CN112018198A - 一种太阳能电池衬底结构及其太阳能电池和制备方法 - Google Patents
一种太阳能电池衬底结构及其太阳能电池和制备方法 Download PDFInfo
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Abstract
本发明涉及一种太阳能电池衬底结构及其太阳能电池和制备方法,其主要改进之处为,在太阳能电池的衬底上设置多个散热通道,所述散热通道内填充有导热材料。本发明的太阳能电池衬底结构的散热性能好,可解决衬底材料散热性能较差,散热不良引起的光电转化效率下降,使用寿命降低等问题。
Description
技术领域
本发明属于太阳能电池领域,具体涉及散热性良好的太阳能电池衬底结构。
背景技术
太阳能电池衬底是大多数太阳能电池必需的结构,现有的太阳能电池衬底材料有很多种,如蓝宝石、硅片等。蓝宝石衬底是氮化物太阳能电池生产中常用的衬底,它有很多优点:首先,蓝宝石衬底的生产技术成熟、器件质量较好;其次,蓝宝石的稳定性很好,能够运用在高温生长过程中;最后,蓝宝石的机械强度高,易于处理和清洗。但是蓝宝石散热性能较差,而在电池使用时,会传导出大量的热量,尤其在面积较大的大功率器件上表现的更为突出,散热不良能引起光电转化效率下降,使用寿命降低等问题。为了解决上述问题,本专利提出了一种能够提高氮化物太阳能电池散热性的结构及制备方法,在不影响太阳能电池外延层生长的情况下,能够有效的将电池产生的热量通过集成在衬底上的特殊导热层散热,提高电池的散热效果。
发明内容
针对现有技术中的太阳能电池衬底结构散热性差的问题,本发明提供一种散热性良好的太阳能电池衬底结构。
本发明所述的太阳能电池衬底在在太阳能电池的衬底上设置多个散热通道,所述散热通道内填充有导热材料。
优选的,所述散热通道以非贯通的方式设置,其开口设置于所述太阳能电池衬底结构生长电池的表面。设置于这一表面,有利于太阳能电池与散热材料的密切接触,有利于热量进入散热通道并及时散出。
优选的,所述导热材料在所述太阳能电池衬底结构生长电池的表面形成凸起;若想在太阳能电池衬底的表面理想地生长太阳能电池,通常需要在衬底的表面进行刻蚀,使其形成凸起等结构,导热材料在生长电池的表面直接形成凸起,可在省去生长电池的操作的情况下直接生长电池。
进一步优选的,所述凸起为圆锥型或半球型。
优选的,所述散热通道的中轴线与所述太阳能电池衬底生长电池的表面垂直。所述散热通道的中轴线与所述太阳能电池衬底的上下表面垂直,通道的长度最短,可将衬底上方的太阳能电池外延结构产生的热量及时地散发出去,实现理想地散热。
优选的,所述散热通道为圆柱状、棱柱状、圆台状或棱台状。
优选的,所述通道在所述衬底上均匀分布。
优选的,所述散热通道在所述太阳能电池衬底上的分布密度为1×107~1×1015个/dm2。相邻通道的间距会影响散热效果,间距越小,散热越好,但是间距太小,会影响电池层晶体质量,在上述范围内分布,既不会影响电池晶体的质量也不会影响电池的导热效果。
优选的,所述散热通道为直径20~100nm的圆柱状。圆柱状的散热通道易于制备,而且上述直径的散热通道既可起到理想的散热作用,还不会对太阳能电池衬底的性能产生影响。
优选的,所述散热通道为直径20~100nm的圆柱状。
优选的,所述导热材料为石墨烯或碳纳米管。上述两种材料的导热性能优异,而且具有一定的导电性,不会对衬底的导电性产生影响。
优选的,所述太阳能电池衬底的材料为蓝宝石。
本发明的另一目的是保护含有本发明所述太阳能电池衬底的太阳能电池的制备方法,包括如下步骤:
在所述太阳能电池衬底结构设有散热通道开口的表面生长氮化物太阳能电池外延结构;
对生长电池的表面的对应面的的太阳能电池衬底进行减薄处理;
优选的,减薄处理至所述散热通道贯通所述太阳能电池衬底。
散热通道贯通太阳能电池衬底,可有效地改善散热效果。
本发明的另一目的是保护包括本发明所述方法制备得到的太能能电池。
优选的,所述氮化物太阳能电池的外延结构具体为,从所述太阳能电池设置散热通道的开口的表面向上,依次包括层叠设置的GaN缓冲层、n型GaN掺杂层、GaN吸收层、p型GaN掺杂层和p型GaN欧姆接触层。
本发明所述的太阳能电池衬底结构由如下方法制备得到:
1)在太阳能电池衬底的上表面用掩膜、显影、刻蚀等工艺,制备散热通道结构;
3)在孔的底部添加一层纳米级催化剂,催化剂为铁、钴、镍过度金属催化剂,厚度1-10nm;
采用CVD方法,孔内生长石墨烯或阵列碳纳米管,石墨烯或阵列碳纳米管高度略高于孔的深度,带有pss图形的散热结构制备完成,可通过掩膜、显影、刻蚀等工艺,把石墨烯或阵列碳纳米管材料高出衬底的部分刻蚀成圆锥型或半球型等,改为得到带有石墨烯或阵列碳纳米管图形化的太阳能电池衬底。
本发明具有如下有益效果:
