CN217542941U - Sample console capable of realizing 6-axis movement in low-temperature and vacuum environments - Google Patents

Abstract

The utility model discloses a sample console which can realize 6-axis movement in low temperature and vacuum environment, comprising a four-axis mobile platform; the vacuum cavity is arranged on the four-axis moving platform; the inclination angle rotary table, the inner rotary table and the sample table are arranged in the vacuum cavity; the sample table is rotatably arranged on the in-plane rotary table, and the in-plane rotary table is rotatably arranged on the inclination angle rotary table; the in-plane rotary table and the inclination angle rotary table are both driven by piezoelectricity; the low-temperature inserting rod is arranged in the four-axis moving platform and inserted into the vacuum cavity, and a low-temperature source of the low-temperature inserting rod is connected with the inclination angle rotary table and the in-plane rotary table through a thermal conductive material. The operating board adopts the piezoelectric driving vacuum cavity inner sample platform, the inclination angle rotary table and the inner rotary table, abandons a mechanical transmission mechanism, and can effectively improve the accuracy of real rotation control of the sample.

Description

Sample control console capable of realizing 6-axis movement in low-temperature and vacuum environments

Technical Field

The utility model belongs to the technical field of the sample control cabinet, especially, can realize the sample control cabinet of 6 motions under low temperature and the vacuum environment.

Background

In characterization techniques such as photoelectron spectroscopy, X-ray inelastic scattering, neutron scattering, etc., a cryogenic sample manipulation stage is required for moving the position and orientation of a sample to a specific position in 6 degrees of freedom within a vacuum environment while the sample can be lowered to a temperature of several kelvin.

Such sample stations typically include an XYZP four-axis stage and a central cryo-insert. The XYZP four-axis stage is composed of a non-low temperature XYZ three-dimensional moving stage and a one-dimensional Polar (Polar) rotating stage. Polar rotation is formed by adopting a vacuum differential turntable, and rotation within 360 degrees can be realized under the condition of not influencing vacuum. The central cryogenic bayonet, with 2 axis rotation, tilt (tilt) and in-plane rotation (Azimuth). In the current design, the 2-shaft rotation adopts a vacuum outer motor, the rotation is transmitted into the vacuum through a vacuum rotating introducer, and finally the rotation is transmitted to the sample angle rotation through a plurality of gear sets. In addition, the central low-temperature inserted rod adopts a liquid helium refrigeration or helium gas cold pump mode and a heat conduction mechanism to realize low-temperature refrigeration of the sample.

Six-axis movement in addition to the aforementioned four-dimensional movement of XYZ + Polar, there is also in-plane rotation (Azimuth) and Tilt rotation (Tilt) of the sample. But this rotation is achieved inside a vacuum environment.

In the prior art, the latter two rotations are realized by a pure mechanical gear transmission mode, and a schematic diagram is shown in fig. 4 below.

And 13 is a sample table, namely a position where a sample of the whole device is arranged, and the sample can obtain a low-temperature environment. The sample stage 12 is an in-plane rotary stage and is mechanically connected with the sample stage 13. When the in-plane rotary table 12 rotates, the in-plane rotary table 13 can be driven to rotate in the plane. The in-plane turn table 12 is mounted on the inclination turn table 11. When the inclination angle rotary table 11 rotates, the in-plane rotary table 12 and the sample table 13 are driven to rotate together.

Inclination (Tilt) rotation, transfer process: the vacuum external motor drives the first vacuum rotary importer 5, the first universal joint 6, the first rotating shaft 7, the first coupler 8 and the first gear set 9 to rotate in sequence, the first gear set 9 drives the third gear set 10 directly connected with the inclination angle rotary table to rotate, and finally the third gear set 10 drives the inclination angle rotary table 11 to rotate. When the inclination angle rotary table 11 rotates, the in-plane rotary table 12 and the sample table 13 rotate together with the inclination angle rotary table 11, so that the inclination angle Tilt on the sample is realized.

In-plane (Azimuth) rotation, transfer process: the vacuum external motor drives the second vacuum rotary importer 5a, the second universal joint 6a, the second rotating shaft 7a, the second coupler 8a and the second gear set 9a to rotate in sequence, the second gear set 9a drives the third universal joint 16 to rotate, the third universal joint 16 then drives the fourth gear set 10a directly connected with the in-plane rotary table to rotate, and finally the fourth gear set 10a drives the in-plane rotary table 12 to rotate. When the in-plane rotary table 12 rotates, the sample table 13 will rotate together with the in-plane rotary table 12, realizing the in-plane angular Azimuth rotation on the sample.

Typically, there is one more transmission assembly (third universal joint 16) in the in-plane rotation transmission than in the pitch rotation transmission. The transmission component is a flexible connecting mechanism which is necessary for realizing that the in-plane rotary table can rotate and move along with the inclination angle when the inclination angle rotates.

Meanwhile, the sample stage 13 is connected to the lowest temperature source 1a through a copper braid 14 to obtain the lowest temperature of the sample stage 13. The shield 15 is connected to the sub-cryogenic source 1b to enclose the cryogenic sample stage 13 and other components within the sub-cryogenic environment to achieve a more effective cryogenic temperature of the sample stage 13. The in-plane turret 12 and the tilt turret 11 are connected to a sub-cryogenic source 1b, either directly or through a copper braid or other cryogenic transfer mechanism.

However, in the above-mentioned design, on the mechanism of inclination rotation (tilt) and in-plane rotation (Azimuth), the mechanical transmission realized by using multiple sets of gears causes the precision problem, which is expressed in the following four aspects:

1) Poor rotation precision: through complex transmission mechanisms such as a plurality of groups of gear transmissions (9, 9a, 10 and 10 a), flexible soft shafts or universal joints (6 and 6 a), universal joints or corrugated pipes (16) and the like, the real rotation precision of the sample is difficult to control. Under the current technology, the optimal precision can reach 0.1 degree.

2) Two-axis coupling: under the rotating design of universal joints or corrugated pipes and the like, the tilt and azimuth two-axis rotation are not completely independent but are coupled with each other. That is, tilt rotation will drive azimuth to rotate and can not be fixed at the original position.

3) Uneven movement: because the universal joint itself is related to its angle in the transmission ratio, azimuth rotational speeds of the specimen are different at different tilt angles. Also, accuracy is severely affected.

SUMMERY OF THE UTILITY MODEL

In order to solve the not enough that exists among the prior art, this application has provided a sample control cabinet that can realize 6 axle motions under low temperature and the vacuum environment, has adopted sample platform, inclination revolving stage and interior revolving stage in the piezoelectricity drive vacuum chamber, has abandoned mechanical transmission mechanism, can effectively improve the true rotation control's of sample precision.

The utility model discloses the technical scheme who adopts as follows:

a sample console capable of 6-axis motion in a cryogenic and vacuum environment, comprising:

a four-axis moving stage;

the vacuum cavity is arranged on the four-axis moving platform;

the inclination angle rotary table, the inner rotary table and the sample table are arranged in the vacuum cavity; the sample table is rotatably arranged on the in-plane rotary table, and the in-plane rotary table is rotatably arranged on the inclination angle rotary table; the in-plane rotary table and the inclination angle rotary table are both driven by piezoelectricity;

the low-temperature inserting rod is arranged in the four-axis moving platform and inserted into the vacuum cavity, and a low-temperature source of the low-temperature inserting rod is connected with the inclination angle rotary table and the in-plane rotary table through a thermal conductive material.

Further, a sample table rotating shaft is arranged at the bottom of the sample table, and the in-plane rotating table is sleeved outside the sample table rotating shaft through a heat insulating part;

furthermore, the inclination angle rotary table and the in-plane rotary table are respectively provided with a piezoelectric motor power supply and a piezoelectric driving unit; the piezoelectric motor power supply is connected with the piezoelectric driving unit through a lead.

Further, the two sides of the in-plane rotary table are symmetrically provided with in-plane rotary table rotating shafts;

the piezoelectric driving unit of the in-plane rotary table comprises a first sapphire sheet and a second sapphire sheet which are fixed on two sides of a rotary shaft of the in-plane rotary table; a first piezoelectric ceramic piece group and a second piezoelectric ceramic piece group are respectively arranged outside the first sapphire piece and the second sapphire piece; the second piezoelectric ceramic piece group is fixedly connected with the first piezoelectric ceramic pasting plate, and the first spring piece tightly presses the first ceramic beads on the first piezoelectric ceramic pasting plate;

further, the inclination angle rotary table comprises a first part, a second part and an inclination angle rotary table rotating shaft, wherein the first part is cylindrical and is sleeved outside the in-plane rotary table; the upper edge of the first part is provided with a second part which is a connecting part, the upper part of the second part is provided with an inclination angle rotary table rotating shaft, and the inclination angle rotary table rotating shaft is vertically arranged with the first part.

Further, the piezoelectric driving unit of the tilt table includes:

fixed connection is equipped with the third sapphire piece with third piezoelectric ceramics group relatively at the third piezoelectric ceramics group of first part outer wall, third sapphire piece and fourth sapphire piece fixed mounting are equipped with fourth piezoelectric ceramics group relatively with the fourth sapphire piece on heat conduction support, and fourth piezoelectric ceramics group fixed connection second piezoelectric ceramics pastes the board, and the second spring leaf compresses tightly the second pottery pearl on the board is pasted to the second piezoelectric ceramics.

Furthermore, the second spring piece is fixedly connected to the heat conducting bracket.

Further, a brush is provided on the tilt table.

Further, the heat conducting support, the second piezoelectric ceramic pasting plate, the first piezoelectric ceramic pasting plate, the in-plane rotary table, the inclination angle rotary table and the sample table are usually made of high-purity oxygen-free copper materials, and the surfaces of the heat conducting support, the second piezoelectric ceramic pasting plate, the first piezoelectric ceramic pasting plate, the in-plane rotary table, the inclination angle rotary table and the sample table are plated with gold.

Furthermore, a second ceramic bearing and a heat conducting support are sequentially sleeved on the rotating shaft of the inclination angle rotary table from the radial direction to the outside.

The utility model has the advantages that:

1) The utility model discloses, inside vacuum and low temperature environment, adopt 2 piezoelectric type step motor, realize in the face azimuth rotate with the inclination tilt rotate. The design has no vacuum empty rotation importer, no flexible rotating shaft, no coupler, no multi-group gear transmission and no universal joint, thereby effectively avoiding the error caused by the dynamic type of the rotating mechanism; consequently because need not through drive mechanism such as gear, flexible axle or universal joint in the design of this application, improve the rotation accuracy: the precision is better than 0.05 degree and even reaches 0.01 degree. Meanwhile, the control precision of the voltage potential is high, and the precision of real rotation control of the sample can be effectively improved.

2) No two-axis coupling problem: the two shafts move independently, so that the coupling problem is avoided, and the precision is further improved.

3) Uniform movement: independent motion, uniform motion at any location.

4) Simple structure, high mechanical stability and long-term stability.

Drawings

FIG. 1 is a schematic diagram of the present application showing 6-axis motion in a low temperature and vacuum environment;

FIG. 2 is a partial schematic view of the structure for implementing 6-axis motion in a low temperature and vacuum environment according to the present application;

FIG. 3 is a partial enlarged view of a two-axis piezoelectric driven rotary structure in the present application;

fig. 4 is a schematic diagram of a conventional purely mechanical gear transmission structure.

