CN114018824A - Single-head laser ultrasonic equipment and method based on fiber Bragg grating - Google Patents

Single-head laser ultrasonic equipment and method based on fiber Bragg grating Download PDF

Info

Publication number
CN114018824A
CN114018824A CN202111129556.7A CN202111129556A CN114018824A CN 114018824 A CN114018824 A CN 114018824A CN 202111129556 A CN202111129556 A CN 202111129556A CN 114018824 A CN114018824 A CN 114018824A
Authority
CN
China
Prior art keywords
laser
beam splitter
bragg grating
fiber bragg
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN202111129556.7A
Other languages
Chinese (zh)
Other versions
CN114018824B (en
Inventor
李震
刘鉴霆
周永祥
王亦军
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Baoyu Wuhan Laser Technology Co ltd
Original Assignee
Baoyu Wuhan Laser Technology Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Baoyu Wuhan Laser Technology Co ltd filed Critical Baoyu Wuhan Laser Technology Co ltd
Priority to CN202111129556.7A priority Critical patent/CN114018824B/en
Publication of CN114018824A publication Critical patent/CN114018824A/en
Application granted granted Critical
Publication of CN114018824B publication Critical patent/CN114018824B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1702Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01HMEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H9/00Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
    • G01H9/004Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means using fibre optic sensors
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01Arrangements or apparatus for facilitating the optical investigation

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Laser Beam Processing (AREA)

Abstract

The invention relates to a single-head laser ultrasonic device based on a fiber Bragg grating, which comprises: the first light splitting prism is arranged at the emergent end of the laser; the galvanometer is arranged at one of the emergent ends of the first beam splitting prism; the energy attenuator is arranged at the other emergent end of the first beam splitter prism; the second light splitting prism is arranged at the emergent end of the energy attenuator; the fiber Bragg grating is arranged at one of the emergent ends of the second beam splitter prism; the third light splitting prism is arranged at the emergent end of the fiber Bragg grating; the first field lens is arranged at one of the emergent ends of the third beam splitter prism; the fourth light splitting prism is arranged at the other emergent end of the third light splitting prism; the first reflector is arranged between the other emergent end of the third light splitting prism and the fourth light splitting prism; the photoelectric detector is arranged at the emergent end of the fourth light splitting prism; the signal processor is electrically connected with the photoelectric detector. The beneficial effects are that: the laser excitation and the laser interference use the same light source, and the volume and the weight are greatly reduced.

Description

Single-head laser ultrasonic equipment and method based on fiber Bragg grating
Technical Field
The invention relates to the technical field of laser nondestructive testing, in particular to single-head laser ultrasonic equipment and a method based on fiber Bragg gratings.
Background
Laser ultrasound is a non-contact, high-precision, non-destructive novel ultrasonic detection technique, which utilizes laser pulses to excite ultrasonic waves in a detected workpiece and utilizes laser beams to detect the propagation of the ultrasonic waves, thereby acquiring workpiece information, such as workpiece thickness, internal and surface defects, material parameters and the like. The laser ultrasonic equipment used at present comprises two parts of laser excitation and laser interference receiving, the equipment is large in size, and the interference problem exists between the equipment, so that the intensity of laser ultrasonic flaw detection signals is influenced.
Disclosure of Invention
The technical problem to be solved by the present invention is to provide a single-head laser ultrasonic apparatus and method based on fiber bragg grating, so as to overcome the defects in the prior art.
The technical scheme for solving the technical problems is as follows: a fiber bragg grating based single head laser ultrasound device comprising:
the first beam splitting prism is arranged at the emergent end of the laser and is provided with two emergent ends;
a galvanometer arranged at one of the exit ends of the first beam splitting prism;
an energy attenuator arranged at the other exit end of the first beam splitting prism;
the second beam splitting prism is arranged at the emergent end of the energy attenuator and is provided with two emergent ends;
the fiber Bragg grating is arranged at one of the emergent ends of the second beam splitter prism;
the third light splitting prism is arranged at the emergent end of the fiber Bragg grating and is provided with two emergent ends;
the first field lens is arranged at one of the emergent ends of the third beam splitter prism;
a fourth light splitting prism arranged at the other exit end of the third light splitting prism;
a first reflective mirror disposed between the other exit end of the third dichroic prism and the fourth dichroic prism;
the photoelectric detector is arranged at the emergent end of the fourth light splitting prism;
and the signal processor is electrically connected with the photoelectric detector.
On the basis of the technical scheme, the invention can be further improved as follows.
Further, the optical switch is arranged between the emergent end of the first beam splitter prism and the galvanometer.
Further, the optical switch further comprises a second reflective mirror which is arranged between the emergent end of the first beam splitter prism and the optical switch.
Further, the field lens system also comprises a second field lens which is arranged at the emergent end of the galvanometer.
Further, the energy attenuator is an attenuation sheet.
Further, the attenuation energy of the attenuation sheet is more than 90%.
Further, the laser employs a high-energy continuous laser.
Further, the laser emits pulsed laser light with wave bands of 532nm and 1064 nm.
Further, the energy density of the pulse laser emitted by the laser is more than 500uJ/cm2
A single-head laser ultrasonic method based on fiber Bragg grating comprises the following steps:
s100, emitting pulse laser by a laser, and dividing the pulse laser into two beams by a first beam splitter prism;
s200, reflecting a beam of pulse laser divided by the first beam splitter prism to an optical switch through a second reflector, controlling light emission through the optical switch to be point interval light emission, synchronizing light emission time according to the scanning frequency of a vibrating mirror, emitting light through the optical switch to reach the vibrating mirror, forming area array scanning under the action of the vibrating mirror, and then fixing the field and focusing on a workpiece through a second field lens;
s300, attenuating energy of the other beam of pulse laser divided by the first beam splitter through an energy attenuator;
s400, after the energy is attenuated by the energy attenuator, the pulse laser with the frequency of f0 is emitted to the second beam splitter prism and is split into two beams,
one beam is reflected and folded to a fourth beam splitting prism by the first reflector, and is incident on the photoelectric detector after passing through the fourth beam splitting prism;
the other beam penetrates through the second light splitting prism along the original direction and then is incident on the fiber Bragg grating, the frequency of the other beam is f0+ fb, and the vibration speed of the object takes a positive sign along the incident light direction, otherwise takes a negative sign;
s500, transmitting the light beam with the frequency of f0+ fb to the first field lens 8 through the third beam splitter prism 7, emitting the light beam from the first field lens 8 to a workpiece, reflecting the light beam incident on the workpiece by the workpiece, generating Doppler shift on the reflected light caused by the vibration of an object, enabling the frequency of the reflected light to be f0+ fb + ± Δ f, reflecting the reflected light by the third beam splitter prism and the fourth beam splitter prism to reach the photodetector, and mixing the reflected light with the other light to generate an interference light signal fb + ± Δ f;
s600, outputting an alternating current signal with the frequency of fb +/-deltaf by the photoelectric detector;
s700, the signal processor collects the alternating current signal output by the photoelectric detector, and the vibration speed of the workpiece is obtained according to the alternating current signal, so that signal visualization can be performed through visualization software, and defects are identified.
