CN113448077A - Method, device and system for generating multi-parameter adjustable light field based on DMD - Google Patents
Method, device and system for generating multi-parameter adjustable light field based on DMD Download PDFInfo
- Publication number
- CN113448077A CN113448077A CN202110642895.9A CN202110642895A CN113448077A CN 113448077 A CN113448077 A CN 113448077A CN 202110642895 A CN202110642895 A CN 202110642895A CN 113448077 A CN113448077 A CN 113448077A
- Authority
- CN
- China
- Prior art keywords
- laser beam
- dmd
- light field
- lens group
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims abstract description 28
- 239000006185 dispersion Substances 0.000 claims abstract description 64
- 238000004422 calculation algorithm Methods 0.000 claims abstract description 16
- 238000001914 filtration Methods 0.000 claims abstract description 14
- 238000012545 processing Methods 0.000 claims abstract description 9
- 238000006073 displacement reaction Methods 0.000 claims description 9
- 210000001747 pupil Anatomy 0.000 claims description 8
- 230000007306 turnover Effects 0.000 claims description 4
- 230000033228 biological regulation Effects 0.000 abstract description 10
- 230000003287 optical effect Effects 0.000 description 17
- 230000006870 function Effects 0.000 description 13
- 238000010587 phase diagram Methods 0.000 description 8
- 238000004590 computer program Methods 0.000 description 6
- 238000004088 simulation Methods 0.000 description 5
- 238000004364 calculation method Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 230000001276 controlling effect Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000010287 polarization Effects 0.000 description 3
- 230000006866 deterioration Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000005457 optimization Methods 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 238000012984 biological imaging Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000009022 nonlinear effect Effects 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 238000012576 optical tweezer Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/06—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the phase of light
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
- G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
- G03H1/0005—Adaptation of holography to specific applications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
- G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
- G03H1/04—Processes or apparatus for producing holograms
- G03H1/08—Synthesising holograms, i.e. holograms synthesized from objects or objects from holograms
- G03H1/0866—Digital holographic imaging, i.e. synthesizing holobjects from holograms
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
- G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
- G03H1/0005—Adaptation of holography to specific applications
- G03H2001/0066—Adaptation of holography to specific applications for wavefront matching wherein the hologram is arranged to convert a predetermined wavefront into a comprehensive wave, e.g. associative memory
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
- G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
- G03H1/0005—Adaptation of holography to specific applications
- G03H2001/0094—Adaptation of holography to specific applications for patterning or machining using the holobject as input light distribution
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Holo Graphy (AREA)
Abstract
The invention discloses a method, a device and a system for generating a multi-parameter adjustable light field based on a DMD (digital micromirror device), wherein the method comprises the following steps: performing beam expanding and collimating treatment on the femtosecond laser beam, and determining the laser beam after beam expanding and collimating; carrying out filtering processing on the laser beam to determine a first filtered laser beam; carrying out dispersion compensation processing on the first filtered laser beam, and determining the laser beam after dispersion compensation; determining a binary hologram of the target light field by combining a complex amplitude expression of the target light field and a binary holographic algorithm; loading the binary hologram to a DMD, performing wavefront modulation on the laser beam subjected to dispersion compensation through the DMD, and determining the modulated laser beam; filtering the modulated laser beam to filter out zero-order diffraction light and negative first-order diffraction light and determine that the first-order diffraction light passes through; and focusing the first-order diffracted light to generate a multi-parameter adjustable array light field. The invention can reduce the use cost of the system and can be widely applied to the technical field of light field regulation and control.
Description
Technical Field
The invention relates to the technical field of light field regulation, in particular to a method, a device and a system for generating a multi-parameter adjustable light field based on a DMD (digital micromirror device).
Background
Due to the progress of modern nano-optics, the optical field regulation and control technology has become a research hotspot in the current international optical field, and generally refers to the phase and amplitude modulation of the wavefront of incident laser to obtain the required intensity distribution and propagation characteristics. With the progress of the spatial light modulator technology, the light field regulation and control technology is developed rapidly, is not limited to the design of fixed optical parameters, but can dynamically modulate a light field through holographic calculation, and the diversified regulation and control of the light field is realized. On the other hand, the femtosecond laser has the advantages of high peak power, thermal effect, capability of generating various nonlinear effects and the like. Therefore, the femtosecond laser-based optical field regulation and control technology has important application in the fields of laser processing, optical tweezers, information storage, biological imaging and the like.
At present, most of light field regulation and control methods utilize a liquid crystal spatial light modulator (LC-SLM), calculate the phase distribution of a target light field through an iterative optimization algorithm, and load the phase distribution to the LC-SLM to realize the wavefront modulation of incident laser, but the phase obtained by the iterative optimization algorithm lacks flexibility, and the simultaneous regulation and control of the position, power and topological load of each light spot in a focus array is difficult to realize. On the other hand, although individual modulation of each focus in the focus array can be achieved by dividing the phase at the entrance pupil into multiple regions on the LC-SLM. However, when the LC-SLM is used for light field regulation, the influence of resolution deterioration caused by dispersion problem is not considered; and the LC-SLM is a device responding to polarization, a polarizing film and a half-wave plate must be added in an optical path system, and a good modulation effect can be realized only by converting incident light into linear polarization light with a specific polarization direction, so that the laser power loss is high, the optical path system is complex to build, and the further expansion and integration of the system are limited. Furthermore, DMDs have great advantages over LC-SLMs in both price and hologram refresh rate (up to 20 kHZ). Therefore, it is very important to implement a low-cost, high-efficiency, high-resolution light field modulation technique, and the DMD-based multi-parameter light field modulation is not implemented in the prior art.
Disclosure of Invention
In view of this, embodiments of the present invention provide a method, an apparatus, and a system for generating a multi-parameter adjustable optical field based on a DMD, so as to realize low-cost and high-efficiency adjustment and control of the multi-parameter optical field.
