CN112114909A - Robot arm correction system and robot arm correction method - Google Patents

Robot arm correction system and robot arm correction method Download PDF

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Publication number
CN112114909A
CN112114909A CN201910962038.XA CN201910962038A CN112114909A CN 112114909 A CN112114909 A CN 112114909A CN 201910962038 A CN201910962038 A CN 201910962038A CN 112114909 A CN112114909 A CN 112114909A
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China
Prior art keywords
robot
action
mechanical arm
sensing range
sensor
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CN201910962038.XA
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CN112114909B (en
Inventor
方泰又
刘冠君
卢佳源
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Zhukang Intelligent Data Hefei Co ltd
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Zhukang Intelligent Data Hefei Co ltd
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    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F9/00Arrangements for program control, e.g. control units
    • G06F9/06Arrangements for program control, e.g. control units using stored programs, i.e. using an internal store of processing equipment to receive or retain programs
    • G06F9/44Arrangements for executing specific programs
    • G06F9/448Execution paradigms, e.g. implementations of programming paradigms
    • G06F9/4482Procedural
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/02Sensing devices
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00Programme-controlled manipulators
    • B25J9/16Programme controls
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00Programme-controlled manipulators
    • B25J9/16Programme controls
    • B25J9/1679Programme controls characterised by the tasks executed
    • B25J9/1692Calibration of manipulator
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00Image analysis
    • G06T7/70Determining position or orientation of objects or cameras

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  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Software Systems (AREA)
  • Theoretical Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Manipulator (AREA)

Abstract

Provided are a robot calibration system and a robot calibration method. The mechanical arm correction method comprises the following steps: performing, by the robotic arm, a first action corresponding to the first X-Y plane; detecting whether the mechanical arm is located in a sensing range by a sensor; during the execution of the first action by the mechanical arm, judging a first execution time of the first action according to the time point when the mechanical arm leaves the sensing range and returns to the sensing range; and comparing the first execution time with the first reference time to judge whether the mechanical arm needs to be corrected.

Description

Robot arm correction system and robot arm correction method
Technical Field
The present invention relates to a robot calibration method, and more particularly, to a robot calibration system and a robot calibration method.
Background
The long-term operation process may cause the robot arm to wear. For example, the robot may shift its movement due to wear of the mechanism or aging of the material. For processes that require very precise robot operation, these offsets often cause process anomalies.
Disclosure of Invention
In view of the above, the present invention provides a system and a method for calibrating a robot arm, which can perform a predetermined action after the robot arm is opened to calibrate the robot arm.
The invention relates to a mechanical arm correction system, which comprises a mechanical arm, a sensor and a processor. The robot performs a first action corresponding to a first X-Y plane. The sensor detects whether the mechanical arm is located in the sensing range. The processor is coupled to the robot and the sensor, wherein the processor is configured to perform: during the execution of the first action by the mechanical arm, judging a first execution time of the first action according to the time point when the mechanical arm leaves the sensing range and returns to the sensing range; and comparing the first execution time with the first reference time to judge whether the mechanical arm needs to be corrected.
In an embodiment of the invention, the robot calibration system further includes a storage medium. The storage medium is coupled to the processor, wherein the first reference time is pre-stored in the storage medium.
In an embodiment of the invention, after the robot performs the first action, the robot moves along the Z-axis and then performs the second action corresponding to the second X-Y plane, and the processor is further configured to perform: judging a second execution time of the second action according to the time point when the mechanical arm leaves the sensing range and returns to the sensing range during the execution of the second action by the mechanical arm; and comparing the second execution time with a second reference time to judge whether the mechanical arm needs to be corrected.
In an embodiment of the invention, the processor is coupled to the output device, and the processor issues a prompt through the output device in response to determining that the robot needs to be calibrated.
In an embodiment of the invention, the sensor is a laser sensor, and the sensor is configured to emit a laser beam for detection to the sensing range.
The invention relates to a mechanical arm correction method, which is suitable for a mechanical arm and comprises the following steps: performing, by the robotic arm, a first action corresponding to the first X-Y plane; detecting whether the mechanical arm is located in a sensing range by a sensor; during the execution of the first action by the mechanical arm, judging a first execution time of the first action according to the time point when the mechanical arm leaves the sensing range and returns to the sensing range; and comparing the first execution time with the first reference time to judge whether the mechanical arm needs to be corrected.
In an embodiment of the invention, the robot calibration method further includes: the first reference time is pre-stored in the storage medium.
In an embodiment of the invention, the robot calibration method further includes: after the robot performs the first action, moving along the Z axis by the robot and then performing a second action corresponding to a second X-Y plane; judging a second execution time of the second action according to the time point when the mechanical arm leaves the sensing range and returns to the sensing range during the execution of the second action by the mechanical arm; and comparing the second execution time with a second reference time to judge whether the mechanical arm needs to be corrected.
In an embodiment of the invention, the robot calibration method further includes: and issuing a prompt via the output device in response to determining that the robot arm needs to be corrected.
In an embodiment of the invention, the sensor is a laser sensor, and the sensor is configured to emit a laser beam for detection to the sensing range.
Based on the above, the robot calibration system of the present invention can determine whether the robot needs to be calibrated according to the execution time of the preset action of the robot.
In order to make the aforementioned and other features and advantages of the invention more comprehensible, embodiments accompanied with figures are described in detail below.
Drawings
FIG. 1 is a schematic diagram of a robot calibration system according to an embodiment of the invention.
Fig. 2 is a top view of a robot according to an embodiment of the invention.
FIG. 3 is a flowchart illustrating a robot calibration method according to an embodiment of the present invention.
10: mechanical arm correction system
100: processor with a memory having a plurality of memory cells
200: storage medium
300: sensor device
310: laser beam
400: mechanical arm
EP: sensing range
S301, S303, S305, S307: step (ii) of
Detailed Description
In order that the contents of the invention may be more readily understood, the following specific examples are given as illustrative of the manner in which the invention may be practiced. Further, wherever possible, the same reference numbers are used in the drawings and the description to refer to the same or like parts.