The invention has the beneficial effects that:
1) the vibration is measured by using optical fiber sensing, so that the laser ultrasonic measurement sensitivity can be greatly improved;
2) the fiber Bragg grating is used as an interference measurement means for measuring high-frequency off-plane micro vibration (vibration signals of a rough plane can be measured), and can be used for measuring ultrasonic vibration;
3) the laser excitation and the laser interference use the same light source, so the volume and the weight are greatly reduced;
4) laser ultrasonic lattice excitation is realized by using a continuous laser and an optical switch;
5) the low-frequency noise caused by the environment such as air flow can be automatically filtered;
6) the surface nondestructive detection can be carried out in a long distance;
7) laser excitation and laser receiving are synchronous in real time;
8) the direction of vibration can be judged, and the identification of laser ultrasonic nondestructive testing is facilitated.
Drawings
Fig. 1 is an optical path diagram of a single-head laser ultrasonic device based on a fiber bragg grating according to the present invention.
In the drawings, the components represented by the respective reference numerals are listed below:
1. the laser comprises a laser device, 2, a first light splitting prism, 3, a galvanometer, 4, an energy attenuator, 5, a second light splitting prism, 6, a fiber Bragg grating, 7, a third light splitting prism, 8, a first field lens, 9, a fourth light splitting prism, 10, a first reflector, 11, a photoelectric detector, 12, a signal processor, 13, an optical switch, 14, a second reflector, 15 and a second field lens.
Detailed Description
The principles and features of this invention are described below in conjunction with the following drawings, which are set forth by way of illustration only and are not intended to limit the scope of the invention.
Example 1
As shown in fig. 1, a single-head laser ultrasonic apparatus based on a fiber bragg grating includes:
the device comprises a laser 1, a first light splitting prism 2, a vibrating mirror 3, an energy attenuator 4, a second light splitting prism 5, a fiber Bragg grating 6, a third light splitting prism 7, a first field lens 8, a fourth light splitting prism 9, a first reflective mirror 10, a photoelectric detector 11 and a signal processor 12;
the laser 1 is used for emitting pulse laser;
the first beam splitter prism 2 is arranged at the emitting end of the laser 1, and the first beam splitter prism 2 has two emitting ends, that is, the first beam splitter prism 2 can divide the pulse laser emitted from the laser 1 into two beams to be emitted;
the galvanometer 3 is arranged at one of the emergent ends of the first beam splitter prism 2, and the pulse laser emitted by the first beam splitter prism 2 enters the galvanometer 3 so as to convert the point laser into area array laser;
the energy attenuator 4 is arranged at the other emergent end of the first beam splitter prism 2, the pulse laser emitted by the first beam splitter prism 2 enters the energy attenuator 4, and the energy of the laser is attenuated by the energy attenuator 4;
the second beam splitter prism 5 is arranged at the exit end of the energy attenuator 4, the second beam splitter prism 5 is provided with two exit ends, and the pulse laser emitted by the energy attenuator 4 is incident on the fiber Bragg grating 6 after passing through the second beam splitter prism 5;
the fiber Bragg grating 6 is arranged at one of the emergent ends of the second beam splitter prism 5 and used for carrying out frequency modulation on the incident pulse laser;
the fiber Bragg grating 6 is an optical fiber made of some photosensitive materials, when the optical fiber is irradiated by ultraviolet light, the distribution of refractive index along with light intensity can be generated, if the refractive index in the optical fiber is in a periodic distribution rule, a Bragg diffraction grating structure, namely a Bragg grating, can be formed, the period length of the Bragg grating can be influenced by vibration, the structure of the grating is influenced, and therefore the central wavelength reflected by the grating is changed;
the third light splitting prism 7 is arranged at the emergent end of the fiber Bragg grating 6 and is provided with two emergent ends, and the pulse laser emitted by the fiber Bragg grating 6 is transmitted through the third light splitting prism 7;
the first field lens 8 is arranged at one of the emergent ends of the third beam splitter prism 7, the pulse laser transmitted by the third beam splitter prism 7 enters the first field lens 8, and the laser is subjected to field setting and focusing by the first field lens 8 and then acts on a workpiece;
the fourth light splitting prism 9 is arranged at the other outgoing end of the third light splitting prism 7, light incident on a workpiece is reflected by the workpiece, the vibration of an object causes Doppler frequency shift of reflected light, and the reflected light is reflected by the third light splitting prism 7 and the fourth light splitting prism 9 and reaches the photoelectric detector 11;
the first reflective mirror 10 is arranged between the other exit end of the third beam splitter prism 7 and the fourth beam splitter prism 9, and the pulse laser light split by the second beam splitter prism 5 is reflected to the fourth beam splitter prism 9 through the first reflective mirror 10 and then is transmitted to the photoelectric detector 11 through the fourth beam splitter prism 9;
the photoelectric detector 11 is arranged at the exit end of the fourth light splitting prism 9 and used for acquiring the pulse laser emitted from the fourth light splitting prism 9;
the signal input end of the signal processor 12 is electrically connected with the signal output end of the photoelectric detector 11;
the signal input end of the laser 1 is electrically connected with the signal output end of the signal processor 12;
the signal input end of the galvanometer 3 is electrically connected with the signal output end of the signal processor 12.
Example 2
As shown in fig. 1, this embodiment is further optimized based on embodiment 1, and it specifically includes the following steps:
the single-head laser ultrasonic equipment based on the fiber Bragg grating further comprises an optical switch 13, the optical switch 13 is arranged between the emergent end of the first light splitting prism 2 and the vibrating mirror 3, and the optical switch 13 is used for realizing the on-off of light.
Example 3
As shown in fig. 1, this embodiment is further optimized based on embodiment 2, and it specifically includes the following steps:
the single-head laser ultrasonic device based on the fiber bragg grating further comprises a second reflecting mirror 14, the second reflecting mirror 14 is arranged between the emergent end of the first light splitting prism 2 and the optical switch 13, the second reflecting mirror 14 is used for reflecting pulse laser emitted from the first light splitting prism 2 to the optical switch 13 so as to change the direction of a light path, and the sensitivity of the optical switch 13 can reach more than 1 ms.
Example 4
As shown in fig. 1, this embodiment is further optimized based on any one of embodiments 1 to 3, and specifically includes the following steps:
the single-head laser ultrasonic equipment based on the fiber Bragg grating further comprises a second field lens 15, the second field lens 15 is arranged at the emergent end of the galvanometer 3, and the second field lens 15 is used for carrying out field fixing and focusing on laser emitted from the galvanometer 3.
Example 5
As shown in fig. 1, this embodiment is further optimized based on any one of embodiments 1 to 4, and specifically includes the following steps:
the energy attenuator 4 is an attenuation sheet, and the attenuation energy of the attenuation sheet is more than 90%.
Example 6
As shown in fig. 1, this embodiment is further optimized based on any one of embodiments 1 to 5, and specifically includes the following steps:
the laser 1 preferably adopts a high-energy continuous laser 1, and the laser 1 emits pulse laser with wave bands of 532nm and 1064nm, and the pulse laser with the wave bands can better generate ultrasonic signals with proper intensity on a workpiece.
In addition, the energy density of the pulse laser emitted by the laser 1 is more than 500uJ/cm2The average power is 1W-100W, and the repetition frequency meets the adjustable range of 1Hz-100 KHz.
Example 7
A single-head laser ultrasonic method based on fiber Bragg grating comprises the following steps:
s100, a laser 1 emits pulse laser and is divided into two beams through a first beam splitter prism 2;
s200, reflecting a beam of pulse laser divided by the first beam splitter prism 2 to an optical switch through the second reflector 14, controlling light emission through the optical switch to be point interval light emission, synchronizing light emission time according to the scanning frequency of the vibrating mirror 3, emitting light through the optical switch to reach the vibrating mirror 3, forming area array scanning under the action of the vibrating mirror 3, and then fixing a field and focusing on a workpiece through the second field lens 15;
s300, attenuating energy of the other beam of pulse laser divided by the first beam splitter prism 2 through an energy attenuator 4;
s400, after the energy is attenuated by the energy attenuator 4, the pulse laser with the frequency f0 is emitted to the second beam splitter prism 5 and is divided into two beams,
one beam is reflected by the first reflector 10 and is refracted to the fourth beam splitting prism 9, and the reflected beam passes through the fourth beam splitting prism 9 and then is incident on the photoelectric detector 11;
the other beam penetrates through the second beam splitter prism 5 along the original direction and then is incident on the fiber Bragg grating 6, the frequency of the other beam is f0+ fb, and the vibration speed of the object takes a positive sign along the incident light direction, otherwise takes a negative sign;
s500, transmitting the light beam with the frequency of f0+ fb to the first field lens 8 through the third beam splitter prism 7, emitting the light beam out of the first field lens 8 on a workpiece, reflecting the light incident on the workpiece by the workpiece, generating Doppler shift on the reflected light due to the vibration of an object, enabling the frequency of the reflected light to be f0+ fb + ± Δ f, reflecting the reflected light by the third beam splitter prism 7 and the fourth beam splitter prism 9, reaching the photodetector 11, and mixing the reflected light with the other light to generate an interference light signal fb + ± Δ f;
s600, outputting an alternating current signal with the frequency fb +/-deltaf by the photoelectric detector 11;
s700, the signal processor 12 collects the alternating current signal output by the photoelectric detector 11, and obtains the vibration speed of the workpiece according to the alternating current signal, namely, signal visualization can be carried out through visualization software, and defects are identified.
Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention, and that variations, modifications, substitutions and alterations can be made to the above embodiments by those of ordinary skill in the art within the scope of the present invention.