In the figure, 1, a low temperature inserted link, 1a, a lowest temperature source, 1b, a secondary low temperature source, 1c, a refrigeration source and a connecting rod, 1d, a knife-edge flange, 1e, an auxiliary knife-edge flange, 2, a four-axis moving platform, 3, a vacuum cavity, 4 vacuum pump sets, 5, a first vacuum rotary importer, 5a, a second vacuum rotary importer, 6, a first universal joint, 6a, a second universal joint, 7, a first rotating shaft, 7a, a second rotating shaft, 8, a first coupler, 8a, a second coupler, 9, a first gear set, 9a, a second gear set, 10, a third gear set, 10a, a fourth gear set, 11, an inclined rotary table, 111, a first part, 112, a second part, 113, an inclined rotary table rotating shaft, 12, an in-plane rotary table, 121, an in-plane rotary table rotating shaft, 13, a sample table, 131, a sample table rotating shaft, 14, a copper braid, 15, a shield case, 16, a third gimbal, 17, a first piezoelectric motor power supply, 17a, a second piezoelectric motor power supply, 18, a first lead, 18a, a second lead, 21, a first heat insulator, 22, a first ceramic bearing, a second heat insulator 23, 24, a first sapphire sheet, 25, a second sapphire sheet, 26, a first piezoelectric ceramic sheet set, 27, a second piezoelectric ceramic sheet set, 28, a first piezoelectric ceramic paste plate, 29, a first ceramic bead, 30, a first leaf spring, 31, a second ceramic bearing, 32, a heat conducting support, 33, a third sapphire sheet, 34, a fourth sapphire sheet, 35, a third piezoelectric ceramic set, 36, a fourth piezoelectric ceramic set, 37, a second piezoelectric ceramic paste plate, 38, a second ceramic bead, 39, a second leaf spring, 40, a brush, 41, and a reversible shield case.

Detailed Description

In order to make the objects, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the invention.

Aiming at the problems in the prior art, the application designs a sample control platform which can realize 6-axis motion in low-temperature and vacuum environment as shown in figures 1-3, and the sample control platform comprises a low-temperature inserted rod 1, a four-axis moving platform 2 and a vacuum cavity 3, wherein an inclination angle rotary table 11, an in-plane rotary table 12 and a sample table 13 are arranged in the vacuum cavity 3.

In the application, the sample in the vacuum cavity 3 is driven to rotate by piezoelectricity, namely, the sample is driven by piezoelectricity respectively aiming at the inclination angle rotary table 11 and the in-plane rotary table 12. The tilt angle rotary table 11 and the in-plane rotary table 12 are provided with a first piezoelectric motor power supply 17 and a second piezoelectric motor power supply 17a, respectively; the first piezoelectric motor power supply 17 is connected with the inclination angle rotary table 11 through a first lead 18, and electric driving of the inclination angle rotary table 11 is achieved.

The second piezoelectric motor power supply 17a is connected to the in-plane turn table 12 through a second wire 18a, and electrically drives the inner turn table 12.

With reference to the assembly relationship among the tilt turntable 11, the in-plane turntable 12, and the sample table 13 shown in fig. 3, the following is detailed:

the bottom of the sample table 13 is provided with a sample table rotating shaft 131, the in-plane rotating table 12 is sleeved outside the sample table rotating shaft 131, the in-plane rotating table 12 is not in direct contact with the sample table rotating shaft 131, and a gap is reserved between the in-plane rotating table 12 and the sample table rotating shaft 131, so that thermal insulation is achieved. A first insulating member 21 and a second insulating member 23 are respectively installed at both ends of the in-plane turn table 12; a first ceramic bearing 22 is fitted over the upper portion of the in-plane turn table 12 outside the first heat insulator 21. In this embodiment, the first insulating member 21 and the second insulating member 23 may be made of PEEK; and the first heat insulating piece 21 and the second heat insulating piece 23 can be fixedly connected with the sample table rotating shaft 131 by adopting a screw, low-temperature gluing and other modes.

Viewed in the axial direction, the in-plane turn table 12 is disposed between the first heat insulating member 21 and the second heat insulating member 23, and a stepped hole is formed in an upper portion of the in-plane turn table 12 for fitting with a bottom portion of the upper first heat insulating member 21; the second insulating member 23 is externally designed to be stepped to support the bottom of the in-plane turntable 12, and meanwhile, the in-plane turntable 12 and the first insulating member 21 and the second insulating member 23 can be fixedly assembled into a whole by means of screws or low-temperature adhesive and the like.

An in-plane turntable rotating shaft 121 is symmetrically arranged on two sides of the in-plane turntable 12, a first sapphire sheet 24 and a first piezoelectric ceramic sheet group 26 are sequentially arranged on the upper portion of the in-plane turntable rotating shaft 121, a second sapphire sheet 25 and a second piezoelectric ceramic sheet group 27 are sequentially arranged on the lower portion of the in-plane turntable rotating shaft 121, and a first piezoelectric ceramic adhesive plate 28, a first ceramic bead 29 and a first spring piece 30 are sequentially arranged at the bottom of the second piezoelectric ceramic sheet group 27. More specifically, the first sapphire sheet 24 and the second sapphire sheet 25 are bonded to both sides of the in-plane turntable rotation shaft 121 by low-temperature bonding. The upper part of the first piezoelectric ceramic sheet group 26 passes through the low-temperature glue is fixedly arranged on the inclination angle rotary table 11; the second piezoelectric ceramic sheet group 27 is adhered to the first piezoelectric ceramic adhesive plate 28 by low temperature adhesion. The first spring piece 30 is fixed to the tilt table 11 by screws, and presses the first ceramic bead 29 against the first piezoelectric ceramic adhesive plate 28. By adjusting the tightness of the connection between the first spring plate 30 and the tilt table 11, the contact pressure between the first piezoelectric ceramic plate group 26 and the first sapphire plate 24 and the contact pressure between the second piezoelectric ceramic plate group 27 and the second sapphire plate 25 can be adjusted; and proper force is selected, so that the stability of the turntable is met, and the driving of the piezoelectric ceramics is also met.

The first piezoelectric ceramic sheet group 26 and the second piezoelectric ceramic sheet group 27 are connected to the second lead 18a, and the first piezoelectric ceramic sheet group 26 and the second piezoelectric ceramic sheet group 27 are rapidly extended and retracted under the driving of voltage. In the process of expansion and contraction, the first sapphire plate 24 and the second sapphire plate 25 are pushed to move. Since the first sapphire plate 24, the second sapphire plate 25, the in-plane turn table 12, the first heat insulator 21, the second heat insulator 23, the sample table 13, and the first ceramic bearing 22 are fixed to each other, the sample table 12 follows the in-plane turn when the first sapphire plate 24 and the second sapphire plate 25 turn.

The tilt turntable 11 comprises a first section 111, a second section 112 and a tilt turntable shaft 113. The first part 111 is cylindrical, and the first part 111 is fitted around the inside of the in-plane turn table 12. The upper edge of the first part 111 is provided with a second part 112, the second part 112 is a connecting part, an inclination angle rotary shaft 113 is arranged at the upper part of the second part 112, and the inclination angle rotary shaft 113 is vertically arranged between the first part 111 (or the second part 112).

The second ceramic bearing 31 and the heat conducting support 32 are sequentially sleeved on the rotating shaft 113 of the inclination angle rotary table from the radial direction to the outside, and the second ceramic bearing 31 is fixed on the heat conducting support 32.

