CN101892459A - Method for preparing high-purity corrosion-resistant aluminum coating on titanium alloy component - Google Patents
Method for preparing high-purity corrosion-resistant aluminum coating on titanium alloy component Download PDFInfo
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- CN101892459A CN101892459A CN 201010161933 CN201010161933A CN101892459A CN 101892459 A CN101892459 A CN 101892459A CN 201010161933 CN201010161933 CN 201010161933 CN 201010161933 A CN201010161933 A CN 201010161933A CN 101892459 A CN101892459 A CN 101892459A
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Abstract
The invention discloses a method for preparing a high-purity corrosion-resistant aluminum coating on a titanium alloy component. The method comprises the following steps by adopting high-power intermediate frequency magnetron sputtering equipment: removing oil strain from the surface of a component; performing argon plasma sputter cleaning on the component; and depositing an aluminum coating, wherein the component is the titanium alloy component. Comprehensive properties such as coating thickness, density, binding force, coating temperature and the like are adjusted by adjusting different process parameters; and a layer of aluminum coating with high comprehensive properties is deposited on the surface of the titanium alloy component so that aluminum coatings formed on the two sides of the titanium alloy component have the comprehensive properties.
Description
Technical field
The present invention relates to a kind of method that on titanium alloy component, prepares high-purity corrosion-resistant aluminum coating, belong to the titanium alloy component processing technique field.
Background technology
Titanium alloy is in light weight owing to having, and the characteristics that anti-fatigue performance is good are so be extensive use of titanium alloy component at aerospace field.But because the part time job circumstance complication on the aerospace flight vehicle, range of temperature is big, so the erosion resistance of titanium alloy is had extremely strict requirement.In order to improve the erosion resistance of titanium alloy, do not influence the metallurgical structure of titanium alloy component inside simultaneously again, common way is in titanium alloy component surface preparation layer of aluminum coating under 300-400 ℃ of temperature.The corrosion resistance nature of aluminum coating is by its thickness and density decision, and the coating preparation temperature is determined by the coating processes method.Increase along with coat-thickness, it stops extraneous corrosive possibility to strengthen, but the thickness increase can have a strong impact on the bonding properties of coating and part, the cracking of coating occurs and peels off, can improve the temperature of part material simultaneously, cause that the tissue of titanium alloy component changes.Generation for fear of this phenomenon, people have studied the whole bag of tricks and prepared aluminum coating on different parts, but the aluminum coating of preparation always can not satisfy the over-all properties requirement of titanium alloy component coat simultaneously at aspects such as thickness, bonding force, density, application temperature.
Summary of the invention
The objective of the invention is to, a kind of method for preparing high-purity corrosion-resistant aluminum coating on titanium alloy component is provided.This method reaches over-all propertieies such as regulating coat-thickness, density, bonding force, application temperature by adjusting different processing parameters, can be at the aluminum coating of titanium alloy component surface deposition one deck high comprehensive performance, to satisfy the over-all properties of the aluminum coating of titanium alloy component two sides formation in batches.
The present invention be achieved in that of the present invention a kind of be titanium alloy component to be prepared aluminum coating in the method for preparing high-purity corrosion-resistant aluminum coating on the titanium alloy component by following step: remove titanium alloy component surface oil stain → titanium alloy component is carried out argon plasma sputter clean → deposition of aluminum coating on titanium alloy component.
Above-mentioned removal titanium alloy component surface oil stain is titanium alloy component to be inserted take out drying in the ultrasonic cleaning apparatus after 20～40 minutes.
Above-mentioned removal titanium alloy component surface oil stain is titanium alloy component to be inserted take out drying in the ultrasonic cleaning apparatus after 30 minutes.
Aforementioned titanium alloy component is carried out the argon plasma sputter clean is that titanium alloy component is inserted in the vacuum chamber of high-power medium frequency magnetron sputtering equipment, is evacuated to 3.6 * 10
-3Pa feeds 1～2Pa argon gas, and titanium alloy component was carried out the argon plasma sputter clean 8～12 minutes.
