CN103376530A - Cube-corner prism adjustment locating device and method - Google Patents
Cube-corner prism adjustment locating device and method Download PDFInfo
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- CN103376530A CN103376530A CN2012101196797A CN201210119679A CN103376530A CN 103376530 A CN103376530 A CN 103376530A CN 2012101196797 A CN2012101196797 A CN 2012101196797A CN 201210119679 A CN201210119679 A CN 201210119679A CN 103376530 A CN103376530 A CN 103376530A
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Abstract
The invention discloses a cube-corner prism adjustment locating device and method. The cube-corner prism adjustment locating device comprises a prism locating block, a locating plate, two locating blocks and two sets of adjustment gaskets. The prism locating block comprises a first locating face and a locating groove for fixing a cube-corner prism. After the cube-corner prism is fixed through the locating groove, the optical axis of the cube-corner prism is perpendicular to the first locating face. The prism locating block further comprises a second locating face and a third locating face which are parallel to the optical axis of the cube-corner prism. The second locating face and the third locating face are mutually perpendicular. The cube-corner prism adjustment locating device and method achieve the high-precision locating and the high-precision adjustment on the cube-corner prism, and are simple in structure and convenient to install.
Description
Technical field
The present invention relates to technical field of lithography, especially relate to a kind of prism of corner cube regulating positioning device and method.
Background technology
Prism of corner cube is a kind of can having three light reflection surfaces that mutual verticality is high, and be not common oblate body profile lens incident light with the optical element that almost parallel mode reflects back, and its function has determined that its profile is comparatively special.
At present, the localization method of optical element is normally satisfying under the prerequisite of bearing accuracy, selects the locating surface vertical with orientation as far as possible, and for general optical element, the method can realize high-precision location.
But there is following defective in said method when the diagonal cone prism is located:
(1) in some cases, according to calculated best theoretical position and the attitude of prism of corner cube with respect to location-plate according to theory, relative this position and attitude misalignment are less during the orientation angle cone prism, corresponding product degree of regulation is also just higher, so prism of corner cube accurately need to be positioned near the theoretical calculating location of relative positioning workpiece, positioning accuracy request reaches 0.01mm, can only reach 0.2mm but the locating surface dimensional accuracy of prism of corner cube own is the highest, exceed 20 times of accuracy requirement, can not meet the demands far away;
(2) the prism of corner cube profile is irregular, and the high-precision fixed plane perpendicular or parallel with required orientation do not cause location-plate and can't locate by said method;
(3) because the diameter of prism of corner cube is less, and the closer to central optical axis performance better (the reflected light depth of parallelism is higher), and the adjustment that said method will be done in a big way when the adjusting of location usually catches reflected light, be difficult to realize so the accurate location of diagonal cone prism, and the position location of prism of corner cube relative positioning plate must be as far as possible near theoretical value, and namely bearing accuracy is high could reduce because making and the impact of build-up tolerance on range of adjustment.
Summary of the invention
Technical matters to be solved by this invention is: can't carry out hi-Fix and adjusting by the diagonal cone prism.For solving the problems of the technologies described above, the present invention adopts following technical scheme:
A kind of prism of corner cube regulating positioning device comprises:
The prism locating piece, comprise that the first locating surface reaches the locating slot that is used for the fixed angles cone prism, after described prism of corner cube is fixing by described locating slot, the optical axis of described prism of corner cube is perpendicular to described the first locating surface, described prism locating piece also comprises the second locating surface and the 3rd locating surface that is parallel to described prism of corner cube optical axis, and described the second locating surface is mutually vertical with the 3rd locating surface;
Location-plate, comprise the main locating surface perpendicular to optical axis direction under the described prism of corner cube perfect condition, and two be parallel to optical axis direction and orthogonal side-locating face under the described prism of corner cube perfect condition, when described prism of corner cube was positioned, the first locating surface of described prism locating piece was close to the main locating surface of described location-plate;
Two locating pieces, be respectively first and regulate locating piece, the second adjusting locating piece, be bolted separately in described side-locating face, and first the second locating surface of regulating locating piece and described prism locating piece contact, and the 3rd locating surface of the second adjusting locating piece and described prism locating piece contacts;
Regulate pad for two groups, be located between described locating piece and the side-locating face, by changing the thickness of regulating pad, be used for regulating the prism of corner cube position from the direction that is parallel to described main locating surface.
