CN111879542A - 清洗机清洗能力的检测方法和检测装置 - Google Patents
清洗机清洗能力的检测方法和检测装置 Download PDFInfo
- Publication number
- CN111879542A CN111879542A CN202010753207.1A CN202010753207A CN111879542A CN 111879542 A CN111879542 A CN 111879542A CN 202010753207 A CN202010753207 A CN 202010753207A CN 111879542 A CN111879542 A CN 111879542A
- Authority
- CN
- China
- Prior art keywords
- cleaning
- wafer
- defects
- defect
- defect information
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004140 cleaning Methods 0.000 title claims abstract description 471
- 238000000034 method Methods 0.000 title claims abstract description 57
- 230000007547 defect Effects 0.000 claims abstract description 708
- 239000002245 particle Substances 0.000 claims abstract description 30
- 238000001514 detection method Methods 0.000 claims abstract description 20
- 238000011109 contamination Methods 0.000 claims description 57
- 238000007689 inspection Methods 0.000 claims description 10
- 239000011859 microparticle Substances 0.000 claims description 9
- 230000005660 hydrophilic surface Effects 0.000 claims description 4
- 238000005498 polishing Methods 0.000 claims description 3
- 239000004816 latex Substances 0.000 abstract description 9
- 229920000126 latex Polymers 0.000 abstract description 9
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 7
- 229910052710 silicon Inorganic materials 0.000 description 7
- 239000010703 silicon Substances 0.000 description 7
- 238000010586 diagram Methods 0.000 description 4
- 239000003344 environmental pollutant Substances 0.000 description 4
- 231100000719 pollutant Toxicity 0.000 description 4
- 230000008878 coupling Effects 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 238000004891 communication Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 230000003746 surface roughness Effects 0.000 description 2
- 238000004590 computer program Methods 0.000 description 1
- 239000008367 deionised water Substances 0.000 description 1
- 229910021641 deionized water Inorganic materials 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 230000005661 hydrophobic surface Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- -1 salt ions Chemical class 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M99/00—Subject matter not provided for in other groups of this subclass
- G01M99/005—Testing of complete machines, e.g. washing-machines or mobile phones
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
Description
Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202010753207.1A CN111879542B (zh) | 2020-07-30 | 2020-07-30 | 清洗机清洗能力的检测方法和检测装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202010753207.1A CN111879542B (zh) | 2020-07-30 | 2020-07-30 | 清洗机清洗能力的检测方法和检测装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN111879542A true CN111879542A (zh) | 2020-11-03 |
CN111879542B CN111879542B (zh) | 2023-02-28 |
Family
ID=73204654
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN202010753207.1A Active CN111879542B (zh) | 2020-07-30 | 2020-07-30 | 清洗机清洗能力的检测方法和检测装置 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN111879542B (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN117153713A (zh) * | 2023-10-25 | 2023-12-01 | 江苏惠达电子科技有限责任公司 | 频率元器件残留污染物的检测方法、系统和设备控制方法 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003152041A (ja) * | 2001-11-19 | 2003-05-23 | Toshiba Ceramics Co Ltd | シリコンウエハの清浄度評価方法 |
CN106898559A (zh) * | 2015-12-18 | 2017-06-27 | 有研半导体材料有限公司 | 一种半导体晶圆片盒颗粒检测方法 |
CN108051347A (zh) * | 2017-11-28 | 2018-05-18 | 上海超硅半导体有限公司 | 一种用于检测储存硅片氮气柜内部环境颗粒的方法 |
CN108648185A (zh) * | 2018-05-11 | 2018-10-12 | 机械工业第四设计研究院有限公司 | 一种在线检测涂装前清洗设备颗粒物清洗效率的方法 |
CN109187258A (zh) * | 2018-08-10 | 2019-01-11 | 中铝瑞闽股份有限公司 | 一种铝合金带材表面清洁度的检测方法 |
CN109313162A (zh) * | 2016-03-28 | 2019-02-05 | 胜高股份有限公司 | 清洁度评价方法、清洗条件决定方法、和硅晶圆的制造方法 |
CN110426399A (zh) * | 2019-08-06 | 2019-11-08 | 武汉鼎泽新材料技术有限公司 | 一种颗粒物清除效率的快速评价方法 |
-
2020
- 2020-07-30 CN CN202010753207.1A patent/CN111879542B/zh active Active