FIG. 1 is a schematic diagram of a robot calibration system 10 according to an embodiment of the invention. The robot calibration system 10 includes a processor 100, a storage medium 200, a sensor 300, and a robot 400.
The processor 100 is coupled to the storage medium 200, the sensor 300, and the robot 400. The processor 100 is, for example, a Central Processing Unit (CPU), or other programmable general purpose or special purpose Micro Control Unit (MCU), a microprocessor (microprocessor), a Digital Signal Processor (DSP), a programmable controller, an Application Specific Integrated Circuit (ASIC), a Graphics Processing Unit (GPU), an Arithmetic Logic Unit (ALU), a Complex Programmable Logic Device (CPLD), a Field Programmable Gate Array (FPGA), or other similar components or combinations thereof.
The storage medium 200 is, for example, any type of fixed or removable Random Access Memory (RAM), read-only memory (ROM), flash memory (flash memory), hard disk (HDD), Solid State Drive (SSD), or the like or combination thereof, and is used for storing a plurality of modules or various applications executable by the robot calibration system 10 or the processor 100.
The sensor 300 is used to detect whether the robot 400 is located at a specific position. Specifically, the sensor 300 is a laser sensor configured to direct a laser beam 310 for detecting the robot 400 to a specific position of the X-Y plane to form a sensing range on the X-Y plane. Fig. 2 shows a top view of a robot 400 according to an embodiment of the invention. As shown in fig. 2, when the robot 400 is at a specific position within the sensing range EP, the sensor 300 can detect the presence of the robot 400 by the laser beam 310. In contrast, when the robot 400 is not at a specific position within the sensing range EP, the laser beam 310 of the sensor 300 cannot detect the presence of the robot 400. It should be noted that the size of the sensing range EP may be related to the installation position of the sensor 300 or the shape of the robot 400.
Please refer to fig. 1 and fig. 2, wherein X, Y and Z in fig. 1 and fig. 2 represent three coordinate axes of a rectangular coordinate system. The storage medium 200 may pre-store a look-up table associated with the actions of the robot and their corresponding reference times, as shown in table 1, wherein the look-up table may be regarded as a table in which the calibration process of the robot 400 is described. It should be noted that, in the present embodiment, the reference time listed in table 1 is accumulated from the beginning of the calibration procedure of the robot 400 (but the invention is not limited thereto). If the robot 400 has an offset, the offset corresponding to each action will cause a time difference between the execution time of the action and the corresponding reference time. Thus, later-performed actions accumulate time differences corresponding to previous actions. In other words, the later action may be executed at a time that deviates from the reference time corresponding to the action.
TABLE 1
Action Reference time
A first action: move +10 cm along the X axis 9 to 15 seconds
The second action: moving-10 cm along the Y axis 14 to 20 seconds
And (3) third action: moving-15 cm along the Z axis 19 to 30 seconds
The fourth action: move +10 cm along the X axis 29 to 35 seconds
And (5) fifth action: moving-10 cm along the Y axis 34 to 40 seconds
In the present embodiment, after the robot 400 is started, the processor 100 of the robot calibration system 10 may control the robot 400 to sequentially perform the actions as described in table 1, so as to perform the calibration procedure of the robot 400.
Specifically, after the robot 400 is activated, the processor 100 may control the robot 400 to perform a first action according to table 1. During the first motion, the robot 400 moves +10 cm along the X-axis, and thus leaves the sensing range EP of the sensor 300. Next, the robot 400 moves-10 cm along the X-axis to perform homing. After the robot 400 is returned to the home position, the robot 400 will return to the sensing range EP of the sensor 300, and the first action will be ended.
During the first action performed by the robot 400, the processor 100 may determine the first execution time of the first action according to a time point when the robot 400 leaves the sensing range EP and returns to the sensing range EP. Then, the processor 100 compares the first execution time with the reference time corresponding to the first action in table 1 to determine whether the robot needs to be calibrated. For example, if the processor 100 detects, through the sensor 300, that the robot 400 leaves the sensing range EP at the 10.5 th second and returns to the sensing range EP at the 14.5 th second during the first action performed by the robot 400, the processor 100 may determine that there is no offset of the robot 400 or the offset of the robot 400 has not reached the level to be corrected based on the first execution time used by the robot 400 to perform the first action within the reference time of 10-15 seconds. In contrast, if the processor 100 detects that the robot 400 leaves the sensing range EP at the 10 th second and returns to the sensing range EP at the 15.5 th second through the sensor 300, the processor 100 may determine that the robot 400 needs to be calibrated based on the first execution time used by the robot 400 to execute the first motion being out of the reference time 10-15 seconds.
