CN106935307B - Accurate control microballoon based on pulse laser carries out the method and device of light suspension - Google Patents
Accurate control microballoon based on pulse laser carries out the method and device of light suspension Download PDFInfo
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- CN106935307B CN106935307B CN201710087697.4A CN201710087697A CN106935307B CN 106935307 B CN106935307 B CN 106935307B CN 201710087697 A CN201710087697 A CN 201710087697A CN 106935307 B CN106935307 B CN 106935307B
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- pulse laser
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- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
- G21K1/006—Manipulation of neutral particles by using radiation pressure, e.g. optical levitation
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
Abstract
The invention discloses the method and devices that a kind of accurate control microballoon based on pulse laser carries out light suspension.Using pulsed laser action in substrate surface, substrate absorbs pulse laser, generates thermal expansion, and acceleration is generated to the targeted microspheres of substrate surface；Targeted microspheres overcome the adhesive force of substrate surface to be detached from surface；By controlling pulse laser, control targe microballoon is detached from the speed and lifting position of substrate surface, and targeted microspheres enter ligh trap capture region, gravity straight down and the component balance of trapping stiffness straight up suffered by microballoon, realizes the stable suspersion of targeted microspheres.Light levitation device, including substrate, pulse laser, speculum, diaphragm and plus lens.Accurate control targe microballoon of the invention enters the motion state of ligh trap capture region, realize the repetition capture of single or multiple targeted microspheres, duration needed for light suspension is extremely short, suitable with the time frame of pulsed laser action, light suspension success rate is high, and does not need to moving component.
Description
Technical field
The present invention relates to the method and devices that a kind of accurate control microballoon based on pulse laser carries out light suspension, belong to light
Learn engineering and microparticle suspension field.
Background technology
Quick of particle throws in the environment of gas or vacuum and capture is a technological difficulties in light suspension field.Tradition
Piezoelectric ceramic high-frequency vibrated throwing scheme and ultrasonic atomizatio and play throwing scheme, need to shed a large amount of microballoons in free space, it is micro-
Ball warp has certain probability to be captured by ligh trap when crossing capture region.These simple throwing modes that directly rise are convenient for physical study and are tested
It confirms the development tested, but since the light suspension capture rate of microballoon is extremely low, causes the waste of a large amount of microballoons, and it is at large miscellaneous
Matter microballoon can pollute the light-emitting surface of light suspension light path, such as lens surface or fiber end face, influence to capture the distribution of light field；In vacuum
In chamber device, remaining impurity microballoon and the spraying solvent risen used in throwing can also pollute vacuum chamber environment, destroy vacuum item
Part.Just it is difficult that targeted microspheres are carried out to repeat capture once external condition disturbance causes captured microballoon to be detached from from ligh trap,
Influence the functionization of light suspension technology.
We also once disclosed a kind of branch method and device of light suspension micro Ball（CN 105759074 A）, main profit
It is collided with electromagnetism and realizes that microballoon is detached from and suspends.
When the size of particle is less than 100 microns, the adhesive force of particle and substrate surface include Van der Waals force, capillary force and
Electrostatic force etc..The adhesive force size of particle and substrate surface is by ambient humidity, substrate surface pattern, microballoon and substrate material and several
The factors such as what characteristic influence, and size is the 10 of microballoon its own gravity4Times or more the order of magnitude.In order to which microballoon is made to be detached from substrate table
Face, it is desirable to provide huge acceleration.
With the continuous development of light suspension research, light suspension technology is gradually applied to field of inertia measurement by people.It is different
Studied in Physical Experiment, in engineering is applied, it would be desirable to realized under the premise of accurate control sensing microballoon it is quick, can weigh
Multiple light suspends, and just can guarantee the consistency of measurement result.Traditional microballoon light suspension process obviously can not meet such need
It asks.
Invention content
The present invention provides the method and devices that a kind of accurate control microballoon based on pulse laser carries out light suspension.
