CN103376530B - A kind of prism of corner cube regulating positioning device and method - Google Patents
A kind of prism of corner cube regulating positioning device and method Download PDFInfo
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- CN103376530B CN103376530B CN201210119679.7A CN201210119679A CN103376530B CN 103376530 B CN103376530 B CN 103376530B CN 201210119679 A CN201210119679 A CN 201210119679A CN 103376530 B CN103376530 B CN 103376530B
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Abstract
The invention discloses a kind of prism of corner cube regulating positioning device and method, described device comprises prism locating piece, location-plate, two pieces of locating pieces and two groups of adjustment pads, described prism locating piece comprises the first locating surface and the locating slot for fixed angles cone prism, after described prism of corner cube is fixing by described locating slot, the optical axis of described prism of corner cube is perpendicular to described first locating surface, described prism locating piece also comprises the second locating surface and the 3rd locating surface that are parallel to described prism of corner cube optical axis, and described second locating surface is mutually vertical with the 3rd locating surface.A kind of prism of corner cube regulating positioning device of the present invention and method achieve diagonal cone prism and carry out hi-Fix and adjustment, and structure is simple, easy for installation.
Description
Technical field
The present invention relates to technical field of lithography, especially relate to a kind of prism of corner cube regulating positioning device and method.
Background technology
Prism of corner cube is a kind of optical element that incident light can be reflected back in almost parallel mode, has the light reflection surface that three mutual verticality are high, and and the oblate body profile lens of non-generic, it is comparatively special that its function determines its profile.
At present, the localization method of optical element is normally under the prerequisite meeting positioning precision, and select the locating surface vertical with orientation, for general optical element, the method can realize high-precision location as far as possible.
But there is following defect when diagonal cone prism is located in said method:
(1) in some cases, according to having shown that according to theory calculate prism of corner cube is relative to the best theoretical position of location-plate and attitude, during orientation angle cone prism relative to this position and attitude misalignment less, corresponding product degree of regulation is also higher, so near the theory calculate position needing prism of corner cube to be accurately positioned at relative positioning workpiece, positioning accuracy request reaches 0.01mm, but prism of corner cube locating surface dimensional accuracy own is the highest can only reach 0.2mm, exceed 20 times of accuracy requirement, can not meet the demands far away;
(2) prism of corner cube profile is irregular, not perpendicular or parallel with required orientation high-precision fixed plane, causes location-plate and cannot be located by said method;
(3) diameter due to prism of corner cube is less, and the closer to central optical axis performance better (the reflected light depth of parallelism is higher), and said method will do adjustment in a big way to catch reflected light usually when locating and regulating, be difficult to the accurate location realizing diagonal cone prism like this, and the position location of prism of corner cube relative positioning plate must as far as possible close to theoretical value, namely positioning precision height could reduce because manufacturing with build-up tolerance the impact of range of adjustment.
Summary of the invention
Technical matters to be solved by this invention is: cannot carry out hi-Fix and adjustment by diagonal cone prism.For solving the problems of the technologies described above, the present invention adopts following technical scheme:
A kind of prism of corner cube regulating positioning device, comprising:
Prism locating piece, comprise the first locating surface and the locating slot for fixed angles cone prism, after described prism of corner cube is fixing by described locating slot, the optical axis of described prism of corner cube is perpendicular to described first locating surface, described prism locating piece also comprises the second locating surface and the 3rd locating surface that are parallel to described prism of corner cube optical axis, and described second locating surface is mutually vertical with the 3rd locating surface;
Location-plate, comprise the main locating surface perpendicular to described prism of corner cube ideally optical axis direction, and two are parallel to described prism of corner cube ideally optical axis direction and orthogonal side-locating face, when positioning described prism of corner cube, the first locating surface of described prism locating piece is close to the main locating surface of described location-plate;
Two pieces of locating pieces, be respectively the first adjustment locating piece, second and regulate locating piece, be fixed on described side-locating face each via bolt, and first regulates locating piece to contact with the second locating surface of described prism locating piece, and second regulates locating piece to contact with the 3rd locating surface of described prism locating piece;
Two groups regulate pad, are located between described locating piece and side-locating face, by changing the thickness regulating pad, for regulating prism of corner cube position from the direction being parallel to described main locating surface.
Further, described location-plate is also provided with side compression assembly, described side compression assembly is used for applying wall pressure, in order to regulate locating piece and second to regulate locating piece to compress described prism locating piece and first to described prism locating piece.
Further, described side compression assembly is leaf spring compressing structure.
Further, described prism locating piece comprises:
Flange portion, the first locating surface of described prism locating piece is positioned at described flange portion, and vertical with described flange portion central axial direction, and described locating slot is positioned at described flange portion center, is the groove of triangular pyramidal;
Axial part, extend from described first locating surface along described flange portion central axial direction, described axial part is arranged in described location-plate;
Ring flange, is located at one end of described axial part;
Pulling assembly, connects described ring flange and location-plate, in order to the main locating surface making the first locating surface of described prism locating piece push against described location-plate.
Further, described flange portion is eight rib flange arrangements.
Further, described pulling assembly is disc spring group.
Further, described prism of corner cube is fixed on described locating slot by bonding mode.
Further, described side compression assembly comprises the spring block, depression bar and the leaf spring that is located between described spring block and depression bar that are fixed on described location-plate prism, described depression bar one end is fixed on spring block by fixed mount, and the other end is held in the side compression face of the flange portion of prism locating piece.
Further, described location-plate also comprises installing described first and regulates locating piece and second to regulate the adjustment locating piece installation portion of locating piece, and the side-locating face of described location-plate is positioned on described adjustment locating piece installation portion.
The present invention also provides a kind of adjustment localization method of above-mentioned prism of corner cube, said method comprising the steps of:
Step S1: prism of corner cube is fixed in the locating slot of prism locating piece, and the main locating surface the first locating surface of described prism locating piece being adjacent to described location-plate, thus the optical axis realizing described prism of corner cube is parallel to ideally optical axis direction.
Step S2: described first regulates locating piece to compress the second locating surface of described prism locating piece, and described second regulates locating piece to compress the 3rd locating surface of described prism locating piece, measures the physical location of described prism of corner cube optical axis relative to described location-plate;
Step S3: the described prism of corner cube optical axis described physical location and theory calculate gone out compares relative to the position of described location-plate, calculates the deviate of described prism of corner cube optical axis measured value and theoretical value;
Step S4: calculate the reconditioning quality needed for described two groups of adjustment pads respectively according to described deviate;
Step S5: pull down described two groups and regulate pad, respectively according to described reconditioning quality described two groups are regulated to pad and carry out reconditioning or padded, more described two groups of spacer sheets are reinstalled original position, thus the location completing described prism of corner cube regulates.
Further, described method is further comprising the steps of after completing described step S5:
Step S6: measure the physical location of described prism of corner cube optical axis relative to described location-plate, the described prism of corner cube optical axis described physical location and theory calculate gone out compares relative to the position of described location-plate, as comparative result is consistent, process ends, inconsistent, get back to step S4, and proceed subsequent step, until the position consistency that physical location and theory calculate go out.
A kind of prism of corner cube regulating positioning device of the present invention and method are by being fixed in the locating slot of the triangular pyramidal shape of location-plate by prism of corner cube to be measured, and the first adjustment locating piece and the second adjustment locating piece are set on location-plate, the angle reference of described prism of corner cube is converted into the second locating surface on the prism locating piece parallel with prism of corner cube optical axis and the 3rd locating surface regulates, achieve diagonal cone prism and carry out hi-Fix and adjustment, and structure is simple, easy for installation.
Accompanying drawing explanation
Fig. 1 is the structural representation of a kind of prism of corner cube regulating positioning device one of the present invention embodiment;
Fig. 2 is the front schematic view of prism of corner cube regulating positioning device in Fig. 1;
Fig. 3 is the structural representation of prism locating piece in Fig. 1;
Fig. 4 is the side view of prism locating piece in Fig. 1;
Fig. 5 is the front elevation of prism locating piece in Fig. 1;
Fig. 6 is the structural representation of another angle of a kind of prism of corner cube regulating positioning device of the present invention;
Fig. 7 is the structural representation of another angle of a kind of prism of corner cube regulating positioning device of the present invention;
Fig. 8 is the schematic flow sheet of the adjustment localization method of a kind of prism of corner cube of the present invention.
Embodiment
The preferred embodiments of the present invention are described in detail below in conjunction with accompanying drawing.
Refer to Fig. 1, Fig. 2 and Fig. 4, a kind of prism of corner cube regulating positioning device of the present invention comprises location-plate 1, prism locating piece 2, two pieces of locating pieces and two groups of adjustment pads, described prism locating piece 2 comprises the first locating surface 20 (see Fig. 4) and the locating slot 22 for fixed angles cone prism, after described prism of corner cube 3 is fixing by described locating slot 22, the optical axis 32 of described prism of corner cube 3 is perpendicular to described first locating surface 20, described prism locating piece 2 also comprises the second locating surface 24 and the 3rd locating surface 26 that are parallel to described prism of corner cube 3 optical axis 32, described second locating surface 24 is mutually vertical with the 3rd locating surface 26.
Described location-plate 1 comprises the main locating surface 12 perpendicular to described prism of corner cube 3 ideally optical axis direction, and two are parallel to described prism of corner cube 3 ideally optical axis direction and orthogonal side-locating face 14,16, when positioning described prism of corner cube 3, the first locating surface 20 of described prism locating piece 2 is close to the main locating surface 12 of described location-plate 1;
Described two pieces of locating pieces are respectively the first adjustment locating piece 42, second and regulate locating piece 52, described side-locating face 14,16 is fixed on each via bolt, and first regulates locating piece 42 to contact with the second locating surface 24 of described prism locating piece 2, and second regulates locating piece 52 to contact with the 3rd locating surface 26 that described prism locates 2 pieces;
Described two groups regulate pad to be located between described locating piece and side-locating face 14,16, by changing the thickness regulating pad, for regulating prism of corner cube 3 position from the direction being parallel to described main locating surface 12.
Compress with described two pieces of locating pieces to make described prism locating piece 2, described location-plate 1 is also provided with side compression assembly 6, described side compression assembly 6 can apply wall pressure to described prism locating piece 2, to regulate locating piece 42, second to regulate locating piece 52 to compress described prism locating piece 2 and first, can improve the accuracy that the first adjustment locating piece 42, second regulates locating piece 52 to regulate like this, and diagonal cone prism 3 carries out hi-Fix and adjustment.
Described location-plate 1 also comprises installing the adjustment locating piece installation portion 10 that described first regulates locating piece 42 and the second adjustment locating piece 52, and the side-locating face 14,16 of described location-plate 1 is positioned on described adjustment locating piece installation portion 10.
Refer to Fig. 3 to Fig. 5, described prism locating piece 2 is hollow eight rib flange arrangements, it comprises a flange portion 23 further and by the axial part 25 extended along described flange portion 23 central axial direction from described first locating surface 20, described axial part 25 is arranged in described location-plate 1.
Described flange portion 23 is in eight prism shapes, and the first locating surface 20 of described prism locating piece 2 is positioned at described flange portion 23, and vertical with described flange portion 23 central axial direction; Described second locating surface 24 to be located in described flange portion 23 and to be pushed against described first and regulates locating piece 42, described 3rd locating surface 26 to be located in described flange portion 23 and to be pushed against described second and regulates locating piece 52, and described flange portion 23 also comprises the side compression face 236 (see Fig. 5) pushed against in described side compression assembly 6.
Described locating slot 22 is opened in the center of flange portion 23, and be the groove of triangular pyramidal shape, described prism of corner cube 3 is fixed on described locating slot 22 by bonding mode, three groove faces 222 of described locating slot 22 are corresponding with three reflectings surface of prism of corner cube 3, prism of corner cube 3 can be fitted with three reflectings surface three groove faces 222 of described locating slot 22, the optical axis 32 of described like this prism of corner cube 3 just coincides with flange center's axis (perpendicular to described flange portion 23 center) of described prism locating piece 2, and flange center's axis of described prism locating piece 2 regulates locating piece 42 and second to regulate locating piece 52 adjustment mobile by first, the angle reference of described like this prism of corner cube 3 just transforms in order to the second locating surface 24 (i.e. the back side of flange portion 23) on the prism locating piece 2 parallel with prism of corner cube 3 optical axis 32 and the 3rd locating surface 26 on the prism locating piece 2 parallel with prism of corner cube 3 optical axis 32 by prism locating piece 2, therefore described prism locating piece 2 drives prism of corner cube 3 to regulate locating piece 42 and second to regulate locating piece 52 to locate adjustment on the second locating surface 24 and the 3rd locating surface 26 by first, thus realize hi-Fix and the adjustment of diagonal cone prism 3.
See also Fig. 6, Fig. 7, axial part 25 one end of described prism locating piece 2 is provided with a circular flange dish 27, described ring flange 27 and location-plate 1 are connected with pulling assembly 7, in order to the main locating surface 12 making the first locating surface 20 of described prism locating piece 2 push against described location-plate 1.In the present embodiment, described pulling assembly 7 is disc spring group, and the first locating surface 20 tension of prism locating piece 2 can be fitted on the main locating surface 12 of described location-plate 1 by its spring force.
Refer to Fig. 1 to Fig. 7, described first regulates locating piece 42 and second to regulate locating piece 52 to be fixed on the side-locating face 14,16 of described location-plate 1 respectively by bolt, and described first adjustment locating piece 42 pushes against the second locating surface 24 in flange portion 23, described second adjustment locating piece 52 pushes against the 3rd locating surface 26 in flange portion 23, is folded with the first adjustment pad 44 between described first adjustment locating piece 42 and side-locating face 14; The second adjustment pad 54 is folded with between described second adjustment locating piece 52 and the side-locating face 16 of described positioning panel.Regulate the thickness of pad 54 just can regulate the position of prism of corner cube 3 from the direction being parallel to described main locating surface 12 by adjusting the first adjustment pad 44 and second.
Described side compression assembly 6 comprises the spring block 62, depression bar 64 and the leaf spring 66 that is located between described spring block 62 and depression bar 64 that are fixed on described location-plate 1 prism, described depression bar 64 one end is fixed on spring block 62 by fixed mount 68, and the other end is held in the side compression face 236 of the flange portion 23 of prism locating piece 2.By regulating the thickness of leaf spring 6, just can obtain the corresponding snap-in force varied in size, thus make the second locating surface 24 and first of described flange portion 23 regulate first of locating piece 42 to regulate locating piece 42 to be close to, and the 3rd locating surface 26 and second of described flange portion 23 regulates second of locating piece 52 to regulate locating piece 52 to be close to.
Refer to Fig. 8, the present invention also provides a kind of adjustment localization method of above-mentioned prism of corner cube, and it comprises the following steps:
Step S1: prism of corner cube is fixed in the locating slot of prism locating piece, and the main locating surface the first locating surface of described prism locating piece being adjacent to described location-plate, thus the optical axis realizing described prism of corner cube is parallel to ideally optical axis direction.
Step S2: described first regulates locating piece to compress the second locating surface of described prism locating piece, and described second regulates locating piece to compress the 3rd locating surface of described prism locating piece, measures the physical location of described prism of corner cube optical axis relative to described location-plate;
Step S3: the described prism of corner cube optical axis described physical location and theory calculate gone out compares relative to the position of described location-plate, calculates the deviate of described prism of corner cube optical axis measured value and theoretical value;
Step S4: calculate the reconditioning quality needed for described two groups of adjustment pads respectively according to described deviate;
Step S5: pull down described two groups and regulate pad, respectively according to described reconditioning quality described two groups are regulated to pad and carry out reconditioning or padded, more described two groups of spacer sheets are reinstalled original position, thus the location completing described prism of corner cube regulates.
