CN111807319A - 一种仿生蝴蝶磷翅微纳结构的制备方法 - Google Patents
一种仿生蝴蝶磷翅微纳结构的制备方法 Download PDFInfo
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- CN111807319A CN111807319A CN202010912879.2A CN202010912879A CN111807319A CN 111807319 A CN111807319 A CN 111807319A CN 202010912879 A CN202010912879 A CN 202010912879A CN 111807319 A CN111807319 A CN 111807319A
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- grating
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00436—Shaping materials, i.e. techniques for structuring the substrate or the layers on the substrate
- B81C1/00523—Etching material
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1847—Manufacturing methods
- G02B5/1857—Manufacturing methods using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
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- General Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Diffracting Gratings Or Hologram Optical Elements (AREA)
Abstract
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN202010912879.2A CN111807319B (zh) | 2020-09-03 | 2020-09-03 | 一种仿生蝴蝶磷翅微纳结构的制备方法 |
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CN202010912879.2A CN111807319B (zh) | 2020-09-03 | 2020-09-03 | 一种仿生蝴蝶磷翅微纳结构的制备方法 |
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Publication Number | Publication Date |
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CN111807319A true CN111807319A (zh) | 2020-10-23 |
CN111807319B CN111807319B (zh) | 2020-12-04 |
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CN202010912879.2A Active CN111807319B (zh) | 2020-09-03 | 2020-09-03 | 一种仿生蝴蝶磷翅微纳结构的制备方法 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112410867A (zh) * | 2020-11-05 | 2021-02-26 | 中国航发北京航空材料研究院 | 一种高温合金密排孔柱阵列结构的加工方法 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101823685A (zh) * | 2010-04-30 | 2010-09-08 | 华中科技大学 | 一种仿生微纳结构制备方法 |
US8467548B2 (en) * | 2009-04-07 | 2013-06-18 | The United States Of America As Represented By The Secretary Of The Navy | Miniature micro-electromechanical system (MEMS) based directional sound sensor |
US20140138760A1 (en) * | 2012-07-09 | 2014-05-22 | Sandisk Technologies Inc. | Three dimensional nand device and method of charge trap layer separation and floating gate formation in the nand device |
CN104934303A (zh) * | 2015-06-15 | 2015-09-23 | 复旦大学 | 一种制备蝴蝶翅膀仿生微纳结构的方法 |
CN108896204A (zh) * | 2018-05-22 | 2018-11-27 | 杭州电子科技大学 | 基于蝴蝶鳞片纳米结构的温度传感器及制备与检测方法 |
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2020
- 2020-09-03 CN CN202010912879.2A patent/CN111807319B/zh active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8467548B2 (en) * | 2009-04-07 | 2013-06-18 | The United States Of America As Represented By The Secretary Of The Navy | Miniature micro-electromechanical system (MEMS) based directional sound sensor |
CN101823685A (zh) * | 2010-04-30 | 2010-09-08 | 华中科技大学 | 一种仿生微纳结构制备方法 |
US20140138760A1 (en) * | 2012-07-09 | 2014-05-22 | Sandisk Technologies Inc. | Three dimensional nand device and method of charge trap layer separation and floating gate formation in the nand device |
CN104934303A (zh) * | 2015-06-15 | 2015-09-23 | 复旦大学 | 一种制备蝴蝶翅膀仿生微纳结构的方法 |
CN108896204A (zh) * | 2018-05-22 | 2018-11-27 | 杭州电子科技大学 | 基于蝴蝶鳞片纳米结构的温度传感器及制备与检测方法 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112410867A (zh) * | 2020-11-05 | 2021-02-26 | 中国航发北京航空材料研究院 | 一种高温合金密排孔柱阵列结构的加工方法 |
CN112410867B (zh) * | 2020-11-05 | 2023-10-20 | 中国航发北京航空材料研究院 | 一种高温合金密排孔柱阵列结构的加工方法 |
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Inventor after: Gao Yang Inventor after: Li Chunyong Inventor after: Shu Kai Inventor after: Qiu Bocang Inventor after: Ke Maolong Inventor after: Xu Huayong Inventor after: Feng Ou Inventor before: Gao Yang Inventor before: Li Chunyong Inventor before: Shu Kai Inventor before: Qiu Bocang Inventor before: Ke Maolong Inventor before: Xu Huayong Inventor before: Feng Ou |
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Effective date of registration: 20211019 Address after: 330000 South of Fushan Avenue and West of Jinhu Lake, Xiaolan Economic and Technological Development Zone, Nanchang City, Jiangxi Province Patentee after: JIANGXI DERAY PHOTOELECTRIC TECHNOLOGY Co.,Ltd. Address before: 330000, 2nd floor, Derui photoelectric building, south of Fushan Avenue and west of Jinhu, Nanchang County, Nanchang City, Jiangxi Province Patentee before: Jiangxi Mingde Semiconductor Technology Co.,Ltd. |
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Denomination of invention: A Preparation Method for Biomimetic Butterfly Phosphorus Wing Microstructures and Nanostructures Effective date of registration: 20230412 Granted publication date: 20201204 Pledgee: Nanchang County Sub branch of Bank of Beijing Co.,Ltd. Pledgor: JIANGXI DERAY PHOTOELECTRIC TECHNOLOGY Co.,Ltd. Registration number: Y2023980037902 |
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