JP6824593B2 - Stage device and compound stage control device - Google Patents

Description

The present invention relates mainly to a stage device suitable for use as a drive portion of a production facility or an inspection facility in a factory, and a control device for a composite stage in which a plurality of stage devices are combined.

Conventionally, stage devices have been used mainly in factories for product manufacturing lines and inspection lines. The stage device driven by a motor is also called an electric actuator, and is used for moving products in a factory or for a driving part of production equipment or inspection equipment. As such a stage device, the device disclosed in Patent Document 1 is known.

The device described in Patent Document 1 sets the stop position, speed and acceleration of the slider in the operation control of the slider (table), and operates under the set operating conditions, and the speed and acceleration of the slider are determined by the speed and acceleration of the device. The setting is made by the user operating the speed controller and the acceleration controller while checking the moving state of the slider. This eliminates the complicated work of inputting numerical data each time as in the prior art, and it is said that the user of the device can easily and surely set each movement condition.

Japanese Unexamined Patent Publication No. 2004-054789

In the stage device described in Patent Document 1, the user can easily set the speed and acceleration of the slider, but in the case of production equipment and inspection equipment, it may be difficult to adjust after the stage device is installed, so the necessary timing. It may not be possible to adjust with. In addition, if the user's proficiency level is low, it may be difficult to set the speed and acceleration of the slider.

Further, if the stage device is continuously used, the drive portion and the like deteriorate over time, but the stage device described in Patent Document 1 requires periodic inspection of the device. Further, in a composite stage in which a plurality of stage devices are combined, there is a disadvantage that it is difficult to determine which stage device is deteriorated.

An object of the present invention is to provide a stage device capable of maintaining the operating conditions of the device in a suitable state even when it is difficult to adjust the device after installation or when the user's proficiency level is low. And. Further, in addition to the above object, the present invention provides a stage device that can grasp the operating status of the stage device and automatically adjust even if the stage device deteriorates due to play, etc., and is easy to maintain. The purpose is to do. Further, the present invention provides a control device capable of identifying and notifying a defective stage device in a composite stage including a plurality of stage devices.

In order to achieve the above object, the stage device of the present invention includes a stage mechanism for moving a table for moving an object in a predetermined trajectory, a motor for driving the stage mechanism, a position sensor for detecting the position of the table, and a position sensor. A stage device including an acceleration sensor that detects an acceleration generated in the table and a control unit that controls the operation of the motor. The control unit includes a position control signal that indicates a position of the table and the table. When the rotation control of the motor is performed by the acceleration control signal instructing the acceleration of the motor and the motor is driven so that the table becomes the target position by the position control signal, the table becomes the target acceleration by the acceleration control signal. When the detection value of the position sensor when the table is moved by the motor exceeds a predetermined position threshold and is different from the target position, the detection value of the position sensor is driven so as to be. The position control signal is corrected so that is the target position, the detection value of the acceleration sensor is frequency-analyzed, and the natural vibration frequency of the moving body in which the table and the object moved by the table are integrated. It is characterized in that the rotation speed of the motor when the natural vibration frequency is reached is acquired, and the operating time at the rotation speed of the motor when the natural vibration frequency is reached is reduced .

According to the stage device of the present invention, since the control unit transmits the position control signal and the acceleration control signal to control the movement of the table not only for the position information but also for the acceleration, the movement of the table can be performed accurately and quickly. You can do it. Further, when the detection value of the position sensor when the table is moved by the motor exceeds a predetermined position threshold value and is different from the target position, the control unit sets the detection value of the position sensor as the target position. Correct the position control signal.

If the detected value of the position sensor is different from the target position, it is possible that there is play due to wear or deterioration of each part of the stage mechanism. In the stage device of the present invention, the position of the table moved by the position control signal is monitored by the position sensor, and when such backlash occurs, the position control signal is corrected according to the backlash. .. Therefore, in the stage device of the present invention, not only the table can be correctly positioned, but also the generated backlash can be grasped.
Further, in the stage device of the present invention, the control unit frequency-analyzes the detected value of the acceleration sensor to obtain the natural vibration frequency of the moving body in which the table and the object moved by the table are integrated. , The rotation speed of the motor at the natural vibration frequency is acquired, and the operating time at the rotation speed of the motor at the natural vibration frequency is reduced.
According to this configuration, the time for the table to move with the natural vibration frequency of the table and the moving body in which the object moved by the table is integrated is reduced, so that the burden on the stage device due to the resonance of the table or the like is reduced. It can be mitigated.

