CN212989153U - Laser ultrasonic nondestructive testing device - Google Patents
Laser ultrasonic nondestructive testing device Download PDFInfo
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- CN212989153U CN212989153U CN202021284220.9U CN202021284220U CN212989153U CN 212989153 U CN212989153 U CN 212989153U CN 202021284220 U CN202021284220 U CN 202021284220U CN 212989153 U CN212989153 U CN 212989153U
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Abstract
The utility model discloses a laser ultrasonic nondestructive testing device, which comprises a laser ultrasonic excitation part and a laser ultrasonic detection part, wherein the laser ultrasonic detection part comprises a signal processing module connected with the laser ultrasonic excitation part through a synchronous cable and a double-wave mixed interferometer connected with the signal processing module through a first signal line and a second signal line; the laser ultrasonic excitation part is used for outputting laser pulses to the surface of a piece to be detected, exciting ultrasonic signals on the surface of the piece to be detected and outputting synchronous electric pulse signals to the signal processing module of the laser ultrasonic detection part; the double-wave hybrid interferometer of the laser ultrasonic detection part is used for measuring an ultrasonic signal excited on the surface of the piece to be detected and outputting an ultrasonic measurement signal to the signal processing module; the signal processing module is used for receiving the synchronous electric pulse signals output by the laser ultrasonic excitation part and collecting the ultrasonic measurement signals output by the double-wave hybrid interferometer on the surface of the piece to be detected. The utility model has the advantages that: high sensitivity, good linearity, safety and reliability.
Description
Technical Field
The utility model relates to a laser supersound nondestructive test technical field, specific saying so relates to a laser supersound nondestructive test device.
Background
The ultrasonic nondestructive testing technology is a nondestructive testing technology commonly used for material structure flaw detection, and mainly comprises two types of traditional contact ultrasonic nondestructive testing and laser ultrasonic nondestructive testing; the contact ultrasonic nondestructive testing usually adopts a contact ultrasonic transducer as a probe for ultrasonic excitation and receiving, and is required to be in contact with a material to be tested, and a coupling agent is usually required to be coated to improve the ultrasonic coupling effect; the laser ultrasonic nondestructive detection is to adopt laser pulses with larger energy to excite ultrasonic waves on the surface of a material and detect the material through detection laser.
In the laser ultrasonic detection technology, the detection method of laser ultrasonic generally comprises a non-interference method and an interference method; non-interference methods mainly use light deflection technology, and interference methods are based on phase or frequency modulation of interferometer links caused by ultrasound.
At present, interferometers that can be used for implementing ultrasonic detection include heterodyne interferometers, time delay interferometers, confocal fabry-perot interferometers, double-wave hybrid interferometers, photo-induced electromotive force interferometers, and the like. Heterodyne interferometer and time delay interferometer usually require that the detection surface has better smoothness; the confocal Fabry-Perot interferometer can be suitable for a rough surface, has better sensitivity to intermediate frequency noise, but has the defects of insensitivity to low-frequency signals, nonlinear high-frequency response and the like; the double-wave mixed interferometer and the light induced electromotive force interferometer adopt a nonlinear optical crystal to realize the phase correction of a rough surface, thereby realizing the ultrasonic detection of the rough surface; however, in order to obtain higher detection sensitivity, the dual-wave hybrid interferometer usually needs to add a voltage as high as kV to the nonlinear optical crystal, and such a high voltage not only increases the cost and complexity of the device, but also has a great safety hazard.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a novel laser supersound nondestructive test device for solve the required operating voltage of the nonlinear optics crystal too high problem that two ripples mixed interferometer exists among the background art.
In order to achieve the purpose, the utility model adopts the following technical scheme:
a laser ultrasonic nondestructive testing device comprises a laser ultrasonic excitation part and a laser ultrasonic detection part, wherein the laser ultrasonic detection part comprises a signal processing module connected with the laser ultrasonic excitation part through a synchronous cable and a double-wave mixed interferometer connected with the signal processing module through a first signal line and a second signal line respectively;
the laser ultrasonic excitation part is used for outputting laser pulses to the surface of a piece to be detected, exciting ultrasonic signals on the surface of the piece to be detected, and outputting synchronous electric pulse signals to the signal processing module of the laser ultrasonic detection part through a synchronous cable while outputting the laser pulse signals;
the double-wave hybrid interferometer of the laser ultrasonic detection part is used for measuring an ultrasonic signal excited on the surface of the piece to be detected and outputting an ultrasonic measurement signal to the signal processing module;
the signal processing module is used for realizing the delay phase difference adjustment of the reference light path of the double-wave hybrid interferometer based on the received synchronous electric pulse signal on one hand, and is used for collecting the ultrasonic measurement signal of the surface of the to-be-detected part output by the double-wave hybrid interferometer on the other hand.
In the above technical solution, the dual-wave hybrid interferometer includes a single-frequency laser, a collimating lens, an 1/2 wave plate, a first polarization splitting prism, an electrically controlled adjustable mirror, a second polarization splitting prism, a 1/4 wave plate, a second focusing lens group, a photorefractive crystal, and a photodetector;
the single-frequency laser is used for outputting single-frequency laser;
the collimating lens is arranged on an output light path of the single-frequency laser and is used for collimating the single-frequency laser output by the single-frequency laser;
1/2 wave plate is arranged on the output light path of the collimating lens for carrying out polarization treatment on the collimated single-frequency laser;
the first polarization beam splitter prism is arranged on an output light path of the 1/2 wave plate and is used for carrying out beam splitting treatment on the single-frequency laser after being subjected to the polarization treatment of the 1/2 wave plate so as to divide the single-frequency laser into two beams, namely a beam of reference light and a beam of signal light;
the electric control adjustable reflector is arranged on a reference light output optical path of the first polarization splitting prism and is electrically connected with the signal processing module through a first signal line, and the electric control adjustable reflector is used for receiving the reference light split by the first polarization splitting prism and reflecting the reference light to the photorefractive crystal;
the second polarization splitting prism is arranged on a signal light output light path of the first polarization splitting prism, is used for receiving the signal light split by the first polarization splitting prism, sequentially passes through an 1/4 wave plate and a second focusing lens group to be focused on the surface of a to-be-detected element, is used for receiving modulated signal light which is modulated on the surface of the to-be-detected element by an ultrasonic signal and sequentially passes through the second focusing lens group and a 1/4 wave plate to be reflected, reflects the modulated signal light onto the photorefractive crystal and is mixed with reference light reflected onto the photorefractive crystal by an electric control adjustable reflector;
the photorefractive crystal is arranged at the intersection of the output light path of the electric control adjustable reflector and the output light path of the second polarization beam splitter prism, and is used for mixing the reference light reflected by the electric control adjustable reflector and the modulation signal light reflected by the second polarization beam splitter prism to form double-wave interference and focusing the generated double-wave interference light signal into the photoelectric detector;
the photoelectric detector is arranged on an output optical path of the photorefractive crystal and used for receiving the double-wave interference optical signal output by the photorefractive crystal, converting the received double-wave interference optical signal into an electric signal and then transmitting the electric signal to the signal processing module through a second signal wire;
the second focusing lens group comprises at least one second focusing lens and is uniformly distributed on an output light path of the 1/4 wave plates, and the second focusing lens group is used for focusing signal light transmitted by the 1/4 wave plates to the surface of the piece to be detected and collecting and focusing modulated signal light reflected by the surface of the piece to be detected to the 1/4 wave plate.
In the above technical solution, the laser ultrasonic excitation part includes a pulse laser and a first focusing lens group;
the pulse laser is used for outputting high-energy laser pulses and focusing the high-energy laser pulses on the surface of the to-be-detected piece through the first focusing lens group, so that the surface of the to-be-detected piece forms an ultrasonic signal under the action of the laser pulses;
the pulse laser is used for outputting an electric pulse signal synchronous with the high-energy laser pulse and transmitting the electric pulse signal to the signal processing module of the laser ultrasonic detection part through a synchronous cable while outputting the laser pulse;
the first focusing lens group comprises at least one first focusing lens and is uniformly distributed on an output light path of the pulse laser, and the first focusing lens group is used for focusing high-energy laser pulses output by the pulse laser to the surface of a workpiece to be detected.
In the above technical solution, the signal processing module includes a delay circuit, a PZT driving circuit, an FPGA module, a data sampling circuit, and an amplifying circuit; the FPGA module is respectively and electrically connected with the delay circuit, the PZT driving circuit and the data sampling circuit, and the delay circuit is electrically connected with a pulse laser in the laser ultrasonic excitation part through a synchronous cable; the PZT driving circuit is electrically connected with the electric control adjustable reflector through a first signal wire; the data sampling circuit is electrically connected with the amplifying circuit; the amplifying circuit is electrically connected with the photoelectric detector through a second signal wire.
In the above technical scheme, the single frequency laser adopts a helium-neon laser or a semiconductor laser with a wave band of 1.5 um.
In the above technical solution, the electrically controlled adjustable mirror is a PZT mirror having a response speed greater than 10 kHz.
In the technical scheme, the photorefractive crystal is a bismuth silicate crystal with photorefractive response time longer than 1 ms.
In the above technical solution, the photodetector is a photodetector whose response wavelength covers the output wavelength of the single-frequency laser and whose response speed is greater than 10 MHz.
In the technical scheme, the pulse laser adopts a high-energy pulse laser which periodically outputs a pulse with the pulse width of ns level, the pulse energy of more than or equal to mJ level, the pulse repetition frequency of less than 1kHz and can externally provide synchronous electric pulse signals.
Compared with the prior art, the utility model has the advantages that: adopt two ripples interferometer that mix to realize the detection to the supersound, can adapt to rough detection surface, through the scheduling arrangement of configuration laser supersound excitation portion and laser ultrasonic detection portion, be interrupted and carry out link adjustment and survey, under the condition of guaranteeing to the phase matching and the high-efficient interference of rough surface, through the quick phase adjustment of short time, alright obtain the operating point of high sensitivity and linearity, avoided the high voltage risk among the traditional approach, safe and reliable.
Drawings
Fig. 1 is a schematic structural view of the present invention;
fig. 2 is a schematic circuit diagram of the signal processing module of the present invention;
fig. 3 is a schematic timing diagram of ultrasonic signal detection according to the present invention;
description of reference numerals:
100. a laser ultrasonic excitation part; 101. a pulsed laser; 102. a first focusing lens group;
200. a laser ultrasonic detection section; 201. a single-frequency laser; 202. a collimating lens; 203. 1/2 a wave plate; 204. a first polarization splitting prism; 205. an electrically controlled adjustable mirror; 206. a second polarization beam splitter prism; 207. 1/4 a wave plate; 208. a second focusing lens group; 209. a photorefractive crystal; 210. a photodetector; 211. a signal processing module; 211a, a delay circuit; 211b, a PZT driving circuit; 211c, an FPGA module; 211d, a data sampling circuit; 211e, an amplifier circuit;
300. a synchronization cable;
400. a first signal line;
500. a second signal line;
600. and (5) detecting the piece.
Detailed Description
In order to make the technical means, the creation features, the achievement purposes and the functions of the present invention easy to understand and understand, how to implement the present invention is further explained below with reference to the accompanying drawings and the detailed description.
The utility model provides a pair of laser supersound nondestructive test device, refer to fig. 1 and show, contain laser supersound excitation portion 100 and laser ultrasonic detection portion 200, link to each other through synchronous cable 300 between these two parts.
Specific theory, in the utility model discloses in: referring to fig. 1, the laser ultrasonic excitation portion 100 includes a pulse laser 101 and a first focusing lens group 102; the pulse laser 101 is used for outputting high-energy laser pulses and focusing the high-energy laser pulses on the surface of the to-be-detected workpiece 600 through the first focusing lens group 102, so that the surface of the to-be-detected workpiece 600 forms an ultrasonic signal under the action of the laser pulses; the pulse laser 101 is also used for outputting an electric pulse signal synchronized with the high-energy laser pulse while outputting the laser pulse and transmitting the electric pulse signal to the signal processing module 211 of the laser ultrasonic detection part 200 through the synchronization cable 300; the first focusing lens group 102 comprises at least one first focusing lens, and is uniformly distributed on the output optical path of the pulse laser 101, and is used for focusing the high-energy laser pulses output by the pulse laser 101 onto the surface of the object 600 to be detected.
Specific theory, in the utility model discloses in: referring to fig. 1, the laser ultrasonic detection unit 200 includes a signal processing module 211 connected to the pulse laser 101 of the laser ultrasonic excitation unit 100 through a synchronization cable 300, and a dual-wave hybrid interferometer connected to the signal processing module 211 through a first signal line 400 and a second signal line 500, respectively;
the dual-wave hybrid interferometer is mainly used for measuring ultrasonic signals excited on the surface of the to-be-detected element 600 and outputting ultrasonic measurement signals to the signal processing module 211;
the signal processing module 211 is configured to adjust a delay phase difference of a reference optical path signal of the dual-wave hybrid interferometer based on the received synchronous electrical pulse signal; and on the other hand, for acquiring ultrasonic measurement signals of the surface of the object 600 to be detected output by the double wave hybrid interferometer.
More specifically, referring to fig. 1, the dual-wave hybrid interferometer specifically comprises a single-frequency laser 201, a collimating lens 202, an 1/2 wave plate 203, a first polarization splitting prism 204, an electrically controlled adjustable mirror 205, a second polarization splitting prism 206, a 1/4 wave plate 207, a second focusing lens group 208, a photorefractive crystal 209, and a photodetector 210;
the single-frequency laser 201 is used for outputting single-frequency laser; the collimating lens 202 is disposed on the output light path of the single-frequency laser 201 and is configured to collimate the single-frequency laser output by the single-frequency laser 201; 1/2 wave plate 203 is arranged on the output light path of the collimating lens 202 and is used for carrying out polarization treatment on the collimated single-frequency laser; the first polarization beam splitter prism 204 is arranged on the output light path of the 1/2 wave plate 203 and is used for carrying out beam splitting processing on the single-frequency laser after polarization processing of the 1/2 wave plate 203 so as to divide the single-frequency laser into two beams, namely a beam of reference light and a beam of signal light; the electrically-controlled adjustable mirror 205 is arranged on the reference light output optical path of the first polarization splitting prism 204 and electrically connected with the signal processing module 211 through the first signal line 400, and the electrically-controlled adjustable mirror 205 is used for receiving the reference light split by the first polarization splitting prism 204 and reflecting the reference light to the photorefractive crystal 209; the second polarization splitting prism 206 is arranged on the signal light output light path of the first polarization splitting prism 204, the second polarization splitting prism 206 is firstly used for receiving the signal light split by the first polarization splitting prism 204, and focusing the signal light to the surface of the to-be-detected element 600 through 1/4 wave plates 207 and a second focusing lens group 208 in sequence, and then is used for receiving the modulated signal light which is modulated on the surface of the to-be-detected element 600 through ultrasonic signals and reflected back through the second focusing lens group 208 and a 1/4 wave plate 207 in sequence, reflecting the modulated signal light to the photorefractive crystal 209 and mixing the reference light reflected to the photorefractive crystal 209 through the electrically controlled adjustable reflector 205; the photorefractive crystal 209 is disposed at the intersection of the output optical paths of the electrically controlled adjustable mirror 205 and the second polarization splitting prism 206, and is configured to mix the reference light reflected by the electrically controlled adjustable mirror 205 with the modulated signal light reflected by the second polarization splitting prism 206 to form dual-wave interference, and focus the generated dual-wave interference optical signal to the photodetector 210; the photodetector 210 is disposed on the output optical path of the photorefractive crystal 209, and is configured to receive the dual-wave interference optical signal output by the photorefractive crystal 209, convert the received dual-wave interference optical signal into an electrical signal, and transmit the electrical signal to the signal processing module 211 through the second signal line 500; the second focusing lens group 208 comprises at least one second focusing lens and is uniformly arranged on the output optical path of the 1/4 wave plate 207, and the second focusing lens group 208 is used for focusing the signal light transmitted by the 1/4 wave plate 207 to the surface of the object 600 to be detected and collecting and focusing the modulated signal light reflected by the surface of the object 600 to be detected to the 1/4 wave plate 207.
More specifically, referring to fig. 2, the signal processing module 211 includes a delay circuit 211a, a PZT driving circuit 211b, an FPGA module 211c, a data sampling circuit 211d, and an amplifying circuit 211 e; the FPGA module 211c is electrically connected to the delay circuit 211a, the PZT driving circuit 211b, and the data sampling circuit 211d, respectively, the delay circuit 211a is electrically connected to the pulse laser 101 in the laser ultrasonic excitation part 100 through the synchronization cable 300, the PZT driving circuit 211b is electrically connected to the electrically controlled adjustable mirror 205 through the first signal line 400, the data sampling circuit 211d is electrically connected to the amplifying circuit 211e, and the amplifying circuit 211e is electrically connected to the photodetector 210 through the second signal line 500;
on one hand, the signal processing module 211 receives the synchronous electric pulse signal output by the high-energy pulse laser 101 through the delay circuit 211a, and after a proper delay, the FPGA module drives the electrically-controlled adjustable mirror 205 through the PZT driving circuit 211b to control the electrically-controlled adjustable mirror 205; on the other hand, the ultrasonic measurement electrical signal output by the photoelectric detector 210 is received by the amplifying circuit 211e, amplified and output to the data sampling circuit 211d, and then the FPGA module 211c controls the data sampling circuit 211d to sample data.
In the present invention, the single-frequency laser 201 may be a helium-neon laser or a semiconductor laser with a 1.5um waveband; preferably a semiconductor laser in the 1.5um band.
In the present invention, the electrically controlled adjustable mirror 205 is a PZT mirror having a response speed greater than 10 kHz.
In the present invention, the photorefractive crystal 209 is a bismuth silicate crystal with a photorefractive response time greater than 1 ms.
In the present invention, the photodetector 210 employs a photodetector whose response wavelength can cover the output wavelength of the single-frequency laser 201, and whose response speed is greater than 10 MHz.
The utility model discloses in, what pulse laser 101 adopted is that periodic output pulse width is ns rank, pulse energy is more than or equal to the mJ rank, pulse repetition frequency is less than 1kHz to can externally provide synchronous electric pulse signal's high energy pulse laser.
In the present invention, the delay circuit 211a is a pulse delay circuit having a delay amount larger than a laser pulse generation period output by the pulse laser 101 in the laser ultrasonic excitation portion 100; and the value range of the delay amount alpha of the delay circuit 211a is 0.7-0.9 laser pulse generation cycles, preferably 0.8 laser pulse generation cycles.
In the present invention, the data sampling circuit 211d employs a high-speed AD chip with a data sampling rate greater than 10 MSPS.
The utility model provides a laser supersound nondestructive test device, its principle that realizes ultrasonic testing specifically as follows:
the first step is as follows: in the laser ultrasonic excitation part 100, a pulse laser 101 outputs a high-energy laser pulse signal, and the high-energy laser pulse signal is focused on the surface of a to-be-detected piece 600 through a first focusing lens group 102, so that the surface of the to-be-detected piece 600 forms an ultrasonic signal under the action of laser pulses; meanwhile, the pulse laser 101 outputs a synchronous electrical pulse signal synchronized with the high-energy laser pulse signal to the signal processing module 211 in the laser ultrasonic detection part 200 through the synchronous cable 300;
in the laser ultrasonic detection part 200, a single-frequency laser 201 of a dual-wave hybrid interferometer outputs a single-frequency laser, the single-frequency laser is collimated by a collimating lens 202, and then passes through 1/2 wave plates 203 to realize polarization adjustment, and is split by a first polarization splitting prism 204 (i.e. the single-frequency laser 201 outputs the single-frequency laser and is split into two beams, one beam is a reference beam and the other beam is a signal beam), then the split reference beam is reflected to a photorefractive crystal 208 by an electrically controlled adjustable reflector 205, the split signal beam is focused to the surface of a to-be-detected element 600 by a second polarization splitting prism 206, a 1/4 wave plate 207 and a second focusing lens group 208 in sequence, and after being modulated by an ultrasonic signal on the surface of the to-be-detected