CN112048702B - Preparation method of coating for aeroengine parts - Google Patents
Preparation method of coating for aeroengine parts Download PDFInfo
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- CN112048702B CN112048702B CN202010944615.5A CN202010944615A CN112048702B CN 112048702 B CN112048702 B CN 112048702B CN 202010944615 A CN202010944615 A CN 202010944615A CN 112048702 B CN112048702 B CN 112048702B
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/021—Cleaning or etching treatments
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/028—Physical treatment to alter the texture of the substrate surface, e.g. grinding, polishing
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
A preparation method of a coating of an aircraft engine part belongs to the field of aircraft engine manufacturing, and comprises the steps of installation of a plurality of longitudinal targets, wet sand blowing treatment, ultrasonic cleaning and evaporation deposition coating under a vacuum condition. According to the invention, a multi-source electromagnetic coupling arc source is adopted, and revolution-rotation of parts is utilized to realize uniform coating and one-step forming of the surface, so that the quality consistency and reliability of the coating are improved while the deposition speed of the coating is greatly improved; the problems of uneven coating thickness and loose tissue structure at the boundary of the adjacent regions of the large-size parts are avoided. The invention has the advantages of high coating deposition speed, high preparation efficiency, high target utilization rate and good applicability.
Description
Technical Field
The invention belongs to the field of manufacturing of aero-engines, and particularly relates to a preparation method of a coating of an aero-engine part.
Background
The coating is an economic and effective method for prolonging the service life and improving the reliability of parts of the aeroengine and endowing the parts with special functions of wear resistance, oxidation resistance, low emissivity and the like, and has the characteristics of convenience in use, strong adaptability to the appearance of the parts, small influence on the maneuvering performance of equipment and the like.
At present, there are many methods for preparing coatings, such as electrochemical deposition based on aqueous solution and molten salt, chemical vapor deposition, surface diffusion infiltration, and flame, plasma, explosion spraying, and vacuum coating. Compared with other methods, the vacuum coating deposition method based on physical processes such as evaporation, atomization, condensation deposition and the like has the advantage of being capable of accurately controlling the structure and the performance of the coating, and therefore, the method is widely applied to the field of preparation of coatings of parts of aeroengines.
In the prior art, a magnetron sputtering method is adopted for coating large-size coatings of large-size aeroengine parts, such as cones, adjusting sheet chains, sealing sheet chains and the like, and the method is provided with a three-dimensional motion system and can control a phi 60mm circular magnetron target to realize front-back-up-down-angle adjustment (X-Y-phi) relative to the parts; the range of forward and backward movement is 300mm, the range of up and down movement is 700mm, the angle adjusting range is 0-90 degrees, and the three-dimensional movement system and the matching device can realize the effective plating of parts with the maximum phi 550mm multiplied by H700mm size. However, in the plating process, because the surface coating of the part is coated in a subarea way, one-time coating forming cannot be realized, when the coating of a certain area is sputtered and deposited, the adjacent area is sputtered with the coating, and the compactness and the structural integrity of the coating of the adjacent area are further influenced; in addition, the deposition speed of the magnetron sputtering coating is low, the coating time for the coating of large-size parts is long, and the cost is high.
Disclosure of Invention
In order to solve the problems that the partitioned coating of the large-size part coating cannot realize one-time coating forming, the compactness of the coating is poor, the structural integrity is poor, the time consumption is long, the efficiency is low and the cost is high, the invention provides the preparation method of the aero-engine part coating. The specific technical scheme is as follows:
a preparation method of a coating of an aircraft engine part comprises the following steps:
step 1: installing N rows of longitudinal targets in coating equipment, wherein N is more than or equal to 2 and less than or equal to 8;
step 2: carrying out wet sand blasting treatment on the surfaces of the parts, wherein the wet sand blasting setting parameters are as follows: the white corundum sand has the granularity of 180-250 meshes, the content of the white corundum sand is 20-35%, the wind pressure is 0.25-0.35 MPa, and the water pressure is more than 2kg/cm3The sand blowing distance is 180-350 mm;
and step 3: immersing the parts in an organic solvent for ultrasonic cleaning, performing surface deoiling treatment, and then drying;
and 4, step 4: mounting the dried parts on a sample rack of a vacuum chamber of coating equipment, wherein the positions of the parts are opposite to the longitudinal target; then the vacuum chamber is vacuumized;
and 5: when in useVacuum degree of vacuum chamber to 9 × 10-3When Pa, simultaneously starting a main heater and an auxiliary heater of the coating equipment to heat the parts to 200-230 ℃;
step 6: starting a bias power supply of the coating equipment, adjusting the bias voltage to-800 +/-10V, and introducing argon into the vacuum chamber; cleaning the parts for 5-8 min by ion bombardment under the bias of-800 +/-10V, removing oxides and pollutants on the surfaces of the parts, and then closing an argon valve;
and 7: starting arc current of N rows of longitudinal targets, adjusting the arc current to 80 +/-5A, adjusting bias voltage to-200 +/-10V, and adjusting the duty ratio to 20 +/-3%; simultaneously controlling the sample holder to drive the part to revolve and rotate, simultaneously evaporating particles from the N-column longitudinal targets, moving the evaporated particles and depositing the evaporated particles to cover the surface of the part, and depositing a coating, wherein the coating deposition time is 50-70 min, and the vacuum degree of the back bottom of the vacuum chamber is less than or equal to 7 multiplied by 10 during coating deposition-3Pa；
And 8: after the deposition of the coating is finished, the arc current and the bias power supply are closed, and then the argon valve is closed; then the parts are controlled to be less than or equal to 5 multiplied by 10-3And cooling to below 100 ℃ under the condition of Pa vacuum degree, and finally taking out the parts to finish the plating.
In the step 3, the organic solvent is acetone or petroleum ether.
In the method, the parts are cones with the size of phi (400-450) mm x (500-550) mm x delta (0.5-0.8) mm, (400-480) mm x (100-170) mm x delta (0.5-2) mm adjusting sheet chains or (400-490) mm x (50-100) mm x delta (0.5-2) mm sealing sheet chains in the aircraft engine.
Compared with the prior art, the preparation method of the coating of the aeroengine part has the following beneficial effects:
the method of the invention sets the number of the longitudinal targets and the arc source power according to the shape and the size of the part, combines the revolution-rotation of the part, can realize the full surface coverage of the part, the rapid and uniform coating and the one-step molding, and ensures the uniformity of the coating thickness.
Secondly, a plurality of longitudinal targets and a multi-source electromagnetic coupling arc source are adopted, arc plasma is regulated and controlled to enable more longitudinal target evaporation ions to rapidly move to the surface of a part, so that the coating deposition speed is greatly increased, and compared with the prior art, the total coating time can be shortened by 10-15%; meanwhile, arc spots are more effectively controlled to move controllably at high speed on the whole target surface, so that the utilization rate of the target material is greatly improved, and the utilization rate can be improved by 5-10%.
The invention enables the controlled movement of arc spots of parts in a multi-source electromagnetic coupling state, obviously inhibits common faults of the traditional process such as target surface arc running and arc extinguishing, improves the quality consistency and reliability of the coating, has better application performance, and can prolong the service life by 10-20% compared with the prior art.
In conclusion, the method can form the coating at one time, and avoids the problems of uneven coating thickness and loose tissue structure at the boundary of the adjacent area of the large-size part. The coating has high deposition speed, high preparation efficiency and high target utilization rate; the problems of high coating difficulty, poor compactness, poor structural integrity, long time consumption, low efficiency and high cost of the coating of the large-size part in the prior art are solved, and the coating has good realizability.
Detailed Description
The present invention will be further described with reference to specific examples, but the present invention is not limited to these examples.
Example 1
In this example, the coating preparation was carried out on the cone of an aircraft engine, the dimensions of the cone being: phi 450mm × 550mm × delta 0.8 mm.
A preparation method of a coating of an aircraft engine part comprises the following steps:
step 1: installing 4 rows of longitudinal targets in coating equipment;
step 2: carrying out wet sand blasting treatment on the surfaces of the parts, wherein the wet sand blasting setting parameters are as follows: the granularity of the white corundum sand is 180 meshes, the content of the white corundum sand is 20 percent, the wind pressure is 0.25MPa, and the water pressure is 2.1kg/cm3The sand blowing distance is 180 mm;
and 3, step 3: immersing the parts in acetone for ultrasonic cleaning, performing surface deoiling treatment, and then drying;
and 4, step 4: mounting the dried parts on a sample rack of a vacuum chamber of coating equipment, wherein the positions of the parts are opposite to the longitudinal target; then the vacuum chamber is vacuumized;
and 5: when the vacuum degree of the vacuum chamber reaches 9X 10-3When Pa is needed, simultaneously starting a main heater and an auxiliary heater of the coating equipment to heat the parts to 200 ℃;
step 6: starting a bias power supply of the coating equipment, adjusting the bias voltage to-800V, and introducing argon into the vacuum chamber; cleaning the parts for 5min under the bias of-800V by ion bombardment, removing oxides and pollutants on the surfaces of the parts, and then closing an argon gas valve;
and 7: starting arc current of 4 rows of longitudinal targets, adjusting the arc current to 80A, adjusting bias voltage to-200V, and adjusting the duty ratio to 20%; simultaneously controlling the sample holder to drive the parts to revolve and rotate, simultaneously evaporating particles from 4 columns of longitudinal targets, moving the evaporated particles and depositing the particles to cover the surfaces of the parts, and depositing a coating for 50min, wherein the vacuum degree of the back bottom of the vacuum chamber is 6 multiplied by 10 when the coating is deposited-3Pa；
And 8: after the deposition of the coating is finished, the arc current and the bias power supply are closed, and then the argon valve is closed; then, the parts are set at 4.5X 10-3And cooling to 100 ℃ under the condition of Pa vacuum degree, and finally taking out the parts to finish the plating.
The coating prepared by the embodiment is formed by one-time continuous coating, the cone coating is observed to be compact and uniform, and the repeated deposition phenomenon does not exist.
Example 2
The embodiment performs coating preparation on the regulating sheet chain of the aircraft engine, and the size of the regulating sheet chain is as follows: 480mm × 170mm × δ 2 mm.
A preparation method of a coating of an aircraft engine part comprises the following steps:
step 1: installing 4 rows of longitudinal targets in coating equipment;
step 2: carrying out wet sand blasting treatment on the surfaces of the parts, wherein the wet sand blasting setting parameters are as follows: the white corundum sand has the granularity of 200 meshes, the content of the white corundum sand is 30 percent, the wind pressure is 0.30MPa, and the water pressure is 2.3kg/cm3Blowing airThe sand distance is 250 mm;
and 3, step 3: immersing the parts in an organic solvent for ultrasonic cleaning, performing surface deoiling treatment, and then drying;
and 4, step 4: mounting the dried parts on a sample rack of a vacuum chamber of coating equipment, wherein the positions of the parts are opposite to the longitudinal target; then the vacuum chamber is vacuumized;
and 5: when the vacuum degree of the vacuum chamber reaches 9X 10-3When Pa is needed, simultaneously starting a main heater and an auxiliary heater of the coating equipment to heat the parts to 220 ℃;
step 6: starting a bias power supply of the coating equipment, adjusting the bias voltage to-800V, and introducing argon into the vacuum chamber; cleaning the parts for 7min under the bias of-800V by ion bombardment, removing oxides and pollutants on the surfaces of the parts, and then closing an argon gas valve;
and 7: starting arc current of 4 rows of longitudinal targets, adjusting the arc current to 80A, adjusting bias voltage to-200V, and adjusting the duty ratio to 20%; simultaneously controlling the sample holder to drive the parts to revolve and rotate, simultaneously evaporating particles from 4 rows of longitudinal targets, moving the evaporated particles and depositing the evaporated particles to cover the surfaces of the parts, and depositing the coating for 60min, wherein the vacuum degree of the back bottom of the vacuum chamber is 6.8 multiplied by 10 when the coating is deposited-3Pa；
And 8: after the deposition of the coating is finished, the arc current and the bias power supply are closed, and then the argon gas valve is closed; then the parts are made to be 4.6 multiplied by 10-3And cooling to 90 ℃ under the condition of Pa vacuum degree, and finally taking out the parts to finish the plating.
The coating prepared by the embodiment is formed by one-time continuous coating, and the chain coating of the adjusting sheet is observed to be compact and uniform without repeated deposition.
Example 3
This example carries out the coating preparation to aeroengine's gasket chain, and the size of gasket chain is: 490 mm. times.100 mm. times.delta.2 mm.
A preparation method of a coating of an aircraft engine part comprises the following steps:
step 1: installing 3 rows of longitudinal targets in coating equipment;
step 2: carrying out wet sand blasting treatment on the surfaces of the parts, wherein the wet sand blasting setting parameters are as follows: the white corundum sand has a granularity of 250 meshes, a white corundum sand content of 35 percent, a wind pressure of 0.35MPa and a water pressure of 2.2kg/cm3The sand blowing distance is 350 mm;
and step 3: immersing the parts in acetone for ultrasonic cleaning, performing surface deoiling treatment, and then drying;
and 4, step 4: mounting the dried parts on a sample rack of a vacuum chamber of coating equipment, wherein the positions of the parts are opposite to the longitudinal target; then the vacuum chamber is vacuumized;
and 5: when the vacuum degree of the vacuum chamber reaches 9X 10-3When Pa is needed, simultaneously starting a main heater and an auxiliary heater of the coating equipment to heat the parts to 230 ℃;
step 6: starting a bias power supply of the coating equipment, adjusting the bias voltage to-800V, and introducing argon into the vacuum chamber; cleaning the parts for 8min under the bias of-800V by ion bombardment, removing oxides and pollutants on the surfaces of the parts, and then closing an argon gas valve;
and 7: starting arc current of 3 rows of longitudinal targets, adjusting the arc current to 80A, adjusting bias voltage to-200V, and adjusting the duty ratio to 20%; simultaneously controlling the sample holder to drive the parts to revolve and rotate, simultaneously evaporating particles from the 3-column longitudinal targets, moving the evaporated particles and depositing the particles to cover the surfaces of the parts, and depositing a coating for 70min, wherein the vacuum degree of the back bottom of the vacuum chamber is 6 multiplied by 10 when the coating is deposited-3Pa；
And 8: after the deposition of the coating is finished, the arc current and the bias power supply are closed, and then the argon valve is closed; then the parts are made to be 4.5 multiplied by 10-3And cooling to 70 ℃ under the condition of Pa vacuum degree, and finally taking out the parts to finish the plating.
The coating prepared by the embodiment is formed by one-time continuous coating, and the sealing piece chain coating is observed to be compact and uniform without repeated deposition.
Claims (5)
1. A preparation method of a coating of an aircraft engine part is characterized by comprising the following steps:
step 1: installing N rows of longitudinal targets in coating equipment, wherein N is more than or equal to 2 and less than or equal to 8;
step 2: carrying out wet sand blasting treatment on the surface of the part;
and step 3: immersing the parts in an organic solvent for ultrasonic cleaning, performing surface deoiling treatment, and then drying;
and 4, step 4: mounting the dried parts on a sample rack of a vacuum chamber of coating equipment, wherein the positions of the parts are opposite to the longitudinal target; then the vacuum chamber is vacuumized;
and 5: when the vacuum degree of the vacuum chamber reaches 9X 10-3When Pa is needed, simultaneously starting a main heater and an auxiliary heater of the coating equipment to heat the parts to 200-230 ℃;
step 6: starting a bias power supply of the coating equipment, adjusting the bias voltage to-800 +/-10V, and introducing argon into the vacuum chamber; cleaning the parts for 5-8 min under the bias of-800 +/-10V by ion bombardment, removing oxides and pollutants on the surfaces of the parts, and then closing an argon gas valve;
and 7: starting arc current of N rows of longitudinal targets, adjusting the arc current to 80 +/-5A, adjusting bias voltage to-200 +/-10V, and adjusting the duty ratio to 20 +/-3%; simultaneously controlling the sample holder to drive the part to revolve and rotate, simultaneously evaporating particles from the N-column longitudinal targets, moving the evaporated particles and depositing the evaporated particles to cover the surface of the part, and depositing a coating, wherein the coating deposition time is 50-70 min, and the vacuum degree of the back bottom of the vacuum chamber is less than or equal to 7 multiplied by 10 during coating deposition-3Pa；
And 8: after the deposition of the coating is finished, the arc current and the bias power supply are closed, and then the argon valve is closed; then the parts are controlled to be less than or equal to 5 multiplied by 10-3Cooling to below 100 ℃ under the condition of Pa vacuum degree, and finally taking out the parts to finish the plating.
2. The method for preparing a coating layer of an aircraft engine component according to claim 1, wherein in step 3, the organic solvent is acetone or petroleum ether.
3. The method for preparing a coating of an aircraft engine part according to claim 1, wherein in step 3, the part is an aircraft engine cone with a cone size of Φ (400-450) mmx (500-550) mm x δ (0.5-0.8) mm.
4. The method for preparing the coating of the aeroengine part according to claim 1, wherein in the step 3, the part is a regulating flap chain of the aeroengine, and the size of the regulating flap chain is (400-480) mm x (100-170) mm x delta (0.5-2) mm.
5. The method for preparing the coating of the aeroengine part according to claim 1, wherein in the step 3, the part is a sealing sheet chain of the aeroengine, and the size of the sealing sheet chain is (400-490) mm x (50-100) mm x delta (0.5-2) mm.
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| CN1506492A (en) * | 2002-12-06 | 2004-06-23 | 中国科学院金属研究所 | Chromium oxide coating preparing process |
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| CN101892459A (en) * | 2010-05-04 | 2010-11-24 | 贵州航天精工制造有限公司 | Method for preparing high-purity corrosion-resistant aluminum coating on titanium alloy component |
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