CN111884019B - Three-dimensional multi-beam laser parameter regulation and control method and system - Google Patents
Three-dimensional multi-beam laser parameter regulation and control method and system Download PDFInfo
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Abstract
The invention relates to a three-dimensional multi-beam laser parameter regulation and control method and a system, which comprises the steps of initializing a laser system, obtaining a hologram of an output light field and generating a plurality of laser beams, wherein the plurality of laser beams are incident on a light spot energy and position sensing assembly through a light path; the light spot energy and position sensing assembly sequentially collects the energy and position information of all laser beams with focuses not on the same plane, the energy and position information is fed back and modulated to be matched with preset target energy and position information, and the laser system controls the light path to be switched, so that a plurality of laser beams are incident to a target area through the light path. The invention dynamically adjusts the energy and position information of each laser beam, monitors the parameter information and quality of the output light beam in real time, has flexible control, ensures that each laser beam incident to a target area reaches a corresponding set target, effectively reduces the error of an optical system, satisfies the requirement that each laser beam can be modulated randomly and accurately, and improves the utilization rate of the laser in multiples.
Description
Technical Field
The invention relates to the technical field of laser processing, in particular to a three-dimensional multi-beam laser parameter regulating and controlling method and system.
Background
The multi-beam control technique generally refers to a technique for simultaneously controlling various parameters of a plurality of laser beams, and the common controllable parameters include parameters such as the number, the direction, the light intensity distribution (mode), the light intensity, and the light power of the laser beams. When the light beam converges on the spherical wave front, the light beam can be converged into a light spot in a three-dimensional space after passing through the positive lens, and the axial distance of the light spot can be controlled by changing the position of the positive lens or the focal length of the lens. The three-dimensional multi-beam is widely applied to the fields of medicine, optics, physics, microelectronics, laser communication, laser processing, laser radar and the like.
The method for generating the three-dimensional multi-beam comprises the following steps: microlens array method, multi-laser method, diffractive optical element method, programmable diffraction device method, and the like. The three methods can only be applied to application scenes with fixed intervals or periodic structures, have poor application flexibility, cannot realize parameter control of any three-dimensional light beam, and are difficult to meet the requirement of batch manufacturing of any structures.
The parameter control of three-dimensional multi-beam is realized based on the programmable diffraction device, the hologram is calculated mainly by using different algorithms, and the quantity, the space position, the energy distribution, the energy intensity and the like of light can be changed. The key to modulating light by this method is the hologram, and the key to generating the phase map is the algorithm, and the current mainstream algorithms are divided into two categories: 1) non-iterative algorithms, such as GL algorithm, RM algorithm, S algorithm, SR algorithm and the like, have the characteristics of high calculation speed, low diffraction efficiency, large calculation error and difficulty in realizing accurate control; 2) iterative algorithms, such as GS algorithm, GAA algorithm, DS algorithm, GSW algorithm, ORA algorithm, etc., which are characterized by high diffraction efficiency, small calculation error, but slow calculation speed.
In the actual use process, the iterative algorithm only iterates inside the algorithm, the actual multi-beam parameter result cannot be detected and judged, and when the light path has light source errors, device installation errors, manufacturing errors and other influence factors, the calculated hologram error is larger finally, and the requirements of actual application cannot be met.
For example, chinese publication No. CN109079318B discloses a femtosecond laser manufacturing system and method for a silicon photonic crystal waveguide based on a spatial light modulator, which is disclosed in 24.4.2020, the system modulates light beams by the spatial light modulator to realize multi-beam parallel processing, and for the number and distribution of the light beams in the parallel processing, the inspection is performed by observing images photographed by a CCD camera. As is well known, a CCD camera, as an integral detection device, indirectly calculates the distance corresponding to each pixel from the gray scale of an obtained image by modulation/resolution, thereby obtaining a three-dimensional image of a target, and the energy information of each laser beam cannot be observed from the CCD image. The patent does not disclose how to observe and judge the occurrence of an error condition of each laser beam in multiple beams, nor how to regulate and control the error laser beam without influencing other error-free laser beams when the error condition occurs, and moreover, the iterative modulation of the error laser beam cannot be obtained only by 'modifying in a computer' disclosed in the patent specification, and the closed-loop feedback control cannot be determined. On the basis of the patent, a skilled person in the art needs to further study, and the difficulty of the research process lies in how to judge whether the actual state of the position and energy of any laser beam in the multiple laser beams is matched with the target state, and how to regulate and control according to the real-time laser beam state when the actual state of the position and energy of the laser beams is not matched with the target state, so as to obtain the laser beams matched with the preset state of the laser beams, thereby ensuring that each laser beam incident to the target area reaches the set target of the corresponding position and energy, and effectively reducing the error of the optical system.
China, publication No. CN107065124A, is dedicated to the method for realizing feedback control of light beam focusing based on a liquid crystal spatial light modulator, disclosed in 2017, 8, 18. the patent realizes programmable control of three-dimensional position of a light beam focusing point through the spatial light modulator and realizes real-time feedback control of the focusing point position through an area array detector. Since this patent application does not relate to multi-beam parallel processing, its control method does not relate to individual regulation of the position and energy of each laser beam in the multi-beam. Also, the CCD camera is one of the area array detectors, and this patent application has a problem that real-time energy information of each laser beam of the plural beams cannot be acquired, as in the patent publication No. CN 109079318B.
As can be seen, the prior art does not disclose the contents of detecting and judging the actual position and energy information of the multiple beams, and performing iterative modulation of the output laser beams according to the actual detection result so as to match the real-time state of each laser beam in the multiple beams with the target state. Moreover, most of the multi-beam parallel processing in the market at present cannot simultaneously adjust the position and energy of any beam in the multi-beam, cannot effectively utilize all energy output by the laser, has low laser processing efficiency and low flexibility, and limits the application of the multi-beam parallel processing.
Disclosure of Invention
The technical problem to be solved by the present invention is to provide a method and a system for adjusting and controlling three-dimensional multi-beam laser parameters, aiming at the above-mentioned deficiencies of the prior art.
The technical scheme for solving the technical problems is as follows:
according to an aspect of the present invention, there is provided a three-dimensional multi-beam laser parameter adjusting method, including the steps of:
step 12: adjusting the distance between the outgoing laser beam and the detection assembly in the detection area, sequentially detecting the energy and position information of all laser beams incident to different planes, judging whether the real-time energy and position information of each laser beam are matched with the corresponding preset energy and position information of the laser beam, if so, matching the real-time state of the laser beam with the preset state, and entering step 14, otherwise, entering step 13;
step 13: modulating the energy and position information of the unmatched laser beams, generating a new hologram according to the modulated energy and position information, generating a new laser beam according to the new hologram, enabling the new laser beam to be incident to the detection area, and returning to the step 12;
step 14: generating a plurality of laser beams according to the holograms corresponding to the energy and position information of all the laser beams with the real-time state matched with the preset state, wherein the laser beams are incident to a target area;
in step 12, the step of determining whether the real-time energy and position information of each laser beam match the corresponding preset energy and position information further includes:
(either)actual energy value of laser beamI i And actual position coordinatesP i If the following preset matching conditions are met, matching the real-time energy and the position information of the laser beam with the corresponding preset energy and position information, otherwise, mismatching;
the preset matching conditions are as follows:
𝛥I i =I i -I i—targ
𝛥P i =P i -P i—targ
𝛥I i <I𝜀
𝛥P i <P𝜀
wherein,I i is as followsiThe actual energy value of the beam laser beam,I i—targ is as followsiThe target energy value of the beam laser beam,P i is as followsiThe actual position coordinates of the beam laser beam,P i—targ is as followsiThe target position coordinates of the beam laser beam,𝛥I i is as followsiAn energy deviation value between an actual energy value and a target energy value of the beam laser beam,𝛥P i is as followsiA positional coordinate deviation value of the actual positional coordinate of the beam laser beam from the target positional coordinate,I𝜀in order to preset the threshold value of the energy deviation,P𝜀a preset position coordinate deviation threshold value;
in step 13, the step of modulating the energy and the position information of the unmatched laser beam further includes:
step 131: correcting according to the energy deviation value and the position coordinate deviation value, wherein the specific calculation formula is as follows:
G Ii =M i *𝛥I i +I i—targ
G Pi =N i *𝛥P i +P i—targ
step 132: determining the updated image plane transformation phase and the image plane light field amplitude according to the corrected energy value and the position coordinate value;
step 133: performing inverse Fourier transform according to the updated image plane light field amplitude and the updated image plane transformation phase to obtain a modulated image plane light field amplitude and a modulated phase;
wherein, theM i Is as followsiThe energy weight coefficient of the beam laser beam,N i is as followsiThe position coordinate weight coefficient of the beam laser beam, I i—targ is as followsiThe target energy value of the beam laser beam, P i—targ is as followsiThe target position coordinates of the beam laser beam, G Ii is as followsiThe corrected energy value of the beam laser beam, G Pi is as followsiThe position coordinate value after the beam laser beam correction,ithe value range of (a) is [1,k]，kthe total number of laser beams.
In the technical scheme, the energy and position information of each laser beam is accurately acquired in turn by adjusting the distance between the focus of the emergent laser beam and the detection assembly for detecting the energy and position of the facula in the area, and is fed back to the control terminal for closed-loop feedback control, dynamically adjusts the energy and position information of each laser beam, monitors the parameter information and quality of the output light beam in real time, has flexible control, can eliminate the influence caused by the manufacturing and installation errors of optical devices, thereby ensuring that each laser beam incident to the target area reaches the corresponding set target, effectively reducing the error of the optical system, the energy and position information of each laser beam can be controlled randomly in a three-dimensional space so as to meet the requirement that each laser beam in a target area can be modulated randomly and accurately, the laser utilization rate is improved exponentially, and the requirement of an actual application scene is met.
According to the technical scheme, whether each laser beam meets the corresponding preset requirement can be judged through the preset matching condition formula, and iteration processing is carried out when the preset requirement is not met, so that each laser beam output to the target area finally meets the preset target, and the multiple laser beams irradiated to the target area in the three-dimensional space are controlled in a targeted manner, so that the random and accurate regulation and control requirements of the multiple laser beams are met.
In the technical scheme, iterative modulation is carried out when the energy and position information of the laser beams are not matched with the corresponding preset energy and position information, and the process is circulated until the energy and position information of each laser beam are matched with the corresponding preset energy and position information, so that each laser beam incident to the surface of the workpiece reaches the corresponding set energy and position, and the requirements of arbitrary and accurate regulation and control of the multiple laser beams are met.
On the basis of the technical scheme, the invention can be further improved as follows:
further: in step 11, initializing the laser system specifically includes:
step 111: superposing the random initial phase to an incident light field, and performing Fourier transform to obtain corresponding optical field distribution of the surface where the frequency domain is located, the amplitude of the optical field of the surface where the frequency domain is located and the phase of the surface where the frequency domain is located;
step 112: replacing the preset target light field amplitude with the light field amplitude of the surface where the frequency domain is located, and performing inverse Fourier transform according to the phase of the surface where the frequency domain is located to obtain updated surface light field distribution of the space domain, the light field amplitude of the surface where the space domain is located and the phase of the surface where the space domain is located;
step 113: generating a hologram according to the updated optical field distribution of the plane of the airspace, the amplitude of the optical field of the plane of the airspace and the phase of the plane of the airspace;
step 114: loading the hologram onto the laser system, the laser system generating a plurality of laser beams from the hologram.
The beneficial effects of the further scheme are as follows: the method comprises the steps of carrying out Fourier transform on random initial phases to generate the distribution of the surface light field of a frequency domain, the amplitude of the surface light field of the frequency domain and the phase of the surface of the frequency domain as references, and carrying out inverse transformation by replacing the amplitude of the surface light field of the frequency domain with the amplitude of a target light field to obtain a phase generation hologram of the surface of the space domain, so that a corresponding hologram is determined, and a light beam parameter regulating and controlling assembly can conveniently generate a plurality of laser beams according to the hologram.
Further: in step 12, the sequentially acquiring the energy and position information of all laser beams with focal points not on the same plane specifically includes the following steps:
step 121: the light spot energy and position sensing assembly receives a plurality of laser beams and generates a corresponding outline according to the laser beams with the focal points positioned on the plane where the light spot energy and position sensing assembly is positioned;
step 122: collecting the actual energy values corresponding to all the light spots in the outline rangeI i And actual position coordinatesP i ；
Step 123: adjusting the relative positions of the spot energy and position sensing assembly and the focal points of the plurality of laser beams, and repeating the steps 121 and 122 until the actual energy values corresponding to all the laser beams are reachedI i And actual position coordinatesP i And finishing the collection.
The beneficial effects of the further scheme are as follows: the energy and position information of the laser beams with the focuses on different planes is acquired by adjusting the relative positions of the light spot energy and position sensing assemblies and the focuses of the corresponding laser beams, so that the aim of setting the energy and position information of each laser beam output finally is fulfilled through subsequent closed-loop feedback control, and the targeted control of each laser beam in a three-dimensional space is realized.
Further: in step 123, the adjusting the relative position of the spot energy and position sensing assembly and the focal points of the multiple laser beams is implemented as follows:
and adjusting the distance between the focal point of the laser beam and the spot energy and position sensing assembly so that the spot energy and position sensing assembly acquires the energy and position information of the laser beam when the focal point of the laser beam is positioned on the plane where the spot energy and position sensing assembly is positioned.
The beneficial effects of the further scheme are as follows: by adjusting the distance between the focal point of the laser beam emitted by the laser system and the facula energy and position sensing assembly, the focal point of each laser beam can be ensured to be positioned on the plane of the facula energy and position sensing assembly in the adjusting process, so that the laser beam can be accurately acquired.
Further: in step 123, the adjusting the relative position of the spot energy and position sensing assembly and the focal points of the multiple laser beams is implemented as follows:
and superposing a Fresnel lens phase hologram with adjustable parameters and a focal length offset function on the hologram, and adjusting the focus of the corresponding laser beam to the plane where the light spot energy and position sensing assembly is located by adjusting the parameters of the Fresnel lens so that the light spot energy and position sensing assembly acquires the energy and position information of the corresponding laser beam.
The beneficial effects of the further scheme are as follows: the method is characterized in that a Fresnel lens phase hologram with adjustable parameters and a focal length offset function is superposed on the hologram, and the focal point of a corresponding laser beam is adjusted to the plane where the light spot energy and position sensing assembly is located by adjusting the parameters of the Fresnel lens, so that the light spots of different focal planes can be detected without moving the light spot energy and position sensing assembly, and the rapid three-dimensional position detection and feedback without mechanical motion are realized.
According to another aspect of the present invention, a three-dimensional multi-beam laser parameter adjusting and controlling system is provided for implementing the method, the system includes a laser light source, a light path deflection component, a beam parameter adjusting and controlling component, a spot energy and position sensing component and a control terminal, the beam parameter adjusting and controlling component, the spot energy and position sensing component are respectively connected with the control terminal;
the control terminal is used for initializing and generating a hologram of an output light field, and loading the hologram onto the light beam parameter regulation and control component;
the optical path deflection assembly is used for enabling a plurality of laser beams to be incident on the light spot energy and position sensing assembly positioned in the detection area or the working plane positioned in the target area;
the beam parameter regulating and controlling component is used for receiving the laser beams output by the laser light source and generating a plurality of laser beams according to the hologram;
the light spot energy and position sensing assembly is used for receiving the laser beams and sequentially collecting energy and position information of all the laser beams with focuses not on the same plane;
the control terminal is further used for judging whether the energy and position information of each laser beam is matched with corresponding preset energy and position information or not, and controlling the light beam parameter regulation and control assembly to generate a plurality of laser beams according to holograms corresponding to the energy and position information of all the laser beams during matching; and when the laser beams are not matched, carrying out iterative modulation processing according to the energy and the position information of each laser beam until the energy and the position information of each laser beam are matched with the corresponding preset energy and position information.
Compared with the prior art, the invention has the beneficial effects that:
(1) the invention accurately collects the energy and position information of each laser beam in turn by adjusting the distance between the focus of the emergent laser beam and the energy and position of the facula and the position sensing component, and feeds the energy and position information back to the control terminal for closed-loop feedback control, dynamically adjusts the energy and position information of each laser beam, monitors the energy and position information and quality of the output beam in real time, has flexible control, can eliminate the influence caused by the manufacturing and installation errors of optical devices, thereby ensuring that each laser beam incident to a target area reaches a corresponding set target, effectively reducing the errors of an optical system, and arbitrarily controlling the energy and position information of each laser beam in a three-dimensional space, so as to meet the requirement that each laser beam in the target area can realize arbitrary and accurate modulation, and improve the utilization rate of the laser in multiples, thereby achieving the requirement of practical application scenes.
(2) The method comprises the steps of carrying out matching judgment on the real-time state and the preset state of each laser beam, and carrying out iteration processing when the preset requirement is not met, so that each laser beam output to a target area meets a preset target; the energy and the position information of each laser beam are dynamically adjusted through closed-loop feedback control of the real-time energy and the position information of the laser beams, so that the independent and accurate regulation and control of a plurality of parameters of any one of a plurality of laser beams are realized, the whole output energy of the laser beams is effectively utilized, and the laser processing efficiency is improved.
Drawings
Fig. 1 is a schematic flow chart of a three-dimensional multi-beam laser parameter adjusting method according to an embodiment of the invention.
Fig. 2 is a schematic diagram of collecting parameter information of different corresponding laser beams according to an embodiment of the present invention.
Fig. 3 is a schematic diagram of acquiring parameter information of the same corresponding laser beam according to an embodiment of the present invention.
Fig. 4 is a schematic structural diagram of a three-dimensional multi-beam laser parameter adjusting and controlling system according to another embodiment of the invention.
In the drawings, the components represented by the respective reference numerals are listed below:
1. the device comprises a laser light source, a polarization direction and energy adjusting component, a first reflector, a light beam parameter adjusting component, a first lens, a second reflector, a third reflector, a second lens, a turning mirror, a first focusing component, a second focusing component, a light spot energy and position sensing component, a third focusing component, a second lens, a turning mirror, a first focusing component, a second focusing component, a light spot energy and position sensing component, a third focusing component, a fourth reflector, a second focusing component, a third focusing component, a three-dimensional motion workbench, a control terminal and a control terminal.
Detailed Description
The principles and features of this invention are described below in conjunction with the following drawings, which are set forth by way of illustration only and are not intended to limit the scope of the invention.