1)本发明的太阳能电池衬底结构的散热性能好,可改善一些衬底材料散热性能较差,散热不良引起的光电转化效率下降,使用寿命降低等问题。
2)本发明进一步优化了其实填充物的结构,即可表面形成凸起,可在不影响太阳能电池外延层生长的情况下能够有效的将电池产生的热量通过集成在衬底上的散热通道散热,提高电池的散热效果。
附图说明
图1为以阵列碳纳米管/石墨烯为散热通道氮化物蓝宝石衬底结构的截面图;
图2为带有散热通道的电池结构截面图。
图中:1、为蓝宝石衬底;2、为散热通道;3、为电池层。
具体实施方式
以下实施例用于说明本发明,但不用来限制本发明的范围。
实施例1
本实施例涉及一种蓝宝石衬底结构,其结构(如图1)为,在蓝宝石衬底1的上表面嵌入式地设置多个散热通道2,所述散热通道内填充有导热材料石墨烯或阵列碳纳米管,所述散热通道为与蓝宝石的上下表面垂直的圆柱状,所述圆柱的直径为30nm,所述导热材料在所述蓝宝石衬底结构的上表面形成凸起;所述凸起形成圆锥型或半球型,所述凸起的高度为2μm。
实施例2
本实施例涉及一种包括实施例1所述蓝宝石衬底结构的太阳能电池的制备方法:
1)使用长晶炉生长一定尺寸且高品质的单晶蓝宝石晶棒,后经过切片、研磨、倒角、抛光、清洗等工艺制程,得到600-um平整度较好的单晶蓝宝石衬底;
2)在衬底的正面上涂一层光刻胶(光照后发生交联),在光刻胶的上方放置掩膜版,掩膜版上带有预设的图案,黑色不透光,其他区域透光;光通过掩膜版均匀照射光刻胶,黑色区域以外的光刻胶发生交联固化,黑色区域的光刻胶不发生变化,采用与光刻胶反应的溶液将未交联的光刻胶清洗掉;
3)使用等离子体刻蚀,在未交联的部分得到图形化的圆柱型孔状结构,圆孔直径50~100nm,相邻圆孔的圆心距离3-15um;
4)在孔内沉积一层纳米级催化剂,催化剂为铁、钴、镍过度金属催化剂,厚度1-10nm;
5)采用CVD方法,以氢氩混合气为载气,甲烷为碳源,1050℃进行石墨烯生长,生长时间30-90s,石墨烯片径尺寸1-5um左右,石墨烯柱厚度为100-200um,略高于衬底表面,高于衬底1-2um;
6)使用MOCVD设备,在衬底正面生长外延电池层3,外延电池层包括GaN缓冲层、n型GaN掺杂层、GaN吸收层、p型GaN掺杂层、p型GaN欧姆接触层;
7)机械减薄衬底的背面,露出石墨烯或阵列碳纳米管结构,减薄后衬底厚度大概为100-200um,在衬底背面蒸镀Cu等金属或者生长石墨烯等材料,作为背电极。
本发明制备得到的电池的结构示意图如图2所示。
虽然,上文中已经用一般性说明、具体实施方式及试验,对本发明作了详尽的描述,但在本发明基础上,可以对之作一些修改或改进,这对本领域技术人员而言是显而易见的。因此,在不偏离本发明精神的基础上所做的这些修改或改进,均属于本发明要求保护的范围。
Claims (10)
1.一种太阳能电池衬底结构,其特征在于,在太阳能电池衬底上设置多个散热通道,所述散热通道内填充有导热材料。
2.根据权利要求1所述的太阳能电池衬底结构,其特征在于,所述散热通道以非贯通的方式设置,其开口设置于所述太阳能电池衬底结构生长电池的表面。
3.根据权利要求2所述的太阳能电池衬底结构,其特征在于,填充所述导热材料至在所述太阳能电池衬底结构生长电池的表面形成凸起。
4.根据权利要求1所述的太阳能电池衬底结构,其特征在于,所述散热通道的中轴线与所述太阳能电池衬底结构生长电池的表面垂直。
5.根据权利要求1所述的太阳能电池衬底结构,其特征在于,所述散热通道为圆柱状、棱柱状、圆台状或棱台状。
6.根据权利要求1所述的太阳能电池衬底结构,其特征在于,所述导热材料为石墨烯或碳纳米管。
7.根据权利要求1所述的太阳能电池衬底结构,其特征在于,所述太阳能电池衬底的材料为蓝宝石。
8.根据权利要求3所述的太阳能电池衬底结构,其特征在于,所述散热通道在所述太阳能电池衬底上的分布密度为1×107~1×1015个/dm2;所述散热通道为直径20~100nm的圆柱状;所述凸起的高度为1~2μm。
9.一种包括权利要求1~8任一项所述太阳能电池衬底结构的太阳能电池的制备方法,其特征在于,包括如下步骤:
在所述太阳能电池衬底结构设有散热通道开口的表面生长氮化物太阳能电池外延结构;
对与生长电池的表面的相对面的的太阳能电池衬底进行减薄处理;
优选的,减薄处理至所述散热通道贯通所述太阳能电池衬底。
10.权利要求9所述的方法制备得到的太阳能电池,优选的,所述太阳能电池为氮化物太阳能,其外延结构具体为,从所述太阳能电池设置散热通道的开口的表面向上,依次包括层叠设置的GaN缓冲层、n型GaN掺杂层、GaN吸收层、p型GaN掺杂层和p型GaN欧姆接触层。
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