CN111735990B - 惯性传感器、电子设备以及移动体 - Google Patents
惯性传感器、电子设备以及移动体 Download PDFInfo
- Publication number
- CN111735990B CN111735990B CN202010075194.7A CN202010075194A CN111735990B CN 111735990 B CN111735990 B CN 111735990B CN 202010075194 A CN202010075194 A CN 202010075194A CN 111735990 B CN111735990 B CN 111735990B
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- stopper
- inertial sensor
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Images
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5705—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
- G01P2015/0831—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type having the pivot axis between the longitudinal ends of the mass, e.g. see-saw configuration
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0862—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system
- G01P2015/0871—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system using stopper structures for limiting the travel of the seismic mass
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Pressure Sensors (AREA)
- Gyroscopes (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019-015333 | 2019-01-31 | ||
| JP2019015333A JP7135901B2 (ja) | 2019-01-31 | 2019-01-31 | 慣性センサー、電子機器および移動体 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN111735990A CN111735990A (zh) | 2020-10-02 |
| CN111735990B true CN111735990B (zh) | 2022-06-28 |
Family
ID=71837015
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010075194.7A Active CN111735990B (zh) | 2019-01-31 | 2020-01-22 | 惯性传感器、电子设备以及移动体 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US20200249022A1 (https=) |
| JP (1) | JP7135901B2 (https=) |
| CN (1) | CN111735990B (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2022175616A (ja) * | 2021-05-14 | 2022-11-25 | セイコーエプソン株式会社 | 慣性センサー及び慣性計測装置 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002162411A (ja) * | 2000-11-27 | 2002-06-07 | Matsushita Electric Works Ltd | 半導体加速度センサおよび半導体加速度センサの検査方法 |
| JP2006250550A (ja) * | 2005-03-08 | 2006-09-21 | Omron Corp | センサ |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| ITTO20070033A1 (it) * | 2007-01-19 | 2008-07-20 | St Microelectronics Srl | Dispositivo microelettromeccanico ad asse z con struttura di arresto perfezionata |
| JP6205921B2 (ja) * | 2013-07-11 | 2017-10-04 | セイコーエプソン株式会社 | 物理量センサー、電子機器、および移動体 |
| CN104569490B (zh) * | 2015-01-30 | 2018-01-19 | 歌尔股份有限公司 | 一种加速度计的z轴结构及其生产方法 |
| US10078098B2 (en) * | 2015-06-23 | 2018-09-18 | Analog Devices, Inc. | Z axis accelerometer design with offset compensation |
| US10869393B2 (en) * | 2015-06-29 | 2020-12-15 | Microsoft Technology Licensing, Llc | Pedestal mounting of sensor system |
| JP2017020897A (ja) * | 2015-07-10 | 2017-01-26 | セイコーエプソン株式会社 | 物理量センサー、電子機器および移動体 |
| JP6705168B2 (ja) * | 2015-12-28 | 2020-06-03 | セイコーエプソン株式会社 | センサー用基板、物理量検出センサー、加速度センサー、電子機器、および移動体 |
| JP2018044871A (ja) * | 2016-09-15 | 2018-03-22 | 株式会社日立製作所 | 加速度センサ |
| JP6691882B2 (ja) * | 2017-03-03 | 2020-05-13 | 株式会社日立製作所 | 加速度センサ |
| JP2019039804A (ja) * | 2017-08-25 | 2019-03-14 | セイコーエプソン株式会社 | Ｍｅｍｓデバイス、電子機器、および移動体 |
| JP2019045172A (ja) * | 2017-08-30 | 2019-03-22 | セイコーエプソン株式会社 | 物理量センサー、複合センサー、慣性計測ユニット、携帯型電子機器、電子機器及び移動体 |
| JP6943130B2 (ja) * | 2017-10-11 | 2021-09-29 | セイコーエプソン株式会社 | Ｍｅｍｓデバイス、慣性計測装置、移動体測位装置、携帯型電子機器、電子機器、および移動体 |
-
2019
- 2019-01-31 JP JP2019015333A patent/JP7135901B2/ja active Active
-
2020
- 2020-01-22 CN CN202010075194.7A patent/CN111735990B/zh active Active
- 2020-01-28 US US16/774,745 patent/US20200249022A1/en not_active Abandoned
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002162411A (ja) * | 2000-11-27 | 2002-06-07 | Matsushita Electric Works Ltd | 半導体加速度センサおよび半導体加速度センサの検査方法 |
| JP2006250550A (ja) * | 2005-03-08 | 2006-09-21 | Omron Corp | センサ |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2020122730A (ja) | 2020-08-13 |
| US20200249022A1 (en) | 2020-08-06 |
| JP7135901B2 (ja) | 2022-09-13 |
| CN111735990A (zh) | 2020-10-02 |
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| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |