CN111005002A - Preparation method of erosion-resistant and corrosion-resistant self-cleaning coating for compressor blade - Google Patents
Preparation method of erosion-resistant and corrosion-resistant self-cleaning coating for compressor blade Download PDFInfo
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- CN111005002A CN111005002A CN202010016870.3A CN202010016870A CN111005002A CN 111005002 A CN111005002 A CN 111005002A CN 202010016870 A CN202010016870 A CN 202010016870A CN 111005002 A CN111005002 A CN 111005002A
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
- C23C14/0036—Reactive sputtering
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- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
- C23C14/025—Metallic sublayers
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- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
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- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0688—Cermets, e.g. mixtures of metal and one or more of carbides, nitrides, oxides or borides
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- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
- C23C14/165—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon by cathodic sputtering
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/18—Metallic material, boron or silicon on other inorganic substrates
- C23C14/185—Metallic material, boron or silicon on other inorganic substrates by cathodic sputtering
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
Abstract
The invention discloses a preparation method of an erosion-resistant and corrosion-resistant self-cleaning coating of a compressor blade, which comprises the following steps: (1) wet-blowing sand and ultrasonic cleaning the workpiece, drying the workpiece, and then performing plasma cleaning in vacuum; (2) firstly, preparing a metal Me bonding layer; (3) then depositing MeN on the metallic Me bonding layerxA gradient layer; (4) again in MeNxPreparing a multilayer of MeN/Me containing nanostructures on the gradient layer; (5) putting the workpiece into a dip coating container, vacuumizing to 100Pa and maintaining1h, then introducing silicate or phosphate aqueous solution to perform coating hole sealing treatment, keeping for 2h under the same vacuum degree, and taking out the workpiece; (6) putting the workpiece into a container containing fluorosilane water solution for low surface energy modification, keeping for 30min, and taking out the workpiece; (7) and putting the workpiece into a drying box for drying. The coating prepared by the invention is erosion-resistant and has a protection system with excellent corrosion resistance and self-cleaning function.
Description
Technical Field
The invention belongs to a wear-resistant and corrosion-resistant surface treatment technology for an aero-engine compressor blade, and particularly relates to a preparation method of an erosion-resistant and corrosion-resistant self-cleaning coating for the compressor blade.
Background
A large amount of sand dust, ice, snow and other hard particles on the ground are sucked into an engine in the take-off and landing processes of an airplane, the rotor blades of a gas compressor are easily damaged, the damage is on one hand caused by the fact that the hard particles can directly wear blade tips to cause the change of the molded surfaces and influence the vibration performance of the blades, and more serious is high cycle fatigue or stress corrosion fatigue fracture of the blades caused by the expansion of microcracks generated by the damage of the hard particles under the vibration condition. The blades of the compressor of the engine of the airplane which is in service in the marine environment and the damp and hot environment have serious corrosion problems, especially steel parts, and the corrosion problem is often accompanied with the erosion problem. In coastal areas, engine structures are severely corroded due to the fact that airplanes are parked and flown in corrosive media of salt fog and industrial dust for a long time. In a damp and hot area, the main factors that the blade corrosion of the engine compressor has great influence are air humidity, temperature and temperature difference, and the larger the air relative humidity is, the more easily the water vapor is condensed on the surface of the blade of the compressor to form a thicker liquid film, and more oxygen and other corrosive substances are dissolved, so that the corrosion is accelerated.
At present, a compressor blade is mainly protected by a coating, the mechanism is shown as a graph b in figure 1, a graph a in figure 1 is a schematic diagram that the surface of a substrate is eroded under the condition that the substrate is not coated, the protection technology of the compressor blade has undergone the development of three generations, a first generation protective coating is an inorganic salt medium-temperature aluminum and cadmium-nickel coating, the corrosion prevention problem is focused on, but the scouring resistance in practical application is too poor, so that the corrosion resistance of the coating is very limited; the second generation protective coating is a low-temperature aluminized silicate composite coating, has better corrosion resistance and erosion resistance, but has shorter service life and maintenance period; the third generation is a Men-based protective coating system, the erosion resistance and the corrosion resistance of which are greatly improved, and the protective coating system is widely applied in America, Europe and other countries, the protective coating system is usually prepared by adopting a PVD (physical vapor deposition) technology and mainly comprises a magnetron sputtering technology and a cathode arc deposition technology, and the coating prepared by the magnetron sputtering technology has a compact structure and excellent surface quality, but has a slow deposition rate, poor adhesive force compared with a cathode arc and a relatively low ionization rate; the ionization rate of the cathodic arc deposition technology is high, and although the deposition is often accompanied by large-particle splashing, the organization structure and the surface quality are not as good as those of magnetron sputtering, the deposition rate is high, the coating adhesion is good, and the protective coating of the compressor blade at home and abroad is more in accordance with the engineering and application requirements.
In order to solve the problem that MeN coatings prepared by PVD are mostly columnar crystal structures with voids between the crystals, especially coatings deposited by cathodic arc have larger voids and are often accompanied by large particles, which is very disadvantageous for corrosion protection, MeN coatings have been gradually developed from single layer structures into coatings with multi-component, multi-layer and gradient structures to reduce voids and avoid the generation of penetrating gaps, as disclosed in the prior art JP2015010278, multi-layer coatings containing DIAMOND-LIKE CARBON (multi-layer DIAMOND-LIKE CARBON), it is proposed to use coatings containing multi-layer DIAMOND-LIKE CARBON for erosion and corrosion protection of compressor blades to withstand severe environments such as high mechanical pressure and high temperature, the coatings are composed of an adhesive layer, an intermediate layer and a surface layer, at least one of the above-mentioned adhesive layer and surface layer contains multi-layer DIAMOND-LIKE CARBON, the intermediate layer contains at least one silicon or germanium layer, at least one layer of doped diamond-like carbon is contained, the patent mentions that the corrosion is prevented by the hydrophobic and lipophilic properties of the surface of the coating, the erosion is prevented by the hardness of the surface of the coating, and the aerodynamic resistance of the blade is reduced by the smooth surface, but the patent does not mention defect treatment methods such as pore sealing and the like of the coating, and the selected coating system is greatly different from the coating system to be proposed by the invention; the patent CN1361308A in the prior art is used for ion plating TiAlN coating of a vane of an air compressor of a naval aeroengine, and provides a method for forming Al- (Ai, Al) -TiN non-interface gradient coating by controlling deposition parameters according to the difference of melting points and steam of plating materials titanium and aluminum and the difference of reaction activity, and the method can effectively relieve the problems of pinholes, cavities and the like in the TiN coating, but can not thoroughly eliminate the defect influence of the coating; patent RU2009139921A in THE prior art, a METHOD for applying WEAR-resistant coating on GAS TURBINE compressor blade (Metal OF coating OF WEAR-RESISTANT COATINGSBEYOND COMPRESSOR BLADES GTD (GAS-TURBINE ENGINE), which proposes a METHOD for preparing multilayer TiN coating system by using ion implantation and plasma vapor deposition technology to protect THE compressor blade, THE METHOD comprises THE steps OF firstly implanting Al on THE blade and then alternately depositing TiN and TiAlN coating layers, which can improve THE WEAR-resisting and corrosion-resisting properties OF THE coating, but THE patent does not mention how to thoroughly solve THE problem OF internal defects OF THE coating, THE measures OF THE three prior art patents can only reduce THE defects in THE coating and can not thoroughly eliminate THE defects, thus still can not thoroughly prevent corrosion medium from permeating into a corrosion substrate, for example, FIG. 2 is a microscopic picture OF a multilayer TiN/Ti coating prepared by PVD in THE prior art, FIG. 3 is a salt-fog corrosion picture OF THE multilayer TiN/Ti coating in FIG. 2, as can be seen from FIG. 3, the salt spray corrosion of the multilayer TiN/Ti coating is very severe.
The PVD-prepared protective coatings of multi-component, multi-layer and gradient structures have good erosion resistance, but due to the defects generated in the preparation process, the erosion resistance still needs to be improved.
Disclosure of Invention
The invention provides a preparation method of an erosion-resistant and corrosion-resistant self-cleaning coating of a compressor blade, which aims at the problems of erosion and corrosion of the compressor blade and the problems of pores and defects in the current MeN protective coating system and adopts a vacuum cathode arc or magnetron sputtering deposition technology to prepare the coating comprising MeNxGradient layer, coating of a multilayer of MeN/Me containing nanostructures, by means of MeNxThe gradient change of the percentage of the metal Me and N element components in the gradient layer reduces the internal defects of the coating as much as possible, the MeN/Me multilayer containing the nano structure cuts off the penetrating pores as much as possible to reduce the possibility that corrosive media enter gaps, then, silicate or phosphate is adopted to carry out the hole sealing of the MeN coating, and the defects which still exist are repairedAnd (3) repairing, thoroughly blocking corrosive media from entering a channel, and finally performing surface energy modification on the whole coating system to ensure that the surface of the coating has a hydrophobic self-cleaning function and reduce the chance of the corrosive media staying on the surface of the coating, thereby radically reducing the possibility of corrosion and finally obtaining a protection system with the Men coating which is erosion-resistant and has excellent corrosion resistance and a self-cleaning function.
In order to solve the technical problems, the invention adopts the following technical scheme:
1. a preparation method of an erosion-resistant corrosion-resistant self-cleaning coating of a compressor blade comprises the following steps:
(1) wet blasting is carried out on a workpiece, namely a compressor blade, then ultrasonic cleaning is carried out, and finally the workpiece is dried and put into a vacuum chamber for plasma cleaning;
(2) firstly preparing a metal Me bonding layer on the workpiece cleaned by the plasma in the step (1) by adopting a vacuum cathode arc or magnetron sputtering deposition technology, wherein Me is a metal element such as Ti, Zr and Cr;
(3) and then continuing to deposit MeN on the metal Me bonding layer in the step (2) by using a vacuum cathode arc or magnetron sputtering deposition technologyxGradient layer of MeNxThe metal elements Me in the gradient layer are Ti, Zr and Cr, and MeNxThe metal element Me in the gradient layer is consistent with the metal element Me in the metal Me bonding layer in the step (2), and MeN is depositedxThe gradient layer is prepared by N in the preparation process2The flow rate is orderly adjusted from low to high to form the gradient change of the percentage of the elements of the metal Me and N;
(4) using again vacuum cathode arc or magnetron sputtering deposition technique, the MeN in step (3)xPreparing a MeN/Me multilayer containing nanostructures on the gradient layer, wherein the metal element Me in the MeN/Me multilayer containing nanostructures is Ti, Zr or Cr, and the metal element Me in the MeN/Me multilayer containing nanostructures can be mixed with the MeNxThe metal element Me in the gradient layer is different;
(5) putting the workpiece with the coating prepared in the step (4) into a dip-coating container, firstly vacuumizing to 100Pa and keeping for 1h to remove air in pores and cavities in the coating, then introducing silicate or phosphate aqueous solution to carry out coating hole sealing treatment, keeping for 2h under the same vacuum degree, and then taking out the workpiece;
(6) putting the workpiece taken out in the step (5) into a container containing fluorosilane aqueous solution for low surface energy modification, keeping for 30min and taking out the workpiece;
(7) and (4) putting the workpiece taken out in the step (6) into a drying box for drying.
Further, in step (1): the method comprises the steps of carrying out wet sand blowing on a workpiece by using sand larger than 150 meshes, enabling the pressure of used compressed air to be 0.2-0.6 MPa, then carrying out ultrasonic cleaning for 1h, finally carrying out blow-drying and placing the workpiece into a vacuum chamber for plasma cleaning, carrying out plasma cleaning on the vacuum chamber, specifically, vacuumizing to 0.001-0.004 Pa, introducing argon and adjusting the flow of the argon to 0-200 sccm, controlling the pressure of the argon to be 0.05-0.08 Pa, then starting a bias system on the workpiece, setting the voltage to-600-800V, carrying out argon ion bombardment cleaning, and controlling the cleaning time to be 30-60 min.
Further, in the step (4): the MeN/Me multilayer containing nanostructures is formed by nano Me1(Me) N/MeN multilayers and metal Me layers, and nano Me1(Me) N/MeN multilayers consisting of nano-Me1(Me) N film layer and nano MeN film layer, then preparing the MeN/Me multilayer containing nano structure is to firstly carry out nano Me1Deposition of (Me) N/MeN multilayers, followed by deposition of a metal Me layer, in which the nano Me is1The (Me) N/MeN multilayer is a heterogeneous nano nitride ceramic film layer, the metal element Me in the nano MeN film layer is consistent with the metal element Me in the metal Me layer, and the nano Me1The (Me) N film layer can be mono-metal nitride or binary-metal nitride, and the nano Me1The metal elements in the (Me) N film layer are different from those in the nano MeN film layer, so that a heterogeneous nano nitride ceramic film layer is formed.
Further, it is characterized in that:
for the coating system Ti bonding layer + TiNxThe gradient layer + TiN/Ti multilayer coating containing the nano structure, wherein the TiN/Ti multilayer containing the nano structure consists of a nano TiAlN/TiN multilayer and a metal Ti layer,step (2) preparing a metal Ti bonding layer by adopting a vacuum cathode arc deposition technology, specifically turning on a Ti cathode arc target power supply, regulating the current to 120A, regulating the voltage of a bias system to-100V, and controlling the thickness of the obtained metal Ti bonding layer to be 0.7-0.8 mu m, wherein the deposition time is 10 min;
for the coating system Ti bonding layer + TiNxIn the step (2), a metal Ti bonding layer is firstly prepared by adopting a vacuum cathode arc deposition technology, specifically, a Ti cathode arc target power supply is turned on, the current is adjusted to 120A, the voltage of a bias system is adjusted to-100V, the deposition time is 10min, and the thickness of the obtained metal Ti bonding layer is controlled to be 0.5-1 mu m.
Further, it is characterized in that:
for the coating system Ti bonding layer + TiNxIn the coating of the gradient layer and the TiN/Ti multilayer containing the nano structure, the TiN/Ti multilayer containing the nano structure consists of the nano TiAlN/TiN multilayer and the metal Ti layer, and the step (3) is to deposit the TiN/Ti multilayer on the metal Ti bonding layer in the step (2) by utilizing a vacuum cathode arc deposition technologyxGradient layer, in particular by passing N2And N is substituted by2The flow control program is adjusted to be kept for 20min at 200sccm, 20min at 300sccm, 20min at 400sccm and 20min at 500sccm, thereby forming TiN with gradient compositionxGraded layer of and TiNxControlling the thickness of the gradient layer to be 3-4 mu m;
for the coating system Ti bonding layer + TiNxIn the coating of the gradient layer + ZrN/Zr multilayer containing the nanostructure, the ZrN/Zr multilayer containing the nanostructure consists of a nano TaN/ZrN multilayer and a metal Zr layer, and the step (3) is to deposit TiN on the metal Ti bonding layer in the step (2) by utilizing a vacuum cathode arc deposition technologyxGradient layer, in particular by passing N2And N is substituted by2The flow control program is adjusted to be kept for 20min at 200sccm, 20min at 300sccm, 20min at 400sccm and 20min at 500sccm, thereby forming TiN with gradient compositionxGradient of gradientLayer of and TiNxThe thickness of the gradient layer is controlled to be 3.5-4.5 μm.
Further, it is characterized in that:
for the coating system Ti bonding layer + TiNxFor the coating of the gradient layer + TiN/Ti multilayer containing the nano structure, wherein the TiN/Ti multilayer containing the nano structure consists of the nano TiAlN/TiN multilayer and the metal Ti layer, the step (4) is to reuse the vacuum cathode arc deposition technology, and the TiN in the step (3)xPreparing TiN/Ti multilayer containing nano structure on the gradient layer, specifically, firstly depositing nano TiAlN/TiN multilayer, namely, firstly turning off Ti cathode arc target power supply and turning on TiAl cathode arc target power supply, and then turning N on2Adjusting the flow to 200sccm, adjusting the current to 120A, keeping the current for 3min, then closing a TiAl cathode arc target power supply, opening a Ti cathode arc target power supply, adjusting the current to 120A, keeping the current for 3min, repeating the operation for 4 times, controlling the total thickness of the obtained nano TiAlN/TiN multilayer to be 0.4-0.52 mu m, controlling the thickness of the single-layer nano film layer to be 50-65 nm, and then depositing a metal Ti layer, namely closing the N2And the deposition time is 10min, the thickness of the obtained metal Ti layer is controlled to be 0.7-0.8 μm, and the alternating deposition of the nano TiAlN/TiN multilayer and the metal Ti layer is repeated for 4 times, so that the total thickness of the finally obtained TiN/Ti multilayer containing the nano structure is controlled to be 4.4-5.3 μm;
for the coating system Ti bonding layer + TiNxIn the case of the gradient layer + ZrN/Zr multilayer coating containing the nanostructure, the ZrN/Zr multilayer containing the nanostructure consists of a nano TaN/ZrN multilayer and a metal Zr layer, and the step (4) is that TiN is obtained in the step (3) by utilizing a magnetron sputtering deposition technologyxPreparing a ZrN/Zr multilayer containing a nano structure on the gradient layer, specifically depositing the nano TaN/ZrN multilayer, namely turning off a Ti cathode arc target power supply and turning on a Ta magnetron sputtering target power supply, and turning on N2Adjusting the flow to 200sccm, adjusting the current to 2A, keeping the current for 15min, then closing the Ta magnetron sputtering target power supply, opening the Zr magnetron sputtering target power supply, adjusting the current to 2A, keeping the current for 15min, repeating the operation for 4 times, controlling the total thickness of the obtained nano TaN/ZrN multilayer to be 0.4-0.52 mu m, and controlling the thickness of the single-layer nano film to be 50-65 nmThen depositing a metal Zr layer, i.e. turning off N2And the deposition time is 45min, the thickness of the obtained metal Zr layer is controlled to be 0.7-0.8 mu m, and the alternating deposition of the nano TaN/ZrN multilayer and the metal Zr layer is repeated for 4 times, so that the total thickness of the finally obtained ZrN/Zr multilayer containing the nano structure is controlled to be 4.4-5.3 mu m.
Further, in step (6): the fluorosilane aqueous solution is heptadecafluoroquinyltrimethoxysilane aqueous solution.
Further, in step (7): and (4) putting the workpiece taken out in the step (6) into a drying box, keeping the temperature at 60 ℃ for 30min, and then raising the temperature to 100 ℃ for 2h to dry the workpiece.
The invention adopts a gradient coating and nano multilayer MeN coating system, improves the scouring resistance and the corrosion resistance to the utmost extent, and further improves the corrosion resistance of the coating from two aspects: 1) plugging defects such as pores and holes by using aqueous silicate or phosphate solution, and cutting off corrosive media from entering a coating channel; 2) the surface of the coating is modified by low surface energy, so that a self-cleaning function is realized, the retention of water and corrosive media is reduced, and the possibility of the corrosive media entering the coating and contacting a substrate is greatly reduced.
Compared with the prior art, the invention has the beneficial effects that:
aiming at the problems of erosion and corrosion of the blades of the gas compressor and the problems of pores and defects in the current MeN protective coating system, the invention solves the problems in three aspects of coating structure, defect repair and surface energy, realizes the aims of erosion resistance and corrosion resistance, and specifically comprises the following steps: 1) using graded composition change coatings, i.e. MenxThe gradient layer reduces the internal defects of the coating and reduces the columnar crystal gaps of the coating, thereby reducing the internal stress and the corrosion medium channel, and simultaneously, the gradient layer also becomes a supporting layer of the upper multilayer structure, which is beneficial to improving the shock resistance and the scouring capability; and the MeN/Me multilayer containing the nano-structure is formed by nano-Me1(Me) N/MeN multilayers and metal Me layers, nano Me1(Me) N/MeN multilayers consisting of nano-Me1The (Me) N film layer and the nano MeN film layer are formed, and the MeN/Me multilayer structure design containing the nano multilayer structure is adopted to realize the hard ceramicMeN and softer Me metal film layers are alternately arranged, so that the toughness of the coating is improved, and meanwhile, the nano Me is used1The hardness and the anti-scouring capacity of the (Me) N/MeN multi-layer design are improved, and in addition, the nano Me1The (Me) N/MeN multilayer structure can also effectively block the through pores in the coating; 2) for the pores and defects still existing in the coating, the surface layer and the gradient layer are sealed and repaired by adopting water-based silicate or phosphate, so that corrosive media are thoroughly blocked from entering; 3) the coating is subjected to surface modification by adopting a fluorosilane aqueous solution, so that the surface energy of the coating is reduced, the retention probability of a corrosion medium on the surface of the coating is reduced, and the possibility of corrosion is reduced.
Drawings
FIG. 1 is a schematic diagram of an anti-erosion mechanism of a blade, wherein a is a schematic diagram of erosion of the surface of a substrate under a condition that the substrate is not coated, and b is a schematic diagram of a mechanism that the blade is protected by a coating;
FIG. 2 is a microscopic picture of a multilayer TiN/Ti coating prepared by PVD in the prior art;
FIG. 3 is a salt spray corrosion photograph of the multilayer TiN/Ti coating of FIG. 2;
FIG. 4 is a schematic view of an erosion-resistant corrosion-resistant self-cleaning coating protection system for an aircraft engine compressor blade according to the present invention;
FIG. 5 is a schematic diagram of the basic structure and sealing of the compressor blade coating system of the present invention;
FIG. 6 shows the present invention N2A flow control schematic;
FIG. 7 is a photograph of corrosion after a neutral salt spray test for 40 hours on a stainless steel substrate, a sample with a single layer of TiN coating, and a sample of a workpiece from example 1, a photograph of corrosion after a neutral salt spray test for 40 hours on a stainless steel substrate, a photograph of corrosion after a neutral salt spray test for 40 hours on a sample with a single layer of TiN coating, b a photograph of corrosion after a neutral salt spray test for 40 hours on a sample with a single layer of TiN coating, and c a photograph of corrosion after a neutral salt spray test for 40 hours on a sample of a workpiece from example 1;
FIG. 8 is a photograph of a corrosion of a sample of the workpiece from example 1 after a neutral salt spray test for 400 hours;
FIG. 9 is a graph comparing erosion wear rate curves using a substrate and workpiece samples obtained using example 1.
Description of the drawings: 1. base body, 2, Metal Me bonding layer, 3, MeNxGradient layer, 4, Nano-structured MeN/Me multilayer, 5, Nano-Me1(Me) N/MeN multilayer, 6, Metal Me layer, 7, Low surface energy modification layer, 8, Nano Me1A (Me) N film layer, and a 9 nanometer MeN film layer.
Detailed Description
The erosion-resistant corrosion-resistant self-cleaning coating protection system of the aero-engine compressor blade is shown in figure 4, and the coating system mainly comprises four layers of structures, namely metal Me bonding layer 2 and MeNxA gradient layer 3, a nanostructure-containing MeN/Me multilayer 4, and a low surface energy modification layer 7, wherein the nanostructure-containing MeN/Me multilayer 4 is formed from nano Me1(Me) N/MeN multilayers 5 and metal Me layers 6, and nano Me1(Me) N/MeN multilayers consisting of nano-Me1A (Me) N film layer 8 and a nano MeN film layer 9.
The preparation method of the coating comprises the following steps:
(1) wet blasting is carried out on a workpiece, namely a compressor blade, then ultrasonic cleaning is carried out, and finally the workpiece is dried and put into a vacuum chamber for plasma cleaning;
(2) firstly preparing a metal Me bonding layer 2 on the workpiece cleaned by the plasma in the step (1) by adopting a vacuum cathode arc or magnetron sputtering deposition technology, wherein Me is a metal element such as Ti, Zr and Cr so as to improve the bonding strength;
(3) and then continuing to deposit a MeNx gradient layer 3 on the metal Me bonding layer 2 in the step (2) by using a vacuum cathode arc or magnetron sputtering deposition technology, wherein the metal elements Me in the MeNx gradient layer 3 are Ti, Zr and Cr, the metal elements Me in the MeNx gradient layer 3 are consistent with the metal elements Me in the metal Me bonding layer 2 in the step (2), and the step of depositing the MeNx gradient layer 3 is specifically realized by depositing N in the preparation process2The flow rate is orderly adjusted from low to high to form the gradient change of the component percentages of the metal Me and N, and N is shown in figure 62The flow control is schematically shown, the gradient change of the component percentages of the metal Me and N in the MeNx gradient layer 3 can reduce the internal defects of the coating and reduce the columnar crystal gaps of the coating, thereby reducing the internal stress and corrosionA media channel;
(4) preparing a nano-structure containing MeN/Me multilayer 4 on the MeNx gradient layer 3 in the step (3) by using a vacuum cathode arc or magnetron sputtering deposition technology again, wherein the metal element Me in the nano-structure containing MeN/Me multilayer 4 is Ti, Zr or Cr, and the metal element Me in the nano-structure containing MeN/Me multilayer 4 can be different from the metal element Me in the MeNx gradient layer 3, and preparing the nano-structure containing MeN/Me multilayer 4 by firstly performing the deposition of a nano-Me 1(Me) N/MeN multilayer 5 and then depositing a metal Me layer 6, wherein the nano Me1(Me) N/MeN multilayer 5 is a heterogeneous nano-nitride ceramic film layer, and the metal element Me in the nano-MeN film layer 9 is consistent with the metal element Me in the metal Me layer 6, and the nano Me1 Me N film layer 8 can be a single-element metal nitride or a binary metal nitride, the metal element in the nanometer Me1(Me) N film layer 8 is different from the metal element in the nanometer MeN film layer 9, so that a heterogeneous nanometer nitride ceramic film layer is formed, and the hardness and the scouring resistance of the nanometer multilayer are improved;
(5) putting the workpiece with the coating prepared in the step (4) into a dip-coating container, firstly vacuumizing to 100Pa and keeping for 1h to remove air in pores and cavities in the coating, then introducing silicate or phosphate aqueous solution to carry out coating hole sealing treatment, keeping for 2h under the same vacuum degree, and then taking out the workpiece;
(6) putting the workpiece taken out in the step (5) into a container containing fluorosilane aqueous solution for low surface energy modification, keeping for 30min and taking out the workpiece;
(7) and (4) putting the workpiece taken out in the step (6) into a drying box for drying.
As can be seen from fig. 5, the nano Me1(Me) N/MeN multilayer 5 structure can effectively block the through pores in the coating, and for the pores and defects still existing in the coating, the surface layer and the gradient layer are sealed and repaired by using aqueous silicate or phosphate to completely block the entry of corrosive media.
Example 1
The erosion-resistant and corrosion-resistant self-cleaning coating system for the aero-engine compressor blade of the embodiment is a Ti bonding layer + TiNxGradient layer + TiN/Ti multilayer containing nanostructures, whichThe TiN/Ti multilayer containing the nano structure consists of a nano TiAlN/TiN multilayer and a metal Ti layer, and the preparation method of the coating comprises the following steps:
(1) performing wet sand blowing on a workpiece by using sand larger than 150 meshes, wherein the pressure of used compressed air is 0.2-0.6 MPa, then performing ultrasonic cleaning for 1h, finally drying and placing the workpiece into a vacuum chamber for plasma cleaning, performing plasma cleaning on the vacuum chamber, specifically vacuumizing to 0.001-0.004 Pa, introducing argon and adjusting the flow of the argon to 0-200 sccm, controlling the pressure of the argon to be 0.05-0.08 Pa, then starting a bias system on the workpiece, setting the voltage to be-600-800V, performing argon ion bombardment cleaning, and controlling the cleaning time to be 30-60 min;
(2) firstly preparing a metal Ti bonding layer by adopting a vacuum cathode arc deposition technology, specifically turning on a Ti cathode arc target power supply, regulating the current to 120A, regulating the voltage of a bias system to-100V, and controlling the thickness of the obtained metal Ti bonding layer to be 0.7-0.8 mu m, wherein the deposition time is 10 min;
(3) then continuing to use the vacuum cathode arc deposition technology to deposit TiN on the metal Ti bonding layer in the step (2)xGradient layer, in particular by passing N2And N is substituted by2The flow control program is adjusted to be kept for 20min at 200sccm, 20min at 300sccm, 20min at 400sccm and 20min at 500sccm, thereby forming TiN with gradient compositionxGraded layer of and TiNxControlling the thickness of the gradient layer to be 3-4 mu m;
(4) TiN in step (3) by again using vacuum cathode arc deposition techniquexPreparing TiN/Ti multilayer containing nano structure on the gradient layer, specifically, firstly depositing nano TiAlN/TiN multilayer, namely, firstly turning off Ti cathode arc target power supply and turning on TiAl cathode arc target power supply, and then turning N on2Adjusting the flow to 200sccm, adjusting the current to 120A, keeping the current for 3min, then closing a TiAl cathode arc target power supply, opening a Ti cathode arc target power supply, adjusting the current to 120A, keeping the current for 3min, repeating the operation for 4 times, controlling the total thickness of the obtained nano TiAlN/TiN multilayer to be 0.4-0.52 mu m, controlling the thickness of the single-layer nano film layer to be 50-65 nm, and then depositing a metal Ti layer, namelyTurning off N2And the deposition time is 10min, the thickness of the obtained metal Ti layer is controlled to be 0.7-0.8 μm, and the alternating deposition of the nano TiAlN/TiN multilayer and the metal Ti layer is repeated for 4 times, so that the total thickness of the finally obtained TiN/Ti multilayer containing the nano structure is controlled to be 4.4-5.3 μm;
(5) putting the workpiece with the coating prepared in the step (4) into a dip-coating container, firstly vacuumizing to 100Pa and keeping for 1h to remove air in pores and cavities in the coating, then introducing silicate or phosphate aqueous solution to carry out coating hole sealing treatment, keeping for 2h under the same vacuum degree, and then taking out the workpiece;
(6) putting the workpiece taken out in the step (5) into a container containing heptadecafluoroquinyltrimethoxysilane aqueous solution for low surface energy modification, keeping for 30min, and taking out the workpiece;
(7) and (4) putting the workpiece taken out in the step (6) into a drying box, setting a drying temperature change program, keeping the temperature at 60 ℃ for 30min, raising the temperature to 100 ℃ and keeping the temperature for 2h, drying the workpiece, and taking out the workpiece after drying.
Example 2
The erosion-resistant and corrosion-resistant self-cleaning coating system for the aero-engine compressor blade of the embodiment is a Ti bonding layer + TiNxThe gradient layer + ZrN/Zr multilayer containing the nanometer structure, wherein the ZrN/Zr multilayer containing the nanometer structure is composed of a nanometer TaN/ZrN multilayer and a metal Zr layer, and the preparation method of the coating comprises the following steps:
(1) performing wet sand blowing on a workpiece by using sand larger than 150 meshes, wherein the pressure of used compressed air is 0.2-0.6 MPa, then performing ultrasonic cleaning for 1h, finally drying and placing the workpiece into a vacuum chamber for plasma cleaning, performing plasma cleaning on the vacuum chamber, specifically vacuumizing to 0.001-0.004 Pa, introducing argon and adjusting the flow of the argon to 0-200 sccm, controlling the pressure of the argon to be 0.05-0.08 Pa, then starting a bias system on the workpiece, setting the voltage to be-600-800V, performing argon ion bombardment cleaning, and controlling the cleaning time to be 30-60 min;
(2) firstly preparing a metal Ti bonding layer by adopting a vacuum cathode arc deposition technology, specifically turning on a Ti cathode arc target power supply, regulating the current to 120A, regulating the voltage of a bias system to-100V, and controlling the thickness of the obtained metal Ti bonding layer to be 0.5-1 mu m, wherein the deposition time is 10 min;
(3) then continuing to use the vacuum cathode arc deposition technology to deposit TiN on the metal Ti bonding layer in the step (2)xGradient layer, in particular by passing N2And N is substituted by2The flow control program is adjusted to be kept for 20min at 200sccm, 20min at 300sccm, 20min at 400sccm and 20min at 500sccm, thereby forming TiN with gradient compositionxGraded layer of and TiNxThe thickness of the gradient layer is controlled to be 3.5-4.5 mu m;
(4) followed by magnetron sputtering deposition of TiN in step (3)xPreparing a ZrN/Zr multilayer containing a nano structure on the gradient layer, specifically depositing the nano TaN/ZrN multilayer, namely turning off a Ti cathode arc target power supply and turning on a Ta magnetron sputtering target power supply, and turning on N2Adjusting the flow to 200sccm, adjusting the current to 2A, keeping the current for 15min, then closing the Ta magnetron sputtering target power supply, opening the Zr magnetron sputtering target power supply, adjusting the current to 2A, keeping the current for 15min, repeating the operation for 4 times, controlling the total thickness of the obtained nano TaN/ZrN multilayer to be 0.4-0.52 mu m, controlling the thickness of the single-layer nano film to be 50-65 nm, and then depositing a metal Zr layer, namely closing the N layer2And the deposition time is 45min, the thickness of the obtained metal Zr layer is controlled to be 0.7-0.8 mu m, the alternating deposition of the nano TaN/ZrN multilayer and the metal Zr layer is repeated for 4 times, so that the total thickness of the finally obtained ZrN/Zr multilayer containing the nano structure is controlled to be 4.4-5.3 mu m;
(5) putting the workpiece with the coating prepared in the step (4) into a dip-coating container, firstly vacuumizing to 100Pa and keeping for 1h to remove air in pores and cavities in the coating, then introducing silicate or phosphate aqueous solution to carry out coating hole sealing treatment, keeping for 2h under the same vacuum degree, and then taking out the workpiece;
(6) putting the workpiece taken out in the step (5) into a container containing heptadecafluoroquinyltrimethoxysilane aqueous solution for low surface energy modification, keeping for 30min, and taking out the workpiece;
(7) and (4) putting the workpiece taken out in the step (6) into a drying box, setting a drying temperature change program, keeping the temperature at 60 ℃ for 30min, raising the temperature to 100 ℃ and keeping the temperature for 2h, drying the workpiece, and taking out the workpiece after drying.
As can be seen from fig. 7 and 8, the neutral salt spray corrosion resistance of the workpiece sample prepared in example 1 can be improved by more than 10 times based on the stainless steel substrate.
Table 1 shows the erosion wear rates of the workpiece samples obtained in example 1 compared with the base body, Table 1 shows the erosion wear rates of the workpiece samples obtained in example 1 when SiO is contained2The test was carried out under gas scouring of the particles, the erosion wear rate being coating wear depth (mum)/SiO2Particle mass (g), coating Life means the SiO consumed by the total blowing of the coating per unit area2As can be seen from the combination of fig. 9 and table 1, the erosion wear rate of the workpiece sample produced in example 1 was reduced by about 90% based on the stainless steel substrate.
TABLE 1
Claims (8)
1. A preparation method of an erosion-resistant corrosion-resistant self-cleaning coating of a compressor blade is characterized by comprising the following steps:
(1) wet blasting is carried out on a workpiece, namely a compressor blade, then ultrasonic cleaning is carried out, and finally the workpiece is dried and put into a vacuum chamber for plasma cleaning;
(2) firstly preparing a metal Me bonding layer on the workpiece cleaned by the plasma in the step (1) by adopting a vacuum cathode arc or magnetron sputtering deposition technology, wherein Me is a metal element such as Ti, Zr and Cr;
(3) and then continuing to deposit MeN on the metal Me bonding layer in the step (2) by using a vacuum cathode arc or magnetron sputtering deposition technologyxGradient layer of MeNxThe metal elements Me in the gradient layer are Ti, Zr and Cr, and MeNxThe metal element Me in the gradient layer is consistent with the metal element Me in the metal Me bonding layer in the step (2), and MeN is depositedxThe gradient layer is prepared by N in the preparation process2Flow rateForming gradient change of the percentage of the metal Me and the metal N element components by orderly regulating from low to high;
(4) using again vacuum cathode arc or magnetron sputtering deposition technique, the MeN in step (3)xPreparing a MeN/Me multilayer containing nanostructures on the gradient layer, wherein the metal element Me in the MeN/Me multilayer containing nanostructures is Ti, Zr or Cr, and the metal element Me in the MeN/Me multilayer containing nanostructures can be mixed with the MeNxThe metal element Me in the gradient layer is different;
(5) putting the workpiece with the coating prepared in the step (4) into a dip-coating container, firstly vacuumizing to 100Pa and keeping for 1h to remove air in pores and cavities in the coating, then introducing silicate or phosphate aqueous solution to carry out coating hole sealing treatment, keeping for 2h under the same vacuum degree, and then taking out the workpiece;
(6) putting the workpiece taken out in the step (5) into a container containing fluorosilane aqueous solution for low surface energy modification, keeping for 30min and taking out the workpiece;
(7) and (4) putting the workpiece taken out in the step (6) into a drying box for drying.
2. The method for preparing the erosion-resistant corrosion-resistant self-cleaning coating for the compressor blade according to claim 1, wherein in the step (1): the method comprises the steps of carrying out wet sand blowing on a workpiece by using sand larger than 150 meshes, enabling the pressure of used compressed air to be 0.2-0.6 MPa, then carrying out ultrasonic cleaning for 1h, finally carrying out blow-drying and placing the workpiece into a vacuum chamber for plasma cleaning, carrying out plasma cleaning on the vacuum chamber, specifically, vacuumizing to 0.001-0.004 Pa, introducing argon and adjusting the flow of the argon to 0-200 sccm, controlling the pressure of the argon to be 0.05-0.08 Pa, then starting a bias system on the workpiece, setting the voltage to-600-800V, carrying out argon ion bombardment cleaning, and controlling the cleaning time to be 30-60 min.
3. The method for preparing the erosion-resistant corrosion-resistant self-cleaning coating for the compressor blade according to claim 1, wherein in the step (4): the MeN/Me multilayer containing nanostructures is formed by nano Me1(Me) N/MeN multilayers and metal Me layer groupsTo, and nano Me1(Me) N/MeN multilayers consisting of nano-Me1(Me) N film layer and nano MeN film layer, then preparing the MeN/Me multilayer containing nano structure is to firstly carry out nano Me1Deposition of (Me) N/MeN multilayers, followed by deposition of a metal Me layer, in which the nano Me is1The (Me) N/MeN multilayer is a heterogeneous nano nitride ceramic film layer, the metal element Me in the nano MeN film layer is consistent with the metal element Me in the metal Me layer, and the nano Me1The (Me) N film layer can be mono-metal nitride or binary-metal nitride, and the nano Me1The metal elements in the (Me) N film layer are different from those in the nano MeN film layer, so that a heterogeneous nano nitride ceramic film layer is formed.
4. The method for preparing the erosion-resistant corrosion-resistant self-cleaning coating for the compressor blade according to claim 3, wherein the erosion-resistant corrosion-resistant self-cleaning coating comprises the following steps:
for the coating system Ti bonding layer + TiNxFor the coating of the gradient layer and the TiN/Ti multilayer containing the nano structure, the TiN/Ti multilayer containing the nano structure consists of a nano TiAlN/TiN multilayer and a metal Ti layer, step (2) is to adopt a vacuum cathode arc deposition technology to firstly prepare the metal Ti bonding layer, specifically, turn on a Ti cathode arc target power supply, adjust the current to 120A, adjust the voltage of a bias system to-100V, and control the deposition time to 10min, wherein the thickness of the obtained metal Ti bonding layer is controlled to be 0.7-0.8 mu m;
for the coating system Ti bonding layer + TiNxIn the step (2), a metal Ti bonding layer is firstly prepared by adopting a vacuum cathode arc deposition technology, specifically, a Ti cathode arc target power supply is turned on, the current is adjusted to 120A, the voltage of a bias system is adjusted to-100V, the deposition time is 10min, and the thickness of the obtained metal Ti bonding layer is controlled to be 0.5-1 mu m.
5. The method for preparing the erosion-resistant corrosion-resistant self-cleaning coating for the compressor blade according to claim 3, wherein the erosion-resistant corrosion-resistant self-cleaning coating comprises the following steps:
for the coating system Ti bonding layer + TiNxIn the coating of the gradient layer and the TiN/Ti multilayer containing the nano structure, the TiN/Ti multilayer containing the nano structure consists of the nano TiAlN/TiN multilayer and the metal Ti layer, and the step (3) is to deposit the TiN/Ti multilayer on the metal Ti bonding layer in the step (2) by utilizing a vacuum cathode arc deposition technologyxGradient layer, in particular by passing N2And N is substituted by2The flow control program is adjusted to be kept for 20min at 200sccm, 20min at 300sccm, 20min at 400sccm and 20min at 500sccm, thereby forming TiN with gradient compositionxGraded layer of and TiNxControlling the thickness of the gradient layer to be 3-4 mu m;
for the coating system Ti bonding layer + TiNxIn the coating of the gradient layer + ZrN/Zr multilayer containing the nanostructure, the ZrN/Zr multilayer containing the nanostructure consists of a nano TaN/ZrN multilayer and a metal Zr layer, and the step (3) is to deposit TiN on the metal Ti bonding layer in the step (2) by utilizing a vacuum cathode arc deposition technologyxGradient layer, in particular by passing N2And N is substituted by2The flow control program is adjusted to be kept for 20min at 200sccm, 20min at 300sccm, 20min at 400sccm and 20min at 500sccm, thereby forming TiN with gradient compositionxGraded layer of and TiNxThe thickness of the gradient layer is controlled to be 3.5-4.5 μm.
6. The method for preparing the erosion-resistant corrosion-resistant self-cleaning coating for the compressor blade according to claim 5, wherein the erosion-resistant corrosion-resistant self-cleaning coating is prepared by the following steps:
for the coating system Ti bonding layer + TiNxFor the coating of the gradient layer + TiN/Ti multilayer containing the nano structure, wherein the TiN/Ti multilayer containing the nano structure consists of the nano TiAlN/TiN multilayer and the metal Ti layer, the step (4) is to reuse the vacuum cathode arc deposition technology, and the TiN in the step (3)xPreparing TiN/Ti multilayer containing nano structure on the gradient layer, specifically, firstly depositing nano TiAlN/TiN multilayer, namely, firstly turning off Ti cathode arc target power supply and turning on TiAl cathode arc target power supply, and then turning N on2The flow rate is adjusted to 200sccm, the current is adjusted to 120A,keeping the current for 3min, turning off a TiAl cathode arc target power supply, turning on a Ti cathode arc target power supply, regulating the current to 120A, keeping the current for 3min, repeating the operation for 4 times, controlling the total thickness of the obtained nano TiAlN/TiN multilayer to be 0.4-0.52 mu m and the thickness of the single-layer nano film to be 50-65 nm, and then depositing a metal Ti layer, namely turning off the N2And the deposition time is 10min, the thickness of the obtained metal Ti layer is controlled to be 0.7-0.8 μm, and the alternating deposition of the nano TiAlN/TiN multilayer and the metal Ti layer is repeated for 4 times, so that the total thickness of the finally obtained TiN/Ti multilayer containing the nano structure is controlled to be 4.4-5.3 μm;
for the coating system Ti bonding layer + TiNxIn the case of the gradient layer + ZrN/Zr multilayer coating containing the nanostructure, the ZrN/Zr multilayer containing the nanostructure consists of a nano TaN/ZrN multilayer and a metal Zr layer, and the step (4) is that TiN is obtained in the step (3) by utilizing a magnetron sputtering deposition technologyxPreparing a ZrN/Zr multilayer containing a nano structure on the gradient layer, specifically depositing the nano TaN/ZrN multilayer, namely turning off a Ti cathode arc target power supply and turning on a Ta magnetron sputtering target power supply, and turning on N2Adjusting the flow to 200sccm, adjusting the current to 2A, keeping the current for 15min, then closing the Ta magnetron sputtering target power supply, opening the Zr magnetron sputtering target power supply, adjusting the current to 2A, keeping the current for 15min, repeating the operation for 4 times, controlling the total thickness of the obtained nano TaN/ZrN multilayer to be 0.4-0.52 mu m, controlling the thickness of the single-layer nano film to be 50-65 nm, and then depositing a metal Zr layer, namely closing the N layer2And the deposition time is 45min, the thickness of the obtained metal Zr layer is controlled to be 0.7-0.8 mu m, and the alternating deposition of the nano TaN/ZrN multilayer and the metal Zr layer is repeated for 4 times, so that the total thickness of the finally obtained ZrN/Zr multilayer containing the nano structure is controlled to be 4.4-5.3 mu m.
7. The method for preparing the erosion-resistant corrosion-resistant self-cleaning coating for the compressor blade according to claim 1, wherein in the step (6): the fluorosilane aqueous solution is heptadecafluoroquinyltrimethoxysilane aqueous solution.
8. The method for preparing the erosion-resistant corrosion-resistant self-cleaning coating for the compressor blade according to claim 1, wherein in the step (7): and (4) putting the workpiece taken out in the step (6) into a drying box, keeping the temperature at 60 ℃ for 30min, and then raising the temperature to 100 ℃ for 2h to dry the workpiece.
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| CN114032505A (en) * | 2021-11-04 | 2022-02-11 | 烟台佳隆纳米产业有限公司 | Corrosion-resistant protective coating material and preparation method thereof |
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| CN114807846B (en) * | 2022-04-02 | 2023-11-24 | 中国科学院宁波材料技术与工程研究所 | Gradient multilayer protective coating for resisting erosion of solid particles and preparation method thereof |
| WO2023201766A1 (en) * | 2022-04-18 | 2023-10-26 | 东南大学 | Anti-corrosion and anti-fouling composite treatment method for surface of additive manufacturing metal part |
| CN115233158A (en) * | 2022-06-23 | 2022-10-25 | 安徽工业大学 | Composite coating for surface layer of internal combustion engine valve rod piece and preparation method thereof |
| CN115233158B (en) * | 2022-06-23 | 2023-12-26 | 安徽工业大学 | Composite coating for surface layer of valve rod of internal combustion engine and preparation method thereof |
| CN115584470A (en) * | 2022-10-24 | 2023-01-10 | 安徽工业大学 | Through Zr/Zr 2 Method for improving corrosion and abrasion resistance of titanium alloy surface by N/ZrN multilayer coating |
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