element 600, the split signal beam is received by the second focusing lens group 208 and subjected to polarization adjustment by a 1/4 wave plate in sequence, and then reaches a second polarization splitting prism 206, and is reflected to the photorefractive crystal, and is mixed with the reference light reflected to the photorefractive crystal 208 by the electrically controlled adjustable reflector 205 to form a double wave mixture, then passes through the photorefractive crystal 209 and is transmitted to the photodetector 210, and finally the received double wave mixed optical signal is converted into an electric signal by the photodetector 210 and is transmitted to the signal processing module 211;
the second step is that: in the signal processing module 211, after the delay circuit 211a delays the time when the signal processing module 211 starts to operate by α laser pulse periods (α has a value ranging from 0.7 to 0.9, preferably 0.8) based on the received synchronous electrical pulse signal, the FPGA module 211c controls the electrically controllable adjustable mirror 205 through the PZT driving circuit 211b, that is, the PZT driving circuit 211b adjusts the control voltage of the electrically controllable adjustable mirror 205 to the U1 shown in fig. 3, so that the delay of the reference optical path of the dual-wave hybrid interferometer corresponding to the electrically controllable adjustable mirror 205 changes about 1/4 single-frequency laser wavelengths, that is, the reference optical path of the dual-wave hybrid interferometer introduces a phase difference of about 1/4 single-frequency laser wavelengths, so as to improve the linearity and sensitivity of the operating point of the dual-wave hybrid interferometer;
the third step: the control voltage of the electrically controlled adjustable mirror 205 is maintained at U1 until the synchronous electric pulse signal arrives again for a period of time (for example, 50us), and the data sampling circuit 211d of the signal processing module 211 is used to perform data sampling on the laser ultrasound for a certain period of time (for example, 50us), that is, specifically, the amplifying circuit 211e in the signal processing module 211 amplifies the received ultrasonic detection electric signal transmitted by the photodetector 210, and then transmits the amplified ultrasonic detection electric signal to the data sampling circuit 211d, and the FPGA module 211c controls the data sampling circuit 211d to perform high-speed data sampling to obtain the ultrasonic signal of the surface detection point of the to-be-detected object;
the fourth step: after the data sampling circuit 211d of the signal processing module 211 samples the laser ultrasound for a certain time (for example, 50us), the FPGA module 211c of the signal processing module 211 resets the control voltage of the electrically controlled adjustable mirror 205 to U0 shown in fig. 3;
the fifth step: and repeating the steps from one to four to realize the continuous monitoring of the ultrasonic signals on the surface of the piece to be detected 600.
Fig. 3 is a schematic diagram of the detection time sequence of the ultrasonic signal based on the laser ultrasonic nondestructive testing device of the present invention; wherein: u0 represents the initial stage control voltage of the electrically controlled adjustable mirror 205, which may be 0V; u1 represents the control voltage of the electrically controlled tunable mirror 205 in the working stage (detection node), and its value is the voltage value corresponding to the adjustment of the light intensity of the reference light output by the dual-wave hybrid interferometer to half of the maximum value; t1 represents the time for the data sampling circuit 211d to acquire the laser ultrasonic data on the surface of the piece 600 to be detected in one synchronous electric pulse signal generation cycle; t2 represents the delay amount of the delay circuit 211a in the signal processing module 211 during one generation period of the synchronization electric pulse signal; the sawtooth lines represent ultrasonic signals excited by the laser ultrasonic excitation part 100 on the surface of the piece 600 to be detected;
when the control voltage of the electrically controlled adjustable mirror 205 is in the stage U0, the electrically controlled adjustable mirror 205 remains stationary; when the control voltage of the electrically controllable tunable mirror 205 is at the stage U1, the electrically controllable tunable mirror 205 may move slightly, introducing a phase difference of about 1/4 single-frequency laser wavelengths to the reference light of the two-wave hybrid interferometer.
