CN111812140A - Low-temperature sample rack with double rotating shafts based on GM refrigerator - Google Patents

Low-temperature sample rack with double rotating shafts based on GM refrigerator Download PDF

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Publication number
CN111812140A
CN111812140A CN202010530730.8A CN202010530730A CN111812140A CN 111812140 A CN111812140 A CN 111812140A CN 202010530730 A CN202010530730 A CN 202010530730A CN 111812140 A CN111812140 A CN 111812140A
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China
Prior art keywords
angle
gear set
inclination
sample
refrigerator
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CN202010530730.8A
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Chinese (zh)
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谢斌平
董金奎
王冰雷
雷霆霏
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Fermi Instruments Shanghai Co ltd
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Fermi Instruments Shanghai Co ltd
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Priority to CN202010530730.8A priority Critical patent/CN111812140A/en
Publication of CN111812140A publication Critical patent/CN111812140A/en
Pending legal-status Critical Current

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/227Measuring photoelectric effect, e.g. photoelectron emission microscopy [PEEM]
    • G01N23/2273Measuring photoelectron spectrum, e.g. electron spectroscopy for chemical analysis [ESCA] or X-ray photoelectron spectroscopy [XPS]
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/2204Specimen supports therefor; Sample conveying means therefore

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Devices For Use In Laboratory Experiments (AREA)

Abstract

The invention provides a low-temperature sample holder with double rotating shafts based on a GM refrigerator, which comprises a refrigerator (1), a flange (2) and a sample holder head, wherein the refrigerator (1) comprises a primary cold head (3) and a secondary cold head (4), the secondary cold head (4) is connected with the primary cold head (3), and the low-temperature sample holder is characterized in that: the device is characterized by further comprising an interior angle driving motor (51), an interior angle Rotry feed through (52), an interior angle flexible shaft (53), an interior angle transmission shaft (54), an interior angle sliding coupler (55), an interior angle sliding gear set (56), an interior angle universal joint coupler (57), an interior angle straight gear set (58), an interior angle worm gear set (59) and a sample table (7). The invention has the beneficial effects that: based on the GM refrigerator, the rotation with 2 degrees of freedom can be realized on the premise that the sample holder is extremely low in temperature, and 2 rotation motions are mutually independent, are not interfered, and the inner angle in the change range of the ultra-large temperature zone can smoothly move.

Description

Low-temperature sample rack with double rotating shafts based on GM refrigerator
Technical Field
The invention relates to the field of ultrahigh vacuum and ultralow temperature, in particular to a low-temperature sample rack with double rotating shafts based on a GM refrigerator.
Background
An angle-resolved photoelectron spectrometer system is called ARPES for short, and the photoelectric effect is utilized to research the electronic structure of a solid. The low-temperature sample holder is used as a measuring platform of a sample, is an important component module of an ARPES system, and provides an ultralow-temperature, multi-degree-of-freedom and nonmagnetic measuring environment for the sample. The low-temperature sample rack based on the GM refrigerator has natural advantages, does not need to consume liquid helium, only needs to consume electric energy, and has great significance for China with poor helium resources.
At present, the domestic low-temperature sample holder based on the GM refrigerator has almost no corresponding design and research. The design difficulty of the low-temperature sample holder based on the GM refrigerator mainly comprises the following four aspects; 1. the design of extremely low temperature of the sample stage (the temperature is less than 5K) is realized; 2. on the premise of meeting the requirements of ultrahigh vacuum, non-magnetic and ultralow temperature, the mechanical structure design of the inner angle motion of the sample table (7) is realized; 3. each degree of freedom can be driven by a motor, and the motion of each shaft is independent and not interfered; 4. the sample table can move smoothly in the change range of an ultra-large temperature zone (4K-350K), the internal angle and the inclination angle of the sample table can be smooth, and the situation that each shaft moves to block or disconnect due to the inherent characteristics of expansion with heat and contraction with cold of materials can be avoided.
Therefore, the market urgently needs a low-temperature sample rack with double rotating shafts based on a GM refrigerator, which can be compatible with an ultrahigh vacuum environment and can provide a low-temperature to liquid helium temperature region, and the pitching rotation is smooth in the change range of the ultra-large temperature region.
Disclosure of Invention
In order to solve the technical problem, the invention discloses a low-temperature sample holder with double rotating shafts based on a GM refrigerator, and the technical scheme of the invention is implemented as follows:
the utility model provides a take cryogenic sample frame of two rotation axes based on GM refrigerator, includes refrigerator (1), flange (2) and sample frame head, refrigerator (1) is installed on flange (2), refrigerator (1) includes one-level cold head (3) and second grade cold head (4), second grade cold head (4) are connected one-level cold head (3), its characterized in that: the device is characterized by also comprising an internal angle driving motor (51), an internal angle Rotry feed through (52), an internal angle flexible shaft (53), an internal angle transmission shaft (54), an internal angle sliding coupler (55), an internal angle sliding gear set (56), an internal angle universal joint coupler (57), an internal angle spur gear set (58), an internal angle worm gear set (59) and a sample table (7); the interior angle driving motor (51) is connected with the interior angle RotaryFeedthrough (52); the interior angle Rotry feed through (52) is connected with the interior angle flexible shaft (53); the inner corner flexible shaft (53) penetrates through the flange (2) to be connected with the inner corner transmission shaft (54); the inner angle transmission shaft (54) is connected with the inner angle sliding coupler (55); the internal angle sliding coupling (55) is connected with the internal angle sliding gear set (56); the interior angle sliding gear set (56) is connected with the interior angle universal joint coupler (57); the interior angle universal joint coupler (57) is connected with the interior angle spur gear set (58); the interior angle spur gear set (58) is connected with the interior angle worm and gear set (59); the internal face angle worm gear group (59) is connected with the sample table (7); the sample stage (7) is arranged in the sample holder head.
Preferably, the device also comprises an inclination and elevation angle driving motor (61), an inclination and elevation angle Rotary feed through (62), an inclination and elevation angle flexible shaft (63), an inclination and elevation angle transmission shaft (64), an inclination and elevation angle straight-tooth gear set (65), an inclination and elevation angle sliding coupling (66), an inclination and elevation angle sliding gear set (67) and an inclination and elevation angle worm gear set (68); the inclination angle driving motor (61) is connected with the inclination angle RotaryFeedthrough (62); the tilt angle Rotary feed through (62) is connected with the tilt angle flexible shaft (63); the inclination angle flexible shaft (63) is connected with the inclination angle transmission shaft (64); the inclination angle transmission shaft (64) is connected with the inclination angle sliding coupler (66); the inclination and elevation sliding coupler (66) is connected with the inclination and elevation spur gear set (65); the elevation angle straight gear set (65) is connected with the elevation angle sliding gear set (67); the tilt and elevation sliding gear set (67) is connected with the tilt and elevation worm gear set (68); the tilt and elevation worm gear set (68) is connected with the sample table (7).
Preferably, the heat-conducting extension rod (81) is further included; one end of the heat conduction extension rod (81) is arranged on the secondary cold head (4), and the other end of the heat conduction extension rod is connected with the head of the sample holder; the heat-conducting extension rod (81) is connected with the sample table (7) through a flexible braid; the material of the flexible braid is selected from one or more of copper, gold or silver.
Preferably, a support cylinder (82); the supporting cylinder (82) is connected with the primary cold head (3); the supporting cylinder (82) wraps the secondary cold head (4); a heat insulation support sheet (83) is also arranged in the support cylinder; the heat insulation support sheet (83) is fixed between the heat conduction extension rod (81) and the support cylinder (82); the heat conducting extension rod (81) penetrates through the heat insulation support sheet (83).
Preferably, a clip support (84); the hoop support (84) is sleeved on the support barrel (82); the in-plane angle drive shaft (54) and the pitch angle drive shaft (64) are secured to the clip support (84).
Preferably, the sample holder head comprises a transmission gear box, a shaft support seat and a side support plate; the pitch angle right angle gear set (65) and the in-plane angle slip gear set (56) are disposed in the transmission gear box; the shaft supporting seat is fixed on the side supporting plate; the sample holder head is also provided with a gold column and a heat shielding plate.
Preferably, the sample stage (7) is integrally formed; a triangular support and a heat shielding door are arranged on the sample table (7); the sample measuring table is connected with the in-plane angle worm gear set (59) and the tilt angle worm gear set (68) through the triangular supports; and a measuring hole is formed in the center of the thermal shielding door.
Preferably, an electrical signal feed-through (9) is provided on the flange (2).
Preferably, an accessory interface is provided on the sample holder head.
By implementing the technical scheme of the invention, the technical problem that double-shaft independent rotation cannot be realized on a GM-based refrigerator in the prior art can be solved; by implementing the technical scheme of the invention, the technical effects of double-shaft rotation and mutually independent motion on the premise of extremely low temperature based on the GM refrigerator can be realized.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only one embodiment of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.
FIG. 1 is a schematic diagram of a structure of an in-plane angular rotating part of a low-temperature sample holder with double rotating shafts based on a GM refrigerator;
FIG. 2 is a schematic diagram of a tilting angle rotating part of a low-temperature sample holder with double rotating shafts based on a GM refrigerator;
FIG. 3 is a schematic diagram of a sample holder head structure of a low-temperature sample holder with double rotating shafts based on a GM refrigerator;
FIG. 4 is a schematic diagram of the overall structure of a low-temperature sample holder with double rotating shafts based on a GM refrigerator;
FIG. 5 is a schematic diagram of a sample stage structure of a low-temperature sample holder with a double rotating shaft based on a GM refrigerator.
In the above drawings, the reference numerals denote:
the refrigerator comprises a refrigerator (1), a flange (2), a primary cold head (3) and a secondary cold head (4);
the device comprises an interior angle driving motor (51), an interior angle Rotry feed (52), an interior angle flexible shaft (53), an interior angle transmission shaft (54), an interior angle sliding coupler (55), an interior angle sliding gear set (56), an interior angle universal joint coupler (57), an interior angle straight-tooth gear set (58) and an interior angle worm gear set (59);
an inclination angle driving motor (61), an inclination angle Rotary feed through (62), an inclination angle flexible shaft (63), an inclination angle transmission shaft (64), an inclination angle right-angle gear set (65), an inclination angle sliding coupling (66), a 67-inclination angle sliding gear set (67) and an inclination angle worm gear set (68);
a sample stage (7);
the heat-conducting extension rod (81), the support cylinder (82), the heat-insulating support sheet (83) and the clamp support (84);
an electrical signal feed-through (9).
R2-direction of inclination angle;
r3-in-plane angular direction.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In a specific embodiment, as shown in fig. 1-5, a GM refrigerator-based cryogenic sample holder with dual rotation axes comprises a refrigerator (1), a flange (2) and a sample holder head, the refrigerator (1) comprises a primary cold head (3) and a secondary cold head (4), the secondary cold head (4) is connected with the primary cold head (3), and the method is characterized in that: the device is characterized by also comprising an internal angle driving motor (51), an internal angle Rotry feed through (52), an internal angle flexible shaft (53), an internal angle transmission shaft (54), an internal angle sliding coupler (55), an internal angle sliding gear set (56), an internal angle universal joint coupler (57), an internal angle spur gear set (58), an internal angle worm gear set (59) and a sample table (7); the interior angle driving motor (51) is connected with the interior angle RotaryFeedthrough (52); the interior angle Rotry feed through (52) is connected with the interior angle flexible shaft (53); the inner corner flexible shaft (53) penetrates through the flange (2) to be connected with the inner corner transmission shaft (54); the inner angle transmission shaft (54) is connected with the inner angle sliding coupler (55); the internal angle sliding coupling (55) is connected with the internal angle sliding gear set (56); the interior angle sliding gear set (56) is connected with the interior angle universal joint coupler (57); the interior angle universal joint coupler (57) is connected with the interior angle spur gear set (58); the interior angle spur gear set (58) is connected with the interior angle worm and gear set (59); the internal face angle worm gear group (59) is connected with the sample table (7); the sample stage (7) is arranged in the sample holder head.
