CN111900113A - Wet method flower basket - Google Patents

Wet method flower basket Download PDF

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Publication number
CN111900113A
CN111900113A CN202010950072.8A CN202010950072A CN111900113A CN 111900113 A CN111900113 A CN 111900113A CN 202010950072 A CN202010950072 A CN 202010950072A CN 111900113 A CN111900113 A CN 111900113A
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CN
China
Prior art keywords
basket
flower basket
rod
supporting plate
teeth
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Pending
Application number
CN202010950072.8A
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Chinese (zh)
Inventor
谢毅
王亚楠
王斯海
王广华
李冬玫
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Tongwei Solar Meishan Co Ltd
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Tongwei Solar Meishan Co Ltd
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Publication date
Application filed by Tongwei Solar Meishan Co Ltd filed Critical Tongwei Solar Meishan Co Ltd
Priority to CN202010950072.8A priority Critical patent/CN111900113A/en
Publication of CN111900113A publication Critical patent/CN111900113A/en
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67326—Horizontal carrier comprising wall type elements whereby the substrates are vertically supported, e.g. comprising sidewalls
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67326—Horizontal carrier comprising wall type elements whereby the substrates are vertically supported, e.g. comprising sidewalls
    • H01L21/6733—Horizontal carrier comprising wall type elements whereby the substrates are vertically supported, e.g. comprising sidewalls characterized by a material, a roughness, a coating or the like
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/1804—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic Table
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/547—Monocrystalline silicon PV cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Electromagnetism (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

The application provides a wet process basket of flowers belongs to solar wafer production facility field. A wet-process flower basket comprises a first supporting plate, a second supporting plate and a plurality of flower basket rods arranged between the first supporting plate and the second supporting plate. The plurality of basket rods surround to form an accommodating cavity for accommodating the silicon wafer, and the accommodating cavity is provided with an accommodating opening for the silicon wafer to enter and exit the accommodating cavity. A plurality of flower basket teeth are arranged on one side, facing the containing cavity, of each flower basket rod at intervals along the axial direction, a containing groove used for containing the edge of a silicon wafer is formed in any two adjacent flower basket teeth of each flower basket rod, and the containing grooves between the flower basket rods are correspondingly arranged. The other wet-process flower basket comprises a first supporting plate, a second supporting plate and a plurality of flower basket rods arranged between the first supporting plate and the second supporting plate. The plurality of basket rods surround to form an accommodating cavity for accommodating the silicon wafer, and the accommodating cavity is provided with an accommodating opening for the silicon wafer to enter and exit the accommodating cavity. The flower basket rod is a carbon fiber rod, the cross section of the flower basket rod is circular, and the diameter of the flower basket rod is 15-25 mm. The occurrence of the basket floating phenomenon and the silicon wafer shifting phenomenon can be effectively reduced.

