CN111834346A - 晶体管功率模块封装结构及其封装方法 - Google Patents

晶体管功率模块封装结构及其封装方法 Download PDF

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CN111834346A
CN111834346A CN202010827624.6A CN202010827624A CN111834346A CN 111834346 A CN111834346 A CN 111834346A CN 202010827624 A CN202010827624 A CN 202010827624A CN 111834346 A CN111834346 A CN 111834346A
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lead frame
copper
power module
based resin
resin layer
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赵承贤
李鑫
颜志进
刘浩
周新龙
盘伶子
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Gree Electric Appliances Inc of Zhuhai
Zhuhai Gree Xinyuan Electronics Co Ltd
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Gree Electric Appliances Inc of Zhuhai
Zhuhai Gree Xinyuan Electronics Co Ltd
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Abstract

本发明提供一种晶体管功率模块封装结构及其封装方法,晶体管功率模块封装结构包括引线框架、铜基树脂散热片、若干芯片和环氧树脂塑封体;各所述芯片设置于所述引线框架上,所述铜基树脂散热片贴附于所述引线框架,所述环氧树脂塑封体包覆于所述引线框架、各所述芯片以及所述铜基树脂散热片的外侧。采用引线框架和铜基树脂散热片取代传统的DBC基板,能够有效避免热膨胀系数不匹配的情况,从而避免引起晶体管翘曲的情况,并且避免了焊接产生的大面积的气泡,而采用环氧树脂进行压注封装,能够有效提高晶体管的气密性与可靠性,避免了晶体管在高温环境下发生硬化而导致的内部产生气泡而引起散热性与气密性的降低。

Description

晶体管功率模块封装结构及其封装方法
技术领域
本发明涉及晶体管功率模块封装技术领域,特别涉及一种晶体管功率模块封装结构及其封装方法。
背景技术
现有传统型IGBT(Insulated Gate Bipolar Transistor,绝缘栅双极型晶体管)功率模块的封装结构采用塑胶外壳灌封结构。这种封装结构导致晶体管的体积较大。
传统型IGBT功率模块封装结构采用灌封胶,灌封胶的封装方式导致型IGBT功率模块的体积较大。且灌封胶在高温下容易发生硬化,进而导致产品内部产生气泡,气泡导致芯片与灌封胶之间的接触不良,导致接触热阻增加,进而降低产品散热性,此外,由于气泡内部为空气,空气中的热传导率相较于在灌封胶中要低,导致产品散热性较差,进而导致晶体管失效。
此外,传统的IGBT功率模块封装结构采用DBC(直接覆铜)基板带来的CTE(coefficient of thermal expansion,热膨胀系数)不匹配,导致晶体管翘曲问题与大面积DBC焊接产生的气泡率大问题。
发明内容
基于此,有必要针对上述技术问题,提供一种晶体管功率模块封装结构及其封装方法。
一种晶体管功率模块封装结构,包括:引线框架、铜基树脂散热片、若干芯片和环氧树脂塑封体;
各所述芯片设置于所述引线框架上,所述铜基树脂散热片贴附于所述引线框架,所述环氧树脂塑封体包覆于所述引线框架、各所述芯片以及所述铜基树脂散热片的外侧。
在一个实施例中,所述铜基树脂散热片包括依次层叠连接的铜基层、第一树脂层和第二树脂层,所述第二树脂层与所述引线框架连接。
在一个实施例中,所述第一树脂层的固化率和所述第二树脂层的固化率相异设置。
在一个实施例中,所述第一树脂层的厚度和所述第二树脂层的厚度相等。
在一个实施例中,所述铜基层的厚度为0.3mm至0.5mm。
在一个实施例中,所述第一树脂层的厚度为75μm至95μm。
在一个实施例中,所述第二树脂层的厚度为75μm至95μm。
在一个实施例中,各所述芯片设置于所述引线框架的一面,所述铜基树脂散热片贴附于所述引线框架的另一面。
在一个实施例中,所述铜基树脂散热片与所述引线框架热压连接。
在一个实施例中,所述引线框架的靠近边缘的位置设置有U型槽。
一种晶体管功率模块封装方法,包括:
将晶体管的各芯片固定在引线框架上;
将铜基树脂散热片贴附于所述引线框架;
将环氧树脂注塑在所述引线框架、各所述芯片以及所述铜基树脂散热片的外侧;
使得所述环氧树脂固化形成环氧树脂塑封体,所述环氧树脂塑封体包覆于所述引线框架、各所述芯片以及所述铜基树脂散热片的外侧。
在一个实施例中,所述将铜基树脂散热片贴附于所述引线框架的步骤包括:
采用热压合方式将所述铜基树脂散热片贴合于所述引线框架上。
在一个实施例中,所述铜基树脂散热片包括依次层叠连接的铜基层、第一树脂层和第二树脂层,所述第一树脂层的固化率和所述第二树脂层的固化率相异设置;
所述将铜基树脂散热片贴附于所述引线框架的步骤包括:
将所述第二树脂层贴附于所述引线框架。
上述晶体管功率模块封装结构及其封装方法,采用引线框架和铜基树脂散热片取代传统的DBC基板,能够有效避免热膨胀系数不匹配的情况,从而避免引起晶体管翘曲的情况,并且避免了焊接产生的大面积的气泡,而采用环氧树脂进行压注封装,能够有效提高晶体管的气密性与可靠性,避免了晶体管在高温环境下发生硬化而导致的内部产生气泡而引起散热性与气密性的降低。
附图说明
图1为一个实施例中晶体管功率模块封装结构的一方向结构示意图;
图2为一个实施例中晶体管功率模块封装结构的另一方向的未封装前的结构示意图;
图3为一个实施例中的铜基树脂散热片的一方向结构示意图;
图4为一个实施例中的引线框架的结构示意图;
图5为一个实施例中晶体管功率模块封装方法的流程示意图;
图6为一个实施例中晶体管功率模块封装方法的中压注模压注过程的结构示意图;
图7为一个实施例中晶体管功率模块的制造工艺的流程示意图;
图8为一个实施例中晶体管功率模块的内部电路逻辑示意图。
具体实施方式
为了使本申请的目的、技术方案及优点更加清楚明白,以下结合附图及实施例,对本申请进行进一步详细说明。应当理解,此处描述的具体实施例仅仅用以解释本申请,并不用于限定本申请。
需要说明的是,当元件被称为“固定于”、“设置于”另一个元件,它可以直接在另一个元件上或者也可以存在居中的元件。当一个元件被认为是“连接”另一个元件,它可以是直接连接到另一个元件或者可能同时存在居中元件。本文所使用的术语“垂直的”、“水平的”、“左”、“右”以及类似的表述只是为了说明的目的,并不表示是唯一的实施方式。
实施例一
本实施例中,如图1和图2所示,提供一种晶体管功率模块封装结构10,包括:引线框架100、铜基树脂散热片200、若干芯片300和环氧树脂塑封体400;各所述芯片设置于所述引线框架100上,所述铜基树脂散热片200贴附于所述引线框架100,所述环氧树脂塑封体400包覆于所述引线框架100、各所述芯片300以及所述铜基树脂散热片200的外侧。
具体地,引线框架100用于支撑各芯片300,引线框架100上的芯片300包括IGBT芯片310、FRD(流二极管)芯片320和NTC(Negative Temperature CoeffiCient,热敏电阻)芯片330。其中,IGBT芯片也可以是MOSFET(Metal-Oxide-Semiconductor Field-EffectTransistor,金属-氧化物半导体场效应晶体管)芯片。各芯片焊接固定在引线框架100上,且各芯片通过导线110连接,且各芯片通过导线与引线框架100连接,比如,导线110为铝线。比如,各芯片通过焊锡敢接在引线框架100上,比如,各芯片通过银浆固定在引线框架100上。比如,该导线为铝线,各芯片通过铝线连接。本实施例中,首先将IGBT、FRD以及NTC热敏电阻芯片通过锡膏印刷或者银浆印刷固晶工艺固定在引线框架100上,再通过铝线焊接实现芯片与芯片之间、芯片与引线框架100之间点电气连接。
本实施例中,铜基树脂散热片200也称为导热绝缘铜基树脂散热片200,铜基树脂散热片200通过热压连接方式贴附于引线框架100的表面,由于铜基树脂散热片200含有金属铜,金属铜具有较佳的导热率,导热性能好,能够快速地将引线框架100和芯片的热量引导,并且散发至外部,从而使得晶体管整体具有较佳的散热性能。此外,铜基树脂散热片200含有树脂,能够起到绝缘的效果,从而为铜基树脂散热片200中的金属铜与引线框架100以及芯片之间提供绝缘保护。
本实施例中,环氧树脂塑封体400的材质为环氧树脂,环氧树脂利用压注模,压注在引线框架100、铜基树脂散热片200和各芯片的外侧,环氧树脂固化后,形成环氧树脂塑封体400,该环氧树脂塑封体400包覆于铜基树脂散热片200和各芯片的外侧,且包覆于至少部分的引线框架100的外侧。图1中,为避免环氧树脂塑封体400遮挡其内封装的元件,便于观看环氧树脂塑封体400内的元件,环氧树脂塑封体400采用虚线表示。
传统的功率模块采用DBC基板,容易由于热膨胀系数不匹配,引起晶体管翘曲的情况,并且容易引起大面积的气泡,本申请中,采用引线框架100和铜基树脂散热片200取代传统的DBC基板,能够有效避免热膨胀系数不匹配的情况,从而避免引起晶体管翘曲的情况,并且避免了焊接产生的大面积的气泡。而采用环氧树脂进行压注封装,相较于传统的灌封胶封装,能够有效提高晶体管的气密性与可靠性,避免了晶体管在高温环境下发生硬化而导致的内部产生气泡而引起散热性与气密性的降低。
此外,本申请采用NTC热敏电阻芯片替代传统型NTC热敏电阻,NTC热敏电阻芯片具有小体积、高精度、高稳定性、高可靠性以及快速反应的特点,能够进一步使得晶体管功率模块的体积更小。
在一个实施例中,如图1所示,各所述芯片设置于所述引线框架100的一面,所述铜基树脂散热片200贴附于所述引线框架100的另一面。具体地,将各所述芯片和铜基树脂散热片200分别设置于引线框架100的向背的两个表面,一方面,避免铜基树脂散热片200对芯片在引线框架100上的布局造成影响,另一方面,铜基树脂散热片200能够很好地对引线框架100进行支撑,并且能够快速地引导散发引线框架100和芯片的热量。
在一个实施例中,所述铜基树脂散热片200与所述引线框架100热压连接。本实施例中,铜基树脂散热片200通过热压合的方式与引线框架100连接。这样,使得铜基树脂散热片200能够稳固地贴附于引线框架100上。
在一个实施例中,如图3所示,所述铜基树脂散热片200包括依次层叠连接的铜基层230、第一树脂层210和第二树脂层220,所述第二树脂层220与所述引线框架100连接。本实施例中,铜基层230、第一树脂层210和第二树脂层220依次层叠设置,即铜基层230与第一树脂层210的一面连接,第一树脂层210的另一面与第二树脂层220的一面连接,第二树脂层220背向第一树脂层210的一面贴附于引线框架100上,具体地,第二树脂层220通过热压方式贴附于引线框架100上,第一树脂层210和第二树脂层220的材质为环氧树脂。