In the specific embodiment, the refrigerating machine (1) generates cold energy, and the cold energy is transmitted to the second cold head through the first cold head and then transmitted to the sample holder head, so that the sample on the sample holder head is cooled; an interior angle driving motor (51) drives the interior angle flexible shaft (53) to rotate, and the interior angle flexible shaft (53) is rotated through an interior angle Rotary feed through (52), so that the problem of transmission angle deviation between non-parallel shafts on the same plane is solved, and the problem of non-concentricity caused by process errors is solved; the inside angle transmission shaft (54) drives the inside angle sliding coupling (55), the design of the sliding coupling can compensate the relative displacement between the inside angle transmission shaft (54) and the supporting cylinder (82) caused by the difference of the coefficients of expansion with heat and contraction with cold, so that the transmission can be continued at low temperature, the inside angle sliding coupling (55) drives the inside angle sliding gear set (56), the inside angle sliding gear set (56) drives the inside angle universal joint coupling (57), the inside angle universal joint coupling (57) can ensure that the inside angle universal joint coupling (57) can still provide the rotation power for the straight gear set when the movement of other surfaces is carried out, so that the movement of other directions and the inside angle movement are not interfered with each other, the inside angle universal joint coupling (57) drives the inside angle straight gear set (58), the inside angle straight gear set (58) drives the inside angle worm gear set (59) to move, the worm gear group (59) of the rearmost inner angle drives the sample stage (7) to realize the transmission of external motion from the outside to vacuum, generate motion in the direction of the inner angle and complete self-locking, and X, Y, Z on a rectangular coordinate system and the change of the inclination direction of the sample holder can be realized by using external machinery or placement; the interior angle transmission shaft (54) generally uses molybdenum or titanium as a material, has good toughness and has small deformation amount in the process of expansion with heat and contraction with cold; through the interaction among the modules, the rotation of multiple degrees of freedom can be realized on the premise of extremely low temperature based on a GM refrigerator, the motion of each degree of freedom is independent, the rotation is not interfered, and the motion of the inner angle in the change range of the ultra-large temperature zone is smooth.
In a preferred embodiment, as shown in fig. 4, a heat conducting extension rod (81); one end of the heat conduction extension rod (81) is arranged on the secondary cold head (4), and the other end of the heat conduction extension rod is connected with the head of the sample holder; the heat-conducting extension rod (81) is connected with the sample table (7) through a flexible braid; the material of the flexible braid is selected from one or more of copper, gold or silver; heat conduction extension rod (81) are used for adapting to different experiment demands, according to the experiment demand of difference, only need change corresponding heat conduction extension rod (81) can, and need not modify the cold head again. The braid is formed by twisting a plurality of metal wires and is in a braided shape, and because the heat-conducting extension rod (81) cannot or cannot directly contact the sample table (7) in space, the heat-conducting extension rod (81) and the sample table (7) are connected by the braid, one end of the braid is connected with one end of the heat-conducting extension rod (81), and the other end of the braid is connected to the sample table (7), so that heat is led out; the material of the braid should have good thermal conductivity on the one hand and good softness on the other hand, and is therefore copper, gold or silver, among other materials having the above-mentioned properties.
In a preferred embodiment, as shown in fig. 4, further comprises a support cylinder (82); the supporting cylinder (82) is connected with the primary cold head (3); the supporting cylinder (82) wraps the secondary cold head (4); also includes a clip support (84); the hoop support (84) is sleeved on the support barrel (82); the in-plane angle transmission shaft (54) and the tilt angle transmission shaft (64) are fixed on the hoop support (84); a heat insulation support sheet (83) is also arranged in the support cylinder; the heat insulation support sheet (83) is fixed between the heat conduction extension rod (81) and the support cylinder (82); the heat conducting extension rod (81) penetrates through the heat insulation support sheet (83).
In the preferred embodiment, the supporting cylinder (82) is arranged on the primary cold head (3) through a mounting hole arranged on the primary cold head (3), on one hand, the supporting cylinder provides support for the sample stage (7), and on the other hand, the supporting cylinder is used as a cold shield and conducts the cold energy of the primary cold head (3) to all the cold shields; the hoop support (84) has two functions, on one hand, the hoop support provides enough strength support for the inner angle transmission shaft (54) to facilitate concentric adjustment, on the other hand, the contact between the inner angle transmission shaft (54) and the support cylinder (82) is avoided, and the heat conduction between the support cylinder (82) and a component playing a transmission role is reduced; the heat insulation support sheet (83) can block heat from further descending, so that a better heat insulation effect is achieved.
In a preferred embodiment, the sample holder head comprises a drive gear box, a shaft support base and a side support plate; the pitch angle right angle gear set (65) and the in-plane angle slip gear set (56) are disposed in the transmission gear box; the shaft supporting seat is fixed on the side supporting plate; the sample holder head is also provided with a gold column and a heat shielding plate.
In this kind of preferred embodiment, transmission gear box, axle supporting seat and collateral branch fagging can play fixed, support and the effect of accomodating, still is provided with gold post and heat shield plate simultaneously at sample frame head, and heat shield plate is used for shielding the heat, and the gold post is then used for carrying out the demarcation of fermi energy level, uses as the reference sample to survey actual sample, and it is comparatively convenient to use.
In a preferred embodiment, as shown in fig. 5, the sample stage (7) is integrally formed; a triangular support and a heat shielding door are arranged on the sample table (7); the sample measuring table is connected with the in-plane angle worm gear set (59) and the tilt angle worm gear set (68) through the triangular supports; and a measuring hole is formed in the center of the thermal shielding door.
In the preferred embodiment, the heat shield is used to isolate heat radiation, and typically a gold-plated oxygen-free copper sheet is used, as well as other materials that provide good thermal isolation; a measuring hole arranged on the heat shielding door is over against the sample position of the sample support; when the device is used, a sample is placed on the sample support, the heat shielding door is opened, the sample support is placed on the triangular support, then the heat shielding door is closed, the sample at the moment is just opposite to the measuring hole, and in the formal experiment process, the range of the sample exposed to heat radiation can be reduced as much as possible.
In a preferred embodiment the sample holder head is provided with an accessory interface.
In the preferred embodiment, an accessory interface is arranged on the sample table (7), the accessory interface can be used for expanding equipment and can be used for installing modules such as a sample holding table, a high-temperature heating table, a YAG crystal measuring table and a sample cleavage table.
In a preferred embodiment, as shown in fig. 4, the flange (2) is provided with an electric signal feed-through (9), and the electric signal is transmitted into the vacuum environment from the outside through the electric signal feed-through (9), so that signal communication is realized.
In a preferred embodiment, as shown in fig. 1-5, the device further comprises a tilt and elevation angle driving motor (61), a tilt and elevation angle Rotary feed through (62), a tilt and elevation angle flexible shaft (63), a tilt and elevation angle transmission shaft (64), a tilt and elevation angle spur gear set (65), a tilt and elevation angle sliding coupler (66), a tilt and elevation angle sliding gear set (67) and a tilt and elevation angle worm gear set (68); the tilt angle driving motor (61) is connected with the tilt angle Rotary feed through (62); the elevation angle RotaryFeedthrough (62) is connected with the elevation angle flexible shaft (63); the inclination angle flexible shaft (63) is connected with the inclination angle transmission shaft (64); the inclination angle transmission shaft (64) is connected with the inclination angle sliding coupler (66); the inclination and elevation sliding coupler (66) is connected with the inclination and elevation spur gear set (65); the elevation angle straight gear set (65) is connected with the elevation angle sliding gear set (67); the tilt and elevation sliding gear set (67) is connected with the tilt and elevation worm gear set (68); the tilt and elevation worm gear set (68) is connected with the sample table (7). In the process of the rotation of the inner angle, the sample support is arranged on the tripod support, the tripod support is fixedly matched with the inner angle worm gear group (59), the inner angle worm gear group (59) is rotated through transmission at all levels, and the inner angle worm gear group (59) drives the sample support to do inner angle motion. In the process of inclination and elevation angle movement, the sample table (7) is fixedly matched with the inclination and elevation angle worm gear set (68), the worm of the inclination and elevation angle worm gear set (68) drives the fan-shaped worm gear of the inclination and elevation angle worm gear set (68) to rotate through transmission of all levels, the fan-shaped worm gear drives the integrally formed sample table to move in the inclination and elevation angle direction, and movement in two different directions of the inclination and elevation angle and the inner angle under the condition of mutual noninterference can be realized by adding the modules.
It should be understood that the above-described embodiments are merely exemplary of the present invention, and are not intended to limit the present invention, and that any modification, equivalent replacement, or improvement made without departing from the spirit and principle of the present invention shall fall within the protection scope of the present invention.