Description

Wet method flower basket
Technical Field
The application relates to the field of solar cell production equipment, in particular to a wet-process flower basket.
Background
In the prior art, a solar cell is brought into each acid-base process groove for processing through a wet flower basket at a texturing section. After the flower basket is conveyed into the process tank by the manipulator, the flower basket and the silicon wafers are both subjected to an upward force due to the buoyancy of the liquid and the bubbling thrust at the bottom of the process tank, and the silicon wafers pass through the flower basket to be fixed.
At present, after the flower basket is sent into a process tank, the basket floating phenomenon is easy to occur. After the basket floating phenomenon occurs, when the manipulator lifts the flower basket from the process tank, the manipulator can collide the flower basket in the downward stroke of grabbing the flower basket, so that the edge breakage and the corner chipping of the silicon wafer are caused. The mechanical arm is easy to displace the silicon chips in the flower basket and partially protrudes out of the flower basket when impacting the flower basket, so that the mechanical arm impacts the silicon chips when lifting the flower basket; when the manipulator puts the lifted flower basket into the next process tank, the silicon wafer is easy to impact the tank body of the process tank or other flower baskets in the process tank.
Disclosure of Invention
The utility model aims to provide a wet process basket of flowers can effectively reduce the appearance of basket phenomenon and silicon chip aversion phenomenon of wafting.
The embodiment of the application is realized as follows:
in a first aspect, an embodiment of the present application provides a wet process basket of flowers, including first backup pad, the second backup pad and set up a plurality of basket poles between first backup pad and second backup pad, a plurality of basket poles enclose into the holding chamber that is used for the holding silicon chip, the holding chamber has the holding opening that is used for the silicon chip to advance out of holding chamber, every basket pole all is provided with a plurality of basket teeth along axial interval towards one side in holding chamber, have the storage tank that is used for the edge of holding silicon chip between two arbitrary adjacent basket teeth of every basket pole of flowers, and the storage tank of two arbitrary basket poles corresponds the setting.
Among the above-mentioned technical scheme, the basket of flowers pole sets up a plurality of basket of flowers teeth towards one side in holding chamber along axial interval, and the containing tank between every basket of flowers pole arbitrary two adjacent basket of flowers teeth is used for the edge of holding silicon chip, separates arbitrary two adjacent silicon chips, avoids producing the lamination phenomenon. Because the basket of flowers tooth has certain height, the area of contact of basket of flowers tooth and silicon chip increases when the silicon chip size of holding increases, and the area of contact of basket of flowers tooth and silicon chip reduces when the silicon chip size of holding reduces, can carry out the holding to the silicon chip of equidimension not better.
In the embodiment of the application, each basket rod is provided with basket teeth: each basket of flowers pole can fix the silicon chip through the basket of flowers tooth, the whole fixed effect to the silicon chip is better, can reduce the appearance of the silicon chip displacement phenomenon effectively; the weight of the basket rod can be increased better, and the basket floating phenomenon can be reduced to a certain extent.
The inventor researches and discovers that the current flower basket can only meet the fixation of small silicon wafers in a process tank, and after the specifications of the silicon wafers are increased, the thrust of the silicon wafers on a flower basket rod after the flower basket enters the process tank is increased, so that the occurrence probability of the basket floating phenomenon is increased. Set up basket of flowers tooth at basket of flowers pole, through highly controlling basket of flowers tooth for basket of flowers tooth can contact and fix the silicon chip better with the silicon chip, realizes controlling the floating of silicon chip in certain extent, can effectively reduce the probability of the basket of wafing.
In some possible embodiments, each of the flower basket poles is circular in cross-section.
Among the above-mentioned technical scheme, the cross section of basket of flowers pole sets up to circular, avoids basket of flowers pole to produce stress set and make the basket of flowers damage when using, avoids simultaneously to produce the edges and corners on the basket of flowers pole and causes the silicon chip to appear collapsing the phenomenon of lacking the angle easily.
In some possible embodiments, the basket rods are carbon fiber rods, and each basket rod has a diameter of 15-25 mm.
In the technical scheme, the lower limit of the diameter of the basket rod is 12mm, the diameter and the weight of the basket rod are increased, the basket floating phenomenon can be effectively avoided, and the silicon wafer shifting phenomenon caused by the basket floating phenomenon can be effectively avoided; the upper limit of the diameter of the basket rod is 25mm, so that the diameter of the basket rod is increased properly, and the carrying burden is reduced while the basket floating phenomenon is effectively avoided.