Example 1
In this embodiment, the laser parameter regulation and control system includes a laser light source, a light path deflection component, a light beam parameter regulation and control component, a light spot energy and position sensing component 12 and a control terminal 16, wherein the light beam parameter regulation and control component, the light spot energy and position sensing component 12 are respectively connected with the control terminal 16; the control terminal 16 is configured to initialize and generate a hologram of an output light field, and load the hologram onto the beam parameter adjustment and control component; the optical path deflection assembly is used for enabling a plurality of laser beams to be incident on the light spot energy and position sensing assembly 12 positioned in the detection area or the working plane positioned in the target area; the beam parameter regulating and controlling component is used for receiving the laser beams output by the laser light source and generating a plurality of laser beams according to the hologram; the light spot energy and position sensing component 12 is configured to receive the laser beam and collect energy and position information of a plurality of laser beams whose focal points are located on a plane where the light spot energy and position sensing component 12 is located; the control terminal 16 is further configured to determine whether the energy and position information of each laser beam is matched with corresponding preset energy and position information, and when the energy and position information of each laser beam is matched with the preset energy and position information, control the beam parameter adjusting and controlling assembly to generate a plurality of laser beams according to the holograms corresponding to the energy and position information; and when the laser beams are not matched, respectively carrying out iterative modulation processing according to the energy and the position information of each laser beam until the energy and the position information of each laser beam are matched with the corresponding preset energy and position information.
The optical path deflecting element is composed of a plurality of optical devices capable of performing its function. The light beam parameter regulating and controlling component adopts a programmable diffraction optical device. The spot energy and position sensing assembly 12 employs existing sensing devices that perform its function. The control terminal 16 is a computer, an industrial personal computer or other devices capable of realizing the functions thereof.
As shown in fig. 1, a three-dimensional multi-beam laser parameter adjusting method includes the following steps:
Step 12: the light spot energy and position sensing assembly 12 sequentially collects energy and position information of all laser beams with focuses not on the same plane and transmits the energy and position information to the control terminal 16, the control terminal 16 judges whether the energy and position information of each laser beam is matched with corresponding preset target energy and position information, if the energy and position information of each laser beam is matched with the corresponding preset target energy and position information, the real-time state of the laser beam is matched with the preset state, the step 14 is carried out, and if the energy and position information of each laser beam is not matched with the corresponding preset target energy;
step 13: the control terminal 16 modulates the energy and position information of the unmatched laser beam, generates a new hologram according to the modulated energy and position information, the beam parameter regulating and controlling component generates a new laser beam according to the new hologram, the new laser beam is incident on the light spot energy and position sensing component 12, and the step 12 is returned;
step 14: and generating a plurality of laser beams according to the holograms corresponding to the energy and position information of all the laser beams with the real-time state matched with the preset state, wherein the laser beams are incident to the target area.
The regulating method of the three-dimensional multi-beam laser parameter regulating system of the invention accurately collects the energy and position information of each laser beam in turn by regulating the distance between the focus of the laser beam emitted by the laser system and the spot energy and position sensing component 12, carries out closed-loop feedback control, dynamically regulates the energy and position information of each laser beam, monitors the parameter information and quality of the output beam in real time, has flexible control, can eliminate the influence caused by the manufacturing and installation errors of optical devices, thereby ensuring that each laser beam incident to a target area reaches a corresponding set target, effectively reducing the errors of an optical system, and can arbitrarily control the energy and position information of each laser beam in a three-dimensional space so as to meet the requirement that each laser beam in the target area can realize arbitrary and accurate modulation, and improve the laser utilization rate in multiples, and the requirements of practical application scenes are met.
In the present invention, in order to make the output multiple laser beams have high-quality and arbitrary irradiation effects on different local regions when being incident on the target region, the spatial positions of the target multiple laser beams and the threshold values for representing the parameter information of the multiple laser beams need to be preset, so that it is convenient to compare the energy and position information collected on the spot energy and position sensing assembly 12 in the following process, so as to determine whether the set requirements are met.
In one or more embodiments of the present invention, in step 11, initializing the laser system specifically includes:
step 111: superposing the random initial phase to an incident light field, and performing Fourier transform to obtain corresponding optical field distribution of the surface where the frequency domain is located, the amplitude of the optical field of the surface where the frequency domain is located and the phase of the surface where the frequency domain is located;
step 112: replacing the preset target light field amplitude with the light field amplitude of the surface where the frequency domain is located, and performing inverse Fourier transform according to the phase of the surface where the frequency domain is located to obtain updated surface light field distribution of the space domain, the light field amplitude of the surface where the space domain is located and the phase of the surface where the space domain is located;
step 113: generating a hologram according to the updated optical field distribution of the plane of the airspace, the amplitude of the optical field of the plane of the airspace and the phase of the plane of the airspace;
step 114: loading the hologram onto the laser system, the laser system generating a plurality of laser beams from the hologram.
The method comprises the steps of carrying out Fourier transform on random initial phases to generate the distribution of the surface light field of a frequency domain, the amplitude of the surface light field of the frequency domain and the phase of the surface of the frequency domain as references, and carrying out inverse transformation by replacing the amplitude of the surface light field of the frequency domain with the amplitude of a target light field to obtain a phase generation hologram of the surface of the space domain, so that a corresponding hologram is determined, and a light beam parameter regulating and controlling assembly can conveniently generate a plurality of laser beams according to the hologram.
Here, after loading the hologram onto the laser system, the laser system generates a plurality of laser beams from the hologram.
In one or more embodiments of the present invention, in step 12, the sequentially acquiring the energy and position information of all laser beams whose focal points are not in the same plane specifically includes the following steps:
step 121: the light spot energy and position sensing component 12 receives a plurality of laser beams and generates a corresponding profile according to the laser beam with the focal point located on the plane of the light spot energy and position sensing component 12;
step 122: collecting all of the contoursActual energy value corresponding to light spotI i And actual position coordinatesP i ；
Step 123: adjusting the relative positions of the spot energy and position sensing assembly 12 and the focal points of the plurality of laser beams, and repeating the above steps 121 and 122 until the actual energy values corresponding to all the laser beams are reachedI i And actual position coordinatesP i And finishing the collection.
The energy and position information of the laser beams with the focuses on different planes is acquired by adjusting the relative positions of the spot energy and position sensing assembly 12 and the focuses of the corresponding laser beams, so that the purpose of setting the energy and position information of each laser beam output finally is achieved through subsequent closed-loop feedback control, and the targeted control of each laser beam in a three-dimensional space is realized.
