conveyed to the feeding station 11, and the first to-be-processed surface Sa of the first workpiece S1 faces upward;

referring to fig. 5c, the first translation robot H21 descends to suck the first surface to be processed Sa of the first workpiece S1;

referring to fig. 5d, the first translation robot H21 drives the first workpiece S1 to ascend;

referring to fig. 5e, the first translation robot H21 drives the first workpiece S1 to translate to above the first waiting position 12;

referring to fig. 5f, the first translation robot H21 drives the first workpiece S1 to descend and place the first workpiece S1 on the first processing station 12 with the first to-be-processed surface Sa facing upward;

referring to fig. 5g, a second workpiece S2 is conveyed to the feeding station 11;

referring to fig. 5H, the first translating manipulator H21 translates to above the feeding station 11 and descends to adsorb the first to-be-processed surface Sa of the second workpiece S2, after the first to-be-processed surface Sa of the first workpiece S1 is processed, the first workpiece S1 returns to the first processing station 12, the first to-be-processed surface Sa faces upward, and the first overturning manipulator H11 adsorbs the first to-be-processed surface Sa of the first workpiece S1 and ascends to the overturning position;

referring to fig. 5i, the first flipping robot H11 flips 180 degrees such that the first workpiece S1 is positioned above the first flipping robot H11 with the second to-be-processed surface Sb of the first workpiece S1 facing upward;

referring to fig. 5j, the second translation robot H22 translates to above the first flipping robot H11, the second translation robot H22 faces the second surface to be processed Sb of the first workpiece S1, the first flipping robot H11 and the second translation robot H22 approach each other, the second translation robot H22 adsorbs the second surface to be processed Sb of the first workpiece S1, and the first flipping robot H11 cancels the adsorption of the first workpiece S1, so that the first workpiece S1 is delivered from the first flipping robot H11 to the second translation robot H22;

referring to fig. 5k, the first translation robot H21 drives the second workpiece S2 to translate to above the first waiting station 12, and the third workpiece S3 is conveyed to the feeding station 11;

referring to fig. 5l, the second translation robot H22 drives the first workpiece S1 to translate to above the second waiting station 13, the second translation robot H22 descends to place the first workpiece S1 at the second waiting station 13 with the second waiting surface Sb of the first workpiece S1 facing upward, the first translation robot H21 descends to place the second workpiece S2 at the first waiting station 12 with the first waiting surface Sa of the second workpiece S2 facing upward, and the first translation robot H21 translates to above the feeding station 11;

referring to fig. 5m, the third transfer robot H23 is translated to above the second waiting station 13, after the second waiting surface Sb of the first workpiece S1 is processed, the first workpiece S1 returns to the second processing station 13 with the second waiting surface Sb facing upward, the third transfer robot H23 adsorbs the second waiting surface Sb of the first workpiece S1 and drives the first workpiece S1 to ascend, after the first waiting surface Sa of the second workpiece S2 is processed, the second workpiece S2 returns to the first processing station 12 with the first waiting surface Sa facing upward, the first flipping robot H11 adsorbs the first waiting surface Sa of the second workpiece S2 and drives the second workpiece S2 to ascend to a flipping position;

referring to fig. 5n, the third translation robot H23 drives the first workpiece S1 to translate to above the discharging station 14, and then the third translation robot H23 descends to place the first workpiece S1 on the discharging station 14, at this time, the double-sided processing of the first workpiece S1 is completed, and the first flipping robot H11 drives the second workpiece S2 to flip 180 degrees, so that the second to-be-processed surface Sb of the second workpiece S2 faces upward.

For other descriptions of this embodiment, reference may also be made to the descriptions of the first embodiment and the second embodiment, which are not repeated herein.

In summary, the present invention provides three embodiments of the transfer apparatus 100, and it should be understood that the transfer apparatus 100 of the present invention is not limited to the three embodiments, and the three embodiments can be combined to form a new embodiment, for example, the first flipping robot H11 in the first embodiment can move to the feeding station 11 to absorb the second workpiece S2 during the processing of the first surface to be processed Sa.

With reference to fig. 6 and 7, a multi-station double-sided processing system 300 is further provided according to an embodiment of the present invention.

The multi-station double-sided processing system 300 includes a multi-station double-sided transfer apparatus 100 and a processing apparatus 200, the processing apparatus 200 is disposed corresponding to the first waiting station 12 and the second waiting station 13, and the processing apparatus 200 is configured to process the first surface to be processed Sa and the second surface to be processed Sb.

The processing apparatus 200 includes

processing stations

201 and 202, the

processing stations

201 and 202 include a first processing station 201 and a second processing station 202 sequentially arranged along the first direction X, the first processing station 201 is connected to the first waiting station 12, the second processing station 202 is connected to the second waiting station 13, that is, the

processing stations

201 and 202 and the transferring station 10 are distributed in a T shape.

A first transmission part 203 is arranged between the first processing station 201 and the first waiting station 12, a second transmission part 204 is arranged between the second processing station 202 and the second waiting station 13, and the transmission direction of the first transmission part 203 and the second transmission part 204 is vertical to the first direction X.

Here, a direction perpendicular to the first direction X and toward the processing device 200 is defined as a second direction Y, and a direction perpendicular to the first direction X and away from the processing device 200 is defined as a third direction Z.

That is, the conveying process of the workpiece S is: the feeding station 11, entering the first waiting station 12 along the first direction X, entering the first processing station 201 along the second direction Y, returning to the first waiting station 12 along the third direction Z after the processing is completed, entering the second waiting station 13 along the first direction X, entering the second processing station 202 along the second direction Y, returning to the second waiting station 13 along the third direction Z after the processing is completed, and entering the discharging station 14 along the first direction X.

Of course, in another embodiment, the workpiece S may be directly processed at the standby station.

With continued reference to fig. 6 and 7, the transfer device 100 further includes dust covers 30, the dust covers 30 are disposed around the transfer station group 10, that is, the dust covers 30 are disposed around the feeding station 11, the first waiting station 12, the second waiting station 13 and the discharging station 14, and it is understood that the robot group 20 is also located inside the dust covers 30.

Here, the transfer station group 10 is limited to a limited space, and the ambient environment of the transfer station group 10 can be effectively controlled, thereby preventing impurities in the outside air from affecting the processing process of the workpiece.

The dust cover 30 forms a semi-enclosed receiving chamber Q, the dust cover 30 comprising an inlet opening 31 corresponding to the inlet station 11, an outlet opening 32 corresponding to the outlet station 14 and an observation window located at a side of the transfer station group 10 remote from the

processing station groups

201, 202, wherein a front end portion of the dust cover 30 is omitted in fig. 6 for clarity of the internal structure of the receiving chamber Q.

That is, the dust cover 30 is disposed around the transfer station group 10, and the observation window located at the front end of the dust cover 30 can be used for observing and monitoring the operation flow.

The transfer device 100 further includes a Fan Filter Unit 40(Fan Filter Unit, FFU) communicating with the accommodating cavity Q, and the dust cover 30 further includes an air outlet 33.

Specifically, the fan filter unit 40 is disposed at the top of the dust cover 30, and the air outlet 33 is located below the dust cover 30, where the air outlet 33 is located at the lower left corner and the lower right corner of the dust cover 30.

Fan filter unit 40 includes fan and filter layer, and in the actual operation, outside air is inhaled fan filter unit 40 by the fan, and the filter layer filters the air, and then in fan filter unit 40 control filtered clean air got into and holds chamber Q, clean air flows and will hold chamber Q in the air that has impurity is discharged by air outlet 33, so, alright make hold that to be full of all the time in the chamber Q clean air.

In the present embodiment, the processing apparatus 200 further includes a cover 205 disposed around the

processing stations

201 and 202, and the dust cover 30 is connected to the cover 205, so that the entire processing system 300 has a substantially T-shaped top view.

Here, the dust cover 30 and the cover 205 may be a splicing structure, so that maintenance and replacement are convenient.

In this embodiment, the processing system 300 may be an exposure system (LDI), an Optical Inspection system (AOI), or an Inkjet system (Inkjet), but may be other systems requiring double-sided processing.

The workpiece S can be a PCB or other workpieces needing double-sided processing.

The processing system 300 of the present embodiment takes the exposure system 300 as an example, and the exposure system 300 is configured to perform exposure processing on the front surface and the back surface of a PCB, where the front surface is the first surface to be processed Sa and the back surface is the second surface to be processed Sb.

The processing device 200 comprises exposure heads and

exposure station groups

201 and 202, the

exposure station groups

201 and 202 comprise a first exposure station 201 and a second exposure station 202 which are connected, the first exposure station 201 is connected with the first waiting station 12, the second exposure station 202 is connected with the second waiting station 13, and the exposure heads move between the first exposure station 201 and the second exposure station 202.

That is, the processing apparatus 200 includes one exposure head, and the exposure head moves between the first exposure station 201 and the second exposure station 202 as required to perform the exposure processing on the first surface to be processed Sa and the second surface to be processed Sb of the workpiece S, but the processing apparatus 200 may include two exposure heads.

Referring to fig. 8 and 9, the exposure system 300 is taken as an example, and the operation efficiency of the exposure system 300 according to the present invention will be explained in detail in conjunction with the description of the third embodiment.

The robot group 20 in the third embodiment includes a first inverting robot H11, a first translating robot H21, a second translating robot H22, and a third translating robot H23.

Referring to fig. 8, in the first example, the abscissa is time, the ordinate corresponds to the operation process of each robot and the exposure process of both sides of the workpiece S, and the high position in the corresponding time period represents that the relevant operation is performed in the time period.

Specifically, a1-a5 corresponds to the operation process of the first translation robot H21, and a1 indicates that the first translation robot H21 descends to adsorb the first workpiece S1 and then ascends within the 0-0.5S period; a2 represents that the first translation robot H21 carries the first piece of workpiece S1 to translate above the first waiting position 12 in the 0.5-1.5S time period; a3 denotes that the first translation robot H21 descends and places the first piece of work S1 at the first waiting station 12 during the 1.5-2S time period; a4 denotes that the first translation robot H21 ascends during the 2 nd to 2.5 th s period; a5 indicates that the first translation robot H21 translated above the feed station 11 during the 2.5-3.5s time period.

L1 represents a process in which the first workpiece S1 is transported from the first waiting station 12 to the first exposure station 201 and exposure processing is performed on the first surface to be processed Sa, and at this time, the 2 nd to 10 th time periods are exposure processing time periods of the first surface to be processed Sa, where, since there is only one exposure head, after the exposure operation is completed in the 2 nd to 9 th times and the first workpiece S1 is returned to the first waiting station 12, the exposure head is switched from the first exposure station 201 to the second exposure station 202 in the 9 th to 10 th time periods.

B1-B4 corresponds to the operation of the first flipping robot H11, B1 denotes that the first flipping robot H11 descends and sucks the first workpiece S1 whose processing has finished the first surface to be processed Sa in the 9 th to 9.5 th time period, where the first workpiece S1 has returned to the first waiting station 12 after the exposure operation is finished in the 2 nd to 9 th time periods; b2 represents that the first flipping robot H11 ascends to the flipping position during the 9.5-10s period; b3 shows that the first flipping robot H11 flips the first workpiece S1 by 180 degrees in the 10 th-11 th time period so that the second to-be-processed surface Sb of the first workpiece S1 faces upward; b4 indicates that the delivery of the first piece of work-piece S1 was made between the first flipping robot H11 and the second translating robot H22 during the 11 th to 12 th S time period.

C1-C5 correspond to the operation process of the second translation robot H22, C1 represents that the second translation robot H22 translates to above the first waiting station 12 in the 11 th-11.5 s time period; c2 denotes that the second transfer robot H22 adsorbs the first piece of the workpiece S1 delivered by the first inverting robot H11 during the 11.5-12S th time period; c3 shows that the second translation manipulator H22 translates the first piece of workpiece S1 over the second waiting station 13 during the 12 th-12.5S time period; c4 denotes that the second translation robot H22 descends and places the first piece of work S1 at the second waiting station 13 during the 21 st to 22 th time period; c5 indicates that the second translation robot H22 ascends during the 22 th to 22.5 th s period.

Here, considering that, during the entire cycle operation, when the current workpiece S is to be placed at the second waiting station 13, it is necessary to ensure that the workpiece S in the previous cycle has been removed, and considering that the exposure head needs to be moved to the second exposure station 202 to perform the processing of the second waiting surface Sb, the first workpiece S1 is not placed at the second waiting station 13 until the time period 21-22S.

L2 represents a process in which the first workpiece S1 is transported from the second waiting station 13 to the second exposure station 202 and the second surface Sb to be processed is subjected to exposure processing, and at this time, the 22 th to 30 th S time period is the exposure processing time period of the second surface Sb to be processed, and here, since there is only one exposure head, after the 22 th to 29 th S finishes the exposure operation and the first workpiece S1 returns to the second waiting station 13, the exposure head is switched from the second exposure station 202 to the first exposure station 201 in the 29 th to 30 th S time period.

D1-D5 correspond to the operation of the third translation robot H23, D1 indicating the translation of the third translation robot H23 above the second waiting station 13 during the 29 th-29.5 s time period; d2 denotes that the third transfer robot H23 descends to suck the first piece of work S1 during the 29.5-30.5S period; d3 shows that the third transfer robot H23 lifts the first workpiece S1 during the 30.5-31S th time period; d4 shows that the third translation robot H23 moves the first piece of work piece S1 to translate to above the outfeed station 14 and lower to place the first piece of work piece S1 at the outfeed station 14 during the 31.5-32.5S time period; d5 shows that the third transfer robot H23 ascends during the period of 32.5-33S and the outfeed station 14 conveys the first piece of work S1, whose double-sided processing is completed, to the next process.

Here, the 13 th S starts, and the first translation robot H21 suctions the second workpiece S2 and proceeds to the next cycle.

In addition, some adjustments to the timing are also made to avoid interference between the manipulators.

It can be seen that, taking the time interval from the output of the first workpiece S1 to the output of the second workpiece S2 as the processing period T of one workpiece S, the output time of the first workpiece S1 being 32S, and the output time of the second workpiece S2 being 46S, the processing period T is 14S, which is much lower than the processing period of the prior art.

In the first example, since each robot H moves only between two stations at most, on the one hand, the operation timings of the respective robots can be effectively optimized by cooperation to reduce the processing cycle T as much as possible, and on the other hand, the delivery of the workpiece S is performed between the first inverting robot H11 and the second translating robot H22 during the exposure processing period, so that the exposure processing time can be effectively utilized to further reduce the processing cycle T.

Fig. 9 shows a process flow of the exposure system 300 according to the second example.

In connection with the description of the first example, the second example differs from the first example in that: the delivery operation of the workpiece S between the first inverting robot H11 and the second translating robot H22 in the second example is performed outside the exposure processing time period, and at this time, the processing cycle T of the second example is 18.5S, which is much lower than that of the related art although it is larger than that of the first example.

In summary, the transfer apparatus 100 of the present invention uses the manipulator H to turn and move the workpiece S, compared to the prior art that uses a roller turning mechanism or other mechanisms to turn the workpiece S, the present embodiment simplifies the double-sided processing flow and improves the double-sided processing efficiency, and the transfer apparatus 100 has a simple structure.

The maximum displacement P of any manipulator H is two adjacent stations, namely the moving area of any manipulator H is limited, so that the travelling distance and the operating time of the manipulator H can be effectively shortened, and the double-sided processing efficiency is further improved.

In addition, the dust cover 30 is arranged, so that the transferring station group 10 is limited in a limited space, the surrounding environment of the transferring station group 10 can be effectively controlled, and the influence of impurities in the outside air on the processing process of the workpiece is avoided.

It should be understood that although the present description refers to embodiments, not every embodiment contains only a single technical solution, and such description is for clarity only, and those skilled in the art should make the description as a whole, and the technical solutions in the embodiments can also be combined appropriately to form other embodiments understood by those skilled in the art.

The above-listed detailed description is only a specific description of a possible embodiment of the present invention, and they are not intended to limit the scope of the present invention, and equivalent embodiments or modifications made without departing from the technical spirit of the present invention should be included in the scope of the present invention.

Claims

1. The utility model provides a two-sided device that moves of multistation for handle the work piece, the work piece includes relative first face and the second face of waiting to handle that sets up, its characterized in that moves and carries the device including moving a station group and manipulator group, move and carry the station group and include pan feeding station, first waiting station, second waiting station and ejection of compact station at least, the pan feeding station is used for the input work piece, first waiting station is used for placing the work piece that the first face of waiting to handle is up, second waiting station is used for placing the work piece that the second face of waiting to handle is up, ejection of compact station is used for the output work piece, manipulator group includes two at least manipulators, manipulator group is used for the upset of work piece and the removal of work piece between a plurality of stations, and the maximum displacement volume of arbitrary manipulator is two adjacent stations.

2. A multi-station double-sided transfer device according to claim 1, wherein the robot assembly comprises an overturning robot or the robot assembly comprises both an overturning robot and a translating robot, when the robot assembly comprises an overturning robot, the overturning robot is configured to overturn a workpiece by a predetermined angle, and the overturning robot is configured to translate the workpiece between a plurality of stations, when the robot assembly comprises both an overturning robot and a translating robot, the overturning robot is configured to overturn the workpiece by at least a predetermined angle, and the translating robot is configured to translate the workpiece between a plurality of stations.

3. A multi-station double-sided transfer device according to claim 2, wherein the predetermined angle is in a range of 90 to 180 degrees.

4. A multi-station double-sided transfer device according to claim 3, wherein the predetermined angle is 90 degrees or 180 degrees.

5. A multi-station double-sided transfer device according to claim 2, wherein the robot group comprises at least a first turnover robot and a second turnover robot, when the first surface to be processed is processed, the first turnover robot fixes the first surface to be processed and turns the workpiece 90 degrees in the direction of the second waiting station, the second turnover robot turns 90 degrees in the direction of the first waiting station and faces the second surface to be processed, the second turnover robot fixes the second surface to be processed and turns 90 degrees in the direction of the second waiting station, and then the second turnover robot places the workpiece at the second waiting station.

6. A multi-station dual transfer device as claimed in claim 5, wherein said first flipping robot is further adapted to translate a workpiece from said infeed station to said first waiting station, and said second flipping robot is further adapted to translate a workpiece from said second waiting station to said outfeed station.

7. The multi-station double-sided transfer device according to claim 2, wherein the robot group comprises a first turning robot and a plurality of translation robots, when the first surface to be processed is processed, the first turning robot fixes the first surface to be processed and turns the workpiece 180 degrees so that the second surface to be processed faces upward, and the translation robots fix the second surface to be processed and move the workpiece to the second waiting station.

8. A multi-station dual transfer as in claim 7 wherein the robot bank comprises a first translation robot that translates between the first and second waiting stations and a second translation robot that translates between the second and discharge stations as the first flipping robot translates between the feeding and first waiting stations, the first translation robot translating between the feeding and first waiting stations and the second translation robot translating between the second and discharge stations.

9. A multi-station double-sided transfer device according to claim 7, wherein the robot group comprises a first translation robot that translates between the infeed station and the first waiting station, a second translation robot that translates between the first waiting station and the second waiting station, and a third translation robot that translates between the second waiting station and the outfeed station.

10. A multi-station double-sided transfer device according to claim 1, wherein the robot assembly comprises an overturning robot and a translating robot, the overturning robot is at least used for overturning a workpiece by a predetermined angle, the translating robot is used for translating the workpiece between a plurality of stations, the overturning robot comprises an overturning adsorption surface or two oppositely arranged overturning adsorption surfaces, the translating robot comprises a translating adsorption surface, and the overturning adsorption surface and the translating adsorption surface are used for adsorbing the workpiece.

11. A multi-station double-sided transfer device according to any one of claims 1 to 10, wherein the feeding station, the first waiting station, the second waiting station and the discharging station are sequentially arranged in a straight line.

12. A multi-station double-sided processing system, comprising the multi-station double-sided transfer apparatus according to claim 11 and a processing apparatus, wherein the processing apparatus is disposed corresponding to the first waiting station and the second waiting station, and the processing apparatus is configured to process the first surface to be processed and the second surface to be processed.

13. A multi-station double-sided processing system according to claim 12, wherein the processing system is an exposure system, an optical inspection system or a jet printing system.

14. A multi-station double-sided processing system according to claim 12, wherein the processing system is an exposure system, the processing apparatus comprises an exposure head and an exposure station group, the exposure station group comprises a first exposure station and a second exposure station which are connected, the first exposure station is connected with the first waiting station, the second exposure station is connected with the second waiting station, and the exposure head moves between the first exposure station and the second exposure station.