Claims (9)

1. The utility model provides a take cryogenic sample frame of two rotation axes based on GM refrigerator, includes refrigerator (1), flange (2) and sample frame head, refrigerator (1) is installed on flange (2), refrigerator (1) includes one-level cold head (3) and second grade cold head (4), second grade cold head (4) are connected one-level cold head (3), its characterized in that: the device is characterized by also comprising an internal angle driving motor (51), an internal angle Rotry feed through (52), an internal angle flexible shaft (53), an internal angle transmission shaft (54), an internal angle sliding coupler (55), an internal angle sliding gear set (56), an internal angle universal joint coupler (57), an internal angle spur gear set (58), an internal angle worm gear set (59) and a sample table (7);
the interior angle driving motor (51) is connected with the interior angle Rotary feed through (52); the interior angle Rotry feed through (52) is connected with the interior angle flexible shaft (53); the inner corner flexible shaft (53) penetrates through the flange (2) to be connected with the inner corner transmission shaft (54); the inner angle transmission shaft (54) is connected with the inner angle sliding coupler (55); the internal angle sliding coupling (55) is connected with the internal angle sliding gear set (56); the interior angle sliding gear set (56) is connected with the interior angle universal joint coupler (57); the interior angle universal joint coupler (57) is connected with the interior angle spur gear set (58); the interior angle spur gear set (58) is connected with the interior angle worm and gear set (59); the internal face angle worm gear group (59) is connected with the sample table (7);
the sample stage (7) is arranged in the sample holder head.
2. A GM refrigerator based cryosample holder with dual rotation axes of claim 1, wherein: the device also comprises an inclination and elevation angle driving motor (61), an inclination and elevation angle Rotary feed screw (62), an inclination and elevation angle flexible shaft (63), an inclination and elevation angle transmission shaft (64), an inclination and elevation angle straight tooth gear set (65), an inclination and elevation angle sliding coupling (66), an inclination and elevation angle sliding gear set (67) and an inclination and elevation angle worm gear and worm set (68);
the tilt angle driving motor (61) is connected with the tilt angle Rotary feed through (62); the tilt angle Rotary feed through (62) is connected with the tilt angle flexible shaft (63); the inclination angle flexible shaft (63) is connected with the inclination angle transmission shaft (64); the inclination angle transmission shaft (64) is connected with the inclination angle sliding coupler (66); the inclination and elevation sliding coupler (66) is connected with the inclination and elevation spur gear set (65); the elevation angle straight gear set (65) is connected with the elevation angle sliding gear set (67); the tilt and elevation sliding gear set (67) is connected with the tilt and elevation worm gear set (68); the tilt and elevation worm gear set (68) is connected with the sample table (7).
3. A GM refrigerator based cryogenic sample holder with dual rotation axes as claimed in claim 1 further comprising a thermally conductive extension rod (81); one end of the heat conduction extension rod (81) is arranged on the secondary cold head (4), and the other end of the heat conduction extension rod is connected with the head of the sample holder; the heat-conducting extension rod (81) is connected with the sample table (7) through a flexible braid; the material of the flexible braid is selected from one or more of copper, gold or silver.
4. A GM refrigerator based cryosample holder with dual rotation axes of claim 3, wherein: further comprising a support cylinder (82); the supporting cylinder (82) is connected with the primary cold head (3); the supporting cylinder (82) wraps the secondary cold head (4); a heat insulation support sheet (83) is also arranged in the support cylinder; the heat insulation support sheet (83) is fixed between the heat conduction extension rod (81) and the support cylinder (82); the heat conducting extension rod (81) penetrates through the heat insulation support sheet (83).
5. A GM refrigerator based cryogenic sample holder with dual rotation axes according to claim 4, wherein: also includes a clip support (84); the hoop support (84) is sleeved on the support barrel (82); the in-plane angle drive shaft (54) and the pitch angle drive shaft (64) are secured to the clip support (84).
6. A GM refrigerator based cryosample holder with dual rotation axes according to any of claims 1 to 5, wherein: the sample rack head comprises a transmission gear box, a shaft supporting seat and a side supporting plate;
the elevation angle straight gear set (65) and the in-plane angle sliding gear set (56) are arranged in the transmission gear box;
the shaft supporting seat is fixed on the side supporting plate;
the sample holder head is also provided with a gold column and a heat shielding plate.
7. A GM refrigerator based cryosample holder with dual rotation axes of claim 6, wherein: the sample table (7) is integrally formed; a triangular support and a heat shielding door are arranged on the sample table (7); the sample measuring table is connected with the in-plane angle worm gear set (59) and the tilt angle worm gear set (68) through the triangular supports;
and a measuring hole is formed in the center of the thermal shielding door.
8. A GM refrigerator based cryosample holder with dual rotation axes of claim 1, wherein: an electric signal feed-through (9) is arranged on the flange (2).
9. A GM refrigerator based cryosample holder with dual rotation axes of claim 1, wherein: an accessory interface is arranged on the head of the sample frame.
CN202010530730.8A 2020-06-11 2020-06-11 Low-temperature sample rack with double rotating shafts based on GM refrigerator Pending CN111812140A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202010530730.8A CN111812140A (en) 2020-06-11 2020-06-11 Low-temperature sample rack with double rotating shafts based on GM refrigerator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202010530730.8A CN111812140A (en) 2020-06-11 2020-06-11 Low-temperature sample rack with double rotating shafts based on GM refrigerator

Publications (1)

Publication Number Publication Date
CN111812140A true CN111812140A (en) 2020-10-23

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN202010530730.8A Pending CN111812140A (en) 2020-06-11 2020-06-11 Low-temperature sample rack with double rotating shafts based on GM refrigerator

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Country Link
CN (1) CN111812140A (en)

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