CN111795544A - 低温空气分离设备 - Google Patents

低温空气分离设备 Download PDF

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Publication number
CN111795544A
CN111795544A CN202010265748.XA CN202010265748A CN111795544A CN 111795544 A CN111795544 A CN 111795544A CN 202010265748 A CN202010265748 A CN 202010265748A CN 111795544 A CN111795544 A CN 111795544A
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column
oxygen
nitrogen
rectification
section
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CN202010265748.XA
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CN111795544B (zh
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广濑献儿
富田伸二
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LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
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LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
    • F25J3/02—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
    • F25J3/04—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air
    • F25J3/04248—Generation of cold for compensating heat leaks or liquid production, e.g. by Joule-Thompson expansion
    • F25J3/04284—Generation of cold for compensating heat leaks or liquid production, e.g. by Joule-Thompson expansion using internal refrigeration by open-loop gas work expansion, e.g. of intermediate or oxygen enriched (waste-)streams
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
    • F25J3/02—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
    • F25J3/04—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air
    • F25J3/04248—Generation of cold for compensating heat leaks or liquid production, e.g. by Joule-Thompson expansion
    • F25J3/04254—Generation of cold for compensating heat leaks or liquid production, e.g. by Joule-Thompson expansion using the cold stored in external cryogenic fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
    • F25J3/02—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
    • F25J3/04—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air
    • F25J3/04006—Providing pressurised feed air or process streams within or from the air fractionation unit
    • F25J3/04048—Providing pressurised feed air or process streams within or from the air fractionation unit by compression of cold gaseous streams, e.g. intermediate or oxygen enriched (waste) streams
    • F25J3/0406—Providing pressurised feed air or process streams within or from the air fractionation unit by compression of cold gaseous streams, e.g. intermediate or oxygen enriched (waste) streams of nitrogen
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    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
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    • F25J3/04248—Generation of cold for compensating heat leaks or liquid production, e.g. by Joule-Thompson expansion
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    • F25J3/04309—Generation of cold for compensating heat leaks or liquid production, e.g. by Joule-Thompson expansion using internal refrigeration by open-loop gas work expansion, e.g. of intermediate or oxygen enriched (waste-)streams of nitrogen
    • F25J3/04315—Lowest pressure or impure nitrogen, so-called waste nitrogen expansion
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    • F25J3/04—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air
    • F25J3/04248—Generation of cold for compensating heat leaks or liquid production, e.g. by Joule-Thompson expansion
    • F25J3/04284—Generation of cold for compensating heat leaks or liquid production, e.g. by Joule-Thompson expansion using internal refrigeration by open-loop gas work expansion, e.g. of intermediate or oxygen enriched (waste-)streams
    • F25J3/04321—Generation of cold for compensating heat leaks or liquid production, e.g. by Joule-Thompson expansion using internal refrigeration by open-loop gas work expansion, e.g. of intermediate or oxygen enriched (waste-)streams of oxygen
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    • F25J3/04248—Generation of cold for compensating heat leaks or liquid production, e.g. by Joule-Thompson expansion
    • F25J3/04333—Generation of cold for compensating heat leaks or liquid production, e.g. by Joule-Thompson expansion using quasi-closed loop internal vapor compression refrigeration cycles, e.g. of intermediate or oxygen enriched (waste-)streams
    • F25J3/04351—Generation of cold for compensating heat leaks or liquid production, e.g. by Joule-Thompson expansion using quasi-closed loop internal vapor compression refrigeration cycles, e.g. of intermediate or oxygen enriched (waste-)streams of nitrogen
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Abstract

本发明涉及低温空气分离设备，目的在于提供一种能够以高收率回收氮、氩和高纯度氧的低温空气分离设备。该低温空气分离设备包括：热交换器1，第一精馏塔2，第一冷凝器3，第二精馏塔5，第三精馏塔6，第二冷凝器7，高纯度氧精馏塔8，第三冷凝器4，氮压缩机10，和压缩再循环气体管线L52，该压缩再循环气体管线用于将由第一氮压缩机10压缩的产物氮气作为压缩的再循环气体引入到超高纯度氧蒸发器9的热端(热源)中。

Description

低温空气分离设备
技术领域
本发明涉及一种用于生产氮、氩和高纯度氧的低温空气分离设备。
背景技术
在半导体等行业中，需要不含诸如烃的高沸点成分的高纯度氧。为了生产这种高纯度氧，例如，专利文献1描述了一种低温空气分离设备，其包括三个精馏塔，即用于生产氮、氧和氩的中压塔、低压塔和粗氩塔。专利文献1描述了一种方法，其中使用中压氮气作为再沸腾源来浓缩从粗氩塔的中间部分获得并从中去除了高沸点成分的富氧液体。除了使用中压氮气作为再沸腾源之外，还描述了一种用于使用进料空气或从中压塔的底部获得的富氧液体来获得高纯度氧的方法，如例如专利文献2中所公开的。
[现有技术文献]
[专利文献]
[专利文献1]US 5049173 A
[专利文献2]US 5934104 A
发明内容
[本发明拟解决的问题]
然而，如现有技术那样，在将中压氮气用于再沸腾高纯度氧的情况下，供给至低压塔底部的中压氮气的量成比例地减少。这导致低压塔中蒸气流的减少，并且引起尤其难以分离的氩的回收率的显著减小。
相对于氧气和氮气，氩气仅占空气成分的材料重量比的1％，因此，将低温空气分离设备设计为生产氩作为氧产品或氮产品的副产物通常是经济的。然而，如上所述，如果为了回收高纯度氧而牺牲氩的回收，则很有必要与氩的需求量相当地设计低温空气分离设备，结果这有可能导致经济效率低下的情况。
使用进料空气作为高纯度氧的再沸腾源的方法的问题在于，对中压塔供给的进料空气减少，并且氮的回收量减少。
此外，使用从中压塔底部供应的富氧液体作为再沸腾源的方法仅可回收少量的高纯度氧，因为仅可使用与富氧液体和高纯度氧之间的温差相对应的有限显热。
鉴于上述情况，本发明的目的在于提供一种低温空气分离设备，其能够以高收率回收氮、氩和高纯度氧。
[解决问题的手段]
根据本发明的低温空气分离设备包括：
用于使进料空气进行热交换的热交换器(1)；
第一精馏塔(中压塔)(2)，已通过所述热交换器(1)的进料空气被引入所述第一精馏塔，所述第一精馏塔(中压塔)(2)包括其中储存有富氧液体的第一塔底部分(21)、用于对进料空气进行精馏的第一精馏部分(22)、和设置在所述第一精馏部分(22)的上部部分处并储存第一蒸发气体的第一塔顶部分(23)；
第一冷凝器(氮冷凝器)(3)，其设置在所述第一塔顶部分(23)上方，并且使所述第一塔顶部分(23)中的第一蒸发气体冷凝；
第二精馏塔(5)，其包括第二塔底部分(31)、第二精馏部分(51，52，53)和从其中抽取氮气(其可以变成产品)的第二塔顶部分(54)；
用于精馏氩的第三精馏塔(粗氩塔)(6)，所述第三精馏塔(6)包括向其中引入从第二精馏塔(5)的第二精馏部分(50)的中间部分(51)抽取的粗氩进料气体的第三塔底部分(61)、用于对粗氩进料气体进行精馏的第三精馏部分(62)、以及其中储存有氩的第三塔顶部分(63)；
第二冷凝器(粗氩冷凝器)(7)，其设置在第三塔顶部分(63)的上方并且使所述第三塔顶部分(63)中的氩冷凝；
用于对高纯度氧进行精馏的高纯度氧精馏塔(8)，所述高纯度氧精馏塔(8)包括：氧塔底部部分(81)，其具有设置在其下部区域中的高纯度氧蒸发器(9)；氧精馏部分(82)，从第三精馏塔(6)的第三精馏部分(62)的中间部分抽取的富氧液体(中间部分抽取液体)被引入到所述氧精馏部分；和氧塔顶部部分(83)，氧蒸发气体从其中被抽取以返回到所述第三精馏塔(6)的第三精馏部分(62)的中间部分；
第三冷凝器(高纯度氧冷凝器)(4)，其设置在氧塔顶部部分(83)的上方并采用所述氧塔顶部部分(83)中的氧蒸发气体作为热源；
第一氮压缩机(10)，其用于在已使从所述第三冷凝器(4)的上部区域(41)抽取的第二氮气(其可变成产品)和从所述第二精馏塔(5)的第二塔顶部分(54)抽取的第一氮气(其可变成产品)通过所述热交换器(1)之后压缩所述第二氮气和所述第一氮气；以及
压缩再循环气体管线(L52)，其用于将由第一氮压缩机(10)压缩的产物氮气作为压缩再循环气体引入到高纯度氧蒸发器(9)的热端(热源)中。
上述低温空气分离设备还可包括：
氧抽取管线(L3)，其用于提取从所述第二塔底部分(31)抽取并通过所述热交换器(1)的氧(其可变成产品)；
氩气抽取管线(L63)，其用于从所述第三塔顶部分(63)提取(气态和/或液态)氩(其可成为产品)；
含氩液体抽取管线(L61)，其用于将从第三塔底部分(61)抽取的含氩液体引入所述第二精馏塔(5)的第二精馏部分的第一中间级(51)中；
第二冷凝器蒸发气体引入管线(L71)，其用于将从所述第二冷凝器(7)的上部区域(71)抽取的第二冷凝器蒸发气体引入所述第二精馏部分的第二中间级(52)中；
高纯度液氧抽取管线(L81)，其用于从氧塔底部部分(81)提取高纯度液氧(其变成产品)；
第一循环管线(L521)，其用于将从高纯度氧蒸发器(9)的热源抽取并且已经至少部分液化的压缩再循环气体引入到所述第三冷凝器(4)的上部区域(41)中；和
第二循环管线(L522)，其用于将从高纯度氧蒸发器(9)的热源抽取并且已经至少部分液化的压缩再循环气体引入到所述第二精馏塔(低压塔)5的第二塔顶部分(54)中。
上述低温空气分离设备还可包括：
第一产物氮气管线(L5)，其用于将从所述第二精馏塔(5)的第二塔顶部分(54)抽取的第一氮气引入到所述热交换器(1)中；和
第二产物氮气管线(L84)，其用于将从所述第三冷凝器(4)的上部区域(41)抽取的第二氮气引入到所述热交换器中。
由所述第一氮压缩机(10)压缩的压缩氮气也可以经由产物氮回收管线(L51)提取。
上述低温空气分离设备可包括：第二氮压缩机(11)，其用于压缩借助于所述第二产物氮气管线(L84)已经通过所述热交换器(1)的第二氮气；并且
可以经由压缩再循环气体管线(L52)将通过在所述第二氮压缩机(11)中进行压缩而得到的压缩再循环气体引入到所述高纯度氧蒸发器(9)的热端(热源)中。
通过上述构型，将除去了沸点比氧高的成分如烃的富氧液体从第三精馏塔(粗氩塔)(6)的中间部分(精馏部分62)供给至高纯度氧精馏塔(8)，对所述富氧液体进行精馏，并从底部部分(81)回收超高纯度氧(UPOX)。从热交换器(1)的热端回收的氮气(第一氮气和/或第二氮气)由第一氮压缩机(10)或第二氮压缩机(11)增压，并作为重沸源供给到用于精馏超高纯度氧的超高纯度氧蒸发器(9)中。
此外，将由超高纯度氧蒸发器(9)冷凝的液氮的至少一部分供给至第二精馏塔(低压塔)(5)的第二塔顶部分(54)，藉此可以增加第二精馏塔(低压塔)(5)中的回流液体，并且可以增加从第二塔顶部分(54)回收的第一氮气的量。
此外，将由超高纯度氧蒸发器(9)冷凝的液氮的至少一部分作为冷源供给到位于高纯度氧精馏塔(8)的塔顶部分(83)中的第三冷凝器(高纯度氧冷凝器)(4)中，并且将从第三冷凝器(4)的上部区域(41)抽取的第二氮气经由热交换器(1)供给至氮压缩机(10)，藉此可以改善在高纯度氧精馏塔(8)和第三精馏塔(粗氩塔)(6)中的精馏，并且提高氩和超高纯度氧的回收率。
此外，可以在比第一氮气高的压力下从第三冷凝器的上部区域抽取第二氮气，因此如果经由热交换器(1)将第二氮气供给至第二氮压缩机(11)，则能够以比第一氮压缩机(10)中低的压缩比进行压缩，并且可以节省用于高纯度氧的精馏中的氮压缩的功率。
在上述低温空气分离设备中，第三精馏塔(粗氩塔)(6)可以在抽取引入到高纯度氧精馏塔(8)中的富氧液体(中间部分抽取液体)的位置被分为上部粗氩塔(620)和下部粗氩塔(610)。
上部粗氩塔(620)可包括：塔下部部分(621)、塔中间部分(622)和塔上部部分(623)，并且下部粗氩塔(610)可包括：塔下部部分(611)、塔中间部分(612)和塔上部部分(613)。
上部粗氩塔(620)可以设置在高纯度氧精馏塔(8)的上部部分中，高纯度氧冷凝器(4)可以设置在上部粗氩塔(620)的上部部分中，并且高纯度氧冷凝器(4)可以使上部粗氩塔(620)的塔上部部分(623)中的蒸发气体冷凝。
通过这种构型，可以简化粗氩塔(6)和高纯度氧精馏塔(8)的连接，并且可以进一步简化精馏塔的结构。
上述低温空气分离设备还可包括膨胀涡轮(24)，该膨胀涡轮用于使以下气体中的至少一种气体膨胀：混合气体，该混合气体包括进料空气、从第二精馏塔(低压塔)(5)回收的氮气、从第一冷凝器(3)的上部部分(31)抽取的氧气、和从第一精馏塔、第二精馏塔或第三精馏塔中的任一者排出的废气中的两种或更多种气体；以及通过第一氮压缩机(10)和/或第二氮压缩机(11)增压的氮气。
通过这种构型，膨胀涡轮的膨胀和冷量的生成使得可以在利用工艺气体的同时保持设备中的冷平衡。
上述低温空气分离设备还可以包括用于将液氮作为冷源供给至第一精馏塔(中压塔)(2)或第二精馏塔(低压塔)(5)的供给管线(L9)。
供给管线(L9)还可将液氮供给至第一精馏塔(中压塔)(2)的第一塔顶部分(23)或第二精馏塔(低压塔)(5)的第二塔顶部分(54)。
通过此构型，当要在液体中回收大量产品时，即使该构型不具备膨胀涡轮9，或甚至膨胀涡轮9中存在缺陷，也可以在低温空气分离设备中维持冷平衡。
(操作优势)根据本发明，可以以高收率回收氮、氩和高纯度氧。
附图说明
[图1]示出了根据实施方式1的高纯度氧和氮生产系统。
[图2]示出实施方式1的变形例。
[图3]示出了根据实施方式2的高纯度氧和氮生产系统。
[图4]示出了根据实施方式3的高纯度氧和氮生产系统。
[图5]示出了根据实施方式4的高纯度氧和氮生产系统。
具体实施方式
下面将描述本发明的多种实施方式。以下描述的实施方式示出了本发明的示例。本发明绝不受以下实施方式的限制，并且本发明还包括在不改变本发明的要点的范围内实施的各种变形方式。应当注意的是，以下描述的构成元件并非对本发明而言都是必需的。
(实施方式1)
将借助于图1描述根据实施方式1的低温空气分离设备。
低温空气分离设备100的基本构型尤其包括：热交换器1、第一精馏塔(中压塔)2、第二精馏塔(低压塔)5、第三精馏塔(粗氩塔)6和高纯度氧精馏塔8。
进料空气经由进料空气引入管线L1经过热交换器1，并被供给至第一精馏塔(中压塔)2的第一塔底部分21(或第一精馏部分22)。
第一精馏塔2包括：第一塔底部分21，在其中储存有富氧液体；用于精馏进料空气的第一精馏部分22；和第一塔顶部分23，其设置在第一精馏部分22的上部部分并且储存第一蒸发气体。
在第一塔顶部分23的上方设置有第一冷凝器(氮冷凝器)3。第一冷凝器3在第一塔顶部分23中冷凝第一蒸发气体。
第二精馏塔5设置在第一冷凝器3的上方。第二精馏塔5包括：第二精馏部分50(51，52，53)；和从其中抽取氮气(其可变成产品)的第二塔顶部分54。
第三精馏塔6对氩进行精馏。第三精馏塔6包括：第三塔底部分61，从第二精馏塔5的第二精馏部分50的中间部分51(优选比第二精馏部分50的中心位置低的级)抽取的粗氩进料气体被引入到该第三塔底部分61；用于精馏粗氩进料气体的第三精馏部分62；和第三塔顶部分63，其中储存有(气态和/或液态)氩。
第二冷凝器7设置在第三塔顶部分63的上方。第二冷凝器7冷凝第三塔顶部分63中的(气态和/或液态)氩。
高纯度氧精馏塔8对超高纯度氧进行精馏。高纯度氧精馏塔8包括：氧塔底部部分81，在其下部区域中设置有高纯度氧蒸发器9；氧精馏部分82，从第三精馏塔6的第三精馏部分62的中间部分抽取的富氧液体(中间部分抽取液体)被引入到该氧精馏部分82；和氧塔顶部部分83，氧蒸发气体从其中被抽取以返回到第三精馏塔6的第三精馏部分62的中间部分。
第三冷凝器4设置在氧塔顶部部分83的上方。第三冷凝器4利用氧塔顶部部分83中的氧蒸发气体作为热源。
在已使从第三冷凝器4的上部区域41抽取的第二氮气和从第二精馏塔5的第二塔顶部分54抽取的第一氮气通过热交换器1之后，第一氮压缩机10压缩所述第二氮气和所述第一氮气。
第一富氧液体引入管线(主管线L2，第一分支管线L21)是用于将从第一精馏塔2的第一塔底部分21抽取的富氧液体引入到第二精馏部分50的中间部分52(优选比第二精馏部分50的中心位置高的级)中的管线。
第二富氧液体引入管线(主管线L2，第二分支管线L22)是用于将从第一精馏塔2的第一塔底部分21抽取的富氧液体引入到第二冷凝器7的管线。
第一蒸发气体引入管线L23是用于将从第一精馏塔2的第一塔顶部分23抽取的第一蒸发气体引入到第二精馏塔5的第二塔顶部分54中的管线。
第一蒸发气体的一部分经由从第一蒸发气体引入管线L23分支的分支管线L231被引入到第一冷凝器3中作为热源，热从第一蒸发气体的所述部分释放以冷却所述第一蒸发气体，然后返回到第一塔顶部分23。
氧抽取管线L3是用于允许从第二精馏塔5的第二塔底部分31抽取的(气态和/或液态)氧通过热交换器1并用于抽取氧(作为产品或废气)的管线。
中间部分抽取管线L31是用于将从第二精馏部分50的中间部分52(优选比第二精馏部分50的中心位置低的级)抽取的粗氩进料气体引入到第三精馏塔6的第三塔底部分61中的管线。
第一产物氮管线L5是用于将从第二精馏塔5的第二塔顶部分54抽取的第一氮气引入到热交换器1中的管线。经由产物氮回收管线L51提取由第一氮压缩机10压缩的压缩氮气。
压缩再循环气体管线L52将由第一压缩机10压缩的产物氮气作为压缩再循环气体引入到超高纯度氧蒸发器9的热端(热源)中。
第一循环管线L521是从压缩再循环气体管线L52分支并将从超高纯度氧蒸发器9中的热源抽取的压缩再循环气体引入到第三冷凝器4的上部区域41中的管线。
第二循环管线L522是从压缩再循环气体管线L52分支并且将从超高纯度氧蒸发器9中的热源抽取的压缩再循环气体引入到第二精馏塔5的第二塔顶部分54中的管线。
含氩液体抽取管线L61是用于将从第三塔底部分61抽取的含氩液体引入到第二精馏塔5的第二精馏部分50的中间部分51(优选比第二精馏部分50的中心位置低的级)中的管线。
中间部分抽取管线L62是用于将从第三精馏部分62的中间部分(优选比第三精馏部分62的中心位置低的级)抽取的富氧液体(中间部分抽取的液体)引入到氧精馏部分82的中间部分(优选比氧精馏部分82的中心位置低的级)中的管线。
氩气抽取管线L63是用于从第三塔顶部分63提取(气态和/或液态)氩的管线。
(气态和/或液态)氩通过从氩气抽取管线L63分支的分支循环管线L631，作为热源被引入第二冷凝器7中，热从其中被释放，并且所述氩气被冷却并液化，然后返回到第三塔顶部分63。
第二冷凝器蒸发气体引入管线L71是用于将从第二冷凝器7的上部区域71抽取的第二冷凝器蒸发气体引入到第二精馏部分50的中间部分52(优选地比第二精馏部分50的中心位置高的级)中的管线。
高纯度液氧抽取管线L81是用于从氧塔底部部分81提取高纯度液氧的管线。
氧蒸发气体抽取管线L82是用于将从氧塔顶部部分83抽取的氧蒸发气体输送到比第三精馏塔6的精馏部分62的中间部分抽取管线L62的抽取位置高的级的管线。
从氧塔顶部部分83抽取的氧蒸发气体作为热源经由循环管线L83引入第三冷凝器4中，热从其中释放，并且所述氧蒸发气体被冷却并液化，然后返回到氧塔顶部部分83。
第二产物氮气管线L84是用于将从第三冷凝器4的上部区域41抽取的第二氮气引入到热交换器1中的管线。
如图1所示，第二产物氮气管线L84在到达热交换器1之前与第一产物氮气管线L5合并。第一产物氮气管线L5到达热交换器1，并且合并的第一氮气和第二氮气被第一氮压缩机10压缩。应当注意，作为不同的实施方式，同样可能的是，第二产物氮气管线L84在通过热交换器1之后与第一产物氮气管线L5合并，并且合并的第一氮气和第二氮气被第一氮压缩机10压缩。
(实施方式1的变形例)
图2示出了实施方式1的变形例。
在低温空气分离设备200中，第二产物氮气管线L84经由热交换器1到达第二氮压缩机11而不与第一产物氮气管线L5合并。
第二氮压缩机11压缩第二氮气(再循环氮气)。已被压缩的再循环氮气与被第一氮压缩机10压缩的产物氮气的一部分合并，并经由压缩再循环气体管线L52引入到超高纯度氧蒸发器9中的热源中。应当注意，由第一氮压缩机10压缩的产物氮气同样可以作为产物氮被回收而不进行进一步处理并且不被供给到压缩再循环气体管线L52，换句话说，仅第二氮气可以是再循环氮气供给源。
(实施方式2)
将借助于图3描述根据实施方式2的低温空气分离设备。将关于与图1的涉及实施方式1的构成元件不同的构成元件给出描述，并且将省略或简化对相同的构成元件的描述。
在低温空气分离设备300中，第三精馏塔6在抽取被引入到高纯度氧精馏塔8中的富氧液体(中间部分抽取液体)的位置处被划分为上部粗氩塔620和下部粗氩塔610。
上部粗氩塔620包括：塔下部部分621、塔中间部分622和塔上部部分623。
下部粗氩塔610包括：塔下部部分611、塔中间部分612和塔上部部分613。
上部粗氩塔620设置在高纯度氧精馏塔8的上部部分中。
高纯度氧冷凝器4设置在上部粗氩塔620的上部部分中。高纯度氧冷凝器4使上部粗氩塔620的塔上部部分623中的蒸发气体冷凝。
经由氩气抽取管线L63从塔上部部分623抽取(气态和/或液态)氩。此外，(气态和/或液态)氩的一部分通过从氩气抽取管线L63分支的第一分支管线L631，作为热源引入第二冷凝器7中，热从其中释放，并且所述氩气被冷却并液化，然后返回到塔上部部分623。此外，(气态和/或液态)氩的一部分通过从氩气抽取管线L63分支的第二分支管线L632，作为热源引入高纯度氧冷凝器4中，热从其中释放，并且所述氩气被冷却和液化，然后返回到塔上部部分623。
关于第二冷凝器7的安装位置没有特别限制，但是优选将其安装在第一精馏塔2、第二精馏塔5和上部粗氩塔620附近。
高纯度氧冷凝器4设置在上部粗氩塔620的上部部分中，但是同样可能的是，第二冷凝器7设置在上部粗氩塔620的上部部分中。第二冷凝器7同样可以设置在高纯度氧冷凝器4的上部部分中，或者可以采用相反的布置。
在实施方式2和其它实施方式中，“上”和“下”是不限于竖直方向的概念，并且还包括倾斜方向。
(实施方式3)
将借助于图4描述根据实施方式3的低温空气分离设备。将关于与实施方式2(图3)的构成元件不同的构成元件给出描述，并且对于相同的构成元件将省略或简化描述。
低温空气分离设备400包括用于使以下气体中的至少一种气体膨胀的膨胀涡轮24：包括进料空气、从第二精馏塔5回收的氮气、从第一冷凝器3的上部部分31抽取的氧气和从第一精馏塔、第二精馏塔或第三精馏塔中的任一者排出的废气之中的两种或更多种气体的混合气体；以及通过第一氮压缩机10增压的氮气。
在图4的示例中，从第二精馏塔5的第二塔底部分31抽取的(气态和/或液态)氧经由第一排出管线L33穿过热交换器1，离开热交换器1的中间部分，并且被供给到膨胀涡轮24。氧气由膨胀涡轮24膨胀，通过热交换器1，并作为废气(氧气)被回收。
应该注意的是，在图4中，第二排出管线L32与第一排出管线L33合并，但是管线的布置不限于此。
(实施方式4)
将借助于图5描述根据实施方式4的低温空气分离设备。将关于与实施方式3(图4)的构成元件不同的构成元件给出描述，并且对于相同的构成元件将省略或简化描述。
低温空气分离设备500包括用于向第一精馏塔2或第二精馏塔5供给液氮作为冷源的供给管线L9。
在图5中，供给管线L9将液氮供给到第二精馏塔5的第二塔顶部分54。
(示例性实施方式)
将更具体地描述根据实施方式1(图1)的低温空气分离设备100。
进料空气以5.8barA、20℃和1014Nm3/h从热交换器1的热端供给。进料空气被冷却至-172℃，然后供给至第一精馏塔2的第一塔底部分21。中压塔2的操作压力为5.7barA并且理论级数为50。
进料空气由第一精馏塔2进行精馏，氮在第一塔顶部分23中浓缩，并且从第一塔底部分21回收富氧液体。
氮从第一塔顶部分23被供给至氮冷凝器3，冷凝成液氮，并被送回到第一塔顶部分23。
一部分冷凝的液氮被供给至第二精馏塔5的第二塔顶部分54。
至少一部分从第一塔底部分21抽取的富氧液体作为冷源被供给至粗氩冷凝器7，并且其余富氧液体被供给至第二精馏塔5的中间部分52。
第二精馏塔5在1.45barA下操作，并且理论级数为80。氮气从第二塔顶部分54被回收并供给至热交换器1的冷端，在此从其中释放冷量，此后从热端将它回收。
从第二精馏塔5的第二塔底部分31回收氧。可以以液态回收氧，或者可以以气体的形式将氧气抽取，其中经由热交换器1从其中释放冷，然后作为氧气回收。
氮冷凝器3设置在第二精馏塔5的底部，并且液态氧借助于与中压氮的热交换而被蒸发，由此将蒸气流供给至第二精馏塔5。
从第二精馏塔5的中间部分50抽取粗氩进料气体，并供给到第三塔底部分61进行精馏。第三精馏塔6在1.4barA下操作，并且理论级数为160。粗氩冷凝器7设置在塔的上部部分处。从第三塔顶部分63以8.3Nm3/h的速度回收粗氩液体。
从粗氩塔6的中间部分62抽取高纯度氧进料液体，并将其供给至高纯度氧精馏塔8的中间部分或塔顶部分并进行精馏，然后以7.3Nm3/h的速度回收超高纯度液态氧。高纯度氧精馏塔8的操作压力为1.4barA，理论级数为80。
超高纯度氧蒸发器9设置在高纯度氧精馏塔8的塔底部分81中，并且构造成将蒸气流供给至高纯度氧精馏塔8。高纯度氧冷凝器4设置在高纯度氧精馏塔8的塔顶部分83中，并且构造成将回流液体供给至高纯度氧精馏塔8。
已借助于第一氮压缩机10增压至5.8barA的氮以247Nm3/h的速度供给到热交换器1的热端并冷却至-176℃，此后将其作为重沸源供给到超高纯度氧蒸发器9。
至少一部分冷凝的液氮作为冷源被供给至超高纯度氧冷凝器9，并且在蒸发之后被供给至热交换器1的冷端，并且从其中释放冷量，此后从热端将其回收。回收的氮也可以由氮压缩机再次增压。
上述构型使得可以在不增加进料空气量的情况下供给获得超高纯度氧所需的热源。如上所述，当以7.3Nm3/h的速度从1014Nm3/h的进料空气回收超高纯度氧时，在传统技术的情况下氩回收率被限制为4.2Nm3/h，但是上述构型使得可以以8.3Nm3/h的速度回收氩，这约为上述回收率的两倍，因此可以显著提高设备的经济性。
(优势评价)
将通过与比较例1进行比较来描述与实施方式1-3相对应的示例性实施例1-3的优势。
比较例1：专利文献1(US 5049173 A)
示例性实施例1：实施方式1中的图1
示例性实施例2：实施方式1的变形例中的图2
示例性实施例3：实施方式3中的图3
将比较示例性实施例1和比较例1。在示例性实施例1中，为了产生超高纯度的氧，借助于氮压缩机10供给用于高纯度氧精馏塔8中的重沸和冷凝的氮，而不是如比较例中那样将低温空气分离工艺流体(例如维持产物氩的回收率必不可少的中压氮气)作为热源引入，因此，可以在将产物氩的回收率维持在高水平的同时制造超高纯度氧。如上所述，与现有技术相比，可以回收的高纯度氧量为大约两倍。
将比较示例性实施例2和示例性实施例1。
在示例性实施例1中，将从高纯度氧冷凝器4抽取的氮气和从第二精馏塔的塔顶部分54回收的氮气都引入到第一氮压缩机10中。然而，超高纯度氧蒸发器9中的氮操作压力不必一定是第一氮压缩机10的排出压力，换言之产物氮气压力。高纯度氧冷凝器4中的氮操作压力不必一定等于第一氮压缩机10的进气压力。相反，用于超高纯度氧的蒸发或冷凝的最佳氮压力比可以小于第一氮压缩机10的压缩比，因此可以通过采用最佳压缩比的第二氮压缩机11以进行超高纯度氧精馏而节省所消耗的能量。由于高纯度氧冷凝器4所需的氮量小于超高纯度氧蒸发器9所需的氮量，通过超高纯度氧蒸发器9冷凝的一部分氮的压力降低，并且作为回流液体引入到第二精馏塔5的塔顶部分54中，作为氮气被回收，通过第一氮压缩机10压缩，并在第二氮压缩机11的排出管线中汇合，从而可以维持氮循环平衡以进行高效的高纯度氧精馏。
在可以想到的一个示例中，低压氮压力为1.1barA，并且已经通过氮压缩机10增压的产物氮的压力为5.6barA。高纯度氧精馏塔8的操作压力与第二精馏塔5的压力基本上相同，并且当该压力为1.2barA时，超高纯度氧蒸发器9中的最佳氮压力为5.6barA，并且高纯度氧冷凝器4处于2.7barA。当该超高纯度氧的精馏用氮被再循环压缩机11压缩时的压缩比为5.6/2.7＝2.1倍，但是在氮压缩比下的压缩比为5.6/1.1＝5.1，因此当使用再循环氮压缩机11时，可以节省大约55％的压缩功率。
将比较示例性实施例3和示例性实施例1。
粗氩塔6和高纯度氧精馏塔8包括具有用于分离氩和氧的重叠功能的区段，因此可以通过同一精馏塔进行氩和氧的分离。氩和氧的沸点非常接近，并且分离所需的理论级数增加，因此粗氩塔6和高纯度氧精馏塔8趋于非常高，因此可以通过使用结合了上部粗氩塔620和高纯度氧精馏塔8的同一精馏塔来节省成本，这些成本节省是由于减少了高塔的数量而节省了材料的结果。
在示例性实施例3中，供给至粗氩塔底部部分的含氩气体包括诸如烃的高沸点成分，因此，将已被下部粗氩塔610去除了那些成分的气体供给至上部粗氩塔620。
(不同的实施方式)
尽管没有明确说明，但是也可以在每条管线中安装压力调节器、流量控制器等以调节压力或调节流量。
[附图标记索引]
1...热交换器
2...第一精馏塔
3...第一冷凝器
4...第三冷凝器
5...第二精馏塔
6...第三精馏塔
7...第二冷凝器
8...高纯度氧冷凝器
9...超高纯度氧蒸发器
10...第一氮压缩机
11...第二氮压缩机

Claims (5)

1.一种低温空气分离设备，包括：
用于使进料空气进行热交换的热交换器(1)；
第一精馏塔(2)，已通过所述热交换器(1)的进料空气被引入所述第一精馏塔，所述第一精馏塔(2)包括其中储存有富氧液体的第一塔底部分(21)、用于对进料空气进行精馏的第一精馏部分(22)、和设置在所述第一精馏部分(22)的上部部分处并储存第一蒸发气体的第一塔顶部分(23)；
第一冷凝器(3)，其设置在所述第一塔顶部分(23)的上方，并且采用所述第一塔顶部分(23)中的所述第一蒸发气体作为热源；
第二精馏塔(5)，其包括第二塔底部分(31)、第二精馏部分(51，52，53)和从其中抽取氮气的第二塔顶部分(54)；
用于精馏氩的第三精馏塔(6)，所述第三精馏塔(6)包括向其中引入从第二精馏塔(5)的第二精馏部分(50)的中间部分(51)抽取的粗氩进料气体的第三塔底部分(61)、用于对粗氩进料气体进行精馏的第三精馏部分(62)、以及其中储存有氩的第三塔顶部分(63)；
第二冷凝器(7)，其设置在所述第三塔顶部分(63)的上方并且采用所述第三塔顶部分(63)中的氩作为热源；
用于对超高纯度氧进行精馏的高纯度氧精馏塔(8)，所述高纯度氧精馏塔(8)包括：氧塔底部部分(81)，其具有设置在其下部区域中的超高纯度氧蒸发器(9)；氧精馏部分(82)，从第三精馏塔(6)的第三精馏部分(62)的中间部分抽取的富氧液体被引入到所述氧精馏部分；和氧塔顶部部分(83)，氧蒸发气体从其中被抽取以返回到所述第三精馏塔(6)的第三精馏部分(62)的中间部分；
第三冷凝器(4)，其设置在氧塔顶部部分(83)的上方并采用所述氧塔顶部部分(83)中的氧蒸发气体作为热源；
第一氮压缩机(10)，其用于在已使从所述第三冷凝器(4)的上部区域(41)抽取的第二氮气和从所述第二精馏塔(5)的第二塔顶部分(54)抽取的第一氮气通过所述热交换器(1)之后压缩所述第二氮气和所述第一氮气；以及
压缩再循环气体管线(L52)，其用于将由所述第一氮压缩机(10)压缩的产物氮气作为压缩再循环气体引入到所述超高纯度氧蒸发器(9)的热端中。
2.根据权利要求1所述的低温空气分离设备，包括第二氮压缩机(11)，其用于压缩从所述第三冷凝器(4)的上部区域(41)抽取并已经过所述热交换器(1)的第二氮气。
3.根据权利要求1或2所述的低温空气分离设备，其中，所述第三精馏塔(6)在被引入所述超高纯度氧精馏塔(8)中的富氧液体被抽取的位置处被划分为上部粗氩塔(620)和下部粗氩塔(610)。
4.根据权利要求1至3中任一项所述的低温空气分离设备，包括膨胀涡轮(24)，该膨胀涡轮用于使以下气体中的至少一种气体膨胀：混合气体，该混合气体包括进料空气、从所述第二精馏塔(5)回收的氮气、从所述第一冷凝器(3)的上部部分(31)抽取的氧气、和从第一精馏塔、第二精馏塔或第三精馏塔中的任一者排出的废气中的两种或更多种气体；以及通过所述第一氮压缩机(10)和/或所述第二氮压缩机(11)增压的氮气。
5.根据权利要求1至4中任一项所述的低温空气分离设备，包括用于将液氮作为冷源供给至所述第一精馏塔(2)或所述第二精馏塔(5)的供给管线(L9)。
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