In one or more embodiments of the present invention, in the step 123, the adjusting the relative position of the spot energy and position sensing assembly 12 and the focal points of the plurality of laser beams is implemented as follows:
by adjusting the distance between the focal point of the laser beam emitted by the laser system and the spot energy and position sensing assembly 12, it can be ensured that the focal point of each laser beam can be located on the plane of the spot energy and position sensing assembly 12 in the adjusting process, so that the focal point can be accurately acquired.
In practice, the spot energy and position sensing assembly 12 may be disposed on a linear displacement stage, and may move up and down (z direction) along with the linear displacement stage, so as to adjust a distance between a focal point of a laser beam emitted from the laser system and the spot energy and position sensing assembly 12, and acquire parameter information of the laser beam when the focal point of the laser beam is located on a plane where the spot energy and position sensing assembly 12 is located.
In one or more embodiments of the present invention, in the step 123, the adjusting the relative position of the spot energy and position sensing assembly 12 and the focal points of the plurality of laser beams is implemented as follows:
a fresnel lens phase hologram with adjustable parameters and a focal length shift function is superimposed on the hologram, and the focal point of the corresponding laser beam is adjusted to the plane where the light spot energy and position sensing assembly 12 is located by adjusting the parameters of the fresnel lens, so that the light spot energy and position sensing assembly 12 collects the energy and position information of the corresponding laser beam.
The method is characterized in that a Fresnel lens phase hologram with adjustable parameters and a focal length offset function is superposed on the hologram, and the focal point of a corresponding laser beam is adjusted to the plane of the light spot energy and position sensing component 12 by adjusting the parameters of the Fresnel lens, so that the light spots of different focal planes can be detected without moving the light spot energy and position sensing component 12, and the rapid three-dimensional position detection and feedback without mechanical motion are realized. The method does not need mechanical movement, so the method has the advantages of high speed and accurate positioning.
As shown in fig. 2, for each laser beam, the relative position of the spot energy and position sensing assembly 12 and the focus of the laser beams is adjusted, so that the focus of the corresponding laser beam is exactly located on the plane where the spot energy and position sensing assembly 12 is located, and then the energy and position information of the corresponding laser beam is collected, it can be seen that, after feedback modulation, the energy and the location of the laser beam collected by the spot energy and position sensing assembly 12 are different and all reach the corresponding set target, so as to meet the arbitrary and accurate regulation and control of the laser beams, and thus, each laser beam is subjected to feedback modulation, so that the energy and the position information of the laser beams in the three-dimensional space can be matched with the corresponding preset target parameter information.
In particular, in practical applications, in a specific application scenario, a plurality of uniform laser beams are required to irradiate a target area, and in this case, the method may also be used to perform feedback modulation on the plurality of laser beams, so that laser parameters (energy, brightness, etc.) of the plurality of laser beams are kept consistent and irradiate the target area, thereby achieving the effect of uniform irradiation, as shown in fig. 3.
In practice, a plurality of circular outlines with the shapes consistent with the target light beams need to be generated according to each laser beam and are subjected to scaling adjustment, so that the plurality of circular outlines can frame the light spot energy and all the laser beams collected by the position sensing assembly 12; by adjusting the circular outline to a proper size, the circular outline can be framed to a proper laser beam so as to acquire corresponding energy and position information.
In one or more embodiments of the present invention, the step 12 of determining whether the real-time energy and position information of each laser beam match with the corresponding preset energy and position information further includes:
judging the actual energy valueI i And actual position coordinatesP i Whether a preset matching condition is met or not is judged, and when the preset matching condition is met, the energy and position information of the laser beam are determined to be matched with the corresponding preset target energy and position information, otherwise, the energy and position information are not matched;
the preset matching conditions are as follows:
𝛥I i =I i -I i—targ
𝛥P i =P i -P i—targ
𝛥I i <I𝜀
𝛥P i <P𝜀
wherein,I i is as followsiThe actual energy value of the beam laser beam,I i—targ is as followsiThe target energy value of the beam laser beam,P i is as followsiThe actual position coordinates of the beam laser beam,P i—targ is as followsiThe target position coordinates of the beam laser beam,𝛥I i is as followsiAn energy deviation value between an actual energy value and a target energy value of the beam laser beam,𝛥P i is as followsiA positional coordinate deviation value of the actual positional coordinate of the beam laser beam from the target positional coordinate,I𝜀in order to preset the threshold value of the energy deviation,P𝜀is a preset position coordinate deviation threshold value.
Whether each laser beam meets the corresponding preset requirement can be judged through the formula, and iterative processing is carried out when the preset requirement is not met, so that each laser beam output to the target area finally meets the preset target, and the multiple laser beams irradiated to the target area in the three-dimensional space are controlled in a targeted manner, so that the random and accurate regulation and control requirements of the multiple laser beams are met.
In one or more embodiments of the present invention, in step 13, the specific method for modulating the energy and the position information of the unmatched laser beam includes:
step 131: correcting according to the energy deviation value and the position coordinate deviation value, wherein the specific calculation formula is as follows:
G Ii =M i *𝛥I i +I i—targ
G Pi =N i *𝛥P i +P i—targ
step 132: determining the updated image plane transformation phase and the image plane light field amplitude according to the corrected energy value and the position coordinate value;
step 133: performing inverse Fourier transform according to the updated image plane light field amplitude and the updated image plane transformation phase to obtain a modulated image plane light field amplitude and a modulated phase;
wherein, theM i Is as followsiThe energy weight coefficient of the beam laser beam,N i is as followsiThe position coordinate weight coefficient of the beam laser beam, I i—targ is as followsiThe target energy value of the beam laser beam, P i—targ is as followsiThe target position coordinates of the beam laser beam, G Ii is as followsiThe corrected energy value of the beam laser beam, G Pi is as followsiCorrected position of the beam laser beamThe coordinate values are, for example,ithe value range of (a) is [1,k]，kthe total number of laser beams.
By modulating the energy and position information by adopting the method, the energy and position information of the laser beam can be corrected when the energy and position information of the laser beam are not matched with the corresponding preset target energy and position information, and the process is circulated until the energy and position information of each laser beam are matched with the corresponding preset target energy and position information, so that each laser beam incident to the surface of the workpiece can reach the corresponding set target, and the requirements of arbitrary and accurate regulation and control of a plurality of laser beams can be met.
It should be noted that the selection of the weight coefficient may cause different speeds of matching convergence (speed of calculating to achieve matching) in the loop iteration, and the selection of the weight coefficient may also cause a good or bad effect of the final calculation on the arbitrary regulation. In the embodiment of the invention, the ranges of the energy weight coefficient and the position coordinate weight coefficient are both selected to be between 0 and 1.
Compared with the prior art, the three-dimensional multi-beam laser parameter regulation and control method has the regulation and control functions of the parallel multi-beam multi-element parameters so as to realize the control of the quantity, the shape and the focal position of the laser beams and the energy distribution of the strong laser beams, and can flexibly regulate the position, the quantity and the energy of the multi-beam by loading different holograms in the modulation process and flexibly meet the requirements of various application scenes controlled by the lasers; meanwhile, a feedback mechanism is added, the light spot energy and position sensing assembly 12 is used as a light intensity collector, the state and the quality of the output light beam are monitored in real time, and the output light beam is parameterized and fed back to the control terminal 16 for adjustment, so that the problem that the energy and the position of multiple light spots are difficult to accurately control in the prior art is solved.
The three-dimensional multi-beam laser parameter regulating method can be widely applied to the technical fields of medicine, optics, physics, microelectronics, laser communication, laser processing, laser radar, laser 3D printing, device molding (such as glass edge molding and optical fiber surface and internal molding) and the like, and has wide application prospect.
Example 2
As shown in fig. 4, a three-dimensional multi-beam laser parameter adjusting and controlling system includes a laser source 1 for generating coherent laser beams, a beam parameter adjusting and controlling assembly 4, a turning mirror 9, a first focusing assembly 10, a spot energy and position sensing assembly 12, a second focusing assembly 14, a three-dimensional moving table 15 and a control terminal 16, wherein the laser source 1, the beam parameter adjusting and controlling assembly 4 and the turning mirror 9 are sequentially connected in an optical path, the turning mirror 9 is freely rotatable, so that the laser beams are incident on the spot energy and position sensing assembly 12 via the first focusing assembly 10 or incident on a workpiece on the three-dimensional moving table 15 via the second focusing assembly 14, a distance between a focal point of the laser beams emitted from the first focusing assembly 10 and the spot energy and position sensing assembly 12 is relatively adjustable, and the control terminal 16 and the beam parameter adjusting and controlling assembly 4 respectively, The light spot energy and position sensing assembly 12, the linear displacement table 11 and the three-dimensional motion table 15 are electrically connected.
The control terminal 16 is used for initializing and generating a hologram of an output light field, and loading the hologram onto the beam parameter control component 4; the beam parameter adjusting and controlling component 4 receives the laser beam output by the laser light source, generates a plurality of laser beams according to the hologram, and the plurality of laser beams reach the turning mirror 9 through the light path and are incident on the spot energy and position sensing component 12 through the first focusing component 10 or are incident on the workpiece through the second focusing component 14 after being reflected; the light spot energy and position sensing component 12 receives the laser beams and sequentially collects the laser parameter information of all the laser beams with focuses not on the same plane; the control terminal 16 is further configured to determine whether the laser parameter information of each laser beam matches with corresponding preset target laser parameter information, and control the beam parameter adjusting and controlling assembly 4 to generate a plurality of laser beams according to holograms corresponding to the laser parameter information of all the laser beams during matching; and when the laser parameter information of each laser beam is not matched with the preset target laser parameter information, carrying out iterative modulation processing according to the laser parameter information of each laser beam until the laser parameter information of each laser beam is matched with the corresponding preset target laser parameter information.
The three-dimensional multi-beam laser parameter regulating and controlling system of the invention sequentially and accurately acquires the parameter information of each beam of laser beams by regulating the distance between the focus of the emergent laser beams and the facula energy and position sensing component 12, and fed back to the control terminal 16 for closed-loop feedback control, dynamically adjusting the parameter information of each laser beam, monitoring the parameter information and quality of the output light beam in real time, controlling flexibly, eliminating the influence caused by the manufacturing and mounting errors of optical devices, thereby ensuring that each laser beam incident on the surface of the workpiece reaches a corresponding set target, effectively reducing the error of an optical system, each laser beam can be controlled in a three-dimensional space in a targeted manner, so that each laser beam in a target area can be modulated randomly and accurately, the laser utilization rate is improved in a multiplied manner, and the requirements of practical application scenes are met.
In one or more embodiments of the present invention, the three-dimensional multi-beam laser parameter adjusting system further includes a polarization direction and energy adjusting component 2, a first reflecting mirror 3, a first lens 5, a second reflecting mirror 6, a third reflecting mirror 7 and a second lens 8, the polarization direction and energy adjusting component 2 and the first reflecting mirror 3 are disposed between the laser source 1 and the beam parameter adjusting component 4 of the laser beam, the laser source 1, the polarization direction and energy adjusting component 2, the first reflecting mirror 3 and the beam parameter adjusting component 4 are sequentially connected by an optical path, the first lens 5, the second reflecting mirror 6, the third reflecting mirror 7 and the second lens 8 are disposed between the beam parameter adjusting component 4 and the turning mirror 9, and the beam parameter adjusting component 4, the first lens 5, the second reflecting mirror 6, the third reflecting mirror 7, The second lens 8 and the flip mirror 9 are connected in sequence. The laser beam emitted by the laser light source 1 can be adjusted by setting the polarization direction and energy adjusting component 2, so that the laser beam is reflected by the first reflecting mirror 3 and then is incident to the light beam parameter adjusting and controlling component, and is focused by the first lens 5, the second reflecting mirror 6, the third reflecting mirror 7 and the second lens 8 and then is incident to the turnover mirror 9, and subsequent feedback adjustment is facilitated.
The polarization direction and energy adjusting component 2 adopts a glass slide and a polarization beam splitter, the polarization direction and energy of the light beam at the output end are ensured to be adapted to the light beam parameter adjusting and controlling component 4, the light beam parameter adjusting and controlling component 4 is used for changing the amplitude or the intensity, the phase, the polarization state and the diffraction angle of light distribution on the space, and the light spot energy and position sensing component 12 is used for collecting laser parameter information of the laser beam with the focus positioned on the plane of the light spot energy and position sensing component in real time so as to monitor the quality of the laser beam in real time.