On one hand, the embodiment of the invention discloses a method for generating a multi-parameter adjustable light field based on a DMD, which comprises the following steps:
emitting a femtosecond laser beam;
performing beam expanding and collimating treatment on the femtosecond laser beam, and determining the laser beam after beam expanding and collimating;
filtering the expanded and collimated laser beam to determine a first filtered laser beam;
carrying out dispersion compensation processing on the first filtered laser beam, and determining the laser beam after dispersion compensation;
determining a binary hologram of the target light field by combining a complex amplitude expression of the target light field and a binary holographic algorithm;
loading the binary hologram to a DMD, and performing wavefront modulation on the laser beam subjected to dispersion compensation through the DMD to determine a modulated laser beam;
filtering the modulated laser beam to filter out zero-order diffraction light and negative first-order diffraction light and determine that the first-order diffraction light passes through;
and focusing the first-order diffracted light to generate a multi-parameter adjustable array light field, wherein the spatial three-dimension, the power dose and the topological charge number of each focusing light spot in the multi-parameter adjustable array light field are independently adjustable.
Optionally, the performing dispersion compensation processing on the first filtered laser beam to determine a dispersion-compensated laser beam includes:
reflecting the first filtered laser beam through a blazed grating, and collimating and emitting diffracted light of the first filtered laser beam, wherein the diffracted light is used for representing first-order diffracted light with constant angular dispersion;
determining the angular dispersion value of the DMD according to the incident angle of the DMD;
determining the angular dispersion value of the blazed grating according to the diffraction light angular dispersion;
calculating the focal length of the lens according to the angular dispersion value of the blazed grating and the angular dispersion value of the DMD, and determining a lens group;
and the diffracted light passes through the lens group to determine the laser beam after dispersion compensation.
Optionally, the determining a binary hologram of the target light field in combination with the complex amplitude expression of the target light field and a binary holographic algorithm includes:
moving a focus of a target light field to an objective entrance pupil surface on a focal plane to determine a phase expression;
superposing a spherical wave phase and a vortex phase on a phase term in the phase expression to determine a complex amplitude expression of a target light field;
and determining the binary hologram of the target light field by combining the complex amplitude expression and a binary holographic algorithm.
Optionally, the loading the binary hologram to a DMD, performing wavefront modulation on the dispersion-compensated laser beam by the DMD, and determining the modulated laser beam includes:
controlling the turnover of a micromirror on each pixel of the DMD according to the pixel value of the binary hologram;
and the laser beam after dispersion compensation passes through the DMD to determine a modulated laser beam.
On the other hand, the embodiment of the invention also discloses a device for generating a multi-parameter adjustable light field based on the DMD, which is characterized by comprising a pulse laser, wherein a first lens group, a first spatial filter, a blazed grating, a second lens group, a first reflector, a digital micromirror array, a second reflector, a third lens group, a second spatial filter and an objective lens are sequentially arranged along the output light direction of the pulse laser, and the first spatial filter is arranged at the focal plane position of a front lens in the first lens group;
the pulse laser is used for emitting a femtosecond laser beam, and the femtosecond laser beam irradiates the blazed grating through the first lens group and the first spatial filter;
the first lens group is used for expanding and collimating the femtosecond laser beam;
the first spatial filter is used for filtering the femtosecond laser beam;
the blazed grating is used for generating forward dispersion to the femtosecond laser beam, and the femtosecond laser beam is reflected to the digital micro-mirror array through the second lens group and the first reflector;
the second lens group is used for carrying out dispersion compensation on the femtosecond laser beam;
the digital micro-mirror array is used for performing wavefront modulation on the femtosecond laser beam, and the femtosecond laser beam is reflected to the objective lens through the second reflecting mirror, the third lens group and the second spatial filter;
the third lens group is used for transmitting the femtosecond laser beam to the front of the entrance pupil of the objective lens;
the second spatial filter is used for filtering the diffracted light of the femtosecond laser beam;
and the objective lens is used for focusing the femtosecond laser beam to generate a multi-parameter adjustable light field.
Optionally, the device further comprises a semi-reflecting and semi-transmitting mirror, a convex lens and a CCD camera, wherein the CCD camera is placed on the focal plane of the convex lens;
the semi-reflecting and semi-transmitting mirror is used for reflecting a part of laser beams;
the convex lens is used for focusing reflected light;
and the CCD camera is used for collecting reflected light information.
Optionally, a displacement table is further included;
wherein the displacement stage is used for controlling the three-dimensional movement of the sample.
Optionally, the blazed wavelength of the blazed grating is 500nm, and the grating period is 1200 lines/mm.
Optionally, the resolution of the digital micromirror array is 1080p and the micromirror pitch is 10.8 μm.
On the other hand, the embodiment of the invention also discloses a system for generating the multi-parameter adjustable light field based on the DMD, which comprises a processor and a memory;
the memory is used for storing programs;
the processor executes the program to implement the method as described above.
In another aspect, an embodiment of the present invention further discloses a computer program product or a computer program, where the computer program product or the computer program includes computer instructions, and the computer instructions are stored in a computer-readable storage medium. The computer instructions may be read by a processor of a computer device from a computer-readable storage medium, and the computer instructions executed by the processor cause the computer device to perform the foregoing method.
Compared with the prior art, the invention adopting the technical scheme has the following technical effects: the invention realizes dispersion compensation by quantitatively calculating the dispersion of the device, and improves the focal resolution of the system; determining a binary hologram of a target light field by combining a complex amplitude expression of the target light field and a binary holographic algorithm; the three-dimensional spatial position, the power dose and the topological charge number of each light spot in the array light field can be respectively regulated and controlled; loading the binary hologram to a DMD, and performing wavefront modulation on the laser beam subjected to dispersion compensation through the DMD to determine a modulated laser beam; the binary hologram can be loaded through the DMD by the holographic computing technology, so that the cost of the system can be reduced, and the efficiency of the system can be improved.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed to be used in the description of the embodiments are briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
Fig. 1 is a flowchart of a method for generating a multi-parameter adjustable light field based on a DMD according to an embodiment of the present invention;
FIG. 2 is a block diagram of an apparatus for generating a multi-parameter adjustable optical field based on a DMD according to an embodiment of the present invention;
FIG. 3 is a diagram of the planar field intensity distribution and binary phase of the one-dimensional movement of the focal point along the xoy plane according to the embodiment of the present invention;
FIG. 4 is a diagram of planar field intensity distribution and binary phase for two-dimensional movement of a focal point along the xoy plane according to an embodiment of the present invention;
FIG. 5 is a graph of the planar field strength distribution versus binary phase for three-dimensional movement of the focal spot along plane xoz, in accordance with an embodiment of the present invention;
FIG. 6 is a graph of spatial three-dimensional multi-focus field intensity distribution and binary phase according to an embodiment of the present invention;
FIG. 7 is a graph of multi-focal field strength distribution with amplitude coefficients of 1 and a binary phase for an embodiment of the present invention;
FIG. 8 is a graph of multi-focus field strength distribution with amplitude term coefficients of 0.4, 0.6, and 0.8, respectively, versus binary phase for an embodiment of the present invention;
FIG. 9 is a graph of the three-dimensional moving field intensity distribution and binary phase of vortex light with a topological charge of 1 according to an embodiment of the present invention;
FIG. 10 is a graph of the moving field intensity distribution and binary phase of the vortex optical array with topological charge of 1 according to the embodiment of the present invention along the three-dimensional direction;
FIG. 11 is a graph of vortex array light field intensity distribution and binary phase for topological charges of 0,1, and 3, respectively, according to an embodiment of the present invention;
in the figure, 1, a pulse laser, 2, a first lens group, 3, a first spatial filter, 4, a blazed grating, 5, a second lens group, 6, a first reflector, 7, a digital micro-mirror array, 8, a second reflector, 9, a third lens group, 10, a second spatial filter, 11, a half-reflecting and half-transmitting mirror, 12, a convex lens, 13, an objective lens, 14, a displacement table and 15, a CCD camera.
Detailed Description
In order to make the objects, technical solutions and advantages of the present application more apparent, the present application is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present application and are not intended to limit the present application.
Referring to fig. 1, an embodiment of the present invention further provides a method for generating a multi-parameter adjustable light field based on a DMD, including:
s1, emitting a femtosecond laser beam;
s2, performing beam expanding and collimating treatment on the femtosecond laser beam, and determining the laser beam after beam expanding and collimating;
s3, performing filtering processing on the expanded and collimated laser beams to determine first filtered laser beams;
s4, performing dispersion compensation processing on the first filtered laser beam, and determining the laser beam after dispersion compensation;
s5, determining a binary hologram of the target light field by combining a complex amplitude expression of the target light field and a binary holographic algorithm;
s6, loading the binary hologram to a DMD, and performing wavefront modulation on the dispersion-compensated laser beam through the DMD to determine a modulated laser beam;
s7, filtering the modulated laser beam to remove zero-order diffraction light and negative first-order diffraction light and determine that the first-order diffraction light passes through;
s8, focusing the first-order diffracted light to generate a multi-parameter adjustable array light field, wherein the spatial three-dimension, the power dose and the topological charge number of each focusing spot in the multi-parameter adjustable array light field are independently adjustable.
In a further preferred embodiment, in the step S3, the determining the laser beam after dispersion compensation by performing dispersion compensation processing on the first filtered laser beam includes:
reflecting the first filtered laser beam through a blazed grating, and collimating and emitting diffracted light of the first filtered laser beam, wherein the diffracted light is used for representing first-order diffracted light with constant angular dispersion;
determining the angular dispersion value of the DMD according to the incident angle of the DMD;
determining the angular dispersion value of the blazed grating according to the diffraction light angular dispersion;
calculating the focal length of the lens according to the angular dispersion value of the blazed grating and the angular dispersion value of the DMD, and determining a lens group;
and the diffracted light passes through the lens group to determine the laser beam after dispersion compensation.
Among them, since the femtosecond laser is a broadband light, a serious dispersion is generated when passing through the DMD, and a focused light spot is widened into a long-strip-shaped light beam, causing a deterioration in resolution. Therefore, the expanded femtosecond laser is irradiated onto the blazed grating, the inherent dispersion caused by the two-dimensional grid structure of the DMD is compensated by using the blazed grating, and the dispersion of the blazed grating is scaled by the lens group to match the dispersion of the DMD.
In the optical path system, the DMD is placed at 45 DEG, and its equivalent pixel size dSMDComprises the following steps:
where d represents the actual pixel size of the DMD and dDMDRepresenting the equivalent pixel size of the DMD.
Since the deflection angle of the DMD is ± 12 °, the DMD can act as a blazed grating with a blaze angle of 12 ° and a period of 7.636 μm. When the incident angle is 24 degrees, the diffraction angle is 0 degrees, the propagation direction of emergent light is vertical to the DMD panel, and the diffraction efficiency is highest. Based on the grating equation, the blaze condition needs to be satisfied:
mλ＝2dDMDsin(γDMD)cos(iDMD-γDMD)；
where m represents the blazed order of the blazed grating, λ represents the laser output wavelength, dDMDRepresenting the equivalent pixel size, γ, of the DMDDMDRepresenting the blaze angle, i, of the DMDDMDRepresenting the angle of incidence of the DMD.
Calculating to obtain lambda as 515nm and m as 6;
the angular dispersion value of the DMD is calculated according to the formula:
wherein D isDMDRepresenting the angular dispersion value, θ, of the DMDDMDRepresenting the magnitude of the diffraction angle of the DMD, and m represents the blaze order of the blazed grating.