In the double-wave hybrid interferometer, two beams (signal light and reference light) are incident into the photorefractive crystal and are coherent to form a dynamic holographic grating, and the holographic grating can diffract a small part of the two beams to the optical path of the other beam respectively, and the intensity and the phase of the two beams are exchanged in the diffraction process, namely double-wave mixing is carried out; after the light passes through the photorefractive crystal, the waveforms of the two beams of light are completely matched, and high-efficiency interference can be realized. Therefore, the slow response characteristic of the photorefractive crystal can be utilized to quickly adjust the phase of the link, the working point of the interferometer is adjusted to obtain the working point with high sensitivity and linearity, and then the phase of the link is restored to the original position after short-time detection is realized.
Finally, the above description is only the embodiments of the present invention, not limiting the scope of the present invention, all the equivalent structures or equivalent processes that are used in the specification and the attached drawings or directly or indirectly applied to other related technical fields are included in the patent protection scope of the present invention.
Claims (9)
1. The utility model provides a laser supersound nondestructive test device, contains laser supersound excitation (100) and laser supersound probe (200), its characterized in that: the laser ultrasonic detection part (200) comprises a signal processing module (211) connected with the laser ultrasonic excitation part (100) through a synchronous cable (300), and a double-wave hybrid interferometer connected with the signal processing module (211) through a first signal line (400) and a second signal line (500) respectively;
the laser ultrasonic excitation part (100) is used for outputting laser pulses to the surface of a piece to be detected (600), exciting ultrasonic signals on the surface of the piece to be detected (600), and outputting synchronous electric pulse signals to the signal processing module (211) of the laser ultrasonic detection part (200) through a synchronous cable (300) while outputting the laser pulse signals;
the double-wave hybrid interferometer of the laser ultrasonic detection part (200) is used for measuring an ultrasonic signal excited on the surface of the to-be-detected piece (600) and outputting an ultrasonic measurement signal to the signal processing module (211);
the signal processing module (211) is used for realizing the delay phase difference adjustment of the reference light path of the double-wave hybrid interferometer based on the received synchronous electric pulse signal on one hand, and is used for collecting the ultrasonic measurement signal of the surface of the to-be-detected element (600) output by the double-wave hybrid interferometer on the other hand.
2. The laser ultrasonic nondestructive inspection apparatus according to claim 1, characterized in that: the dual-wave hybrid interferometer comprises a single-frequency laser (201), a collimating lens (202), an 1/2 wave plate (203), a first polarization splitting prism (204), an electrically controlled adjustable reflector (205), a second polarization splitting prism (206), a 1/4 wave plate (207), a second focusing lens group (208), a photorefractive crystal (209) and a photoelectric detector (210);
wherein, the single-frequency laser (201) is used for outputting single-frequency laser;
the collimating lens (202) is arranged on an output light path of the single-frequency laser (201) and is used for collimating single-frequency laser output by the single-frequency laser (201);
1/2 wave plate (203) is arranged on the output light path of the collimating lens (202) and is used for carrying out polarization treatment on the collimated single-frequency laser;
the first polarization beam splitter prism (204) is arranged on an output light path of the 1/2 wave plate (203) and is used for carrying out beam splitting processing on the single-frequency laser polarized by the 1/2 wave plate (203) so as to divide the single-frequency laser into two beams, namely a beam of reference light and a beam of signal light;
the electric control adjustable reflector (205) is arranged on a reference light output optical path of the first polarization splitting prism (204) and is electrically connected with the signal processing module (211) through a first signal line (400), and the electric control adjustable reflector (205) is used for receiving the reference light split by the first polarization splitting prism (204) and reflecting the reference light to the photorefractive crystal (209);
the second polarization splitting prism (206) is arranged on the signal light output light path of the first polarization splitting prism (204), is used for receiving the signal light split by the first polarization splitting prism (204), sequentially passes through 1/4 wave plates (207) and a second focusing lens group (208) to be focused on the surface of the to-be-detected element (600), is used for receiving modulated signal light which is modulated on the surface of the to-be-detected element (600) by ultrasonic signals and sequentially reflected back by the second focusing lens group (208) and a 1/4 wave plate (207), reflects the modulated signal light onto the photorefractive crystal (209) and mixes the reference light reflected onto the photorefractive crystal (209) by the electric control adjustable reflector (205);
the photorefractive crystal (209) is arranged at the intersection of the output light paths of the electric control adjustable reflector (205) and the second polarization splitting prism (206) and is used for mixing the reference light reflected by the electric control adjustable reflector (205) and the modulation signal light reflected by the second polarization splitting prism (206) to form double-wave interference and focusing the generated double-wave interference light signal to the photoelectric detector (210);
the photoelectric detector (210) is arranged on an output optical path of the photorefractive crystal (209) and is used for receiving the double-wave interference optical signal output by the photorefractive crystal (209), converting the received double-wave interference optical signal into an electric signal and then transmitting the electric signal to the signal processing module (211) through a second signal wire (500);
the second focusing lens group (208) comprises at least one second focusing lens and is uniformly arranged on an output light path of the 1/4 wave plate (207), and the second focusing lens group (208) is used for focusing signal light transmitted by the 1/4 wave plate (207) to the surface of the to-be-detected object (600) and collecting and focusing modulated signal light reflected by the surface of the to-be-detected object (600) to the 1/4 wave plate (207).
3. The laser ultrasonic nondestructive inspection apparatus according to claim 2, characterized in that: the laser ultrasonic excitation part (100) comprises a pulse laser (101) and a first focusing lens group (102);
the pulse laser (101) is used for outputting high-energy laser pulses and focusing the high-energy laser pulses on the surface of the to-be-detected piece (600) through the first focusing lens group (102), so that the surface of the to-be-detected piece (600) forms an ultrasonic signal under the action of the laser pulses;
the pulse laser (101) is used for outputting an electric pulse signal synchronous with the high-energy laser pulse while outputting the laser pulse and transmitting the electric pulse signal to a signal processing module (211) of the laser ultrasonic detection part (200) through a synchronous cable (300);
the first focusing lens group (102) comprises at least one first focusing lens and is uniformly distributed on an output light path of the pulse laser (101), and the first focusing lens group (102) is used for focusing high-energy laser pulses output by the pulse laser (101) to the surface of the to-be-detected workpiece (600).
4. The laser ultrasonic nondestructive inspection apparatus according to claim 3, characterized in that: the signal processing module (211) comprises a time delay circuit (211a), a PZT driving circuit (211b), an FPGA module (211c), a data sampling circuit (211d) and an amplifying circuit (211 e);
the FPGA module (211c) is respectively and electrically connected with the delay circuit (211a), the PZT driving circuit (211b) and the data sampling circuit (211d), and the delay circuit (211a) is electrically connected with the pulse laser (101) in the laser ultrasonic excitation part (100) through a synchronous cable (300); the PZT driving circuit (211b) is electrically connected with the electric control adjustable reflecting mirror (205) through a first signal wire (400); the data sampling circuit (211d) is electrically connected with the amplifying circuit (211 e); the amplifying circuit (211e) is electrically connected to the photodetector (210) through a second signal line (500).
5. The laser ultrasonic nondestructive inspection apparatus according to claim 2, characterized in that: the single-frequency laser (201) adopts a helium-neon laser or a semiconductor laser with a wave band of 1.5 um.
6. The laser ultrasonic nondestructive inspection apparatus according to claim 2, characterized in that: the electric control adjustable reflector (205) adopts a PZT reflector with response speed larger than 10 kHz.
7. The laser ultrasonic nondestructive inspection apparatus according to claim 2, characterized in that: the photorefractive crystal (209) is a bismuth silicate crystal with a photorefractive response time of more than 1 ms.
8. The laser ultrasonic nondestructive inspection apparatus according to claim 2, characterized in that: the photoelectric detector (210) adopts a photoelectric detector which responds to the wavelength covering the output wavelength of the single-frequency laser (201) and has the response speed higher than 10 MHz.
9. The laser ultrasonic nondestructive inspection apparatus according to claim 3, characterized in that: the pulse laser (101) is a high-energy pulse laser which periodically outputs a pulse with the pulse width of ns level, the pulse energy of more than or equal to mJ level, the pulse repetition frequency of less than 1kHz and can externally provide synchronous electric pulse signals.
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