CN111902786B - 具有绝对压力和差压换能器的质量流量控制器 - Google Patents

具有绝对压力和差压换能器的质量流量控制器 Download PDF

Info

Publication number
CN111902786B
CN111902786B CN201880091709.3A CN201880091709A CN111902786B CN 111902786 B CN111902786 B CN 111902786B CN 201880091709 A CN201880091709 A CN 201880091709A CN 111902786 B CN111902786 B CN 111902786B
Authority
CN
China
Prior art keywords
flow
cavity
differential pressure
absolute
mass flow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201880091709.3A
Other languages
English (en)
Chinese (zh)
Other versions
CN111902786A (zh
Inventor
约翰·勒尔
安东尼·基奥
伯温·班纳斯
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Illinois Tool Works Inc
Original Assignee
Illinois Tool Works Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Illinois Tool Works Inc filed Critical Illinois Tool Works Inc
Publication of CN111902786A publication Critical patent/CN111902786A/zh
Application granted granted Critical
Publication of CN111902786B publication Critical patent/CN111902786B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
    • G01F1/363—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction with electrical or electro-mechanical indication
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
    • G01F1/38—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction the pressure or differential pressure being measured by means of a movable element, e.g. diaphragm, piston, Bourdon tube or flexible capsule
    • G01F1/383—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction the pressure or differential pressure being measured by means of a movable element, e.g. diaphragm, piston, Bourdon tube or flexible capsule with electrical or electro-mechanical indication
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
    • G01F15/001—Means for regulating or setting the meter for a predetermined quantity
    • G01F15/003—Means for regulating or setting the meter for a predetermined quantity using electromagnetic, electric or electronic means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
    • G01F15/005—Valves
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Electromagnetism (AREA)
  • Flow Control (AREA)
  • Measuring Volume Flow (AREA)
CN201880091709.3A 2018-01-30 2018-11-20 具有绝对压力和差压换能器的质量流量控制器 Active CN111902786B (zh)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201862624059P 2018-01-30 2018-01-30
US62/624,059 2018-01-30
US16/195,432 US11073846B2 (en) 2018-01-30 2018-11-19 Mass flow controller with absolute and differential pressure transducer
US16/195,432 2018-11-19
PCT/US2018/062127 WO2019152089A1 (en) 2018-01-30 2018-11-20 Mass flow controller with absolute and differential pressure transducer

Publications (2)

Publication Number Publication Date
CN111902786A CN111902786A (zh) 2020-11-06
CN111902786B true CN111902786B (zh) 2024-09-03

Family

ID=67392855

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201880091709.3A Active CN111902786B (zh) 2018-01-30 2018-11-20 具有绝对压力和差压换能器的质量流量控制器

Country Status (7)

Country Link
US (2) US11073846B2 (https=)
EP (1) EP3746860B1 (https=)
JP (1) JP7216736B2 (https=)
KR (1) KR102691172B1 (https=)
CN (1) CN111902786B (https=)
TW (1) TWI796417B (https=)
WO (1) WO2019152089A1 (https=)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7495742B2 (ja) 2019-04-25 2024-06-05 株式会社フジキン 流量制御装置および流量制御方法
CN116419804A (zh) * 2020-07-28 2023-07-11 费斯托股份两合公司 分选方法和分选设备
JP2022047815A (ja) * 2020-09-14 2022-03-25 アズビル株式会社 マスフローコントローラ
US11940307B2 (en) * 2021-06-08 2024-03-26 Mks Instruments, Inc. Methods and apparatus for pressure based mass flow ratio control
DE102021130134A1 (de) * 2021-11-18 2023-05-25 Gemü Gebr. Müller Apparatebau Gmbh & Co. Kommanditgesellschaft Vorrichtung zur Fluidbegrenzung und Vorrichtung zum Messen einer Eigenschaft eines Prozessfluids
US12000723B2 (en) 2022-02-18 2024-06-04 Mks Instruments, Inc. Method and apparatus for pressure based mass flow control
US12436049B2 (en) 2023-02-16 2025-10-07 Te Connectivity Solutions Gmbh Sensor die with a diaphragm
US12313483B2 (en) 2023-03-31 2025-05-27 Te Connectivity Solutions Gmbh Sensor having a plurality of diaphragms
US12449322B2 (en) 2023-04-05 2025-10-21 Te Connectivity Solutions Gmbh Sensor assembly
US20250076141A1 (en) * 2023-09-01 2025-03-06 Te Connectivity Solutions Gmbh Sensor Having a Package with a Sensor Die
US20250130600A1 (en) * 2023-10-20 2025-04-24 Illinois Took Works Inc. Valve assembly and system used to control flow rate of a fluid
CN117148877B (zh) * 2023-11-01 2024-01-02 苏芯物联技术(南京)有限公司 一种高精度管道流量测量控制装置及设计方法