In the embodiment of the invention, a blazed grating with the grating period of 0.83 μm is used, wherein the number of lines per millimeter is 1200; let the grating incidence angle be 47 °, the angular dispersion value of a blazed grating can be calculated as:
wherein D isGRepresenting the angular dispersion value of a blazed grating, dGRepresenting the period of the blazed grating, thetaGRepresenting the magnitude of the blazed grating diffraction angle, and m representing the blazed order of the blazed grating.
Calculating the focal length of the lens according to the angular dispersion value of the blazed grating and the angular dispersion value of the DMD, so that the focal length of the lens meets the following requirements:
wherein f isL2Focal length of the second lens of the lens group between the blazed grating and the DMD, fL1Focal length of the first lens of the lens group between the blazed grating and the DMD, DGRepresenting the angular dispersion value, D, of a blazed gratingDRepresenting the angular dispersion value of the DMD.
Determining a lens according to the size setting of the focal length of the lens; the dispersion generated by the DMD is compensated for by the blazed grating and the lens.
Further preferably, in step S5, the determining a binary hologram of the target light field by combining the complex amplitude expression of the target light field and a binary holographic algorithm includes:
moving a focus of a target light field to an objective entrance pupil surface on a focal plane to determine a phase expression;
superposing a spherical wave phase and a vortex phase on a phase term in the phase expression to determine a complex amplitude expression of a target light field;
and determining the binary hologram of the target light field by combining the complex amplitude expression and a binary holographic algorithm.
The DMD micromirror has only two states of "0" and "1", and a binary hologram loaded on the DMD can be calculated by deriving a complex amplitude expression of a target light field by using a binary hologram algorithm control equation, so as to realize real-time control of the light field, wherein the target light field is a multi-parameter adjustable array light field generated according to this embodiment. The phase expression of the position change of the focal point on the focal plane is derived by combining the position of the focal point on the focal plane with the entrance pupil surface of the objective lens through the following process.
Starting from the most basic plane wave expression:
wherein the content of the first and second substances,
represents the complex amplitude of the plane wave, B represents the amplitude term coefficient, exp represents the exponential function, i represents the imaginary factor,
which represents the wave vector of the wave,
representing the plane wave propagation vector, kx，ky，kzRespectively represent the components of the wave vector in three dimensions of the space, and x, y and z respectively represent the coordinate position of the focus in the three-dimensional space.
If the focal point moves in x-dimension only by Δ x, then:
where θ is the angle between the incident light and the optical axis of the lens, Δ x represents the distance of movement of the focal point in the focal plane in the x direction, f represents the focal length of the objective lens,
represents wave vector, kxRepresenting the component of the wave vector in the x one-dimensional direction, x representing the abscissa position of the focal point in three-dimensional space.
Because the included angle between the incident light and the optical axis of the lens is very small, tan theta is approximately equal to sin theta;
can obtain
Wherein the content of the first and second substances,
represents the complex amplitude of the plane wave, B represents the amplitude term coefficient, exp represents the exponential function, i represents the imaginary factor,
represents the wave vector, Δ x represents the movement distance of the focal point in the x direction at the focal plane, f represents the focal length of the objective lens, and x represents the abscissa position of the focal point in three-dimensional space.
The complex amplitude expression of the focus moving in the two-dimensional space can be obtained according to the formula as follows:
wherein the content of the first and second substances,
represents the complex amplitude of the plane wave, B represents the amplitude term coefficient, exp represents the exponential function, i represents the imaginary factor,
representing the wave vector, Δ x representing the focal point in the x-direction at the focal planeThe movement distance, f represents the focal length of the objective lens, x represents the abscissa position of the focal point in three-dimensional space, Δ y represents the movement distance of the focal point in the y direction at the focal plane, and y represents the ordinate position of the focal point in three-dimensional space.
Obtaining the complex amplitude of the target light field with the position of the focus moving on the focal plane space:
wherein the content of the first and second substances,
represents the complex amplitude of the plane wave, B represents the amplitude term coefficient, exp represents the exponential function, i represents the imaginary factor,
represents a wave vector, λ represents a wavelength of laser light emitted from the laser, Δ x represents a moving distance of the focal point in the focal plane in the x direction, f represents a focal length of the objective lens, x represents an abscissa position of the focal point in the three-dimensional space, Δ y represents a moving distance of the focal point in the focal plane in the y direction, and y represents an ordinate position of the focal point in the three-dimensional space.
Referring to fig. 3, 4 and 5, a three-dimensional simulation result of a single focus in space is obtained based on debye vector diffraction integral calculation under focusing of a high NA objective lens according to the complex amplitude of the target light field. Wherein 301 in fig. 3 represents the plane field intensity distribution of the one-dimensional movement of the focal point along the xoy plane, and 302 represents the binary phase diagram of the one-dimensional movement of the focal point along the xoy plane; in fig. 4 401 represents the planar field intensity distribution of the focal spot moving two-dimensionally along the xoy plane, and 402 represents the binary phase diagram of the focal spot moving two-dimensionally along the xoy plane; in fig. 5 501 shows the planar field intensity distribution of the three-dimensional movement of the focal spot along the plane xoz, and 502 shows the binary phase diagram of the three-dimensional movement of the focal spot along the xoy plane. The simulation result can also show that the embodiment of the invention can well operate the arbitrary scanning of the laser focus at the spatial three-dimensional position.
According to the complex amplitude formula of the target light field, the multifocal three-dimensional scanning in space can be deduced, and a multifocal target light field complex amplitude formula can be obtained:
wherein n represents a positive integer, k represents the number of focused light spots,
representing the complex amplitude of the plane wave, BkCoefficient of the amplitude term representing the k-th focused spot, exp an exponential function, i an imaginary factor,
represents a wave vector, λ represents a wavelength of laser light emitted from the laser, Δ x represents a moving distance of the focal point in the focal plane in the x direction, f represents a focal length of the objective lens, x represents an abscissa position of the focal point in the three-dimensional space, Δ y represents a moving distance of the focal point in the focal plane in the y direction, and y represents an ordinate position of the focal point in the three-dimensional space.
