CN105374730A - Mechanical arm for transferring solar cell piece basket and double-head transfer device for transferring solar cell piece basket - Google Patents
Mechanical arm for transferring solar cell piece basket and double-head transfer device for transferring solar cell piece basket Download PDFInfo
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- CN105374730A CN105374730A CN201510692356.0A CN201510692356A CN105374730A CN 105374730 A CN105374730 A CN 105374730A CN 201510692356 A CN201510692356 A CN 201510692356A CN 105374730 A CN105374730 A CN 105374730A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
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Abstract
The invention relates to a mechanical arm for transferring a solar cell piece basket and a double-head transfer device for transferring the solar cell piece basket. The double-head transfer device comprises mechanical arms, a portal frame, a vertical lifting mechanism fixedly arranged on the portal frame, and a lateral movement mechanism. Each mechanical arm comprises a vertically-arranged installing plate, a top plate fixedly arranged on the installing plate, an installing frame arranged on the top plate through a horizontal slide rail, a rotary table horizontally arranged on the bottom of the installing frame, a micromotion mechanism, a rotating mechanism arranged on the installing frame, and a vacuum system. A negative pressure sucker group adsorbs cell pieces by means of negative pressure provided by a vacuum generator. After the cells are adsorbed, the mechanical arms may start the rotating mechanism as required in a moved process in order to overturn a group of cell pieces by 180 degrees, thereby simplifying downstream work flows. Two baskets directly reach downstream equipment to be processed so that the downstream equipment configuration is simplified.
Description
Technical field
The present invention relates to and a kind ofly turn the manipulator of basket for solar battery sheet and use manipulator to turn the Double-head transporter of basket for solar battery sheet.
Background technology
Need to carry out a point basket to former in manufacture of solar cells process, the paired many Battery packs sheet fit together is separated, then load two other basketry and enter next production link, due to the fast development of photovoltaic industry, profit margin reduces, human cost constantly increases, and job stability constantly declines.Machinery replaces artificial trial carrying out always, the basic realization of universal six shaft mechanical arm application replaces manually at present, but price is high, and need to customize special mould clamp, and two frames after point basket one of them also need to turn to 180 ° to adapt to upstream device, and transport efficacy is told somebody what one's real intentions are already and can not be mated downwards by the speed of production of equipment.Be all carry out operation circulation with battery on chip year basket in current industry, every basket can load 50, needs constantly to take out from basket to put in operation circulation again.Especially be 100 to (200) cell piece in the hoop (quartz boat) after heating furnace, will wherein half turn to after also needing burst, at present because mechanization cost-effective rate is low, a lot of link is still by artificial piecemeal handling.At the bottom of efficiency, easily fragment, have damage to slice, thin piece, finally affect cell piece generating efficiency, become very formidable technical problem.For this present situation, need to design a manipulator special for photovoltaic industry, be specifically designed to cell piece in enormous quantities loading, transfer, burst, turn to; Can be applicable to the transporter of production line.
Summary of the invention
The object of the invention is to the defect overcoming prior art, provide a kind of can in enormous quantities by cell piece burst and the manipulator that turns to; Also have and a kind ofly can be applicable to the Double-head transporter that many Battery packs sheet could be loaded and shift to production line.
For solving the problem, the technical solution used in the present invention is:
Turn a manipulator for basket for solar battery sheet, comprise vertically arrange mounting panel, be fixedly installed top board on a mounting board, the installing rack be slidably arranged in by horizontal slide rail on top board, be horizontally set on rotating platform, micromotion mechanism and the rotating mechanism be arranged on installing rack bottom installing rack and vacuum system; Described micromotion mechanism comprises: fine motion motor be connected with fine motion motor output end by reductor micro-ly move leading screw, described fine motion motor is fixedly connected with top board, and described micro-free end moving leading screw is connected with top panel turns; Described micro-screw set that moves is equipped with nut seat, and described nut seat is fixedly connected with installing rack by connecting plate; Described rotating mechanism comprises: electric rotating machine, swivel mount and the negative pressure sucker group be fixedly installed on bottom swivel mount, described swivel mount top is provided with rotating disk, described swivel mount is connected with the round end of rotating platform by rotating disk, described electric rotating machine is connected with rotating platform drive end, and described rotating disk is provided with pipeline hole; Described vacuum system comprises: the vacuum filter being fixedly installed on the vacuum pump on installing rack, negative tube and being arranged on negative tube, and described negative tube is communicated with negative pressure sucker group negative pressure hole through pipeline hole.
Furtherly, also comprise plenum system, described plenum system comprises the air supply pipe that gas blow pipe is communicated with gas blow pipe, and described air supply pipe is connected with source of the gas, described gas blow pipe prolongs negative pressure sucker group and arranges, and described gas blow pipe is provided with the multiple gas outlets pointing to negative pressure sucker group sucker.
Furtherly, described negative tube is communicated with the two ends of negative pressure sucker group respectively by threeway.
Furtherly, described vacuum pump is pneumatic vacuum generator.
Furtherly, described micro-leading screw that moves is ball-screw.
Furtherly, described mounting panel is also fixedly installed guard shield, and described guard shield top is provided with pipeline pore, is provided with resigning hole bottom described guard shield, and described rotating disk is connected with rotating platform by resigning hole.
Turn a Double-head transporter for basket for solar battery sheet, it comprises two above-mentioned manipulators, portal frame, is fixedly installed on vertical lifting mechanism on portal frame and transverse-moving mechanism; Described vertical lifting mechanism comprises: backboard, be vertically arranged on backboard both sides slide rail, be vertically arranged on the elevating screw on backboard and be arranged on the lifting motor at backboard top, described lifting motor is connected with elevating screw by reductor, described elevating screw is set with vertical drive nut seat, and described elevating screw free end is provided with supporting seat; Described transverse-moving mechanism comprises: horizontal backboard, two levels are located at cross sliding rail on horizontal backboard, two the traversing plates be arranged on by slide block on cross sliding rail, drive two driving mechanisms of two traversing plates respectively, described horizontal backboard is fixedly connected with driving slide block, and described horizontal backboard is provided with the slide block corresponding with slide rail.
Furtherly, the traversing motor that described driving mechanism comprises horizontal traversing leading screw, drives traversing leading screw to rotate by reductor, described traversing leading screw is arranged with traversing driving slide block, and described traversing driving slide block is fixedly connected with traversing plate.
Furtherly, described elevating screw and traversing leading screw are ball-screws.
Furtherly, described horizontal backboard arranged outside has backplate, and the both sides up and down of described backplate are respectively arranged with seam of stepping down, and the two ends up and down of described mounting panel are fixedly connected with traversing plate by seam of stepping down.
The beneficial effect adopting technique scheme to produce is: the negative pressure that negative pressure sucker group of the present invention utilizes vacuum generator to provide when adsorbing cell piece is adsorbed cell piece, after drawing cell piece, manipulator can start rotating mechanism as required in moving process, the Battery pack sheet drawn is carried out turning to 180 °, the workflow in downstream can be simplified like this, divide two basketrys after basket directly to enter upstream device to process, therefore also simplify the Equipments Setting in downstream.
Because before point basket, two panels cell piece is fitted closely in a groove, towards supporting or opposing, when being separated due to the air-flow that two minimum cooperation gas blow pipes in cell piece gap provide, air-flow malleation fills the gap of two cell pieces, and when burst, cell piece is easy to take out like this.
Pneumatic vacuum generator structure simply produces that negative pressure speed is fast, negative pressure pressure easily regulates, negative regulation is strong, vacuum effect good, when the multiple cell piece vacancy of same group of negative pressure sucker group, does not affect the absorption effect to all the other cell pieces.
Micro-leading screw that moves is that ball-screw is more steady when drive installation frame moves like this, and location is more accurate, avoids rocking of whole device, keeps cell piece in stable condition.
The outer setting guard shield of whole manipulator, top arranges pipeline pore, for cable and pipeline turnover, bottom arranges resigning hole and is connected with rotating platform for negative pressure sucker group, and reserve the activity space of installing rack in the lump, the internal structure of manipulator can also be made to be in the space of relative closure, to increase the controlling of workshop cleanliness factor further, also make indicator light and instrument have the attachment of installation.
