CN114018827A - Laser ultrasonic nondestructive testing equipment and method based on shearing speckle interference - Google Patents
Laser ultrasonic nondestructive testing equipment and method based on shearing speckle interference Download PDFInfo
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- CN114018827A CN114018827A CN202111131190.7A CN202111131190A CN114018827A CN 114018827 A CN114018827 A CN 114018827A CN 202111131190 A CN202111131190 A CN 202111131190A CN 114018827 A CN114018827 A CN 114018827A
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- 238000010008 shearing Methods 0.000 title claims abstract description 48
- 238000009659 non-destructive testing Methods 0.000 title claims abstract description 20
- 238000000034 method Methods 0.000 title claims abstract description 9
- 230000007547 defect Effects 0.000 claims abstract description 7
- 230000003287 optical effect Effects 0.000 claims description 29
- 238000003384 imaging method Methods 0.000 claims description 9
- 230000001678 irradiating effect Effects 0.000 claims description 3
- 230000005284 excitation Effects 0.000 abstract description 5
- 238000001514 detection method Methods 0.000 abstract description 4
- 238000006073 displacement reaction Methods 0.000 abstract description 4
- 230000035945 sensitivity Effects 0.000 abstract description 3
- 238000005516 engineering process Methods 0.000 abstract description 2
- 238000002955 isolation Methods 0.000 abstract description 2
- 238000005259 measurement Methods 0.000 abstract description 2
- 230000004075 alteration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000001066 destructive effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 238000002604 ultrasonography Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
Abstract
The invention relates to laser ultrasonic nondestructive testing equipment based on shearing speckle interference, which comprises: the beam splitting device is arranged at the emergent end of the laser and is provided with two emergent ends; a galvanometer arranged at one of the exit ends of the beam splitting device; the beam expanding lens is arranged at the other emergent end of the beam splitting device; a shearing device for acquiring diffused light generated by the surface of the workpiece; the CCD camera is arranged at the emergent end of the shearing device; and the signal processor is electrically connected with the CCD camera, the laser and the galvanometer respectively. Displacement measurement is carried out by utilizing a shearing speckle technology, and the measured displacement derivative, namely strain, is used for realizing defect detection, and the method is sensitive to stress concentration positions and high in sensitivity; the laser excitation and the laser interference use the same light source, so the volume and the weight are greatly reduced; a CCD camera is adopted, so that the field of view is large; the two interference fields formed by the shearing device are basically in a common light path, so that the interference of factors such as external environment vibration, air disturbance and the like is not easy to occur, and the requirement of vibration isolation is overcome.
Description
Technical Field
The invention relates to the technical field of laser nondestructive testing, in particular to laser ultrasonic nondestructive testing equipment and method based on shearing speckle interference.
Background
Laser ultrasound is a non-contact, high-precision, non-destructive novel ultrasonic detection technique, which utilizes laser pulses to excite ultrasonic waves in a detected workpiece and utilizes laser beams to detect the propagation of the ultrasonic waves, thereby acquiring workpiece information, such as workpiece thickness, internal and surface defects, material parameters and the like. The laser ultrasonic equipment used at present comprises two parts of laser excitation and laser interference receiving, the equipment is large in size, and the interference problem exists between the equipment, so that the intensity of laser ultrasonic flaw detection signals is influenced.
Disclosure of Invention
The invention aims to solve the technical problem of providing laser ultrasonic nondestructive testing equipment and method based on shearing speckle interference so as to overcome the defects in the prior art.
The technical scheme for solving the technical problems is as follows: a laser ultrasonic nondestructive testing device based on shearing speckle interference comprises:
the beam splitting device is arranged at the emergent end of the laser and is provided with two emergent ends;
a galvanometer arranged at one of the exit ends of the beam splitting device;
the beam expanding lens is arranged at the other emergent end of the beam splitting device;
a shearing device for acquiring diffused light generated by the surface of the workpiece;
the CCD camera is arranged at the emergent end of the shearing device;
and the signal processor is electrically connected with the CCD camera, the laser and the galvanometer respectively.
On the basis of the technical scheme, the invention can be further improved as follows.
Further, the optical switch is arranged between the emergent end of the beam splitting device and the galvanometer.
Further, the beam splitting device includes:
the beam splitting prism is arranged at the emergent end of the laser and is provided with two emergent ends;
a reflective mirror arranged at one of the exit ends of the beam splitting prism;
the vibrating mirror and the beam expanding mirror are respectively arranged at the other emergent end of the beam splitting prism and the reflecting end of the reflector.
Further, the shearing device is a michelson shearing device.
Further, the michelson shearing device includes:
a beam splitting prism for receiving diffused light generated from a surface of a workpiece;
a first plane mirror arranged on one side of the beam splitting prism and perpendicular to the optical axis;
a second plane mirror arranged on one side of the beam splitting prism and inclined with respect to the optical axis;
and the imaging lens is arranged between the emergent end of the beam splitter prism and the CCD camera.
Furthermore, the multiple of the beam expander is 4-10 times.
Further, the laser employs a high-energy continuous laser.
Further, the laser emits pulsed laser light with wave bands of 532nm and 1064 nm.
Further, the energy density of the pulse laser emitted by the laser is more than 500uJ/cm2。
A laser ultrasonic nondestructive testing method based on shearing speckle interference comprises the following steps:
s100, emitting pulse laser by a laser, and dividing the pulse laser into two beams by a beam splitter prism;
s200, emitting a beam of pulse laser divided by a beam splitter prism to an optical switch, controlling light emission to be point interval light emission through the optical switch, synchronizing light emission time according to the frequency of galvanometer scanning, emitting light through the optical switch to reach the galvanometer, and forming area array scanning on a workpiece under the action of the galvanometer;
s300, changing the direction of the other beam of pulse laser divided by the beam splitter through a reflector, and irradiating the other beam of pulse laser on a workpiece in a large light spot form after the other beam of pulse laser is expanded by the beam expander;
s400, dividing diffused light diffusely reflected from the surface of a workpiece into two beams through a beam splitter prism, reflecting the two beams by a first plane mirror and a second plane mirror respectively, deflecting the light beam reflected by the second plane mirror by a certain angle, enabling the light beam reflected by the first plane mirror to be still vertical to an optical axis, converging the two beams of reflected light through the beam splitter prism again, forming two mutually staggered images on a target surface of a CCD camera after passing through an imaging lens, and enabling the two images to interfere with each other to form a shearing speckle interference image;
s500, the signal processor acquires interference images acquired by the CCD camera, and obtains out-of-plane deformation information of the workpiece according to the shape and distribution of the interference images, so that defects can be identified.
The invention has the beneficial effects that:
1) displacement measurement is carried out by utilizing a shearing speckle technology, and the measured displacement derivative, namely strain, is used for realizing defect detection, and the method is sensitive to stress concentration positions and high in sensitivity;
2) the laser excitation and the laser interference use the same light source, so the volume and the weight are greatly reduced;
3) a CCD camera is adopted, so that the field of view is large;
4) laser excitation and laser receiving are synchronous in real time;
5) laser ultrasonic lattice excitation is realized by using a continuous laser and an optical switch;
6) the two interference fields formed by the shearing device are basically in a common light path, so that the interference of factors such as external environment vibration, air disturbance and the like is not easy to occur, and the requirement of vibration isolation is overcome.
Drawings
FIG. 1 is an optical path diagram of the laser ultrasonic nondestructive testing device based on shearing speckle interference.
In the drawings, the components represented by the respective reference numerals are listed below:
1. the system comprises a laser, 2, a beam splitter, 210, a beam splitter prism, 220, a reflector, 3, a galvanometer, 4, a beam expander, 5, a shearing device, 510, a beam splitter prism, 520, a first plane mirror, 530, a second plane mirror, 540, an imaging lens, 6, a CCD camera, 7, a signal processor, 8 and an optical switch.
Detailed Description
The principles and features of this invention are described below in conjunction with the following drawings, which are set forth by way of illustration only and are not intended to limit the scope of the invention.
Example 1
As shown in fig. 1, a laser ultrasonic nondestructive testing apparatus based on shearing speckle interference includes:
the device comprises a laser 1, a beam splitter 2, a galvanometer 3, a beam expander 4, a shearing device 5, a CCD camera 6 and a signal processor 7;
the laser 1 is used for emitting pulse laser;
the beam splitting device 2 is arranged at the emergent end of the laser 1, the beam splitting device 2 is provided with two emergent ends, pulse laser emitted by the laser 1 enters the beam splitting device 2, is split into two beams by the beam splitting device 2, and then is emitted from the two emergent ends respectively;
the vibrating mirror 3 is arranged at one of the emergent ends of the beam splitting device 2, the pulse laser emitted from one of the emergent ends of the beam splitting device 2 enters the vibrating mirror 3, and then the vibrating mirror 3 converts the entered point laser into area array laser and irradiates on a workpiece so as to enable the workpiece to generate ultrasonic waves;
the beam expander 4 is arranged at the other exit end of the beam splitter 2, the pulse laser emitted by the other exit end of the beam splitter 2 enters the beam expander 4, the beam diameter is expanded through the beam expander 4 and then the expanded beam is irradiated on the workpiece, so that the workpiece surface is subjected to diffuse reflection;
the shearing device 5 is used for acquiring diffused light generated by the surface of the workpiece;
the CCD camera 6 is arranged at the emergent end of the shearing device 5, so that two beams of light emitted from the shearing device 5 form two mutually staggered images on a target surface, and the two images are mutually interfered to form a shearing speckle interference image;
the signal input end of the signal processor 7 is electrically connected with the signal output end of the CCD camera 6;
the signal output end of the signal processor 7 is electrically connected with the signal input end of the laser 1;
and the signal output end of the signal processor 7 is electrically connected with the signal input end of the galvanometer 3.
Example 2
As shown in fig. 1, this embodiment is further optimized based on embodiment 1, and it specifically includes the following steps:
the laser ultrasonic nondestructive testing equipment based on shearing speckle interference further comprises an optical switch 8, wherein the optical switch 8 is arranged between the emergent end of the beam splitting device 2 and the vibrating mirror 3, the optical switch 8 is used for realizing the on-off of light, so that the light is controlled to be emitted at intervals, and the sensitivity of the optical switch 8 can reach more than 1 ms.
Example 3
As shown in fig. 1, this embodiment is further optimized based on embodiment 1 or 2, and it is specifically as follows:
the beam splitting device 2 includes: a beam splitting prism 210 and a mirror 220;
the beam splitting prism 210 is arranged at the exit end of the laser 1, and the beam splitting prism 210 has two exit ends;
the pulse laser emitted by the laser 1 enters the beam splitting prism 210, is split into two beams by the beam splitting prism 210, and then is emitted from the two emitting ends respectively;
the reflective mirror 220 is disposed at one of the exit ends of the beam splitting prism 210;
the galvanometer 3 and the beam expander 4 are respectively arranged at the other emergent end of the beam splitter prism 210 and the reflecting end of the reflector 220;
the pulse laser emitted from one of the emitting ends of the beam splitter 2 changes the direction through the reflective mirror 220 and enters the beam expander 4, the beam diameter is enlarged through the beam expander 4, and the pulse laser emitted from the other emitting end of the beam splitter 2 enters the vibrating mirror 3 through the optical switch 8.
Example 4
As shown in fig. 1, this embodiment is further optimized based on embodiment 1, 2 or 3, and it is specifically as follows:
In this embodiment, the michelson shearing device includes: a beam splitter prism 510, a first plane mirror 520, a second plane mirror 530, and an imaging lens 540;
the beam splitter prism 510 is used for receiving diffused light generated by the surface of the workpiece;
the first plane mirror 520 is disposed at one side of the beam splitter prism 510, and is perpendicular to the optical axis;
the second plane mirror 530 is disposed at one side of the beam splitter prism 510, is not perpendicular to the optical axis, but is inclined at a slight angle;
the imaging lens 540 is disposed between the exit end of the beam splitter 510 and the CCD camera 6, the diffused light is split into two beams by the beam splitter 510, and then reflected by the first flat mirror 520 and the second flat mirror 530, respectively, the light beam reflected by the second flat mirror 530 is deflected by a certain angle, the light beam reflected by the first flat mirror 520 is still perpendicular to the optical axis, the two reflected light beams are converged by the beam splitter 510 again, and two mutually displaced images are formed on the target surface of the CCD camera 6 after passing through the imaging lens 540.
Example 5
As shown in fig. 1, this embodiment is further optimized based on any one of embodiments 1 to 4, and specifically includes the following steps:
the multiple of the beam expander 4 is 4-10 times.
Example 6
As shown in fig. 1, this embodiment is further optimized based on any one of embodiments 1 to 5, and specifically includes the following steps:
the laser 1 is preferably a high-energy continuous laser; the laser 1 emits pulse laser with wave bands of 532nm and 1064nm, and the pulse laser with the wave bands can well generate ultrasonic signals with proper intensity on a workpiece.
The energy density of the pulse laser emitted by the laser 1 is more than 500uJ/cm2The average power is 1W-100W, and the repetition frequency meets the adjustable range of 1Hz-100 KHz.
Example 7
A laser ultrasonic nondestructive testing method based on shearing speckle interference comprises the following steps:
s100, a laser 1 emits pulse laser and is divided into two beams through a beam splitter prism 210;
s200, emitting a pulse laser beam split by the beam splitting prism 210 to the optical switch 8, controlling the light emitting to be point interval light emitting through the optical switch 8, synchronizing the light emitting time according to the scanning frequency of the vibrating mirror 3, emitting light through the optical switch 8 to the vibrating mirror 3, and forming area array scanning on a workpiece under the action of the vibrating mirror 3;
s300, changing the direction of the other beam of pulse laser divided by the beam splitter prism 210 through the reflective mirror 220, and irradiating the other beam of pulse laser on a workpiece in a large light spot form after being expanded by the beam expander 4;
s400, the diffused light diffusely reflected from the surface of the workpiece is divided into two beams by a beam splitter prism 510, and then the two beams are reflected by a first plane mirror 520 and a second plane mirror 530 respectively, the light beam reflected by the second plane mirror 530 is deflected by a certain angle, the light beam reflected by the first plane mirror 520 is still perpendicular to the optical axis, the two beams of reflected light are converged by the beam splitter prism 510 again, and form two mutually dislocated images on the target surface of the CCD camera 6 after passing through an imaging lens 540, and the two images are mutually interfered and form a shearing speckle interference image;
s500, the signal processor 7 acquires the interference image acquired by the CCD camera 6, and obtains the out-of-plane deformation information of the workpiece according to the shape and distribution of the interference image, so that the defect can be identified.
Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention, and that variations, modifications, substitutions and alterations can be made to the above embodiments by those of ordinary skill in the art within the scope of the present invention.
Claims (10)
1. A laser ultrasonic nondestructive testing device based on shearing speckle interference is characterized by comprising:
a beam splitting device (2) arranged at the exit end of the laser (1) and having two exit ends;
a galvanometer (3) arranged at one of the exit ends of the beam splitting device (2);
a beam expanding lens (4) arranged at the other exit end of the beam splitting device (2);
a shearing device (5) for acquiring diffused light generated by the surface of the workpiece;
a CCD camera (6) arranged at the exit end of the shearing device (5);
and the signal processor (7) is electrically connected with the CCD camera (6), the laser (1) and the galvanometer (3) respectively.
2. The laser ultrasonic nondestructive testing device based on shearing speckle interference as claimed in claim 1, characterized in that:
and the optical switch (8) is arranged between the emergent end of the beam splitting device (2) and the galvanometer (3).
3. The apparatus according to claim 1 or 2, wherein the beam splitting device (2) comprises:
a beam splitting prism (210) arranged at the exit end of the laser (1) and having two exit ends;
a mirror (220) arranged at one of the exit ends of the beam splitting prism (210);
the vibrating mirror (3) and the beam expanding mirror (4) are respectively arranged at the other emergent end of the beam splitting prism (210) and the reflecting end of the reflective mirror (220).
4. The laser ultrasonic nondestructive testing device based on shearing speckle interference as claimed in claim 1, 2 or 3, characterized in that: the shearing device (5) is a Michelson shearing device.
5. The apparatus of claim 4, wherein the Michelson shearing device comprises:
a beam splitting prism (510) for receiving diffused light generated by a surface of a workpiece;
a first plane mirror (520) arranged on one side of the beam splitting prism (510) and perpendicular to the optical axis;
a second plane mirror (530) arranged on one side of the beam splitting prism (510) and inclined with respect to the optical axis;
and an imaging lens (540) disposed between the exit end of the beam splitter prism (510) and the CCD camera (6).
6. The laser ultrasonic nondestructive testing device based on the shearing speckle interference is characterized in that the multiple of the beam expander (4) is 4-10 times.
7. The laser ultrasonic nondestructive testing device based on shearing speckle interference as claimed in claim 1, characterized in that: the laser (1) adopts a high-energy continuous laser.
8. The laser ultrasonic nondestructive testing device based on shearing speckle interference as claimed in claim 7, characterized in that: the laser (1) emits pulse laser with wave bands of 532nm and 1064 nm.
9. The laser ultrasonic nondestructive testing device based on shearing speckle interference as claimed in claim 7, characterized in that: the energy density of the pulse laser emitted by the laser (1) is more than 500uJ/cm2。
10. A laser ultrasonic nondestructive testing method based on shearing speckle interference is characterized by comprising the following steps:
s100, a laser (1) emits pulse laser and is divided into two beams through a beam splitting prism (210);
s200, emitting a pulse laser beam split by a beam splitting prism (210) to an optical switch (8), controlling light emission to be point interval light emission through the optical switch (8), synchronizing light emission time according to the scanning frequency of a vibrating mirror (3), emitting light through the optical switch (8) to reach the vibrating mirror (3), and forming area array scanning on a workpiece under the action of the vibrating mirror (3);
s300, changing the direction of the other beam of pulse laser divided by the beam splitting prism (210) through the reflector (220), and irradiating the laser beam on a workpiece in a large light spot form after the laser beam is expanded by the beam expanding lens (4);
s400, diffuse light diffusely reflected from the surface of a workpiece is divided into two beams by a beam splitter prism (510), the two beams are reflected by a first plane mirror (520) and a second plane mirror (530) respectively, the light beam reflected by the second plane mirror (530) is deflected by a certain angle, the light beam reflected by the first plane mirror (520) is still perpendicular to the optical axis, the two beams of reflected light are converged by the beam splitter prism (510) again, two mutually staggered images are formed on the target surface of a CCD camera (6) after passing through an imaging lens (540), and the two images are mutually interfered and form a shearing speckle interference image;
s500, the signal processor (7) acquires the interference image acquired by the CCD camera (6), and obtains the out-of-plane deformation information of the workpiece according to the shape and distribution of the interference image, so that the defect can be identified.
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| CN202111131190.7A CN114018827A (en) | 2021-09-26 | 2021-09-26 | Laser ultrasonic nondestructive testing equipment and method based on shearing speckle interference |
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2021
- 2021-09-26 CN CN202111131190.7A patent/CN114018827A/en active Pending
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| WO2010031395A1 (en) * | 2008-09-19 | 2010-03-25 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Laser-based apparatus and method for the non-contact scanning of eyes |
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