Above-mentioned titanium alloy component is carried out the argon plasma sputter clean is that titanium alloy component is inserted in the vacuum chamber of high-power medium frequency magnetron sputtering equipment, is evacuated to 3.6 * 10
-3Pa feeds 1～2Pa argon gas, and titanium alloy component was carried out the argon plasma sputter clean 10 minutes.
Above-mentioned argon plasma sputter is to apply on titanium alloy component-bias voltage of 1500V, makes between part and the argon gas and produces glow discharge, and the argon plasma that is formed by glow discharge carries out the argon plasma sputter clean to titanium alloy component.
Aforementioned on titanium alloy component the deposition of aluminum coating be 99.9% fine aluminium also to be inserted vacuum chamber as target when inserting titanium alloy component in the vacuum chamber of high-power medium frequency magnetron sputtering equipment; The electric current that target is applied 8～12A carried out pre-sputter clean 4～6 minutes, removed the impurity such as oxide compound of target material surface; Ar pressure is adjusted to 0.5 * 10
-1Pa～6 * 10
-1Pa, on part, apply 0～-negative bias of 500V, on target, apply the sputtering voltage of 800V,＜200 ℃ temperature deposit 1～3 hour, on titanium alloy component, deposit thickness and be 3～12 microns aluminum coating; Close target power supply then successively, negative bias and argon flow amount Controlling System.
Above-mentioned deposition of aluminum coating is when titanium alloy component is inserted vacuum chamber 99.9% fine aluminium also to be inserted vacuum chamber as target; The electric current that target is applied 10A carried out pre-sputter clean 5 minutes, removed the impurity such as oxide compound of target material surface; Ar pressure is adjusted to 10
-1Pa～6 * 10
-1Pa applies the negative bias of 150～500V on part, apply the sputtering voltage of 800V on target, 180 ℃ temperature deposit 2.5 hours, deposits thickness and be 3～5 microns aluminum coating on titanium alloy component; Close target power supply then successively, negative bias and argon flow amount Controlling System.
After above-mentioned deposition of aluminum coating step, again titanium alloy component is carried out chromate treating and get more excellent golden yellow high corrosion resistance aluminum coating; Described chromate treating is the titanium alloy component after the deposition of aluminum coating to be inserted to soak in 30～40 ℃ the chromate treating liquid take out after 8～12 seconds.
Above-mentioned chromate treating is the titanium alloy component after the deposition of aluminum coating to be inserted to soak in 30～40 ℃ the chromate treating liquid take out after 10 seconds.
Owing to adopted technique scheme, compared with prior art, the present invention prepares the aluminum coating of high purity, high corrosion resistance by adjusting the sputtering power in the aluminum coating deposition process at the titanium alloy component surface low-temperature.Under certain sputtering power effect, because ion velocity increases, have higher energy, the energy of ion bombardment part is bigger, improves the bonding force of aluminum coating and piece surface, by applying certain pulsed bias and depositing time, slowly reduce the piece surface temperature rise, coatingsurface defective, porosity and stress are further reduced, corrosion resistance nature obviously improves, bonding force further strengthens, and simultaneous temperature remains on low-temperature condition (＜200 ℃).Avoid bonding force poor, density is low, the solidity to corrosion deficiency.Can avoid prior art inhomogeneous, not reach the problem of titanium alloy component aluminum coating over-all properties at 300～400 ℃ of deposit thickness.Technology of the present invention is simple, and is with low cost, easy to make.The aluminum coating thickness of the present invention preparation is big, density is high, any surface finish, resistance to corrosion are strong, bonding strength height, the thickness evenness of aluminum coating and part are good, and part is difficult for damaging in preparation process.
The aluminum coating of present method preparation is by behind the 504h neutral salt spray test, aluminum coating does not have considerable change, fractograph shows, aluminum coating thickness is even, the metallurgical structure of titanium alloy is normal, expression does not influence the metallurgical structure of titanium alloy component inside by method of the present invention, has kept the original excellent properties of titanium alloy.
Embodiment
The present invention is further illustrated below in conjunction with embodiment.
During enforcement, behind the removal piece surface oil stain, adopt high-power medium frequency magnetron sputtering equipment part to be carried out the aluminum coating preparation: part is carried out argon plasma sputter clean → deposition of aluminum coating earlier by following step; Described part all refers to titanium alloy component.
Described removal piece surface oil stain is part to be inserted take out drying in the ultrasonic cleaning apparatus after 20～40 minutes.
Described part is carried out the argon plasma sputter clean is that part is inserted in the vacuum chamber of high-power medium frequency magnetron sputtering equipment, is evacuated to 3.6 * 10
-3Pa feeds 1～2Pa argon gas, and part was carried out the argon plasma sputter clean 8～12 minutes.Described argon plasma sputter is to apply on part-bias voltage of 1500V, makes between part and the argon gas and produces glow discharge, and the argon plasma that is formed by glow discharge carries out the argon plasma sputter clean to part.
Described deposition of aluminum coating is when part is inserted vacuum chamber 99.9% fine aluminium also to be inserted vacuum chamber as target; The electric current that target is applied 8～12A carried out pre-sputter clean 4～6 minutes, removed the impurity such as oxide compound of target material surface; Ar pressure is adjusted to 0.5 * 10
-1Pa～6 * 10
-1Pa, on part, apply 0～-negative bias of 500V, on target, apply the sputtering voltage of 800V,＜200 ℃ temperature deposit 1～3 hour, on titanium alloy component, deposit thickness and be 3～12 microns aluminum coating; Close target power supply then successively, negative bias and argon flow amount Controlling System.
After described deposition of aluminum coating step, can carry out chromate treating to part again and get more excellent golden yellow high corrosion resistance aluminum coating; Described chromate treating is the part after the deposition of aluminum coating to be inserted to soak in 30～40 ℃ the chromate treating liquid take out after 8～12 seconds.
Below enumerate some special cases of the present invention, not as any limitation of the invention foundation.
Embodiment 1: a kind of method that on titanium alloy component, prepares high-purity corrosion-resistant aluminum coating, and adopt high-power medium frequency magnetron sputtering equipment to carry out, its concrete practice is:
A, cleaning will place in the vacuum chamber through ultrasonic wave oil removing and 800 of dried titanium alloy components, fine aluminium with 99.9% is as target, close vacuum chamber, when being evacuated to 3.6 * 10～3Pa, feed argon gas, make that air pressure reaches 1～2Pa in the vacuum chamber, open grid bias power supply, apply on part-bias voltage of 1500V, glow discharge forms argon plasma, and part was carried out the argon plasma sputter clean 10 minutes; Open target power supply;
B, deposition of aluminum coating are adjusted ar pressure after cleaning and finishing, and pressure is the argon gas of 0.5 * 10～1Pa--6 * 10～1Pa; Add on part-negative bias of 200V, open the target shielding power supply, it is 800V that sputtering voltage is set, and the time is 2.5 hours, and 180 ℃ of depositing temperatures deposit thickness and be 3～5 microns aluminum coating; Close target power supply then successively, bias generator and argon flow amount Controlling System.
C, continue applying argon gas, vacuumize 50min, treat that temperature reduces to 40 ℃, take out product.
D, aluminum coating aftertreatment need be carried out chromate treating by related request, and the product after the deposition of aluminum coating is placed chromate treating liquid (30～40 ℃), and time 10s obtains golden yellow high corrosion resistance aluminum coating.
Embodiment 2～10
Embodiment 2～10 is basic identical with the method for embodiment 1, and different is: in the sedimentary process of aluminum coating, part bias voltage amplitude is provided with difference, and sputtering current is different with depositing time, the thickness difference that deposition obtains, and its concrete numerical value is as shown in the table:
The parameter setting of embodiment 2～10 deposition of aluminum coatings
Annotate: coat-thickness adopts milscale (0.001mm) to measure part screw thread tail end from 1cm place, bar footpath, and bar footpath size was subtracted each other averaged then before and after test applied.
Claims (10)
1. a method for preparing high-purity corrosion-resistant aluminum coating on titanium alloy component is characterized in that: by following step titanium alloy component is prepared aluminum coating: removal titanium alloy component surface oil stain → titanium alloy component is carried out argon plasma sputter clean → deposition of aluminum coating on titanium alloy component.
2. the method for preparing high-purity corrosion-resistant aluminum coating on titanium alloy component according to claim 1 is characterized in that: described removal titanium alloy component surface oil stain is titanium alloy component to be inserted take out drying in the ultrasonic cleaning apparatus after 20～40 minutes.
3. the method for preparing high-purity corrosion-resistant aluminum coating on titanium alloy component according to claim 2 is characterized in that: described removal titanium alloy component surface oil stain is titanium alloy component to be inserted take out drying in the ultrasonic cleaning apparatus after 30 minutes.
4. the method that on titanium alloy component, prepares high-purity corrosion-resistant aluminum coating according to claim 1, it is characterized in that: described titanium alloy component is carried out the argon plasma sputter clean is that titanium alloy component is inserted in the vacuum chamber of high-power medium frequency magnetron sputtering equipment, is evacuated to 3.6 * 10
-3Pa feeds 1～2Pa argon gas, and titanium alloy component was carried out the argon plasma sputter clean 8～12 minutes.
5. the method that on titanium alloy component, prepares high-purity corrosion-resistant aluminum coating according to claim 4, it is characterized in that: described titanium alloy component is carried out the argon plasma sputter clean is that titanium alloy component is inserted in the vacuum chamber of high-power medium frequency magnetron sputtering equipment, is evacuated to 3.6 * 10
-3Pa feeds 1～2Pa argon gas, and titanium alloy component was carried out the argon plasma sputter clean 10 minutes.
6. according to claim 4 or the 5 described methods that on titanium alloy component, prepare high-purity corrosion-resistant aluminum coating, it is characterized in that: described argon plasma sputter is to apply on titanium alloy component-bias voltage of 1500V, make between part and the argon gas and produce glow discharge, the argon plasma that is formed by glow discharge carries out the argon plasma sputter clean to titanium alloy component.
7. the method for preparing high-purity corrosion-resistant aluminum coating on titanium alloy component according to claim 1 is characterized in that: described on titanium alloy component the deposition of aluminum coating be 99.9% fine aluminium also to be inserted vacuum chamber as target when inserting titanium alloy component in the vacuum chamber of high-power medium frequency magnetron sputtering equipment; The electric current that target is applied 8～12A carried out pre-sputter clean 4～6 minutes, removed the impurity such as oxide compound of target material surface; Ar pressure is adjusted to 0.5 * 10
-1Pa～6 * 10
-1Pa, on part, apply 0～-negative bias of 500V, on target, apply the sputtering voltage of 800V,＜200 ℃ temperature deposit 1～3 hour, on titanium alloy component, deposit thickness and be 3～12 microns aluminum coating; Close target power supply then successively, negative bias and argon flow amount Controlling System.
8. the method for preparing high-purity corrosion-resistant aluminum coating on titanium alloy component according to claim 7 is characterized in that: described deposition of aluminum coating is when titanium alloy component is inserted vacuum chamber 99.9% fine aluminium also to be inserted vacuum chamber as target; The electric current that target is applied 10A carried out pre-sputter clean 5 minutes, removed the impurity such as oxide compound of target material surface; Ar pressure is adjusted to 10
-1Pa～6 * 10
-1Pa applies the negative bias of 150～500V on part, apply the sputtering voltage of 800V on target, 180 ℃ temperature deposit 2.5 hours, deposits thickness and be 3～5 microns aluminum coating on titanium alloy component; Close target power supply then successively, negative bias and argon flow amount Controlling System.
9. the method that on titanium alloy component, prepares high-purity corrosion-resistant aluminum coating according to claim 1, it is characterized in that: after described deposition of aluminum coating step, again titanium alloy component is carried out chromate treating and get more excellent golden yellow high corrosion resistance aluminum coating; Described chromate treating is the titanium alloy component after the deposition of aluminum coating to be inserted to soak in 30～40 ℃ the chromate treating liquid take out after 8～12 seconds.
10. the method for preparing high-purity corrosion-resistant aluminum coating on titanium alloy component according to claim 9 is characterized in that: described chromate treating is the titanium alloy component after the deposition of aluminum coating to be inserted to soak in 30～40 ℃ the chromate treating liquid take out after 10 seconds.
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Cited By (8)
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| CN103112212A (en) * | 2013-02-27 | 2013-05-22 | 航天精工有限公司 | Titanium alloy fastener with coating as well as manufacturing method and device thereof |
| CN103962717A (en) * | 2013-01-24 | 2014-08-06 | 中广核工程有限公司 | Welding method for surface treatment of steel and titanium or steel and titanium alloy |
| CN105779999A (en) * | 2016-02-01 | 2016-07-20 | 中原工学院信息商务学院 | Material for high-mechanical-strength parts |
| CN105925948A (en) * | 2016-05-18 | 2016-09-07 | 哈尔滨工业大学（威海） | Aluminum alloy surface activation connection method |
| CN108311703A (en) * | 2018-02-01 | 2018-07-24 | 深圳市铭利达精密机械有限公司 | New-energy automobile high-performance light fine structure part manufacturing process |
| CN111906144A (en) * | 2020-07-17 | 2020-11-10 | 太原理工大学 | Method for improving interface bonding strength of titanium/aluminum composite board |
| CN112048702A (en) * | 2020-09-10 | 2020-12-08 | 中国航发沈阳黎明航空发动机有限责任公司 | Preparation method of coating for aeroengine parts |
| CN112663010A (en) * | 2020-12-15 | 2021-04-16 | 南方海洋科学与工程广东省实验室(珠海) | Method for preparing aluminum oxide nano structure on titanium alloy surface and improving antifouling property of aluminum oxide nano structure |
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| CN103962717A (en) * | 2013-01-24 | 2014-08-06 | 中广核工程有限公司 | Welding method for surface treatment of steel and titanium or steel and titanium alloy |
| CN103112212A (en) * | 2013-02-27 | 2013-05-22 | 航天精工有限公司 | Titanium alloy fastener with coating as well as manufacturing method and device thereof |
| CN105779999B (en) * | 2016-02-01 | 2018-06-22 | 中原工学院信息商务学院 | A kind of material of high mechanical strength part |
| CN105779999A (en) * | 2016-02-01 | 2016-07-20 | 中原工学院信息商务学院 | Material for high-mechanical-strength parts |
| CN105925948B (en) * | 2016-05-18 | 2019-05-14 | 哈尔滨工业大学（威海） | A kind of aluminum alloy surface activation connection method |
| CN105925948A (en) * | 2016-05-18 | 2016-09-07 | 哈尔滨工业大学（威海） | Aluminum alloy surface activation connection method |
| CN108311703A (en) * | 2018-02-01 | 2018-07-24 | 深圳市铭利达精密机械有限公司 | New-energy automobile high-performance light fine structure part manufacturing process |
| CN108311703B (en) * | 2018-02-01 | 2023-02-28 | 深圳市铭利达精密技术股份有限公司 | Forming method of high-performance light precise structural part of new energy automobile |
| CN111906144A (en) * | 2020-07-17 | 2020-11-10 | 太原理工大学 | Method for improving interface bonding strength of titanium/aluminum composite board |
| CN111906144B (en) * | 2020-07-17 | 2022-02-22 | 太原理工大学 | Method for improving interface bonding strength of titanium/aluminum composite board |
| CN112048702A (en) * | 2020-09-10 | 2020-12-08 | 中国航发沈阳黎明航空发动机有限责任公司 | Preparation method of coating for aeroengine parts |
| CN112048702B (en) * | 2020-09-10 | 2022-07-01 | 中国航发沈阳黎明航空发动机有限责任公司 | Preparation method of coating for aeroengine parts |
| CN112663010A (en) * | 2020-12-15 | 2021-04-16 | 南方海洋科学与工程广东省实验室(珠海) | Method for preparing aluminum oxide nano structure on titanium alloy surface and improving antifouling property of aluminum oxide nano structure |
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