In the above description, the processor 100 needs to determine whether the robot 400 needs to be calibrated according to the time point when the robot 400 leaves or returns to the sensing range EP. Therefore, each action for the X-axis (e.g., the first action or the fourth action shown in table 1) needs to be configured to completely move the robot 400 away from the sensing range EP of the sensor 300. If the processor 100 detects the movement of the robot 400 along the X-axis through the sensor 300 but the movement does not make the robot 400 leave the sensing range EP, the processor 100 may determine that the movement is an invalid movement according to the movement.
After performing the first action, the processor 100 may control the robot 400 to perform the second action according to table 1. The processor 100 may determine that the robot 400 has no offset or the offset of the robot 400 has not been corrected based on the second execution time of the robot 400 performing the second action within 14-20 seconds of the reference time. In contrast, the processor 100 may determine that the robot 400 needs to perform the calibration based on the second execution time used by the robot 400 to perform the second action being outside the reference time of 14-20 seconds.
In the above description, the processor 100 needs to determine whether the robot 400 needs to be calibrated according to the time point when the robot 400 leaves or returns to the sensing range EP. Therefore, each action (e.g., the second action or the fifth action shown in Table 1) for the Y-axis needs to be configured to completely move the robot 400 away from the sensing range EP of the sensor 300. If the processor 100 detects the movement of the robot 400 along the Y-axis through the sensor 300 but the movement does not make the robot 400 leave the sensing range EP, the processor 100 may determine that the movement is invalid.
After performing the first and second actions corresponding to the X-Y plane, processor 100 may control robot 400 to perform a third action, thereby causing robot 400 to move-15 cm along the Z-axis. The third action also includes a home indication for the robot 400, so the third action is complete after the robot 400 moves-15 cm along the Z-axis. During the third movement, the robot 400 will not leave the sensing range EP of the sensor 300. Therefore, the processor 100 cannot determine whether the robot 400 needs to be calibrated according to the time point when the robot 400 leaves the sensing range EP or returns to the sensing range EP. In contrast, the processor 100 will directly measure the distance traveled by the robot 400 in the Z-axis by the laser beam 310 passing through the sensor 300. The processor 100 may determine that the robot 400 has no offset or the offset of the robot 400 has not reached the level to be corrected based on the third execution time used by the robot 400 to execute the third movement being within 19-30 seconds of the reference time. In contrast, the processor 100 may determine that the robot 400 needs to perform the calibration based on the third execution time used by the robot 400 to execute the third movement being out of the reference time 19-30 seconds.
After the third action is performed, the processor 100 may control the robot 400 to perform the fourth action, the fifth action, …, and the like as shown in table 1 in sequence until the calibration process of the robot 400 is finished. It should be noted that although the fourth action is the same as the first action (but both actions correspond to different X-Y planes), the invention is not limited thereto. For example, the fourth motion may be a 'move +20 cm along the X axis' different from the first motion.
In some embodiments, the processor 100 may be coupled to an output device such as a screen or speaker. In response to the processor 100 determining that the robot 400 needs to be calibrated, the processor 100 may issue a prompt via the output device to instruct the operator to calibrate the robot 400.
Fig. 3 is a flowchart illustrating a robot calibration method according to an embodiment of the present invention, wherein the robot calibration method is applied to a robot, and the robot calibration method can be implemented by the robot calibration system 10 shown in fig. 1. In step S301, a first action corresponding to a first X-Y plane is performed by the robot 400. In step S303, the sensor 300 detects whether the robot 400 is located within the sensing range EP. In step S305, while the robot arm 400 performs the first action, a first execution time of the first action is determined from a point in time when the robot arm 400 leaves the sensing range EP and returns to the sensing range EP. In step S307, the first execution time and the first reference time are compared to determine whether the robot 400 needs to be calibrated.
In summary, the robot calibration system of the present invention can detect the execution time of the preset action performed by the robot through the laser beam sensor, and then determine whether the execution time of the action is within the error range according to the lookup table. If the execution time of the action exceeds the error range, the processor may determine that the robot may need to be corrected, and notify an operator of the robot of the determination result.
Although the present invention has been described with reference to the above embodiments, it should be understood that various changes and modifications can be made therein by those skilled in the art without departing from the spirit and scope of the invention.

Claims (10)

1. A robot calibration system, comprising:
a robot performing a first action corresponding to a first X-Y plane;
the sensor detects whether the mechanical arm is positioned in a sensing range; and
a processor coupled to the robot and the sensor, wherein the processor is configured to perform:
during the execution of the first action by the mechanical arm, judging a first execution time of the first action according to the time point when the mechanical arm leaves the sensing range and returns to the sensing range; and
and comparing the first execution time with a first reference time to judge whether the mechanical arm needs to be corrected.
2. The system of claim 1, further comprising:
a storage medium coupled to the processor, wherein the first reference time is pre-stored in the storage medium.
3. The system of claim 1, wherein after the robotic arm performs the first action, the robotic arm moves along a Z-axis and then performs a second action corresponding to a second X-Y plane, and the processor is further configured to perform:
judging a second execution time of the second action according to the time point when the mechanical arm leaves the sensing range and returns to the sensing range during the execution of the second action by the mechanical arm; and
and comparing the second execution time with a second reference time to judge whether the mechanical arm needs to be corrected.
4. The system of claim 1, wherein the processor is coupled to an output device, and the processor issues a prompt via the output device in response to determining that the robot needs to be corrected.
5. The system of claim 1, wherein the sensor is a laser sensor and the sensor is configured to direct a detecting laser beam toward the sensing area.
6. The utility model provides a manipulator correction method, is applicable to robotic arm, its characterized in that includes:
performing, by the robotic arm, a first action corresponding to a first X-Y plane;
detecting whether the mechanical arm is located in a sensing range by a sensor;
during the execution of the first action by the mechanical arm, judging a first execution time of the first action according to the time point when the mechanical arm leaves the sensing range and returns to the sensing range; and
and comparing the first execution time with a first reference time to judge whether the mechanical arm needs to be corrected.
7. The robot calibration method of claim 6, further comprising:
and pre-storing the first reference time in a storage medium.
8. The robot calibration method of claim 6, further comprising:
after the robotic arm has performed the first action, moving along the Z-axis by the robotic arm and then performing a second action corresponding to a second X-Y plane;
judging a second execution time of the second action according to the time point when the mechanical arm leaves the sensing range and returns to the sensing range during the execution of the second action by the mechanical arm; and
and comparing the second execution time with a second reference time to judge whether the mechanical arm needs to be corrected.
9. The robot calibration method of claim 6, further comprising: issuing a prompt via an output device in response to determining that the robotic arm needs to be corrected.
10. The method of claim 6, wherein the sensor is a laser sensor and the sensor is configured to direct a detection laser beam toward the sensing area.
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TW108121408A TWI693133B (en) 2019-06-20 2019-06-20 Robot arm calibration system and method of robot arm calibration
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Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06149327A (en) * 1992-11-12 1994-05-27 Fanuc Ltd Real-time position correcting method
KR19990016929A (en) * 1997-08-20 1999-03-15 윤종용 Calibration device and method of robot arm
TW200744807A (en) * 2006-06-06 2007-12-16 Powerchip Semiconductor Corp Wireless 3D position auto-offset system for robot arms
TW200826223A (en) * 2006-12-01 2008-06-16 Foxsemicon Integrated Tech Inc Transfer robot with automatic calibration function
JP2008141098A (en) * 2006-12-05 2008-06-19 Dainippon Screen Mfg Co Ltd Inspecting equipment for substrate carrier, and substrate treating equipment
CN104101312A (en) * 2013-04-05 2014-10-15 思捷昵私人有限公司 Apparatus and method for detecting position drift in a machine operation using a robot arm
TW201509617A (en) * 2013-09-14 2015-03-16 Nat Univ Chung Hsing Robot arm precision measurement system and measuring method thereof
CN104690736A (en) * 2015-02-12 2015-06-10 成都天马微电子有限公司 Mechanical arm as well as detection system and detection method of mechanical arm
US20160059419A1 (en) * 2014-09-03 2016-03-03 Canon Kabushiki Kaisha Robot apparatus and method for controlling robot apparatus
JP2016078149A (en) * 2014-10-15 2016-05-16 キヤノン株式会社 Robot device control method, robot device, program and recording medium
US20190077017A1 (en) * 2017-09-11 2019-03-14 Seiko Epson Corporation Robot and offset correction device for force sensor

Patent Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06149327A (en) * 1992-11-12 1994-05-27 Fanuc Ltd Real-time position correcting method
KR19990016929A (en) * 1997-08-20 1999-03-15 윤종용 Calibration device and method of robot arm
TW200744807A (en) * 2006-06-06 2007-12-16 Powerchip Semiconductor Corp Wireless 3D position auto-offset system for robot arms
TW200826223A (en) * 2006-12-01 2008-06-16 Foxsemicon Integrated Tech Inc Transfer robot with automatic calibration function
JP2008141098A (en) * 2006-12-05 2008-06-19 Dainippon Screen Mfg Co Ltd Inspecting equipment for substrate carrier, and substrate treating equipment
CN104101312A (en) * 2013-04-05 2014-10-15 思捷昵私人有限公司 Apparatus and method for detecting position drift in a machine operation using a robot arm
TW201501890A (en) * 2013-04-05 2015-01-16 Sigenic Pte Ltd Apparatus and method for detecting position drift in a machine operation using a robot arm
TW201509617A (en) * 2013-09-14 2015-03-16 Nat Univ Chung Hsing Robot arm precision measurement system and measuring method thereof
US20160059419A1 (en) * 2014-09-03 2016-03-03 Canon Kabushiki Kaisha Robot apparatus and method for controlling robot apparatus
JP2016078149A (en) * 2014-10-15 2016-05-16 キヤノン株式会社 Robot device control method, robot device, program and recording medium
CN104690736A (en) * 2015-02-12 2015-06-10 成都天马微电子有限公司 Mechanical arm as well as detection system and detection method of mechanical arm
US20190077017A1 (en) * 2017-09-11 2019-03-14 Seiko Epson Corporation Robot and offset correction device for force sensor

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TWI693133B (en) 2020-05-11
CN112114909B (en) 2024-03-15

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