Further, also be provided with the side compression assembly on the described location-plate, described side compression assembly is used for described prism locating piece is applied wall pressure, regulates the locating piece compression in order to described prism locating piece and first is regulated locating piece and second.
Further, described side compression assembly is the leaf spring compressing structure.
Further, described prism locating piece comprises:
Flange portion, the first locating surface of described prism locating piece is positioned at described flange portion, and vertical with described flange portion central axial direction, and described locating slot is positioned at described flange portion center, is the groove of triangular pyramidal;
Axial part is extended along described flange portion central axial direction from described the first locating surface, and described axial part is arranged in described location-plate;
Ring flange is located at an end of described axial part;
Pulling assembly connects described ring flange and location-plate, uses so that the first locating surface of described prism locating piece pushes against the main locating surface of described location-plate.
Further, described flange portion is eight rib flange arrangements.
Further, described pulling assembly is dish spring group.
Further, described prism of corner cube is fixed on the described locating slot by bonding mode.
Further, described side compression assembly comprises spring block, the depression bar that is fixed in described location-plate prism and is located in leaf spring between described spring block and the depression bar, described depression bar one end is fixed on the spring block by fixed mount, and the other end is held in the side compression face of the flange portion of prism locating piece.
Further, described location-plate also comprises installing described first and regulates the adjusting locating piece installation portion that locating piece and second is regulated locating piece, and the side-locating face of described location-plate is positioned on the described adjusting locating piece installation portion.
The present invention also provides a kind of adjusting localization method of above-mentioned prism of corner cube, said method comprising the steps of:
Step S1: prism of corner cube is fixed in the locating slot of prism locating piece, and the first locating surface of described prism locating piece is adjacent to the main locating surface of described location-plate, thereby the optical axis of realizing described prism of corner cube is parallel to optical axis direction under the perfect condition.
Step S2: described first regulates the second locating surface that locating piece compresses described prism locating piece, and described second regulates the 3rd locating surface that locating piece compresses described prism locating piece, measures described prism of corner cube optical axis with respect to the physical location of described location-plate;
Step S3: described physical location and the position of the theoretical described prism of corner cube optical axis that calculates with respect to described location-plate are compared, calculate the deviate of described prism of corner cube optical axis measured value and theoretical value;
Step S4: calculate respectively described two groups according to described deviate and regulate the required reconditioning quality of pad;
Step S5: pull down described two groups and regulate pad, respectively described two groups are regulated pad and carry out reconditioning or bed hedgehopping according to described reconditioning quality, more described two groups of spacer sheets are reinstalled original position, thereby the location of finishing described prism of corner cube is regulated.
Further, described method is further comprising the steps of after finishing described step S5:
Step S6: measure described prism of corner cube optical axis with respect to the physical location of described location-plate, described physical location and the position of the theoretical described prism of corner cube optical axis that calculates with respect to described location-plate are compared, consistent such as comparative result, process ends, the inconsistent step S4 that then gets back to, and proceed subsequent step, until physical location and the theoretical position consistency that calculates.
In the locating slot of a kind of prism of corner cube regulating positioning device of the present invention and the method pyrometric cone shape by prism of corner cube to be measured being fixed in location-plate, and arrange first at location-plate and regulate locating piece and second and regulate locating piece, the second locating surface and the 3rd locating surface that the angle reference of described prism of corner cube is converted on the prism locating piece parallel with the prism of corner cube optical axis are regulated, realized that the diagonal cone prism carries out hi-Fix and adjusting, and simple in structure, easy for installation.
Description of drawings
Fig. 1 is the structural representation of a kind of prism of corner cube regulating positioning device one embodiment of the present invention;
Fig. 2 is the front schematic view of prism of corner cube regulating positioning device among Fig. 1;
Fig. 3 is the structural representation of prism locating piece among Fig. 1;
Fig. 4 is the side view of prism locating piece among Fig. 1;
Fig. 5 is the front elevation of prism locating piece among Fig. 1;
Fig. 6 is the structural representation of another angle of a kind of prism of corner cube regulating positioning device of the present invention;
Fig. 7 is the structural representation of another angle of a kind of prism of corner cube regulating positioning device of the present invention;
Fig. 8 is the schematic flow sheet of the adjusting localization method of a kind of prism of corner cube of the present invention.
Embodiment
Describe the preferred embodiments of the present invention in detail below in conjunction with accompanying drawing.
See also Fig. 1, Fig. 2 and Fig. 4, a kind of prism of corner cube regulating positioning device of the present invention comprises location-plate 1, prism locating piece 2, two locating pieces and two groups of adjusting pads, described prism locating piece 2 comprises the first locating surface 20 (seeing Fig. 4) and is used for the locating slot 22 of fixed angles cone prism, after described prism of corner cube 3 is fixed by described locating slot 22, the optical axis 32 of described prism of corner cube 3 is perpendicular to described the first locating surface 20, described prism locating piece 2 also comprises the second locating surface 24 and the 3rd locating surface 26 that is parallel to described prism of corner cube 3 optical axises 32, and described the second locating surface 24 is mutually vertical with the 3rd locating surface 26.
Described location-plate 1 comprises the main locating surface 12 perpendicular to optical axis direction under described prism of corner cube 3 perfect conditions, and two be parallel to optical axis direction and orthogonal side-locating face 14,16 under described prism of corner cube 3 perfect conditions, when described prism of corner cube 3 was positioned, the first locating surface 20 of described prism locating piece 2 was close to the main locating surface 12 of described location-plate 1;
Described two locating pieces are respectively first and regulate locating piece 42, the second adjusting locating piece 52, be bolted separately in described side-locating face 14,16, and first the second locating surface 24 of regulating locating piece 42 and described prism locating piece 2 contacts, and the second the 3rd locating surface 26 of regulating locating piece 52 and 2 of described prism location contacts;
Described two groups of adjusting pads are located between described locating piece and the side-locating face 14,16, by changing the thickness of regulating pad, are used for regulating prism of corner cube 3 positions from the direction that is parallel to described main locating surface 12.
For described prism locating piece 2 and described two locating pieces are compressed, also be provided with side compression assembly 6 on the described location-plate 1, described side compression assembly 6 can apply wall pressure to described prism locating piece 2, regulate locating piece 52 compressions described prism locating piece 2 and first is regulated locating piece 42, second, can improve like this first and regulate the accuracy that locating piece 42, second is regulated locating piece 52 adjustings, and diagonal cone prism 3 carries out hi-Fix and adjusting.
Described location-plate 1 also comprises installing described first and regulates the adjusting locating piece installation portion 10 that locating piece 42 and second is regulated locating piece 52, and the side-locating face 14,16 of described location-plate 1 is positioned on the described adjusting locating piece installation portion 10.
See also Fig. 3 to Fig. 5, described prism locating piece 2 is hollow eight rib flange arrangements, it further comprises a flange portion 23 and by the axial part 25 of extending along described flange portion 23 central axial direction from described the first locating surface 20, described axial part 25 is arranged in described location-plate 1.
Described flange portion 23 is eight prism shapes, and the first locating surface 20 of described prism locating piece 2 is positioned at described flange portion 23, and vertical with described flange portion 23 central axial direction; Described the second locating surface 24 is located on the described flange portion 23 and is pushed against described first and regulates locating piece 42, described the 3rd locating surface 26 is located on the described flange portion 23 and is pushed against described second and regulates locating piece 52, and described flange portion 23 also comprises the side compression face 236 (seeing Fig. 5) that pushes against in described side compression assembly 6.
Described locating slot 22 is opened in the center of flange portion 23, and be the groove of pyrometric cone shape, described prism of corner cube 3 is fixed on the described locating slot 22 by bonding mode, three groove faces 222 of described locating slot 22 are corresponding with three reflectings surface of prism of corner cube 3, make prism of corner cube 3 with can fit three groove faces 222 of described locating slot 22 of three reflectings surface, the optical axis 32 of described like this prism of corner cube 3 just coincides with flange center's axis (perpendicular to described flange portion 23 centers) of described prism locating piece 2, and flange center's axis of described prism locating piece 2 can be regulated mobile by the first adjusting locating piece 42 and the second adjusting locating piece 52, the angle reference of described like this prism of corner cube 3 just by 2 conversions of prism locating piece for the 3rd locating surface 26 on the second locating surface 24 (being the back side of flange portion 23) on the prism locating piece 2 parallel with prism of corner cube 3 optical axises 32 and the prism locating piece 2 parallel with prism of corner cube 3 optical axises 32, so described prism locating piece 2 drives prism of corner cube 3 and can regulate at the second locating surface 24 and the 3rd locating surface 26 location by the first adjusting locating piece 42 and the second adjusting locating piece 52, thereby realize hi-Fix and the adjusting of diagonal cone prism 3.
See also Fig. 6, Fig. 7, axial part 25 1 ends of described prism locating piece 2 are provided with a circular flange dish 27, described ring flange 27 and location-plate 1 are connected with pulling assembly 7, use so that the first locating surface 20 of described prism locating piece 2 pushes against the main locating surface 12 of described location-plate 1.In the present embodiment, described pulling assembly 7 is dish spring group, and its spring power can be fitted in the first locating surface 20 tensions of prism locating piece 2 on the main locating surface 12 of described location-plate 1.
See also Fig. 1 to Fig. 7, described the first adjusting locating piece 42 and second is regulated locating piece 52 and is bolted respectively on the side-locating face 14,16 of described location-plate 1, and described the first adjusting locating piece 42 pushes against the second locating surface 24 in flange portion 23, described the second adjusting locating piece 52 pushes against the 3rd locating surface 26 in flange portion 23, is folded with first between described the first adjusting locating piece 42 and the side-locating face 14 and regulates pad 44; Be folded with second between the side-locating face 16 of described the second adjusting locating piece 52 and described positioning panel and regulate pad 54.Just can regulate from the direction that is parallel to described main locating surface 12 position of prism of corner cube 3 by adjusting the first thickness of regulating pad 44 and the second adjusting pad 54.
Described side compression assembly 6 comprises spring block 62, the depression bar 64 that is fixed in described location-plate 1 prism and is located in leaf spring 66 between described spring block 62 and the depression bar 64, described depression bar 64 1 ends are fixed on the spring block 62 by fixed mount 68, and the other end is held in the side compression face 236 of the flange portion 23 of prism locating piece 2.By regulating the thickness of leaf spring 6, just can obtain the corresponding snap-in force that varies in size, thereby the second locating surface 24 of described flange portion 23 and the first adjusting locating piece 42 of the first adjusting locating piece 42 are close to, and the second adjusting locating piece 52 of the 3rd locating surface 26 of described flange portion 23 and the second adjusting locating piece 52 is close to.
See also Fig. 8, the present invention also provides a kind of adjusting localization method of above-mentioned prism of corner cube, and it may further comprise the steps:
Step S1: prism of corner cube is fixed in the locating slot of prism locating piece, and the first locating surface of described prism locating piece is adjacent to the main locating surface of described location-plate, thereby the optical axis of realizing described prism of corner cube is parallel to optical axis direction under the perfect condition.
Step S2: described first regulates the second locating surface that locating piece compresses described prism locating piece, and described second regulates the 3rd locating surface that locating piece compresses described prism locating piece, measures described prism of corner cube optical axis with respect to the physical location of described location-plate;
Step S3: described physical location and the position of the theoretical described prism of corner cube optical axis that calculates with respect to described location-plate are compared, calculate the deviate of described prism of corner cube optical axis measured value and theoretical value;
Step S4: calculate respectively described two groups according to described deviate and regulate the required reconditioning quality of pad;
Step S5: pull down described two groups and regulate pad, respectively described two groups are regulated pad and carry out reconditioning or bed hedgehopping according to described reconditioning quality, more described two groups of spacer sheets are reinstalled original position, thereby the location of finishing described prism of corner cube is regulated.
Described method is further comprising the steps of after finishing described step S5:
Step S6: measure described prism of corner cube optical axis with respect to the physical location of described location-plate, described physical location and the position of the theoretical described prism of corner cube optical axis that calculates with respect to described location-plate are compared, consistent such as comparative result, process ends, the inconsistent step S4 that then gets back to, and proceed subsequent step, until physical location and the theoretical position consistency that calculates.
Than prior art, in the locating slot of a kind of prism of corner cube regulating positioning device of the present invention and the method pyrometric cone shape by prism of corner cube to be measured being fixed in location-plate, and arrange first at location-plate and regulate locating piece and second and regulate locating piece, the second locating surface and the 3rd locating surface that the angle reference of described prism of corner cube is converted on the prism locating piece parallel with the prism of corner cube optical axis are regulated, realized that the diagonal cone prism carries out hi-Fix and adjusting, and simple in structure, easy for installation.
Here description of the invention and application is illustrative, is not to want with scope restriction of the present invention in the above-described embodiments.Here the distortion of disclosed embodiment and change is possible, and the various parts of the replacement of embodiment and equivalence are known for those those of ordinary skill in the art.Those skilled in the art are noted that in the situation that does not break away from spirit of the present invention or essential characteristic, and the present invention can be with other form, structure, layout, ratio, and realize with other assembly, material and parts.In the situation that does not break away from the scope of the invention and spirit, can carry out other distortion and change to disclosed embodiment here.
Claims (11)
1. a prism of corner cube regulating positioning device is characterized in that, described prism of corner cube regulating positioning device comprises:
The prism locating piece, comprise that the first locating surface reaches the locating slot that is used for the fixed angles cone prism, after described prism of corner cube is fixing by described locating slot, the optical axis of described prism of corner cube is perpendicular to described the first locating surface, described prism locating piece also comprises the second locating surface and the 3rd locating surface that is parallel to described prism of corner cube optical axis, and described the second locating surface is mutually vertical with the 3rd locating surface;
Location-plate, comprise the main locating surface perpendicular to optical axis direction under the described prism of corner cube perfect condition, and two be parallel to optical axis direction and orthogonal side-locating face under the described prism of corner cube perfect condition, when described prism of corner cube was positioned, the first locating surface of described prism locating piece was close to the main locating surface of described location-plate;
Two locating pieces, be respectively first and regulate locating piece, the second adjusting locating piece, be bolted separately in described side-locating face, and first the second locating surface of regulating locating piece and described prism locating piece contact, and the 3rd locating surface of the second adjusting locating piece and described prism locating piece contacts;
Regulate pad for two groups, be located between described locating piece and the side-locating face, by changing the thickness of regulating pad, be used for regulating the prism of corner cube position from the direction that is parallel to described main locating surface.
2. a kind of prism of corner cube regulating positioning device according to claim 1, it is characterized in that, also be provided with the side compression assembly on the described location-plate, described side compression assembly is used for described prism locating piece is applied wall pressure, regulates the locating piece compression in order to described prism locating piece and first is regulated locating piece and second.
3. a kind of prism of corner cube regulating positioning device according to claim 2 is characterized in that, described side compression assembly is the leaf spring compressing structure.
4. a kind of prism of corner cube regulating positioning device according to claim 1 and 2 is characterized in that, described prism locating piece comprises:
Flange portion, the first locating surface of described prism locating piece is positioned at described flange portion, and vertical with described flange portion central axial direction, and described locating slot is positioned at described flange portion center, is the groove of triangular pyramidal;
Axial part is extended along described flange portion central axial direction from described the first locating surface, and described axial part is arranged in described location-plate;
Ring flange is located at an end of described axial part;
Pulling assembly connects described ring flange and location-plate, uses so that the first locating surface of described prism locating piece pushes against the main locating surface of described location-plate.
5. a kind of prism of corner cube regulating positioning device according to claim 4 is characterized in that, described flange portion is eight rib flange arrangements.
6. a kind of prism of corner cube regulating positioning device according to claim 5 is characterized in that, described pulling assembly is dish spring group.
7. a kind of prism of corner cube regulating positioning device according to claim 1 is characterized in that described prism of corner cube is fixed on the described locating slot by bonding mode.
8. a kind of prism of corner cube regulating positioning device according to claim 4, it is characterized in that, described side compression assembly comprises spring block, the depression bar that is fixed in described location-plate prism and is located in leaf spring between described spring block and the depression bar, described depression bar one end is fixed on the spring block by fixed mount, and the other end is held in the side compression face of the flange portion of prism locating piece.
9. a kind of prism of corner cube regulating positioning device according to claim 1, it is characterized in that, described location-plate also comprises installing described first and regulates the adjusting locating piece installation portion that locating piece and second is regulated locating piece, and the side-locating face of described location-plate is positioned on the described adjusting locating piece installation portion.