Further, the stage device of the present invention further includes a load sensor for detecting the load applied to the table, the acceleration control signal includes a positive acceleration control signal and a negative acceleration control signal, and the control unit is the control unit. When the detected value of the load sensor exceeds a predetermined load threshold value, it is preferable to correct the acceleration control signal to a value having a low absolute value.

If the stage device is continuously operated while the load generated on the table exceeds a predetermined load threshold value, the stage device may be damaged. In the present invention, since the acceleration control signal is corrected to a value lower than the normal acceleration control signal in such a case, the burden on the stage device can be reduced.

Further, in the stage device of the present invention, it is preferable that the control unit corrects the acceleration control signal at a predetermined time before the change point at which the acceleration control signal is changed. According to this configuration, even when the load applied to the table is large, the correction for lowering the absolute value of the acceleration is performed before a predetermined time of the change point of the acceleration. That is, in both the case of positive acceleration and the case of negative acceleration (deceleration), the absolute value of acceleration becomes lower before the change point of acceleration, so that the change in acceleration becomes gradual. Therefore, for example, when the table changes from the accelerated state or the decelerated state to a constant speed, overshoot is suppressed and the overload generated on the table is suppressed.

Further, in the stage device of the present invention, the acceleration sensor detects a gravitational acceleration component generated in the moving direction of the table, and the control unit sets the acceleration control signal to a value including the gravitational acceleration component. Is preferable. According to this, for example, when the table moves up and down, the acceleration generated in the table is controlled in consideration of the gravitational acceleration, so that there is no possibility that the table is excessively accelerated.

Further, the stage device of the present invention further includes a gyro sensor for detecting the posture of the table, and the control unit has the posture of the table detected by the detection value of the gyro sensor exceeding a predetermined posture threshold value. In such a case, it is preferable to correct the acceleration control signal to a value having a low absolute value.

When the posture of the table exceeds a predetermined posture threshold, it is conceivable that an excessive load is applied to the table. In such a case, in the present invention, since the acceleration control signal is corrected to a value lower in absolute value than the normal acceleration control signal, further deterioration of the stage device including the table can be prevented.

According to this configuration, the time for the table to move with the natural vibration frequency of the table and the object moved by the table is reduced, so that the burden on the stage device due to resonance of the table or the like can be reduced.

The control device for the composite stage of the present invention is a device for controlling a composite stage in which a plurality of the stage devices are combined, and a correction value when the position control signal is corrected in any of the stage devices is a predetermined correction tolerance. When it exceeds the value, it is characterized by including a notification unit that identifies the stage device and notifies an alarm.

According to this configuration, in a composite stage in which a plurality of stage devices are combined, even if the backlash of a certain stage device exceeds an allowable range, the stage device can be specified by an alarm by a notification unit. .. Therefore, even if an inconvenience occurs due to backlash or the like in the entire composite stage, the stage device that causes the trouble can be easily identified, and the restoration work or the like can be performed quickly.

Similarly, when the composite stage control device of the present invention includes a load sensor for detecting the load applied to the table, the notification unit detects the load sensor in any of the stage devices. When the value exceeds a predetermined load threshold, it is preferable to identify the stage device and notify an alarm.

Similarly, in the control device for the composite stage of the present invention, when the stage device includes a gyro sensor for detecting the posture of the table, the notification unit is detected by the detection value of the gyro sensor. When the posture of the table exceeds a predetermined posture threshold, it is preferable to identify the stage device and notify an alarm.

According to the stage device of the present invention, a stage device capable of maintaining the operating conditions of the device in a suitable state even when it is difficult to adjust the device after installation or when the user's proficiency level is low. Can be provided. Further, according to the stage device of the present invention, it is possible to grasp the operating state of the stage device and automatically adjust the stage device even if the stage device is deteriorated such as backlash, and provide a stage device that is easy to maintain. be able to. Further, in a composite stage including a plurality of stage devices, a defective stage device can be identified and notified.

Explanatory drawing which shows the composite stage in which a plurality of stage devices are connected. The explanatory view which shows the linear motion stage which is an example of the stage apparatus of this invention. Explanatory drawing which shows the functional structure of the linear motion stage, the composite stage and the operation terminal which is the control device thereof. A graph showing the relationship between speed and time when the table of the stage device is moved.

Next, a stage device and a control device for a composite stage, which are examples of the embodiments of the present invention, will be described with reference to FIGS. 1 to 4. FIG. 1 is an explanatory view showing a composite stage in which a plurality of stage devices are connected, FIG. 2 is an explanatory view showing a linear motion stage which is an example of the stage device of the present invention, and FIG. 3 is a linear motion stage, a composite stage and its control. An explanatory diagram showing a functional configuration of an operation terminal which is an apparatus, FIG. 4 is a graph showing a relationship between speed and time when a table of a stage apparatus in the present embodiment is moved.

As shown in FIG. 1, in the present embodiment, a plurality of stage devices are combined to form a composite stage 1. In FIG. 1, the stage device is a combination of a linear motion stage 2, a linear motion stage 3, and a linear motion stage 4 from the bottom. Further, a goniometer stage 5, a goniometer stage 6, and a rotary stage 7 are combined in front of the linear motion stage 4 in the Y direction.

In FIG. 1, the linear motion stage 2 is driven back and forth in the X direction. A linear motion stage 3 is also attached to the upper surface of the linear motion stage 2, and the table 3a of the linear motion stage 3 is driven back and forth in the Y direction in FIG.

Further, in FIG. 1, a linear motion stage 4 that moves up and down in the Z direction is attached to the upper surface of the linear motion stage 3 via a substantially L-shaped bracket 8. The table 4a of the linear motion stage 4 is driven up and down in the Z direction in FIG. Further, on the front surface of the table 4a of the linear motion stage 4, a goniometer stage 5 provided with a table 5a that draws an arc trajectory about the Z direction is attached.

A goniometer stage 6 provided with a table 6a that draws an arc orbit about the X direction is attached to the front surface of the goniometer stage 5 in the Y direction. Further, on the front surface of the table 6a of the gonio stage 6, a rotating stage 7 provided with a table 7a that performs a circular motion about the Y axis is attached.

The composite stage 1 uses a jig (not shown) attached to the surface of the table 7a of the rotary stage 7 to process parts of a precision machine. An operation program or the like is set in the composite stage 1 by an operation terminal 10 (see FIG. 3) which is a control device.

Next, with reference to FIG. 2, the stage apparatus of this embodiment will be described by taking the linear motion stage 2 as an example. The linear motion stage 2 of the present embodiment includes a stage mechanism 21 capable of reciprocating in the uniaxial direction and a motor 22 for driving the stage mechanism 21. The stage mechanism 21 includes a base 23 fixed to the installation location and a table 24 that reciprocates on the base 23.

The motor 22 is fixed to the side surface of the base 23. Further, the motor 22 is electrically connected to the motor controller 26 (see FIG. 3) via the connector 25. In the present embodiment, the motor 22 uses a stepping motor, and the motor controller 26 can control the rotation speed and acceleration of the motor 22, the position of the table 24, and the like.

Further, the stage mechanism 21 includes a ball screw 28 connected to the motor 22 via a coupling 27, and a nut member 29 moved by the ball screw 28 in the front-rear direction (X direction in FIG. 2). A load cell (load sensor) 30 that connects the nut member 29 and the back surface of the table 24 is fixed to the nut member 29.

The load cell 30 is a sensor that detects the weight of the table 24 and the object placed on the table 24. In the present embodiment, the weights of the linear motion stage 3, the linear motion stage 4, the goniometer stage 5, the goniometer stage 6, the rotary stage 7 and their accessories mounted on the table 24 are detected.

Further, the load cell 30 can detect the load when the table 24 is moved. For example, the moment associated with the movement of each stage when the table 24 is moved, the load generated during processing of the parts held by the composite stage 1, and the like. Further, the load generated on the table 24 changes due to the deterioration of each stage over time, and the change can also be detected.

Further, on the back surface of the table 24, an acceleration sensor 32 and a gyro sensor 33 attached to the substrate 31 are provided. The acceleration sensor 32 can detect not only the acceleration in the X direction, which is the advancing / retreating direction of the table 24, but also the acceleration in the Y direction and the vertical Z direction. The gyro sensor 33 is a sensor that detects the angle, angular velocity, etc. of the table 24, and detects movements such as tilting and twisting of the table 24.

Further, the base 23 is provided with a position sensor 34. The position sensor 34 detects the position of the table 24 by detecting the position of the scale 35 that moves with the table 24 with respect to the base 23. Further, the position sensor 34 can detect the backlash of the ball screw 28 due to the deterioration of the linear motion stage 2 with time.

In the linear motion stage 2 of the present embodiment, the temperature of the first temperature sensor 36 for detecting the temperature in the vicinity of the position sensor 34, the second temperature sensor 37 for detecting the temperature of the nut member 29, and the temperature of the motor 22. A third temperature sensor 38 is provided for detecting the above.

By detecting the temperature in the vicinity of the position sensor 34, the first temperature sensor 36 can correct the error due to the temperature of the scale 35. The second temperature sensor 37 detects a temperature rise of the nut member 29 when a defect occurs in the ball screw 28, enabling early detection of the defect. The third temperature sensor 38 detects a temperature rise of the motor 22 when a problem occurs in the motor 22 and enables early detection of the problem.

Next, the functional configuration of the linear motion stage 2 of the present embodiment will be described with reference to FIG. As shown in FIG. 3, in the linear motion stage 2, the stage mechanism 21 and the motor 22 are connected, and the motor controller 26 is electrically connected to the motor 22. Each of the above sensors is connected to the motor controller 26 and receives a signal from each sensor. The motor controller 26 includes a control unit 39, a communication unit 40, and a storage unit 41.

The linear motion stage 2 is electrically connected to the operation terminal 10 together with the linear motion stage (the stage is abbreviated as S in FIG. 3; the same applies hereinafter) 3, the linear motion stage 4, the goniometer stage 5, the goniometer stage 6, and the rotary stage 7. It is connected. The operation terminal 10 is a terminal used when the user of the composite stage 1 inputs the operation program of the composite stage 1.

As shown in FIG. 3, the operation terminal 10 has an input unit 42 for inputting an operation program or the like of the composite stage 1, a stage control unit 43 for operating the composite stage 1 by the operation program, and a display of the operation program or the like. A display unit 44 for performing the above, a notification unit 45 for displaying defect information of the composite stage 1 on the display unit 44, a storage unit 46 for storing various data, the composite stage 1 and an external network (not shown) and the like. It is provided with a communication unit 47 for communicating.

Here, the motor controller 26 is composed of hardware (not shown) such as a microcomputer and a memory as a storage medium, and software for controlling the rotation of the motor 22. Further, the operation terminal 10 is composed of a computer composed of various processors such as a CPU, a memory as a storage medium, various interfaces and the like (not shown). Further, the operation terminal 10 can also use a desktop type or notebook type computer, a tablet terminal, or the like.

Next, the operation of the linear motion stage 2 and the composite stage 1 of the present embodiment will be described. In the composite stage 1, parts of a precision machine are processed at the tip of a jig (not shown) attached to the table 7a of the rotary stage 7.

Specifically, for example, with reference to the center position of the ring-shaped table 7a of the rotary stage 7 in FIG. 1, point A is a receiving point for receiving the unprocessed part from another device, and point B is a processing point for processing the part. , C point will be described as an example of the reciprocating movement between these three points as the release point of the machined part.

First, FIG. 1 shows a state in which a reference point indicating a jig is located at a processing point B for processing a part. When receiving the supply of parts from this state, the reference point is moved from the machining point B in the direction of the arrow X (lower right in FIG. 1) and in the direction opposite to the arrow Z (downward). And move it in the direction of the arrow of Y (lower left direction). In reality, these movements are performed at the same time, and the reference point moves from the processing point B to the receiving point A.

In these movements, it is the linear motion stage 2 that moves the reference point from the machining point B in the X direction, and it is the linear motion stage 4 that moves the reference point in the Z direction, and the reference point is moved in the Y direction. It is the linear motion stage 3 to make it.

On the contrary, when moving the reference point from the receiving point A to the processing point B, the reference point is moved in the direction opposite to the arrow of X from the receiving point A (upper left direction) and in the direction of the arrow Z (upward). And move it in the direction opposite to the Y arrow (upper right direction).

Similarly, when the reference point is moved from the machining point B to the release point C, the reference point is moved in the direction opposite to the arrow of X (upper left direction). At this time, there is no movement in the Y direction and the Z direction.

Further, at the machining point B, the posture of a part (not shown) directly affects the machining accuracy, so that the posture control of the composite stage 1 is important. Specifically, the posture of the part to be processed is taken with a photograph or a moving image, and the posture of the part is detected by image analysis. At this time, the posture of the component may be detected by using infrared rays or a laser in combination.

When the detected posture of the component is different from the preset reference posture of the component, the composite stage 1 corrects the posture of the component to be the reference posture. Specifically, when the positions in the X, Y, and Z directions are deviated, the linear motion stages 2, 3 and 4 are moved, and when the turning angles around the X axis or the Z axis of the parts are different, The gonio stages 5 and 6 are moved, and when the angles in the circumferential direction about the Y axis are different, the rotating stage 7 is moved.

Next, the operation in the linear motion stage 2 will be described. The linear motion stage 2 is operated according to the operation program set up by the operation terminal 10. When the linear motion stage 2 is in the operating state, the load cell 30 detects the weight and load of each stage and accessories mounted on the upper surface of the table 24. The weight and load data are sequentially stored in a storage unit 41 provided in the motor controller 26. Further, the weight and load data are transmitted to the operation terminal 10 and stored in the storage unit 46 in the operation terminal 10.

Here, in the linear motion stage 2, the rotary stage 7 is fixed on the table 24 together with the linear motion stages 3 and 4 and the goniometer stages 5 and 6. The control unit 39 sets a load threshold value for the load detected by the load cell 30. This load threshold value is a threshold value provided to ensure the durability of the linear motion stage 2.

For example, assuming that a load corresponding to the weight of two linear motion stages 3 and 4 is set as the load threshold value, in the present embodiment, the load applied to the table 24 is the load threshold value in the linear motion stage 2. Beyond. On the contrary, when a value exceeding the total weight of the stages and the like placed on the table 24 is set as the load threshold value, the load threshold value is within the load threshold value in the state of the present embodiment. In this embodiment, the following description will be made assuming that the total weight of the stages and the like placed on the table 24 exceeds the load threshold value.

When the reference point is moved from the processing point B to the receiving point A by the operation program of the operation terminal 10, the linear motion stage 2 moves the table 24 in the direction of the arrow X in FIGS. 1 and 2. At that time, the control unit 39 transmits a position control signal to the motor 22 so that the table 24 moves to a predetermined position to control the rotation. At the same time, the control unit 39 transmits a predetermined acceleration control signal to drive the motor 22 so that the table 24 reaches the target acceleration. At this time, the control unit 39 calculates the moving speed of the table 24 from the change in the detected value of the position sensor 34 and the elapsed time.

For example, when the table 24 is moved by 10 mm in the direction of the arrow X, the control unit 39 calculates the number of rotations required to move the table 24 by 10 mm from the amount of movement of the nut member 29 with respect to the rotation of the ball screw 28, and the motor. A position control signal is transmitted to 22. At that time, in order to control the acceleration of the table 24, the control unit 39 also transmits an acceleration control signal to the motor 22. As a result, the table 24 is moved in the X direction by the motor 22 at a predetermined acceleration by 10 mm according to the instruction of the control unit 39.

At this time, the movement amount of the table 24 is detected by the position sensor 34 and the scale 35. When the linear motion stage 2 is not deteriorated, the detected value of the position sensor 34 coincides with the position 10 mm from the start point, which is the amount of movement of the table 24 by the control unit 39.

On the other hand, if the linear motion stage 2 is deteriorated due to wear of each member due to long-term use, for example, if there is play in the ball screw 28 and the nut member 29, the position sensor 34 The detected value according to the above, that is, the actual position of the table 24 after movement may be different from the position 10 mm from the starting point, which is the target position.

Here, if the difference between the position after the table 24 is moved according to the instruction of the control unit 39 and the position of the detected value of the position sensor 34 is within the preset position threshold value, the control unit 39 is the position control signal. No correction is made. However, when the difference between the two exceeds the position threshold value, the control unit 39 corrects the position control signal so that the table 24 moves to the target position indicated by the position sensor 34.

By correcting the position control signal, the table 24 is moved to an accurate position by the control unit 39 and the motor 22. Further, the control unit 39 stores the corrected value in the storage unit 41, and records the corrected value each time the correction is performed.

Next, with reference to FIG. 4, the relationship between the speed (V) and the time (T) when the table 24 of the linear motion stage 2 is moved will be described. In FIG. 4, when the time is t1, the table 24 moves the table 24 at a predetermined regular control acceleration (positive acceleration) by driving the motor 22 by the control unit 39.

As a result, the table 24 moves while gradually increasing its speed. In the present embodiment, since the load applied to the table 24 exceeds the load threshold value, the control unit 39 has an absolute value higher than the control acceleration in the t1 stage at the t2 stage a predetermined time before the change point C1 of the acceleration. The acceleration control signal corrected to be low is transmitted to the motor 22. This predetermined time can be arbitrarily set, for example, it may be a fixed time, or it may be set according to the magnitude of the actually measured load with respect to the load threshold value.

As a result, the table 24 is given an acceleration having a lower absolute value than the step of time t1, and as shown in FIG. 4, the rate of increase in velocity is low at t2. Here, when the load applied to the table 24 is large and the table 24 is accelerated by a regular control acceleration instead of the corrected acceleration, it is temporarily set in advance as shown by the dotted line in FIG. It will exceed the speed V (overshoot).

However, in the linear motion stage 2 of the present embodiment, the control unit 39 drives the motor 22 by the corrected acceleration control signal at the stage of t2, whereby the acceleration of the table 24 is corrected. Such overshoot can be prevented.

Further, the table 24 is moved at a constant speed V at the stage of t3. Then, at the stage of t4, a predetermined acceleration control signal (negative acceleration) is sent from the control unit 39 to the motor 22, and the table 24 decelerates at a constant acceleration.

In the present embodiment, a corrected acceleration control signal having an absolute value smaller than the normal control acceleration is sent from the control unit 39 to the motor 22 at the stage of t5 before a predetermined time from the change point C2 of the acceleration, and is sent to the table 24. The applied negative acceleration becomes smaller.

After that, at the stage of t6, a stop signal is transmitted from the control unit 39 to the motor 22, and the movement of the table 24 is stopped. As a result, when shifting from the t5 to the t6 stage in FIG. 4, the table 24 is stopped at the receiving point A, which is a predetermined position, without causing an overshoot of the stop position.

As described above, the control unit 39 controls the motor 22 to move the reference point to the machining point B, and at the same time, the position sensor 34 detects the position where the table 24 actually moves. When the position information of the table 24 in the position sensor 34 exceeds the position threshold value and differs from the predetermined target position information for some reason, the control unit 39 sets the position information of the position sensor 34 as the predetermined target position. The position control signal is corrected so as to.

Further, in the present embodiment, the control unit 39 acquires the direction and magnitude of the gravitational acceleration component by the acceleration sensor 32 while the table 24 is stopped, and stores the direction and magnitude in the storage unit 41. When determining the acceleration control signal, the control unit 39 makes the determination in consideration of the direction and magnitude of the gravitational acceleration component.

For example, in the linear motion stage 2, since gravity is applied in the direction perpendicular to the moving direction of the table 24, the detected value of the acceleration sensor 32 is the gravitational acceleration directed in the Z direction. In the linear motion stage 2, since the gravitational acceleration component generated in the moving direction (X direction) of the table 24 is almost 0, the influence of the gravitational acceleration on the acceleration control signal is extremely small.

On the other hand, for example, in the case of the linear motion stage 4, since the moving direction of the table 4a coincides with the direction of the gravitational acceleration, the acceleration value in the direction corresponding to the gravitational acceleration is reduced in the acceleration control signal, which is contrary to the gravitational acceleration. The acceleration value in the direction is increased. As a result, the accuracy of the position control and acceleration control of the table 4a in the linear motion stage 4 is improved, and the table 4a can be accurately positioned. Similarly, in the other Gonio stage 5 or 6 or the rotation stage 7, accurate control is possible by correcting the acceleration control signal so as to include the gravitational acceleration component according to the magnitude and direction of the gravitational acceleration component. ..

In the present embodiment, the control unit 39 further acquires the detected value of the acceleration sensor 32 and stores it in the storage unit 41, and also performs frequency analysis of the detected value of the acceleration sensor 32. Specifically, Fourier transform is performed on the detected value of the acceleration sensor 32, and the natural vibration of the moving body in which each stage fixed to the table 24 and the table 24 is integrated from the frequency of the converted peak value. Detect frequency.

The control unit 39 calculates the rotation speed of the motor 22 in which the natural vibration frequency is generated, and if there is an operating condition of the motor 22 at that rotation speed in the operation program of the operation terminal 10, the motor 22 at that rotation speed Control to reduce the operating time of. Specifically, in the case of an operation program in which the rotation speed continues for a certain period of time, the rotation speed is changed to perform the operation.

By such control of the control unit 39, the time during which the motor 22 is operated at the natural vibration frequency of the moving body in which the table 24 and the stages fixed to the table 24 are integrated is reduced, which occurs in the composite stage 1. The burden can be reduced.

