CN113917202B - Probe mounting height calibration device, method, controller and computer storage medium - Google Patents
Probe mounting height calibration device, method, controller and computer storage medium Download PDFInfo
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- CN113917202B CN113917202B CN202111110744.5A CN202111110744A CN113917202B CN 113917202 B CN113917202 B CN 113917202B CN 202111110744 A CN202111110744 A CN 202111110744A CN 113917202 B CN113917202 B CN 113917202B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06794—Devices for sensing when probes are in contact, or in position to contact, with measured object
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06705—Apparatus for holding or moving single probes
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- Length Measuring Devices With Unspecified Measuring Means (AREA)
- A Measuring Device Byusing Mechanical Method (AREA)
Abstract
The embodiment of the application provides a probe installation height calibration device, a method, a controller and a computer storage medium, wherein the device comprises the following components: the probe comprises a Z-direction movement mechanism, a probe harness, a contact sensor and a controller; the controller is used for circularly executing the following operations after the Z-direction movement mechanism moves to the initial position: responding to the action instruction, controlling the Z-direction movement mechanism to perform at least one vertical movement with each movement of the vertical movement amount until the contact state of the probe and the contact sensor is determined to be changed, and then reversing the movement direction if the current vertical movement amount is greater than the preset measurement precision, reducing the vertical movement amount and triggering the action instruction; if the current vertical motion quantity is equal to the preset measurement precision, ending the cycle; the initial value of the vertical motion quantity is not more than the maximum elastic deformation height of the probe and not less than the preset measurement precision, and the initial motion direction is vertical downward; after the end of the cyclic operation, the actual mounting height of the probe is determined and the working position of the probe is calibrated.
Description
Technical Field
The application relates to the technical field of automation, in particular to probe installation height calibration equipment, a method, a controller and a computer storage medium.
Background
After the devices such as printed circuit boards (Printed Circuit board, PCBs), integrated circuits (Integrated Circuit, ICs) and the like are fabricated, the devices need to be inspected to verify that the circuit functions of the devices are normal. Along with the rapid development of semiconductor technology, the process is more complex, and the precision requirement on the detection equipment is higher.
The probe is a sensing device on the detection apparatus for detecting the function of the device circuitry. The probes are consumables that periodically need replacement because they wear out during the test due to the excessive number of contacts. In order to ensure that the mounting heights of the probes remain uniform before and after replacement, calibration is required after replacement of the probes. And because the mechanical property of the probe is fragile, the probe is easy to damage in the calibration process.
Disclosure of Invention
The embodiment of the application provides a probe installation height calibration device, a probe installation height calibration method, a controller and a computer storage medium, which are used for solving the problem that probes are easy to damage in the process of calibrating after reinstalling detection probes in the prior art.
In a first aspect, an embodiment of the present application provides a probe mounting height calibration apparatus, including a Z-motion mechanism, a probe harness, a contact sensor, and a controller; wherein:
the probe fixture is fixed on the Z-direction movement mechanism and is used for fixing a probe;
the contact sensor is connected with the controller and is used for sending a contact signal to the controller according to the contact state with the probe; wherein the contact state includes a contacted state and a non-contacted state;
the controller is used for controlling the Z-direction movement mechanism to circularly execute the following operations after the Z-direction movement mechanism moves to the initial position:
responding to an action instruction, controlling the Z-direction movement mechanism to perform at least one vertical movement with each movement of vertical movement amount until the contact state of the probe and the contact sensor is determined to be changed according to the received contact signal, and then: if the current vertical motion quantity is larger than the preset measurement precision, reversing the motion direction, reducing the vertical motion quantity, and triggering the action instruction; if the current vertical motion quantity is equal to the preset measurement precision, ending the circulation operation; the initial value of the vertical motion quantity is not more than the maximum elastic deformation height of the probe and not less than the preset measurement precision, and the initial motion direction is vertical downward;
after the circulation operation is finished, determining the actual mounting height of the probe with the preset measurement precision according to the initial position, each vertical movement amount, the corresponding movement times of each vertical movement amount and the movement direction;
and calibrating the working position of the probe according to the actual mounting height.
Optionally, the Z-direction movement mechanism comprises a stepper motor or a servo motor.
Optionally, the contact sensor comprises a metal correction plate, a signal processing device, wherein:
the metal correction plate is fixed below the Z-direction movement mechanism, is connected with the signal processing device through a signal wire, can be contacted with the probe in the process that the Z-direction movement mechanism drives the probe to move in the vertical direction, is used for forming electric connection with the probe when the metal correction plate is in a contacted state with the probe, generates a contact signal and provides the contact signal for the signal processing device through the signal wire;
the signal processing device is connected with the controller and is used for processing the contact signal provided by the metal correction plate and sending the contact signal to the controller.
Optionally, the controller reduces the amount of vertical movement, comprising:
if the current vertical motion quantity is reduced to x times the current vertical motion quantity and is not smaller than the preset measurement precision, the controller reduces the vertical motion quantity to x times the current vertical motion quantity, wherein x is more than 0 and less than 1;
or if the current vertical motion amount is not smaller than the preset measurement precision after being reduced by the preset difference value, the controller reduces the vertical motion amount by the preset difference value.
Optionally, the controller reduces the amount of vertical movement, further comprising:
and if the current vertical movement quantity is smaller than the preset measurement precision after being reduced, the controller reduces the vertical movement quantity to the preset measurement precision.
Optionally, the initial value of the amount of vertical movement is equal to the maximum elastic deformation height of the probe.
In a second aspect, based on the same inventive concept, an embodiment of the present application further provides a probe mounting height calibration method, including:
after the Z-direction movement mechanism moves to an initial position, the Z-direction movement mechanism is controlled to circularly execute the following operation, wherein a probe harness is fixed on the Z-direction movement mechanism, and a probe is fixed on the probe harness:
responding to an action instruction, controlling the Z-direction movement mechanism to perform at least one vertical movement with each movement of vertical movement amount until the contact state of the probe and a contact sensor arranged below the Z-direction movement mechanism is changed, and then: if the current vertical motion quantity is larger than the preset measurement precision, reversing the motion direction, reducing the vertical motion quantity, and triggering the action instruction; if the current vertical motion quantity is equal to the preset measurement precision, ending the circulation operation; the initial value of the vertical motion quantity is not more than the maximum elastic deformation height of the probe and not less than the preset measurement precision, the initial motion direction is vertical downward, and the contact state comprises a contacted state and a non-contacted state;
after the circulation operation is finished, determining the actual mounting height of the probe with the preset measurement precision according to the initial position, each vertical movement amount, the corresponding movement times of each vertical movement amount and the movement direction;
and calibrating the working position of the probe according to the actual mounting height.
Optionally, reducing the amount of vertical movement includes:
if the current vertical motion quantity is reduced to x times of the current vertical motion quantity and is not smaller than the preset measurement precision, reducing the vertical motion quantity to x times of the current vertical motion quantity, wherein x is more than 0 and less than 1;
or if the current vertical motion quantity is not smaller than the preset measurement precision after the preset difference value is reduced, reducing the vertical motion quantity by the preset difference value.
Optionally, reducing the amount of vertical movement further comprises:
and if the current vertical movement quantity is smaller than the preset measurement precision after being reduced, reducing the vertical movement quantity to the preset measurement precision.
Optionally, the initial value of the amount of vertical movement is equal to the maximum elastic deformation height of the probe.
In a third aspect, based on the same inventive concept, an embodiment of the present application further provides a controller, including: a processor and a memory for storing instructions executable by the processor;
wherein the processor is configured to execute the instructions to implement the probe mount height calibration method as described in the second aspect.
In a fourth aspect, based on the same inventive concept, an embodiment of the present application further provides a computer-readable storage medium storing a computer program for implementing the probe installation height calibration method according to the second aspect.
The application has the following beneficial effects:
according to the probe installation height calibration device, the method, the controller and the computer storage medium, the installed probe is controlled to be circularly executed to move at least once by one vertical movement amount each time, the vertical movement amount is reduced after the contact state of the probe and the contact sensor is changed and is reversely moved to the contact state to be changed again, the installation height of the probe is determined when the final vertical movement amount is reduced to the preset measurement precision and the contact state is changed again, the probe is prevented from being damaged by controlling the maximum elastic deformation height of the probe, the calibration speed is increased by continuously reducing the vertical movement amount, and the influence of the elastic deformation of the probe on the calibration is reduced, so that the installation height of the probe with the preset detection precision is obtained to calibrate the working position.
Drawings
FIG. 1 is a schematic diagram of a probe mounting height calibration apparatus according to an embodiment of the present application;
FIG. 2A is a flowchart of a probe mounting height calibration method according to an embodiment of the present application;
FIG. 2B is a second flowchart of a probe mounting height calibration method according to an embodiment of the present application;
FIG. 3 is a schematic view of a probe harness according to an embodiment of the present application;
fig. 4 is a schematic structural diagram of a controller according to an embodiment of the present application.
Detailed Description
In order that the above objects, features and advantages of the application will be readily understood, a further description of the application will be rendered by reference to specific embodiments thereof which are illustrated in the appended drawings. However, the exemplary embodiments can be embodied in many forms and should not be construed as limited to the embodiments set forth herein; rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the concept of the example embodiments to those skilled in the art. The same reference numerals in the drawings denote the same or similar structures, and thus a repetitive description thereof will be omitted. The words expressing the positions and directions described in the present application are described by taking the drawings as an example, but can be changed according to the needs, and all the changes are included in the protection scope of the present application. The drawings of the present application are merely schematic representations of relative positional relationships and are not intended to represent true proportions.
It is noted that in the following description, specific details are set forth in order to provide a thorough understanding of the present application. The present application may be embodied in many other forms than those herein described, and those skilled in the art may readily devise numerous other arrangements that do not depart from the spirit of the application. Therefore, the present application is not limited by the specific embodiments disclosed below. The description hereinafter sets forth a preferred embodiment for practicing the application, but is not intended to limit the scope of the application, as the description is given for the purpose of illustrating the general principles of the application. The scope of the application is defined by the appended claims.
The probe installation height calibration device, the probe installation height calibration method, the controller and the computer storage medium provided by the embodiment of the application are specifically described below with reference to the accompanying drawings.
In a first aspect, an embodiment of the present application provides a probe mounting height calibration apparatus, as shown in fig. 1, including a Z-direction movement mechanism 10, a probe harness 20, a contact sensor 30, and a controller 40; wherein:
the probe harness 20 is secured to the Z-motion mechanism 10 for securing the probe 50.
The contact sensor 30 is connected to the controller 40 for transmitting a contact signal to the controller 40 according to a contact state with the probe 50; wherein the contact state includes a contacted state and a non-contacted state.
The controller 40 is configured to control the Z-direction movement mechanism to perform the steps shown in fig. 2A and 2B:
s100, after the Z-direction movement mechanism is determined to move to an initial position, setting an initial value of a vertical movement amount to be not more than the maximum elastic deformation height of the probe and not less than the preset measurement precision, wherein the initial movement direction is vertical downward; the Z-direction movement mechanism is fixedly provided with a probe fixture, and the probe fixture is fixedly provided with the probe.
In the implementation process, the initial position may be a preset positioning point. The Z-direction movement mechanism 10 may be manually adjusted to the initial position by a person, or may be automatically adjusted to the initial position by the controller 40. The probe 50 may be mounted on the probe harness 20 at an angle (e.g., 45 ° from vertical) so that the actual mounting height of the probe 50 is the height of the probe 50 in the vertical direction at the initial position of the Z-motion mechanism on which the probe 50 is mounted. The maximum deformation height of the probe can be determined according to the length projected in the vertical direction of the maximum deformation length of the probe.
S110, responding to the action instruction, and controlling the Z-direction movement mechanism to perform one-time vertical movement of the vertical movement amount.
S120, judging whether the contact state of the probe and a contact sensor arranged below the Z-direction movement mechanism is changed. Wherein the contact state includes a contacted state and a non-contacted state.
If the result of the step S120 is no, returning to the step S110; if the result of the step S120 is yes, step S130 is executed.
S130, judging whether the current vertical motion quantity is larger than the preset measurement precision.
If the result of the step S130 is yes, step S140 is executed; if the result of the step S130 is no, step S150 is executed.
And S140, reversing the movement direction to reduce the vertical movement amount. And triggers the action instruction to return to the step S110.
In the implementation process, if the initial value of the vertical motion amount is not the preset measurement accuracy, the Z-direction motion mechanism 10 will initially drive the probe 50 to perform at least one vertical downward motion until the probe 50 and the contact sensor 30 are in a contacted state. The amount of vertical movement is then reduced and the Z-motion mechanism 10 will drive the probe 50 at least once vertically downward until the probe 50 is in a non-contact state with the contact sensor 30. And then, reducing the vertical movement amount … … again, and finally, when the vertical movement amount is reduced to the preset measurement precision, driving the probe 50 to perform at least one vertical upward or downward movement by the Z-direction movement mechanism 10 until the contact state of the probe 50 and the contact sensor 30 is changed.
S150, determining the actual mounting height of the probe with the preset measurement precision according to the initial position, each vertical movement amount, the corresponding movement times of each vertical movement amount and the movement direction.
In the specific implementation process, the vertical downward direction can be set to be the positive direction of the vertical movement, namely the vertical movement amount in the vertical downward direction is a positive value, the vertical movement amount in the vertical upward direction is a negative value, and finally the mounting height H of the probe is as follows:
H＝H 0 -∑n i x i
wherein H is 0 X is the height of the initial position relative to the vertical direction of the contact sensor i For the vertical movement, n i For Z-direction movement mechanism by x i The number of exercise times of a single exercise amount, i is the number of vertical exercise amount.
S160, calibrating the working position of the probe according to the actual installation height.
In the specific implementation process, the working position can be adjusted according to the difference between the mounting height H of the probe and the mounting height of the reference probe, or according to the mounting height H of the probe and the mounting height of the probe mounted last time, so as to ensure that the position of the working end of the probe meets the requirement.
In this way, damage to the probe during calibration can be avoided by controlling the amount of vertical movement of the Z-motion mechanism each time to be less than the maximum deformation height of the probe. If the initial value of the vertical movement amount is larger than the preset measurement precision, the total number of movements of the Z-direction movement mechanism can be reduced, so that the calibration speed is increased. And moreover, the vertical motion quantity is continuously reduced to approach measurement, the most accurate mounting height of the high-elasticity probe can be measured, the influence of elastic deformation on the measurement of the mounting height of the probe in the measurement process is reduced, and the measurement precision is improved.
Optionally, the Z-direction movement mechanism 10 includes a stepper motor or a servo motor.
In the specific implementation process, the linear guide rail, the gear guide rail, the ball screw and the like can be matched with the stepping motor or the servo motor for use, and the linear guide rail, the gear guide rail, the ball screw and the like are not limited herein.
As an alternative embodiment, as shown in fig. 1, the contact sensor 30 includes a metal correction plate 31, a signal processing device 32, wherein:
the metal correction plate 31 is fixed below the Z-direction movement mechanism, is connected with the signal processing device 32 through a signal wire, can contact with the probe 50 in the process that the Z-direction movement mechanism 10 drives the probe 50 to move in the vertical direction, is used for forming electric connection with the probe 50 when being in a contacted state with the probe 50, generates a contact signal and provides the contact signal to the signal processing device 32 through the signal wire;
the signal processing device 32 is connected to the controller 40, and is configured to process the contact signal provided by the metal correction plate 31 and send the processed contact signal to the controller 40.
In a specific implementation, the signal processing device 32 may be a filter and/or a signal amplifier, and is configured to process a contact signal generated by conduction when the probe 50 is electrically connected to the metal calibration plate 31 and send the processed contact signal to the controller 40, and not send a contact signal to the controller 40 when the probe 50 is electrically disconnected from the metal calibration plate 31 and is in a non-contact state. Alternatively, the signal processing device 32 may be a signal processing circuit for generating an analog or digital contact signal according to the on signal when the probe 50 is electrically connected to the metal correction plate 31 in a contacted state and transmitting the analog or digital non-contact signal to the controller 40 according to the signal generated by the non-receiving of the on signal when the probe 50 is electrically disconnected from the metal correction plate 31 in a non-contacted state.
