CN202172085U - Quartz boat used for silicon slice insertion process of automatic feeding machine - Google Patents
Quartz boat used for silicon slice insertion process of automatic feeding machine Download PDFInfo
- Publication number
- CN202172085U CN202172085U CN2011203088139U CN201120308813U CN202172085U CN 202172085 U CN202172085 U CN 202172085U CN 2011203088139 U CN2011203088139 U CN 2011203088139U CN 201120308813 U CN201120308813 U CN 201120308813U CN 202172085 U CN202172085 U CN 202172085U
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- Prior art keywords
- quartz
- chute
- pushrod
- automatic charging
- quartz boat
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- Expired - Fee Related
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
The utility model discloses a quartz boat used for a silicon slice insertion process of an automatic feeding machine, comprising two supporting frameworks and four quartz rods connected between the two supporting frameworks. The four quartz rods comprise two upper quartz rods and two bottom quartz rods, wherein, the opposite inner sides of the two upper quartz rods arranged symmetrically are evenly equipped with a plurality of chutes perpendicular to the axial directions of the upper quartz rods, and the upper end faces of the bottom quartz rods are equipped with silicon slice inserting grooves corresponding to the chutes; the silicon slice inserting grooves are perpendicular to the axial directions of the bottom quartz rods, and one of the bottom quartz rods is equipped with a boss supplied for the automatic feeding machine to recognize the right side of the quartz boat. In the utility model, a diffusion process can be realized by using automatic feeding and cutting machines to insert silicon slices, thereby saving manpower and time, improving working efficiency substantially, and reducing fragment rate substantially.
Description
Technical field
The utility model relates to solar cell and makes the field; Relate in particular to the attached anchor clamps of a kind of solar cell manufacturing process diffusion furnace; Relate in particular to a kind of quartz boat that automatic charging machine inserts silicon wafer process that is used for, be used for fixing the solar cell piece semi-finished product and in diffusion furnace, carry out High temperature diffusion and oxidation.
Background technology
Before carrying out diffusing procedure, the solar cell piece semi-finished product are to be inserted in the quartz boat through artificial inserted sheet mode basically at present.As depicted in figs. 1 and 2; The quartz boat that generally adopts now comprises two support frames 10,20 that are oppositely arranged basically; Connect and be arranged on two support frames 10, four quartz pushrods between 20; Said four quartz pushrods comprise that symmetry is horizontally disposed with and two ends are connected to two top quartz pushrods 30,40 of the both sides, top of said two support frames 10,20, and are horizontally disposed with and two ends are connected to two root bottom part quartz pushrods 50,60 of said two support frames 10,20 bottoms.And, quartz pushrod plane, 50,60 place, said bottom and said top quartz pushrod 30,40 place plane parallel, and all be parallel to horizontal plane.As shown in Figure 1; Evenly offer a plurality of chutes that are obliquely installed 80 on said top quartz pushrod 30, the 40 opposed inside faces, also correspondingly on the upper surface of said bottom quartz pushrod 50,60 be provided with inserted slot 90 identical with said chute 80 quantity and that the angle of inclination is roughly the same.Because silicon chip 70 (battery sheet semi-finished product) is a fragile article, so can carefully silicon chip slowly be inserted in the quartz boat by a side during the manual inserted sheet of operator.But each silicon chip need contact with corresponding chute 80 on the top quartz pushrod 30,40 and corresponding inserted slot 90 simultaneously in the whole operation process; And with inserted slot 90 silicon chip is positioned in the quartz boat through this corresponding chute 80; In the process of loading silicon chip 70; When silicon chip 70 occurring and can not insert fully abreast, the chute 80 of card silicon chip 70 or inserted slot 90 will damage silicon chip 70.And, increased the time spent of dress silicon chip, thereby reduced production efficiency because each step in the manual operation all needs slow operation.
Because the problem that load efficient is low, fragment rate is high that above-mentioned loading silicon chip exists adopts the automatic loading/unloading machine in quartz boat, to load silicon chip 70 at present, thereby saved manpower, improved production efficiency in diffusing procedure.But existing quartz boat can not be distinguished anyway, therefore needs the quartz boat two ends that very high machining accuracy is all arranged, and causes processing cost higher.And because chute 80 all is obliquely installed with inserted slot 90, structure is fit to artificial inserted sheet, but inapplicable employing automatic loading/unloading machine carries out the operation of inserted sheet, if adopt the machine inserted sheet possibly cause fragment rate to improve on the contrary.In addition, existing chute only is the side along quartz pushrod, is unfavorable for the insertion of silicon chip.Therefore need provide a kind of and can adapt to the quartz boat that adopts automatic loading/unloading machine transplanting of rice sheet in the new process.
The utility model content
Because the problems referred to above that prior art exists; The purpose of the utility model is to provide a kind of quartz boat that automatic charging machine inserts silicon wafer process that is used for; It is not only applicable to artificial inserted sheet; And can adopt the automatic loading/unloading machine to realize automatic inserted sheet, and reduce the consuming time and fragment rate of artificial inserted sheet, improve the output of production line.
To achieve these goals; A kind of quartz boat that is used for automatic charging machine insertion silicon wafer process that the utility model provides; Comprise that two support frames and the connection that are oppositely arranged are arranged on four quartz pushrods between two support frames; Said four quartz pushrods comprise that symmetry is horizontally disposed with and two ends be connected to said two support frames the both sides, top two top quartz pushrods be horizontally disposed with and two ends are connected to two root bottom part quartz pushrods of said two support frames bottom; Quartz pushrod plane, place, said bottom and said top quartz pushrod place plane parallel; Wherein, Evenly offer a plurality of axial chutes perpendicular to said top quartz pushrod on the opposed inside face of two symmetrically arranged said top quartz pushrods, the upper surface of said bottom quartz pushrod is provided with and the corresponding inserted slot of said chute, and said inserted slot is axial perpendicular to said bottom quartz pushrod; One of them said bottom quartz pushrod is provided with and supplies the positive boss of said automatic charging machine identification quartz boat.
Preferably, said boss level is stretched out said bottom quartz pushrod and perpendicular to said bottom quartz pushrod.
Preferably, said chute comprise straight down first chute be arranged at that said top quartz pushrod upper semi-circle is communicated with said first chute and crossing at angle second chute.
Preferably, the A/F of said second chute is greater than said first chute.
Preferably, many to leg on the lower surface of two said bottom quartz pushrods to being provided with.
Preferably, said support frame is provided with handle.
Preferably, said support frame is provided with the multiple tracks bracing piece.
Compared with prior art, the utlity model has following beneficial effect:
1, reduced requirement, reduced cost for the machining accuracy of quartz boat.
2, can combine the automatic loading/unloading machine to realize automatic inserted sheet, further reduce the consuming time and fragment rate of artificial inserted sheet.
3, improved the output of production line.
Description of drawings
Fig. 1 is the transverse cross sectional view of the quartz boat of prior art.
Fig. 2 is the longitudinal profile view of the quartz boat of prior art.
Fig. 3 is the perspective view of the quartz boat of an embodiment of the utility model.
Fig. 4 is the transverse cross sectional view of the quartz boat of an embodiment of the utility model.
Fig. 5 is the structural representation of top quartz pushrod of the quartz boat of the utility model.
Fig. 6 be among Fig. 4 the C place along F-F to cutaway view.
Fig. 7 be among Fig. 4 along A-A to cutaway view.
Fig. 8 be among Fig. 4 B-B to cross section view.
Fig. 9 be among Fig. 5 along I-I to cutaway view.
Embodiment
Elaborate below in conjunction with the structure of accompanying drawing to the utility model.