10. one kind is utilized the described prism of corner cube regulating positioning device of claim 1 to carry out the method that prism of corner cube is regulated the location, it is characterized in that, said method comprising the steps of:
Step S1: prism of corner cube is fixed in the locating slot of prism locating piece, and the first locating surface of described prism locating piece is adjacent to the main locating surface of described location-plate, thereby the optical axis of realizing described prism of corner cube is parallel to optical axis direction under the perfect condition;
Step S2: described first regulates the second locating surface that locating piece compresses described prism locating piece, and described second regulates the 3rd locating surface that locating piece compresses described prism locating piece, measures described prism of corner cube optical axis with respect to the physical location of described location-plate;
Step S3: described physical location and the position of the theoretical described prism of corner cube optical axis that calculates with respect to described location-plate are compared, calculate the deviate of described prism of corner cube optical axis measured value and theoretical value;
Step S4: calculate respectively described two groups according to described deviate and regulate the required reconditioning quality of pad;
Step S5: pull down described two groups and regulate pad, respectively described two groups are regulated pad and carry out reconditioning or bed hedgehopping according to described reconditioning quality, more described two groups of spacer sheets are reinstalled original position, thereby the location of finishing described prism of corner cube is regulated.
11. a kind of prism of corner cube according to claim 10 is regulated the method for location, it is characterized in that described method is further comprising the steps of after finishing described step S5:
Step S6: measure described prism of corner cube optical axis with respect to the physical location of described location-plate, described physical location and the position of the theoretical described prism of corner cube optical axis that calculates with respect to described location-plate are compared, consistent such as comparative result, process ends, the inconsistent step S4 that then gets back to, and proceed subsequent step, until physical location and the theoretical position consistency that calculates.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210119679.7A CN103376530B (en) | 2012-04-20 | 2012-04-20 | A kind of prism of corner cube regulating positioning device and method |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210119679.7A CN103376530B (en) | 2012-04-20 | 2012-04-20 | A kind of prism of corner cube regulating positioning device and method |
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| CN103376530A true CN103376530A (en) | 2013-10-30 |
| CN103376530B CN103376530B (en) | 2015-08-26 |
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| CN201210119679.7A Active CN103376530B (en) | 2012-04-20 | 2012-04-20 | A kind of prism of corner cube regulating positioning device and method |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103345038A (en) * | 2013-06-27 | 2013-10-09 | 中国科学院西安光学精密机械研究所 | Cube-corner prism vertical optical axis-fixing system and method |
| CN104570272A (en) * | 2014-12-30 | 2015-04-29 | 中国科学院西安光学精密机械研究所 | Pyramid prism dihedral angle error measurement adjusting device |
| CN114114603A (en) * | 2021-11-26 | 2022-03-01 | 中国科学院微电子研究所 | Adjusting device and adjusting method thereof |
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| WO2009042118A1 (en) * | 2007-09-24 | 2009-04-02 | Reflexite Corporation | Retroreflective structure with fabric face |
| CN201222113Y (en) * | 2008-06-05 | 2009-04-15 | 天津工程师范学院 | Fixed device for contact type pyramid prism |
| CN101498830A (en) * | 2009-02-19 | 2009-08-05 | 天津工程师范学院 | Pyramid prism fixing device and method |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| WO2009042118A1 (en) * | 2007-09-24 | 2009-04-02 | Reflexite Corporation | Retroreflective structure with fabric face |
| CN201222113Y (en) * | 2008-06-05 | 2009-04-15 | 天津工程师范学院 | Fixed device for contact type pyramid prism |
| CN101498830A (en) * | 2009-02-19 | 2009-08-05 | 天津工程师范学院 | Pyramid prism fixing device and method |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103345038A (en) * | 2013-06-27 | 2013-10-09 | 中国科学院西安光学精密机械研究所 | Cube-corner prism vertical optical axis-fixing system and method |
| CN103345038B (en) * | 2013-06-27 | 2015-05-27 | 中国科学院西安光学精密机械研究所 | Cube-corner prism vertical optical axis-fixing system and method |
| CN104570272A (en) * | 2014-12-30 | 2015-04-29 | 中国科学院西安光学精密机械研究所 | Pyramid prism dihedral angle error measurement adjusting device |
| CN114114603A (en) * | 2021-11-26 | 2022-03-01 | 中国科学院微电子研究所 | Adjusting device and adjusting method thereof |
| CN114114603B (en) * | 2021-11-26 | 2024-05-14 | 中国科学院微电子研究所 | Adjusting device and adjusting method thereof |
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| CN103376530B (en) | 2015-08-26 |
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Address after: 201203 Pudong New Area East Road, No. 1525, Shanghai Patentee after: Shanghai microelectronics equipment (Group) Limited by Share Ltd Address before: 201203 Pudong New Area East Road, No. 1525, Shanghai Patentee before: Shanghai Micro Electronics Equipment Co., Ltd. |