In some possible embodiments, the teeth of the basket of flowers have a height of 12-16 mm.
Among the above-mentioned technical scheme, the basket of flowers tooth sets up according to above-mentioned high requirement, can enough avoid the high undersize of basket of flowers tooth and can not fix the silicon chip well, can avoid the basket of flowers tooth height too big and hinder getting of silicon chip in the basket of flowers to put and the making herbs into wool processing again, can fix the silicon chip of not unidimensional betterly.
In some possible embodiments, the teeth of the basket of flowers have a width of 13-17 mm.
Among the above-mentioned technical scheme, the basket of flowers tooth sets up according to above-mentioned width requirement, can enough avoid basket of flowers tooth width undersize and can not fix the silicon chip well, can avoid basket of flowers tooth width too big again and hinder getting of silicon chip in the basket of flowers to put and the making herbs into wool processing, can fix the silicon chip betterly.
In some possible embodiments, the plurality of basket teeth on each basket rod are divided into a first tooth section and a second tooth section, the first tooth section and the second tooth section are distributed at intervals along the axial direction of the basket rod, a separation channel is arranged between the first tooth section and the second tooth section, and the width of the separation channel is greater than the width of the accommodating groove in the axial direction of the basket rod.
Among the above-mentioned technical scheme, set up the basket of flowers tooth into along the first tooth section and the second tooth section of the axial interval distribution of basket of flowers pole, be convenient for correspond first tooth section and second tooth section interval distribution with a plurality of silicon chips in the basket of flowers, make things convenient for getting of silicon chip in the basket of flowers to put more.
In some possible embodiments, the plurality of basket poles are divided into a plurality of first basket poles spaced apart along a first preset direction, a plurality of second basket poles spaced apart along a second preset direction, and a plurality of third basket poles spaced apart along the second preset direction, the first preset direction being perpendicular to the second preset direction; the accommodating cavity is provided with a closed bottom end opposite to the accommodating opening, and the plurality of first basket of flowers are distributed at the closed bottom end; the plurality of second basket poles and the plurality of third basket poles are located on one sides, close to the accommodating openings, of the plurality of first basket poles and are distributed on two opposite sides of the plurality of first basket poles in the first preset direction at intervals along the first preset direction.
In the technical scheme, the plurality of first basket rods are distributed at the closed bottom end at intervals along the first preset direction, so that the silicon wafer can be better fixed at the edge of the closed bottom end. The plurality of second basket rods and the plurality of third basket rods are respectively distributed on two sides of the plurality of first basket rods along a second preset direction perpendicular to the first preset direction, and the edges of the silicon wafer on the two sides can be respectively and well fixed. The first basket rod, the second basket rod and the third basket rod are matched with each other, so that the silicon wafer fixing device has a better fixing effect on the silicon wafer.
In some possible embodiments, the teeth of each second basket rod and the teeth of each third basket rod extend in a first preset direction.
In the technical scheme, the basket teeth of the second basket rod and the third basket rod extend along the first preset direction, and when the edges of the two sides of the silicon wafer are fixed, the extending directions of the basket teeth of the second basket rod and the third basket rod are perpendicular to the edges of the two sides of the silicon wafer, the acting force of the basket teeth on the silicon wafer is uniform, and the fixation of the edges of the two sides of the silicon wafer can be better realized.
In some possible embodiments, the teeth of each first basket rod extend in a second predetermined direction.
Among the above-mentioned technical scheme, the basket of flowers tooth of first basket of flowers pole extends along second preset direction, when fixing the edge that the silicon chip is located closed bottom, the extending direction of the basket of flowers tooth of first basket of flowers pole is perpendicular with the edge that the silicon chip is located closed bottom, and the basket of flowers tooth is even to the effort of silicon chip, can realize better that the silicon chip is located the edge of closed bottom fixed.
In a second aspect, an embodiment of the present application provides a wet-process flower basket, which includes a first support plate, a second support plate, and a plurality of flower basket rods disposed between the first support plate and the second support plate, wherein the plurality of flower basket rods enclose an accommodating cavity for accommodating a silicon wafer, the accommodating cavity has an accommodating opening for accommodating the silicon wafer in and out of the accommodating cavity, the flower basket rods are carbon fiber rods, the cross section of each flower basket rod is circular, and the diameter of each flower basket rod is 15-25 mm.
