CN111867259A - 一种陶瓷覆铜板的制备方法 - Google Patents
一种陶瓷覆铜板的制备方法 Download PDFInfo
- Publication number
- CN111867259A CN111867259A CN202010748686.8A CN202010748686A CN111867259A CN 111867259 A CN111867259 A CN 111867259A CN 202010748686 A CN202010748686 A CN 202010748686A CN 111867259 A CN111867259 A CN 111867259A
- Authority
- CN
- China
- Prior art keywords
- copper
- ceramic
- metal
- clad plate
- preparation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000919 ceramic Substances 0.000 title claims abstract description 60
- 238000002360 preparation method Methods 0.000 title claims abstract description 15
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 77
- 229910052802 copper Inorganic materials 0.000 claims abstract description 63
- 239000010949 copper Substances 0.000 claims abstract description 63
- 229910052751 metal Inorganic materials 0.000 claims abstract description 39
- 239000002184 metal Substances 0.000 claims abstract description 39
- 239000000758 substrate Substances 0.000 claims abstract description 37
- 238000010288 cold spraying Methods 0.000 claims abstract description 21
- 238000005498 polishing Methods 0.000 claims abstract description 10
- 239000000428 dust Substances 0.000 claims abstract description 9
- 239000000853 adhesive Substances 0.000 claims abstract description 6
- 230000001070 adhesive effect Effects 0.000 claims abstract description 6
- 239000007789 gas Substances 0.000 claims description 35
- 238000007747 plating Methods 0.000 claims description 17
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 12
- 239000002245 particle Substances 0.000 claims description 12
- 239000012159 carrier gas Substances 0.000 claims description 10
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims description 10
- 229910052582 BN Inorganic materials 0.000 claims description 8
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 claims description 8
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 8
- 239000003570 air Substances 0.000 claims description 7
- 229910052757 nitrogen Inorganic materials 0.000 claims description 6
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 5
- 229910052782 aluminium Inorganic materials 0.000 claims description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 5
- 229910052719 titanium Inorganic materials 0.000 claims description 5
- 239000010936 titanium Substances 0.000 claims description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 4
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 4
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims description 4
- 239000001307 helium Substances 0.000 claims description 4
- 229910052734 helium Inorganic materials 0.000 claims description 4
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 3
- 229910052759 nickel Inorganic materials 0.000 claims description 3
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 2
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 claims description 2
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims description 2
- 229910052786 argon Inorganic materials 0.000 claims description 2
- 229910052804 chromium Inorganic materials 0.000 claims description 2
- 239000011651 chromium Substances 0.000 claims description 2
- 239000000843 powder Substances 0.000 claims description 2
- 229910052725 zinc Inorganic materials 0.000 claims description 2
- 239000011701 zinc Substances 0.000 claims description 2
- 238000000034 method Methods 0.000 abstract description 15
- 230000008569 process Effects 0.000 abstract description 14
- 230000003647 oxidation Effects 0.000 abstract description 3
- 238000007254 oxidation reaction Methods 0.000 abstract description 3
- 239000002923 metal particle Substances 0.000 abstract description 2
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 24
- 238000000227 grinding Methods 0.000 description 7
- 238000001035 drying Methods 0.000 description 6
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 6
- 229910052737 gold Inorganic materials 0.000 description 6
- 239000010931 gold Substances 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 6
- 238000004140 cleaning Methods 0.000 description 5
- 238000000151 deposition Methods 0.000 description 5
- 230000008021 deposition Effects 0.000 description 5
- 238000005507 spraying Methods 0.000 description 5
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 4
- 239000011889 copper foil Substances 0.000 description 3
- 150000004767 nitrides Chemical class 0.000 description 3
- 239000000463 material Substances 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000004381 surface treatment Methods 0.000 description 2
- JPVYNHNXODAKFH-UHFFFAOYSA-N Cu2+ Chemical compound [Cu+2] JPVYNHNXODAKFH-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000005234 chemical deposition Methods 0.000 description 1
- 238000006388 chemical passivation reaction Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 229910001431 copper ion Inorganic materials 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 238000007429 general method Methods 0.000 description 1
- 230000008570 general process Effects 0.000 description 1
- 239000003365 glass fiber Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000002905 metal composite material Substances 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 238000005289 physical deposition Methods 0.000 description 1
- 229910052573 porcelain Inorganic materials 0.000 description 1
- 238000011112 process operation Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
- H05K3/022—Processes for manufacturing precursors of printed circuits, i.e. copper-clad substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C24/00—Coating starting from inorganic powder
- C23C24/02—Coating starting from inorganic powder by application of pressure only
- C23C24/04—Impact or kinetic deposition of particles
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/03—Use of materials for the substrate
- H05K1/0306—Inorganic insulating substrates, e.g. ceramic, glass
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Organic Chemistry (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Materials Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Laminated Bodies (AREA)
- Manufacturing Of Printed Wiring (AREA)
Abstract
Description
Claims (8)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN202010748686.8A CN111867259A (zh) | 2020-07-30 | 2020-07-30 | 一种陶瓷覆铜板的制备方法 |
Applications Claiming Priority (1)
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---|---|---|---|
CN202010748686.8A CN111867259A (zh) | 2020-07-30 | 2020-07-30 | 一种陶瓷覆铜板的制备方法 |
Publications (1)
Publication Number | Publication Date |
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CN111867259A true CN111867259A (zh) | 2020-10-30 |
Family
ID=72946299
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN202010748686.8A Pending CN111867259A (zh) | 2020-07-30 | 2020-07-30 | 一种陶瓷覆铜板的制备方法 |
Country Status (1)
Country | Link |
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CN (1) | CN111867259A (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112680728A (zh) * | 2020-12-09 | 2021-04-20 | 东莞仁海科技股份有限公司 | 一种金属表面陶瓷化工艺 |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1862795A (zh) * | 2005-05-13 | 2006-11-15 | 富士电机控股株式会社 | 接线板 |
KR20080061792A (ko) * | 2006-12-28 | 2008-07-03 | 한양대학교 산학협력단 | 저온 분사 코팅 공정을 이용한 세라믹 dbc 기판의제조방법 |
JP2010228991A (ja) * | 2009-03-27 | 2010-10-14 | Dowa Metaltech Kk | 金属セラミックス接合基板及びその製造方法 |
KR20120030884A (ko) * | 2010-09-20 | 2012-03-29 | (주)태광테크 | 인쇄회로기판 및 저온분사 방식을 이용한 인쇄회로기판의 제조방법 |
DE102013113736A1 (de) * | 2013-12-10 | 2015-06-11 | Rogers Germany Gmbh | Verfahren zum Herstellen eines Metall-Keramik-Substrates sowie Metall-Keramik-Substrat |
CN110168140A (zh) * | 2017-01-17 | 2019-08-23 | 国立大学法人信州大学 | 陶瓷电路基板的制造方法 |
CN110976893A (zh) * | 2019-12-27 | 2020-04-10 | 深圳市欣天科技股份有限公司 | 陶瓷基材表面复合金属层的制备方法 |
CN111005018A (zh) * | 2019-12-27 | 2020-04-14 | 深圳市欣天科技股份有限公司 | 喷涂金属粉末在陶瓷基材表面形成金属涂层的制备方法 |
-
2020
- 2020-07-30 CN CN202010748686.8A patent/CN111867259A/zh active Pending
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1862795A (zh) * | 2005-05-13 | 2006-11-15 | 富士电机控股株式会社 | 接线板 |
KR20080061792A (ko) * | 2006-12-28 | 2008-07-03 | 한양대학교 산학협력단 | 저온 분사 코팅 공정을 이용한 세라믹 dbc 기판의제조방법 |
JP2010228991A (ja) * | 2009-03-27 | 2010-10-14 | Dowa Metaltech Kk | 金属セラミックス接合基板及びその製造方法 |
KR20120030884A (ko) * | 2010-09-20 | 2012-03-29 | (주)태광테크 | 인쇄회로기판 및 저온분사 방식을 이용한 인쇄회로기판의 제조방법 |
DE102013113736A1 (de) * | 2013-12-10 | 2015-06-11 | Rogers Germany Gmbh | Verfahren zum Herstellen eines Metall-Keramik-Substrates sowie Metall-Keramik-Substrat |
CN110168140A (zh) * | 2017-01-17 | 2019-08-23 | 国立大学法人信州大学 | 陶瓷电路基板的制造方法 |
CN110976893A (zh) * | 2019-12-27 | 2020-04-10 | 深圳市欣天科技股份有限公司 | 陶瓷基材表面复合金属层的制备方法 |
CN111005018A (zh) * | 2019-12-27 | 2020-04-14 | 深圳市欣天科技股份有限公司 | 喷涂金属粉末在陶瓷基材表面形成金属涂层的制备方法 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112680728A (zh) * | 2020-12-09 | 2021-04-20 | 东莞仁海科技股份有限公司 | 一种金属表面陶瓷化工艺 |
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PB01 | Publication | ||
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TA01 | Transfer of patent application right | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20210325 Address after: 266111 No.6, Jinxia Road, high tech Zone, Chengyang District, Qingdao City, Shandong Province Applicant after: QINGDAO ZHONGQING ELECTRONIC SOFTWARE Co.,Ltd. Address before: No. 606, ningliu Road, Liuhe District, Nanjing City, Jiangsu Province, 211500 Applicant before: Nanjing Kaitai Chemical Technology Co.,Ltd. |
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TA01 | Transfer of patent application right | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20220303 Address after: 510000 room 209, building 1, No. 318, Waihuan West Road, University Town, Xiaoguwei street, Panyu District, Guangzhou, Guangdong Applicant after: Guangzhou Qingmiao New Material Technology Co.,Ltd. Address before: 266111 No.6, Jinxia Road, high tech Zone, Chengyang District, Qingdao City, Shandong Province Applicant before: QINGDAO ZHONGQING ELECTRONIC SOFTWARE Co.,Ltd. |