Referring to fig. 6, 601 in fig. 6 represents a spatial three-dimensional multi-focus field strength distribution, and 602 represents a corresponding binary phase diagram. Referring to fig. 7 and 8, 701 in fig. 7 is a simulation calculation result with an amplitude term coefficient of B1-1, B2-1, and B3-1, and 702 is a corresponding binary hologram; in fig. 8, 801 is a simulation calculation result with an amplitude term factor of B1-0.4, B2-0.6, and B3-0.8, and 802 is a corresponding binary hologram; according to the simulation result, the embodiment of the invention can well control the power dose of each focus in the focus array independently.
And performing phase superposition on the target light field complex amplitude, and superposing a spherical wave phase and a vortex phase on a phase item in each complex amplitude to obtain a final target light field complex amplitude expression:
wherein n represents positiveAn integer, k represents the number of focused spots,
representing the complex amplitude of the plane wave, BkCoefficient of the amplitude term representing the k-th focused spot, exp an exponential function, i an imaginary factor,
represents the wave vector, λ represents the laser wavelength exiting the laser, represents the focal length of the objective lens, x represents the abscissa position of the focal point in three-dimensional space, Δ xkRepresents the displacement of the k-th focused spot from the center position in the x direction, y represents the ordinate position of the focal point in three-dimensional space, Δ ykRepresenting the displacement of the k-th focused spot from the center position in the y-direction,
representing the phase of a spherical wave superposed by the offset central position of the k-th focusing spot in the z direction,
representing the vortex phase of the k-th focused spot superimposed with different topological charge pairs.
Referring to fig. 9, 10 and 11, wherein 901 in fig. 9 represents that a single vortex focus with topological charge of 1 moves the field intensity distribution in the three-dimensional direction, and 902 represents a corresponding binary phase diagram; in fig. 10, 1001 shows the moving field intensity distribution of a vortex optical array with topological charge of 1 along the three-dimensional direction, and 1002 shows the corresponding binary phase diagram; in fig. 11 1101 shows the intensity distribution of the vortex array light field with topological charges of 0,1 and 3, respectively, and 1102 shows the corresponding binary phase diagram.
The algorithm for binary holograms is as follows:
wherein A (x, y) is the amplitude term of the target light field, and A (x, y) is ∈ [0,1 ]]，
Is the phase of the target light field, T is the grating period corresponding to the binary phase diagram, k is a constant, x and y are rectangular coordinate components, and h (i, j) ∈ {0,1} represents the pixel value of the ith row and jth column on the DMD.
And combining the complex amplitude expression and a binary holographic algorithm to obtain a binary hologram of the target light field.
Further preferably, in step S6, the loading the binary hologram onto a DMD, performing wavefront modulation on the dispersion-compensated laser beam by the DMD, and determining the modulated laser beam includes:
controlling the turnover of a micromirror on each pixel of the DMD according to the pixel value of the binary hologram;
and the laser beam after dispersion compensation passes through the DMD to determine a modulated laser beam.
The binary hologram is loaded to the DMD, the turnover of the micro mirror on each pixel of the DMD is controlled according to the pixel value of the binary hologram, when the pixel value is 0, the micro mirror on the pixel is turned by-12 degrees, and when the pixel value is 1, the micro mirror on the pixel is turned by +12 degrees, so that the wave front modulation of incident light is realized.
Referring to fig. 2, an embodiment of the present invention provides a device for generating a multi-parameter tunable optical field based on a DMD, including a pulse laser 1, and a first lens group 2, a first spatial filter 3, a blazed grating 4, a second lens group 5, a first mirror 6, a digital micromirror array 7, a second mirror 8, a third lens group 9, a second spatial filter 10, and an objective lens 13 sequentially arranged along an output light direction of the pulse laser, where the first spatial filter 3 is placed at a focal plane position of a front lens in the first lens group 2;
the pulse laser is used for emitting a femtosecond laser beam, and the femtosecond laser beam irradiates the blazed grating through the first lens group and the first spatial filter;
the first lens group is used for expanding and collimating the femtosecond laser beam;
the first spatial filter is used for filtering the femtosecond laser beam;
the blazed grating is used for generating forward dispersion to the femtosecond laser beam, and the femtosecond laser beam is reflected to the digital micro-mirror array through the second lens group and the first reflector;
the second lens group is used for carrying out dispersion compensation on the femtosecond laser beam;
the digital micro-mirror array is used for performing wavefront modulation on the femtosecond laser beam, and the femtosecond laser beam is reflected to the objective lens through the second reflecting mirror, the third lens group and the second spatial filter;
the third lens group is used for transmitting the femtosecond laser beam to the front of the entrance pupil of the objective lens;
the second spatial filter is used for filtering the diffracted light of the femtosecond laser beam;
and the objective lens is used for focusing the femtosecond laser beam to generate a multi-parameter adjustable light field.
The pulse laser emits femtosecond laser beams which pass through a first lens group and a first spatial filter, the first spatial filter is arranged at the position of a focal plane of a front lens in the first lens group, and emergent light irradiates a blazed grating at a constant angle; the blazed grating generates first-order diffracted light, the first-order diffracted light passes through the second lens group and reflects the laser beam to the digital micromirror array DMD through the first reflector, and the emergent laser reflects the laser to the third lens group through the second reflector; the laser beam sequentially passes through the front lens of the third lens group, the second spatial filter, the rear lens of the third lens group, the semi-reflecting and semi-transmitting lens and the objective lens.
Referring to fig. 2, further as a preferred embodiment, the device further includes a half-reflecting half-mirror 11, a convex lens 12 and a CCD camera 15, wherein the CCD camera 15 is placed on the focal plane of the convex lens 12;
the semi-reflecting and semi-transmitting mirror is used for reflecting a part of laser beams;
the convex lens is used for focusing reflected light;
and the CCD camera is used for collecting reflected light information.
Referring to fig. 2, the half mirror 11 transmits a part of the laser beam to the objective 13, and reflects a part of the laser beam to the CCD camera 15 through the convex lens 12, the convex lens 12 is used for focusing the reflected light, and the CCD camera 15 is used for collecting the reflected light information.
Referring to fig. 2, further as a preferred embodiment, the device further comprises a displacement table 14;
wherein the displacement stage 14 is configured to control the three-dimensional movement of the sample.
In a further preferred embodiment, the blazed grating has a blaze wavelength of 500nm and a grating period of 1200 lines/mm.
Further as a preferred embodiment, the resolution of the digital micromirror array is 1080p and the micromirror pitch is 10.8 μm.
Corresponding to the method, the embodiment of the invention also provides a system, which comprises a processor and a memory; the memory is used for storing programs; the processor executes the program to implement the method as described above.
Corresponding to the method, the embodiment of the invention also provides a computer readable storage medium, wherein the storage medium stores a program, and the program is executed by a processor to realize the method.
The embodiment of the invention also discloses a computer program product or a computer program, which comprises computer instructions, and the computer instructions are stored in a computer readable storage medium. The computer instructions may be read by a processor of a computer device from a computer-readable storage medium, and executed by the processor to cause the computer device to perform the method illustrated in fig. 1.
In summary, the embodiments of the present invention have the following advantages:
(1) the embodiment of the invention can quantitatively calculate the dispersion of a system device and compensate the dispersion of the DMD through the blazed grating and the limitation on the focal length of the lens, thereby improving the resolution of a focus;
(2) the embodiment of the invention can adjust the three-dimensional space position, the power dose and the topological charge number of each focus in the array light field by loading the binary hologram to the DMD, can realize an ultra-high-speed light field regulation and control technology by combining the ultrahigh refresh rate of the DMD, and has the advantages of low cost, high efficiency, simplicity and applicability.
In alternative embodiments, the functions/acts noted in the block diagrams may occur out of the order noted in the operational illustrations. For example, two blocks shown in succession may, in fact, be executed substantially concurrently, or the blocks may sometimes be executed in the reverse order, depending upon the functionality/acts involved. Furthermore, the embodiments presented and described in the flow charts of the present invention are provided by way of example in order to provide a more thorough understanding of the technology. The disclosed methods are not limited to the operations and logic flows presented herein. Alternative embodiments are contemplated in which the order of various operations is changed and in which sub-operations described as part of larger operations are performed independently.
Furthermore, although the present invention is described in the context of functional modules, it should be understood that, unless otherwise stated to the contrary, one or more of the described functions and/or features may be integrated in a single physical device and/or software module, or one or more functions and/or features may be implemented in a separate physical device or software module. It will also be appreciated that a detailed discussion of the actual implementation of each module is not necessary for an understanding of the present invention. Rather, the actual implementation of the various functional modules in the apparatus disclosed herein will be understood within the ordinary skill of an engineer, given the nature, function, and internal relationship of the modules. Accordingly, those skilled in the art can, using ordinary skill, practice the invention as set forth in the claims without undue experimentation. It is also to be understood that the specific concepts disclosed are merely illustrative of and not intended to limit the scope of the invention, which is defined by the appended claims and their full scope of equivalents.
The functions, if implemented in the form of software functional units and sold or used as a stand-alone product, may be stored in a computer readable storage medium. Based on such understanding, the technical solution of the present invention may be embodied in the form of a software product, which is stored in a storage medium and includes instructions for causing a computer device (which may be a personal computer, a server, or a network device) to execute all or part of the steps of the method according to the embodiments of the present invention. And the aforementioned storage medium includes: a U disk, a removable hard disk, a Read-only Memory (ROM), a Random Access Memory (RAM), a magnetic disk or an optical disk, and other various media capable of storing program codes.
The logic and/or steps represented in the flowcharts or otherwise described herein, e.g., an ordered listing of executable instructions that can be considered to implement logical functions, can be embodied in any computer-readable medium for use by or in connection with an instruction execution system, apparatus, or device, such as a computer-based system, processor-containing system, or other system that can fetch the instructions from the instruction execution system, apparatus, or device and execute the instructions. For the purposes of this description, a "computer-readable medium" can be any means that can contain, store, communicate, propagate, or transport the program for use by or in connection with the instruction execution system, apparatus, or device.
More specific examples (a non-exhaustive list) of the computer-readable medium would include the following: an electrical connection (electronic device) having one or more wires, a portable computer diskette (magnetic device), a Random Access Memory (RAM), a read-only memory (ROM), an erasable programmable read-only memory (EPROM or flash memory), an optical fiber device, and a portable compact disc read-only memory (CDROM). Additionally, the computer-readable medium could even be paper or another suitable medium upon which the program is printed, as the program can be electronically captured, via for instance optical scanning of the paper or other medium, then compiled, interpreted or otherwise processed in a suitable manner if necessary, and then stored in a computer memory.
It should be understood that portions of the present invention may be implemented in hardware, software, firmware, or a combination thereof. In the above embodiments, the various steps or methods may be implemented in software or firmware stored in memory and executed by a suitable instruction execution system. For example, if implemented in hardware, as in another embodiment, any one or combination of the following techniques, which are known in the art, may be used: a discrete logic circuit having a logic gate circuit for implementing a logic function on a data signal, an application specific integrated circuit having an appropriate combinational logic gate circuit, a Programmable Gate Array (PGA), a Field Programmable Gate Array (FPGA), or the like.
In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
While embodiments of the invention have been shown and described, it will be understood by those of ordinary skill in the art that: various changes, modifications, substitutions and alterations can be made to the embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the claims and their equivalents.
While the preferred embodiments of the present invention have been illustrated and described, it will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims.
Claims (10)
1. A method for generating a multi-parameter adjustable light field based on a DMD (digital micromirror device), which is characterized by comprising the following steps:
emitting a femtosecond laser beam;
performing beam expanding and collimating treatment on the femtosecond laser beam, and determining the laser beam after beam expanding and collimating;
filtering the expanded and collimated laser beam to determine a first filtered laser beam;
carrying out dispersion compensation processing on the first filtered laser beam, and determining the laser beam after dispersion compensation;
determining a binary hologram of the target light field by combining a complex amplitude expression of the target light field and a binary holographic algorithm;
loading the binary hologram to a DMD, and performing wavefront modulation on the laser beam subjected to dispersion compensation through the DMD to determine a modulated laser beam;
filtering the modulated laser beam to filter out zero-order diffraction light and negative first-order diffraction light and determine that the first-order diffraction light passes through;
and focusing the first-order diffracted light to generate a multi-parameter adjustable array light field, wherein the spatial three-dimension, the power dose and the topological charge number of each focusing light spot in the multi-parameter adjustable array light field are independently adjustable.
2. The method according to claim 1, wherein the performing dispersion compensation on the first filtered laser beam to determine a dispersion-compensated laser beam comprises:
reflecting the first filtered laser beam through a blazed grating, and collimating and emitting diffracted light of the first filtered laser beam, wherein the diffracted light is used for representing first-order diffracted light with constant angular dispersion;
determining the angular dispersion value of the DMD according to the incident angle of the DMD;
determining the angular dispersion value of the blazed grating according to the diffraction light angular dispersion;
calculating the focal length of the lens according to the angular dispersion value of the blazed grating and the angular dispersion value of the DMD, and determining a lens group;
and the diffracted light passes through the lens group to determine the laser beam after dispersion compensation.
3. The method according to claim 1, wherein determining the binary hologram of the target light field in combination with the complex amplitude expression of the target light field and the binary holographic algorithm comprises:
moving a focus of a target light field to an objective entrance pupil surface on a focal plane to determine a phase expression;
superposing a spherical wave phase and a vortex phase on a phase term in the phase expression to determine a complex amplitude expression of a target light field;
and determining the binary hologram of the target light field by combining the complex amplitude expression and a binary holographic algorithm.
4. The method according to claim 1, wherein the loading the binary hologram to the DMD, performing wavefront modulation on the dispersion-compensated laser beam by the DMD, and determining the modulated laser beam comprises:
controlling the turnover of a micromirror on each pixel in the DMD according to the pixel value of the binary hologram;
and the laser beam after dispersion compensation passes through the DMD to determine a modulated laser beam.
5. A device for generating a multi-parameter adjustable light field based on a DMD (digital micromirror device) is characterized by comprising a pulse laser, wherein a first lens group, a first spatial filter, a blazed grating, a second lens group, a first reflector, a digital micromirror array, a second reflector, a third lens group, a second spatial filter and an objective lens are sequentially arranged along the output light direction of the pulse laser, and the first spatial filter is arranged at the focal plane position of a front lens in the first lens group;
the pulse laser is used for emitting a femtosecond laser beam, and the femtosecond laser beam irradiates the blazed grating through the first lens group and the first spatial filter;
the first lens group is used for expanding and collimating the femtosecond laser beam;
the first spatial filter is used for filtering the femtosecond laser beam;
the blazed grating is used for generating forward dispersion to the femtosecond laser beam, and the femtosecond laser beam is reflected to the digital micro-mirror array through the second lens group and the first reflector;
the second lens group is used for carrying out dispersion compensation on the femtosecond laser beam;
the digital micro-mirror array is used for performing wavefront modulation on the femtosecond laser beam, and the femtosecond laser beam is reflected to the objective lens through the second reflecting mirror, the third lens group and the second spatial filter;
the third lens group is used for transmitting the femtosecond laser beam to the front of the entrance pupil of the objective lens;
the second spatial filter is used for filtering the diffracted light of the femtosecond laser beam;
and the objective lens is used for focusing the femtosecond laser beam to generate a multi-parameter adjustable light field.
6. The device according to claim 5, further comprising a half-mirror, a convex lens and a CCD camera, wherein the CCD camera is disposed on the focal plane of the convex lens;
the semi-reflecting and semi-transmitting mirror is used for reflecting a part of laser beams;
the convex lens is used for focusing reflected light;
and the CCD camera is used for collecting reflected light information.
7. The device according to claim 5, further comprising a displacement stage;
wherein the displacement stage is used for controlling the three-dimensional movement of the sample.
8. Device for generating a multi-parameter tunable light field based on DMD as in claim 5, characterized in that the blazed grating has a blaze wavelength of 500nm and a grating period of 1200 lines/mm.
9. The device according to claim 5, wherein the resolution of the digital micromirror array is 1080p and the micromirror pitch is 10.8 μm.