Described method is further comprising the steps of after completing described step S5:
Step S6: measure the physical location of described prism of corner cube optical axis relative to described location-plate, the described prism of corner cube optical axis described physical location and theory calculate gone out compares relative to the position of described location-plate, as comparative result is consistent, process ends, inconsistent, get back to step S4, and proceed subsequent step, until the position consistency that physical location and theory calculate go out.
Compared to prior art, a kind of prism of corner cube regulating positioning device of the present invention and method are by being fixed in the locating slot of the triangular pyramidal shape of location-plate by prism of corner cube to be measured, and the first adjustment locating piece and the second adjustment locating piece are set on location-plate, the angle reference of described prism of corner cube is converted into the second locating surface on the prism locating piece parallel with prism of corner cube optical axis and the 3rd locating surface regulates, achieve diagonal cone prism and carry out hi-Fix and adjustment, and structure is simple, easy for installation.
Here description of the invention and application is illustrative, not wants by scope restriction of the present invention in the above-described embodiments.Distortion and the change of embodiment disclosed are here possible, are known for the replacement of embodiment those those of ordinary skill in the art and the various parts of equivalence.Those skilled in the art are noted that when not departing from spirit of the present invention or essential characteristic, the present invention can in other forms, structure, layout, ratio, and to realize with other assembly, material and parts.When not departing from the scope of the invention and spirit, can other distortion be carried out here to disclosed embodiment and change.
Claims (10)
1. a prism of corner cube regulating positioning device, is characterized in that, described prism of corner cube regulating positioning device comprises:
Prism locating piece, comprise the first locating surface and the locating slot for fixed angles cone prism, after described prism of corner cube is fixing by described locating slot, the optical axis of described prism of corner cube is perpendicular to described first locating surface, described prism locating piece also comprises the second locating surface and the 3rd locating surface that are parallel to described prism of corner cube optical axis, and described second locating surface is mutually vertical with the 3rd locating surface;
Location-plate, comprise the main locating surface perpendicular to described prism of corner cube ideally optical axis direction, and two are parallel to described prism of corner cube ideally optical axis direction and orthogonal side-locating face, when positioning described prism of corner cube, the first locating surface of described prism locating piece is close to the main locating surface of described location-plate;
Two pieces of locating pieces, be respectively the first adjustment locating piece, second and regulate locating piece, be fixed on described side-locating face each via bolt, and first regulates locating piece to contact with the second locating surface of described prism locating piece, and second regulates locating piece to contact with the 3rd locating surface of described prism locating piece;
Side compression assembly, described side compression assembly is used for applying wall pressure, in order to regulate locating piece and second to regulate locating piece to compress described prism locating piece and first to described prism locating piece;
Two groups regulate pad, are located between described locating piece and side-locating face, by changing the thickness regulating pad, for regulating prism of corner cube position from the direction being parallel to described main locating surface.
2. a kind of prism of corner cube regulating positioning device according to claim 1, is characterized in that, described side compression assembly is leaf spring compressing structure.
3. a kind of prism of corner cube regulating positioning device according to claim 1, is characterized in that, described prism locating piece comprises:
Flange portion, the first locating surface of described prism locating piece is positioned at described flange portion, and vertical with described flange portion central axial direction, and described locating slot is positioned at described flange portion center, is the groove of triangular pyramidal;
Axial part, extend from described first locating surface along described flange portion central axial direction, described axial part is arranged in described location-plate;
Ring flange, is located at one end of described axial part;
Pulling assembly, connects described ring flange and location-plate, in order to the main locating surface making the first locating surface of described prism locating piece push against described location-plate.
4. a kind of prism of corner cube regulating positioning device according to claim 3, is characterized in that, described flange portion is eight rib flange arrangements.
5. a kind of prism of corner cube regulating positioning device according to claim 4, is characterized in that, described pulling assembly is disc spring group.
6. a kind of prism of corner cube regulating positioning device according to claim 1, it is characterized in that, described prism of corner cube is fixed on described locating slot by bonding mode.
7. a kind of prism of corner cube regulating positioning device according to claim 3, it is characterized in that, described side compression assembly comprises the spring block, depression bar and the leaf spring that is located between described spring block and depression bar that are fixed on described location-plate prism, described depression bar one end is fixed on spring block by fixed mount, and the other end is held in the side compression face of the flange portion of prism locating piece.
8. a kind of prism of corner cube regulating positioning device according to claim 1, it is characterized in that, described location-plate also comprises installing described first and regulates locating piece and second to regulate the adjustment locating piece installation portion of locating piece, and the side-locating face of described location-plate is positioned on described adjustment locating piece installation portion.
9. utilize prism of corner cube regulating positioning device described in claim 1 to carry out prism of corner cube and regulate a method of locating, it is characterized in that, said method comprising the steps of:
Step S1: prism of corner cube is fixed in the locating slot of prism locating piece, and the main locating surface the first locating surface of described prism locating piece being adjacent to described location-plate, thus the optical axis realizing described prism of corner cube is parallel to ideally optical axis direction;
Step S2: described first regulates locating piece to compress the second locating surface of described prism locating piece, and described second regulates locating piece to compress the 3rd locating surface of described prism locating piece, measures the physical location of described prism of corner cube optical axis relative to described location-plate;
Step S3: the described prism of corner cube optical axis that described physical location and theory calculate go out compares relative to the position of described location-plate, calculates the deviate of described prism of corner cube optical axis measured value and theoretical value;
Step S4: calculate the reconditioning quality needed for described two groups of adjustment pads respectively according to described deviate;
Step S5: pull down described two groups and regulate pad, respectively according to described reconditioning quality described two groups are regulated to pad and carry out reconditioning or padded, more described two groups of spacer sheets are reinstalled original position, thus the location completing described prism of corner cube regulates.
10. a kind of prism of corner cube according to claim 9 regulates the method for location, and it is characterized in that, described method is further comprising the steps of after completing described step S5:
Step S6: measure the physical location of described prism of corner cube optical axis relative to described location-plate, the described prism of corner cube optical axis described physical location and theory calculate gone out compares relative to the position of described location-plate, as comparative result is consistent, process ends, inconsistent, get back to step S4, and proceed subsequent step, until the position consistency that physical location and theory calculate go out.
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| CN201210119679.7A CN103376530B (en) | 2012-04-20 | 2012-04-20 | A kind of prism of corner cube regulating positioning device and method |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201210119679.7A CN103376530B (en) | 2012-04-20 | 2012-04-20 | A kind of prism of corner cube regulating positioning device and method |
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| CN103376530B true CN103376530B (en) | 2015-08-26 |
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| CN103345038B (en) * | 2013-06-27 | 2015-05-27 | 中国科学院西安光学精密机械研究所 | Cube-corner prism vertical type optical axis determining system and method |
| CN104570272B (en) * | 2014-12-30 | 2017-02-22 | 中国科学院西安光学精密机械研究所 | Adjustment device for cube-corner prism dihedral angle error measurement |
| CN114114603B (en) * | 2021-11-26 | 2024-05-14 | 中国科学院微电子研究所 | Adjusting device and adjusting method thereof |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201222113Y (en) * | 2008-06-05 | 2009-04-15 | 天津工程师范学院 | Fixed device for contact type pyramid prism |
| CN101498830A (en) * | 2009-02-19 | 2009-08-05 | 天津工程师范学院 | Pyramid prism fixing device and method |
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| US20100284080A1 (en) * | 2007-09-24 | 2010-11-11 | Reflexite Corporation | Retroreflective structure with fabric face |
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Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201222113Y (en) * | 2008-06-05 | 2009-04-15 | 天津工程师范学院 | Fixed device for contact type pyramid prism |
| CN101498830A (en) * | 2009-02-19 | 2009-08-05 | 天津工程师范学院 | Pyramid prism fixing device and method |
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Address after: 201203 Pudong New Area East Road, No. 1525, Shanghai Patentee after: Shanghai microelectronics equipment (Group) Limited by Share Ltd Address before: 201203 Pudong New Area East Road, No. 1525, Shanghai Patentee before: Shanghai Micro Electronics Equipment Co., Ltd. |
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