CN202808993U - Bidirectional translation mechanism and zone-melting single crystal furnace - Google Patents
Bidirectional translation mechanism and zone-melting single crystal furnace Download PDFInfo
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- CN202808993U CN202808993U CN 201220471427 CN201220471427U CN202808993U CN 202808993 U CN202808993 U CN 202808993U CN 201220471427 CN201220471427 CN 201220471427 CN 201220471427 U CN201220471427 U CN 201220471427U CN 202808993 U CN202808993 U CN 202808993U
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Abstract
The utility model relates to the technical field of zone-melting single crystal furnaces and discloses a bidirectional translation mechanism. The bidirectional translation mechanism comprises a lower translation plate, a middle translation plate, an upper translation plate, a first driving device and a second driving device, wherein the lower translation plate is fixed at an upper furnace chamber of the zone-melting single crystal furnace; the middle translation plate is assembled with the lower translation plate in a sliding manner; the upper translation plate is fixedly connected with an upper transmission of the zone-melting single crystal furnace and is assembled with the middle translation plate in a sliding manner; the first driving device is used for driving the middle translation plate to slide and is fixed relative to the lower translation plate; the second driving device is used for driving the upper translation plate to slide and is fixed relative to the middle translation plate; the sliding direction of the middle translation plate relative to the lower translation plate is mutually intersected with the sliding direction of the upper translation plate relative to the middle translation plate; and the upper translation plate, the middle translation plate and the lower translation plate are all provided with through holes running through the thickness direction. According to the zone-melting single crystal furnace with the bidirectional translation mechanism, movement of an upper shaft of the upper transmission in multiple directions is realized, and automatic centering is realized, so that the end surface uniformity in gas doping is improved, and the high quality of a crystal is ensured. The utility model further provides a zone-melting single crystal furnace.
Description
Technical field
The utility model relates to study on floating zone silicon growth apparatus technical field, particularly a kind of bidirectional parallel operating mechanism and zone melting single-crystal stove.
Background technology
Study on floating zone silicon all needed through overdoping before being applied to the fields such as microwave communication, radar, navigation, observing and controlling, medical science, superpower power station, adjusted the resistivity of crystals.The doping techniques that uses at present is mainly neutron transmutation doping and gas phase doping.The accuracy rate of neutron transmutation doping is high, is a nuclear process but mix, and also needs to eliminate radioactivity and processes and thermal treatment, has improved the cost of zone-melted silicon single crystal when increasing operation.A kind of adulterating method in addition is gas phase doping, directly in the process of crystal growth doping agent is doped to crystals by shielding gas.
But the end face homogeneity of gas phase doping resistivity is not good especially at present, and one of the main reasons is to be subject to processing unit.In the zone melting single-crystal stove of prior art, the upper axle of upper driving is only to move back and forth along fore-and-aft direction, perhaps can only move back and forth along left and right directions, and can not realize simultaneously the motion of four direction all around, therefore it is insufficient to stir the melting zone, the end face homogeneity of gas phase doping is difficult to improve, and high-quality being difficult to of crystal guarantees.
In addition, when drawing large diameter silicon monocrystal, need to guarantee that raw material polycrystalline silicon rod and heater coil keep with one heart always, in traditional mechanism, only have a direction automatically to adjust, another direction must be when blowing out manual setting, operate very inconvenient.
The utility model content
The utility model provides a kind of bidirectional parallel operating mechanism for the zone melting single-crystal stove, can realize the motion on a plurality of directions of upper axle in the zone melting single-crystal stove upper driving, and then realize that upward stir in axle melting zone to silicon wafer on a plurality of directions, can when crystal pulling, adjust at any time as required simultaneously the position of the upper axle of upper driving, easy to operate, realize the upper axle self-centering of upper driving, improve the yield rate of pulling monocrystal silicon and the end face homogeneity of gas phase doping, guarantee the high-quality of crystal.
For achieving the above object, the utility model provides following technical scheme:
A kind of bidirectional parallel operating mechanism for the zone melting single-crystal stove comprises:
The translation lower plate is fixed in the upper furnace chamber of described zone melting single-crystal stove;
Plate in the translation is with described translation lower plate sliding assembling;
The translation upper plate is fixedly connected with the upper driving of described zone melting single-crystal stove, and with described translation in the plate sliding assembling;
Drive the first drive unit that plate slides in the described translation, relative fixing with described translation lower plate;
Drive the second drive unit that described translation upper plate slides, relative fixing with plate in the described translation;
In the described translation in the relative described translation with described translation upper plate of the slip direction of the relatively described translation lower plate of plate the slip direction of plate mutually intersect;
Plate and described translation lower plate all have the through hole that runs through its thickness direction in described translation upper plate, the described translation.