Claims (10)

1. A single-headed laser ultrasound device based on fiber bragg grating, comprising:
a first beam splitter prism (2) arranged at the exit end of the laser (1) and having two exit ends;
a galvanometer (3) arranged at one of the exit ends of the first beam splitter prism (2);
an energy attenuator (4) disposed at the other exit end of the first beam splitter prism (2);
a second beam splitter prism (5) arranged at the exit end of the energy attenuator (4) and having two exit ends;
a fiber Bragg grating (6) arranged at one of the exit ends of the second beam splitter prism (5);
a third light splitting prism (7) which is arranged at the exit end of the fiber Bragg grating (6) and is provided with two exit ends;
a first field lens (8) arranged at one of the exit ends of the third beam splitter prism (7);
a fourth light splitting prism (9) arranged at the other exit end of the third light splitting prism (7);
a first reflective mirror (10) arranged between the other exit end of the third light splitting prism (7) and the fourth light splitting prism (9);
a photodetector (11) arranged at an exit end of the fourth light splitting prism (9);
and a signal processor (12) electrically connected with the photodetector (11).
2. The single-head laser ultrasonic equipment based on the fiber Bragg grating as claimed in claim 1, is characterized in that:
the optical switch (13) is arranged between the emergent end of the first beam splitter prism (2) and the galvanometer (3).
3. The single-head laser ultrasonic device based on the fiber Bragg grating as claimed in claim 1 or 2, wherein:
and a second reflector (14) arranged between the exit end of the first beam splitter prism (2) and the optical switch (13).
4. A fiber bragg grating based single head laser ultrasound device according to claim 1, 2 or 3, wherein:
and the second field lens (15) is arranged at the emergent end of the galvanometer (3).
5. The single-head laser ultrasonic equipment based on the fiber Bragg grating as claimed in claim 1, is characterized in that: the energy attenuator (4) is an attenuation sheet.
6. The single-head laser ultrasonic equipment based on the fiber Bragg grating as claimed in claim 5, wherein: the attenuation energy of the attenuation sheet is more than 90%.
7. The single-head laser ultrasonic equipment based on the fiber Bragg grating as claimed in claim 1, is characterized in that: the laser (1) adopts a high-energy continuous laser (1).
8. The single-head laser ultrasonic equipment based on the fiber Bragg grating as claimed in claim 7, wherein: the laser (1) emits pulse laser with wave bands of 532nm and 1064 nm.
9. The single-head laser ultrasonic equipment based on the fiber Bragg grating as claimed in claim 7, wherein: the energy density of the pulse laser emitted by the laser (1) is more than 500uJ/cm2
10. A single-head laser ultrasonic method based on fiber Bragg grating is characterized by comprising the following steps:
s100, a laser (1) emits pulse laser and is divided into two beams through a first beam splitter prism (2);
s200, reflecting a beam of pulse laser divided by the first beam splitter prism (2) to an optical switch through a second reflecting mirror (14), controlling light emission through the optical switch to be point interval light emission, synchronizing light emission time according to the scanning frequency of the vibrating mirror (3), emitting light through the optical switch to reach the vibrating mirror (3), forming area array scanning under the action of the vibrating mirror (3), and then fixing the field and focusing on a workpiece through a second field lens (15);
s300, attenuating energy of the other beam of pulse laser divided by the first beam splitter prism (2) through an energy attenuator (4);
s400, after the energy is attenuated by the energy attenuator (4), the pulse laser with the frequency f0 is emitted to the second beam splitter prism (5) and is divided into two beams,
one beam is reflected by a first reflector (10) and is refracted to a fourth beam splitting prism (9), and the reflected beam passes through the fourth beam splitting prism (9) and then is incident on a photoelectric detector (11);
the other beam passes through a second beam splitter prism (5) along the original direction and then is incident on a fiber Bragg grating (6) to enable the frequency of the other beam to be f0+ fb, and the vibration speed of the object takes a positive sign along the incident light direction, otherwise takes a negative sign;
s500, transmitting the light beam with the frequency of f0+ fb into the first field lens (8) through the third beam splitter prism (7), emitting the light beam from the first field lens (8) to the workpiece, reflecting the light beam incident on the workpiece by the workpiece, generating Doppler frequency shift of the reflected light due to the vibration of the object, enabling the frequency of the reflected light beam to be f0+ fb + ± Δ f, reflecting the reflected light beam by the third beam splitter prism (7) and the fourth beam splitter prism (9), reaching the photodetector (11), and mixing the reflected light beam with another light beam to generate an interference light signal fb + ± Δ f;
s600, outputting an alternating current signal with frequency fb +/-deltaf by the photoelectric detector (11);
s700, a signal processor (12) collects the alternating current signals output by the photoelectric detector (11), and the vibration speed of the workpiece is obtained according to the alternating current signals, so that signal visualization can be performed through visualization software, and defects are identified.
CN202111129556.7A 2021-09-26 2021-09-26 Single-head laser ultrasonic equipment and method based on fiber Bragg grating Active CN114018824B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202111129556.7A CN114018824B (en) 2021-09-26 2021-09-26 Single-head laser ultrasonic equipment and method based on fiber Bragg grating

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202111129556.7A CN114018824B (en) 2021-09-26 2021-09-26 Single-head laser ultrasonic equipment and method based on fiber Bragg grating

Publications (2)

Publication Number Publication Date
CN114018824A true CN114018824A (en) 2022-02-08
CN114018824B CN114018824B (en) 2023-01-17

Family

ID=80054917

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202111129556.7A Active CN114018824B (en) 2021-09-26 2021-09-26 Single-head laser ultrasonic equipment and method based on fiber Bragg grating

Country Status (1)

Country Link
CN (1) CN114018824B (en)

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6100969A (en) * 1998-12-02 2000-08-08 The United States Of America As Represented By The Secretary Of The Navy Distributed fiber optic laser ultrasonic system
CN102735614A (en) * 2011-04-08 2012-10-17 中国科学院光电研究院 Multi-channel parallel laser ultrasonic detection system
CN203745385U (en) * 2014-01-23 2014-07-30 闫晓磊 Laser ultrasonic optical interference detection device
CN106645033A (en) * 2016-09-29 2017-05-10 西南科技大学 Integrated ultra-fast optical component laser damage diagnosis device
CN111829958A (en) * 2020-07-15 2020-10-27 南京理工大学 Optical fiber coupling type surface disturbance detection system based on light deflection principle
CN212989153U (en) * 2020-07-03 2021-04-16 宝宇(武汉)激光技术有限公司 Laser ultrasonic nondestructive testing device

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6100969A (en) * 1998-12-02 2000-08-08 The United States Of America As Represented By The Secretary Of The Navy Distributed fiber optic laser ultrasonic system
CN102735614A (en) * 2011-04-08 2012-10-17 中国科学院光电研究院 Multi-channel parallel laser ultrasonic detection system
CN203745385U (en) * 2014-01-23 2014-07-30 闫晓磊 Laser ultrasonic optical interference detection device
CN106645033A (en) * 2016-09-29 2017-05-10 西南科技大学 Integrated ultra-fast optical component laser damage diagnosis device
CN212989153U (en) * 2020-07-03 2021-04-16 宝宇(武汉)激光技术有限公司 Laser ultrasonic nondestructive testing device
CN111829958A (en) * 2020-07-15 2020-10-27 南京理工大学 Optical fiber coupling type surface disturbance detection system based on light deflection principle

Also Published As

Publication number Publication date
CN114018824B (en) 2023-01-17

Similar Documents

Publication Publication Date Title
CN107356320B (en) pulse ultrasonic sound field detection device and method
CN113640384A (en) Remote TOFD laser ultrasonic weld nondestructive testing equipment and method
KR20110010111A (en) Method and apparatus for generating mid-ir laser for ultrasound inspection
CN114018824B (en) Single-head laser ultrasonic equipment and method based on fiber Bragg grating
JP4251601B2 (en) Laser ultrasonic inspection equipment
CA2108961A1 (en) Spectrocopic imaging system with ultrasonic detection of absorption of modulated electromagnetic radiation
CN114608456A (en) Measuring system and measuring method
JP3538516B2 (en) Concentration distribution measuring device
RU2337353C1 (en) Method for contact-free ultrasonic diagnostics of welded junctions
US5285260A (en) Spectroscopic imaging system with ultrasonic detection of absorption of modulated electromagnetic radiation
CN114018825B (en) High-precision photorefractive crystal interference nondestructive flaw detection equipment and method
JP2002257793A (en) Lasor ultrasonic inspection device
CN114018823B (en) Excitation and reception integrated laser ultrasonic flaw detection equipment and method
JPH08285820A (en) Laser-ultrasonic inspection apparatus
CN114018826B (en) Laser ultrasonic nondestructive testing equipment and method by light deflection method
JP7278979B2 (en) NON-CONTACT VIBRATION MEASURING DEVICE AND NON-CONTACT VIBRATION MEASURING METHOD
CN114088811A (en) Nondestructive testing method and system for laser variable-focus special-shaped workpiece
JP3294148B2 (en) Laser ultrasonic flaw detector
CN114018822B (en) Remote laser nondestructive flaw detection device and method
JP3874749B2 (en) Target sound detection method and apparatus
CN104880256B (en) A kind of method and apparatus for testing Terahertz shear wave and compressional wave phase dynamic change
CN114018827A (en) Laser ultrasonic nondestructive testing equipment and method based on shearing speckle interference
KR20150103488A (en) Sample aggregate and apparatus for measuring a optical constant using the same
CN111551503B (en) Laser ultrasonic system and method for detecting elastic modulus of material in non-contact manner
JP2015206739A (en) Laser ultrasonic measuring apparatus

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant