CN111735775A - Beam waist hyperbolic type photoacoustic cell for gas photoacoustic spectrum detection - Google Patents
Beam waist hyperbolic type photoacoustic cell for gas photoacoustic spectrum detection Download PDFInfo
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- 238000001514 detection method Methods 0.000 title claims abstract description 22
- 238000001834 photoacoustic spectrum Methods 0.000 title claims abstract description 6
- 239000011521 glass Substances 0.000 claims abstract description 31
- 239000000565 sealant Substances 0.000 claims abstract description 7
- 238000004867 photoacoustic spectroscopy Methods 0.000 claims description 4
- 238000004891 communication Methods 0.000 claims description 2
- 230000000694 effects Effects 0.000 abstract description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 9
- 230000035945 sensitivity Effects 0.000 description 8
- 238000000034 method Methods 0.000 description 7
- 239000000306 component Substances 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
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- 239000000463 material Substances 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 238000005457 optimization Methods 0.000 description 2
- 238000010895 photoacoustic effect Methods 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 229910001369 Brass Inorganic materials 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 230000004323 axial length Effects 0.000 description 1
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- 239000010951 brass Substances 0.000 description 1
- 230000003139 buffering effect Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
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- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
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- 238000003199 nucleic acid amplification method Methods 0.000 description 1
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- 238000004088 simulation Methods 0.000 description 1
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- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
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- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
- G01N2021/1704—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids in gases
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Abstract
The invention discloses a beam waist hyperbolic photoacoustic cell for gas photoacoustic spectrum detection, and relates to a gas detection photoacoustic cell. The structure of the photovoltaic cell is as follows: the center of the shell (0) is provided with a resonant cavity (5), the left side and the right side of the resonant cavity (5) are symmetrically provided with a 1 st glass window (2), a 1 st buffer chamber (1), a 2 nd glass window (6) and a 2 nd buffer chamber (8), the center of the upper side of the resonant cavity (5) is provided with a microphone (7), the lower side of the 1 st buffer chamber (1) is provided with an air inlet (3), the lower side of the 2 nd buffer chamber 8 is provided with an air outlet (4), and other spaces of the shell (0) are filled with sealant (9). The invention improves the quality factor Q and the signal-to-noise ratio of the photoacoustic cell; the regulation and control among important parameters such as resonance frequency, sound pressure amplitude, quality factor Q and the like are more convenient; obtaining a maximum photoacoustic signal; the bus eccentricity of the resonant cavity can be properly adjusted according to the diversity of requirements, and the best effect of detection performance is achieved.
Description
Technical Field
The invention relates to a gas detection photoacoustic cell, in particular to a beam waist hyperbolic type photoacoustic cell for gas photoacoustic spectrum detection.
Background
Photoacoustic spectroscopy is a spectroscopic technique based on the photoacoustic effect; in the photoacoustic effect, gas molecules absorb light with specific wavelength and are excited to a high-energy state, the molecules in the high-energy state convert the absorbed light energy into heat energy in a nonradiative transition mode and then return to a low-energy state, then the incident light is subjected to frequency modulation, the heat energy shows periodic variation the same as the modulation frequency to generate sound waves, sound signals are detected through a microphone, and the final concentration of the gas can be obtained through calculation, so that the method is very suitable for gas measurement and interference-free measurement under the complex multi-component and multi-type gas background.
The photoacoustic cell is divided into a resonant type and a non-resonant type according to the working mode: the resonant photoacoustic cell has the advantages of high response speed, strong resonance amplification effect and high gas detection sensitivity, but the structure is relatively complex and the drift of resonance frequency is easy to occur. The non-resonant photoacoustic cell has the advantages of simple structure, low manufacturing cost, low detection sensitivity, weaker detected signal strength and lower accuracy. To ensure the sensitivity and accuracy of such detection, resonant photoacoustic cells are increasingly used for photoacoustic detection.
Disclosure of Invention
The invention aims to overcome the defects and shortcomings of weak photoacoustic signal sensitivity, limited working frequency band and the like of a photoacoustic cell in the prior art, and provides a beam waist hyperbolic photoacoustic cell for gas photoacoustic spectrum detection and a method thereof. The invention reduces the heat loss and viscous loss of the boundary layer of the resonant cavity, and is beneficial to the accumulation of the energy of the photoacoustic signal in the cavity, thereby forming standing waves and improving the detection sensitivity; in addition, the curvature of the double-curved resonant cavity is adjustable, so that the cavity can be designed according to different curvatures, and the working frequency band is widened.
The purpose of the invention is realized as follows:
the core component which influences the sensitivity of the photoacoustic spectroscopy gas detection system mainly comprises a light source, a photoacoustic cell and a microphone, wherein the resonance photoacoustic cell is used as a generating source of photoacoustic signals and is the core component of the photoacoustic spectroscopy measurement system, and whether the design of the resonance photoacoustic cell reasonably and directly influences the sensitivity of the detected sound pressure signals or not is judged.
Photo-acoustic cell
The invention comprises a shell, a 1 st buffer chamber, a 1 st glass window, an air inlet, an air outlet, a resonant cavity, a 2 nd glass window, a microphone, a 2 nd buffer chamber and sealant;
the position and the communication relation are as follows:
the center of the shell is provided with a resonant cavity, the left side and the right side of the resonant cavity are symmetrically provided with a 1 st glass window, a 1 st buffer chamber, a 2 nd glass window and a 2 nd buffer chamber, the center of the upper side of the resonant cavity is provided with a microphone, the lower side of the 1 st buffer chamber is provided with an air inlet, the lower side of the 2 nd buffer chamber is provided with an air outlet, and other spaces of the shell are filled with sealant.
Second, model establishment
Assuming that the gas in the cell is approximately an ideal gas, the wave equation satisfied by the acoustic signal can be expressed as:
in the formula
Is a displacement vector, p is a sound pressure, v2Sound velocity of gas in the cavity, gamma is specific heat ratio, H (r, t) is heat energy generated by light energy absorbed and modulated by gas, and sound pressure is used
Describing sound waves in a gas, the sound pressure is the total pressure P and the mean pressure P0Difference of difference
Fourier transform of equation (1) yields:
omega is the frequency of the modulated light, and the solution is obtained by using a normal mode
Is unfolded
Solving the non-homogeneous equation (2) yields:
in the formula
The expression of the normal mode for the acoustic vibration is related to the structure of the photoacoustic cell, and represents the standing wave form existing in the photoacoustic cavity, and the amplitude Aj(ω) is related to the modulation frequency ω of the light source,
is a solution of the following wave equation:
calculating the model by utilizing finite element simulation software capable of realizing multi-physical-field coupling, and analyzing a simulation calculation result, wherein the method comprises the following steps: calculating the resonant frequency of the cavity, and calculating the relation between the resonant frequency and the geometric parameters of the resonant cavity of the photoacoustic cell and the relation between the sound pressure and the geometric parameters of the resonant cavity of the photoacoustic cell when the photoacoustic cell works in a resonant mode; and determining the geometric parameters of the photoacoustic cell resonant cavity according to the relationship between the resonance frequency and the geometric parameters of the photoacoustic cell resonant cavity, the relationship between the sound pressure and the geometric parameters of the photoacoustic cell resonant cavity and the radius of a laser output light spot.
The traditional cylindrical resonant cavity is optimized into the hyperbolic resonant cavity, the photoacoustic cell has the advantages that the photoacoustic cell is simple in structural design, all components are symmetrically distributed, the quality factor Q and the signal-to-noise ratio of the photoacoustic cell are improved to a certain extent, the characteristic mode for detection is more comprehensive and easy to process, the internal surface of the resonant cavity is polished, acoustic wave damping is reduced, accumulation of photoacoustic signal energy in the cavity is facilitated, standing waves are formed, and the detection sensitivity is improved.
Third, application
Modulating the frequency of the chopper within a certain range, keeping constant gas concentration and flow in the photoacoustic cavity, setting 10s of delay between the step length of every two frequencies, collecting data with the integration time of 300ms, and performing Lorentz fitting on the collected data to obtain the concentration of the gas to be measured.