Whole device adopts portal frame form, the span of such equipment is large, the manipulator activity space of the simple load of structure is large, simple gantry frame has larger activity space to two parallel manipulators, two driving mechanisms that are vertical and level make manipulator can have continuous print curve event trace, meet complicated working condition requirement.
Micro-leading screw that moves is that the such drive end of ball-screw is stable, the reliability of further enhancing equipment.
Backplate can by whole transverse-moving mechanism relative closure in separate space, and Whole Equipment is good, avoids inner structure to be subject to ectocine, also avoids internal structure to affect the cleannes in workshop.
Accompanying drawing explanation
Accompanying drawing 1 is structural representation of the present invention;
Accompanying drawing 2 is vertical lifting mechanism structural representations of the present invention;
Accompanying drawing 3 is transverse-moving mechanism structural representations of the present invention;
Accompanying drawing 4 is gantry frame structure schematic diagrames of the present invention;
Accompanying drawing 5 is robot manipulator structure schematic diagrames of the present invention;
Accompanying drawing 6 is manipulator vacuum system structural representations of the present invention;
Accompanying drawing 7 is manipulator guard shield inner structure schematic diagrames of the present invention;
Accompanying drawing 8 is micromotion mechanism structural representations of the present invention;
Accompanying drawing 9 is rotating mechanism structural representations of the present invention;
Accompanying drawing 10 is gas blow pipe of the present invention and negative pressure sucker group structural representation;
In the accompanying drawings: 1 mounting panel, 11 guard shields, 12 pipeline pores, 13 portal frames, 14 backboards, 141 slide rails, 142 elevating screws, 143 lifting motors, 144 vertical drive nut seats, 145 supporting seats, 15 horizontal backboards, 151 cross sliding rails, 152 traversing plates, 153 traversing leading screws, 154 traversing motors, 155 traversing driving slide blocks, 156 step down seam, 16 backplates, 2 installing racks, 3 rotating platforms, 4 top boards, 41 horizontal slide rails, 51 fine motion motors, 52 micro-ly move leading screw, 521 nut seats, 522 connecting plates, 61 electric rotating machines, 62 swivel mounts, 63 negative pressure sucker groups, 64 rotating disks, 65 pipeline holes, 71 vacuum pumps, 72 negative tubes, 73 vacuum filters, 81 gas blow pipes, 82 air supply pipes, 9 suckers.
Embodiment
Below in conjunction with accompanying drawing 1-10, detailed further describing is carried out to the present invention.
As shown in accompanying drawing 1,4, a kind of Double-head transporter turning basket for solar battery sheet, it comprises two manipulators, portal frame 13, is fixedly installed on vertical lifting mechanism on portal frame 13 and transverse-moving mechanism; As shown in accompanying drawing 2,3, described vertical lifting mechanism comprises: backboard 14, be vertically arranged on backboard 14 both sides slide rail 141, be vertically arranged on the elevating screw 142 on backboard 14 and be arranged on the lifting motor 143 at backboard 14 top, described lifting motor 143 is connected with elevating screw 142 by reductor, described elevating screw 142 is set with vertical drive nut seat 144, and described elevating screw 142 free end is provided with supporting seat 145; As shown in Figure 3, described transverse-moving mechanism comprises: horizontal backboard 15, two levels are located at cross sliding rail 151 on horizontal backboard 15, two the traversing plates 152 be arranged on by slide block on cross sliding rail 151, drive two driving mechanisms of two traversing plates 152 respectively, described horizontal backboard 15 is fixedly connected with driving slide block 144, and described horizontal backboard 15 is provided with the slide block corresponding with slide rail 141.The traversing motor 154 that described driving mechanism comprises horizontal traversing leading screw 153, drives traversing leading screw 153 to rotate by reductor, described traversing leading screw 153 is arranged with traversing driving slide block 155, and described traversing driving slide block 155 is fixedly connected with traversing plate 152; Described elevating screw 142 and traversing leading screw 153 are ball-screws.Slide rail 141 is the stability in order to ensure transverse-moving mechanism, and cross sliding rail 151 is to ensure the stability that manipulator is traversing.
Two traversing motors 154 and lifting motor 143 are under control of the control system, the work station of switch machine hand, form all standing of a perpendicular, manipulator can rest on any position of this working face, when production equipment displacement or the replacing of bottom, the portal frame 13 of large span can meet the change in location of station.
As shown in Figure 4, horizontal backboard 15 arranged outside has backplate 16, and the both sides up and down of described backplate 16 are respectively arranged with seam 156 of stepping down, and the two ends up and down of described mounting panel 1 are fixedly connected with traversing plate 152 by seam of stepping down.Transverse-moving mechanism is closed by backplate 16, the only reserved seam 156 of stepping down in horizontal backboard about 15 both sides, mounting panel about 1 two ends of manipulator are fixedly connected with traversing plate 152 by seam of stepping down, structure in the transverse-moving mechanism closed is not affected by the external environment, the globality of whole device is stronger, and the structure of complexity does not affect clean workshop condition.
As illustrated in 6,7, manipulator is comprised the mounting panel 1 vertically arranged, the top board 4 be fixedly installed on mounting panel 1, the installing rack 2 be slidably arranged in by horizontal slide rail 41 on top board 4, is horizontally set on rotating platform 3, micromotion mechanism and the rotating mechanism be arranged on installing rack 2 bottom installing rack 2 and vacuum system; As shown in Figure 8, described micromotion mechanism comprises: fine motion motor 51 be connected with fine motion motor 51 output by reductor micro-ly move leading screw 52, described fine motion motor 51 is fixedly connected with top board 4, described micro-move leading screw 52 free end and top board 4 be rotationally connected; Described micro-leading screw 52 that moves is set with nut seat 521, and described nut seat 521 is fixedly connected with installing rack 2 by connecting plate 522; As shown in Figure 9, described rotating mechanism comprises: electric rotating machine 61, swivel mount 62 and the negative pressure sucker group 63 be fixedly installed on bottom swivel mount 62, described swivel mount 62 top is provided with rotating disk 64, described swivel mount 62 is connected with the round end of rotating platform 3 by rotating disk 64, described electric rotating machine 61 is connected with rotating platform 3 drive end, and described rotating disk 64 is provided with pipeline hole 65; Described vacuum system comprises: the vacuum filter 73 being fixedly installed on the vacuum pump 71 on installing rack 2, negative tube 72 and being arranged on negative tube 72, and described negative tube 72 is communicated with negative pressure sucker group 63 negative pressure hole through pipeline hole 65.Can be there is relative motion in two parts be connected through pipeline hole 65 due to negative tube 72, therefore negative tube 72 is the flexible pipes that can carry negative pressure.
Above-mentioned plenum system comprises the air supply pipe 82 that gas blow pipe 81 is communicated with gas blow pipe 81, described air supply pipe 82 is connected with high-pressure air source, described gas blow pipe 81 prolongs negative pressure sucker group 63 and arranges, and described gas blow pipe 81 is provided with multiple gas outlets of the sucker pointing to negative pressure sucker group 63.Because two the cell piece surfaces fit together are extremely smooth, fitting very closely has very large resistance when being separated, and when negative pressure sucker group 63 carries out burst, the malleation air-flow that gas blow pipe 81 sprays fills the gap of two cell pieces, thoroughly eliminates resistance during burst.
As shown in accompanying drawing 6,10, negative tube 72 is communicated with the two ends of negative pressure sucker group 63 respectively by threeway, and vacuum pump 71 is pneumatic vacuum generators, and micro-leading screw 52 that moves is ball-screws.As shown in Figure 5, described mounting panel 1 is also fixedly installed guard shield 11, and described guard shield 11 top is provided with pipeline pore 12, is provided with resigning hole bottom described guard shield 11, and described rotating disk 64 is connected with rotating platform 3 by resigning hole.Air supply pipe 82 can be vacuum pump 71 and gas blow pipe 81 air feed simultaneously, because the air pressure demand of gas blow pipe 81 is low, can increase pressure-reducing valve between air supply pipe 82 and gas blow pipe 81, for ensureing that the air-flow cleaning of gas blow pipe 81 can also install clarifier additional.
Two manipulators are set up in parallel, for the two Battery pack sheets merged before point basket, can complete and take out simultaneously, according to production line demand by cell piece rotate to upstream device need towards, then two Battery pack sheets are put in different baskets respectively, two baskets are set up in parallel, divide the time shorten of cell piece like this, pipeline is only needed to connect for downstream provides during cell piece, need not arrange the equipment of wherein one group of upset again, apparatus for production line simplifies, burst turn basket speed than traditional fast again more than, the burst of a fully satisfied production line of equipment turns the demand of basket, investment minor structure is simple.
The course of work: for a quartz boat 100 to 200 explanations, pick and place 2 times and will separate 4 baskets like this, the each self-chambering of every basket 50, after ancillary equipment preparation puts in place, traversing motor 154 starts, and to be moved to by two manipulators above the cell piece treating point basket by traversing leading screw 153, cross sliding rail 151, traversing driving slide block 154, traversing plate 152.After the sucker arrival assigned address of negative pressure sucker group 63, lifting motor 143 starts, moved down by whole transverse-moving mechanism by the vertical drive nut seat 144 on elevating screw 142, when the sucker of negative pressure sucker group 63 arrives assigned address, this position is that the sucker of sucker is overlapping with cell piece, now the fine motion motor 51 of two manipulator inside starts, leading screw 52 is moved by micro-, nut seat 521, whole installing rack 2 moves by connecting plate 522, thus by close to cell piece for the sucker 9 of the negative pressure sucker group 63 of front end, because two cell pieces sticked together are back-to-back, and sucker 9 moves in the gap of two Battery pack sheets, therefore negative pressure sucker group 63 moving direction on two manipulators is contrary, material is thus formed two negative pressure sucker groups 63 separately near the cell piece of side, when the sucker of sucker 9 presses close to cell piece, the electromagnetically operated valve controlling negative pressure sucker group 63 negative pressure is opened, cell piece holds by sucker 9, namely two negative pressure sucker groups 63 have held 100 cell pieces.
Then lifting motor 143 starts, move on whole transverse-moving mechanism, the draw-in groove (basketry draw-in groove) making cell piece leave harness (quartz boat) arrives aerial, the electromagnetically operated valve controlling gas blow pipe 81 air blowing is opened, meanwhile the fine motion motor 51 of two manipulator inside starts, and reversion by back-to-back cell piece separately.
After this, the traversing motor 154 that first manipulator be positioned at before moving direction is driven its motion drives, move to target basket, another manipulator is after be spaced a distance (be greater than cell piece width, be greater than negative pressure sucker group 63 radius of turn), according to the requirement of production line, the cell piece that one of them manipulator adsorbs is needed upset 180 °, the electric rotating machine 61 of the manipulator inside overturning cell piece is needed to start, swivel mount 62 is driven to rotate, negative pressure sucker group 63 drives 50 cell piece upsets thereupon, is rotated in place rear electric rotating machine 61 and stops.
Manipulator moves to respective target basket subsequently; Arrive in moving process after above respective target basket, lifting motor 143 starts again, is moved down by whole transverse-moving mechanism, and the cell piece of monolithic is put into draw-in groove; Negative pressure sucker group 63 removes the absorption of negative pressure releasing to cell piece; Fine motion motor 51 starts negative pressure sucker group 63(and sucker 9 subsequently) expel cell piece, then lifting motor 143 and two traversing motors 154 start two manipulators resets, the negative pressure sucker group 63 overturn in the process also completes reset under the driving of electric rotating machine 61, residue half in quartz boat (50 to) repetitive operation, through first time, the quartz boat of operation will be shifted, remaining cell piece is moved to operating position, and front once fully loaded basketry is removed and is placed empty basket.
Point basket getting empty carrier (quartz boat) and two packing is transported to next production link by surrounding devices, so far completes a duty cycle.At two manipulators when getting cell piece, the sucker of the sucker 9 of two negative pressure sucker groups 63 is relative.
It should be noted that the two sides of cell piece is not identical, before point basket one group between two, two cell piece contact-making surfaces be close together are identical faces, and directly separately dress basket always has a basket contrary with the equipment requirement face in downstream, and therefore wherein one group of needs overturns.
As shown in Figure 10, it should be noted that negative pressure sucker group 63 is the equipment that the industry is general, 50 sheet suckers 9 are generally set, sucker side is the sucker of absorption cell piece, the same side that the sucker of sucker 9 is all arranged, sucker is communicated with negative tube 72 by inner chamber, mostly is ceramic sucker, therefore the inventive point not being the technical program because of structure for this reason no longer does too much repeating, and reproduces after this structure underground does not affect the enforcement of the technical program.
It should be noted that the technical program is can by servo system control, each moving part can install the position signalling that transducer (the industrial circle sensors such as proximity switch, optoelectronic switch, Hall element) obtains driver part additional; Also has the in good time opening and closing of gas circuit, be by solenoid control, above these can be completely manual, in line with the spirit of the modernization of industry, those skilled in the art can easily realize automatic control according to the description of the course of work, can also be connected understand device working condition at any time with central control system.Therefore imply in the technical program and disclose automatic control system, those skilled in the art can not do creative work and realize automatically controlling.
Quartz boat is industry address is exactly the basketry that quartz does, high temperature resistant, saves, then can turn basket at cell piece heating ring.
The above execution mode is only the preferred embodiments of the present invention, and and the feasible enforcement of non-invention exhaustive.For persons skilled in the art, to any apparent change done by it under the prerequisite not deviating from the principle of the invention and spirit, all should be contemplated as falling with within claims of the present invention.
Claims (10)
1. turn a blue manipulator for solar battery sheet, it is characterized in that: it comprises the mounting panel (1) vertically arranged, the top board (4) be fixedly installed on mounting panel (1), is slidably arranged in the installing rack (2) on top board (4), the rotating platform (3) being horizontally set on installing rack (2) bottom, micromotion mechanism and the rotating mechanism be arranged on installing rack (2) and vacuum system by horizontal slide rail (41);
Described micromotion mechanism comprises: fine motion motor (51) be connected with fine motion motor (51) output by reductor micro-ly move leading screw (52), described fine motion motor (51) is fixedly connected with top board (4), described micro-move leading screw (52) free end and top board (4) be rotationally connected; Described micro-leading screw (52) that moves is set with nut seat (521), and described nut seat (521) is fixedly connected with installing rack (2) by connecting plate (522);
Described rotating mechanism comprises: electric rotating machine (61), swivel mount (62) and the negative pressure sucker group (63) be fixedly installed on bottom swivel mount (62), described swivel mount (62) top is provided with rotating disk (64), described swivel mount (62) is connected by the round end of rotating disk (64) with rotating platform (3), described electric rotating machine (61) is connected with rotating platform (3) drive end, and described rotating disk (64) is provided with pipeline hole (65);
Described vacuum system comprises: the vacuum filter (73) being fixedly installed on the vacuum pump (71) on installing rack (2), negative tube (72) and being arranged on negative tube (72), described negative tube (72) is communicated with negative pressure sucker group (63) negative pressure hole through pipeline hole (65).
2. a kind of manipulator turning basket for solar battery sheet according to claim 1, it is characterized in that: also comprise plenum system, described plenum system comprises the air supply pipe (82) that gas blow pipe (81) is communicated with gas blow pipe (81), described air supply pipe (82) is connected with source of the gas, described gas blow pipe (81) prolongs negative pressure sucker group (63) and arranges, and described gas blow pipe (81) is provided with the multiple gas outlets pointing to negative pressure sucker group (63) sucker.
3. a kind of manipulator turning basket for solar battery sheet according to claim 2, is characterized in that: described negative tube (72) is communicated with the two ends of negative pressure sucker group (63) respectively by threeway.
4. a kind of manipulator turning basket for solar battery sheet according to claim 3, is characterized in that: described vacuum pump (71) is pneumatic vacuum generator.
5. a kind of manipulator turning basket for solar battery sheet according to claim 4, is characterized in that: described micro-to move leading screw (52) be ball-screw.
6. a kind of manipulator turning basket for solar battery sheet according to claim 4, it is characterized in that: described mounting panel (1) is also fixedly installed guard shield (11), described guard shield (11) top is provided with pipeline pore (12), described guard shield (11) bottom is provided with resigning hole, and described rotating disk (64) is connected with rotating platform (3) by resigning hole.