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003152041A (ja) * | 2001-11-19 | 2003-05-23 | Toshiba Ceramics Co Ltd | シリコンウエハの清浄度評価方法 |
CN106898559A (zh) * | 2015-12-18 | 2017-06-27 | 有研半导体材料有限公司 | 一种半导体晶圆片盒颗粒检测方法 |
CN109313162A (zh) * | 2016-03-28 | 2019-02-05 | 胜高股份有限公司 | 清洁度评价方法、清洗条件决定方法、和硅晶圆的制造方法 |
CN108051347A (zh) * | 2017-11-28 | 2018-05-18 | 上海超硅半导体有限公司 | 一种用于检测储存硅片氮气柜内部环境颗粒的方法 |
CN108648185A (zh) * | 2018-05-11 | 2018-10-12 | 机械工业第四设计研究院有限公司 | 一种在线检测涂装前清洗设备颗粒物清洗效率的方法 |
CN109187258A (zh) * | 2018-08-10 | 2019-01-11 | 中铝瑞闽股份有限公司 | 一种铝合金带材表面清洁度的检测方法 |
CN110426399A (zh) * | 2019-08-06 | 2019-11-08 | 武汉鼎泽新材料技术有限公司 | 一种颗粒物清除效率的快速评价方法 |
Non-Patent Citations (2)
Title |
---|
J.KOO: "Effects of water and iso-propyl alcohol relative humidities", 《INTERNATIONAL JOURNAL OF HEAT AND MASS TRANSFER》 * |
王续跃 等: "利用图像处理技术评价硅片表面清洗率", 《光学精密工程》 * |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN117153713A (zh) * | 2023-10-25 | 2023-12-01 | 江苏惠达电子科技有限责任公司 | 频率元器件残留污染物的检测方法、系统和设备控制方法 |
CN117153713B (zh) * | 2023-10-25 | 2024-02-02 | 江苏惠达电子科技有限责任公司 | 频率元器件残留污染物的检测方法、系统和设备控制方法 |
Also Published As
Publication number | Publication date |
---|---|
CN111879542B (zh) | 2023-02-28 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP2599114B1 (en) | Determination of care areas for inspection of wafers | |
CN111879542B (zh) | 清洗机清洗能力的检测方法和检测装置 | |
CN115020267B (zh) | 一种半导体表面缺陷检测方法 | |
CN102129164A (zh) | 掩膜版缺陷的判断方法及判断系统 | |
JP2006517349A (ja) | ウェハ検査システム | |
CN112233971A (zh) | 一种晶圆清洗方法和晶圆清洗装置 | |
CN101621016B (zh) | 在制造集成电路中用于缺陷检测的方法和系统 | |
JP2019196985A (ja) | 検査装置及び検査方法 | |
CN104851820A (zh) | 半导体器件的缺陷检测方法 | |
CN110108713A (zh) | 一种表面异物缺陷快速过滤方法及系统 | |
US20070126451A1 (en) | Method for testing the quality of light-permeable thin film | |
JPH1194804A (ja) | 自動探傷方法及び装置 | |
CN110658255A (zh) | 一种基于物理方式的磁粉检测方法 | |
CN104155390A (zh) | 半导体元件微量元素检测样品的制备方法及检测方法 | |
CN105717409B (zh) | 电子设备的漏电检测方法及系统 | |
CN111750755A (zh) | 摇篮转台的转轴的中心位置的检测方法和检测装置 | |
CN110426399A (zh) | 一种颗粒物清除效率的快速评价方法 | |
CN110851984B (zh) | 一种数据处理方法及装置 | |
US7382451B2 (en) | Method of defect inspection | |
US9406330B1 (en) | Method for HDD disk defect source detection | |
JP2010034444A (ja) | 再生シリコンウェーハの製造方法 | |
CN107589223B (zh) | 一种定位的方法、装置以及存储介质 | |
CN101807266B (zh) | 半导体制造中的成品管理方法 | |
CN101202202A (zh) | Flash芯片的清洗制程 | |
US11304304B2 (en) | Ionic contaminant cleaning |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant | ||
CP01 | Change in the name or title of a patent holder | ||
CP01 | Change in the name or title of a patent holder |
Address after: 221000 No.1 Xinxin Road, Xuzhou Economic and Technological Development Zone, Jiangsu Province Patentee after: Zhonghuan Leading (Xuzhou) Semiconductor Materials Co.,Ltd. Address before: 221000 No.1 Xinxin Road, Xuzhou Economic and Technological Development Zone, Jiangsu Province Patentee before: XUZHOU XINJING SEMICONDUCTOR TECHNOLOGY Co.,Ltd. |
|
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20230609 Address after: 221000 No.1 Xinxin Road, Xuzhou Economic and Technological Development Zone, Jiangsu Province Patentee after: Zhonghuan Leading (Xuzhou) Semiconductor Materials Co.,Ltd. Patentee after: Zhonghuan leading semiconductor materials Co.,Ltd. Address before: 221000 No.1 Xinxin Road, Xuzhou Economic and Technological Development Zone, Jiangsu Province Patentee before: Zhonghuan Leading (Xuzhou) Semiconductor Materials Co.,Ltd. |
|
CP03 | Change of name, title or address | ||
CP03 | Change of name, title or address |
Address after: 221000 No.1 Xinxin Road, Xuzhou Economic and Technological Development Zone, Jiangsu Province Patentee after: Zhonghuan Leading (Xuzhou) Semiconductor Materials Co.,Ltd. Country or region after: China Patentee after: Zhonghuan Leading Semiconductor Technology Co.,Ltd. Address before: 221000 No.1 Xinxin Road, Xuzhou Economic and Technological Development Zone, Jiangsu Province Patentee before: Zhonghuan Leading (Xuzhou) Semiconductor Materials Co.,Ltd. Country or region before: China Patentee before: Zhonghuan leading semiconductor materials Co.,Ltd. |