Compared with the prior art, the invention has the following advantages and positive effects:
1. according to the resonant cavity of the photoacoustic cell, the quartz glass tube is used for replacing traditional metal, the hardness of the resonant cavity is ensured, meanwhile, the roughness of the inner surface is greatly reduced, the gas adsorption and viscous effect can be effectively reduced, and the quality factor Q and the signal-to-noise ratio of the photoacoustic cell are improved;
2. compared with the traditional resonant cavity, the curved beam waist type structure introduces the bus eccentricity to realize high-dimensional three-dimensional optimization, and is more convenient for regulating and controlling important parameters such as resonant frequency, sound pressure amplitude, quality factor Q and the like;
3. the length of the short half axis of the resonant cavity bus and the length of the resonant cavity of the photoacoustic cell provided by the invention can be suitable for light sources with different light beam qualities for optimization, and the maximum photoacoustic signal is obtained under the condition of ensuring that the background noise is not changed;
4. the bus eccentricity of the resonant cavity can be properly adjusted according to the diversity of requirements, and the best effect of detection performance is achieved.
Drawings
Fig. 1 is a schematic diagram of the structure of the present photoacoustic cell.
0-shell;
1-1 st buffer chamber;
2-1 st glass window;
3-an air inlet;
4, an air outlet;
5, a resonant cavity;
6-2 nd glass window;
7-microphone;
8-2 nd buffer chamber;
and 9, sealing glue.
Detailed Description
The following detailed description is made with reference to the accompanying drawings and examples.
Structure of photoacoustic cell
1. General of
The invention comprises a shell 0, a 1 st buffer chamber 1, a 1 st glass window 2, an air inlet 3, an air outlet 4, a resonant cavity 5, a 2 nd glass window 6, a microphone 7, a 2 nd buffer chamber 8 and a sealant 9;
the position and connection relation is as follows:
the center of the shell 0 is provided with a resonant cavity 5, the left side and the right side of the resonant cavity 5 are symmetrically provided with a 1 st glass window 2, a 1 st buffer chamber 1, a 2 nd glass window 6 and a 2 nd buffer chamber 8, the center of the upper side of the resonant cavity 5 is provided with a microphone 7, the lower side of the 1 st buffer chamber 1 is provided with an air inlet 3, the lower side of the 2 nd buffer chamber 8 is provided with an air outlet 4, and other spaces of the shell 0 are filled with sealant 9.
3. Mechanism of operation
The 1 st buffer chamber 1 and the 2 nd buffer chamber 8 are symmetrically arranged on two sides of the central axis of the shell 0; the 1 st buffer chamber 1 is communicated with the 1 st glass window 2, and the 2 nd buffer chamber 2 is communicated with the 2 nd special glass window 6; incident light enters the 1 st buffer chamber 1 from the 1 st glass window 2, passes through the resonant cavity 5 and the 2 nd buffer chamber 8 and exits from the 2 nd glass window 6; the resonant cavity 5 is a curved beam waist-shaped quartz glass tube and is communicated with the 1 st buffer chamber 1 and the 2 nd buffer chamber 8; the gas to be detected enters from the gas inlet 3 and exits from the gas outlet 4, and the microphone 7 is arranged at the center in the resonant cavity 5 and used for detecting a photoacoustic signal generated by the resonant cavity 5;
the gas to be measured enters from the gas inlet 3, the modulated laser enters from the No. 1 glass window 2 and exits from the No. 2 glass window 6; after being excited by modulated light incident from the 1 st glass window 2, the gas to be measured generates an acoustic signal and resonates with the resonant cavity 5; the microphone 7 detects the acoustic signal at the antinode of the standing wave formed, and determines the concentration information of the gas by processing the detected acoustic signal; after the detection is finished, the laser is not introduced any more, and the gas is discharged from the gas outlet 4 to carry out the next detection.
2. Functional component
1) No. 1 buffer chamber 1
The 1 st buffer cavity 1 is cylindrical, the length is 50mm, and the diameter and the length of the section of the buffer cavity are 40 mm; for buffering the gas to be measured.
2) 1 st glass window 2
The 1 st glass window 2 is in a small hole shape; from which the incident light is incident.
3) Air inlet 3
The air inlet 3 is cylindrical; from which the gas to be measured enters.
4) Air outlet 4
The air outlet 4 is cylindrical; from which the gas to be measured is discharged.
5) Resonant cavity 5
The resonant cavity 5 is in a hyperbolic beam waist shape; resonates at the detection frequency together with the 1 st and 2 nd buffer chambers 1 and 8, and the amplitude is expanded.
The length of the resonant cavity 5 is 50-150 mm, the half-short axial length of a bus is 2.5-7.5 mm, and the eccentricity is more than or equal to 5 and less than or equal to 1000.
6) 2 nd glass window 6
The 2 nd glass window 6 is in a small hole shape; from which the outgoing light exits.
7) Microphone 7
The microphone 7 is cylindrical; the acoustic detector is arranged in the center of the resonant cavity and used for detecting an acoustic signal generated by the resonant cavity.
8) 2 nd buffer chamber 8
The structure and function of the No. 2 buffer cavity 8 and the No. 1 buffer cavity 1 are the same.
Process for preparing photoacoustic cell
The resonant cavity 5 is a quartz glass tube designed in a curved beam waist type (spindle type) and is communicated with a 1 st buffer chamber and a 2 nd buffer chamber 8;
the resonant cavity 5 utilizes a hollow structure glass tube made of high-purity quartz material to replace a traditional cylindrical metal resonant cavity, adopts a mature glass tube pulling and cleaning method to obtain the photoacoustic resonant cavity with the nanometer-level inner wall finish, and compared with the traditional photoacoustic cell structure, the curved beam waist-shaped structure has lower gas viscosity, lower photoacoustic sound pressure background noise and higher Q value.
Laser beams pass through a quartz glass window with the transmissivity of more than 95% and are emitted into the photoacoustic cell along the axis of the photoacoustic cell, and the photoacoustic cell can be well matched with an axisymmetric light beam and an axisymmetric excitation sound field, is easy to process and is designed into a centrosymmetric three-dimensional curved body.
The traditional resonant cavity adopts metal materials such as brass and the like, and the surface roughness of the traditional resonant cavity is in the micron order through machining and polishing coating processes; the invention adopts the mature drawing process of the quartz glass tube, the roughness of the inner surface of the hollow glass tube resonant cavity of the high-purity silicon dioxide can be controlled within 1 nanometer, and is 3 orders of magnitude lower than that of a metal material. And the rigidity of the quartz material is about 7 times higher than that of the metal copper, so that the hardness of the resonant cavity can be ensured.
Claims (2)
1. A beam waist hyperbolic type photoacoustic cell for gas photoacoustic spectrum detection is characterized in that:
the device comprises a shell (0), a 1 st buffer chamber (1), a 1 st glass window (2), an air inlet (3), an air outlet (4), a resonant cavity (5), a 2 nd glass window (6), a microphone (7), a 2 nd buffer chamber (8) and a sealant (9);
the position and the communication relation are as follows:
the center of the shell (0) is provided with a resonant cavity (5), the left side and the right side of the resonant cavity (5) are symmetrically provided with a 1 st glass window (2), a 1 st buffer chamber (1), a 2 nd glass window (6) and a 2 nd buffer chamber (8), the center of the upper side of the resonant cavity (5) is provided with a microphone (7), the lower side of the 1 st buffer chamber (1) is provided with an air inlet (3), the lower side of the 2 nd buffer chamber 8 is provided with an air outlet (4), and other spaces of the shell (0) are filled with sealant (9).
2. A beam-waist hyperbolic photoacoustic cell for photoacoustic spectroscopy of a gas as set forth in claim 1, wherein:
the 1 st and 2 nd buffer chambers (1 and 8) are cylindrical, the length is 50mm, and the diameter of the cross section is 40 mm;
the 1 st and 2 nd glass windows (2 and 6) are in a small hole shape;
the resonant cavity (5) is in a hyperbolic beam waist shape, resonates with the 1 st buffer cavity (1) and the 2 nd buffer cavity (8) under the detection frequency, the length of the resonant cavity (5) is 50-150 mm, the half-short axis length of a bus is 2.5-7.5 mm, and the eccentricity is greater than or equal to 5 and less than or equal to 1000.
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| WO2023213067A1 (en) * | 2022-05-05 | 2023-11-09 | 南方电网科学研究院有限责任公司 | Horn-shaped photoacoustic cell for photoacoustic spectroscopy gas detection |
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| WO2023213067A1 (en) * | 2022-05-05 | 2023-11-09 | 南方电网科学研究院有限责任公司 | Horn-shaped photoacoustic cell for photoacoustic spectroscopy gas detection |
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