Like Fig. 3 and shown in Figure 4; A kind of quartz boat that is used for automatic charging machine insertion silicon wafer process that the utility model provides; Comprise two support frames 1,2 that are oppositely arranged; And connection is arranged on two support frames 1, four quartz pushrods 3,4,5,6 between 2; Symmetry is horizontally disposed with and two ends are connected to two of both sides of said two support frames 1,2 and are top quartz pushrod 3,4, and is horizontally disposed with and two ends are connected to two of said two support frame 1,2 bottoms and are bottom quartz pushrod 5,6, promptly surrounds the quartz boat that carries the silicon chip (not shown) by these four quartz pushrods and two support frames 1,2; Here, plane, quartz pushrod 5,6 place, said bottom should be parallel with plane, said top quartz pushrod place, and all be parallel to horizontal plane, could guarantee to stablize inserted sheet like this; In the utility model; Evenly offer a plurality of axial chutes 31 on the opposed inside face of two symmetrically arranged said top quartz pushrods 3,4 perpendicular to said top quartz pushrod; The upper surface of said bottom quartz pushrod 5,6 is provided with and said chute 31 corresponding inserted slots 51, and said inserted slot is axial perpendicular to said bottom quartz pushrod; As shown in Figure 8, can also on said bottom quartz pushrod 5 (perhaps bottom quartz pushrod 6), boss 7 be set, for the front of said automatic charging machine (not shown) identification quartz boat.Such structure is in order to indicate the positive and negative of quartz boat, to make things convenient for the automatic charging machine identifying operation.Like this, the machining accuracy that only needs to guarantee quartz boat one side gets final product, and has reduced cost.After the outside of a support frame of said quartz boat is processed into datum level, positive in conjunction with automatic charging machine through boss 7 identification quartz boats, can by set operation silicon chip be inserted in the quartz boat accurately.As the further improvement to present embodiment, boss 7 levels are stretched out bottom quartz pushrod 5 and perpendicular to said bottom quartz pushrod 5.
And the quartz boat of use the utility model can combine the automatic loading/unloading machine to realize automatic inserted sheet, and silicon chip can vertically be inserted in the quartz boat along chute 31, and its bottom snaps in the inserted slot 51 the stable fragment that is difficult for simultaneously.The artificial inserted sheet of comparing, automatic loading/unloading machine transplanting of rice sheet can not only reduce the generation of fragment, also can increase substantially production efficiency simultaneously.
In the present embodiment, like Fig. 5 and shown in Figure 9, said chute 31 comprise straight down first chute 311 be arranged at that said top quartz pushrod 3 (perhaps the top quartz pushrod 4) upper semi-circle is communicated with first chute 311 and crossing at angle second chute 312.Can form one through second chute 312 like this silicon chip imported the guide groove of first chute 311, common second chute 312 and vertical direction angle are that 30 silicon chips when spending can import more smoothly, and at this moment, the angle of second chute 312 and first chute 311 is 150 to spend.In addition, as preferably, the A/F that can make said second chute 312 is greater than said first chute 311.Can form a broad relatively insertion mouth like this, make silicon chip get into more easily in the chute, further reduce the cracked during insertion possibility of silicon chip.
Further preferred again, in the quartz boat of present embodiment, the lower end of two horizontally disposed said bottom quartz pushrods is many to leg to being provided with.Like the leg among Fig. 3 and Fig. 6 51,61.In fact, as shown in Figure 7, through being set in quartz pushrod 5,6 bottoms, two bottoms, an inverted U-shaped supporting construction 8 also can play the effect identical like the leg among Fig. 6 51,61.
In addition, for the quartz boat of the utility model, though can realize the automatic inserted sheet of automatic loading/unloading machine.But still some operation needs operator's manual work to operate.Therefore, as shown in Figure 3, can on said support frame 1,2, handle 11,21 be set, handled easily person takes.
In the utility model, said support frame 1,2 and bottom quartz pushrod 5,6 need to carry all and insert the weight of silicon chip therein.Therefore, as shown in Figure 7, said support frame 2 (perhaps support frame 1) is provided with the multiple tracks bracing piece, and in the present embodiment, bracing piece comprises a transverse reinforced bar 14 and two bracing piece 15 longitudinally.
Above-mentioned embodiment only is the exemplary explanation to the utility model, the conspicuous modification that those skilled in the art carries out the utility model on this basis or be equal to replacement and all should be regarded as dropping in the protection range of the utility model.
Claims (7)
1. one kind is used for the quartz boat that automatic charging machine inserts silicon wafer process; Comprise that two support frames and the connection that are oppositely arranged are arranged on four quartz pushrods between two support frames; Said four quartz pushrods comprise that symmetry is horizontally disposed with and two ends be connected to said two support frames the both sides, top two top quartz pushrods be horizontally disposed with and two ends are connected to two root bottom part quartz pushrods of said two support frames bottom; Quartz pushrod plane, place, said bottom and said top quartz pushrod place plane parallel; It is characterized in that
Evenly offer a plurality of axial chutes on the opposed inside face of two symmetrically arranged said top quartz pushrods perpendicular to said top quartz pushrod; The upper surface of said bottom quartz pushrod is provided with and the corresponding inserted slot of said chute, and said inserted slot is axial perpendicular to said bottom quartz pushrod; One of them said bottom quartz pushrod is provided with and supplies the positive boss of said automatic charging machine identification quartz boat.
2. as claimed in claim 1ly be used for the quartz boat that automatic charging machine inserts silicon wafer process, it is characterized in that, said boss level is stretched out said bottom quartz pushrod and perpendicular to said bottom quartz pushrod.
3. the quartz boat that is used for automatic charging machine insertion silicon wafer process as claimed in claim 1; It is characterized in that, said chute comprise straight down first chute be arranged at that said top quartz pushrod upper semi-circle is communicated with said first chute and crossing at angle second chute.
4. the quartz boat that is used for automatic charging machine insertion silicon wafer process as claimed in claim 3 is characterized in that the A/F of said second chute is greater than said first chute.
5. the quartz boat that is used for automatic charging machine insertion silicon wafer process as claimed in claim 1 is characterized in that, and is many to leg to being provided with on the lower surface of two said bottom quartz pushrods.
6. the quartz boat that is used for automatic charging machine insertion silicon wafer process as claimed in claim 1 is characterized in that said support frame is provided with handle.
7. the quartz boat that is used for automatic charging machine insertion silicon wafer process as claimed in claim 1 is characterized in that said support frame is provided with the multiple tracks bracing piece.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN2011203088139U CN202172085U (en) | 2011-08-23 | 2011-08-23 | Quartz boat used for silicon slice insertion process of automatic feeding machine |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CN2011203088139U CN202172085U (en) | 2011-08-23 | 2011-08-23 | Quartz boat used for silicon slice insertion process of automatic feeding machine |
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CN202172085U true CN202172085U (en) | 2012-03-21 |
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CN2011203088139U Expired - Fee Related CN202172085U (en) | 2011-08-23 | 2011-08-23 | Quartz boat used for silicon slice insertion process of automatic feeding machine |
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102651427A (en) * | 2012-04-21 | 2012-08-29 | 中国电子科技集团公司第四十八研究所 | Guide device for bulk silicon wafers |
CN109335664A (en) * | 2018-11-26 | 2019-02-15 | 深圳市捷佳伟创新能源装备股份有限公司 | A kind of position detecting system and quartz boat transfer device |
CN109560028A (en) * | 2017-09-26 | 2019-04-02 | 天津环鑫科技发展有限公司 | Round silicon chip loading device |
CN109556411A (en) * | 2017-09-26 | 2019-04-02 | 天津环鑫科技发展有限公司 | A kind of silicon wafer production furnace body automatic loading and unloading mechanism |
-
2011
- 2011-08-23 CN CN2011203088139U patent/CN202172085U/en not_active Expired - Fee Related
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102651427A (en) * | 2012-04-21 | 2012-08-29 | 中国电子科技集团公司第四十八研究所 | Guide device for bulk silicon wafers |
CN109560028A (en) * | 2017-09-26 | 2019-04-02 | 天津环鑫科技发展有限公司 | Round silicon chip loading device |
CN109556411A (en) * | 2017-09-26 | 2019-04-02 | 天津环鑫科技发展有限公司 | A kind of silicon wafer production furnace body automatic loading and unloading mechanism |
CN109335664A (en) * | 2018-11-26 | 2019-02-15 | 深圳市捷佳伟创新能源装备股份有限公司 | A kind of position detecting system and quartz boat transfer device |
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Legal Events
Date | Code | Title | Description |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120321 Termination date: 20200823 |