CN112030131A - Vacuum cavity air exhaust speed increasing method and vacuum air bag for vacuum coating production line - Google Patents
Vacuum cavity air exhaust speed increasing method and vacuum air bag for vacuum coating production line Download PDFInfo
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- CN112030131A CN112030131A CN202010849040.9A CN202010849040A CN112030131A CN 112030131 A CN112030131 A CN 112030131A CN 202010849040 A CN202010849040 A CN 202010849040A CN 112030131 A CN112030131 A CN 112030131A
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- vacuum
- cavity
- production line
- air bag
- coating production
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/54—Apparatus specially adapted for continuous coating
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Air Bags (AREA)
Abstract
The invention provides a vacuum cavity air-exhaust speed-increasing method for a vacuum coating production line, which can effectively shorten the air-exhaust time of a vacuum cavity, improve the working efficiency and reduce the processing cost. According to the technical scheme, the vacuum air bag is arranged, vacuum air is exhausted in advance, and then the vacuum air bag is placed into the inlet and outlet sheet cavity, so that the purposes of shortening the vacuum-pumping time and improving the working efficiency are achieved. Meanwhile, the invention also discloses a vacuum air bag for accelerating vacuum cavity air exhaust of the vacuum coating production line.
Description
Technical Field
The invention relates to the technical field of vacuum coating, in particular to a vacuum chamber air pumping speed-up method and a vacuum air bag for a vacuum coating production line.
Background
The vacuum vapor deposition technique is that under the premise of an initial vacuum state, process gas is introduced into a vacuum-state process chamber, then reaction conditions such as temperature, electric field, radiation, laser and the like are applied to the process gas and a coated substrate, so that the process gas and a substrate are subjected to physical and chemical reaction, and finally a film is formed on the substrate. The existing processing procedures are as follows: firstly, a substrate bearing disc for placing a substrate to be coated enters a coating process cavity through a guide rail, a roller or other transmission devices, and then the process cavity is subjected to vacuum pumping in a vacuum pump or other modes. Because the vacuum chamber has the requirement of transmitting the substrate, and a large number of components which are possibly interfered, such as a heater, a process gas inlet and the like, need to be installed inside the vacuum chamber, the vacuum chamber cannot be directly made into a special shape in most of the time, namely the same vacuum chamber is used no matter what coating requirements are met; the time required for pumping the vacuum cavity is too long in many times, so that the side length of the machining working hours is caused, and the cost of the whole machining process is increased.
Disclosure of Invention
In order to solve the problem that the cost of the whole processing procedure is high due to the fact that the required time for exhausting the vacuum cavity in the existing coating procedure is too long, the invention provides a vacuum cavity exhausting speed-up method for a vacuum coating production line, which can effectively shorten the exhausting time of the vacuum cavity, improve the working efficiency and reduce the processing cost. Meanwhile, the invention also discloses a vacuum air bag for accelerating vacuum cavity air exhaust of the vacuum coating production line.
The technical scheme of the invention is as follows: a vacuum cavity pumping speed increasing method for a vacuum coating production line comprises the following steps:
s1: conveying the substrate bearing disc on which the substrate to be coated is placed to the process generation cavity through the substrate inlet and outlet cavity;
s2: vacuum extraction is carried out on the sheet inlet and outlet cavity;
it is characterized by also comprising the following steps:
before step S2 is implemented, the following steps are implemented:
a 1: preparing a vacuum air bag for air suction speed increase required to be used at this time in advance according to the volume of the inlet and outlet sheet cavity;
a 2: the vacuum air bag is subjected to vacuum air suction in advance;
a 3: and putting the vacuum air bag with the vacuum state inside into the sheet inlet and outlet cavity.
It is further characterized in that:
according to the process requirement, the vacuum air bags are arranged on one side or both sides of the substrate bearing disc;
and according to the capacity requirement of the substrate to be coated, the size of the cavity needing to be pumped in the plate inlet and outlet cavity is adjusted by replacing the vacuum air bags with different volumes.
The utility model provides a vacuum coating production line vacuum chamber is bled and is accelerated and use vacuum airbag which characterized in that, it includes:
the vacuum bag is characterized in that the interior of the vacuum bag is a vacuum chamber, the shape of the air bag body is rectangular, and a pre-pumping port for connecting a vacuum pump is arranged on the side wall of the air bag body.
It is further characterized in that:
anti-skid blocks are distributed around the air bag body;
the air bag body is made of thin-wall metal;
the thickness range of the wall thickness of the airbag body is as follows: 2 mm-3 mm.
The vacuum chamber air exhaust speed-up method for the vacuum coating production line, provided by the invention, is characterized in that a vacuum air bag is subjected to vacuum air exhaust in advance and then is placed into the in-out sheet cavity, so that the necessary vacuum-pumping volume in the in-out sheet cavity can be effectively reduced, the vacuum-pumping speed of the in-out sheet cavity is improved, the vacuum-pumping time is shortened, the working efficiency is improved, the process cost is reduced, and the productivity of the whole production line is effectively improved; meanwhile, the process generation cavity with the reduced volume of the vacuum cavity body can be used, a vacuum pump with smaller power and air exhaust speed can be selected according to specific capacity requirements, the air exhaust time is adjusted, and the equipment investment cost of the vacuum coating production line is further reduced.
Drawings
FIG. 1 is a schematic top view of a panel inlet and outlet chamber with a vacuum bladder therein;
FIG. 2 is a schematic exploded view of the inlet and outlet panel chambers into which the vacuum bladder is inserted;
fig. 3 is a schematic sectional view of fig. 1 taken along the direction a-a.
Detailed Description
As shown in fig. 1-3, the structure of the feeding chamber is schematically illustrated by two vacuum air bags 2; the vacuum bladder 2 includes: the inside of the air bag body 2-2 is a vacuum cavity, the shape of the air bag body 2-2 is rectangular, and a pre-pumping port 2-1 for connecting a vacuum pump is arranged on the side wall of the air bag body 2-2; the periphery of the air bag body 2-2 is distributed with anti-skid blocks which comprise first anti-skid blocks 2-3 arranged on the upper side wall and the lower side wall, and after the vacuum air bag 2 is placed in the sheet inlet and outlet cavity 1, the first anti-skid blocks 2-3 can be placed to cause the vacuum air bag 2 to slide due to accidents; the second anti-skid block 2-4 is arranged on the side wall opposite to the pre-pumping port 2-1, and after the vacuum air bag 2 is placed in the sheet inlet and outlet cavity 1, the second anti-skid block 2-4 prevents the vacuum air bag 2 from rubbing with the sheet inlet and outlet cavity 1; the material of gasbag body 2-2 is the metal material, and inside sets up the cavity, and the wall thickness of gasbag body 2-2 takes mm as the unit, and in this embodiment, the thickness scope is: 2 mm-3 mm, so that the vacuum requirement can be realized, the effects of an electromagnetic field and a thermal field inside the inlet and outlet sheet cavity 1 cannot be influenced by an excessively thick metal material, and the process effect of the substrate to be coated cannot be changed due to the arrangement of the vacuum air bag 2. The feeding port 4 is an inlet for the substrate to be coated to enter the wafer inlet and outlet cavity 1.
The invention discloses a vacuum cavity pumping speed-up method for a vacuum coating production line, which comprises the following steps:
s1: putting the substrate bearing disc 3 for placing the substrate to be coated into the substrate inlet and outlet cavity 1, and transporting the substrate to the process generation cavity;
s2: vacuum extraction is performed on the in-out sheet cavity 1.
Before step S2 is implemented, the following steps are implemented:
a 1: preparing a vacuum air bag 2 for air extraction speed increase required to be used at this time according to the volume of the inlet and outlet sheet cavity 1 in advance;
a 2: the vacuum air bag 2 is vacuumized in advance;
a 3: putting a vacuum air bag 2 with the interior in a vacuum state into the sheet inlet and outlet cavity 1;
according to specific process requirements, the vacuum airbag 2 may be placed before step S1 or after step S1, and when the process is specifically implemented, the process may be adjusted according to specific steps of the processing procedure, so as to ensure that the efficiency of the whole process is not excessively changed due to the addition of the vacuum airbag 2.
In the technical scheme of the invention, the vacuum air bag 2 is arranged on one side or both sides of the substrate bearing disc 3 according to the process requirement; in the embodiment shown in fig. 1 to 3, 1 vacuum airbag 2 is disposed on each side of a substrate carrier 3; the volume of the vacuum cavity 5 in the sheet inlet and outlet cavity 1 is compressed very little, and during specific implementation, a vacuum pump with smaller power and air suction speed can be selected according to the specific capacity requirement of a process, so that the air suction time is adjusted, and the equipment investment cost of a vacuum coating production line is further reduced; and in the specific implementation, the size of the cavity needing to be pumped in the inlet and outlet sheet cavity 1 can be adjusted by replacing the vacuum air bag 2 with different volumes according to the capacity requirement of the substrate to be coated, so that the technical scheme of the invention is suitable for various vacuum coating processes, and the practicability of the technical scheme of the invention is ensured.
Claims (7)
1. A vacuum cavity pumping speed increasing method for a vacuum coating production line comprises the following steps:
s1: conveying the substrate bearing disc on which the substrate to be coated is placed to the process generation cavity through the substrate inlet and outlet cavity;
s2: vacuum extraction is carried out on the sheet inlet and outlet cavity;
it is characterized by also comprising the following steps:
before step S2 is implemented, the following steps are implemented:
a 1: preparing a vacuum air bag for air suction speed increase required to be used at this time in advance according to the volume of the inlet and outlet sheet cavity;
a 2: the vacuum air bag is subjected to vacuum air suction in advance;
a 3: and putting the vacuum air bag with the vacuum state inside into the sheet inlet and outlet cavity.
2. The vacuum chamber pumping speed increasing method for vacuum coating production line according to claim 1, characterized in that: the vacuum air bags are arranged on one side or two sides of the substrate bearing plate according to the process requirement.
3. The vacuum chamber pumping speed increasing method for vacuum coating production line according to claim 1, characterized in that: and according to the capacity requirement of the substrate to be coated, the size of the cavity needing to be pumped in the plate inlet and outlet cavity is adjusted by replacing the vacuum air bags with different volumes.
4. The utility model provides a vacuum coating production line vacuum chamber is bled and is accelerated and use vacuum airbag which characterized in that, it includes:
the vacuum bag is characterized in that the interior of the vacuum bag is a vacuum chamber, the shape of the air bag body is rectangular, and a pre-pumping port for connecting a vacuum pump is arranged on the side wall of the air bag body.
5. The vacuum airbag for accelerating vacuum chamber pumping of vacuum coating production line according to claim 4, wherein: the periphery of the air bag body is provided with anti-slip blocks.
6. The vacuum airbag for accelerating vacuum chamber pumping of vacuum coating production line according to claim 4, wherein: the material of gasbag body is thin wall metal material.
7. The vacuum airbag for accelerating vacuum chamber pumping of vacuum coating production line according to claim 4, wherein: the thickness range of the wall thickness of the airbag body is as follows: 2 mm-3 mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010849040.9A CN112030131A (en) | 2020-08-21 | 2020-08-21 | Vacuum cavity air exhaust speed increasing method and vacuum air bag for vacuum coating production line |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010849040.9A CN112030131A (en) | 2020-08-21 | 2020-08-21 | Vacuum cavity air exhaust speed increasing method and vacuum air bag for vacuum coating production line |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN112030131A true CN112030131A (en) | 2020-12-04 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010849040.9A Withdrawn CN112030131A (en) | 2020-08-21 | 2020-08-21 | Vacuum cavity air exhaust speed increasing method and vacuum air bag for vacuum coating production line |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN112030131A (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003068661A (en) * | 2001-08-30 | 2003-03-07 | Mitsubishi Heavy Ind Ltd | Vacuum processing apparatus |
| CN202181339U (en) * | 2011-06-20 | 2012-04-04 | 肇庆市前沿真空设备有限公司 | Vacuum chamber of film coating machine |
| CN102912297A (en) * | 2012-10-22 | 2013-02-06 | 东莞市汇成真空科技有限公司 | Horizontal roller vacuum coating machine |
| DE102013106735A1 (en) * | 2013-06-27 | 2014-12-31 | Von Ardenne Anlagentechnik Gmbh | Vacuum chamber of a continuous substrate treatment plant and method for its operation |
| CN210420150U (en) * | 2019-08-29 | 2020-04-28 | 中国建材国际工程集团有限公司 | Vacuum chamber filling device |
-
2020
- 2020-08-21 CN CN202010849040.9A patent/CN112030131A/en not_active Withdrawn
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003068661A (en) * | 2001-08-30 | 2003-03-07 | Mitsubishi Heavy Ind Ltd | Vacuum processing apparatus |
| CN202181339U (en) * | 2011-06-20 | 2012-04-04 | 肇庆市前沿真空设备有限公司 | Vacuum chamber of film coating machine |
| CN102912297A (en) * | 2012-10-22 | 2013-02-06 | 东莞市汇成真空科技有限公司 | Horizontal roller vacuum coating machine |
| DE102013106735A1 (en) * | 2013-06-27 | 2014-12-31 | Von Ardenne Anlagentechnik Gmbh | Vacuum chamber of a continuous substrate treatment plant and method for its operation |
| CN210420150U (en) * | 2019-08-29 | 2020-04-28 | 中国建材国际工程集团有限公司 | Vacuum chamber filling device |
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Application publication date: 20201204 |