Family Cites Families (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0547617B1 (en) * 1991-12-18 1996-07-10 Pierre Delajoud Mass flow meter and method
US5868159A (en) * 1996-07-12 1999-02-09 Mks Instruments, Inc. Pressure-based mass flow controller
GB2381589B (en) 1999-05-26 2003-09-10 Cyber Instr Technology Llc Wide range gas flow system with real time flow measurement and correction
US6503280B2 (en) * 2000-12-26 2003-01-07 John A. Repicci Prosthetic knee and method of inserting
AU2002307547A1 (en) 2001-04-24 2002-11-05 Unit Instruments, Inc. System and method for configuring and asapting a mass flow controller
EP1454085A4 (en) * 2001-11-13 2006-06-07 Emech Control Ltd Formerly Tec PROCESS SOLENOID VALVE
US6712084B2 (en) * 2002-06-24 2004-03-30 Mks Instruments, Inc. Apparatus and method for pressure fluctuation insensitive mass flow control
JP2004157719A (ja) * 2002-11-06 2004-06-03 Stec Inc マスフローコントローラ
US6973375B2 (en) * 2004-02-12 2005-12-06 Mykrolis Corporation System and method for flow monitoring and control
JP4881391B2 (ja) 2006-11-02 2012-02-22 株式会社堀場エステック 差圧式マスフローコントローラにおける診断機構
WO2009072241A1 (ja) * 2007-12-05 2009-06-11 Hitachi Zosen Corporation 真空容器の圧力制御方法および圧力制御装置
JP5395451B2 (ja) * 2009-02-10 2014-01-22 サーパス工業株式会社 流量コントローラ
TWI435196B (zh) * 2009-10-15 2014-04-21 派伏塔系統公司 氣體流量控制方法及裝置
WO2012153454A1 (ja) * 2011-05-10 2012-11-15 株式会社フジキン 流量モニタ付圧力式流量制御装置と、これを用いた流体供給系の異常検出方法並びにモニタ流量異常時の処置方法
US9188989B1 (en) * 2011-08-20 2015-11-17 Daniel T. Mudd Flow node to deliver process gas using a remote pressure measurement device
JP2014098560A (ja) * 2012-11-13 2014-05-29 Azbil Corp 差圧／圧力複合センサの異常診断方法
US9454158B2 (en) * 2013-03-15 2016-09-27 Bhushan Somani Real time diagnostics for flow controller systems and methods
WO2015034663A2 (en) 2013-09-06 2015-03-12 Illinois Tool Works Inc. Absolute and differential pressure transducer
JP6254815B2 (ja) * 2013-10-11 2017-12-27 アドバンス電気工業株式会社 流量制御弁及びこれを用いた流量制御装置
CN104806797B (zh) * 2013-12-31 2018-02-23 缪勒Sv有限公司 自动流量控制系统及导阀组件
JP6415889B2 (ja) * 2014-08-01 2018-10-31 株式会社堀場エステック 流量制御装置、流量制御装置用プログラム、及び、流量制御方法
CN104236641A (zh) * 2014-09-19 2014-12-24 兰州空间技术物理研究所 基于恒压法的多介质气体配样标准流量计及流量提供方法
CN107003682A (zh) * 2014-12-04 2017-08-01 伊利诺斯工具制品有限公司 流量计的无线限流器
CN108139761B (zh) * 2015-09-30 2021-02-19 日立金属株式会社 质量流量控制装置和压差式流量计的诊断方法
US9638559B1 (en) 2016-02-10 2017-05-02 Sensata Technologies Inc. System, devices and methods for measuring differential and absolute pressure utilizing two MEMS sense elements
JP6871721B2 (ja) * 2016-11-17 2021-05-12 株式会社堀場エステック 圧力式流量計
CN106679925A (zh) * 2016-12-15 2017-05-17 中国航空工业集团公司沈阳空气动力研究所 一种微质量射流流量高精度控制装置和控制方法
CN106990798A (zh) * 2017-06-01 2017-07-28 上海昶艾电子科技有限公司 流体流量控制器以及干湿球测湿法中控制流量的方法
US12379238B2 (en) * 2018-10-26 2025-08-05 Illinois Tool Works Inc. Mass flow controller with advanced back streaming diagnostics

Also Published As

Publication number Publication date
TWI796417B (zh) 2023-03-21
US11526181B2 (en) 2022-12-13
KR20200115555A (ko) 2020-10-07
US11073846B2 (en) 2021-07-27
KR102691172B1 (ko) 2024-08-01
US20190235533A1 (en) 2019-08-01
EP3746860B1 (en) 2023-01-04
EP3746860A1 (en) 2020-12-09
US20210318698A1 (en) 2021-10-14
TW201937322A (zh) 2019-09-16
CN111902786A (zh) 2020-11-06
JP7216736B2 (ja) 2023-02-01
WO2019152089A1 (en) 2019-08-08
JP2021513147A (ja) 2021-05-20

Similar Documents

Publication Publication Date Title
CN111902786B (zh) 具有绝对压力和差压换能器的质量流量控制器
CN105518419B (zh) 绝压和差压传感器
US10401202B2 (en) Method and apparatus for gas flow control
CN106233061B (zh) 用于实时监测穿过质量流量控制器的流量的系统以及方法
CN100422616C (zh) 高精度基于压力的流量控制器
EP2247819B1 (en) Method and apparatus for in situ testing of gas flow controllers
US12174647B2 (en) Flow rate control device
KR102084447B1 (ko) 유량 제어 기기, 유량 제어 기기의 유량 교정 방법, 유량 측정 기기 및 유량 측정 기기를 사용한 유량 측정 방법
WO2005003694A1 (ja) 差圧式流量計及び差圧式流量制御装置
JP4977669B2 (ja) 差圧式流量計
WO2020026784A1 (ja) 流量制御システム及び流量測定方法
JP7131561B2 (ja) 質量流量制御システム並びに当該システムを含む半導体製造装置及び気化器
JP4753251B2 (ja) ガス流量計、及びガス流量制御装置
JP2025019670A (ja) 流量制御装置

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant