CN104972271B - A kind of micro structure array device mold core making process - Google Patents
A kind of micro structure array device mold core making process Download PDFInfo
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- CN104972271B CN104972271B CN201510193828.8A CN201510193828A CN104972271B CN 104972271 B CN104972271 B CN 104972271B CN 201510193828 A CN201510193828 A CN 201510193828A CN 104972271 B CN104972271 B CN 104972271B
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- cylinder fixture
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
- B23P15/00—Making specific metal objects by operations not covered by a single other subclass or a group in this subclass
- B23P15/007—Making specific metal objects by operations not covered by a single other subclass or a group in this subclass injection moulding tools
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q3/00—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
- B23Q3/12—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine for securing to a spindle in general
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q2703/00—Work clamping
- B23Q2703/02—Work clamping means
- B23Q2703/10—Devices for clamping workpieces of a particular form or made from a particular material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C33/00—Moulds or cores; Details thereof or accessories therefor
- B29C33/76—Cores
Abstract
The present invention provides a kind of micro structure array device mold core making process, including：(1) sheet metal for preparing injection core is prepared；(2) cylinder fixture is prepared；(3) cylinder fixture is installed on machining tool, ultra precision cutting is carried out to cylindrical side；(4) sheet metal is wrapped in column base, and fastens cylinder fixture；(5) cylindrical side of coated metal thin slice is cut again；(6) cylinder fixture, measurement cylindrical radius R are removed；(7) according to the cylindrical radius R tested, and combine processed micro-structural profile and be processed path design；(8) microstructure unit processing is carried out；(9) processing micro structure region is cut out and suitably flattened and be used as injection core.In the manufacture of micro structure array device, using the present invention mold core making process and and carry out injection molding, it is possible to achieve ensure the stability of cutting state so as to ensure the face shape uniformity of microstructure unit.
Description
Art
The invention belongs to Precision Manufacturing Technology field, is related to a kind of micro structure array device making method.
Background technology
Micro-structural is usually the repeated combination by a large amount of minute cells, and minute cells are typically distributed across in planar substrates.Work(
Energy property micro-structural is formerly entered in optical system to be widely used, and can reduce system dimension by periodic structure, and reach and expect not
The specific function arrived.For example mobile lens thickness can be shortened to hundreds of microns by microlens array from 3 millimeters, while can
The imaging system depth of field is greatly enhanced to be assemblied in common lens.Microprism array is made up of a series of small four sides pyramids,
With high-efficient retroreflective optical property, it is widely used in the making of traffic warning board.
It is increasing for the size requirements of micro structural component in order to coordinate larger range of application, while needed in applying
Each micro unit is wanted to have the face shape uniformity of height.But the mode of current photoetching or laser direct-writing is limited by technique, no
Only high processing costs, and realize that the uniformity of micro unit is more difficult.And common single-crystal diamond cutting process, to realize big model
The processing of peripheral device by large range of line slideway, it is necessary to move, by the shakiness of environmental stability and cutting tool state
Fixed to wait limitation, processing technology is it is difficult to ensure that for a long time and long range is consistent, therefore, also compare the height for being difficult to microstructure unit
Face shape uniformity.
The content of the invention
The present invention is intended to provide a kind of micro structure array device mold core making process, in the manufacture of micro structure array device,
Injection molding is carried out again after preparing core rod using the mold core making process of the present invention, it is possible to achieve a wide range of micro structure array device
High efficiency, low cost manufacture, while ensure the stability of cutting state so as to ensure the face shape high consistency of microstructure unit.
Technical scheme is as follows：
(1) sheet metal 1 for preparing injection core is prepared；
(2) cylinder fixture 22 is prepared, can range of work selection column base 2 according to machining tool；In column base appearance
Face offers the groove 3 of the part for fixing fastening metal thin slice 1 vertically；The part of fastening metal thin slice 1 is two flat
Plate 4, for clamping the both ends of sheet metal 1, flat board 4 is located in groove 3 and is connected with column base 2；
(3) cylinder fixture 22 is installed on machining tool, machine is fixed in one end of cylinder fixture 22 by vacuum suction
Bed main shaft 23, the vertical cylinder substrate axis of diamond cutter 22 are placed, and superfinishing is carried out to cylindrical side using diamond cutter 22
Cut closely, ensure that surfacing is smooth, cylinder fixture 22 is removed after completion of processing；
(4) sheet metal 1 is wrapped in column base 2, and fastening cylinder fixture 22 makes sheet metal compress cylinder base
The surface at bottom 2, and be installed on again on machining tool together；
(5) cylindrical side of coated metal thin slice 1 is cut again, ensures that surfacing is smooth；
(6) the cylinder fixture 22 of coated metal thin slice is removed, measures cylindrical radius R, and again by coated metal thin slice
Cylinder fixture 22 is fixed on machining tool；
(7) according to the cylindrical radius R tested, and combine processed micro-structural profile and be processed path design；
(8) microstructure unit processing is carried out；
(9) after processing micro-structural, loose unloading cylinder fixture, the sheet metal after processing is peeled off from cylinder fixture, it is right
Processing micro structure region, which is cut out and suitably flattened, is used as injection core 7.
In the manufacture of micro structure array device, carry out being molded again adding after preparing core rod using the mold core making process of the present invention
Work, the batch micro operations of a wide range of high uniformity micro structure array device of face shape can be achieved.Manufacture method has processing cost low, adds
Work efficiency high, machining state and stability are high, thus it is guaranteed that high consistency unit micro structural component.
Brief description of the drawings
Fig. 1：The process chart of the present invention, in figure：
Step 1：Wrap sheet metal；
Step 2：Micro-structural is processed；
Step 3：Stripping metal thin slice；
Step 4：It is sheet metal core rod to cut out pressing；
Step 5：Core rod assembles；
Step 6：The curved surface that is stressed flattens；
Step 7：Shooting Technique produces micro structural component
Fig. 2 cylinders fixture and sheet metal fix schematic diagram
Fig. 3 cylinder fixtures are installed on lathe and carry out micro-structural machining sketch chart
Fig. 4 microlens arrays machining path designs
Fig. 5 micro lensed portion unit profile test datas
Description of reference numerals is as follows：
1 sheet metal；2 column bases；3 grooves；4 flat boards；5 screws；6 cylindrical end face pressure disks；7 injection cores；Injection
Mould bases 8；21 main shafts；22 accompany the cylinder fixture of sheet metal；23 diamond cutters
Embodiment
The techniqueflow of the present invention is as shown in Figure 1.Sheet metal 1 is wrapped in a smooth column base of surfacing
On 2, the sheet metal specific region processing micro structure that is wrapped up with cylinder processing mode in cylinder, by the sheet metal 1 after processing
Peeled off from column base 2, processing micro structure region is cut out and suitably pressing is used as injection core.Core rod is installed on
On injection mould base, due to by injection machine internal pressure, sheet metal meeting nature flattening, so as to carry out micro- knot in injection moulding process
The injection of structure product.
Sheet metal 1 is fixed in column base 2 and needs to fasten it, it is therefore desirable to the fixture of design specialized.Fig. 2
It is the schematic diagram of fixture.There is a groove 3 to be used for the part for fixing fastening metal thin slice 1 in column base 2.Fastening metal is thin
The part of piece 1 is two flat boards 4, and for clamping the both ends of sheet metal 1, flat board 4 is fixed in column base 2 by screw 5,
It can lift flat board by parbuckle screw, so as to reach the purpose that sheet metal compressed or left periphery.Meanwhile cylinder
There are two outward flanges for being used to compress sheet metal with reeded flat board at both ends, ensure the fastening of marginal portion.
Cylinder stationary fixture 22, which is installed on machining tool, realizes that micro-structural is processed, and schematic diagram is as shown in Figure 3.Machining tool
, can be with the machine tool chief axis C axles of precise control of angular degree, and linear motion axis X-axis and Z comprising one using three axle super precision lathes
Axle.Machine tool chief axis 21, slow knife of the diamond cutter 23 in three kinematic axis are fixed in one end of cylinder fixture by vacuum suction
Processing micro structure, specific machining path design need true according to type of microstructure is processed on periphery under SERVO CONTROL
It is fixed.Due to micro-structural is worked into periphery, main shaft every revolution can be achieved with row microstructure unit processing, therefore, add
Work efficiency rate is improved significantly；Further, since cylinder processing mode, the move distance of cutter greatly shortens, and therefore, processing is stable
Property is improved very well.Meanwhile the position relationship of processing each unit cutter and workpiece is just as, so as to ensure that cutting
The uniformity of state, therefore, it can obtain the high consistent elementary microstructure device of face shape.
In a specific implementation process, microlens array is processed, such device is built applied to light-field camera,
The anti-APS-C sensors of common list are coordinated to use, size is about 25mm × 18mm, is international like product (Lytro companies illum
Series is more than 4 times of 1/1.2 ") size.Microlens array unit size is 60um, unit rise difference 850nm, altogether 415 ×
291 units.Process equipment is three axle super precision lathe 250UPL of Moore Nanotech companies, and sheet metal uses brass
Material, body diameter 60mm, cutter use arc-blade diamond cutter of the nose radius for 0.5mm.
Fig. 4 shows the machining path design method for processing the device.Plan processing device is planar substrates, ideal model
Shown on the left of Fig. 4, such as it is processed according to the figure, diamond cutter 21 is according to required machining profile cutting respective paths
Can, the coordinate system of the model is labeled as X ' Y ' Z '.When progress cylinder mode is processed, it is necessary to which model coordinate systems X ' Y ' Z ' are turned
For Cutter coordinate system XYZ, i.e. schematic diagram shown in Fig. 4 right sides.Mapping mode such as following formula,
R is cylindrical radius in above formula.Being switched to the XZC machining coordinates needed for three axle ultra-precision machine tools is,
Machining path is can obtain according to required machining profile according to above formula node-by-node algorithm respectively.Meanwhile in order to keep away
Exempt from the unsmooth problem of machining path in process, employ the mode processed twice.As shown in figure 4, one strip array of processing
Two smooth machining paths are respectively adopted in unit, such as the path 1 and path 2 that are marked in figure.Wherein every machining path work sheet
Member is spaced a unit, and the not machining cell on every paths supplements a circular arc path for being higher than finished surface, the section
Path due to higher than finished surface without being processed to surface, and supplement circular arc path and adjacent cutting path smooth chain
Connect, ensure that the stabilization of the smooth and process of whole piece machining path.
After accordingly cutting out the latten after processing, it is fixed in mould bases to enter in the micro-injection molding machine of Fanuc companies
The manufacture of row corresponding product, product material PMMA.Dependence test is carried out to evaluate processing side to the product surface of PMMA materials
The validity of method.Fig. 5 is the profile diagram to wherein 21 × 21 unit testings using Zygo Nexview white light interferometers, is intercepted
One, profile top transversal, measurement distance 1.26mm.Through measuring and evaluating, the average value of unit size is 60.189 μ
M, standard deviation are 0.123 μm；The mark of minimax scope is carried out to the peak valley region for measuring profile, carrys out evaluation unit profile
Rise it is poor, average value 860.18nm, standard deviation is 20.77nm.Simultaneously to the face shape error of Unit 3 × 3 therein
Measure and evaluate, the result of face shape error is as shown in table 1, average value 72.89nm, standard deviation 13.85nm.Relatively
What less standard deviation demonstrated processing device has good uniformity.
The elemental area shape error statistics data of table 13 × 3
The microlens array device of general 10mm × 10mm scopes is processed using conventional lithographic techniques more, and the processing instance
In device size typically limited and can not be processed or processing cost is high by technique.The side of Ultra-precision Turning is used in the present invention
Method is processed, and has obtained uniformity and the good device mould of surface quality.By injection molding technology batch micro operations device into
Work(is installed on the shooting that Canon 700D slr cameras carry out light field image.It is anti-to be used for common list for microlens array device batch
Camera realizes that light field function provides strong technical guarantee.
Claims (1)
1. a kind of micro structure array device mold core making process, including following step：
(1) sheet metal (1) for preparing injection core is prepared；
(2) cylinder fixture (22) is prepared, can range of work selection column base (2) according to machining tool；The edge in column base
Axially offer the groove (3) of the part for fixing fastening metal thin slice (1)；The part of fastening metal thin slice (1) is two
Flat board (4), for clamping the both ends of sheet metal (1), flat board (4) is located in groove (3) and is connected with column base (2), circle
The radius at base for post bottom (2) is R；
(3) cylinder fixture (22) is installed on machining tool, machine is fixed in one end of cylinder fixture (22) by vacuum suction
Bed main shaft (23), diamond cutter (21) vertical cylinder substrate axis are placed, cylindrical side are entered using diamond cutter (21)
Row ultra precision cutting, ensure that surfacing is smooth, cylinder fixture (22) is removed after completion of processing；
(4) sheet metal (1) is wrapped in column base (2), and fastening cylinder fixture (22) makes sheet metal compress cylinder
The surface of substrate (2), and be installed on again on machining tool together；
(5) cylindrical side of coated metal thin slice (1) is cut again, ensures that surfacing is smooth；
(6) the cylinder fixture (22) of coated metal thin slice is removed, the cylindrical radius R2 of sheet metal has been wrapped up in measurement, and again will
The cylinder fixture (22) of coated metal thin slice is fixed on machining tool；
(7) according to the measured cylindrical radius R2 of survey, and combine processed micro-structural profile and be processed path design；
(8) microstructure unit processing is carried out；
(9) after processing micro-structural, loose unloading cylinder fixture, the sheet metal after processing is peeled off from cylinder fixture, to processing
Microstructure area, which is cut out and suitably flattened, is used as injection core (7).
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| Application Number | Priority Date | Filing Date | Title |
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| CN201510193828.8A CN104972271B (en) | 2015-04-22 | 2015-04-22 | A kind of micro structure array device mold core making process |
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| CN201510193828.8A CN104972271B (en) | 2015-04-22 | 2015-04-22 | A kind of micro structure array device mold core making process |
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| CN104972271B true CN104972271B (en) | 2017-11-14 |
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| CN106855395A (en) * | 2015-12-08 | 2017-06-16 | 中国航空工业第六八研究所 | A kind of optical detection evaluation method of silicon chip anode linkage technique deformation |
| CN107203185A (en) * | 2017-06-23 | 2017-09-26 | 上海斐讯数据通信技术有限公司 | Microlens array arc transition processing method and processing path generation method, electronic installation |
| CN111198408A (en) * | 2018-11-19 | 2020-05-26 | 三代光学科技（天津）有限公司 | Ultra-precision machining device and method for micro-lens array |
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| US4543299A (en) * | 1983-09-21 | 1985-09-24 | Ethyl Corporation | Laminated, seamless, cylindrical metal screen for vacuum perforation of thermoplastic film |
| CN101149560B (en) * | 2007-10-17 | 2010-09-01 | 京东方科技集团股份有限公司 | Micro structure mold core and its manufacture method |
| CN101320211B (en) * | 2008-07-22 | 2011-02-16 | 京东方科技集团股份有限公司 | Mold with micro-structure mould core and manufacturing method thereof |
| KR20120029089A (en) * | 2010-09-16 | 2012-03-26 | 한국과학기술원 | Tool bar for mounting cutting tool and method for manufacturing the same |
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