Further, in the present embodiment, the linear motion stage 2 is provided with a gyro sensor 33, and the gyro sensor 33 constantly detects movements such as tilt and twist that occur on the table 24. Here, for example, when some external force is applied to the rotary stage 7, the table 24 of the linear motion stage 2 connected to the rotary stage 7 may be tilted.

In the present embodiment, when the detected value of the gyro sensor 33 exceeds a predetermined posture threshold value, the control unit 39 transmits a signal to that effect to the operation terminal 10 via the communication unit 40. This posture threshold value can be appropriately determined according to the angle of the table 24, the performance of the stage device, and the like.

The operation terminal 10 receives the signal via the communication unit 47, and notifies the notification unit 45 of the display unit 44 that there is an abnormality in the table 24. The notification unit 45 displays a screen as a warning on the display unit 44, and emits a warning sound such as a buzzer to notify the administrator of the abnormality. Further, at this time, the abnormality information may be transmitted to the administrator's mobile terminal through the external network via the communication unit 47 of the operation terminal 10.

When the detected value of the gyro sensor 33 exceeds a predetermined attitude threshold value, the control unit 39 sets the acceleration control signal transmitted to the motor 22 to a corrected acceleration control signal lower than the normal control acceleration. Send. As a result, the acceleration applied to the table 24 is reduced, so that the load generated on the linear motion stage 2 can be reduced.

By the way, when the composite stage 1 is operated for a long period of time, it is unavoidable that play occurs between the ball screw 28 and the nut member 29, or in the connecting portion between the stage devices. When such backlash occurs, the position information of the table 24 detected by the position sensor 34 will be different from the predetermined target position information.

In the present embodiment, when the position information of the position sensor 34 exceeds the position threshold value and is different from the target position, the control unit 39 corrects the position control signal so as to be a predetermined target position. Further, the control unit 39 sequentially records this correction value in the storage unit 41, but if the cumulative value of this correction exceeds a predetermined correction allowable value, it is necessary to specify the linear motion stage 2 and perform maintenance or the like. It is determined that the notification unit 45 performs notification.

This makes it possible to prevent the linear motion stage 2 from failing in advance. For example, maintenance can be performed while the composite stage 1 is inactive, which causes inconvenience such as the production line being stopped due to an unexpected situation. Can be prevented.

Further, in the composite stage 1, the operation program may be changed depending on the operation terminal 10. For example, in the above embodiment, the positions of the receiving point A, the processing point B, or the release point C may be changed due to a change in the specifications of the article to be manufactured. In such a case, the operation terminal 10 transmits new target position information to each stage device.

In this way, when new target position information is transmitted to each stage device, the combined stage 1 is operated by the new operation program. Here, in the linear motion stage 2, the position of the table 24 is detected by the position sensor 34, but if there is play in the ball screw 28 due to deterioration of the linear motion stage 2 over time, the stage control unit 43 of the operation terminal 10 The position control signal can also be corrected by.

In addition, when such position correction is performed, if the cumulative value of the correction value exceeds a predetermined correction allowable value, the linear motion stage 2 is specified and an alarm indicating that maintenance is required is notified. The unit 45 may be emitted.

In the description of the above embodiment, the linear motion stage 2 has been described as an example of the stage device of the present invention, but the linear motion stages 3 and 4, the goniometer stages 5 and 6, and the rotation of other stage devices have been described. It is similarly controlled in the other stage devices of the stage 7.

Therefore, for example, when the position control signal is corrected by the control unit (not shown) of the goniometer stage 5 due to deterioration of the internal mechanism of the goniometer stage 5, and the cumulative value exceeds a predetermined correction allowable value, the operation terminal 10 The notification unit 45 notifies the administrator that there is an abnormality in the goniometer stage 5.

Further, when the temperature shows an abnormal value from the signals of the first temperature sensor 36, the second temperature sensor 37, and the third temperature sensor 38, the stage device having the abnormality and the abnormal portion are identified and the operation terminal 10 is used. An alarm may be issued by the notification unit 45 of the above.

As described above, in the operation terminal 10, the stage device to which the alarm is notified is clarified, so that the administrator of the composite stage 1 can easily grasp the stage device in which the defect has occurred from among a large number of stage devices. be able to.