Among the above-mentioned technical scheme, the cross section of basket of flowers pole sets up to circular, avoids basket of flowers pole to produce stress set and make the basket of flowers damage when using, avoids simultaneously to produce the edges and corners on the basket of flowers pole and causes the silicon chip to appear collapsing the phenomenon of lacking the angle easily. The lower limit of the diameter of the basket rod is 12mm, so that the diameter and the weight of the basket rod are increased, the basket floating phenomenon can be effectively avoided, and the silicon wafer displacement phenomenon caused by the basket floating phenomenon can also be effectively avoided; the upper limit of the diameter of the basket rod is 25mm, so that the diameter of the basket rod is increased properly, and the carrying burden is reduced while the basket floating phenomenon is effectively avoided.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings that are required to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present application and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained from the drawings without inventive effort.
Fig. 1 is a schematic structural diagram of a wet flower basket at a first viewing angle according to an embodiment of the present disclosure;
fig. 2 is a schematic structural diagram of a wet flower basket at a second viewing angle according to an embodiment of the present disclosure;
FIG. 3 is an enlarged view of a portion of FIG. 1 at I;
fig. 4 is a schematic structural diagram of a flower basket rod of a wet-process flower basket at a second viewing angle according to an embodiment of the present application.
Icon: 100-wet flower basket; 110-a first support plate; 120-a second support plate; 130-gaily decorated basket rod; 1301-a first gaily bar; 1302-second gaily decorated basket pole; 1303-third gaily decorated basket rod; 1304-basket of flowers teeth; 1305-a receiving groove; 1306-a first tooth segment; 1307-second tooth segment; 1308-separation channels; 140-a housing chamber.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are some embodiments of the present application, but not all embodiments. The components of the embodiments of the present application, generally described and illustrated in the figures herein, can be arranged and designed in a wide variety of different configurations.
Thus, the following detailed description of the embodiments of the present application, presented in the accompanying drawings, is not intended to limit the scope of the claimed application, but is merely representative of selected embodiments of the application. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.
It should be noted that "and/or" in the present application, such as "scheme a and/or scheme B" means that the three modes of scheme a alone, scheme B alone, scheme a plus scheme B may be used.
In the description of the present application, it is to be noted that the terms "center", "upper", "lower", "inner", "outer", and the like refer to the orientation or positional relationship shown in the drawings, or the orientation or positional relationship which the product of the application is conventionally placed in use, which are merely for convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present application. Furthermore, the terms "first," "second," "third," and the like are used solely to distinguish one from another and are not to be construed as indicating or implying relative importance.
Furthermore, the terms "horizontal", "vertical", "overhang" and the like do not imply that the components are required to be absolutely horizontal or overhang, but may be slightly inclined. For example, "horizontal" merely means that the direction is more horizontal than "vertical" and does not mean that the structure must be perfectly horizontal, but may be slightly inclined.
In the description of the present application, it is also to be noted that, unless otherwise explicitly specified or limited, the terms "disposed" and "connected" are to be interpreted broadly, e.g., as being either fixedly connected, detachably connected, or integrally connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present application can be understood in a specific case by those of ordinary skill in the art.
First embodiment
Referring to fig. 1, the present disclosure provides a wet flower basket 100, which includes a first support plate 110, a second support plate 120, and a plurality of flower basket rods 130 disposed between the first support plate 110 and the second support plate 120. A first end of each basket bar 130 in the axial direction is connected to the first support plate 110, and a second end of each basket bar 130 in the axial direction is connected to the second support plate 120.
Illustratively, each basket rod 130 is perpendicular to the first support plate 110 and the second support plate 120, respectively, so that the wet basket 100 has better stability.
Referring to fig. 2, in the embodiment of the present application, the plurality of basket rods 130 surround to form a receiving cavity 140 for receiving a silicon wafer, and the receiving cavity 140 has a receiving opening for the silicon wafer to enter and exit the receiving cavity 140.
Referring to fig. 3, in the embodiment of the present disclosure, a plurality of basket teeth 1304 are axially disposed at intervals on one side of each basket bar 130 facing the receiving cavity 140, a receiving groove 1305 for receiving an edge of a silicon wafer is disposed between any two adjacent basket teeth 1304 of each basket bar 130, and the receiving grooves 1305 of any two basket bars 130 are correspondingly disposed.
In this embodiment, the receiving groove 1305 between any two adjacent basket teeth 1304 of each basket bar 130 is used for receiving the edge of a silicon wafer, so as to separate any two adjacent silicon wafers, thereby avoiding the lamination phenomenon. Because the basket of flowers tooth 1304 has certain height, the area of contact of basket of flowers tooth 1304 and silicon chip increases when the silicon chip size of holding increases, and the area of contact of basket of flowers tooth 1304 and silicon chip reduces when the silicon chip size of holding reduces, can be better to not unidimensional silicon chip holding.
Meanwhile, the wet method basket 100 provided by this embodiment is provided with basket teeth 1304 at each basket rod 130: each basket rod 130 can fix the silicon wafer through the basket teeth 1304, so that the whole fixing effect on the silicon wafer is better, and the phenomenon of silicon wafer displacement can be effectively reduced; the weight of the basket rod 130 can be increased well, and the occurrence of the basket floating phenomenon can be reduced to a certain extent.
In some possible embodiments, the plurality of basketball poles 130 are divided into a plurality of first basketball poles 1301, a plurality of second basketball poles 1302, and a plurality of third basketball poles 1303. The accommodating cavity 140 has a closed bottom opposite to the accommodating opening, and closed sides located at two opposite sides between the closed bottom and the accommodating opening.
The plurality of first basket of flowers 1301 are distributed at intervals at the closed bottom end of the accommodating cavity 140 along a first preset direction, and the first preset direction is the direction a shown in fig. 2, so that the plurality of first basket of flowers 1301 can better fix the silicon wafer at the edge of the closed bottom end.
Referring to fig. 4, further, the basket teeth 1304 of each first basket bar 1301 extend along a second predetermined direction. When the first basket bar 1301 fixes the edge of the silicon wafer at the closed bottom end, the extending direction of the basket teeth 1304 is perpendicular to the edge of the silicon wafer at the closed bottom end, so that the acting force on the silicon wafer is uniform, and the silicon wafer can be well fixed at the edge of the closed bottom end.
The second basket poles 1302 and the third basket poles 1303 are located on one sides of the first basket poles 1301 close to the receiving openings, and are distributed at intervals on two opposite sides of the first basket poles 1301 in the first preset direction. The plurality of second basket poles 1302 are distributed at intervals on one closed side of the accommodating cavity 140 along a second preset direction, the plurality of third basket poles 1303 are distributed at intervals on the other closed side of the accommodating cavity 140 along the second preset direction, and the second preset direction is the b direction shown in fig. 2, so that the plurality of second basket poles 1302 and the plurality of third basket poles 1303 can be better fixed at the edges of the silicon chips located at both sides.
Referring to fig. 4, further, the basket teeth 1304 of each second basket bar 1302 and the basket teeth 1304 of each third basket bar 1303 extend along the first predetermined direction. When the second basket rod 1302 and the third basket rod 1303 fix the edges of the silicon wafer on the two sides, the extending direction of the basket teeth 1304 is perpendicular to the edges of the silicon wafer on the two sides, the acting force of the basket teeth 1304 on the silicon wafer is uniform, and the silicon wafer can be fixed on the edges of the silicon wafer on the two sides.
Optionally, the number of the first basket poles 1301, the number of the second basket poles 1302, the number of the third basket poles 1303 are the same, and the second basket poles 1302 and the third basket poles 1303 are symmetrically arranged relative to the first basket poles 1301, so that the first basket poles 1301, the second basket poles 1302, and the third basket poles 1303 are uniformly distributed, and have a better fixing effect on the silicon wafer when being matched with each other. Illustratively, the number of the first basket poles 1301, the second basket poles 1302 and the third basket poles 1303 is 2-3, for example, 3, so that the wet-process basket 100 has a proper density of basket poles 130, thereby ensuring that the wet-process basket 100 has a proper weight.
In some exemplary embodiments, each basket rod 130 has a circular cross section, so as to prevent the basket rod 130 from being damaged due to stress concentration during use, and prevent the basket rod 130 from generating edges and corners, which easily causes edge breakage and corner missing of a silicon wafer.
Furthermore, the basket rod 130 is a carbon fiber rod, which can be well adapted to the strong acid-base working environment of the wet-process basket 100. The gaiter poles 130 are solid pole structures, and the diameter of each gaiter pole 130 is 15-25mm, or 20-25mm, such as but not limited to any one of 15mm, 16mm, 17mm, 18mm, 19mm, 20mm, 21mm, 22mm, 23mm, 24mm, and 25mm, or ranges between any two. The diameter lower limit of the basket rod 130 is controlled to be 12mm, compared with the existing basket, the diameter and the weight of the basket rod 130 are increased, the basket floating phenomenon can be effectively avoided, and the silicon wafer shifting phenomenon caused by the basket floating phenomenon can also be effectively avoided. Meanwhile, the diameter upper limit of the basket rod 130 is controlled to be 25mm, so that the diameter of the basket rod 130 is increased properly, and the carrying burden is relieved while the basket floating phenomenon is effectively avoided.
In some possible embodiments, the teeth of the basket teeth 1304 are 12-16mm, or 13-15mm, such as 14mm in height. In the embodiment of the present application, the tooth height direction of the teeth 1304 of the basket is the c direction shown in fig. 4. The height of the basket of flowers tooth 1304 is set according to the requirements, so that the phenomenon that the height of the basket of flowers tooth 1304 is too small and the silicon wafers cannot be well fixed can be avoided, the phenomenon that the height of the basket of flowers tooth 1304 is too large and the silicon wafers are prevented from being taken and placed in the basket of flowers and subjected to texturing treatment can be avoided, and the silicon wafers with different sizes can be well fixed.
In some possible embodiments, the teeth width of the teeth 1304 of the basket is 13-17mm, or 14-16mm, for example 15 mm. In the embodiment of the present application, the tooth width direction of the basket teeth 1304 is the d direction shown in fig. 4. The width of the basket of flowers tooth 1304 sets up according to above-mentioned requirement, can enough avoid basket of flowers tooth 1304 width undersize and can not fix the silicon chip well, can avoid basket of flowers tooth 1304 width too big again and hinder getting of silicon chip in the basket of flowers and put and the processing of making herbs into wool, can fix the silicon chip betterly.
Optionally, the plurality of basket teeth 1304 on each basket bar 130 are divided into a first tooth section 1306 and a second tooth section 1307, the first tooth section 1306 and the second tooth section 1307 are distributed at intervals along the axial direction of the basket bar 130, a separation channel 1308 is arranged between the first tooth section 1306 and the second tooth section 1307, and the width of the separation channel 1308 is greater than the width of the accommodating groove 1305 in the axial direction of the basket bar 130. The basket teeth 1304 are arranged into the first tooth segment 1306 and the second tooth segment 1307 which are distributed along the axial direction of the basket rod 130 at intervals, so that a plurality of silicon wafers are distributed at intervals in the basket correspondingly to the first tooth segment 1306 and the second tooth segment 1307, and the silicon wafers are more conveniently taken and placed in the basket.
Second embodiment
The embodiment of the present application provides another wet method flower basket 100, which includes a first support plate 110, a second support plate 120, and a plurality of flower basket rods 130 disposed between the first support plate 110 and the second support plate 120. The plurality of basket rods 130 define a receiving cavity 140 for receiving a silicon wafer, and the receiving cavity 140 has a receiving opening for the silicon wafer to enter and exit the receiving cavity 140. The connection manner of the flower basket bar 130, the first support plate 110 and the second support plate 120 is exemplarily the same as that of the first embodiment, and will not be described again.
In this embodiment, the basket rods 130 are carbon fiber rods, each basket rod 130 has a circular cross section, the basket rods 130 have a solid rod structure, and each basket rod 130 has a diameter of 15-25 mm.
In the wet method basket 100 provided by this embodiment, the cross section of the basket rod 130 is set to be circular, so as to avoid the basket rod 130 from generating stress set when in use, thereby avoiding the phenomenon that the silicon chip is broken and unfilled corner easily due to the corner generated on the basket rod 130. The basket rod 130 is a carbon fiber rod, and can be well adapted to the working environment of strong acidity and alkalinity of the wet-process basket 100. The lower limit of the diameter of the basket rod 130 is 12mm, the diameter and the weight of the basket rod 130 are increased, the basket floating phenomenon can be effectively avoided, and the silicon chip displacement phenomenon caused by the basket floating phenomenon can also be effectively avoided; the upper limit of the diameter of the basket rod 130 is 25mm, so that the diameter of the basket rod 130 is increased properly, and the carrying burden is reduced while the basket floating phenomenon is effectively avoided.
It is understood that, in this embodiment, the plurality of basket rods 130 may also be divided into a plurality of first basket rods 1301, second basket rods 1302 and third basket rods 1303, and/or some or all of the basket rods 130 may also be provided with basket teeth 1304, which are exemplarily the same as those in the first embodiment and will not be described again here.
The above description is only a preferred embodiment of the present application and is not intended to limit the present application, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, improvement and the like made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims (10)

1. The wet-process flower basket is characterized by comprising a first supporting plate, a second supporting plate and a plurality of flower basket rods arranged between the first supporting plate and the second supporting plate, wherein the plurality of flower basket rods surround to form a containing cavity for containing a silicon wafer, the containing cavity is provided with a containing opening for the silicon wafer to enter and exit the containing cavity, one side, facing the containing cavity, of each flower basket rod is provided with a plurality of flower basket teeth at intervals along the axial direction, a containing groove for containing the edge of the silicon wafer is formed between any two adjacent flower basket teeth of each flower basket rod, and the containing grooves of any two flower basket rods are correspondingly arranged.
2. The wet laid flower basket according to claim 1, wherein each of the flower basket poles is circular in cross-section.
3. The wet-process flower basket according to claim 2, wherein the flower basket rods are carbon fiber rods, and each flower basket rod has a diameter of 15-25 mm.
4. The wet processing flower basket according to claim 3, wherein the teeth of the flower basket teeth have a tooth height of 12-16 mm.
5. The wet processing flower basket according to claim 3, wherein the tooth width of the teeth of the flower basket is 13-17 mm.
6. The wet process flower basket according to any one of claims 1 to 5, wherein the plurality of flower basket teeth on each flower basket rod are divided into a first tooth section and a second tooth section, the first tooth section and the second tooth section are distributed at intervals along the axial direction of the flower basket rod, a separation channel is arranged between the first tooth section and the second tooth section, and the width of the separation channel is larger than the width of the accommodating groove in the axial direction of the flower basket rod.
7. The wet process gaily disclosed in any one of claims 1 to 5, wherein the plurality of gaily bars are divided into a plurality of first gaily bars spaced apart along a first predetermined direction, a plurality of second gaily bars spaced apart along a second predetermined direction, and a plurality of third gaily bars spaced apart along the second predetermined direction, the first predetermined direction being perpendicular to the second predetermined direction; the accommodating cavity is provided with a closed bottom end opposite to the accommodating opening, and the plurality of first basket of flowers are distributed at the closed bottom end; the second plurality of basket poles and the third plurality of basket poles are located on one side of the first plurality of basket poles close to the accommodating opening, and are distributed at intervals on two opposite sides of the first plurality of basket poles in the first preset direction.
8. The wet-process flower basket according to claim 7, wherein the flower basket teeth of each second flower basket pole and the flower basket teeth of each third flower basket pole extend in the first preset direction.
9. The wet-process flower basket according to claim 7, wherein the flower basket teeth of each first flower basket pole extend in the second preset direction.
10. The wet-process flower basket is characterized by comprising a first supporting plate, a second supporting plate and a plurality of flower basket rods arranged between the first supporting plate and the second supporting plate, wherein the plurality of flower basket rods surround to form a containing cavity for containing a silicon wafer, the containing cavity is provided with a containing opening for the silicon wafer to enter and exit the containing cavity, the flower basket rods are carbon fiber rods, the cross section of each flower basket rod is circular, and the diameter of each flower basket rod is 15-25 mm.
CN202010950072.8A 2020-09-10 2020-09-10 Wet method flower basket Pending CN111900113A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202010950072.8A CN111900113A (en) 2020-09-10 2020-09-10 Wet method flower basket

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202010950072.8A CN111900113A (en) 2020-09-10 2020-09-10 Wet method flower basket

Publications (1)

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CN111900113A true CN111900113A (en) 2020-11-06

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN202010950072.8A Pending CN111900113A (en) 2020-09-10 2020-09-10 Wet method flower basket

Country Status (1)

Country Link
CN (1) CN111900113A (en)

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