Preferably, in the described translation in the relative described translation with described translation upper plate of the slip direction of the relatively described translation lower plate of plate the slip direction of plate mutually vertical.
Preferably, in the described translation between plate and the described translation lower plate by at least one pair of chute that cooperatively interacts and track sliding assembling.
Preferably, in described translation upper plate and the described translation between the plate by at least one pair of chute that cooperatively interacts and track sliding assembling.
Preferably, the chute between plate, the described translation lower plate and track are two pairs in the described translation.
Preferably, the chute between the plate and track are two pairs in described translation upper plate, the described translation.
Preferably, described drive unit is motor, and the output terminal of described motor drives plate motion in described translation upper plate and the described translation by speed reduction unit and ball screw assembly.
Preferably, the upper axle outside surface of the internal surface of the through hole that has of described translation upper plate and upper driving is bonded to each other.
The utility model also provides a kind of zone melting single-crystal stove, comprises furnace chamber and upper driving, also comprises the bidirectional parallel operating mechanism that mentions in the above-mentioned technology.
A kind of bidirectional parallel operating mechanism for the zone melting single-crystal stove that the utility model provides comprises:
The translation lower plate is fixed in the upper furnace chamber of described zone melting single-crystal stove;
Plate in the translation is with described translation lower plate sliding assembling;
The translation upper plate is fixedly connected with the upper driving of described zone melting single-crystal stove, and with described translation in the plate sliding assembling;
Drive the first drive unit that plate slides in the described translation, relative fixing with described translation lower plate;
Drive the second drive unit that described translation upper plate slides, relative fixing with plate in the described translation;
In the described translation in the relative described translation with described translation upper plate of the slip direction of the relatively described translation lower plate of plate the slip direction of plate mutually intersect;
Plate and described translation lower plate all have the through hole that runs through its thickness direction in described translation upper plate, the described translation.
The bidirectional parallel operating mechanism that the utility model provides, described translation lower plate is fixed in the upper furnace chamber of zone melting single-crystal stove, described translation upper plate is fixed in the upper driving of zone melting single-crystal stove, the upper axle of zone melting single-crystal stove upper driving passes described translation upper plate, through hole in the translation on plate and the translation lower plate, enter in the upper furnace chamber of zone melting single-crystal stove, an end of plate is provided with back up pad in the described translation, the described back up pad that is fixed on described the second drive unit deviates from an end of plate in the described translation, realize relative fixing with plate in the described translation, one end of described translation lower plate is provided with back up pad, described the first drive unit is fixed on the end that described back up pad deviates from described translation lower plate, realize relative fixing with described translation lower plate, when described the second drive unit work, when described the first drive unit is not worked, described the second drive unit drives plate fore-and-aft direction (or left and right directions) slip in the relatively described translation of described translation upper plate, described translation upper plate drives the upper driving motion, realizes that upper axle fore-and-aft direction (or left and right directions) in the upper furnace chamber of zone melting single-crystal stove of upper driving is mobile; When described the first drive unit work, when described the second drive unit is not worked, plate is static in the relatively described translation of described translation upper plate, described the first drive unit drives when the relatively described translation lower plate of plate left and right directions (or fore-and-aft direction) slides in the described translation, described translation upper plate is along with plate in the described translation together relatively described translation lower plate left and right directions (or fore-and-aft direction) slides, described translation upper plate drives the upper driving motion, realizes that the upper axle left and right directions (or fore-and-aft direction) in the upper furnace chamber of zone melting single-crystal stove in the upper driving is mobile; When described the first drive unit and described the second drive unit are worked simultaneously, when plate fore-and-aft direction (or left and right directions) slides in the relatively described translation of described translation upper plate, along with plate left and right directions (or fore-and-aft direction) in the described translation slides, at this moment, the relatively described translation lower plate of described translation upper plate oblique movement, therefore, according to the control to the first drive unit and the second drive unit, can make the relatively described translation lower plate of described translation upper plate carry out the motion of a plurality of directions, because the translation lower plate is fixed in the upper furnace chamber of zone melting single-crystal stove, the translation upper plate is fixedly connected with upper driving, therefore, the upper axle of upper driving can relatively be gone up furnace chamber and move in a plurality of directions, and then stir in the melting zone to silicon wafer on a plurality of directions.
