CN112111279A - 一种太阳能电池制备碱抛光用添加剂及抛光工艺 - Google Patents
一种太阳能电池制备碱抛光用添加剂及抛光工艺 Download PDFInfo
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- CN112111279A CN112111279A CN202010812056.2A CN202010812056A CN112111279A CN 112111279 A CN112111279 A CN 112111279A CN 202010812056 A CN202010812056 A CN 202010812056A CN 112111279 A CN112111279 A CN 112111279A
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- acid
- silicon wafer
- polishing
- alkali
- additive
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- 238000005498 polishing Methods 0.000 title claims abstract description 54
- 239000003513 alkali Substances 0.000 title claims abstract description 50
- 239000000654 additive Substances 0.000 title claims abstract description 32
- 230000000996 additive effect Effects 0.000 title claims abstract description 32
- 238000007517 polishing process Methods 0.000 title claims abstract description 10
- 238000002360 preparation method Methods 0.000 title claims abstract description 9
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 56
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 56
- 239000010703 silicon Substances 0.000 claims abstract description 56
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 claims abstract description 30
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 claims abstract description 30
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 26
- 239000008367 deionised water Substances 0.000 claims abstract description 24
- 229910021641 deionized water Inorganic materials 0.000 claims abstract description 24
- 239000002994 raw material Substances 0.000 claims abstract description 17
- 230000007797 corrosion Effects 0.000 claims abstract description 16
- 238000005260 corrosion Methods 0.000 claims abstract description 16
- 229910017053 inorganic salt Inorganic materials 0.000 claims abstract description 12
- 239000002455 scale inhibitor Substances 0.000 claims abstract description 10
- 239000002562 thickening agent Substances 0.000 claims abstract description 8
- 230000001804 emulsifying effect Effects 0.000 claims abstract description 7
- 238000004140 cleaning Methods 0.000 claims description 22
- 239000002253 acid Substances 0.000 claims description 10
- 239000012670 alkaline solution Substances 0.000 claims description 10
- 239000000243 solution Substances 0.000 claims description 10
- 235000011118 potassium hydroxide Nutrition 0.000 claims description 9
- 235000011121 sodium hydroxide Nutrition 0.000 claims description 9
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 claims description 7
- WCUXLLCKKVVCTQ-UHFFFAOYSA-M Potassium chloride Chemical compound [Cl-].[K+] WCUXLLCKKVVCTQ-UHFFFAOYSA-M 0.000 claims description 6
- WNLRTRBMVRJNCN-UHFFFAOYSA-N adipic acid Chemical compound OC(=O)CCCCC(O)=O WNLRTRBMVRJNCN-UHFFFAOYSA-N 0.000 claims description 6
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 claims description 6
- ZSIAUFGUXNUGDI-UHFFFAOYSA-N hexan-1-ol Chemical compound CCCCCCO ZSIAUFGUXNUGDI-UHFFFAOYSA-N 0.000 claims description 6
- 239000012535 impurity Substances 0.000 claims description 6
- QAOWNCQODCNURD-UHFFFAOYSA-L Sulfate Chemical compound [O-]S([O-])(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-L 0.000 claims description 5
- KBPLFHHGFOOTCA-UHFFFAOYSA-N 1-Octanol Chemical compound CCCCCCCCO KBPLFHHGFOOTCA-UHFFFAOYSA-N 0.000 claims description 4
- NLXLAEXVIDQMFP-UHFFFAOYSA-N Ammonia chloride Chemical compound [NH4+].[Cl-] NLXLAEXVIDQMFP-UHFFFAOYSA-N 0.000 claims description 4
- FEWJPZIEWOKRBE-JCYAYHJZSA-N Dextrotartaric acid Chemical compound OC(=O)[C@H](O)[C@@H](O)C(O)=O FEWJPZIEWOKRBE-JCYAYHJZSA-N 0.000 claims description 4