A kind of method that accurate control microballoon based on pulse laser carries out light suspension, using pulsed laser action in substrate
Surface, substrate absorb pulse laser, generate thermal expansion, and acceleration is generated to the targeted microspheres of substrate surface；Targeted microspheres overcome
The adhesive force of substrate surface is detached from surface；By the way that pulse laser control targe microballoon is controlled to be detached from speed and the rising of substrate surface
Position, targeted microspheres enter ligh trap capture region, gravity straight down and the component of trapping stiffness straight up suffered by microballoon
Balance realizes the stable suspersion of targeted microspheres.
After the stable suspersion of the targeted microspheres, substrate surface is returned to, waits for the excitation of next pulse laser,
It suspends so as to fulfill the repetition light of targeted microspheres.
The substrate surface places one or more targeted microspheres.
The hot spot of the pulse laser, pulse energy, pulse width, pulse frequency and number are controllable.
A kind of light levitation device realized according to the method, including substrate, pulse laser, speculum, diaphragm and remittance
Poly- lens；The substrate surface places one or more targeted microspheres, and the pulse laser outgoing pulse laser is successively
By speculum, diaphragm and plus lens, the surface of substrate, the region where the hot spot coverage goal microballoon of light beam are focused on；
The diaphragm is incident on the spot size of the pulsed light of substrate surface for control；The plus lens can be in optical axis direction
Upper movement, the position of control pulse laser convergence focus.
Ligh trap capture region is located at the surface of targeted microspheres, and relative position is adjustable.
Beneficial effects of the present invention are embodied in several aspects：
The present invention can be directed to the motion state before single or multiple targeted microspheres light suspend and accurately be controlled, and realize microballoon
Repetition capture, light suspend needed for duration it is extremely short, depending on the time of light-pulse generator effect, only nanosecond order or smaller.
Light suspension success rate is far above traditional microballoon light suspension scheme, up to absolutely.It will not be in capture light in light resuspension procedure
Extra impurity microballoon is generated in road, the equipment such as vacuum chamber will not be polluted, the capture original light field of light path will not be had an impact, and
And moving component is not needed to.
Description of the drawings
Fig. 1 is a kind of structure diagram of the device of the invention；
Fig. 2 is the structure diagram at a certain moment during pulsed laser irradiation；
Fig. 3 is microballoon by the structure diagram after stable suspersion；
In figure, substrate 1, targeted microspheres 2, pulse laser 3, speculum 4, diaphragm 5, plus lens 6, ligh trap capture region
7。
Specific embodiment
Pulsed laser action makes it quickly generate thermal expansion in substrate surface, can remove the micro- of substrate surface effective and rapidly
Ball.Although the thermal expansion amount very little of substrate surface, in extremely short pulse operating time（Usually tens nanosecond）, just can be right
Microballoon generation is enough to overcome the huge acceleration of adhesive force.This technological means has been widely used in laser cleaning field, miscellaneous
For the size of matter particle from tens microns to tens nanometer, the material of contaminant particles has metal material, organic material and dielectric material
Deng.But laser cleaning application only considers impurity elimination efficiency, does not consider the damage to particle, is more indifferent to after particle removal
Motion state.
We have used for reference this technological means, apply it to microballoon light and suspend and ligh trap control field, can accurately control
Targeted microspheres processed are detached from the motion state after substrate, and the light that realization is quick, repeatable suspends, and reduces the time needed for light suspension,
Improve the success rate that light suspends.
The method that a kind of accurate control microballoon based on pulse laser of the present invention carries out light suspension, target to be suspended are micro-
Ball sticks on the surface of the substrate, and baseplate material is larger to the absorptivity and coefficient of thermal expansion of pulse laser, can be in impulse action
Interior rapid generation thermal expansion.A stable capture ligh trap is formed in surface using capture laser, ligh trap region is close
Substrate surface, mutual distance are adjustable.
Using pulsed laser action in substrate surface, substrate absorbs pulse laser, thermal expansion is generated, to the mesh of substrate surface
It marks microballoon and generates acceleration；Targeted microspheres overcome the adhesive force of substrate surface to be detached from surface；By the way that pulse laser is controlled to control mesh
Mark speed and lifting position that microballoon is detached from substrate surface, targeted microspheres enter ligh trap capture region, suffered by microballoon it is vertical to
Under gravity and the component balance of trapping stiffness straight up, realize the stable suspersions of targeted microspheres.
After the stable suspersion of the targeted microspheres, substrate surface is returned to, waits for the excitation of next pulse laser,
It suspends so as to fulfill the repetition light of targeted microspheres.
Further the present invention is illustrated below in conjunction with attached drawing.
As shown in Figure 1, a kind of light levitation device realized according to the method, including substrate 1, pulse laser 3, reflection
Mirror 4, diaphragm 5 and plus lens 6；Place one or more targeted microspheres 2, the pulse laser 3 in 1 surface of substrate
Outgoing pulse laser by speculum 4, diaphragm 5 and plus lens 6, focuses on the surface of substrate 1, the hot spot covering of light beam successively
Region where targeted microspheres 2；The diaphragm 5 is incident on the spot size of the pulsed light of substrate surface for control；It is described
Plus lens 6 can move in the direction of the optical axis, control pulse laser convergence focus position.
The material of substrate 1 is larger to the absorptivity and coefficient of thermal expansion of pulsed light, and silicon materials, the surface of substrate 1 can be selected
It is clean, the impurity not in addition to targeted microspheres.
Microballoon of the targeted microspheres 2 for micron or nanometer scale, can be metal material, organic material or dielectric material, can quilt
Common ligh trap capture, usually selects silicon dioxide microsphere.
The wavelength of pulse laser 3 can choose ultraviolet band, and krypton fluorine KrF excimer lasers can be used, and wavelength is
248nm, pulse width 30ns, the energy of single pulse, width, frequency and number are adjustable.
The speculum 4 and plus lens 6 are suitable for wave band where pulse laser.For example speculum 4 is to 248nm wavelength
Light reflectivity it is high, absorption loss is small.For example plus lens 6 is high to the light transmission rate of 248nm wavelength, absorption loss is small, can incite somebody to action
Pulse laser focusing is on the surface of substrate 1.
Diaphragm 5 is incident on the spot size of the pulsed light of substrate surface for control.
Ligh trap capture region 7 can be obtained by two beam 980nm single-mode laser counter-propagates, and close to targeted microspheres 2, ligh trap is caught
Obtaining region lower edge can be with 2 upper surface of targeted microspheres at a distance of several microns, and relative position is fine-tuning.
Application Example
As shown in Figure 1, targeted microspheres 2 are attached on 1 surface of substrate, pulse laser 3 is opened, pulsed light is successively by reflection
After mirror 4, diaphragm 5 and plus lens 6 focus on, it is radiated at 1 surface of substrate.As shown in Fig. 2, during pulsed light irradiates, 1 surface of substrate
Rapid to generate thermal expansion, targeted microspheres 2 progressively disengage 1 surface of substrate, and targeted microspheres 2 are gradually reduced by the adhesive force of substrate 1
Until targeted microspheres 2 completely disengage the surface of substrate 1.For the ligh trap capture region 7 of specific position, single pulse light is adjusted
Energy, width and launching spot, make targeted microspheres 2 reach ligh trap capture region 7 when speed be zero.As shown in figure 3, pulse laser
After effect, the thermal expansion on 1 surface of substrate disappears, and the laser that is captured of targeted microspheres 2 stablizes capture, realizes that quick light hangs
It is floating.After each light suspends, targeted microspheres 2 can return to original 1 contact area of substrate under the effect of gravity, be sticked again
Attached power absorption suspends in 1 surface of substrate, the excitation of waiting next pulse laser so as to fulfill the repeatable light of targeted microspheres 2.
Claims (6)
1. a kind of method that accurate control microballoon based on pulse laser carries out light suspension, which is characterized in that utilize pulse laser
Substrate surface is acted on, substrate absorbs pulse laser, generates thermal expansion, and acceleration is generated to the targeted microspheres of substrate surface；Mesh
Mark microballoon overcomes the adhesive force of substrate surface to be detached from surface；By the way that pulse laser control targe microballoon is controlled to be detached from substrate surface
Speed and lifting position, targeted microspheres enter ligh trap capture region, and the gravity straight down and trapping stiffness suffered by microballoon are vertical
Upward component balance realizes the stable suspersion of targeted microspheres.
2. according to the method described in claim 1, it is characterized in that, after the stable suspersion of the targeted microspheres, return to
Substrate surface waits for the excitation of next pulse laser, suspends so as to fulfill the repetition light of targeted microspheres.
3. according to the method described in claim 1, it is characterized in that, the one or more targets of substrate surface placement are micro-
Ball.
4. according to the method described in claim 1, it is characterized in that, the hot spot of the pulse laser, pulse energy, pulse are wide
Degree, pulse frequency and number are controllable.
5. a kind of light levitation device for realizing claim 1 the method, which is characterized in that including substrate（1）, pulse laser
（3）, speculum（4）, diaphragm（5）And plus lens（6）；
The substrate（1）Place one or more targeted microspheres in surface（2）；
The pulse laser（3）Outgoing pulse laser passes through speculum successively（4）, diaphragm（5）And plus lens（6）, gather
Coke arrives substrate（1）Surface, the hot spot coverage goal microballoon of light beam（2）The region at place；
The diaphragm（5）For controlling the spot size for the pulsed light for being incident on substrate surface；
The plus lens（6）It can move in the direction of the optical axis, the position of control pulse laser convergence focus.
6. smooth levitation device according to claim 5, which is characterized in that ligh trap capture region（7）Positioned at targeted microspheres（2）
Surface, and relative position is adjustable.
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| CN201710087697.4A CN106935307B (en) | 2017-02-18 | 2017-02-18 | Accurate control microballoon based on pulse laser carries out the method and device of light suspension |
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| CN106935307B true CN106935307B (en) | 2018-07-06 |
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Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111986830B (en) * | 2020-08-17 | 2022-12-20 | 浙江大学 | Method and device for lossless, accurate and repeatable capture of microspheres based on evanescent waves |
| CN112466506B (en) * | 2021-01-29 | 2021-04-27 | 之江实验室 | Vacuum optical trap supporting method and device and application |
| CN112967831A (en) * | 2021-01-30 | 2021-06-15 | 浙江大学 | Method and device for repeatedly supporting and suspending microspheres in optical trap |
| CN114859076B (en) * | 2022-07-06 | 2022-10-21 | 之江实验室 | Acceleration measurement method and device based on optical suspension multi-microsphere array |
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|---|---|---|---|---|
| US5950071A (en) * | 1995-11-17 | 1999-09-07 | Lightforce Technology, Inc. | Detachment and removal of microscopic surface contaminants using a pulsed detach light |
| CN101063830A (en) * | 2006-04-28 | 2007-10-31 | Asml荷兰有限公司 | Methods to clean a surface, a device manufacturing method, a cleaning assembly, cleaning apparatus, and lithographic apparatus |
| CN204536686U (en) * | 2015-04-20 | 2015-08-05 | 三峡大学 | The device that a kind of microballoon fast light suspends |
| CN105759074A (en) * | 2016-03-07 | 2016-07-13 | 浙江大学 | Optical suspension-type microballoon rising and supporting method and device |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20130340840A1 (en) * | 2012-06-13 | 2013-12-26 | Massachusetts Institute Of Technology | Articles and methods for levitating liquids on surfaces, and devices incorporating the same |
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5950071A (en) * | 1995-11-17 | 1999-09-07 | Lightforce Technology, Inc. | Detachment and removal of microscopic surface contaminants using a pulsed detach light |
| CN101063830A (en) * | 2006-04-28 | 2007-10-31 | Asml荷兰有限公司 | Methods to clean a surface, a device manufacturing method, a cleaning assembly, cleaning apparatus, and lithographic apparatus |
| CN204536686U (en) * | 2015-04-20 | 2015-08-05 | 三峡大学 | The device that a kind of microballoon fast light suspends |
| CN105759074A (en) * | 2016-03-07 | 2016-07-13 | 浙江大学 | Optical suspension-type microballoon rising and supporting method and device |
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