本实施例中,铜基树脂散热片200通过第二树脂层220贴附在引线框架100上,具体地,第二树脂层220贴附于引线框架100上背向芯片的一面,铜基层230位于外侧,这样,铜基层230能够快速、有效地将引线框架100的热量吸收、引导并散发至外部,有效提高引线框架100和各芯片的散热效率。
在一个实施例中,所述第一树脂层210的固化率和所述第二树脂层220的固化率相异设置。本实施例中,所述第一树脂层210的环氧树脂的固化率和所述第二树脂层220的环氧树脂的固化率不同,这样,使得第一树脂层210和第二树脂层220能够具有不同的粘附性和热导率,比如,第一树脂层210的固化率大于第二树脂层220的固化率,这样,第一树脂层210能够更为稳固地贴附于引线框架100上,而第一树脂层210具有更高地热导率,能够快速、高效地将引线框架100上的热量吸附,并通过第二树脂层220传到至铜基层230。
在一个实施例中,所述第一树脂层210的厚度和所述第二树脂层220的厚度相等。通过将第一树脂层210和第二树脂层220的厚度设置为相等,使得两者具有相近的强度,有利于提高铜基树脂散热片200的结构稳定性。
在其他实施例中,所述第一树脂层210的厚度和所述第二树脂层220的厚度也可以设置为不相等。
在一个实施例中,所述铜基层230的厚度为0.3mm至0.5mm。
在一个实施例中,所述第一树脂层210的厚度为75μm至95μm。
在一个实施例中,所述第二树脂层220的厚度为75μm至95μm。
上述实施例中,铜基层230的厚度设置为0.3mm至0.5mm,一方面,能够使得产品的整体厚度较小,此外,铜基层230在此厚度下,能够具有较高的强度,能够很好第支撑第一树脂层210和第二树脂层220,使得铜基树脂散热片200的结构较为稳固,另一方面,使得铜基树脂散热片200具有较佳的散热性能。而第一树脂层210的厚度设置为75μm至95μm,第二树脂层220的厚度设置为75μm至95μm,一方面,能够更好地贴附于引线框架100,并且为引线框架100和铜基层230之间提供绝缘隔离,另一方面,使得铜基树脂散热片200具有较高的强度。
在一个实施例中,第一树脂层210为85μm厚的固化率为70%-90%的环氧树脂层,第二树脂层220为85μm厚的固化率为30%-60%的环氧树脂层,铜基层230的厚度为0.4mm。本实施例中,第一树脂层210的厚度为85μm,固化率为70%-90%,第一树脂层210的厚度为85μm,固化率为730%-60%。本实施例中,能够进一步提高铜基树脂散热片200的强度和散热效率,并且能够使得铜基树脂散热片200更为稳固地贴附于引线框架100上。
在一个实施例中,如图4所示,所述引线框架100的靠近边缘的位置设置有U型槽106。通过在引线框架100的边缘设置U型槽106,防止水汽进入环氧树脂塑封体400的内部。图4中,所述引线框架100上设置有IGBT芯片的固晶位置120、FRD芯片的固晶位置130、NTC热敏电阻芯片固晶位置140,并且设置有防止焊锡溢出的U槽107。
实施例二,
本实施例中,如图5所示,提供一种晶体管功率模块封装方法,包括:
步骤510,将晶体管的各芯片固定在引线框架上。
具体地,各芯片包括IGBT芯片、FRD芯片以及NTC热敏电阻芯片,本步骤中,通过锡膏印刷或者银浆印刷固晶工艺固定在引线框架上,再通过铝线焊接,实现芯片与芯片之间以及芯片与引线框架之间点电气连接。
步骤520,将铜基树脂散热片贴附于所述引线框架。
本步骤中,将铜基树脂散热片贴附固定于引线框架的背向芯片的一面。
步骤530,将环氧树脂注塑在所述引线框架、各所述芯片以及所述铜基树脂散热片的外侧。
本步骤中,将液态的环氧树脂注塑在所述引线框架、各所述芯片以及所述铜基树脂散热片的外侧,使得环氧树脂包覆在各所述芯片以及所述铜基树脂散热片的外侧,并且包覆至少部分的引线框架。
步骤540,使得所述环氧树脂固化形成环氧树脂塑封体,所述环氧树脂塑封体包覆于所述引线框架、各所述芯片以及所述铜基树脂散热片的外侧。
具体地,环氧树脂固化后形成环氧树脂塑封体,且固化后的环氧树脂塑封体将各所述芯片、铜基树脂散热片以及至少部分的引线框架封装在内,从而实现晶体管功率模块的封装。
上述实施例中,采用引线框架和铜基树脂散热片取代传统的DBC基板,能够有效避免热膨胀系数不匹配的情况,从而避免引起晶体管翘曲的情况,并且避免了焊接产生的大面积的气泡,而采用环氧树脂进行压注封装,能够有效提高晶体管的气密性与可靠性,避免了晶体管在高温环境下发生硬化而导致的内部产生气泡而引起散热性与气密性的降低。
在一个实施例中,所述将环氧树脂注塑在所述引线框架、各所述芯片以及所述铜基树脂散热片的外侧的步骤包括:将环氧树脂压注在所述引线框架、各所述芯片以及所述铜基树脂散热片的外侧。
本实施例中,采用压注的方式,将环氧树脂注塑在所述引线框架、各所述芯片以及所述铜基树脂散热片的外侧。比如,通过压注模将环氧树脂压注在所述引线框架、各所述芯片以及所述铜基树脂散热片的外侧。本实施例中,通过压注模的将环氧树脂压注进行封装,能够避免由于高温硬化而引产生的气泡,能够提高封装的气密性,且使得铜基树脂散热片与引线框架连接更为紧密、稳固,使得封装效果更佳。
如图6所示,其为压注模压注过程的示意图,未固化前的所述环氧树脂塑封体400包覆于所述引线框架100、各所述芯片300以及所述铜基树脂散热片200的外侧,环氧树脂压注模封流道630分别通过第一梯形注浇口610和第二梯形注浇口630将流体的环氧树脂注入压注模内,使得环氧树脂塑包覆于所述引线框架100、各所述芯片300以及所述铜基树脂散热片200的外侧。
在一个实施例中,所述将铜基树脂散热片贴附于所述引线框架的步骤包括:采用热压合方式将所述铜基树脂散热片贴合于所述引线框架上。
本实施例中,铜基树脂散热片带有树脂的一侧,通过热压合的方式贴合于所述引线框架上,使得铜基树脂散热片能够稳固地贴合于所述引线框架上。
在一个实施例中,所述铜基树脂散热片包括依次层叠连接的铜基层、第一树脂层和第二树脂层,所述第一树脂层的固化率和所述第二树脂层的固化率相异设置;所述将铜基树脂散热片贴附于所述引线框架的步骤包括:将所述第二树脂层贴附于所述引线框架。
本实施例中,采用热压合方式,将所述第二树脂层贴附于所述引线框架,本实施例中,第一树脂层和第二树脂层的材质均为环氧树脂,通过热压的方式,能够使得第一树脂层稳固地贴附在引线框架背向芯片的一面。
实施例三
请参见图7,其为晶体管功率模块的产品制造工艺,包括IGBT DB、FRD DB、NTC DB、Al DB、内观检查、散热片贴附、树脂模封、树脂固化、电镀切筋、测试、成型印字和外观检查。
其中,DB是指将芯片通过刷锡膏或者刷银浆的方式固定在引线框架上。
IGBT是指IGBT或者MOSFET芯片;。
FRD是指续流二极管芯片。
NTC是指热敏电阻芯片。;
Al WB是指铝线焊接;
内观检查是指对产品进行内部结构检查
散热片贴附是指采用热压合方式将高导热绝缘铜基树脂散热片与引线框架进行贴合;
树脂模封是指使用环氧树脂采用压注模的方式将产品进行包封;
后固化是指对塑封后的产品进行完全固化;
电镀切筋是指将焊锡用电镀工艺附着在产品引脚上,并将产品引脚进行分离;
测试是指对产品进行电性能测试;
成型印字是指将产品引脚进行成型,并对产品型号及批次号等信息进行标识;
外观检查是指对测试后的良品进行外观检查。
本实施例中,晶体管功率模块的封装为晶体管功率模块的产品制造工艺的其中一环。
晶体管功率模块的产品制造过程具体为:首先将IGBT、FRD以及NTC热敏电阻芯片通过锡膏印刷或者银浆印刷固晶工艺固定在引线框架上,再通过Al线焊接实现芯片与芯片之间以及芯片与引线框架之间点电气连接,再通过高导热环氧树脂散热片贴附,然后通过环氧树脂压注模进行封装,解决传统功率模块封装使用灌封胶在高温下发生硬化导致产品内部产生气泡降低产品的散热性与气密性,并且降低产品的翘曲与气泡率,以及减小产品的体积。
产品电气结构设计:该结构由6个IGBT或者MOSFET、6个续流二极管FRD、1个NTC热敏电阻芯片组成,每3个IGBT或者MOSFET与3个续流二极管FRD并联形成上下桥,并组成半桥输出U/V/W相电路。采用点焊锡丝或者刷锡膏或者点银浆将芯片焊接在引线框架PAD部位,引线框架作为部分电气导线、结构支撑以及散热载体的作用,并使用Al线焊接方式实现芯片电极之间以及与引线框架之间的电气连接。
框架设计:引线框架采用固晶PAD位为下沉结构,并在PAD位与引脚特定位置进行开U槽设计,用于防止焊锡溢出与水汽通过引脚与树脂结合处进入到产品内部,造成产品失效。
制造工艺的实现:如图6和7所示,先采用锡膏印刷工艺进行IGBT固晶、FRD固晶以及NTC热敏电阻芯片固晶,再进行Al线焊接,然后进行内观检查。然后进行新型压注模封装功率模块结构的实现,首先将高导热环氧树脂散热片通过热压工艺将散热片与引线框架进行贴合,然后将贴合好散热片的产品放置在模腔中进行环氧树脂压注模塑封,注浇口设计为两部分,均设计为梯形结构。最后进行后段的封装测试。
通过上述工艺制造的晶体管功率模块的内部电路图如图8所示,其中,图中各元件分别为:
1为集电极1(C1)、2为集电极2(C2)、3为高侧FRD芯片;
4为高侧IGBT芯片、5为高侧IGBT芯片门极(G1);
6为高侧IGBT芯片发射极(E1)、7为半桥输出U/V/W相;
8为低侧IGBT芯片、9为低侧IGBT芯片门极(G2);
10为低侧FRD芯片、11为低侧IGBT芯片发射极(E2);
12为低侧IGBT芯片发射极(E3)、13为NTC热敏电阻芯片P极;
14为NTC热敏电阻芯片、15为NTC热敏电阻芯片N极。
本申请的目的在于压注模封装技术应用到大功率IGBT模块的封装中,形成一种新型压注模封装功率模块结构,并采用新的封装工艺予以实现,提高产品的气密性与可靠性,解决传统功率模块封装使用灌封胶在高温下发生硬化导致产品内部产生气泡降低产品的散热性与气密性,并且降低产品的翘曲与气泡率,以及减小产品的体积。
此系统实际使用中,可以实现了以下效果:
1.采用新型压注模封装结构解决了传统IGBT模块封装结构体积大问题;
2.采用新型压注模封装结构解决了传统IGBT模块封装结构使用灌封胶在高温下发生硬化导致产品内部产生气泡降低产品的散热性与气密性问题;
3.采用新型压注模封装结构解决了传统IGBT模块封装结构使用DBC基板带来的CTE不匹配导致产品翘曲问题与大面积DBC焊接产生的气泡率大问题;
4.NTC热敏电阻芯片替代传统型NTC热敏电阻,实现小体积、高精度、高稳定性、高可靠性以及快速反应。
5.给出了可行的结构设计方法及生产工艺;
6.新型压注模封装功率模块结构采用一种环氧树脂压注模工艺,首先将IGBT、FRD以及NTC热敏电阻芯片通过锡膏印刷或者银浆印刷固晶工艺固定在引线框架上,再通过Al线焊接实现芯片与芯片之间以及芯片与引线框架之间点电气连接,再通过高导热环氧树脂散热片贴附,然后通过环氧树脂压注模进行封装,解决传统功率模块封装使用灌封胶在高温下发生硬化导致产品内部产生气泡降低产品的散热性与气密性,并且降低产品的翘曲与气泡率,以及减小产品的体积。
以上实施例的各技术特征可以进行任意的组合,为使描述简洁,未对上述实施例中的各个技术特征所有可能的组合都进行描述,然而,只要这些技术特征的组合不存在矛盾,都应当认为是本说明书记载的范围。
以上所述实施例仅表达了本申请的几种实施方式,其描述较为具体和详细,但并不能因此而理解为对发明专利范围的限制。应当指出的是,对于本领域的普通技术人员来说,在不脱离本申请构思的前提下,还可以做出若干变形和改进,这些都属于本申请的保护范围。因此,本申请专利的保护范围应以所附权利要求为准。