- VZCYOOQTPOCHFL-OWOJBTEDSA-N Fumaric acid Chemical compound OC(=O)\C=C\C(O)=O VZCYOOQTPOCHFL-OWOJBTEDSA-N 0.000 claims description 4
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 claims description 4
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 claims description 4
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 claims description 4
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 claims description 4
- FEWJPZIEWOKRBE-UHFFFAOYSA-N Tartaric acid Natural products [H+].[H+].[O-]C(=O)C(O)C(O)C([O-])=O FEWJPZIEWOKRBE-UHFFFAOYSA-N 0.000 claims description 4
- WPYMKLBDIGXBTP-UHFFFAOYSA-N benzoic acid Chemical compound OC(=O)C1=CC=CC=C1 WPYMKLBDIGXBTP-UHFFFAOYSA-N 0.000 claims description 4
- OSGAYBCDTDRGGQ-UHFFFAOYSA-L calcium sulfate Chemical compound [Ca+2].[O-]S([O-])(=O)=O OSGAYBCDTDRGGQ-UHFFFAOYSA-L 0.000 claims description 4
- MWKFXSUHUHTGQN-UHFFFAOYSA-N decan-1-ol Chemical compound CCCCCCCCCCO MWKFXSUHUHTGQN-UHFFFAOYSA-N 0.000 claims description 4
- NOPFSRXAKWQILS-UHFFFAOYSA-N docosan-1-ol Chemical compound CCCCCCCCCCCCCCCCCCCCCCO NOPFSRXAKWQILS-UHFFFAOYSA-N 0.000 claims description 4
- POULHZVOKOAJMA-UHFFFAOYSA-N dodecanoic acid Chemical compound CCCCCCCCCCCC(O)=O POULHZVOKOAJMA-UHFFFAOYSA-N 0.000 claims description 4
- KWIUHFFTVRNATP-UHFFFAOYSA-N glycine betaine Chemical compound C[N+](C)(C)CC([O-])=O KWIUHFFTVRNATP-UHFFFAOYSA-N 0.000 claims description 4
- BXWNKGSJHAJOGX-UHFFFAOYSA-N hexadecan-1-ol Chemical compound CCCCCCCCCCCCCCCCO BXWNKGSJHAJOGX-UHFFFAOYSA-N 0.000 claims description 4
- JVTAAEKCZFNVCJ-UHFFFAOYSA-N lactic acid Chemical compound CC(O)C(O)=O JVTAAEKCZFNVCJ-UHFFFAOYSA-N 0.000 claims description 4
- GLDOVTGHNKAZLK-UHFFFAOYSA-N octadecan-1-ol Chemical compound CCCCCCCCCCCCCCCCCCO GLDOVTGHNKAZLK-UHFFFAOYSA-N 0.000 claims description 4
- 239000001103 potassium chloride Substances 0.000 claims description 4
- 235000011164 potassium chloride Nutrition 0.000 claims description 4
- 239000001488 sodium phosphate Substances 0.000 claims description 4
- 239000011975 tartaric acid Substances 0.000 claims description 4
- 235000002906 tartaric acid Nutrition 0.000 claims description 4
- HLZKNKRTKFSKGZ-UHFFFAOYSA-N tetradecan-1-ol Chemical compound CCCCCCCCCCCCCCO HLZKNKRTKFSKGZ-UHFFFAOYSA-N 0.000 claims description 4
- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 claims description 4
- PMUNIMVZCACZBB-UHFFFAOYSA-N 2-hydroxyethylazanium;chloride Chemical compound Cl.NCCO PMUNIMVZCACZBB-UHFFFAOYSA-N 0.000 claims description 3
- BTBUEUYNUDRHOZ-UHFFFAOYSA-N Borate Chemical compound [O-]B([O-])[O-] BTBUEUYNUDRHOZ-UHFFFAOYSA-N 0.000 claims description 3
- 229920002134 Carboxymethyl cellulose Polymers 0.000 claims description 3
- 229940120146 EDTMP Drugs 0.000 claims description 3
- 229910002651 NO3 Inorganic materials 0.000 claims description 3
- NHNBFGGVMKEFGY-UHFFFAOYSA-N Nitrate Chemical compound [O-][N+]([O-])=O NHNBFGGVMKEFGY-UHFFFAOYSA-N 0.000 claims description 3
- 229920000805 Polyaspartic acid Polymers 0.000 claims description 3
- 229960000583 acetic acid Drugs 0.000 claims description 3
- 239000001361 adipic acid Substances 0.000 claims description 3
- 235000011037 adipic acid Nutrition 0.000 claims description 3
- 239000000783 alginic acid Substances 0.000 claims description 3
- 235000010443 alginic acid Nutrition 0.000 claims description 3
- 229920000615 alginic acid Polymers 0.000 claims description 3
- 229960001126 alginic acid Drugs 0.000 claims description 3
- 150000004781 alginic acids Chemical class 0.000 claims description 3
