CN111812037A - Laser composite system and method integrating cleaning, polishing and ultrasonic detection - Google Patents
Laser composite system and method integrating cleaning, polishing and ultrasonic detection Download PDFInfo
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- CN111812037A CN111812037A CN202010724237.XA CN202010724237A CN111812037A CN 111812037 A CN111812037 A CN 111812037A CN 202010724237 A CN202010724237 A CN 202010724237A CN 111812037 A CN111812037 A CN 111812037A
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- 238000005498 polishing Methods 0.000 title claims abstract description 42
- 238000001514 detection method Methods 0.000 title claims abstract description 41
- 238000004140 cleaning Methods 0.000 title claims abstract description 39
- 238000000034 method Methods 0.000 title claims abstract description 20
- 239000002131 composite material Substances 0.000 title claims abstract description 19
- 230000007547 defect Effects 0.000 claims abstract description 17
- 238000012545 processing Methods 0.000 claims abstract description 12
- 230000003287 optical effect Effects 0.000 claims description 31
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- 238000012360 testing method Methods 0.000 claims description 3
- 238000002604 ultrasonography Methods 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 5
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- 238000009659 non-destructive testing Methods 0.000 description 4
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
- B08B7/0035—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
- B08B7/0042—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like by laser
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/352—Working by laser beam, e.g. welding, cutting or boring for surface treatment
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
- G01N2021/1706—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids in solids
Abstract
The invention relates to a laser composite system and a method integrating cleaning, polishing and ultrasonic detection, wherein the system comprises a control module, a first laser transmitter, a second laser transmitter and a laser ultrasonic receiver, wherein the first laser transmitter, the second laser transmitter and the laser ultrasonic receiver are electrically connected with the control module; the first laser emitter is used for emitting laser pulses to the surface of the detected workpiece under the control of the control module so as to carry out laser cleaning and laser polishing on the surface of the detected workpiece; the second laser transmitter is used for transmitting laser pulses to the detected workpiece under the control of the control module and exciting laser ultrasonic signals on the surface of the detected workpiece; the laser ultrasonic receiver is used for receiving laser ultrasonic signals excited by the surface of the detected workpiece, converting the received laser ultrasonic signals into electric signals and transmitting the electric signals to the control module for processing, so that the surface defects of the detected workpiece are detected. The invention can improve the detection precision, enlarge the laser ultrasonic detection range, avoid introducing high voltage risk, and is safe and reliable.
Description
Technical Field
The invention relates to the technical field of laser and ultrasound, in particular to a laser composite system and a method integrating cleaning, polishing and ultrasonic detection.
Background
The ultrasonic nondestructive testing technology comprises traditional contact ultrasonic nondestructive testing and laser ultrasonic nondestructive testing. The contact ultrasonic nondestructive testing adopts a contact ultrasonic transducer as a probe for ultrasonic excitation and receiving, and is required to be in contact with a material to be tested, and a coupling agent is usually required to be coated to improve the ultrasonic coupling effect. Laser ultrasound is a non-contact, high-precision, non-destructive novel ultrasonic detection technology. It uses laser pulse to excite ultrasonic wave in the detected workpiece, and uses laser beam to detect the propagation of ultrasonic wave so as to obtain workpiece information, such as workpiece thickness, internal and surface defects, material parameters, etc. The technology combines the advantages of high precision of ultrasonic detection and non-contact of optical detection, and has the advantages of high sensitivity (sub-nanometer level) and high detection bandwidth (GHz).
The detection method of laser ultrasound in the laser ultrasound detection technology comprises a non-interference method and an interference method, wherein the non-interference method mainly adopts an optical deflection technology, and the measurement of the interference method is realized based on phase or frequency modulation of an interferometer link caused by ultrasound. Interferometers capable of realizing ultrasonic detection include heterodyne interferometers, time delay interferometers, confocal fabry-perot interferometers, double-wave hybrid interferometers, photo-induced electromotive force interferometers and the like. Among them, heterodyne interferometer and time delay interferometer usually require the detection surface to have better smoothness. The confocal Fabry-Perot interferometer can be suitable for a rough surface, has better sensitivity to intermediate frequency noise, but has the defects of insensitivity to low-frequency signals, high-frequency response nonlinearity and the like. The double-wave hybrid interferometer and the light induced electromotive force interferometer introduce nonlinear optical crystals to realize phase correction of the rough surface, and can realize ultrasonic detection of the rough surface. However, the dual-wave hybrid interferometer requires a high kV voltage to be applied to the nonlinear optical crystal, resulting in a very complex system and a large safety hazard.
Disclosure of Invention
Aiming at the problems in the background art, the invention aims to solve the problem of low defect detection sensitivity caused by a rough surface and reduce the requirement on the roughness of the surface of a workpiece in the laser ultrasonic application process.
In order to solve the technical problems, the invention adopts the technical scheme that:
a laser composite system integrating cleaning, polishing and ultrasonic detection comprises a control module, a first laser transmitter, a second laser transmitter and a laser ultrasonic receiver, wherein the first laser transmitter, the second laser transmitter and the laser ultrasonic receiver are electrically connected with the control module;
the first laser emitter is used for emitting laser pulses to the surface of the detected workpiece under the control of the control module so as to carry out laser cleaning and laser polishing on the surface of the detected workpiece;
the second laser transmitter is used for transmitting laser pulses to the detected workpiece under the control of the control module and exciting laser ultrasonic signals on the surface of the detected workpiece;
the laser ultrasonic receiver is used for receiving laser ultrasonic signals excited by the surface of the detected workpiece, converting the received laser ultrasonic signals into electric signals and transmitting the electric signals to the control module for processing, so that the surface defects of the detected workpiece are detected.
In some embodiments, the laser ultrasonic receiver comprises an optical interferometer and a photodetector, the optical interferometer is used for modulating the laser ultrasonic signal containing the detected workpiece surface defect information into an optical signal, and the photodetector is used for converting the modulated optical signal into an electrical signal and transmitting the electrical signal to the control module.
In some embodiments, the optical interferometer in the laser ultrasound receiver is a dual wavelength optical interferometer, an F-P cavity interferometer, or a heterodyne interferometer.
In some embodiments, the laser scanning device further comprises a scanning galvanometer module, wherein a light inlet end of the scanning galvanometer module faces a laser emitting end of the first laser emitter, and a light outlet end of the scanning galvanometer module always faces the surface of the detected workpiece; the scanning galvanometer module is used for adjusting the position of the surface of the detected workpiece, which is transmitted by the laser output by the first laser transmitter.
In some embodiments, the scanning galvanometer module further comprises two collimating focal length coupling lens groups, wherein one collimating focal length coupling lens group is arranged at the light outlet end of the scanning galvanometer module, and the other collimating focal length coupling lens group is arranged between the laser emission end of the second laser emitter and the light path of the surface of the detected workpiece; the collimating focal length coupling lens group is used for collimating and focusing laser.
In some embodiments, the device further comprises a pan-tilt camera electrically connected with the control module, wherein the pan-tilt camera is used for shooting pictures of the surface of the detected workpiece and transmitting the picture information to the control module for processing.
In some embodiments, the first laser emitter emits a pulsed laser beam with power of 50-500W, pulse width of 10-200 ns, repetition frequency of 1-10 kHz, spot diameter of 30 μm-1 mm, and wavelength of 1060-1080 nm when performing laser cleaning operation;
when the first laser transmitter executes laser polishing operation, a laser pulse light beam with the transmitted power of 50-500W, the transmitted pulse width of 100-300 ns, the repetition frequency of 100-500 kHz, the spot diameter of 30 mu m-80 mm and the wavelength of 1060-1080 nm is emitted;
the second laser emitter emits laser pulse beams with single pulse energy of 0.5-300 mJ, pulse width of 1-5 ns, repetition frequency of 10 Hz-10 kHz, power stability RMS of less than 0.2% and wavelength of 532nm, 1064nm or 1550 nm.
A method for detecting the surface defects of a workpiece by using the laser composite system integrating cleaning, polishing and ultrasonic detection comprises the following steps:
s1, acquiring image information of the surface of the detected workpiece through a pan-tilt camera, transmitting the image information to a control module, setting laser cleaning parameters and working time by the control module according to the received image information, starting a laser cleaning program, controlling a first laser emitter to emit laser pulses to the surface of the detected workpiece, and performing laser cleaning processing on the detected workpiece until the preset laser cleaning working time is reached;
s2, acquiring the image information of the surface of the detected workpiece after being cleaned by the laser in the step S1 through a pan-tilt camera and transmitting the image information to a control module, then judging whether an oxide layer or/and rust exists on the surface of the detected workpiece or not through the control module according to the received image information, if so, repeating the step S1 until no oxide layer or/and rust exists on the surface of the detected workpiece, and then executing the step S3; if not, directly executing step S3;
s3, acquiring image information of the surface of the detected workpiece through the pan-tilt camera again and transmitting the image information to the control module, then setting laser polishing parameters and working time by the control module according to the received image information, starting a laser polishing program, controlling the first laser emitter to emit laser pulses to the surface of the detected workpiece, and performing laser polishing treatment on the detected workpiece until the preset laser polishing working time is reached;
s4, acquiring the image information of the detected workpiece surface after laser in the step S3 through a pan-tilt camera and transmitting the image information to a control module, then judging whether the roughness of the detected workpiece surface is less than 5 μm or not through the control module according to the received image information, if not, repeating the step S3 until the roughness of the detected workpiece surface is less than 5 μm, and then executing the step S5; if yes, go directly to step S5;
and S5, the control module starts a laser ultrasonic detection program to control the second laser transmitter and the laser ultrasonic receiver to work, firstly, the second laser transmitter transmits laser pulses to the surface of the detected workpiece which is subjected to laser polishing in the step S3, the laser pulses excite laser ultrasonic signals on the surface of the detected workpiece, then, the laser ultrasonic signals excited on the surface of the detected workpiece are received by the laser ultrasonic receiver and converted into electric signals, and the electric signals are transmitted to the control module to be processed, so that the detection of the surface defects of the detected workpiece can be completed.
Compared with the prior art, the invention has the advantages that at least: the invention provides a laser composite system and a laser composite method integrating cleaning, polishing and ultrasonic detection, which remove rust on the surface of a workpiece by adopting laser cleaning and laser polishing and improve the smoothness of the surface of the workpiece, thereby reducing the requirement on an optical interferometer in the laser ultrasonic detection process, improving the detection precision and accuracy of a rough workpiece, enlarging the range of laser ultrasonic detection, avoiding the risk of introducing high voltage in the process of using a dual-wavelength interferometer, and being safe and reliable.
The invention is characterized in that: the laser cleaning, the laser polishing and the laser ultrasonic detection are combined, and the detection precision and the accuracy of the rough workpiece are improved together.
Drawings
Other objects and advantages of the present invention will become apparent from the following description of the invention which refers to the accompanying drawings, and may assist in a comprehensive understanding of the invention.
FIG. 1 is a schematic diagram of a laser combination system integrating cleaning, polishing and ultrasonic testing according to the present invention;
description of reference numerals:
1. a first laser transmitter; 2. a second laser transmitter; 3. a laser ultrasonic receiver; 4. a scanning galvanometer module; 5. a collimating focal length coupling lens group; 6. a pan-tilt camera; 10. and a control module.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the technical solutions of the present invention will be clearly and completely described below. It is to be understood that the embodiments described are only a few embodiments of the present invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the described embodiments of the invention without any inventive step, are within the scope of protection of the invention.
Unless defined otherwise, technical or scientific terms used herein shall have the ordinary meaning as understood by one of ordinary skill in the art to which this invention belongs.
Referring to fig. 1, the present invention provides a laser composite system integrating cleaning, polishing and ultrasonic detection, including a control module 10, and a first laser transmitter 1, a second laser transmitter 2 and a laser ultrasonic receiver 3 electrically connected to the control module 10, wherein the bottom dotted line in the figure represents a detected workpiece; the first laser transmitter 1 is used for transmitting laser pulses to the surface of a detected workpiece under the control of the control module 10 so as to perform laser cleaning and laser polishing on the surface of the detected workpiece; the second laser transmitter 2 is used for transmitting laser pulses to the detected workpiece and exciting laser ultrasonic signals on the surface of the detected workpiece under the control of the control module 10; the laser ultrasonic receiver 3 is used for receiving laser ultrasonic signals excited by the surface of the detected workpiece, converting the received laser ultrasonic signals into electric signals and transmitting the electric signals to the control module 10 for processing, so that the surface defects of the detected workpiece can be detected.
Preferably, the system further comprises a pan-tilt camera 6 electrically connected with the control module 10, wherein the pan-tilt camera 6 is used for taking pictures of the surface of the detected workpiece and transmitting the picture information to the control module 10 for processing.
Preferably, the laser ultrasonic receiver 3 includes an optical interferometer and a photodetector, the optical interferometer is configured to modulate a laser ultrasonic signal containing information of a surface defect of the detected workpiece into an optical signal, and the photodetector is configured to convert the modulated optical signal into an electrical signal and transmit the electrical signal to the control module 10. The optical interferometer modulates the laser ultrasonic signal containing the information of the surface defect of the detected workpiece into an optical signal by using an optical interference principle, and converts the optical signal into an electrical signal through a photoelectric detector so as to transmit the electrical signal to the control module 10. Specifically, the optical interferometer in the laser ultrasonic receiver 3 is a dual-wavelength optical interferometer, an F-P cavity interferometer, or a heterodyne interferometer.
Preferably, the system further comprises a scanning galvanometer module 4, wherein a light inlet end of the scanning galvanometer module 4 faces a laser emitting end of the first laser emitter 1, and a light outlet end of the scanning galvanometer module 4 always faces the surface of the detected workpiece; the scanning galvanometer module 4 is used for adjusting the position of the laser transmitted to the surface of the detected workpiece.
Preferably, the system further comprises two collimating focal length coupling lens groups 5, wherein one collimating focal length coupling lens group 5 is arranged at the light outlet end of the scanning galvanometer module 4, and the other collimating focal length coupling lens group is arranged between the laser emitting end of the second laser emitter 2 and the light path of the surface of the detected workpiece; the collimating focal length coupling lens group 5 is used for collimating and focusing laser.
The control module 10 may include a computer, an FGPA module, an amplifying circuit, a high-speed AD sampling circuit, and various driving circuits, the computer being electrically connected to the FGPA module; the electric signal output by the photoelectric detector is amplified by the amplifying circuit and is subjected to AD conversion by the high-speed AD sampling circuit, and then is transmitted to the FPGA module for processing; the FPGA module controls the work of the first laser transmitter 1, the second laser transmitter 2 and the holder camera 6 through different driving circuits respectively.
In one embodiment, the first laser emitter 1 emits a laser pulse light beam with power of 50-500W, pulse width of 10 ns-200 ns, repetition frequency of 1-10 kHz, spot diameter of 30 μm-1 mm and wavelength of 1060-1080 nm when performing laser cleaning operation;
when the first laser emitter 1 executes laser polishing operation, a laser pulse light beam with the emitted power of 50-500W, the pulse width of 100 ns-300 ns, the repetition frequency of 100-500 kHz, the spot diameter of 30 mu m-80 mm and the wavelength of 1060-1080 nm is emitted;
the second laser emitter 2 emits laser pulse beams with single pulse energy of 0.5-300 mJ, pulse width of 1-5 ns, repetition frequency of 10 Hz-10 kHz, power stability RMS of less than 0.2% and wavelength of 532nm, 1064nm or 1550 nm.
The invention also provides a method for detecting the surface defects of the workpiece by using the laser composite system integrating cleaning, polishing and ultrasonic detection, which comprises the following steps:
s1, acquiring image information of the surface of the detected workpiece through the pan-tilt camera 6, transmitting the image information to the control module 10, setting laser cleaning parameters and working time by the control module 10 according to the received image information, starting a laser cleaning program, controlling the first laser emitter 1 to emit laser pulses to the surface of the detected workpiece, and performing laser cleaning processing on the detected workpiece until the preset laser cleaning working time is reached;
s2, acquiring the image information of the surface of the detected workpiece after being cleaned by the laser in the step S1 through the pan-tilt camera 6, transmitting the image information to the control module 10, then judging whether an oxide layer or/and rust exists on the surface of the detected workpiece by the control module 10 according to the received image information, if so, repeating the step S1 until no oxide layer or/and rust exists on the surface of the detected workpiece, and then executing the step S3; if not, directly executing step S3;
s3, acquiring image information of the surface of the detected workpiece through the pan-tilt camera 6 again, transmitting the image information to the control module 10, setting laser polishing parameters and working time by the control module 10 according to the received image information, starting a laser polishing program, controlling the first laser emitter 1 to emit laser pulses to the surface of the detected workpiece, and performing laser polishing treatment on the detected workpiece until the preset laser polishing working time is reached;
s4, acquiring the image information of the detected workpiece surface after laser in the step S3 through the pan-tilt camera 6, transmitting the image information to the control module 10, then judging whether the roughness of the detected workpiece surface is less than 5 μm or not through the control module 10 according to the received image information, if not, repeating the step S3 until the roughness of the detected workpiece surface is less than 5 μm, and then executing the step S5; if yes, go directly to step S5;
and S5, the control module 10 starts a laser ultrasonic detection program to control the second laser emitter 2 and the laser ultrasonic receiver 3 to work, firstly, the second laser emitter 2 emits laser pulses to the surface of the workpiece to be detected after laser polishing in the step S3, the laser pulses excite laser ultrasonic signals on the surface of the workpiece to be detected, then, the laser ultrasonic signals excited on the surface of the workpiece to be detected are received by the laser ultrasonic receiver 3, the signals are converted into electric signals, and then the electric signals are transmitted to the control module 10 to be processed, so that the detection of the surface defects of the workpiece to be detected can be completed.
It is understood that, when determining whether the surface of the workpiece has an oxide layer or/and rust, and determining the roughness of the surface of the workpiece, the control module 10 may compare the image information with a plurality of images of the surface of the workpiece pre-stored in the computer database, and determine the roughness according to the comparison result.
In summary, the invention provides a laser composite system and method integrating cleaning, polishing and ultrasonic detection, which combines laser cleaning, laser polishing and laser ultrasonic detection; the method has the advantages that the rust on the surface of the workpiece is removed by adopting laser cleaning and laser polishing, and the smoothness of the surface of the workpiece is improved, so that the requirement on an optical interferometer in the laser ultrasonic detection process is reduced, the detection precision and accuracy of the rough workpiece are improved, the laser ultrasonic detection range is enlarged, the risk of introducing high voltage in the process of using the dual-wavelength interferometer is avoided, and the method is safe and reliable.
The above embodiments are provided to further explain the objects, technical solutions and advantages of the present invention in detail, and it should be understood that the above embodiments are only examples of the present invention and are not intended to limit the present invention, and any modifications, equivalents, improvements and the like made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (8)
1. A laser composite system integrating cleaning, polishing and ultrasonic detection is characterized by comprising a control module (10), and a first laser transmitter (1), a second laser transmitter (2) and a laser ultrasonic receiver (3) which are electrically connected with the control module (10);
the first laser transmitter (1) is used for transmitting laser pulses to the surface of a detected workpiece under the control of the control module (10) so as to carry out laser cleaning and laser polishing on the surface of the detected workpiece;
the second laser transmitter (2) is used for transmitting laser pulses to the detected workpiece under the control of the control module (10) and exciting a laser ultrasonic signal on the surface of the detected workpiece;
the laser ultrasonic receiver (3) is used for receiving laser ultrasonic signals excited by the surface of the detected workpiece, converting the received laser ultrasonic signals into electric signals and transmitting the electric signals to the control module (10) for processing, so that the surface defects of the detected workpiece can be detected.
2. The laser composite system integrating cleaning, polishing and ultrasonic testing as claimed in claim 1, further comprising a pan-tilt camera (6) electrically connected to the control module (10), wherein the pan-tilt camera (6) is used for taking pictures of the surface of the workpiece to be tested and transmitting the picture information to the control module (10) for processing.
3. The laser composite system integrating cleaning, polishing and ultrasonic detection as claimed in claim 2 is characterized in that the laser ultrasonic receiver (3) comprises an optical interferometer and a photoelectric detector, the optical interferometer is connected with the photoelectric detector, and the photoelectric detector is connected with the control module (10);
the optical interferometer is used for modulating a laser ultrasonic signal containing the detected workpiece surface defect information into an optical signal and then transmitting the optical signal to the photoelectric detector; the photoelectric detection is used for converting the modulated optical signal into an electric signal and then transmitting the electric signal to the control module (10).
4. The laser composite system integrating cleaning, polishing and ultrasonic detection as claimed in claim 3, wherein the optical interferometer in the laser ultrasonic receiver (3) is a dual-wavelength optical interferometer, an F-P cavity interferometer or a heterodyne interferometer.
5. The laser composite system integrating cleaning, polishing and ultrasonic detection as claimed in claim 4, further comprising a scanning galvanometer module (4), wherein a light input end of the scanning galvanometer module (4) faces a laser emitting end of the first laser emitter (1), and a light output end of the scanning galvanometer module (4) always faces a surface of a workpiece to be detected; the scanning galvanometer module (4) is used for adjusting the position of the surface of the detected workpiece, which is transmitted by the laser output by the first laser transmitter (1).
6. The laser composite system integrating cleaning, polishing and ultrasonic testing as claimed in claim 5, further comprising two collimating focal length coupling lens groups (5), wherein one collimating focal length coupling lens group (5) is disposed at the light exit end of the scanning galvanometer module (4), and the other collimating focal length coupling lens group (5) is disposed between the laser emitting end of the second laser emitter (2) and the optical path of the surface of the workpiece to be tested.
7. The laser composite system integrating cleaning, polishing and ultrasonic detection as claimed in claim 6 is characterized in that the first laser emitter (1) emits laser pulse light beam with power of 50-500W, pulse width of 10 ns-200 ns, repetition frequency of 1-10 kHz, spot diameter of 30 μm-1 mm and wavelength of 1060-1080 nm when performing laser cleaning operation;
when the first laser emitter (1) executes laser polishing operation, emitted power is 50-500W, pulse width is 100 ns-300 ns, repetition frequency is 100-500 kHz, spot diameter is 30 mu m-80 mm, and wavelength is 1060-1080 nm;
the second laser emitter (2) emits laser pulse beams with single pulse energy of 0.5-300 mJ, pulse width of 1-5 ns, repetition frequency of 10 Hz-10 kHz, power stability RMS of less than 0.2% and wavelength of 532nm or 1064nm or 1550 nm.
8. A method for detecting surface defects of a workpiece by using the laser composite system integrating cleaning, polishing and ultrasonic detection as claimed in any one of claims 2-7, which is characterized by comprising the following steps:
s1, acquiring image information of the surface of the detected workpiece through a pan-tilt camera (6), transmitting the image information to a control module (10), setting laser cleaning parameters and working time by the control module (10) according to the received image information, starting a laser cleaning program, controlling a first laser emitter (1) to emit laser pulses to the surface of the detected workpiece, and performing laser cleaning processing on the detected workpiece until the preset laser cleaning working time is reached;
s2, acquiring image information of the surface of the detected workpiece after being cleaned by laser in the step S1 through a pan-tilt camera (6), transmitting the image information to a control module (10), judging whether an oxide layer or/and rust exists on the surface of the detected workpiece by the control module (10) according to the received image information, if so, repeating the step S1 until no oxide layer or/and rust exists on the surface of the detected workpiece, and then executing the step S3; if not, directly executing step S3;
s3, acquiring image information of the surface of the detected workpiece through the pan-tilt camera (6) again, transmitting the image information to the control module (10), setting laser polishing parameters and working time according to the received image information through the control module (10), starting a laser polishing program, controlling the first laser emitter (1) to emit laser pulses to the surface of the detected workpiece, and performing laser polishing treatment on the detected workpiece until the preset laser polishing working time is reached;
s4, acquiring the image information of the detected workpiece surface after laser in the step S3 through a pan-tilt camera (6) and transmitting the image information to a control module (10), then judging whether the roughness of the detected workpiece surface is less than 5 mu m or not through the control module (10) according to the received image information, if not, repeating the step S3 until the roughness of the detected workpiece surface is less than 5 mu m, and then executing the step S5; if yes, go directly to step S5;
and S5, starting a laser ultrasonic detection program by the control module (10), controlling the second laser transmitter (2) and the laser ultrasonic receiver (3) to work, firstly transmitting laser pulses to the surface of the workpiece to be detected after laser polishing in the step S3 through the second laser transmitter (2), enabling the laser pulses to excite laser ultrasonic signals on the surface of the workpiece to be detected, then receiving the laser ultrasonic signals excited on the surface of the workpiece to be detected through the laser ultrasonic receiver (3), converting the signals into electric signals, and transmitting the electric signals to the control module (10) for processing, thus finishing the detection of the surface defects of the workpiece to be detected.
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112382592A (en) * | 2020-11-18 | 2021-02-19 | 林和 | Novel intelligent combined surface cleaning equipment and method |
| CN112658486A (en) * | 2020-12-03 | 2021-04-16 | 新沂市锡沂高新材料产业技术研究院有限公司 | Polishing method for laser processing of surface of crystal optical fiber |
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