The outer wall of the first part 111 is provided with a third piezoelectric ceramic group 35, a third sapphire sheet 33, a heat conducting support 32, a fourth sapphire sheet 34, a fourth piezoelectric ceramic group 36, a second piezoelectric ceramic adhesive plate 37, second ceramic beads 38 and a second spring piece 39 in sequence. The connection relationship among the components is as follows:

the third piezoelectric ceramic group 35 is adhered to the outer wall of the first part 111 by low temperature adhesion; a third sapphire sheet 33 and a fourth sapphire sheet 34 are adhered to two sides of the heat conducting support 32 through low-temperature adhesion; the fourth piezoelectric ceramic group 36 is adhered to the second piezoelectric ceramic adhesive plate 37 by low-temperature adhesion;

the second spring plate 39 is fixedly connected to the heat conducting holder 32 by screws, and the second spring plate 39 presses the second ceramic bead 38 against the second piezoceramic bonding plate 37. By adjusting the tightness of the connection between the second spring plate 39 and the heat conducting support 32, the contact pressure between the third piezoelectric ceramic group 35 and the third sapphire plate 33, and the contact pressure between the fourth piezoelectric ceramic group 36 and the fourth sapphire plate 34 can be adjusted. And proper force is selected, so that the stability of the turntable is met, and the driving of the piezoelectric ceramics is also met.

The electric brush 40 is fixed on the inclination angle rotary table 11, the electric brush 40 is matched with a high-precision angle measuring device for the stroke of the induction sheet fixed on the heat conducting bracket 32, and the electric brush 40 is used for measuring the Tilt angle, so that accurate angle information can be obtained in real time.

The heat-conducting bracket 32 is directly mounted on the sub-low temperature source 1b of the low temperature plunger 1 or is connected to this low temperature source 1b through a high heat-conducting material. The second piezoceramic bonding plate 37, the first piezoceramic bonding plate 28, the in-plane rotary table 12, the tilt angle rotary table 11 and the reversible shielding cover 41 are all directly or indirectly connected with the sub-cryogenic source 1b through the copper braid 14 or other high thermal conductivity structure.

The heat conducting support 32, the second piezoelectric ceramic adhesive plate 37, the first piezoelectric ceramic adhesive plate 28, the in-plane rotary table 12, the tilt angle rotary table 11, and the sample table 13 are typically made of high-purity oxygen-free copper materials, and are plated with gold on the surfaces.

The third piezoelectric ceramic group 35 and the fourth piezoelectric ceramic group 36 are connected to the first lead 18, and the third piezoelectric ceramic group 35 and the fourth piezoelectric ceramic group 36 are driven by voltage to rapidly expand and contract. During the expansion and contraction, the third sapphire sheet 33 and the fourth sapphire sheet 34 are pushed to move. Since the third and fourth sapphire sheets 33 and 34, the tilt table 11, the in-plane table 12, and the sample table 13 are fixed to each other in the tilt rotation, the sample table 10 follows the tilt rotation when the third and fourth sapphire sheets 33 and 34 rotate.

The above embodiments are only used for illustrating the design ideas and features of the present invention, and the purpose thereof is to enable those skilled in the art to understand the contents of the present invention and to implement the present invention, and the protection scope of the present invention is not limited to the above embodiments. Therefore, all the equivalent changes or modifications made according to the principles and design ideas disclosed by the present invention are within the protection scope of the present invention.

Claims (10)

1. A sample manipulation stage capable of 6-axis motion in a cryogenic and vacuum environment, comprising:

a four-axis moving table (2);

a vacuum cavity (3) arranged on the four-axis moving platform (2);

an inclination angle rotary table (11), an in-plane rotary table (12) and a sample table (13) which are arranged in the vacuum cavity (3); the sample table (13) is rotatably arranged on the in-plane rotary table (12), and the in-plane rotary table (12) is rotatably arranged on the inclination angle rotary table (11); the in-plane rotary table (12) and the inclination angle rotary table (11) are driven by piezoelectricity;

the low-temperature inserted bar (1) is arranged in the four-axis moving platform (2), the low-temperature inserted bar (1) is inserted into the vacuum cavity (3), and a low-temperature source of the low-temperature inserted bar (1) is respectively connected with the inclination angle rotary table (11) and the in-plane rotary table (12) through a thermal conductive material.

2. The sample console capable of realizing 6-axis motion in low temperature and vacuum environment according to claim 1, wherein the bottom of the sample stage (13) is provided with a sample stage rotating shaft (131), and the in-plane rotary table (12) is sleeved outside the sample stage rotating shaft (131) through a thermal insulation member.

3. A sample manipulation stage capable of 6-axis motion in both low temperature and vacuum environments, as claimed in claim 1 or 2, wherein said tilt stage (11), in-plane stage (12) are equipped with a piezo motor power supply and a piezo drive unit, respectively; the piezoelectric motor power supply is connected with the piezoelectric driving unit through a lead.

4. A sample manipulation stage capable of 6-axis motion in cryogenic and vacuum environments, as claimed in claim 3, wherein said in-plane turret (12) is bilaterally symmetric about an in-plane turret rotation axis (121);

the piezoelectric driving unit of the in-plane rotary table (12) comprises a first sapphire sheet (24) and a second sapphire sheet (25) which are fixed on two sides of a rotary shaft (121) of the in-plane rotary table; a first piezoelectric ceramic sheet group (26) and a second piezoelectric ceramic sheet group (27) are respectively arranged outside the first sapphire sheet (24) and the second sapphire sheet (25); the second piezoelectric ceramic piece group (27) is fixedly connected with the first piezoelectric ceramic pasting plate (28), and the first spring piece (30) presses the first ceramic beads (29) on the first piezoelectric ceramic pasting plate (28).

5. A sample manipulation stage capable of 6-axis motion in cryogenic and vacuum environments, as claimed in claim 3, wherein the tilt stage (11) comprises a first portion (111), a second portion (112) and a tilt stage axis (113), the first portion (111) being cylindrical and the first portion (111) being nested outside the in-plane stage (12); the upper edge of the first part (111) is provided with a second part (112), the second part (112) is a connecting part, the upper part of the second part (112) is provided with an inclination angle rotary table rotating shaft (113), and the inclination angle rotary table rotating shaft (113) is vertically arranged with the first part (111).

6. A sample manipulation stage enabling 6-axis motion in low temperature and vacuum environments according to claim 5, wherein the piezoelectric drive unit of the tilt stage (11) comprises:

third piezoceramics group (35) of fixed connection in first part (111) outer wall is equipped with third sapphire piece (33) with third piezoceramics group (35) relatively, third sapphire piece (33) and fourth sapphire piece (34) fixed mounting are equipped with fourth piezoceramics group (36) relatively on heat conduction support (32), and fourth piezoceramics group (36) fixed connection second piezoceramics pastes board (37), and second spring leaf (39) compress tightly second ceramic pearl (38) on second piezoceramics pastes board (37).

7. The sample console capable of 6-axis movement in low temperature and vacuum environment according to claim 6, wherein the second spring plate (39) is fixedly connected to the heat conducting support (32).

8. The sample manipulation stage capable of 6-axis motion in cryogenic and vacuum environments according to claim 6, wherein a brush (40) is provided on the tilt turret (11).

9. The sample console capable of realizing 6-axis motion in low temperature and vacuum environment according to claim 6, wherein the heat conducting support (32), the second piezoceramic pasting plate (37), the first piezoceramic pasting plate (28), the in-plane rotary table (12), the tilt rotary table (11) and the sample table (13) are made of high-purity oxygen-free copper materials, and the surfaces of the two materials are plated with gold.

10. The sample console capable of realizing 6-axis motion in low-temperature and vacuum environments as claimed in claim 5, wherein the second ceramic bearing (31) and the heat conducting bracket (32) are sleeved on the rotating shaft (113) of the tilt table in sequence from radial direction to outside.

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