So, the upper axle that the bidirectional parallel operating mechanism that the utility model provides can drive zone melting single-crystal stove upper driving carries out the motion of a plurality of directions, and then realize that upward stir in axle melting zone to silicon wafer on a plurality of directions, can when crystal pulling, adjust at any time as required simultaneously the position of the upper axle of upper driving, easy to operate, realize the upper axle self-centering of upper driving, improve the yield rate of pulling monocrystal silicon and the end face homogeneity of gas phase doping, guarantee the high-quality of crystal.
The utility model also provides a kind of zone melting single-crystal stove, comprises furnace chamber and upper driving, also comprises the bidirectional parallel operating mechanism that mentions in the above-mentioned technology.
The zone melting single-crystal stove that the utility model provides, has the bidirectional parallel operating mechanism that mentions in the above-mentioned technology, described translation lower plate is fixed in the upper furnace chamber of zone melting single-crystal stove, described translation upper plate is fixed in the upper driving of zone melting single-crystal stove, the upper axle of zone melting single-crystal stove upper driving passes described translation upper plate, through hole in the translation on plate and the translation lower plate, enter in the upper furnace chamber of zone melting single-crystal stove, an end of plate is provided with back up pad in the described translation, the described back up pad that is fixed on described the second drive unit deviates from an end of plate in the described translation, realize relative fixing with plate in the described translation, one end of described translation lower plate is provided with back up pad, described the first drive unit is fixed on the end that described back up pad deviates from described translation lower plate, realize relative fixing with described translation lower plate, when described the second drive unit work, when described the first drive unit is not worked, described the second drive unit drives plate fore-and-aft direction (or left and right directions) slip in the relatively described translation of described translation upper plate, described translation upper plate drives the upper driving motion, realizes that the upper axle fore-and-aft direction (or left and right directions) in the upper furnace chamber of zone melting single-crystal stove in the upper driving is mobile; When described the first drive unit work, when described the second drive unit is not worked, plate is static in the relatively described translation of described translation upper plate, described the first drive unit drives when the relatively described translation lower plate of plate left and right directions (or fore-and-aft direction) slides in the described translation, described translation upper plate is along with plate in the described translation together relatively described translation lower plate left and right directions (or fore-and-aft direction) slides, described translation upper plate drives the upper driving motion, realizes that upper axle left and right directions (or fore-and-aft direction) in the upper furnace chamber of zone melting single-crystal stove of upper driving is mobile; When described the first drive unit and described the second drive unit are worked simultaneously, when plate fore-and-aft direction (or left and right directions) slides in the relatively described translation of described translation upper plate, along with plate left and right directions (or fore-and-aft direction) in the described translation slides, at this moment, the relatively described translation lower plate of described translation upper plate oblique movement, therefore, according to the control to the first drive unit and the second drive unit, can make the relatively described translation lower plate of described translation upper plate carry out the motion of a plurality of directions, because the translation lower plate is fixed in the upper furnace chamber of zone melting single-crystal stove, the translation upper plate is fixedly connected with upper driving, therefore, the upper axle of upper driving can stir in the melting zone to silicon wafer on a plurality of directions, can when crystal pulling, adjust at any time as required simultaneously the position of the upper axle of upper driving, easy to operate, realize the upper axle self-centering of upper driving, improve the yield rate of pulling monocrystal silicon and the end face homogeneity of gas phase doping, guarantee the high-quality of crystal.
Description of drawings
The bidirectional parallel operating mechanism structure synoptic diagram that Fig. 1 provides for the utility model;
Fig. 2 is that the A of bidirectional parallel operating shown in Figure 1 mechanism is to synoptic diagram;
Fig. 3 is that the B of bidirectional parallel operating shown in Figure 1 mechanism is to synoptic diagram;
The zone melting single-crystal furnace interior sectional view that Fig. 4 provides for the utility model;
The zone melting single-crystal furnace structure synoptic diagram that Fig. 5 provides for the utility model.
Embodiment
Below in conjunction with the accompanying drawing among the utility model embodiment, the technical scheme among the utility model embodiment is clearly and completely described, obviously, described embodiment only is the utility model part embodiment, rather than whole embodiment.Based on the embodiment in the utility model, those of ordinary skills are not making the every other embodiment that obtains under the creative work prerequisite, all belong to the scope of the utility model protection.
Please refer to Fig. 1, Fig. 2, Fig. 3 and Fig. 4; Wherein, the bidirectional parallel operating mechanism structure synoptic diagram that provides for the utility model of Fig. 1; Fig. 2 is that the A of bidirectional parallel operating shown in Figure 1 mechanism is to synoptic diagram; Fig. 3 is that the B of bidirectional parallel operating shown in Figure 1 mechanism is to synoptic diagram; The zone melting single-crystal furnace interior sectional view that Fig. 4 provides for the utility model.
Embodiment one
A kind of bidirectional parallel operating mechanism for the zone melting single-crystal stove that present embodiment provides as shown in Figure 1, comprising:
Translation lower plate 3 is fixed in the upper furnace chamber 7 of zone melting single-crystal stove;
Translation upper plate 5 is fixedly connected with the upper driving 6 of zone melting single-crystal stove, and with translation in plate 4 sliding assembling;
Drive the first drive unit 2 that plate 4 slides in the translation, relative fixing with translation lower plate 3;
Drive the second drive unit 1 that translation upper plate 5 slides, relative fixing with plate in the translation 4;
In the translation in the slip direction of plate 4 relative translation lower plates 3 and the 5 relative translations of translation upper plate the slip direction of plate 4 mutually intersect;
The bidirectional parallel operating mechanism that the utility model provides, as shown in Figure 3 and Figure 4, translation lower plate 3 is fixed in the upper furnace chamber 7 of zone melting single-crystal stove, translation upper plate 5 is fixed in the upper driving 6 of zone melting single-crystal stove, the upper axle 61 of zone melting single-crystal stove upper driving 6 passes translation upper plate 5, through hole in the translation on plate 4 and the translation lower plate 3, enter in the upper furnace chamber 7 of zone melting single-crystal stove, an end of plate 4 is provided with back up pad in the translation, the back up pad that is fixed on the second drive unit 1 deviates from an end of plate 4 in two translations, realize relative fixing with plate 4 in the translation, one end of translation lower plate 3 is provided with back up pad, the first drive unit 3 is fixed on the end that back up pad deviates from translation lower plate 3, realize relative fixing with translation lower plate 3, when 1 work of the second drive unit, when the first drive unit 2 is not worked, the second drive unit 1 drives plate 4 fore-and-aft directions (or left and right directions) slip in the 5 relative translations of translation upper plate, translation upper plate 5 drives upper driving 6 motions, realizes that upper axle 61 fore-and-aft direction (or left and right directions) in the upper furnace chamber 7 of zone melting single-crystal stove of upper driving 6 is mobile; When 2 work of the first drive unit, when the second drive unit is not worked, plate 4 is static in the 5 relative translations of translation upper plate, the first drive unit 2 drives when plate 4 relative translation lower plate 3 left and right directions (or fore-and-aft direction) slide in the translation, translation upper plate 5 is along with plate in the translation 4 together relatively translation lower plate 3 left and right directions (or fore-and-aft direction) slip, translation upper plate 5 drives upper driving 6 motions, realizes that upper axle 61 left and right directions (or fore-and-aft direction) in the upper furnace chamber 7 of zone melting single-crystal stove of upper driving 6 is mobile; When the first drive unit 2 and the second drive unit 1 are worked simultaneously, when plate 4 fore-and-aft directions (or left and right directions) slide in the 5 relative translations of translation upper plate, along with 4 left and right directions of plate in the translation (or fore-and-aft direction) slide, at this moment, translation upper plate 5 relative translation lower plate 3 oblique movements, according to the control to the first drive unit 2 and the second drive unit 1, can make translation upper plate 5 relative translation lower plates 3 carry out the motion of a plurality of directions, because translation lower plate 3 is fixed in the upper furnace chamber 7 of zone melting single-crystal stove, translation upper plate 5 is fixedly connected with upper driving 6, therefore, the upper axle 61 of upper driving 6 can relatively be gone up furnace chamber 7 and move in a plurality of directions, and then stir in the melting zone to silicon wafer on a plurality of directions.
So, the upper axle 61 that the bidirectional parallel operating mechanism that the utility model provides can drive zone melting single-crystal stove upper driving 6 carries out the motion of a plurality of directions, and then realize that upward stir in axle 61 melting zone to silicon wafer on a plurality of directions, can when crystal pulling, adjust at any time as required simultaneously the position of the upper axle 61 of upper driving 6, easy to operate, realize upper axle 61 self-centerings of upper driving 6, improve the yield rate of pulling monocrystal silicon and the end face homogeneity of gas phase doping, guarantee the high-quality of crystal.
For the ease of making and assembling, preferably, in the translation in the slip direction of plate 4 relative translation lower plates 3 and the 5 relative translations of translation upper plate the slip direction of plate 4 mutually vertical.
In the preferred embodiment, particularly, as shown in Figure 2, in the translation between plate 4 and the translation lower plate 3 by at least one pair of chute that cooperatively interacts and track sliding assembling.When 1 work of the second drive unit, when the first drive unit 2 is not worked, plate is static in the 5 relative translations of translation upper plate, the second drive unit 1 drives when plate 4 can slide along track 41 relative translation lower plate 3 left and right directions (or fore-and-aft direction) in the translation, translation upper plate 5 is along with plate in the translation 4 together relatively translation lower plate 3 left and right directions (or fore-and-aft direction) slip, translation upper plate 5 drives upper driving 6 motions, realizes that upper axle 61 left and right directions (or fore-and-aft direction) in the upper furnace chamber 7 of zone melting single-crystal stove of upper driving 6 is mobile.
Particularly, as shown in Figure 1, in translation upper plate 5 and the translation between the plate 4 by at least one pair of chute that cooperatively interacts and track sliding assembling.When 2 work of the first drive unit, when the second drive unit 1 is not worked, the first drive unit 2 drives translation upper plate 5 and can slide along plate 4 fore-and-aft directions (or left and right directions) in the track 51 relative translations, translation upper plate 5 drives upper driving 6 motions, realizes that the upper axle 61 of upper driving 6 slides at zone melting single-crystal stove fore-and-aft direction (or left and right directions).
Particularly, the chute between plate 4, the translation lower plate 3 and track are two pairs in the translation.Be convenient to the stable slip of plate in the translation 4.
Particularly, the chute between the plate 4 and track are two pairs in translation upper plate 5, the translation.Be convenient to the stable slip of translation upper plate 5.
Particularly, drive unit is motor, and the output terminal of motor drives plate 4 motions in translation upper plate 5 and the translation by speed reduction unit and ball screw assembly.An end of plate 4 is provided with back up pad in the translation, the back up pad that is fixed on the second drive unit 1 deviates from an end of plate 4 in two translations, realize relative fixing with plate 4 in the translation, one end of translation lower plate 3 is provided with back up pad, the first drive unit 3 is fixed on the end that back up pad deviates from translation lower plate 3, realize relative fixing with translation lower plate 3, when 1 work of the second drive unit, when the first drive unit 2 is not worked, the output terminal of the second drive unit 1 drives plate 4 fore-and-aft directions (or left and right directions) slip in the 5 relative translations of translation upper plate by speed reduction unit 11 and ball screw assembly, 12, translation upper plate 5 drives upper driving 6 motions, realizes that upper axle 1 fore-and-aft direction (or left and right directions) in the upper furnace chamber 7 of zone melting single-crystal stove of upper driving is mobile; When 2 work of the first drive unit, when the second drive unit 1 is not worked, plate 4 is static in the 5 relative translations of translation upper plate, the output terminal of the first drive unit 2 passes through speed reduction unit 21 and ball screw assembly, 22 drives when plate 4 relative translation lower plate 3 left and right directions (or fore-and-aft direction) slide in the translations, translation upper plate 5 is along with plate in the translation 4 together relatively translation lower plate 3 left and right directions (or fore-and-aft direction) slip, translation upper plate 5 drives upper driving 6 motions, realizes that upper axle 61 left and right directions (or fore-and-aft direction) in the upper furnace chamber 7 of zone melting single-crystal stove of upper driving 6 is mobile; When the first drive unit 2 and the second drive unit 1 are worked simultaneously, when plate 4 fore-and-aft directions (or left and right directions) slide in the 5 relative translations of translation upper plate, along with 4 left and right directions of plate in the translation (or fore-and-aft direction) slide, at this moment, translation upper plate 5 relative translation lower plate 3 oblique movements, according to the control to the first drive unit 2 and the second drive unit 1, can make translation upper plate 5 relative translation lower plates 3 carry out the motion of a plurality of directions, because translation lower plate 3 is fixed in the upper furnace chamber 7 of zone melting single-crystal stove, translation upper plate 5 is fixedly connected with upper driving 6, therefore, the upper axle 61 of upper driving 6 can relatively be gone up furnace chamber 7 and move in a plurality of directions, and then stir in the melting zone to silicon wafer on a plurality of directions.