- VSGNNIFQASZAOI-UHFFFAOYSA-L calcium acetate Chemical compound [Ca+2].CC([O-])=O.CC([O-])=O VSGNNIFQASZAOI-UHFFFAOYSA-L 0.000 claims description 3
- 239000001639 calcium acetate Substances 0.000 claims description 3
- 235000011092 calcium acetate Nutrition 0.000 claims description 3
- 229960005147 calcium acetate Drugs 0.000 claims description 3
- AXCZMVOFGPJBDE-UHFFFAOYSA-L calcium dihydroxide Chemical compound [OH-].[OH-].[Ca+2] AXCZMVOFGPJBDE-UHFFFAOYSA-L 0.000 claims description 3
- 239000000920 calcium hydroxide Substances 0.000 claims description 3
- 229910001861 calcium hydroxide Inorganic materials 0.000 claims description 3
- 235000011116 calcium hydroxide Nutrition 0.000 claims description 3
- MKJXYGKVIBWPFZ-UHFFFAOYSA-L calcium lactate Chemical compound [Ca+2].CC(O)C([O-])=O.CC(O)C([O-])=O MKJXYGKVIBWPFZ-UHFFFAOYSA-L 0.000 claims description 3
- 239000001527 calcium lactate Substances 0.000 claims description 3
- 235000011086 calcium lactate Nutrition 0.000 claims description 3
- 229960002401 calcium lactate Drugs 0.000 claims description 3
- 159000000007 calcium salts Chemical class 0.000 claims description 3
- 239000001768 carboxy methyl cellulose Substances 0.000 claims description 3
- 235000010948 carboxy methyl cellulose Nutrition 0.000 claims description 3
- 239000008112 carboxymethyl-cellulose Substances 0.000 claims description 3
- 229920001577 copolymer Polymers 0.000 claims description 3
- LQZZUXJYWNFBMV-UHFFFAOYSA-N dodecan-1-ol Chemical compound CCCCCCCCCCCCO LQZZUXJYWNFBMV-UHFFFAOYSA-N 0.000 claims description 3
- 238000001035 drying Methods 0.000 claims description 3
- NFDRPXJGHKJRLJ-UHFFFAOYSA-N edtmp Chemical compound OP(O)(=O)CN(CP(O)(O)=O)CCN(CP(O)(O)=O)CP(O)(O)=O NFDRPXJGHKJRLJ-UHFFFAOYSA-N 0.000 claims description 3
- 229960005102 foscarnet Drugs 0.000 claims description 3
- ZJAOAACCNHFJAH-UHFFFAOYSA-N hydroxycarbonylphosphonic acid Natural products OC(=O)P(O)(O)=O ZJAOAACCNHFJAH-UHFFFAOYSA-N 0.000 claims description 3
- 108010064470 polyaspartate Proteins 0.000 claims description 3
- 229920001529 polyepoxysuccinic acid Polymers 0.000 claims description 3
- 239000001508 potassium citrate Substances 0.000 claims description 3
- 229960002635 potassium citrate Drugs 0.000 claims description 3
- QEEAPRPFLLJWCF-UHFFFAOYSA-K potassium citrate (anhydrous) Chemical compound [K+].[K+].[K+].[O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O QEEAPRPFLLJWCF-UHFFFAOYSA-K 0.000 claims description 3
- 235000011082 potassium citrates Nutrition 0.000 claims description 3
- 159000000000 sodium salts Chemical class 0.000 claims description 3
- LNAZSHAWQACDHT-XIYTZBAFSA-N (2r,3r,4s,5r,6s)-4,5-dimethoxy-2-(methoxymethyl)-3-[(2s,3r,4s,5r,6r)-3,4,5-trimethoxy-6-(methoxymethyl)oxan-2-yl]oxy-6-[(2r,3r,4s,5r,6r)-4,5,6-trimethoxy-2-(methoxymethyl)oxan-3-yl]oxyoxane Chemical compound CO[C@@H]1[C@@H](OC)[C@H](OC)[C@@H](COC)O[C@H]1O[C@H]1[C@H](OC)[C@@H](OC)[C@H](O[C@H]2[C@@H]([C@@H](OC)[C@H](OC)O[C@@H]2COC)OC)O[C@@H]1COC LNAZSHAWQACDHT-XIYTZBAFSA-N 0.000 claims description 2
- OYHQOLUKZRVURQ-NTGFUMLPSA-N (9Z,12Z)-9,10,12,13-tetratritiooctadeca-9,12-dienoic acid Chemical compound C(CCCCCCC\C(=C(/C\C(=C(/CCCCC)\[3H])\[3H])\[3H])\[3H])(=O)O OYHQOLUKZRVURQ-NTGFUMLPSA-N 0.000 claims description 2
- BJEPYKJPYRNKOW-REOHCLBHSA-N (S)-malic acid Chemical compound OC(=O)[C@@H](O)CC(O)=O BJEPYKJPYRNKOW-REOHCLBHSA-N 0.000 claims description 2
- LMHAGAHDHRQIMB-UHFFFAOYSA-N 1,2-dichloro-1,2,3,3,4,4-hexafluorocyclobutane Chemical compound FC1(F)C(F)(F)C(F)(Cl)C1(F)Cl LMHAGAHDHRQIMB-UHFFFAOYSA-N 0.000 claims description 2
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 claims description 2
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 claims description 2
- MQFYRUGXOJAUQK-UHFFFAOYSA-N 2-[2-[2-(2-octadecanoyloxyethoxy)ethoxy]ethoxy]ethyl octadecanoate Chemical compound CCCCCCCCCCCCCCCCCC(=O)OCCOCCOCCOCCOC(=O)CCCCCCCCCCCCCCCCC MQFYRUGXOJAUQK-UHFFFAOYSA-N 0.000 claims description 2
- JHWGFJBTMHEZME-UHFFFAOYSA-N 4-prop-2-enoyloxybutyl prop-2-enoate Chemical compound C=CC(=O)OCCCCOC(=O)C=C JHWGFJBTMHEZME-UHFFFAOYSA-N 0.000 claims description 2
- 239000005711 Benzoic acid Substances 0.000 claims description 2
- 239000004641 Diallyl-phthalate Substances 0.000 claims description 2
- 229920000663 Hydroxyethyl cellulose Polymers 0.000 claims description 2
- 239000004354 Hydroxyethyl cellulose Substances 0.000 claims description 2
- 239000005639 Lauric acid Substances 0.000 claims description 2
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 claims description 2
- 229910019142 PO4 Inorganic materials 0.000 claims description 2
- 239000002202 Polyethylene glycol Substances 0.000 claims description 2
- OFOBLEOULBTSOW-UHFFFAOYSA-N Propanedioic acid Natural products OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 claims description 2
- PMZURENOXWZQFD-UHFFFAOYSA-L Sodium Sulfate Chemical compound [Na+].[Na+].[O-]S([O-])(=O)=O PMZURENOXWZQFD-UHFFFAOYSA-L 0.000 claims description 2
- VMHLLURERBWHNL-UHFFFAOYSA-M Sodium acetate Chemical compound [Na+].CC([O-])=O VMHLLURERBWHNL-UHFFFAOYSA-M 0.000 claims description 2
- 235000021355 Stearic acid Nutrition 0.000 claims description 2
- YDONNITUKPKTIG-UHFFFAOYSA-N [Nitrilotris(methylene)]trisphosphonic acid Chemical compound OP(O)(=O)CN(CP(O)(O)=O)CP(O)(O)=O YDONNITUKPKTIG-UHFFFAOYSA-N 0.000 claims description 2
- BJEPYKJPYRNKOW-UHFFFAOYSA-N alpha-hydroxysuccinic acid Natural products OC(=O)C(O)CC(O)=O BJEPYKJPYRNKOW-UHFFFAOYSA-N 0.000 claims description 2
- 235000020661 alpha-linolenic acid Nutrition 0.000 claims description 2
- DTOSIQBPPRVQHS-PDBXOOCHSA-N alpha-linolenic acid Chemical compound CC\C=C/C\C=C/C\C=C/CCCCCCCC(O)=O DTOSIQBPPRVQHS-PDBXOOCHSA-N 0.000 claims description 2
- 229910000147 aluminium phosphate Inorganic materials 0.000 claims description 2
- 235000019270 ammonium chloride Nutrition 0.000 claims description 2
- 235000010233 benzoic acid Nutrition 0.000 claims description 2
- 229960003237 betaine Drugs 0.000 claims description 2
- VJLOFJZWUDZJBX-UHFFFAOYSA-N bis(2-hydroxyethyl)azanium;chloride Chemical compound [Cl-].OCC[NH2+]CCO VJLOFJZWUDZJBX-UHFFFAOYSA-N 0.000 claims description 2
- QUDWYFHPNIMBFC-UHFFFAOYSA-N bis(prop-2-enyl) benzene-1,2-dicarboxylate Chemical compound C=CCOC(=O)C1=CC=CC=C1C(=O)OCC=C QUDWYFHPNIMBFC-UHFFFAOYSA-N 0.000 claims description 2
- 235000011132 calcium sulphate Nutrition 0.000 claims description 2
- 229960000541 cetyl alcohol Drugs 0.000 claims description 2
- 235000015165 citric acid Nutrition 0.000 claims description 2
- 229940090960 diethylenetriamine pentamethylene phosphonic acid Drugs 0.000 claims description 2
- BNIILDVGGAEEIG-UHFFFAOYSA-L disodium hydrogen phosphate Chemical compound [Na+].[Na+].OP([O-])([O-])=O BNIILDVGGAEEIG-UHFFFAOYSA-L 0.000 claims description 2
- 229910000397 disodium phosphate Inorganic materials 0.000 claims description 2
- 235000019800 disodium phosphate Nutrition 0.000 claims description 2
- 229960000735 docosanol Drugs 0.000 claims description 2
- DUYCTCQXNHFCSJ-UHFFFAOYSA-N dtpmp Chemical compound OP(=O)(O)CN(CP(O)(O)=O)CCN(CP(O)(=O)O)CCN(CP(O)(O)=O)CP(O)(O)=O DUYCTCQXNHFCSJ-UHFFFAOYSA-N 0.000 claims description 2
- 150000002191 fatty alcohols Chemical class 0.000 claims description 2
- 239000001530 fumaric acid Substances 0.000 claims description 2
- 235000011087 fumaric acid Nutrition 0.000 claims description 2
- 239000012362 glacial acetic acid Substances 0.000 claims description 2
- 235000019447 hydroxyethyl cellulose Nutrition 0.000 claims description 2
- 239000001866 hydroxypropyl methyl cellulose Substances 0.000 claims description 2
- 235000010979 hydroxypropyl methyl cellulose Nutrition 0.000 claims description 2
- 229920003088 hydroxypropyl methyl cellulose Polymers 0.000 claims description 2
- UFVKGYZPFZQRLF-UHFFFAOYSA-N hydroxypropyl methyl cellulose Chemical compound OC1C(O)C(OC)OC(CO)C1OC1C(O)C(O)C(OC2C(C(O)C(OC3C(C(O)C(O)C(CO)O3)O)C(CO)O2)O)C(CO)O1 UFVKGYZPFZQRLF-UHFFFAOYSA-N 0.000 claims description 2
- 239000004310 lactic acid Substances 0.000 claims description 2
- 235000014655 lactic acid Nutrition 0.000 claims description 2
- 229940033355 lauric acid Drugs 0.000 claims description 2
- 229960004488 linolenic acid Drugs 0.000 claims description 2
- KQQKGWQCNNTQJW-UHFFFAOYSA-N linolenic acid Natural products CC=CCCC=CCC=CCCCCCCCC(O)=O KQQKGWQCNNTQJW-UHFFFAOYSA-N 0.000 claims description 2
- VZCYOOQTPOCHFL-UPHRSURJSA-N maleic acid Chemical compound OC(=O)\C=C/C(O)=O VZCYOOQTPOCHFL-UPHRSURJSA-N 0.000 claims description 2
- 239000011976 maleic acid Substances 0.000 claims description 2
- FPYJFEHAWHCUMM-UHFFFAOYSA-N maleic anhydride Chemical compound O=C1OC(=O)C=C1 FPYJFEHAWHCUMM-UHFFFAOYSA-N 0.000 claims description 2
- 239000001630 malic acid Substances 0.000 claims description 2
- 235000011090 malic acid Nutrition 0.000 claims description 2
- 229920000609 methyl cellulose Polymers 0.000 claims description 2
- 239000001923 methylcellulose Substances 0.000 claims description 2
- 235000010981 methylcellulose Nutrition 0.000 claims description 2
- HWPKGOGLCKPRLZ-UHFFFAOYSA-M monosodium citrate Chemical compound [Na+].OC(=O)CC(O)(C([O-])=O)CC(O)=O HWPKGOGLCKPRLZ-UHFFFAOYSA-M 0.000 claims description 2
- 239000002524 monosodium citrate Substances 0.000 claims description 2
- 235000018342 monosodium citrate Nutrition 0.000 claims description 2
- VRVKOZSIJXBAJG-TYYBGVCCSA-M monosodium fumarate Chemical compound [Na+].OC(=O)\C=C\C([O-])=O VRVKOZSIJXBAJG-TYYBGVCCSA-M 0.000 claims description 2
- 229940043348 myristyl alcohol Drugs 0.000 claims description 2
- GOQYKNQRPGWPLP-UHFFFAOYSA-N n-heptadecyl alcohol Natural products CCCCCCCCCCCCCCCCCO GOQYKNQRPGWPLP-UHFFFAOYSA-N 0.000 claims description 2
- QIQXTHQIDYTFRH-UHFFFAOYSA-N octadecanoic acid Chemical compound CCCCCCCCCCCCCCCCCC(O)=O QIQXTHQIDYTFRH-UHFFFAOYSA-N 0.000 claims description 2
- OQCDKBAXFALNLD-UHFFFAOYSA-N octadecanoic acid Natural products CCCCCCCC(C)CCCCCCCCC(O)=O OQCDKBAXFALNLD-UHFFFAOYSA-N 0.000 claims description 2
- GSWAOPJLTADLTN-UHFFFAOYSA-N oxidanimine Chemical compound [O-][NH3+] GSWAOPJLTADLTN-UHFFFAOYSA-N 0.000 claims description 2
- HWGNBUXHKFFFIH-UHFFFAOYSA-I pentasodium;[oxido(phosphonatooxy)phosphoryl] phosphate Chemical compound [Na+].[Na+].[Na+].[Na+].[Na+].[O-]P([O-])(=O)OP([O-])(=O)OP([O-])([O-])=O HWGNBUXHKFFFIH-UHFFFAOYSA-I 0.000 claims description 2
- 239000010452 phosphate Substances 0.000 claims description 2
- 235000021317 phosphate Nutrition 0.000 claims description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-K phosphate Chemical compound [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 claims description 2
- 229920001223 polyethylene glycol Polymers 0.000 claims description 2
- 229940051841 polyoxyethylene ether Drugs 0.000 claims description 2
- 229920000056 polyoxyethylene ether Polymers 0.000 claims description 2
- 229920002635 polyurethane Polymers 0.000 claims description 2
- 239000004814 polyurethane Substances 0.000 claims description 2
- 239000001632 sodium acetate Substances 0.000 claims description 2
- 235000017281 sodium acetate Nutrition 0.000 claims description 2
- 239000011780 sodium chloride Substances 0.000 claims description 2
- 235000002639 sodium chloride Nutrition 0.000 claims description 2
- 239000001509 sodium citrate Substances 0.000 claims description 2
- NLJMYIDDQXHKNR-UHFFFAOYSA-K sodium citrate Chemical compound O.O.[Na+].[Na+].[Na+].[O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O NLJMYIDDQXHKNR-UHFFFAOYSA-K 0.000 claims description 2
- 235000011083 sodium citrates Nutrition 0.000 claims description 2
- 229910000162 sodium phosphate Inorganic materials 0.000 claims description 2
- 235000011008 sodium phosphates Nutrition 0.000 claims description 2
- 229910052938 sodium sulfate Inorganic materials 0.000 claims description 2
- 235000011152 sodium sulphate Nutrition 0.000 claims description 2
- 235000019832 sodium triphosphate Nutrition 0.000 claims description 2
- 239000008117 stearic acid Substances 0.000 claims description 2
- 229960004274 stearic acid Drugs 0.000 claims description 2
- 229940012831 stearyl alcohol Drugs 0.000 claims description 2
- TUNFSRHWOTWDNC-HKGQFRNVSA-N tetradecanoic acid Chemical compound CCCCCCCCCCCCC[14C](O)=O TUNFSRHWOTWDNC-HKGQFRNVSA-N 0.000 claims description 2
- 239000001226 triphosphate Substances 0.000 claims description 2
- RYFMWSXOAZQYPI-UHFFFAOYSA-K trisodium phosphate Chemical compound [Na+].[Na+].[Na+].[O-]P([O-])([O-])=O RYFMWSXOAZQYPI-UHFFFAOYSA-K 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 abstract description 44
- 238000000034 method Methods 0.000 abstract description 14
- 230000000694 effects Effects 0.000 abstract description 11
- 238000006243 chemical reaction Methods 0.000 abstract description 9
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 abstract description 7
- 238000005530 etching Methods 0.000 abstract description 7
- 229910017604 nitric acid Inorganic materials 0.000 abstract description 7
- 235000012239 silicon dioxide Nutrition 0.000 abstract description 7
- 239000002351 wastewater Substances 0.000 abstract description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 6
- 238000004519 manufacturing process Methods 0.000 abstract description 5
- 239000002912 waste gas Substances 0.000 abstract description 5
- 239000012634 fragment Substances 0.000 abstract description 4
- 230000009920 chelation Effects 0.000 abstract description 3
- 239000000463 material Substances 0.000 abstract description 3
- 229910021645 metal ion Inorganic materials 0.000 abstract description 3
- 230000036632 reaction speed Effects 0.000 abstract description 3
- 239000000377 silicon dioxide Substances 0.000 abstract description 3
- 101001073212 Arabidopsis thaliana Peroxidase 33 Proteins 0.000 description 6
- 101001123325 Homo sapiens Peroxisome proliferator-activated receptor gamma coactivator 1-beta Proteins 0.000 description 6
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 6
- 102100028961 Peroxisome proliferator-activated receptor gamma coactivator 1-beta Human genes 0.000 description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 230000035484 reaction time Effects 0.000 description 4
- RMAQACBXLXPBSY-UHFFFAOYSA-N silicic acid Chemical compound O[Si](O)(O)O RMAQACBXLXPBSY-UHFFFAOYSA-N 0.000 description 4
- MWUXSHHQAYIFBG-UHFFFAOYSA-N Nitric oxide Chemical compound O=[N] MWUXSHHQAYIFBG-UHFFFAOYSA-N 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- 239000003929 acidic solution Substances 0.000 description 2
- 238000004945 emulsification Methods 0.000 description 2
- 238000003912 environmental pollution Methods 0.000 description 2
- 230000007062 hydrolysis Effects 0.000 description 2
- 238000006460 hydrolysis reaction Methods 0.000 description 2
- 125000001165 hydrophobic group Chemical group 0.000 description 2
- 239000000693 micelle Substances 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 238000009736 wetting Methods 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 239000000839 emulsion Substances 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000001369 metatartaric acid Substances 0.000 description 1
- 235000011042 metatartaric acid Nutrition 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000004065 wastewater treatment Methods 0.000 description 1
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Abstract
本发明公开了一种太阳能电池制备碱抛光用添加剂及抛光工艺,添加剂由以下质量百分比的原料组成:无机盐0.1%‑5%、缓蚀阻垢剂0.1%‑10%、乳化增稠剂0.1%‑2.5%、PH调节剂0.1%‑3%、余量为去离子水;缓蚀阻垢剂可降低碱对二氧化硅的腐蚀速率,保护电池正面的PN结在刻蚀过程中不被破坏,还促进碱对硅片的抛光效果,避免使用重污染的HNO3,绿色环保,不仅降低了HF的使用量,而且提升了电池转换效率,降低废水废气处理成本和电池生产的材料成本。利用无机盐的高粘度来增大碱抛光使用的氢氧化钠/氢氧化钾的浓度,以控制反应速度,避免腐蚀过度,降低碎片率,且无机盐对金属离子的螯合作用可对硅片表面进行清洁。
Description
技术领域
本发明涉及一种太阳能电池制备碱抛光用添加剂,还涉及使用该添加剂的抛光工艺。
背景技术
太阳能因具备可再生、能量蕴含量高和安全等优点而被人们广泛关注,并逐渐成为重要的新能源之一。太阳能电池的传统生产工艺是采用硝酸与氢氟酸的酸刻蚀工艺实现边缘刻蚀、去除PSG。但是,酸刻蚀工艺使用硝酸,在反应过程中会产生大量氮氧化物废气,而大量残留的硝酸,是电池厂废水中总氮含量的最主要来源。
当前环保管制越来越严格,总氮含量已经成为废水排放的硬指标,导致电池厂的废水处理成本节节攀升。尤其在当前PERC电池已经成为行业主流产品的前提下,为了提升PERC电池的效率,需要不断提升电池背面的平整度。但在传统工艺中,唯一的方法就是大幅度增加硝酸用量,如此一来,废水问题更为严重。
目前,出现了采用氢氧化钠/氢氧化钾作为刻蚀工艺的化学品,即碱抛光,相比于传统工艺,绿色环保,不仅大幅度提升了电池效率,而且大幅度降低了废水废气处理成本和电池生产的材料成本,从而达到提效降本的目的。
但是,碱抛光所使用的氢氧化钠/氢氧化钾会破坏硅片正面的PN结,直接影响电池的光电转换效率。
发明内容
本发明的第一个目的在于提供一种能够保护硅片正面PN结不被破坏、提高硅片背面抛光效果、降低碎片率、对硅片具有清洁作用的太阳能电池制备碱抛光用添加剂。
本发明的第一个目的通过以下的技术措施来实现:一种太阳能电池制备碱抛光用添加剂,其特征在于由以下质量百分比的原料组成:
无机盐0.1%-5%、缓蚀阻垢剂0.1%-10%、乳化增稠剂0.1%-2.5%、PH调节剂0.1%-3%、余量为去离子水;
以上原料的含量总和为100%。
本发明中的缓蚀阻垢剂能够大幅度降低碱对二氧化硅的腐蚀速率,保护电池正面的PN结在刻蚀过程中不被破坏,还可以促进碱对硅片的抛光效果,可避免使用重污染的HNO3,绿色环保,不仅降低了HF的使用量,而且提升了电池转换效率,大幅度降低废水废气处理成本和电池生产的材料成本,实现了在提效降本的同时减少环境污染的目的。另外,本发明利用无机盐的高粘度来增大碱抛光使用的氢氧化钠/氢氧化钾的浓度,以控制反应速度,避免腐蚀过度,降低碎片率,且无机盐对金属离子的螯合作用可对硅片表面进行清洁;乳化增稠剂的憎水基团在溶液中与污垢结合与包覆,亲水基团随水流动,通过乳化作用和润湿作用将污垢从硅片表面分离出来,同时水解时产生了具有胶束结构的硅酸,对固体污垢的粒子有悬浮和分散能力,可进一步清洁硅片表面。
本发明所述的无机盐是钾盐、钙盐、钠盐、硫酸盐、硝酸盐、硼酸盐中的一种或者两种以上的组合。
本发明所述的缓蚀阻垢剂是苯甲酸、乙酸钙、氨基三甲叉膦酸、二乙烯三胺五甲叉膦酸、乙二胺四甲叉膦酸、2-羟基膦酰基乙酸、膦酰基羧酸共聚物、聚环氧琥珀酸、聚天冬氨酸中的一种或者两种以上的组合。
本发明所述的乳化增稠剂是氯化钠、氯化钾、氯化铵、单乙醇胺氯化物、二乙醇胺氯化物、硫酸钠、磷酸钠、磷酸二钠、三磷酸五钠、月桂醇、肉豆蔻醇、癸醇、己醇、辛醇、鲸蜡醇、硬脂醇、山嵛醇、月桂酸、海藻酸、亚油酸、亚麻酸、肉豆蔻酸、硬脂酸、烷醇酰胺、脂肪醇聚氧乙烯醚硫酸盐、PEG-150二硬脂酸酯、PEG-150二硬脂酸酯、氧化氨、甜菜碱、甲基纤维素、羧甲基纤维素、羟乙基纤维素、羟丙基甲基纤维素、丙烯酸、马来酸或马来酸酐、甲基丙烯酸、双丙烯酸丁二酯、邻苯二甲酸二丙烯酯、聚氨酯、聚乙二醇中的一种或者两种以上的组合。
本发明所述的PH调节剂是富马酸、偏酒石酸、柠檬酸、乳酸、苹果酸、酒石酸、冰乙酸和乙酸、己二酸、磷酸、盐酸、富马酸一钠、柠檬酸钠、柠檬酸钾、柠檬酸一钠、磷酸盐、硫酸钙、乳酸钙、乙酸钠、氢氧化钙、氢氧化钾、氢氧化钠中的一种或者两种以上的组合。
本发明的第二个目的在于提供一种使用上述太阳能电池制备碱抛光用添加剂的抛光工艺。
本发明的第二个目的通过以下的技术措施来实现:一种使用上述太阳能电池制备碱抛光用添加剂的抛光工艺,其特征在于包括以下步骤:
S1、将臭氧保护后的SE硅片放入碱性溶液进行预清洗,去除硅片表面酸残留物及其它溶于碱的杂质;
S2、将完成步骤S1的硅片放入去离子水中清洗,再放入包含所述太阳能电池制备碱抛光用添加剂的碱抛光液中抛光;
S3、将完成步骤S2的硅片放入去离子水中清洗;
S4、将完成步骤S3的硅片放入碱性溶液进行后清洗,去除硅片表面残留的溶于碱的杂质;
S5、将完成步骤S4的硅片放入去离子水中清洗;
S6、将完成步骤S5的硅片放入酸性溶液中进行清洗,去除硅片正面PSG和硅片表面碱残留;
S7、将完成步骤S6的硅片放入去离子水中清洗并烘干。
与现有技术相比,本发明具有如下显著的效果:
⑴本发明的缓蚀阻垢剂能够大幅度降低碱对二氧化硅的腐蚀速率,从而保护电池正面的PN结在刻蚀过程中不被破坏,还可以促进碱对硅片的抛光效果,避免使用重污染的HNO3,绿色环保,不仅降低了HF的使用量,而且提升了电池转换效率,大幅度降低废水废气处理成本以及电池生产的材料成本,实现了在提效降本的同时减少环境污染的目的。
⑵本发明利用无机盐的高粘度来增大碱抛光使用的氢氧化钠/氢氧化钾的浓度,以控制反应速度,避免腐蚀过度,降低碎片率,且无机盐对金属离子的螯合作用可对硅片表面进行清洁。
⑶本发明的乳化增稠剂的憎水基团在溶液中与污垢结合与包覆,亲水基团随水流动,通过乳化作用和润湿作用将污垢从硅片表面分离出来,同时水解时产生了具有胶束结构的硅酸,对固体污垢的粒子有悬浮和分散能力,可进一步清洁硅片表面。
具体实施方式
本发明一种太阳能电池制备碱抛光用添加剂,由以下质量百分比的原料组成:
无机盐0.1%-5%、缓蚀阻垢剂0.1%-10%、乳化增稠剂0.1%-2.5%、PH调节剂0.1%-3%、余量为去离子水。
以上原料的含量总和为100%。
实施例1
本实施例的太阳能电池制备碱抛光用添加剂由以下质量百分比的原料组成:硫酸盐0.1%、乙酸钙5%、单乙醇胺氯化物0.5%、偏酒石酸1%和去离子水93.4%,以上原料的含量总和为100%。
(表1)
表1是在制备PERC电池工艺中,仅在抛光工序中使用了不同抛光方式的两块电池的电性能数据比较,即使用传统酸抛光和使用了本发明添加剂的碱抛光,从上表中可知,使用了本发明添加剂的碱抛光的PERC电池的各项电性能均比使用传统酸抛光的PERC电池有了显著地提高。
(表2)
表2是在制备PERC电池工艺中,仅抛光工序与传统工艺不同,即在抛光工序中使用了本发明碱抛光用添加剂,抛光效果的好坏可以用反射率这一指标来衡量,从表中7组数据来看,反射率都较高,说明抛光效果较好,因此,本发明碱抛光用添加剂可以提高硅片背面抛光效果。
一种使用本实施例太阳能电池制备碱抛光用添加剂的抛光工艺,包括以下步骤:
1、将臭氧保护后的SE硅片(在硅片SE过之后进行臭氧氧化保护,保护SE硅片正面不被破坏)放入碱性溶液进行预清洗,去除硅片表面酸残留物及其它溶于碱的杂质。碱性溶液的体积浓度为5-6%,反应温度45℃,反应时间50s。碱性溶液为NaOH、KOH、双氧水中的某两种或其组合,其余为去离子水。
2、将完成步骤1的硅片放入去离子水中清洗。
3、将完成步骤2的硅片放入碱抛光液(包括NaOH和本发明的碱抛光添加剂或KOH和本发明的碱抛光添加剂)中抛光,利用添加剂对硅片正面进行保护,碱抛光液对硅片背面及四周进行腐蚀,削平硅片背面制绒形成的金字塔。碱抛光液的体积浓度为6-7%,反应温度66℃,反应时间180s。
4、将完成步骤3的硅片放入去离子水中清洗。
5、将完成步骤4的硅片放入碱性溶液进行后清洗,去除抛光槽中硅片表面残留的溶于碱的杂质。碱性溶液的体积浓度为5%-6%,反应温度45℃,反应时间100s,碱性溶液为NaOH和双氧水或KOH和双氧水,其余为去离子水。
6、将完成步骤5的硅片放入去离子水中清洗。
7、将完成步骤6的硅片放入酸性溶液中进行清洗,去除硅片正面PSG和硅片表面碱残留。反应温度25℃,反应时间120s。酸性溶液的体积浓度为10%-12%,酸性溶液为HF,其余为去离子水。
8、将完成步骤7的硅片放入去离子水中清洗并烘干。
实施例2
本实施例的太阳能电池制备碱抛光用添加剂由以下质量百分比的原料组成:硼酸盐2%、聚环氧琥珀酸8%、海藻酸1%、氢氧化钙3%和去离子水86%,以上原料的含量总和为100%。
实施例3
本实施例的太阳能电池制备碱抛光用添加剂由以下质量百分比的原料组成:硝酸盐4%、膦酰基羧酸共聚物5%、羧甲基纤维素0.8%、柠檬酸钾3%和去离子水87.2%,以上原料的含量总和为100%。
实施例4
本实施例的太阳能电池制备碱抛光用添加剂由以下质量百分比的原料组成:钠盐0.5%、聚天冬氨酸10%、月桂醇1.5%、乳酸钙0.5%和去离子水87.5%,以上原料的含量总和为100%。
实施例5
本实施例的太阳能电池制备碱抛光用添加剂由以下质量百分比的原料组成:钙盐3.5%、乙二胺四甲叉膦酸4%、己醇1.5%、己二酸1.5%和去离子水89.5%,以上原料的含量总和为100%。
本发明的实施方式不限于此,根据本发明的上述内容,按照本领域的普通技术知识和惯用手段,在不脱离本发明上述基本技术思想前提下,本发明还具有多种形式的修改、替换或变更,均落在本发明权利保护范围之内。
Claims (6)
1.一种太阳能电池制备碱抛光用添加剂,其特征在于由以下质量百分比的原料组成:
无机盐0.1%-5%、缓蚀阻垢剂0.1%-10%、乳化增稠剂0.1%-2.5%、PH调节剂0.1%-3%、余量为去离子水;
以上原料的含量总和为100%。
2.根据权利要求1所述的太阳能电池制备碱抛光用添加剂,其特征在于:所述无机盐是钾盐、钙盐、钠盐、硫酸盐、硝酸盐、硼酸盐中的一种或者两种以上的组合。
3.根据权利要求1或2所述的太阳能电池制备碱抛光用添加剂,其特征在于:所述缓蚀阻垢剂是苯甲酸、乙酸钙、氨基三甲叉膦酸、二乙烯三胺五甲叉膦酸、乙二胺四甲叉膦酸、2-羟基膦酰基乙酸、膦酰基羧酸共聚物、聚环氧琥珀酸、聚天冬氨酸中的一种或者两种以上的组合。
4.根据权利要求3所述的太阳能电池制备碱抛光用添加剂,其特征在于:所述乳化增稠剂是氯化钠、氯化钾、氯化铵、单乙醇胺氯化物、二乙醇胺氯化物、硫酸钠、磷酸钠、磷酸二钠、三磷酸五钠、月桂醇、肉豆蔻醇、癸醇、己醇、辛醇、鲸蜡醇、硬脂醇、山嵛醇、月桂酸、海藻酸、亚油酸、亚麻酸、肉豆蔻酸、硬脂酸、烷醇酰胺、脂肪醇聚氧乙烯醚硫酸盐、PEG-150二硬脂酸酯、PEG-150二硬脂酸酯、氧化氨、甜菜碱、甲基纤维素、羧甲基纤维素、羟乙基纤维素、羟丙基甲基纤维素、丙烯酸、马来酸或马来酸酐、甲基丙烯酸、双丙烯酸丁二酯、邻苯二甲酸二丙烯酯、聚氨酯、聚乙二醇中的一种或者两种以上的组合。
5.根据权利要求4所述的太阳能电池制备碱抛光用添加剂,其特征在于:所述PH调节剂是富马酸、偏酒石酸、柠檬酸、乳酸、苹果酸、酒石酸、冰乙酸、乙酸、己二酸、磷酸、盐酸、富马酸一钠、柠檬酸钠、柠檬酸钾、柠檬酸一钠、磷酸盐、硫酸钙、乳酸钙、乙酸钠、氢氧化钙、氢氧化钾、氢氧化钠中的一种或者两种以上的组合。
6.一种使用权利要求1~5任一项所述太阳能电池制备碱抛光用添加剂的抛光工艺,其特征在于包括以下步骤:
S1、将臭氧保护后的SE硅片放入碱性溶液进行预清洗,去除硅片表面酸残留物及其它溶于碱的杂质;
S2、将完成步骤S1的硅片放入去离子水中清洗,再放入包含所述太阳能电池制备碱抛光用添加剂的碱抛光液中抛光;
S3、将完成步骤S2的硅片放入去离子水中清洗;
S4、将完成步骤S3的硅片放入碱性溶液进行后清洗,去除硅片表面残留的溶于碱的杂质;
S5、将完成步骤S4的硅片放入去离子水中清洗;
S6、将完成步骤S5的硅片放入酸性溶液中进行清洗,去除硅片正面PSG和硅片表面碱残留;
S7、将完成步骤S6的硅片放入去离子水中清洗并烘干。
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Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20070175104A1 (en) * | 2005-11-11 | 2007-08-02 | Hitachi Chemical Co., Ltd. | Polishing slurry for silicon oxide, additive liquid and polishing method |
CN107904663A (zh) * | 2017-12-01 | 2018-04-13 | 绍兴拓邦电子科技有限公司 | 一种晶体硅抛光添加剂及其用于晶体硅抛光的使用方法 |
CN108193281A (zh) * | 2018-03-09 | 2018-06-22 | 常州时创能源科技有限公司 | 多晶黑硅制绒工艺 |
CN110416364A (zh) * | 2019-08-07 | 2019-11-05 | 山西潞安太阳能科技有限责任公司 | 单晶perc背面碱刻蚀工艺 |
-
2020
- 2020-08-13 CN CN202010812056.2A patent/CN112111279A/zh active Pending
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20070175104A1 (en) * | 2005-11-11 | 2007-08-02 | Hitachi Chemical Co., Ltd. | Polishing slurry for silicon oxide, additive liquid and polishing method |
CN107904663A (zh) * | 2017-12-01 | 2018-04-13 | 绍兴拓邦电子科技有限公司 | 一种晶体硅抛光添加剂及其用于晶体硅抛光的使用方法 |
CN108193281A (zh) * | 2018-03-09 | 2018-06-22 | 常州时创能源科技有限公司 | 多晶黑硅制绒工艺 |
CN110416364A (zh) * | 2019-08-07 | 2019-11-05 | 山西潞安太阳能科技有限责任公司 | 单晶perc背面碱刻蚀工艺 |
Cited By (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
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CN113990984B (zh) * | 2021-10-26 | 2023-10-10 | 通威太阳能(金堂)有限公司 | 一种perc晶硅电池的清洗方法 |
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