As another alternative embodiment, the contact sensor is a pressure sensor. The pressure sensor can directly send the detected pressure value to the controller 40, and the controller 40 determines the contact state of the probe and the pressure sensor according to the pressure value; or the pressure sensor generates a contact signal according to the detected pressure value and the contact state of the probe and sends the contact signal to the controller 40 according to the contacted state, and generates an untouched signal according to the untouched state and sends the untouched signal to the controller 40 or does not send a signal to the controller 40.
In the specific implementation, the controller 40 may be an industrial control computer, a programmable logic controller (Programmable Logic Controller, PLC), etc., which is not limited herein. The probe harness 20 can ensure that the precision of fixing the probe harness 20 to the Z-direction movement mechanism meets the requirement, and the precision of fixing the probe 50 to the probe harness 20 meets the requirement, which is not limited in this embodiment of the application. In one embodiment, as shown in fig. 3, the probe harness 20 includes a first mounting block 21, a positioning block 23, and a second mounting block 24. Wherein the first mounting block 21 is secured to the Z-motion mechanism 10 (not shown in fig. 3) by fasteners (e.g., bolts, studs, screws, etc.) mounted to two first positioning mounting holes 22 therein. The three positioning blocks 23 are fixed to the first mounting block 21 by fasteners mounted to the second positioning mounting holes 25. The probe 50 is secured by being clamped and by being clamped by the two second mounting blocks 24, and the two second mounting blocks 24 are clamped and secured by the three positioning blocks 23.
As an alternative embodiment, in the step S140, the reducing the amount of vertical movement includes:
if the current vertical motion quantity is reduced to x times the current vertical motion quantity and is not smaller than the preset measurement precision, the controller reduces the vertical motion quantity to x times the current vertical motion quantity, wherein x is more than 0 and less than 1.
Preferably, the method comprises the steps of,the effect of reducing the total number of movements of the Z-direction movement mechanism is better, so that the calibration speed is better accelerated.
As another alternative embodiment, if the current vertical movement amount is not less than the preset measurement accuracy after being reduced by the preset difference, the controller reduces the vertical movement amount by the preset difference.
In the implementation process, the preset difference value may be a fixed value; it is also possible that each time the preset difference is reduced, at least a part of the preset differences are different, for example, the preset difference is larger at the beginning of several reductions, and then the preset difference is smaller at the beginning of the reductions, so that the preset detection accuracy is approached more quickly.
Further, in the step S140, the reducing the amount of vertical movement further includes:
and if the current vertical movement quantity is smaller than the preset measurement precision after being reduced, the controller reduces the vertical movement quantity to the preset measurement precision.
Thus, the vertical motion quantity is ensured to be not smaller than the preset detection precision, so that the equipment cannot realize control lower than the preset detection precision.
Optionally, the initial value of the amount of vertical movement is equal to the maximum elastic deformation height of the probe.
In this way, the probe can be brought into contact with the contact sensor more quickly, thereby increasing the calibration speed.
Optionally, as shown in fig. 2B, the step of controlling the Z-direction movement mechanism by the controller 40 further includes:
after the step S110 is completed, S111 determines whether the current position exceeds a preset limit position according to the initial position, each vertical motion amount, and the number of times and direction of motion corresponding to each vertical motion amount.
If the result of the step S111 is no, executing the step S120; if the result of the step S111 is yes, step S170 is executed.
S170, determining that the calibration fails.
In this way, calibration errors caused by calibration performed when no probe is mounted can be avoided.
And/or after the step S150 is completed, S151 is executed to determine whether the actual installation height is greater than a preset measurement threshold.
If the result of the step S151 is no, the step S160 is executed; if the result of the step S151 is yes, the step S170 is executed.
S170, determining that the calibration fails.
In this way, errors in the calculated actual mounting height due to equipment failure can be avoided.
In a second aspect, based on the same inventive concept, an embodiment of the present application further provides a probe mounting height calibration method, as shown in fig. 2A and 2B, including:
s100, after the Z-direction movement mechanism is determined to move to an initial position, setting an initial value of a vertical movement amount to be not more than the maximum elastic deformation height of the probe and not less than the preset measurement precision, wherein the initial movement direction is vertical downward; the Z-direction movement mechanism is fixedly provided with a probe fixture, and the probe fixture is fixedly provided with the probe.
S110, responding to the action instruction, and controlling the Z-direction movement mechanism to perform one-time vertical movement of the vertical movement amount.
S120, judging whether the contact state of the probe and a contact sensor arranged below the Z-direction movement mechanism is changed. Wherein the contact state includes a contacted state and a non-contacted state.
If the result of the step S120 is no, returning to the step S110; if the result of the step S120 is yes, step S130 is executed.
S130, judging whether the current vertical motion quantity is larger than the preset measurement precision.
If the result of the step S130 is yes, step S140 is executed; if the result of the step S130 is no, step S150 is executed.
And S140, reversing the movement direction to reduce the vertical movement amount. And triggers the action instruction to return to the step S110.
S150, determining the actual mounting height of the probe with the preset measurement precision according to the initial position, each vertical movement amount, the corresponding movement times of each vertical movement amount and the movement direction.
S160, calibrating the working position of the probe according to the actual installation height.
Optionally, in the step S140, reducing the amount of vertical motion includes:
if the current vertical motion quantity is reduced to x times of the current vertical motion quantity and is not smaller than the preset measurement precision, reducing the vertical motion quantity to x times of the current vertical motion quantity, wherein x is more than 0 and less than 1;
or if the current vertical motion quantity is not smaller than the preset measurement precision after the preset difference value is reduced, reducing the vertical motion quantity by the preset difference value.
Optionally, in step S140, reducing the amount of vertical motion further includes:
and if the current vertical movement quantity is smaller than the preset measurement precision after being reduced, reducing the vertical movement quantity to the preset measurement precision.
Optionally, the initial value of the amount of vertical movement is equal to the maximum elastic deformation height of the probe.
Optionally, as shown in fig. 2B, the method further includes:
after the step S110 is completed, S111 determines whether the current position exceeds a preset limit position according to the initial position, each vertical motion amount, and the number of times and direction of motion corresponding to each vertical motion amount.
If the result of the step S111 is no, executing the step S120; if the result of the step S111 is yes, step S170 is executed.
S170, determining that the calibration fails.
And/or after the step S150 is completed, S151 is executed to determine whether the actual installation height is greater than a preset measurement threshold.
If the result of the step S151 is no, the step S160 is executed; if the result of the step S151 is yes, the step S170 is executed.
S170, determining that the calibration fails.
Since the probe mounting height calibration method is the same as the function implemented by the controller 40 in the first aspect, reference may be made to the implementation of the first aspect, and details thereof are omitted herein.
In a third aspect, based on the same inventive concept, an embodiment of the present application further provides a controller, as shown in fig. 4, including: a processor 110 and a memory 120 for storing instructions executable by the processor 110;
wherein the processor 110 is configured to execute the instructions to implement the probe mount height calibration method as described in the second aspect.
In particular implementations, the devices may vary considerably in configuration or performance, and may include one or more processors 110 and memory 120, one or more storage media 130 storing applications 131 or data 132. Wherein memory 120 and storage medium 130 may be transitory or persistent storage. Still further, the processor 110 may be configured to communicate with a storage medium 130, and execute a series of instruction operations in the storage medium 130 on the device. The device may also include one or more power sources (not shown in fig. 4); one or more transceivers 140, the transceivers 140 including a wired or wireless network interface 141, one or more input-output interfaces 142; and/or one or more operating systems 133, such as Windows, mac OS, linux, IOS, android, unix, freeBSD, etc.
The processor 110 may be a general purpose processor such as a central processing unit (Central Processing Unit, CPU), digital signal processor (Digital Signal Processor, DSP), application specific integrated circuit (Application Specific Integrated Circuit, ASIC), field programmable gate array (Field Programmable Gate Array, FPGA) or other programmable logic device, discrete gate or transistor logic device, discrete hardware components, which may implement or perform the methods disclosed in embodiments of the application. The general purpose processor may be a microprocessor or any conventional processor or the like. The steps of a method disclosed in connection with the embodiments of the present application may be embodied directly in a hardware processor for execution, or in a combination of hardware and software modules in the processor for execution.
The Memory 120 may include readable media in the form of volatile Memory, such as random access Memory (Random Access Memory, RAM) and/or cache Memory, and may further include Read-Only Memory (ROM).
In a fourth aspect, based on the same inventive concept, an embodiment of the present application further provides a computer-readable storage medium storing a computer program for implementing the probe installation height calibration method according to the second aspect.
According to the probe installation height calibration device, the method, the controller and the computer storage medium, the installed probe is controlled to be circularly executed to move at least once by one vertical movement amount each time, the vertical movement amount is reduced after the contact state of the probe and the contact sensor is changed and is reversely moved to the contact state to be changed again, the installation height of the probe is determined when the final vertical movement amount is reduced to the preset measurement precision and the contact state is changed again, the probe is prevented from being damaged by controlling the maximum elastic deformation height of the probe, the calibration speed is increased by continuously reducing the vertical movement amount, and the influence of the elastic deformation of the probe on the calibration is reduced, so that the installation height of the probe with the preset detection precision is obtained to calibrate the working position.
It will be appreciated by those skilled in the art that embodiments of the present application may be provided as a method, system, or computer program product. Accordingly, the present application may take the form of an entirely hardware embodiment, an entirely software embodiment or an embodiment combining software and hardware aspects. Furthermore, the present application may take the form of a computer program product embodied on one or more computer-usable storage media (including, but not limited to, disk storage, CD-ROM, optical storage, and the like) having computer-usable program code embodied therein.
The present application is described with reference to flowchart illustrations and/or block diagrams of methods, apparatus (systems) and computer program products according to the application. It will be understood that each flow and/or block of the flowchart illustrations and/or block diagrams, and combinations of flows and/or blocks in the flowchart illustrations and/or block diagrams, can be implemented by computer program instructions. These computer program instructions may be provided to a processor of a general purpose computer, special purpose computer, embedded processor, or other programmable data processing apparatus to produce a machine, such that the instructions, which execute via the processor of the computer or other programmable data processing apparatus, create means for implementing the functions specified in the flowchart flow or flows and/or block diagram block or blocks.
These computer program instructions may also be stored in a computer-readable memory that can direct a computer or other programmable data processing apparatus to function in a particular manner, such that the instructions stored in the computer-readable memory produce an article of manufacture including instruction means which implement the function specified in the flowchart flow or flows and/or block diagram block or blocks.
These computer program instructions may also be loaded onto a computer or other programmable data processing apparatus to cause a series of operational steps to be performed on the computer or other programmable apparatus to produce a computer implemented process such that the instructions which execute on the computer or other programmable apparatus provide steps for implementing the functions specified in the flowchart flow or flows and/or block diagram block or blocks.
It will be apparent to those skilled in the art that various modifications and variations can be made to the present application without departing from the spirit or scope of the application. Thus, it is intended that the present application also include such modifications and alterations insofar as they come within the scope of the appended claims or the equivalents thereof.
Claims (12)
1. The probe installation height calibration device is characterized by comprising a Z-direction movement mechanism, a probe fixture, a contact sensor and a controller; wherein:
the probe fixture is fixed on the Z-direction movement mechanism and is used for fixing a probe;
the contact sensor is connected with the controller and is used for sending a contact signal to the controller according to the contact state with the probe; wherein the contact state includes a contacted state and a non-contacted state;
the controller is used for controlling the Z-direction movement mechanism to circularly execute the following operations after the Z-direction movement mechanism moves to the initial position:
responding to an action instruction, controlling the Z-direction movement mechanism to perform at least one vertical movement with each movement of vertical movement amount until the contact state of the probe and the contact sensor is determined to be changed according to the received contact signal, and then: if the current vertical motion quantity is larger than the preset measurement precision, reversing the motion direction, reducing the vertical motion quantity, and triggering the action instruction; if the current vertical motion quantity is equal to the preset measurement precision, ending the circulation operation; the initial value of the vertical motion quantity is not more than the maximum elastic deformation height of the probe and not less than the preset measurement precision, and the initial motion direction is vertical downward;
after the circulation operation is finished, determining the actual mounting height of the probe with the preset measurement precision according to the initial position, each vertical movement amount, the corresponding movement times of each vertical movement amount and the movement direction;
and calibrating the working position of the probe according to the actual mounting height.
2. The apparatus of claim 1, wherein the Z-motion mechanism comprises a stepper motor or a servo motor.
3. The apparatus of claim 1, wherein the contact sensor comprises a metal calibration plate, a signal processing device, wherein:
the metal correction plate is fixed below the Z-direction movement mechanism, is connected with the signal processing device through a signal wire, can be contacted with the probe in the process that the Z-direction movement mechanism drives the probe to move in the vertical direction, is used for forming electric connection with the probe when the metal correction plate is in a contacted state with the probe, generates a contact signal and provides the contact signal for the signal processing device through the signal wire;
the signal processing device is connected with the controller and is used for processing the contact signal provided by the metal correction plate and sending the contact signal to the controller.
4. The apparatus of claim 1, wherein the controller reduces an amount of vertical movement, comprising:
if the current vertical motion quantity is reduced to x times the current vertical motion quantity and is not smaller than the preset measurement precision, the controller reduces the vertical motion quantity to x times the current vertical motion quantity, wherein x is more than 0 and less than 1;
or if the current vertical motion amount is not smaller than the preset measurement precision after being reduced by the preset difference value, the controller reduces the vertical motion amount by the preset difference value.
5. The apparatus of claim 4, wherein the controller reduces an amount of vertical movement, further comprising:
and if the current vertical movement quantity is smaller than the preset measurement precision after being reduced, the controller reduces the vertical movement quantity to the preset measurement precision.
6. The apparatus of claim 1, wherein an initial value of the amount of vertical movement is equal to a maximum elastic deformation height of the probe.
7. A method of calibrating a mounting height of a probe, comprising:
after the Z-direction movement mechanism moves to an initial position, the Z-direction movement mechanism is controlled to circularly execute the following operation, wherein a probe harness is fixed on the Z-direction movement mechanism, and a probe is fixed on the probe harness:
responding to an action instruction, controlling the Z-direction movement mechanism to perform at least one vertical movement with each movement of vertical movement amount until the contact state of the probe and a contact sensor arranged below the Z-direction movement mechanism is changed, and then: if the current vertical motion quantity is larger than the preset measurement precision, reversing the motion direction, reducing the vertical motion quantity, and triggering the action instruction; if the current vertical motion quantity is equal to the preset measurement precision, ending the circulation operation; the initial value of the vertical motion quantity is not more than the maximum elastic deformation height of the probe and not less than the preset measurement precision, the initial motion direction is vertical downward, and the contact state comprises a contacted state and a non-contacted state;
after the circulation operation is finished, determining the actual mounting height of the probe with the preset measurement precision according to the initial position, each vertical movement amount, the corresponding movement times of each vertical movement amount and the movement direction;
and calibrating the working position of the probe according to the actual mounting height.
8. The method of claim 7, wherein reducing the amount of vertical motion comprises:
if the current vertical motion quantity is reduced to x times of the current vertical motion quantity and is not smaller than the preset measurement precision, reducing the vertical motion quantity to x times of the current vertical motion quantity, wherein x is more than 0 and less than 1;
or if the current vertical motion quantity is not smaller than the preset measurement precision after the preset difference value is reduced, reducing the vertical motion quantity by the preset difference value.
9. The method of claim 8, wherein reducing the amount of vertical motion further comprises:
and if the current vertical movement quantity is smaller than the preset measurement precision after being reduced, reducing the vertical movement quantity to the preset measurement precision.
10. The method of claim 7, wherein the initial value of the amount of vertical movement is equal to the maximum elastic deformation height of the probe.
11. A controller, comprising: a processor and a memory for storing instructions executable by the processor;
wherein the processor is configured to execute the instructions to implement the probe mount height calibration method of any of claims 7-10.
12. A computer readable storage medium, characterized in that the computer readable storage medium stores a computer program for implementing the probe installation height calibration method according to any one of claims 7 to 10.
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