Claims (13)

1.一种晶体管功率模块封装结构,其特征在于,包括:引线框架、铜基树脂散热片、若干芯片和环氧树脂塑封体;
各所述芯片设置于所述引线框架上,所述铜基树脂散热片贴附于所述引线框架,所述环氧树脂塑封体包覆于所述引线框架、各所述芯片以及所述铜基树脂散热片的外侧。
2.根据权利要求1所述的晶体管功率模块封装结构,其特征在于,所述铜基树脂散热片包括依次层叠连接的铜基层、第一树脂层和第二树脂层,所述第二树脂层与所述引线框架连接。
3.根据权利要求2所述的晶体管功率模块封装结构,其特征在于,所述第一树脂层的固化率和所述第二树脂层的固化率相异设置。
4.根据权利要求2所述的晶体管功率模块封装结构,其特征在于,所述第一树脂层的厚度和所述第二树脂层的厚度相等。
5.根据权利要求2所述的晶体管功率模块封装结构,其特征在于,所述铜基层的厚度为0.3mm至0.5mm。
6.根据权利要求2所述的晶体管功率模块封装结构,其特征在于,所述第一树脂层的厚度为75μm至95μm。
7.根据权利要求2所述的晶体管功率模块封装结构,其特征在于,所述第二树脂层的厚度为75μm至95μm。
8.根据权利要求1-7任一项中所述的晶体管功率模块封装结构,其特征在于,各所述芯片设置于所述引线框架的一面,所述铜基树脂散热片贴附于所述引线框架的另一面。
9.根据权利要求1-7任一项中所述的晶体管功率模块封装结构,其特征在于,所述铜基树脂散热片与所述引线框架热压连接。
10.根据权利要求1所述的晶体管功率模块封装结构,其特征在于,所述引线框架的靠近边缘的位置设置有U型槽。
11.一种晶体管功率模块封装方法,特征在于,包括:
将晶体管的各芯片固定在引线框架上;
将铜基树脂散热片贴附于所述引线框架;
将环氧树脂注塑在所述引线框架、各所述芯片以及所述铜基树脂散热片的外侧;
使得所述环氧树脂固化形成环氧树脂塑封体,所述环氧树脂塑封体包覆于所述引线框架、各所述芯片以及所述铜基树脂散热片的外侧。
12.根据权利要求11所述的方法,其特征在于,所述将铜基树脂散热片贴附于所述引线框架的步骤包括:
采用热压合方式将所述铜基树脂散热片贴合于所述引线框架上。
13.根据权利要求11所述的晶体管功率模块封装结构,其特征在于,所述铜基树脂散热片包括依次层叠连接的铜基层、第一树脂层和第二树脂层,所述第一树脂层的固化率和所述第二树脂层的固化率相异设置;
所述将铜基树脂散热片贴附于所述引线框架的步骤包括:
将所述第二树脂层贴附于所述引线框架。
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CN113539976A (zh) * 2021-07-17 2021-10-22 深圳市冠禹半导体有限公司 一种高散热高频晶体管立体式封装结构
CN116598214A (zh) * 2023-05-13 2023-08-15 江苏爱矽半导体科技有限公司 一种功率半导体器件封装结构

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113539976A (zh) * 2021-07-17 2021-10-22 深圳市冠禹半导体有限公司 一种高散热高频晶体管立体式封装结构
CN113539976B (zh) * 2021-07-17 2022-06-14 深圳市冠禹半导体有限公司 一种高散热高频晶体管立体式封装结构
CN116598214A (zh) * 2023-05-13 2023-08-15 江苏爱矽半导体科技有限公司 一种功率半导体器件封装结构
CN116598214B (zh) * 2023-05-13 2024-03-19 江苏爱矽半导体科技有限公司 一种功率半导体器件封装结构

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