10. A system for generating a multi-parameter adjustable light field based on a DMD is characterized by comprising a memory and a processor;
the memory is used for storing programs;
the processor executing the program realizes the method according to any one of claims 1-4.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110642895.9A CN113448077A (en) | 2021-06-09 | 2021-06-09 | Method, device and system for generating multi-parameter adjustable light field based on DMD |
| PCT/CN2022/103532 WO2022258075A1 (en) | 2021-06-09 | 2022-07-04 | Dmd-based method, apparatus, and system for generating multi-parameter adjustable light field |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110642895.9A CN113448077A (en) | 2021-06-09 | 2021-06-09 | Method, device and system for generating multi-parameter adjustable light field based on DMD |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN113448077A true CN113448077A (en) | 2021-09-28 |
Family
ID=77811105
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110642895.9A Pending CN113448077A (en) | 2021-06-09 | 2021-06-09 | Method, device and system for generating multi-parameter adjustable light field based on DMD |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN113448077A (en) |
| WO (1) | WO2022258075A1 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114441474A (en) * | 2022-04-07 | 2022-05-06 | 安徽中科谱康科技有限公司 | Near-infrared spectrometer and control method and system thereof |
| CN115185100A (en) * | 2022-06-22 | 2022-10-14 | 成都飞机工业（集团）有限责任公司 | Method for generating encrypted dot-matrix light field |
| WO2022258075A1 (en) * | 2021-06-09 | 2022-12-15 | 暨南大学 | Dmd-based method, apparatus, and system for generating multi-parameter adjustable light field |
| CN117930600A (en) * | 2024-03-22 | 2024-04-26 | 之江实验室 | Printing method and system for realizing double-beam space-time modulation and scanning based on DMD |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20190193330A1 (en) * | 2015-09-21 | 2019-06-27 | The Chinese University Of Hong Kong | Ultrafast laser fabrication method and system |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10884250B2 (en) * | 2015-09-21 | 2021-01-05 | The Chinese University Of Hong Kong | Apparatus and method for laser beam shaping and scanning |
| WO2019170036A1 (en) * | 2018-03-06 | 2019-09-12 | The Chinese University Of Hong Kong | Ultrafast Laser Fabrication Method and System |
| CN109343320B (en) * | 2018-10-31 | 2020-12-18 | 华中科技大学 | Light control device |
| CN113448077A (en) * | 2021-06-09 | 2021-09-28 | 暨南大学 | Method, device and system for generating multi-parameter adjustable light field based on DMD |
-
2021
- 2021-06-09 CN CN202110642895.9A patent/CN113448077A/en active Pending
-
2022
- 2022-07-04 WO PCT/CN2022/103532 patent/WO2022258075A1/en active Application Filing
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20190193330A1 (en) * | 2015-09-21 | 2019-06-27 | The Chinese University Of Hong Kong | Ultrafast laser fabrication method and system |
Non-Patent Citations (1)
| Title |
|---|
| 郭一鸣: ""基于计算全息的飞秒激光光束整形"", 《中国博士学位论文全文数据库（电子期刊）-基础科学辑》 * |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2022258075A1 (en) * | 2021-06-09 | 2022-12-15 | 暨南大学 | Dmd-based method, apparatus, and system for generating multi-parameter adjustable light field |
| CN114441474A (en) * | 2022-04-07 | 2022-05-06 | 安徽中科谱康科技有限公司 | Near-infrared spectrometer and control method and system thereof |
| CN114441474B (en) * | 2022-04-07 | 2022-07-01 | 安徽中科谱康科技有限公司 | Near-infrared spectrometer and control method and system thereof |
| CN115185100A (en) * | 2022-06-22 | 2022-10-14 | 成都飞机工业（集团）有限责任公司 | Method for generating encrypted dot-matrix light field |
| CN115185100B (en) * | 2022-06-22 | 2023-08-04 | 成都飞机工业（集团）有限责任公司 | Encryption lattice type light field generation method |
| CN117930600A (en) * | 2024-03-22 | 2024-04-26 | 之江实验室 | Printing method and system for realizing double-beam space-time modulation and scanning based on DMD |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2022258075A1 (en) | 2022-12-15 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN113448077A (en) | Method, device and system for generating multi-parameter adjustable light field based on DMD | |
| US7491928B2 (en) | Extended optical traps by shape-phase holography | |
| US9477091B2 (en) | Multi-dimensional imaging using multi-focus microscopy | |
| KR102102010B1 (en) | Optical modulation control method, control program, control device, and laser light irradiation device | |
| US8120996B2 (en) | Device and method for microstructuring a storage medium and storage medium comprising a microstructured region | |
| CN104871064B (en) | Light observes device | |
| US8059321B2 (en) | Volumetric imaging of holographic optical traps | |
| US11487094B2 (en) | Optical system for spatiotemporal shaping the wavefront of the electric field of an input light beam to create three-dimensional illumination | |
| CN111900597A (en) | Planar multi-beam laser parameter regulation and control method and system | |
| EP3620763A1 (en) | Adaptive laser-beam shaping | |
| Zhang et al. | Three-dimensional holographic parallel focusing with feedback control for femtosecond laser processing | |
| CN108919499A (en) | A method of generating position and the individually controllable multiple focal beam spots of intensity | |
| CN111012325B (en) | Precise light control system and light control method | |
| Hermerschmidt et al. | Holographic optical tweezers with real-time hologram calculation using a phase-only modulating LCOS-based SLM at 1064 nm | |
| Bañas et al. | Point spread function shaping using geometric analysis | |
| EP3722886B1 (en) | A diffuser assembly | |
| US7759020B2 (en) | Multi-color holographic optical traps | |
| CN113433803B (en) | Dynamic laser parallel processing method based on multi-focus controllable | |
| RU2796474C2 (en) | Adaptive laser beam formation | |
| Hayasaki et al. | Spatial Beam Shaping with a Liquid-Crystal Spatial Light Modulator for Surface Micro-and Nanoprocessing | |
| Larsen | Exploring multi-wavelength single-shot Fourier ptychography (SSFP) as a technique for ultrafast pulsed laser (UPL) characterization | |
| JP2023169127A (en) | Multibeam 3-d focus generator | |
| Akemann et al. | Acousto-optic holography for micrometer-scale grid patterning of amplified laser pulses with single-pulse accuracy | |
| WO2023117211A1 (en) | Hologram recording system and method | |
| CN114518653A (en) | Light beam scanning method and device based on complex amplitude light field regulation and control technology |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20210928 |