7. turn a Double-head transporter for basket for solar battery sheet, it is characterized in that: it comprises manipulator described in two claim 1-5, portal frame (13), is fixedly installed on vertical lifting mechanism on portal frame (13) and transverse-moving mechanism;
Described vertical lifting mechanism comprises: backboard (14), be vertically arranged on backboard (14) both sides slide rail (141), be vertically arranged on the elevating screw (142) on backboard (14) and be arranged on the lifting motor (143) at backboard (14) top, described lifting motor (143) is connected with elevating screw (142) by reductor, described elevating screw (142) is set with vertical drive nut seat (144), and described elevating screw (142) free end is provided with supporting seat (145);
Described transverse-moving mechanism comprises: horizontal backboard (15), two levels are located at cross sliding rail (151) on horizontal backboard (15), two the traversing plates (152) be arranged on by slide block on cross sliding rail (151), drive two driving mechanisms of two traversing plates (152) respectively, described horizontal backboard (15) is fixedly connected with driving slide block (144), and described horizontal backboard (15) is provided with the slide block corresponding with slide rail (141).
8. a kind of Double-head transporter turning basket for solar battery sheet according to claim 7, it is characterized in that: the traversing motor (154) that described driving mechanism is comprised horizontal traversing leading screw (153), driven by reductor traversing leading screw (153) to rotate, described traversing leading screw (153) is arranged with traversing driving slide block (155), and described traversing driving slide block (155) is fixedly connected with traversing plate (152).
9. a kind of Double-head transporter turning basket for solar battery sheet according to claim 8, is characterized in that: described elevating screw (142) and traversing leading screw (153) are ball-screws.
10. a kind of Double-head transporter turning basket for solar battery sheet according to claim 9, it is characterized in that: described horizontal backboard (15) arranged outside has backplate (16), the both sides up and down of described backplate (16) are respectively arranged with seam of stepping down, and the two ends up and down of described mounting panel (1) are fixedly connected with traversing plate (152) by seam of stepping down.
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| CN201510692356.0A CN105374730B (en) | 2015-10-23 | 2015-10-23 | A kind of manipulator and its Double-head transporter for turning basket for solar battery sheet |
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| CN201510692356.0A CN105374730B (en) | 2015-10-23 | 2015-10-23 | A kind of manipulator and its Double-head transporter for turning basket for solar battery sheet |
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| CN111613560A (en) * | 2020-04-29 | 2020-09-01 | 无锡小强半导体科技有限公司 | Sucker moving mechanism |
| CN116504696A (en) * | 2023-06-29 | 2023-07-28 | 苏州诚拓智能装备有限公司 | PECVD transfer device and transfer method |
| WO2024179398A1 (en) * | 2023-03-02 | 2024-09-06 | 江苏微导纳米科技股份有限公司 | Loading and unloading system, carrying boat, suction cup assembly, and substrate loading method |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4420909A (en) * | 1981-11-10 | 1983-12-20 | Silicon Technology Corporation | Wafering system |
| JP2005169592A (en) * | 2003-12-15 | 2005-06-30 | Okamoto Machine Tool Works Ltd | Chucking mechanism of non-magnetic workpiece |
| CN201820777U (en) * | 2010-09-02 | 2011-05-04 | 董维来 | Automatic solar silicon wafer separator by wet process |
| CN104600156A (en) * | 2015-01-12 | 2015-05-06 | 江阴方艾机器人有限公司 | Silicon wafer automatically loading and unloading machine in photovoltaic diffusion process |
| CN204348698U (en) * | 2015-01-30 | 2015-05-20 | 东莞市启天自动化设备有限公司 | Guide card cloth sheet devices |
| CN204407346U (en) * | 2015-01-12 | 2015-06-17 | 江阴方艾机器人有限公司 | Silicon chip automatic loader and unloader in photovoltaic diffusing procedure |
| CN104992921A (en) * | 2015-07-16 | 2015-10-21 | 北京工业大学 | Clamping device for large-size ultrathin wafer |
-
2015
- 2015-10-23 CN CN201510692356.0A patent/CN105374730B/en active Active
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4420909A (en) * | 1981-11-10 | 1983-12-20 | Silicon Technology Corporation | Wafering system |
| US4420909B1 (en) * | 1981-11-10 | 1989-11-14 | ||
| US4420909B2 (en) * | 1981-11-10 | 1997-06-10 | Silicon Technology | Wafering system |
| JP2005169592A (en) * | 2003-12-15 | 2005-06-30 | Okamoto Machine Tool Works Ltd | Chucking mechanism of non-magnetic workpiece |
| CN201820777U (en) * | 2010-09-02 | 2011-05-04 | 董维来 | Automatic solar silicon wafer separator by wet process |
| CN104600156A (en) * | 2015-01-12 | 2015-05-06 | 江阴方艾机器人有限公司 | Silicon wafer automatically loading and unloading machine in photovoltaic diffusion process |
| CN204407346U (en) * | 2015-01-12 | 2015-06-17 | 江阴方艾机器人有限公司 | Silicon chip automatic loader and unloader in photovoltaic diffusing procedure |
| CN204348698U (en) * | 2015-01-30 | 2015-05-20 | 东莞市启天自动化设备有限公司 | Guide card cloth sheet devices |
| CN104992921A (en) * | 2015-07-16 | 2015-10-21 | 北京工业大学 | Clamping device for large-size ultrathin wafer |
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| CN106252266B (en) * | 2016-10-26 | 2019-11-01 | 河北晶龙阳光设备有限公司 | It is a kind of for loading and unloading the handler of solar battery sheet in quartz boat |
| CN106252266A (en) * | 2016-10-26 | 2016-12-21 | 河北晶龙阳光设备有限公司 | A kind of handler of solar battery sheet in loading and unloading quartz boat |
| CN106711069A (en) * | 2017-03-20 | 2017-05-24 | 常州亿晶光电科技有限公司 | Full-automatic silicon wafer inserting machine |
| CN107887314A (en) * | 2017-11-07 | 2018-04-06 | 河北晶龙阳光设备有限公司 | A kind of silicon chip transhipment loading attachment and the silicon chip transhipment stowage based on it |
| CN108400203A (en) * | 2018-03-31 | 2018-08-14 | 格润智能光伏南通有限公司 | A kind of folded support method of the automatic stepping of photovoltaic module |
| CN108565245A (en) * | 2018-04-20 | 2018-09-21 | 常州亿晶光电科技有限公司 | Silicon chip transfer combined machine hand |
| CN108565245B (en) * | 2018-04-20 | 2020-07-24 | 常州亿晶光电科技有限公司 | Combined manipulator for transferring silicon wafers |
| WO2019200688A1 (en) * | 2018-04-20 | 2019-10-24 | 常州亿晶光电科技有限公司 | Combined manipulator for silicon wafer transfer |
| CN108447948A (en) * | 2018-05-08 | 2018-08-24 | 昆山市么禾自动化科技有限公司 | A kind of silicon wafer wool making superposition wafer separator |
| CN108447948B (en) * | 2018-05-08 | 2023-10-17 | 昆山市么禾自动化科技有限公司 | Silicon wafer texturing and stacking slicing machine |
| CN109335664A (en) * | 2018-11-26 | 2019-02-15 | 深圳市捷佳伟创新能源装备股份有限公司 | A kind of position detecting system and quartz boat transfer device |
| CN111613560A (en) * | 2020-04-29 | 2020-09-01 | 无锡小强半导体科技有限公司 | Sucker moving mechanism |
| CN111613560B (en) * | 2020-04-29 | 2024-02-06 | 拉普拉斯(无锡)半导体科技有限公司 | Sucking disc moving mechanism |
| WO2024179398A1 (en) * | 2023-03-02 | 2024-09-06 | 江苏微导纳米科技股份有限公司 | Loading and unloading system, carrying boat, suction cup assembly, and substrate loading method |
| CN116504696A (en) * | 2023-06-29 | 2023-07-28 | 苏州诚拓智能装备有限公司 | PECVD transfer device and transfer method |
| CN116504696B (en) * | 2023-06-29 | 2023-09-15 | 苏州诚拓智能装备有限公司 | PECVD transfer device and transfer method |
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