The stage device and the control device of the composite stage 1 of the present embodiment have been described above, but the stage device and the composite stage of the present invention are not limited to the above embodiment and can be appropriately applied. For example, it is also possible to connect the operation terminal 10 to an external network such as the Internet, access from the outside via the network, and perform the operation status and maintenance management of the composite stage 1 from the external server device.

At that time, the data stored in the storage unit 41 of the motor controller 26 or the storage unit 46 of the operation terminal 10 may be collected in the server device to manage the composite stage 1 or each stage device.

Further, the combination of the stage devices in the composite stage 1 is not limited to the above embodiment, and may be an XY stage in which only the linear motion stages 2 and 3 are connected, and only the linear motion stage 4 and the rotary stage 7 are connected. Various combinations such as those can be used.

1 ... Composite stage, 2, 3, 4 ... Linear stage, 5, 6 ... Gonio stage, 7 ... Rotating stage, 10 ... Operation terminal (composite stage controller), 21 ... Stage mechanism, 22 ... Motor, 23 ... Base, 24 ... table, 26 ... motor controller, 28 ... ball screw, 29 ... nut member, 30 ... load cell (load sensor), 32 ... acceleration sensor, 33 ... gyro sensor, 34 ... position sensor, 36-38 ... first 1 Third temperature sensor, 39 ... control unit (motor controller), 40 ... communication unit (motor controller), 41 ... storage unit (motor controller), 42 ... input unit, 43 ... stage control unit, 44 ... display unit, 45 ... Notification unit, 46 ... Storage unit (operation terminal), 47 ... Communication unit (operation terminal).

Claims (8)

A stage mechanism that moves a table that moves an object in a predetermined orbit,
The motor that drives the stage mechanism and
A position sensor that detects the position of the table and
An acceleration sensor that detects the acceleration generated in the table and
A stage device including a control unit that controls the operation of the motor.
The control unit controls the rotation of the motor by a position control signal instructing the position of the table and an acceleration control signal instructing the acceleration of the table.
When the motor is driven so that the table becomes the target position by the position control signal, the motor is driven so that the table becomes the target acceleration by the acceleration control signal.
When the detection value of the position sensor when the table is moved by the motor exceeds a predetermined position threshold value and is different from the target position, the detection value of the position sensor becomes the target position. correcting the position control signal,
Frequency analysis of the detected value of the acceleration sensor is performed to determine the natural vibration frequency of the moving body in which the table and the object moved by the table are integrated, and the rotation speed of the motor when the natural vibration frequency is obtained. A stage device that is acquired and reduces the operating time at the rotation speed of the motor when it reaches the natural vibration frequency . The stage apparatus according to claim 1.
Further equipped with a load sensor for detecting the load applied to the table,
The acceleration control signal includes a positive acceleration control signal and a negative acceleration control signal.
The control unit is a stage device characterized in that when the detected value of the load sensor exceeds a predetermined load threshold value, the acceleration control signal is corrected to a value having a low absolute value. The stage apparatus according to claim 2.
The control unit is a stage device characterized in that the acceleration control signal is corrected before a predetermined time from a change point at which the acceleration control signal is changed. The stage apparatus according to any one of claims 1 to 3.
The acceleration sensor detects a gravitational acceleration component generated in the moving direction of the table.
The control unit is a stage device characterized in that the acceleration control signal is set to a value including the gravitational acceleration component. The stage apparatus according to any one of claims 1 to 4.
Further equipped with a gyro sensor that detects the posture of the table,
The control unit is characterized in that when the posture of the table detected by the detection value of the gyro sensor exceeds a predetermined posture threshold value, the acceleration control signal is corrected to a value having a low absolute value. apparatus. A device for controlling a composite stage in which a plurality of stage devices according to any one of claims 1 to 5 are combined.
When the correction value when the position control signal is corrected in any of the stage devices exceeds a predetermined correction allowable value, it is provided with a notification unit that identifies the stage device and notifies an alarm. A featured composite stage control device. The control device for the composite stage according to claim 6 .
When it is provided with a load sensor that detects the load applied to the table,
The notification unit is a control device for a composite stage, which identifies the stage device and notifies an alarm when the detection value of the load sensor exceeds a predetermined load threshold value in any of the stage devices. .. The combined stage control device according to claim 6 or 7 .
When the stage device includes a gyro sensor that detects the posture of the table,
The notification unit controls a composite stage, which identifies the stage device and notifies an alarm when the posture of the table detected by the detection value of the gyro sensor exceeds a predetermined posture threshold value. apparatus.

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