CN111986831B - Totally enclosed wafer type optical trap device for repeatedly capturing microspheres by evanescent waves - Google Patents
Totally enclosed wafer type optical trap device for repeatedly capturing microspheres by evanescent waves Download PDFInfo
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- CN111986831B CN111986831B CN202010824711.6A CN202010824711A CN111986831B CN 111986831 B CN111986831 B CN 111986831B CN 202010824711 A CN202010824711 A CN 202010824711A CN 111986831 B CN111986831 B CN 111986831B
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- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
- G21K1/003—Manipulation of charged particles by using radiation pressure, e.g. optical levitation
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- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
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- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
- G21K1/006—Manipulation of neutral particles by using radiation pressure, e.g. optical levitation
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Abstract
The invention discloses a totally enclosed wafer type evanescent wave device for repeatedly capturing microspheres. An upper cover glass is arranged on the glass substrate, and a cuboid capillary micro-cavity is arranged in the center of the glass substrate; a layer of plate glass with a higher refractive index and a layer of thin substrate with a lower refractive index are placed at the lower side in the cuboid capillary micro-cavity, and the plate glass and the thin substrate are tightly attached; the microcavity limits the motion range and the center of the optical trap of the particles, so that the particles can be captured conveniently, effectively, continuously, repeatedly and quickly, simultaneously, two beams of reversely transmitted laser are used for symmetrically irradiating the flat-bottomed glass to generate total reflection, coherent evanescent field standing waves are obtained, the heat effect of the total reflection evanescent field is enhanced, and the microspheres can be captured repeatedly. The invention can realize repeatable and rapid capture of particles, establishes evanescent field standing waves by utilizing double-beam total reflection, enhances the total-reflection evanescent field heat effect, improves the efficiency of repeatable capture of particles, and isolates external pollution and influence.
Description
Technical Field
The invention relates to an on-chip integrated device in the field of micro-nano particle optical trap suspension, in particular to a totally-enclosed disk type optical trap device for repeatedly capturing microspheres by evanescent waves.
Background
In the optical levitation field, particles to be captured usually adhere to the surface of the storage substrate, and therefore in air and vacuum environments, the particles need to be separated from the surface of the substrate and enter the optical field to be captured. Three types of existing throwing schemes exist, namely, the first two types of throwing schemes are that microspheres are separated from the surface of a carrier in a mode of mechanically vibrating piezoelectric ceramics at high frequency and the microspheres are thrown by ultrasonic atomization. The two schemes have the defects that a large amount of microspheres are thrown in a free space, the microspheres cannot be controlled to accurately fall into an optical trap capturing area, the efficiency of capturing the microspheres is low, the microspheres need to be continuously supplemented, a large amount of microspheres are wasted, and redundant microspheres can pollute the inside of a vacuum cavity. In recent years, it has been proposed to heat the substrate with a pulsed laser to release the microspheres from the surface. However, the energy of the pulse laser is high, and the pulse width is short, so that the microspheres can absorb a large amount of heat in a short time to expand, and the microspheres are easily damaged. Therefore, a repeatable, high-accuracy and nondestructive supporting method is urgently needed in the field of optical suspension measurement.
The optical trap system based on the traditional free space optical path has larger volume, complex space optical path system and poorer stability, and the sensing particles serving as the core sensitive units only occupy a micron-sized area, so a large amount of redundant space still exists in the cavity. The existing method for repeatedly capturing microspheres is to repeatedly suspend the target microspheres by using a pulsed laser. However, the target microspheres also absorb extremely high heat during the process of irradiating the substrate with the pulsed light, so that the structures of the target microspheres are extremely easy to damage.
Disclosure of Invention
In order to solve the problems in the background technology, the invention provides a totally enclosed wafer type optical trap device for repeatedly capturing microspheres by evanescent waves. The miniaturized optical trap suspension device can be repeated, lossless and high in stability.
In order to achieve the purpose, the technical scheme adopted by the invention is as follows:
the invention comprises a glass substrate and an upper cover glass, wherein the upper cover glass is arranged on the glass substrate, and a cuboid capillary micro-cavity is arranged at the center of the glass substrate; a layer of plate glass with a higher refractive index and a layer of thin substrate with a lower refractive index are placed at the lower side in the cuboid capillary micro-cavity, the plate glass and the thin substrate are tightly attached, a third optical fiber fixing port and a fourth optical fiber fixing port which are downward inclined are arranged at two sides of the bottom of a glass substrate close to the plate glass, the third optical fiber fixing port and the fourth optical fiber fixing port are not parallel and are arranged at an included angle, and the third optical fiber fixing port and the fourth optical fiber fixing port are both communicated with the cuboid capillary micro-cavity and are covered by the plate glass and the thin substrate; and a third optical fiber fixing port and a fourth optical fiber fixing port are formed in two side walls of the glass substrate on the two symmetrical sides of the upper side of the cuboid capillary micro-cavity, the third optical fiber fixing port and the fourth optical fiber fixing port are coaxially arranged, and the third optical fiber fixing port and the fourth optical fiber fixing port are both communicated with the cuboid capillary micro-cavity.
One or more microspheres are placed in the cuboid capillary micro-cavity and are attached to the thin substrate.
The first optical fiber and the second optical fiber are respectively connected to the first optical fiber fixing port and the second optical fiber fixing port, two beams of light beams which are coaxial are incident from the first optical fiber and the second optical fiber, and are coaxially incident into the cuboid capillary micro-cavity through the first optical fiber fixing port and the second optical fiber fixing port to be aligned to form a light trap.
The third optical fiber and the fourth optical fiber are respectively connected to a third optical fiber fixing port and a fourth optical fiber fixing port, a beam is respectively incident from the third optical fiber and the fourth optical fiber, and is incident to the junction of the flat glass and the thin substrate through the third optical fiber fixing port and the fourth optical fiber fixing port to be totally reflected, evanescent waves are generated and transmitted to the thin substrate, and then the evanescent waves are respectively emitted from the fourth optical fiber fixing port and the third optical fiber fixing port; the microspheres tightly attached to the thin substrate are regulated and controlled to be separated from the adhesion of the thin substrate through the light beam irradiation of the third optical fiber and the fourth optical fiber and move to the light trap of the cuboid capillary micro-cavity.
The upper cover glass covers the cuboid capillary micro-cavity, the first optical fiber fixing port, the second optical fiber fixing port, the third optical fiber fixing port and the fourth optical fiber fixing port, and the glass substrate and the upper cover glass are attached to realize sealing of the cuboid capillary micro-cavity.
Marking lines for indicating the central positions are engraved on the glass substrate and the upper cover glass, and the marking lines for indicating the central positions of the glass substrate and the upper cover glass are adjusted to be overlapped and sealed by UV glue.
The glass substrate is made of silicon or silicon dioxide.
The glass substrate and the upper cover glass are both of a wafer type structure.
The cuboid capillary micro-cavity adopts a silicon dioxide capillary with the diameter of 6-9 microns, and the aperture size is larger than the diameter of the microsphere.
The microspheres are made of metal materials, organic materials or dielectric materials.
The thickness of the thin substrate is not more than the penetration depth of the evanescent wave.
The micro-cavity is utilized to limit the movement range and the center of the optical trap of the particles, the particles can be conveniently, effectively, repeatedly and rapidly captured, meanwhile, two beams of reversely transmitted laser symmetrically irradiate the flat-bottomed glass to generate total reflection, coherent evanescent field standing waves are obtained, the heat effect of the total reflection evanescent field is enhanced, and the efficiency of repeatedly capturing the particles is greatly improved.
The invention has the beneficial effects that:
the invention utilizes the disc type design to limit the movement range and the center of the light trap of the particles, and the two beams of reversely transmitted laser symmetrically irradiate the flat-bottom glass to generate total reflection, thereby obtaining coherent evanescent field standing waves, enhancing the evanescent field effect of the total reflection, avoiding the influence of radiation pressure along the interface direction on the capture, realizing more stable capture and improving the efficiency of capturing the particles.
Meanwhile, the totally-enclosed wafer type structural design isolates external pollution and influence, and the optical trap system based on the optical fiber light path has compact structure and lower cost.
Drawings
Fig. 1 is a schematic structural diagram of an optical trapping apparatus according to the present invention.
FIG. 2 is a schematic view of the structure of a wafer-type glass substrate and an upper cover glass of the apparatus of the present invention.
Fig. 3 shows the formation of the trap trapping region when the first optical fiber and the second optical fiber are simultaneously incident in opposite directions.
FIG. 4 is a schematic diagram showing the microsphere from position A to position B after laser light from the third optical fiber and the fourth optical fiber is incident.
FIG. 5 is a schematic diagram of a structure for achieving stable suspension after microspheres enter a trap region of an optical trap.
In the figure: the optical fiber fixing device comprises a glass substrate 1, an upper cover glass 2, four optical fiber fixing ports 3.1, 3.2, 7.1 and 7.2, a cuboid capillary micro-cavity 4, a thin substrate 5, plate glass 6 and microspheres 8.
Detailed Description
The technical solution of the present invention will be further described with reference to the accompanying drawings and embodiments
As shown in fig. 2, the optical trap sensing substrate comprises a glass substrate 1 and an upper cover glass 2, wherein the upper cover glass 2 is arranged on the glass substrate 1, and a rectangular capillary micro-cavity 4 is formed in the center of the glass substrate 1; a glass substrate 1 on the upper side of the cuboid capillary micro-cavity 4 is provided with a first optical fiber fixing port 3.1 and a second optical fiber fixing port 3.2, and a glass substrate 1 on the lower side of the cuboid capillary micro-cavity 4 is provided with a third optical fiber fixing port 7.1 and a fourth optical fiber fixing port 7.2;
as shown in fig. 2, a layer of plate glass 6 with a higher refractive index and a layer of thin substrate 5 with a lower refractive index are placed at the lower side in the rectangular capillary micro-cavity 4, the thin substrate 5 is closer to the center of the rectangular capillary micro-cavity 4 than the plate glass 6, the plate glass 6 is tightly attached to the thin substrate 5, the plate glass 6 is tightly attached to the inner side surface of the rectangular capillary micro-cavity 4, a third optical fiber fixing port 7.1 and a fourth optical fiber fixing port 7.2 which are inclined downwards are arranged at two sides of the bottom of the glass substrate 1 which is close to the plate glass 6, the third optical fiber fixing port 7.1 and the fourth optical fiber fixing port 7.2 are not parallel and form an included angle, and the third optical fiber fixing port 7.1 and the fourth optical fiber fixing port 7.2 are both communicated to the rectangular capillary micro-cavity 4 and covered by the plate glass 6 and the thin substrate 5; the two side walls of the glass substrate 1 on the two symmetrical sides of the upper side of the cuboid capillary micro-cavity 4 are provided with a first optical fiber fixing port 3.1 and a second optical fiber fixing port 3.2, the first optical fiber fixing port 3.1 and the second optical fiber fixing port 3.2 are coaxially arranged, and the first optical fiber fixing port 3.1 and the second optical fiber fixing port 3.2 are communicated with the cuboid capillary micro-cavity 4 and are not covered by the plate glass 6 and the thin substrate 5.
In specific implementation, one or more microspheres 8 are placed in the cuboid capillary micro-cavity 4, and the microspheres 8 are attached to the thin substrate 5 or are positioned at the central light trap position of the cuboid capillary micro-cavity 4 between the first optical fiber fixing port 3.1 and the second optical fiber fixing port 3.2. One or more microspheres are adhesively secured to the thin substrate 5.
As shown in fig. 5, the first optical fiber and the second optical fiber are respectively connected to the first optical fiber fixing port 3.1 and the second optical fiber fixing port 3.2, and two coaxial beams of light are incident from the first optical fiber and the second optical fiber, and are coaxially incident into the rectangular parallelepiped capillary micro-cavity 4 through the first optical fiber fixing port 3.1 and the second optical fiber fixing port 3.2 to be aligned to form a light trap. The optical trap captures the microspheres close to the optical trap, and if the microspheres are far away from the optical trap, the optical trap cannot capture the microspheres, and the microspheres are captured close to the optical trap by controlling the incident light beams of the third optical fiber/the fourth optical fiber.
First optic fibre, second optic fibre all with optic fibre fixed port butt fusion fixed, seal with UV glues.
The end of the first optical fiber and the second optical fiber, which forms the double-beam light trap, is a self-focusing optical fiber, the captured light beams can be firstly dispersed and then converged, the focal point or beam waist position of the captured light has a certain distance with the end face of the optical fiber, and the first optical fiber and the second optical fiber are aligned and then distributed to emit the first captured light beam and the second captured light beam, so that the double-beam light trap is formed. The self-focusing optical fiber mainly comprises three parts, namely a single-mode optical fiber, a coreless optical fiber and a gradient refractive index optical fiber.
The double-beam optical trap is close to the microsphere, and the lower edge of the optical trap area is a few micrometers away from the surface of the microsphere tightly attached to the thin substrate 5.
The third optical fiber and the fourth optical fiber are respectively connected to a third optical fiber fixing port 7.1 and a fourth optical fiber fixing port 7.2, a beam is respectively incident from the third optical fiber and the fourth optical fiber, is incident to the junction of the plate glass 6 and the thin substrate 5 through the first optical fiber fixing port 3.1 and the second optical fiber fixing port 3.2 to be approximately totally reflected, only the beam generating evanescent waves is irradiated to the thin substrate 5, and then is respectively emergent from the second optical fiber fixing port 3.2 and the first optical fiber fixing port 3.1; the light beam irradiation of the third optical fiber and the fourth optical fiber is used for adjusting and controlling the microspheres 8 tightly attached to the thin substrate 5 to be separated from the adhesion of the thin substrate 5 and move to the light trap of the cuboid capillary micro-cavity 4.
The flat glass 6 and the thin substrate 5 are closely attached and arranged, the refractive index difference is achieved, the refractive index of the flat glass 6 is higher than that of the thin substrate 5, the incident angles of light beams of the third optical fiber and the fourth optical fiber are larger than a critical angle, the motion range of particles and the capture center of a light trap are limited by adopting a capillary micro-cavity structure, meanwhile, the bottom surface of the flat-bottom glass is symmetrically irradiated by two beams of linearly polarized light transmitted in opposite directions to generate total reflection, the light beams of coherent evanescent field standing waves are irradiated onto the thin substrate 5, and the evanescent field effect of the total reflection is enhanced. As shown in fig. 3, the thin substrate 5 placed on the flat-bottom glass closely absorbs the light beam of the evanescent wave and expands due to heating, and generates an upward force to bounce the microspheres 8 on the surface of the thin substrate 5, as shown in fig. 4, so that the microspheres 8 get an initial acceleration, rise to the trapping center of the optical trap, and are stably trapped and suspended by the optical trap.
After the microsphere 8 stable suspension experiment is finished, the two beams of light beams incident from the first optical fiber and the second optical fiber are closed, the microsphere 8 is separated from the light trap and returns to the surface of the thin substrate 5, and the thin substrate 5 waits for the arrival control of the next evanescent field standing wave, so that the microsphere 8 is continuously and stably captured and suspended in the light trap and attached to the thin substrate 5, and the optical suspension experiment of the microsphere 8 is finished.
The third optical fiber and the fourth optical fiber are welded and fixed through the optical fiber fixing port and sealed by UV glue. The third optical fiber and the fourth optical fiber are two single-mode optical fibers, the frequency of light waves input by the two optical fibers is the same, the transmission directions are opposite, the influence of radiation pressure on capturing along the interface direction is avoided, the external influence is isolated, more stable capturing is realized, meanwhile, the energy density is larger, and the action range of an evanescent field is expanded on the other hand.
Two beams of reversely transmitted laser symmetrically irradiate the flat glass and the thin substrate 5 to obtain coherent double beams, so that the evanescent field effect of total reflection is enhanced.
The upper cover glass 2 covers the cuboid capillary micro-cavity 4, the first optical fiber fixing port 3.1, the second optical fiber fixing port 3.2, the third optical fiber fixing port 7.1 and the fourth optical fiber fixing port 7.2, and the glass substrate 1 is attached to the upper cover glass 2 to seal the cuboid capillary micro-cavity 4, so that the cuboid capillary micro-cavity 4 is only communicated with the four optical fiber fixing ports.
The method is implemented by removing the space occupied by the flat glass and the thin substrate in the cuboid capillary micro-cavity, and the constraint of the microsphere range is difficult if the residual aperture space is larger, and the assembly difficulty is increased if the residual aperture space is smaller. Generally, if the diameter of the microspheres is 1 μm, three to five times the diameter of the microspheres is most preferable.
The cuboid capillary micro-cavity adopts a silicon dioxide capillary with the diameter of 6-9 microns, and the aperture size is larger than the diameter of the microsphere. The cleanness of the inner surface of the capillary tube reaches that the water content in the inner cavity of the tube per square meter is not more than 0.1g, and the internal oil content per square meter is not more than 0.1 g. The capillary tube may be evacuated or filled with a gas. The four optical fiber fixing ports are spliced with the capillary in a welding mode, and sealed by UV glue to form a closed cuboid micro-cavity structure.
In specific implementation, marking lines for indicating the central positions are engraved on the glass substrate 1 and the upper cover glass 2, and the marking lines for indicating the central positions of the glass substrate and the upper cover glass are adjusted to be overlapped and sealed by UV glue.
The glass substrate 1 and the upper cover glass 2 are both of a wafer type structure. The glass substrate 1 has a radius of 5mm and a height of 2mm, and is made of silicon or silicon dioxide.
The microspheres 8 are made of metal materials, organic materials or dielectric materials, and are captured by a common optical trap, and the size of the particles is nano-sized to particle-sized.
The thin substrate 5 has a thickness no greater than the evanescent wave penetration depth. The thin substrate 5 is made of a material with a high expansion coefficient and a low refractive index, the surface of the thin substrate is clean, impurities except microspheres are avoided, and the thin substrate can be obtained by adopting gas phase hierarchy or magnetron sputtering.
The flat glass 6 is made of titanium dioxide and barium oxide materials, and the refractive index is not less than 2.1.
The plate glass is a glass having a high refractive index. The glass is an optical uniform medium, and the laser emitted by the third optical fiber and the laser emitted by the fourth optical fiber can uniformly pass through the glass.
The specific application example of the invention is as follows:
the method comprises the following steps: the radius of the wafer type glass substrate is 5mm, the height is 2mm, and silicon material is selected. The radius of the upper cover glass is 5mm, and the height is 0.1-0.3 mm. And (3) putting the glass substrate and the upper cover glass into a container filled with clear water for cleaning, and drying by using a compressed air gun after cleaning.
Step two: the cuboid capillary micro-cavity is embedded in the glass substrate. The capillary microcavities store one or more polystyrene microspheres. The diameter of the pore diameter of the silica capillary tube is 6-9 microns, and the pore diameter is larger than the diameter of the microsphere. The cleanliness of the inner surface of the capillary in the capillary tube reaches that the water content in the tube cavity is not more than 0.1g per square meter, and the internal oil content is not more than 0.1g per square meter. The capillary tube is filled with air.
Step three: the upper end of the micro-cavity is provided with two optical fiber fixing ports for respectively placing a first optical fiber and a second optical fiber. The first optical fiber and the second optical fiber are fixed by fusion with the optical fiber fixing port and sealed by UV glue. The first optical fiber and the second optical fiber both have one end which is a self-focusing optical fiber.
The first optical fiber and the second optical fiber respectively emit a first trapping light beam and a second trapping light beam after being aligned to form a double-beam light trap. The optical trap trapping region is obtained by oppositely transmitting two beams of 980 nm lasers. The lower edge of the optical trap trapping region may be several microns from the upper surface of the microsphere.
Step four: a layer of plate glass with high refractive index is placed in the cuboid capillary micro-cavity for containing the particles, and a layer of thin substrate with low refractive index is placed on the plate glass. One microsphere 8 is placed on a thin substrate.
At this point, as shown in FIG. 3, the microsphere 8 is farther from the optical trap and is not captured by the optical trap.
Step six: and the third optical fiber and the fourth optical fiber are welded and fixed through the optical fiber fixing ports and sealed by UV glue. And after the four optical fibers are spliced with the cuboid capillary micro-cavity in a welding way, the four optical fibers are sealed again by using UV glue to form a closed cuboid capillary micro-cavity structure. The third optical fiber and the fourth optical fiber are two Gaussian single-mode optical fibers, the frequency of light input by the two optical fibers is the same, the light is single-mode linearly polarized laser with the wavelength of 1064 nanometers, and the transmission directions are opposite.
Step seven: when the first capture beam and the second capture beam are irradiated, as shown in fig. 4, two beams of linearly polarized light which are transmitted in opposite directions enter the third optical fiber and the fourth optical fiber to symmetrically irradiate the flat glass, the refractive index of the flat glass is larger than that of the thin substrate, total reflection occurs at the junction of the flat glass and the thin substrate, the thin substrate absorbs evanescent waves, thermal expansion is generated, and acceleration is generated on microspheres on the surface of the thin substrate. The microspheres are separated from the surface by overcoming the adhesion force of the surface of the thin substrate, rise to the trapping area of the optical trap, and close two beams of linearly polarized light transmitted in opposite directions, so that the microspheres are stably suspended, and the result is shown in fig. 5.
Step eight: and (4) after the microspheres are separated from the optical trap capturing area, the microspheres fall back to the substrate, and the third step to the sixth step are repeated, so that the repeated capturing of the microspheres is realized under the condition that the microspheres are not replaced.
As can be seen from the above implementation, the advantages of the present invention are three points: the first is to use micro-cavity to realize the repeat of micro-sphere without damage, the second is to use coherent evanescent field standing wave to enhance the heat effect of total reflection evanescent field. And thirdly, the optical trap system based on the optical fiber light path has the advantages of compact structure, lower cost, high microsphere suspension efficiency and great development potential in the aspects of miniaturization and commercialization.
The invention provides a detailed introduction of a totally-enclosed wafer type optical trap device for repeatedly capturing microspheres by evanescent waves. The foregoing detailed description is intended to illustrate and not limit the invention, which is intended to be within the spirit and scope of the appended claims, and any changes and modifications that fall within the true spirit and scope of the invention are intended to be covered by the following claims.
Claims (10)
1. A totally enclosed wafer type optical trap device for repeatedly capturing microspheres by evanescent waves is characterized in that:
the device comprises a glass substrate (1) and an upper cover glass (2), wherein the upper cover glass (2) is arranged on the glass substrate (1), and a cuboid capillary micro-cavity (4) is formed in the center of the glass substrate (1); a layer of plate glass (6) with a higher refractive index and a thin substrate (5) with a lower refractive index are placed at the lower side of the cuboid capillary micro-cavity (4), the plate glass (6) and the thin substrate (5) are tightly attached, a third optical fiber fixing port (7.1) and a fourth optical fiber fixing port (7.2) which are downward inclined are arranged at two sides of the bottom of the glass substrate (1) close to the plate glass (6), the third optical fiber fixing port (7.1) and the fourth optical fiber fixing port (7.2) are not parallel to each other and form an included angle, and the third optical fiber fixing port (7.1) and the fourth optical fiber fixing port (7.2) are both communicated with the cuboid capillary micro-cavity (4) and are covered by the plate glass (6) and the thin substrate (5); the two side walls of the glass substrate (1) at the two symmetrical sides of the upper side of the cuboid capillary micro-cavity (4) are provided with a first optical fiber fixing port (3.1) and a second optical fiber fixing port (3.2), the first optical fiber fixing port (3.1) and the second optical fiber fixing port (3.2) are coaxially arranged, and the first optical fiber fixing port (3.1) and the second optical fiber fixing port (3.2) are both communicated with the cuboid capillary micro-cavity (4).
2. The optical trapping device for repeatedly trapping microspheres by using the totally enclosed wafer-type evanescent wave as claimed in claim 1, wherein: one or more microspheres (8) are placed in the cuboid capillary micro-cavity (4), and the microspheres (8) are attached to the thin substrate (5).
3. The optical trapping device for repeatedly trapping microspheres by using the totally enclosed wafer-type evanescent wave as claimed in claim 1, wherein: the first optical fiber and the second optical fiber are respectively connected to the first optical fiber fixing port (3.1) and the second optical fiber fixing port (3.2), two coaxial light beams are incident from the first optical fiber and the second optical fiber, and are coaxially incident into the cuboid capillary micro-cavity (4) through the first optical fiber fixing port (3.1) and the second optical fiber fixing port (3.2) to be aligned to form a light trap.
4. The optical trapping device for repeatedly trapping microspheres by using the totally enclosed wafer-type evanescent wave as claimed in claim 1, wherein: the third optical fiber and the fourth optical fiber are respectively connected to a third optical fiber fixing port (7.1) and a fourth optical fiber fixing port (7.2), a beam is respectively incident from the third optical fiber and the fourth optical fiber, and is incident to the junction of the plate glass (6) and the thin substrate (5) through the third optical fiber fixing port (7.1) and the fourth optical fiber fixing port (7.2) to be totally reflected, evanescent waves are generated to be transmitted to the thin substrate (5), and then the evanescent waves are respectively emitted from the fourth optical fiber fixing port (7.2) and the third optical fiber fixing port (7.1); the microspheres (8) tightly attached to the thin substrate (5) are adjusted and controlled to be separated from the adhesion of the thin substrate (5) through the light beam irradiation of the third optical fiber and the fourth optical fiber and move to the light trap of the cuboid capillary micro-cavity (4).
5. The optical trapping device for repeatedly trapping microspheres by using the totally enclosed wafer-type evanescent wave as claimed in claim 1, wherein: the upper cover glass (2) covers the cuboid capillary micro-cavity (4), the first optical fiber fixing port (3.1), the second optical fiber fixing port (3.2), the third optical fiber fixing port (7.1) and the fourth optical fiber fixing port (7.2), and the glass substrate (1) and the upper cover glass (2) are attached to realize sealing of the cuboid capillary micro-cavity (4).
6. The optical trapping device for repeatedly trapping microspheres by using the totally enclosed wafer-type evanescent wave as claimed in claim 1, wherein: marking lines for indicating the central positions are engraved on the glass substrate (1) and the upper cover glass (2), and the marking lines for indicating the central positions of the glass substrate and the upper cover glass are adjusted to be overlapped and sealed by UV glue.
7. The optical trapping device for repeatedly trapping microspheres by using the totally enclosed wafer-type evanescent wave as claimed in claim 1, wherein: the glass substrate (1) is made of silicon or silicon dioxide.
8. The optical trapping device for repeatedly trapping microspheres by using the totally enclosed wafer-type evanescent wave as claimed in claim 1, wherein: the glass substrate (1) and the upper cover glass (2) are both of a wafer structure.
9. The optical trapping device for repeatedly trapping microspheres by using the totally enclosed wafer-type evanescent wave as claimed in claim 1, wherein: the cuboid capillary micro-cavity adopts a silicon dioxide capillary with the diameter of 6-9 microns, and the aperture size is larger than the diameter of the microsphere.
10. The optical trapping device for repeatedly trapping microspheres by using the totally enclosed wafer-type evanescent wave as claimed in claim 1, wherein: the thickness of the thin substrate (5) is not more than the penetration depth of the evanescent wave.
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