In order to realize accurate control of each beam parameter, the spatial position (x, y, z) of the focused three-dimensional focus needs to be positioned, only a two-dimensional plane (x, y) can be positioned by using the spot energy and position sensing assembly 12, and the other dimension (z direction) needs to be moved by the physical position.
Optionally, in one or more embodiments of the present invention, the three-dimensional multi-beam laser parameter adjusting and controlling system further includes a linear displacement table 11, and the spot energy and position sensing assembly 12 is located on the linear displacement table 11 and can move up and down (z direction) along with the linear displacement table 11, so as to adjust a distance between a focal point of the laser beam emitted by the first focusing assembly 10 and the spot energy and position sensing assembly 12, and acquire parameter information of the laser beam when the focal point of the laser beam is located on a plane where the spot energy and position sensing assembly 12 is located. The linear displacement table 11 can drive the light spot energy and position sensing assembly 12 to move up and down, so that the distance between the focal point of the laser beam emitted by the first focusing assembly 10 and the light spot energy and position sensing assembly 12 is adjusted, and thus the focal point of each laser beam can be located on the plane of the light spot energy and position sensing assembly 12 in the adjusting process, and can be accurately acquired.
Optionally, in one or more embodiments of the present invention, the light beam parameter adjusting and controlling component 4 is further configured to superimpose a fresnel lens with adjustable parameters on the hologram, adjust a distance between a focal point of the laser beam and the spot energy and position sensing component 12 by adjusting parameters of the fresnel lens, and acquire parameter information of the laser beam when the focal point of the laser beam is located on a plane where the spot energy and position sensing component 12 is located. By superimposing the fresnel lens with adjustable parameters on the hologram, the phase hologram with the focal length shift function can be superimposed on the hologram, so that the light spots of different focal planes can be detected without moving the light spot energy and position sensing component 12, and the rapid three-dimensional position detection and feedback without mechanical motion can be realized.
In one or more embodiments of the present invention, the beam parameter modulating component 4 employs programmable diffractive optics. The programmable diffraction optical device is adopted to divide a single laser beam into a plurality of parallel laser beams, a plurality of paths can be scanned simultaneously, the energy utilization rate of the laser is improved in multiples, large refractive index change can be obtained at low voltage, and the three-dimensional shape can be easily manufactured, so that the device for processing the parallel light information is easy to form, the device has the function of regulating and controlling the parallel multi-beam multi-parameter, the control of the number, the shape and the focal position of the laser beam and the energy distribution of the strong laser beam are realized, and meanwhile, the device has the advantages of simplicity in manufacturing, low price, low energy consumption, easiness in control and the like.
In particular, in practice, in order to adjust the distance between the focal point of the laser beam emitted from the first focusing assembly 10 and the spot energy and position sensing assembly 12, a software tuning mode may also be adopted, specifically: a Fresnel lens phase hologram with adjustable parameters and a focal length offset function can be superposed on a hologram corresponding to an original multi-beam by using a programmable diffraction optical device, and the focal point focus of the corresponding laser beam is adjusted to the plane of the spot energy and position sensing component 12 by adjusting the parameters of the Fresnel lens, so that the spot energy and position sensing component 12 collects the parameter information of the corresponding laser beam to realize that all three-dimensional focus points can be detected on the spot energy and position sensing component 12. The method does not need mechanical movement, so the method has the advantages of high speed and accurate positioning.
Optionally, in one or more embodiments of the present invention, the turning mirror 9 is an electric turning mirror, and the control terminal 16 is electrically connected to the electric turning mirror and controls the electric turning mirror to rotate, so that the optical paths of the laser beams are switched between the laser beams incident on the spot energy and position sensing assembly 12 and the workpiece. Through controlling the electronic upset mirror upset, can be right laser beam feedback regulation of laser light source 1 outgoing is accomplished the back automatic switch-over light path, guarantees that the laser beam automatic switch-over after the modulation is accomplished to the work piece on, automated control has improved entire system's intelligent degree.
In the present invention, the second focusing assembly 14 may adopt a galvanometer, a focusing lens, a high power objective lens, or the like, and cooperate with a corresponding optical path to achieve a focusing effect.
The three-dimensional multi-beam laser parameter regulating and controlling system of the invention, after the laser produced by the laser source 1 is regulated by the polarization direction and energy regulating component 2, the laser is reflected to the beam parameter regulating and controlling component 4 by the first reflector 3, is focused by the first lens 5 after being modulated by the beam parameter regulating and controlling component 4, is reflected by the second reflector 6, is reflected by the third reflector 7 and is focused by the second lens 8, then is incident to the turning mirror 9, is reflected by the turning mirror 9, is focused by the first focusing component 10, then is incident to the facula energy and position sensing component 12, the facula energy and position sensing component 12 detects the laser parameter of the laser beam, and carries out feedback control, until the laser parameter of all the laser beams is matched with the corresponding target laser parameter, controls the turning mirror 9 to turn over, so that the laser beam is reflected by the turning mirror 9 and then is incident to the fourth reflector 13, and the reflected light is focused by a second focusing assembly 14 after being reflected by a fourth reflector 13, and finally enters a target area.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents, improvements and the like that fall within the spirit and principle of the present invention are intended to be included therein.
Claims (6)
1. A three-dimensional multi-beam laser parameter regulation method is characterized by comprising the following steps:
step 11, initializing a system to obtain a hologram of an output light field, and generating a plurality of laser beams according to the hologram, wherein the laser beams are incident to a detection area;
step 12: adjusting the distance between the outgoing laser beam and the detection assembly in the detection area, sequentially detecting the energy and position information of all laser beams incident to different planes, judging whether the real-time energy and position information of each laser beam are matched with the corresponding preset energy and position information of the laser beam, if so, matching the real-time state of the laser beam with the preset state, and entering step 14, otherwise, entering step 13;
step 13: modulating the energy and position information of the unmatched laser beams, generating a new hologram according to the modulated energy and position information, generating a new laser beam according to the new hologram, enabling the new laser beam to be incident to the detection area, and returning to the step 12;
step 14: generating a plurality of laser beams according to the holograms corresponding to the energy and position information of all the laser beams with the real-time state matched with the preset state, wherein the laser beams are incident to a target area;
in step 12, the step of determining whether the real-time energy and position information of each laser beam match the corresponding preset energy and position information further includes:
actual energy value I of any laser beamiAnd actual position coordinates PiIf the following preset matching conditions are met, matching the real-time energy and the position information of the laser beam with the corresponding preset energy and position information, otherwise, mismatching;
the preset matching conditions are as follows:
ΔIi＝Ii-Ii—targ
ΔPi＝Pi-Pi—targ
ΔIi<Iε
ΔPi<Pε
wherein, IiIs the actual energy value of the ith laser beam, Ii—targIs a target energy value, P, of the ith laser beamiIs the actual position coordinate, P, of the ith laser beami—targIs a target position coordinate, Δ I, of the ith laser beamiIs the energy deviation value, delta P, between the actual energy value and the target energy value of the ith laser beamiThe deviation value of the position coordinate of the actual position coordinate of the ith laser beam and the target position coordinate is shown, I epsilon is a preset energy deviation threshold value, and P epsilon is a preset position coordinate deviation threshold value;
in step 13, the step of modulating the energy and the position information of the unmatched laser beam further includes:
step 131: correcting according to the energy deviation value and the position coordinate deviation value, wherein the specific calculation formula is as follows:
GIi＝Mi*ΔIi+Ii—targ
GPi＝Ni*ΔPi+Pi—targ
step 132: determining the updated image plane transformation phase and the image plane light field amplitude according to the corrected energy value and the position coordinate value;
step 133: performing inverse Fourier transform according to the updated image plane light field amplitude and the updated image plane transformation phase to obtain a modulated image plane light field amplitude and a modulated phase;
wherein, M isiIs the energy weight coefficient, N, of the ith laser beamiIs a position coordinate weight coefficient of the ith laser beam, Ii—targIs a target energy value, P, of the ith laser beami—targIs the target position coordinate of the ith laser beam, GIiFor the corrected energy value of the i-th laser beam, GPiThe corrected position coordinate value of the ith laser beam is set as the value range of [1, k ]]And k is the total number of laser beams.
2. The three-dimensional multi-beam laser parameter adjustment and control method according to claim 1, wherein in the step 11, the step of initializing the system further comprises:
step 111: superposing the random initial phase to an incident light field, and performing Fourier transform to obtain corresponding optical field distribution of the surface where the frequency domain is located, the amplitude of the optical field of the surface where the frequency domain is located and the phase of the surface where the frequency domain is located;
step 112: replacing the preset target light field amplitude with the light field amplitude of the surface where the frequency domain is located, and performing inverse Fourier transform according to the phase of the surface where the frequency domain is located to obtain updated surface light field distribution of the space domain, the light field amplitude of the surface where the space domain is located and the phase of the surface where the space domain is located;
step 113: generating a hologram according to the updated optical field distribution of the plane of the airspace, the amplitude of the optical field of the plane of the airspace and the phase of the plane of the airspace;
step 114: loading the hologram onto a laser system that generates a plurality of laser beams from the hologram.
3. The method for controlling the parameters of the three-dimensional multi-beam laser as claimed in claim 2, wherein in the step 12, the detection area is provided with a light spot energy and position sensing component, and the energy and position information of all the laser beams with the focuses not on the same plane are sequentially collected by the light spot energy and position sensing component, further comprising:
step 121: the light spot energy and position sensing assembly receives a plurality of laser beams and generates a corresponding outline according to the laser beams with the focal points positioned on the plane where the light spot energy and position sensing assembly is positioned;
step 122: collecting actual energy values I corresponding to all light spots in the profile rangeiAnd actual position coordinates Pi；
Step 123: adjusting the relative position of the spot energy and position sensing assembly and the focal point of the plurality of laser beams, and repeating the above steps 121 and 122 until the actual energy values I corresponding to all the laser beams are reachediAnd actual position coordinates PiAnd finishing the collection.
4. The method for three-dimensional multi-beam laser parameter manipulation of claim 3 wherein the step of adjusting 123 the relative position of the spot energy and position sensing assembly to the focal points of the plurality of laser beams further comprises:
and adjusting the distance between the focal point of the laser beam and the spot energy and position sensing assembly so that the spot energy and position sensing assembly acquires the energy and position information of the laser beam when the focal point of the laser beam is positioned on the plane where the spot energy and position sensing assembly is positioned.
5. The method for three-dimensional multi-beam laser parameter manipulation of claim 3 wherein the step of adjusting 123 the relative position of the spot energy and position sensing assembly to the focal points of the plurality of laser beams further comprises:
and superposing a Fresnel lens phase hologram with adjustable parameters and a focal length offset function on the hologram, and adjusting the focus of the corresponding laser beam to the plane where the light spot energy and position sensing assembly is located by adjusting the parameters of the Fresnel lens so that the light spot energy and position sensing assembly acquires the energy and position information of the corresponding laser beam.
6. A three-dimensional multi-beam laser parameter regulation and control system is used for realizing the method of claim 1 and is characterized by comprising a laser light source, a light path deflection component, a beam parameter regulation and control component, a light spot energy and position sensing component and a control terminal, wherein the beam parameter regulation and control component, the light spot energy and position sensing component and the control terminal are respectively connected with the control terminal;
the control terminal is used for initializing and generating a hologram of an output light field, and loading the hologram onto the light beam parameter regulation and control component;
the optical path deflection assembly is used for enabling a plurality of laser beams to be incident on the light spot energy and position sensing assembly positioned in the detection area or the working plane positioned in the target area;
the beam parameter regulating and controlling component is used for receiving the laser beams output by the laser light source and generating a plurality of laser beams according to the hologram;
the light spot energy and position sensing assembly is used for receiving the laser beams and sequentially collecting energy and position information of all the laser beams with focuses not on the same plane;
the control terminal is further used for judging whether the energy and position information of each laser beam is matched with corresponding preset energy and position information or not, and controlling the light beam parameter regulation and control assembly to generate a plurality of laser beams according to holograms corresponding to the energy and position information of all the laser beams during matching; and when the laser beams are not matched, carrying out iterative modulation processing according to the energy and the position information of each laser beam until the energy and the position information of each laser beam are matched with the corresponding preset energy and position information.
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