CN111965779A - Scanning type large-area array micro-lens array structure convenient to align - Google Patents
Scanning type large-area array micro-lens array structure convenient to align Download PDFInfo
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- CN111965779A CN111965779A CN202010697853.0A CN202010697853A CN111965779A CN 111965779 A CN111965779 A CN 111965779A CN 202010697853 A CN202010697853 A CN 202010697853A CN 111965779 A CN111965779 A CN 111965779A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
- G02B7/023—Mountings, adjusting means, or light-tight connections, for optical elements for lenses permitting adjustment
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/0006—Arrays
- G02B3/0037—Arrays characterized by the distribution or form of lenses
- G02B3/0062—Stacked lens arrays, i.e. refractive surfaces arranged in at least two planes, without structurally separate optical elements in-between
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Abstract
The invention discloses a scanning type large-area array micro-lens array structure convenient to align, which comprises a first protection tool, a second protection tool, a first micro-lens array, a second micro-lens array, a two-dimensional micro-displacement table, a high-precision gasket and a correction tool, wherein the first protection tool is arranged on the first micro-lens array; the first protection tool and the second protection tool are respectively bonded with the first micro lens array and the micro lens array to protect the two micro lens arrays; the correcting tool is used for adjusting the relative position of the second micro-lens array, and the correcting tool is fixed on the two-dimensional micro-displacement table and used for realizing high-precision alignment of the two micro-lens arrays. The alignment method of the scanning type large-area array microlens array provided by the invention has the advantages of simple structure, convenience in operation, capability of realizing micron-order high-precision alignment of two microlens arrays, small volume, simple device, low requirement on processing precision and the like.
Description
Technical Field
The invention belongs to the technical field of optics, and particularly relates to a scanning type large-area array micro-lens array structure convenient to align.
Background
The microlens array is one of the important representatives of the miniaturization, arraying and integration of optical components, and generally comprises a plurality of microlenses with smaller calibers and specific shapes which are arranged according to a certain rule. Currently, microlens arrays have shown unique application values in the fields of imaging optics, beam shaping, optical data transmission, beam scanning, high-sensitivity sensing, and the like.
The micro lens array can be used for a scanning type imaging optical system to solve the inherent contradiction between high resolution and large visual field of the traditional imaging optical system, and has the advantages of high scanning precision, high frequency, compact structure and the like. The scanning microlens array is generally composed of two identical microlens arrays and a two-dimensional micro-displacement driver, and has a laminated structure. Generally, the microlens array 1 is moved by driving a two-dimensional displacement stage, and the microlens array 2 is fixed to realize two-dimensional relative movement between the microlens arrays.
The large-area array micro-lens array has the advantages of large clear aperture, multiple subunits, strong beam steering capability, easy realization of large-angle beam scanning and the like.
Due to the small size and fine structure of the microlens array subunits, in the practical application of scanning imaging, the relative position between two microlens arrays is required to be accurate and to be strictly aligned. In a specific implementation process, the problems of stray light and the like in scanning are caused by large inclination and eccentricity errors and inaccurate alignment between two microlens arrays, so that the scanning angle, the resolution and the like do not meet the theoretical requirements. The alignment technology of the large-area array micro-lens array is more difficult and has higher requirements.
Disclosure of Invention
In order to solve the problems of relative inclination, eccentricity, inaccurate alignment and the like existing between two existing laminated microlens arrays, the invention provides a scanning type large-area array microlens array structure convenient for alignment, and the scanning type large-area array microlens array structure can realize micron-order high-precision alignment of two microlens arrays.
In order to realize the aim of the invention, the invention provides a scanning type large-area array microlens array structure convenient for alignment, which comprises a first protection tool, a second protection tool, a first microlens array, a second microlens array, a two-dimensional micro displacement table, a high-precision gasket and a correction tool;
the first protection tool and the second protection tool are respectively bonded with the first micro lens array and the micro lens array to protect the two micro lens arrays;
the first micro lens array is adhered to the first protection tool and then is mounted on the two-dimensional micro displacement table, and the two-dimensional micro displacement table is used for driving the micro lens array to move up and down and left and right in a micrometer scale, so that scanning is realized;
a high-precision gasket is arranged between the two micro lens arrays and used for accurately controlling the distance between the first micro lens array and the second micro lens array;
the correcting tool is used for adjusting the relative position of the second micro-lens array, and the correcting tool is fixed on the two-dimensional micro-displacement table and used for realizing high-precision alignment of the two micro-lens arrays.
The first protection tool comprises a square frame with a certain thickness, and four corners of the square frame are respectively provided with a chamfer, so that the installation of the micro-lens array and the adhesion of glue are facilitated.
The second protection tool comprises a square frame with a certain thickness, and chamfers are respectively designed at four corners of the square frame, so that the micro-lens array is convenient to mount and glue.
Compared with the prior art, the alignment method of the scanning type large-area array microlens array has the advantages that the structure is simple, the operation is convenient, micron-scale high-precision alignment of two microlens arrays can be realized, and the alignment method has the characteristics of small size, simple device, low requirement on processing precision and the like.
Drawings
FIG. 1 is a schematic diagram of an overall structure of a scanning type large area array microlens array structure for facilitating alignment according to the present invention;
FIG. 2 is a partial structural schematic view of a microlens array structure of a scanning type large area array for facilitating alignment according to the present invention;
FIG. 3 is a schematic view of a first microlens array mounting structure according to the present invention;
FIG. 4 is a schematic structural diagram of a two-dimensional micro-displacement stage according to the present invention;
FIG. 5 is a schematic structural view of the calibration fixture of the present invention;
in the figure, 1, a first protection tool, 2, a second protection tool, 3, a first micro-lens array, 4, a second micro-lens array, 5, a two-dimensional micro-displacement table, 6, a high-precision gasket, 7, a first spring plunger, 8, a first screw, 9, a second spring plunger, 10, a second screw, 11 and a correction tool.
Detailed Description
It should be noted that the embodiments and features of the embodiments in the present application may be combined with each other without conflict.
The invention is described in further detail below with reference to the figures and specific examples. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
As shown in fig. 1 to 5, a structure of an embodiment of the present invention includes a first protection tool 1, a second protection tool 2, a first microlens array 3, a second microlens array 4, a two-dimensional micro-displacement stage 5, a high-precision gasket 6, a first spring plunger 7, a first screw 8, a second spring plunger 9, a second screw 10, and a calibration tool 11.
The first protection tool 1 and the second protection tool 2 are consistent in structure and only have height difference; the first protection tool 1 and the second protection tool 2 are both of square frame structures and are respectively bonded with the first micro lens array 3 and the second micro lens array 4 to protect the two micro lens arrays;
in a preferred embodiment, four corners of the first protection tool 1 and the second protection tool 2 are respectively designed with chamfers, so that the installation of the micro lens and the adhesion of the glue are facilitated.
The correcting tool 11 is used for adjusting the relative position of the micro-lens array 4 in a second mode, and is fixed on the two-dimensional micro-displacement table 5 through the first screw 8 and used for achieving high-precision alignment of the two micro-lens arrays. Specifically, rectify frock includes square frame, preferred square frame, installs a bearing block respectively at the middle part lower extreme on four limits of frame, and bearing block part stretches into square frame inboard, and a plurality of horizontal second spring plunger 9 are all installed to two wherein adjacent edges inboard of square frame, and every edge is four in this embodiment, correspondingly, on other two edges, all install horizontal, run through square frame and threaded connection's second screw 10.
The second protection tool 2 and the second micro-lens array 4 are matched with the correction tool for use. The second protection tool 2 is placed in a square frame of the correction tool and is placed on the bearing block, the second spring plunger 9 and the second screw 10 both abut against corresponding edges of the second protection tool 2, and the position of the second protection tool 2 is adjusted through the second screws 10 on the two edges, so that the position of the second micro-lens array 4 is adjusted.
Each bearing block of the correction tool is in threaded connection with a two-dimensional micro-displacement table 5 through a first screw 8, two first spring plungers 7 are arranged on the two-dimensional micro-displacement table below each bearing block, and the height adjustment and high-precision alignment of the second micro-lens array 4 and the first micro-lens array 3 are realized by adjusting the first screws 8; the first spring plunger on each side is matched with the first screw and used for balancing the downward screwing force of the second screw on the correction tool; and the second spring plunger is matched with the second screw and used for aligning the two micro-lens arrays.
The first micro-lens array 3 is adhered to the first protection tool 1 and then is mounted on the two-dimensional micro-displacement table 5, and the two-dimensional micro-displacement table 5 is used for driving the micro-lens array 1 to move in a micron-scale manner back and forth and left and right, so that scanning is realized;
in a preferred embodiment, 8 first spring plungers are respectively adhered to four sides of the two-dimensional micro displacement table;
in a preferred embodiment, a high-precision gasket is arranged between the two microlens arrays and used for precisely controlling the distance between the first microlens array and the second microlens array;
when the correcting tool is used, the four first screws are screwed, so that the whole correcting tool drives the second micro-lens array and the second protecting tool to move downwards together, and the first screws are glued by glue until the surface of the second micro-lens array contacts the high-precision gasket, so that the first screws are prevented from being loosened; and 4 second screws are slightly rotated respectively to push the second protection tool and the second micro-lens array to slightly displace, adjust the relative position between the two micro-lens arrays, observe under a microscope until the two micro-lens arrays are completely aligned, and fix and bond all adjustable devices.
In the preferred embodiment, the two-dimensional micro-displacement stage is a device in the prior art, and can be a Liaoning two-dimensional piezoelectric scanning stage P643S, the piezoelectric ceramic is driven by a flexible hinge structure without friction and backlash, the positioning precision reaches the nanometer level, and the two-dimensional micro-displacement stage has two-dimensional displacement along the X-axis direction and the Y-axis direction, and the stroke is 300 μm.
The technical means not described in detail in the present application are known techniques.
The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, various modifications and decorations can be made without departing from the principle of the present invention, and these modifications and decorations should also be regarded as the protection scope of the present invention.
Claims (4)
1. A scanning type large-area array micro-lens array structure convenient for alignment is characterized by comprising a first protection tool, a second protection tool, a first micro-lens array, a second micro-lens array, a two-dimensional micro-displacement table and a correction tool;
the first protection tool and the second protection tool are respectively bonded with the first micro lens array and the micro lens array to protect the two micro lens arrays;
the first micro lens array is adhered to the first protection tool and then is mounted on the two-dimensional micro displacement table, and the two-dimensional micro displacement table is used for driving the micro lens array to move up and down and left and right in a micrometer scale, so that scanning is realized;
the correcting tool is used for adjusting the relative position of the second micro-lens array, and the correcting tool is fixed on the two-dimensional micro-displacement table and used for realizing high-precision alignment of the two micro-lens arrays.
2. The structure of claim 1, wherein the first protection tool comprises a square frame with a certain thickness, and four corners of the square frame are respectively designed with chamfers to facilitate mounting of the microlens array and bonding of glue.
3. The structure of claim 1, wherein the second protection fixture comprises a square frame with a certain thickness, and four corners of the square frame are respectively designed with chamfers to facilitate mounting of the microlens array and bonding of the adhesive.
4. A scanning type large area array microlens array structure for facilitating alignment as claimed in claim 1, wherein a high precision spacer is installed between two microlens arrays for precisely controlling the distance between the first microlens array and the second microlens array.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010697853.0A CN111965779B (en) | 2020-07-20 | 2020-07-20 | Scanning type large-area array micro-lens array structure convenient to align |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202010697853.0A CN111965779B (en) | 2020-07-20 | 2020-07-20 | Scanning type large-area array micro-lens array structure convenient to align |
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| Publication Number | Publication Date |
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| CN111965779A true CN111965779A (en) | 2020-11-20 |
| CN111965779B CN111965779B (en) | 2022-06-10 |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1305251A (en) * | 2000-11-30 | 2001-07-25 | 中国科学院上海光学精密机械研究所 | Laser device containing collimation module and linear array of laser diodes |
| JP2004098436A (en) * | 2002-09-09 | 2004-04-02 | Kyocera Corp | Method and device for adjusting exposure device in image formation apparatus |
| CN101867158A (en) * | 2010-05-24 | 2010-10-20 | 中国科学院长春光学精密机械与物理研究所 | Fine tuning method and device for integration of micro-lens array and diode laser array |
| CN104749753A (en) * | 2015-03-31 | 2015-07-01 | 中国科学院长春光学精密机械与物理研究所 | Hartmann sensor relay lens with multiplying power fine-adjustment mechanism |
| CN105223756A (en) * | 2015-10-06 | 2016-01-06 | 瑞声光电科技(常州)有限公司 | Array camera lens module |
| CN106405827A (en) * | 2016-11-04 | 2017-02-15 | 湖北三江航天万峰科技发展有限公司 | Micro lens scanning device |
-
2020
- 2020-07-20 CN CN202010697853.0A patent/CN111965779B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1305251A (en) * | 2000-11-30 | 2001-07-25 | 中国科学院上海光学精密机械研究所 | Laser device containing collimation module and linear array of laser diodes |
| JP2004098436A (en) * | 2002-09-09 | 2004-04-02 | Kyocera Corp | Method and device for adjusting exposure device in image formation apparatus |
| CN101867158A (en) * | 2010-05-24 | 2010-10-20 | 中国科学院长春光学精密机械与物理研究所 | Fine tuning method and device for integration of micro-lens array and diode laser array |
| CN104749753A (en) * | 2015-03-31 | 2015-07-01 | 中国科学院长春光学精密机械与物理研究所 | Hartmann sensor relay lens with multiplying power fine-adjustment mechanism |
| CN105223756A (en) * | 2015-10-06 | 2016-01-06 | 瑞声光电科技(常州)有限公司 | Array camera lens module |
| CN106405827A (en) * | 2016-11-04 | 2017-02-15 | 湖北三江航天万峰科技发展有限公司 | Micro lens scanning device |
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| CN111965779B (en) | 2022-06-10 |
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