Certainly, the first drive unit 2 and the second drive unit 1 also can install for other, such as motor etc., the output terminal of the output terminal of the first drive unit 2 and the second drive unit 1 also can drive plate in the translation 4 and translation upper plate 5 by linkage assembly etc., just gives unnecessary details no longer one by one here.
Particularly, as shown in Figure 4, upper axle 61 outside surfaces of the internal surface of the through hole 52 that translation upper plate 5 has and upper driving 6 are bonded to each other.The upper axle 61 of upper driving 6 is clamped in the through hole 52 that translation upper plate 5 has, makes and stir steadily.
Certainly, through hole 42 in through hole 52 on the translation upper plate 5 and the translation on plate 4 and the translation lower plate 3,32 size can be identical, also can be different, through hole 52 on the translation upper plate 5 can be circle, the diameter in through hole hole 52 is identical with the diameter of the upper axle 61 of upper driving 6, space 32 in space 42 in the translation on the plate 4 and the translation on the plate 3 is greater than the diameter of the upper axle 61 of upper driving 6, so that the motion of the upper axle 61 of upper driving 6.
Embodiment two
The utility model also provides a kind of zone melting single-crystal stove, as shown in Figure 5, comprises furnace chamber 7 and upper driving 6, also comprises the bidirectional parallel operating mechanism that mentions in the above-mentioned technology.
The zone melting single-crystal stove that the utility model provides, has the bidirectional parallel operating mechanism that mentions in the above-mentioned technology, translation lower plate 3 is fixed in the upper furnace chamber 7 of zone melting single-crystal stove, translation upper plate 5 is fixed in the upper driving 6 of zone melting single-crystal stove, the upper axle 61 of zone melting single-crystal stove upper driving 6 passes translation upper plate 5, through hole in the translation on plate 4 and the translation lower plate 3, enter in the upper furnace chamber 7 of zone melting single-crystal stove, an end of plate 4 is provided with back up pad in the translation, the back up pad that is fixed on the second drive unit 1 deviates from an end of plate 4 in the translation, realize relative fixing with plate 4 in the translation, one end of translation lower plate 3 is provided with back up pad, the first drive unit 3 is fixed on the end that back up pad deviates from translation lower plate 3, realize relative fixing with translation lower plate 3, when 1 work of the second drive unit, when the first drive unit 2 is not worked, the second drive unit 1 drives plate 4 fore-and-aft directions (or left and right directions) slip in the 5 relative translations of translation upper plate, translation upper plate 5 drives upper driving 6 motions, realizes that upper axle 61 fore-and-aft direction (or left and right directions) in the upper furnace chamber 7 of zone melting single-crystal stove of upper driving 6 is mobile; When 2 work of the first drive unit, when the second drive unit is not worked, plate 4 is static in the 5 relative translations of translation upper plate, the first drive unit 2 drives when plate 4 relative translation lower plate 3 left and right directions (or fore-and-aft direction) slide in the translation, translation upper plate 5 is along with plate in the translation 4 together relatively translation lower plate 3 left and right directions (or fore-and-aft direction) slip, translation upper plate 5 drives upper driving 6 motions, realizes that upper axle 61 left and right directions (or fore-and-aft direction) in the upper furnace chamber 7 of zone melting single-crystal stove of upper driving 6 is mobile; When the first drive unit 2 and the second drive unit 1 are worked simultaneously, when plate 4 fore-and-aft directions (or left and right directions) slide in the 5 relative translations of translation upper plate, along with 4 left and right directions of plate in the translation (or fore-and-aft direction) slide, at this moment, translation upper plate 5 relative translation lower plate 3 oblique movements, according to the control to the first drive unit 2 and the second drive unit 1, can make translation upper plate 5 relative translation lower plates 3 carry out the motion of a plurality of directions, because translation lower plate 3 is fixed in the upper furnace chamber 7 of zone melting single-crystal stove, translation upper plate 5 is fixedly connected with upper driving 6, therefore, the upper axle 61 of upper driving 6 can carry out to the melting zone of silicon wafer the stirring of a plurality of directions, can when crystal pulling, adjust at any time as required simultaneously the position of the upper axle 61 of upper driving 6, easy to operate, realize upper axle 61 self-centerings of upper driving 6, improve the yield rate of pulling monocrystal silicon and the end face homogeneity of gas phase doping, guarantee the high-quality of crystal.
Obviously, those skilled in the art can carry out various changes and modification to the utility model and not break away from spirit and scope of the present utility model.Like this, if of the present utility model these are revised and modification belongs within the scope of the utility model claim and equivalent technologies thereof, then the utility model also is intended to comprise these changes and modification interior.
Claims (9)
1. a bidirectional parallel operating mechanism that is used for the zone melting single-crystal stove is characterized in that, comprising:
The translation lower plate is fixed in the upper furnace chamber of described zone melting single-crystal stove;
Plate in the translation is with described translation lower plate sliding assembling;
The translation upper plate is fixedly connected with the upper driving of described zone melting single-crystal stove, and with described translation in the plate sliding assembling;
Drive the first drive unit that plate slides in the described translation, relative fixing with described translation lower plate;
Drive the second drive unit that described translation upper plate slides, relative fixing with plate in the described translation;
In the described translation in the relative described translation with described translation upper plate of the slip direction of the relatively described translation lower plate of plate the slip direction of plate mutually intersect;
Plate and described translation lower plate all have the through hole that runs through its thickness direction in described translation upper plate, the described translation.
2. bidirectional parallel operating according to claim 1 mechanism is characterized in that, in the described translation in the relative described translation with described translation upper plate of the slip direction of the relatively described translation lower plate of plate the slip direction of plate mutually vertical.
3. bidirectional parallel operating according to claim 1 mechanism is characterized in that, in the described translation between plate and the described translation lower plate by at least one pair of chute that cooperatively interacts and track sliding assembling.
4. bidirectional parallel operating according to claim 1 mechanism is characterized in that, in described translation upper plate and the described translation between the plate by at least one pair of chute that cooperatively interacts and track sliding assembling.
5. bidirectional parallel operating according to claim 3 mechanism is characterized in that chute and track in the described translation between plate, the described translation lower plate are two pairs.
6. bidirectional parallel operating according to claim 4 mechanism is characterized in that the chute in described translation upper plate, the described translation between the plate and track are two pairs.
7. bidirectional parallel operating according to claim 1 mechanism is characterized in that described drive unit is motor, and the output terminal of described motor drives plate motion in described translation upper plate and the described translation by speed reduction unit and ball screw assembly.
8. each described bidirectional parallel operating mechanism is characterized in that according to claim 1 ~ 7, and it is bonded to each other that described translation upper plate has the upper axle outside surface of the internal surface of through hole and upper driving.
9. a zone melting single-crystal stove comprises furnace chamber and upper driving, it is characterized in that, also comprises such as each described bidirectional parallel operating mechanism of claim 1 ~ 8.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220471427 CN202808993U (en) | 2012-09-14 | 2012-09-14 | Bidirectional translation mechanism and zone-melting single crystal furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220471427 CN202808993U (en) | 2012-09-14 | 2012-09-14 | Bidirectional translation mechanism and zone-melting single crystal furnace |
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| Publication Number | Publication Date |
|---|---|
| CN202808993U true CN202808993U (en) | 2013-03-20 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220471427 Withdrawn - After Issue CN202808993U (en) | 2012-09-14 | 2012-09-14 | Bidirectional translation mechanism and zone-melting single crystal furnace |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102899716A (en) * | 2012-09-14 | 2013-01-30 | 北京京运通科技股份有限公司 | Bidirectionally translational mechanism and zone-melting monocrystal furnace |
-
2012
- 2012-09-14 CN CN 201220471427 patent/CN202808993U/en not_active Withdrawn - After Issue
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102899716A (en) * | 2012-09-14 | 2013-01-30 | 北京京运通科技股份有限公司 | Bidirectionally translational mechanism and zone-melting monocrystal furnace |
| CN102899716B (en) * | 2012-09-14 | 2015-04-08 | 北京京运通科技股份有限公司 | Bidirectionally translational mechanism and zone-melting monocrystal furnace |
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