CN111726928B - Beam scanning leading-out device of irradiation accelerator - Google Patents

Beam scanning leading-out device of irradiation accelerator Download PDF

Info

Publication number
CN111726928B
CN111726928B CN202010448343.XA CN202010448343A CN111726928B CN 111726928 B CN111726928 B CN 111726928B CN 202010448343 A CN202010448343 A CN 202010448343A CN 111726928 B CN111726928 B CN 111726928B
Authority
CN
China
Prior art keywords
scanning
box
titanium film
wind
flange
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202010448343.XA
Other languages
Chinese (zh)
Other versions
CN111726928A (en
Inventor
崔爱军
朱志斌
张立峰
韩广文
吕约澎
杨誉
毕振亮
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
China Institute of Atomic of Energy
Original Assignee
China Institute of Atomic of Energy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by China Institute of Atomic of Energy filed Critical China Institute of Atomic of Energy
Priority to CN202010448343.XA priority Critical patent/CN111726928B/en
Publication of CN111726928A publication Critical patent/CN111726928A/en
Application granted granted Critical
Publication of CN111726928B publication Critical patent/CN111726928B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05HPLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H7/00Details of devices of the types covered by groups H05H9/00, H05H11/00, H05H13/00
    • H05H7/04Magnet systems, e.g. undulators, wigglers; Energisation thereof
    • GPHYSICS
    • G21NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21KTECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K5/00Irradiation devices
    • G21K5/04Irradiation devices with beam-forming means
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05HPLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H7/00Details of devices of the types covered by groups H05H9/00, H05H11/00, H05H13/00
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05HPLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H7/00Details of devices of the types covered by groups H05H9/00, H05H11/00, H05H13/00
    • H05H7/001Arrangements for beam delivery or irradiation
    • H05H2007/005Arrangements for beam delivery or irradiation for modifying beam emittance, e.g. stochastic cooling devices, stripper foils

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Optics & Photonics (AREA)
  • Particle Accelerators (AREA)

Abstract

The invention relates to a beam scanning leading-out device of an irradiation accelerator, which comprises a scanning magnet, a scanning box, an air box and a water cooling pipe, wherein the scanning magnet is arranged on the scanning box; the scanning magnet is sleeved on the scanning box; an inlet flange is arranged on the scanning box, and a titanium film is arranged at the scanning port of the scanning box; the water cooling pipe is arranged on the surface of the scanning box, and the wind box enables wind cooling airflow to blow the surface of the titanium film so as to cool the surface of the titanium film. The invention has the following beneficial effects: the invention cools the titanium film of the scanning box in an air cooling mode, and can effectively take away the surface light heat of the titanium film, thereby reducing the damage of the titanium film and prolonging the service cycle of the titanium film. The water-cooled tube can cool down the scanning box, assists the titanium film cooling, gains better radiating effect. The air outlet of the air box inclines towards the direction in which the titanium film is sunken when in work, so that the uniform cooling air quantity on the surface of the titanium film is ensured. The reinforcing rib can solve the deformation caused by the pressure difference between the inside and the outside of the scanning box.

Description

Beam scanning leading-out device of irradiation accelerator
Technical Field
The invention belongs to the field of electron irradiation accelerators, and particularly relates to a beam scanning leading-out device of an irradiation accelerator.
Background
Aiming at the field of electron irradiation and processing, high-energy electron acceleration is widely applied at present, when an electron accelerator is used for irradiation processing, a high-energy electron beam flow generated by the accelerator needs to be scanned and led out through a scanning magnet, and the electron beam needs to penetrate through a titanium film to perform processing such as irradiation on goods. The thickness of the titanium film cannot be too thick, the outer side of the titanium film is atmosphere, the inner side of the titanium film is vacuum, the titanium film is sunken towards the inside of the scanning box body under the normal working condition, the titanium film is irradiated by electron beams after being used for a long time, so that the titanium film is damaged due to heating, the damage to the titanium film can damage the operation of the whole accelerator, and the production is influenced.
In view of the above, the present invention is particularly proposed.
Disclosure of Invention
Aiming at the defects in the prior art, the invention aims to provide a beam scanning leading-out device of an irradiation accelerator.
The technical scheme of the invention is as follows:
a beam scanning leading-out device of an irradiation accelerator comprises a scanning magnet, a scanning box, an air box and a water cooling pipe; the scanning magnet is sleeved on the scanning box; an inlet flange is arranged on the scanning box, and a titanium film is arranged at the scanning port of the scanning box; the water cooling pipe is arranged on the surface of the scanning box, and the wind box enables wind cooling airflow to blow the surface of the titanium film so as to cool the surface of the titanium film.
Further, in the irradiation accelerator beam scanning extraction device, the air outlet of the air box is flat, so that the airflow at the air outlet uniformly blows the surface of the titanium film.
Further, in the beam scanning and leading-out device of the irradiation accelerator, the air outlet of the air box is inclined towards the direction in which the titanium film sags when in work, so that the airflow at the air outlet can be ensured to uniformly blow the surface of the titanium film.
Further, in the beam scanning extraction device of the irradiation accelerator, the scanning box is in a shape with a small top and a big bottom so as to arrange a titanium film.
Furthermore, in the beam scanning and leading-out device of the irradiation accelerator, the scanning box is provided with an upper flange and a lower flange; the titanium film is installed through an upper flange and a lower flange.
Furthermore, in the beam scanning leading-out device of the irradiation accelerator, the scanning box is also provided with a titanium pump for maintaining the vacuum degree in the scanning box.
Further, in the beam scanning extraction device of the irradiation accelerator, the water cooling tube is arranged at a position close to the titanium film.
Furthermore, in the beam scanning leading-out device of the irradiation accelerator, the surface of the scanning box is provided with the reinforcing ribs.
Furthermore, in the beam scanning leading-out device of the irradiation accelerator, the reinforcing ribs and the water cooling pipes are arranged in parallel.
Furthermore, in the beam scanning and leading-out device of the irradiation accelerator, the reinforcing ribs are arranged perpendicular to the direction in which the beams enter the scanning box.
The invention has the following beneficial effects:
1. the invention cools the titanium film of the scanning box in an air cooling mode, and can effectively take away the surface light heat of the titanium film, thereby reducing the damage of the titanium film and prolonging the service cycle of the titanium film.
2. The water-cooled tube can cool down the scanning box, and supplementary titanium film cooling gains better radiating effect.
3. The air outlet of the air box inclines towards the direction in which the titanium film is sunken when in work, so that the uniform cooling air quantity on the surface of the titanium film is ensured.
4. The reinforcing rib can solve the deformation caused by the pressure difference between the inside and the outside of the scanning box.
Drawings
Fig. 1 is a schematic structural diagram of a beam scanning extraction device of an irradiation accelerator.
Fig. 2 is a cross-sectional structure diagram of the beam scanning extractor of the irradiation accelerator.
Fig. 3 is a schematic structural view of the wind box of the present invention.
In the above drawings, 1, a scanning magnet; 2. a scanning box; 3. a water-cooled tube; 4. a wind box; 5. a titanium pump; 6. a titanium film; 201. an inlet flange; 202. reinforcing ribs; 203. an upper flange; 204. a lower flange; 205. a titanium pump interface; 401. a blind flange; 402. a terminal flange; 403. a wind box main body; 404. an air outlet; 405. fixing a bracket; 406. and an air inlet flange.
Detailed Description
The invention is described in detail below with reference to the figures and examples.
As shown in fig. 1 and fig. 2, the invention provides a beam scanning extractor of an irradiation accelerator, which comprises a scanning magnet 1, a scanning box 2, a wind box 4 and a water cooling tube 3; the scanning magnet 1 is sleeved on the scanning box 2; an inlet flange 201 is arranged on the scanning box 2, and a titanium film 6 is arranged at the scanning port of the scanning box 2; the water cooling tube 3 is arranged on the surface of the scanning box 2, and the wind box 4 blows air cooling airflow to the surface of the titanium film so as to cool the surface of the titanium film. The titanium film 6 which is most easily damaged by the beam scanning leading-out device is thin, the electron beam directly penetrates under the action of atmospheric pressure for a long time, and in order to prolong the service life of the electron beam and reduce the replacement frequency, the titanium film of the scanning box 2 is cooled in an air cooling mode, so that the surface light heat of the titanium film can be effectively taken away, the damage of the titanium film is reduced, and the service cycle of the electron beam is prolonged. The water-cooling tube 3 can cool down the scanning box 2, assists the titanium film cooling, gains better radiating effect to it is better to be close to the titanium film setting effect. At the same time, the water-cooled tube 3 can reduce the heat generation caused by the electron beam striking the scanning box 2.
In this embodiment, the scanning box 2 is formed in a shape having a small top and a large bottom, preferably in a trapezoidal shape, so as to dispose the titanium film 6 and also facilitate the mounting of the scanning magnet 1. An upper flange 203 and a lower flange 204 are arranged on the scanning box 2; the titanium membrane 6 is mounted by means of an upper flange 203 and a lower flange 204.
When the scanning leading-out device works, electron beams enter a scanning magnetic field of the scanning magnet 1 from the inlet flange 201 of the scanning box 2, the electron beams are swept out and led out under the action of the magnetic field force of the scanning magnet, and the electron beams penetrate through the titanium film 6 to enter the atmospheric environment and irradiate target goods.
As shown in fig. 3, the wind box 4 includes a blind flange 401, a tip flange 402, a wind box main body 403, a wind outlet 404, a fixing bracket 405, and a wind inlet flange 406. The two ends of the wind box main body 403 are provided with end flanges 402 which are respectively connected with the wind inlet flange 406 and the blind flange 401, the wind outlet 404 of the wind box 4 is arranged on the side edge of the wind box main body 403 and is flat so that the airflow of the wind outlet 404 can uniformly blow the surface of the titanium film, and the wind outlet 404 of the wind box 4 inclines towards the direction in which the titanium film 6 sags when in operation so as to ensure that the airflow of the wind outlet 404 can uniformly blow the surface of the titanium film. The magazine main body 403 is mounted on the scanner magazine 2 via a fixing bracket 405.
The inside vacuum environment that is of scanning box 2, electron beam process scanning magnetic field occasionally some electron beam can strike 2 inner walls of scanning box to influence its vacuum, for the stability of guaranteeing vacuum, still be provided with the titanium pump 5 that is used for maintaining vacuum in the scanning box 2 on the scanning box 2. In this embodiment, the titanium pump 5 is designed with a titanium pump interface 205 through the scanning box 2, and the titanium pump 5 is installed to stabilize the vacuum degree.
The scanning box 2 has pressure difference inside and outside, and the scanning box 2 body is always under the action of atmospheric pressure, and in order to reduce the deformation of the scanning box 2 body, the surface of the scanning box 2 is provided with a reinforcing rib 202. In order to further ensure the supporting effect, the reinforcing ribs 202 are arranged perpendicular to the direction of the beam entering the scanning box 2. In addition, the water-cooling tube 3 and the reinforcing rib 202 are arranged in parallel, and can play a certain reinforcing role.
The invention cools the titanium film of the scanning box in an air cooling mode, and can effectively take away the surface light heat of the titanium film, thereby reducing the damage of the titanium film and prolonging the service cycle of the titanium film. The water-cooled tube can cool down the scanning box, assists the titanium film cooling, gains better radiating effect. The air outlet of the air box inclines towards the direction in which the titanium film is sunken when in work, so that the uniform cooling air quantity on the surface of the titanium film is ensured. The reinforcing rib can solve the deformation caused by the pressure difference between the inside and the outside of the scanning box.
It will be apparent to those skilled in the art that various changes and modifications may be made in the present invention without departing from the spirit and scope of the invention. Thus, if such modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention is intended to include such modifications and variations.

Claims (4)

1. A beam scanning and leading-out device of an irradiation accelerator is characterized by comprising a scanning magnet, a scanning box, an air box and a water cooling pipe; the scanning magnet is sleeved on the scanning box; an inlet flange is arranged on the scanning box, and a titanium film is arranged at the scanning port of the scanning box; the water cooling pipe is arranged on the surface of the scanning box, and the wind box blows air cooling airflow to the surface of the titanium film so as to cool the surface of the titanium film; the wind box comprises a blind flange, a tail end flange, a wind box main body, a wind outlet, a fixed support and a wind inlet flange; the wind box comprises a wind box main body, a wind inlet flange, a wind box main body, a wind box air outlet and a wind box air outlet, wherein the wind box main body is provided with tail end flanges at two ends, the tail end flanges are respectively connected with the wind inlet flange and the blind flange, the wind box air outlet is arranged at the side edge of the wind box main body, the wind box air outlet is flat so that airflow of the wind outlet uniformly blows the surface of a titanium film, and the wind box air outlet is inclined towards the direction in which the titanium film is sunken when in work so as to ensure that the airflow of the wind outlet uniformly blows the surface of the titanium film; the wind box main body is arranged on one side of the scanning box through a fixed bracket;
The surface of the scanning box is provided with a reinforcing rib, the reinforcing rib and the water-cooled tube are arranged in parallel, and the reinforcing rib is arranged in a direction perpendicular to the direction of beam entering the scanning box; the water-cooling tube is arranged at a position close to the titanium film.
2. The irradiation accelerator beam scanning extractor of claim 1 wherein the scan box is shaped with a small top and a large bottom for disposing a titanium film.
3. The irradiation accelerator beam scanning extractor of claim 1, wherein the scanning box is provided with an upper flange and a lower flange; the titanium film is installed through an upper flange and a lower flange.
4. The beam scanning extractor of an irradiation accelerator as defined in claim 1, wherein the scanning box is further provided with a titanium pump for maintaining the vacuum degree in the scanning box.
CN202010448343.XA 2020-05-25 2020-05-25 Beam scanning leading-out device of irradiation accelerator Active CN111726928B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202010448343.XA CN111726928B (en) 2020-05-25 2020-05-25 Beam scanning leading-out device of irradiation accelerator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202010448343.XA CN111726928B (en) 2020-05-25 2020-05-25 Beam scanning leading-out device of irradiation accelerator

Publications (2)

Publication Number Publication Date
CN111726928A CN111726928A (en) 2020-09-29
CN111726928B true CN111726928B (en) 2022-06-28

Family

ID=72565030

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202010448343.XA Active CN111726928B (en) 2020-05-25 2020-05-25 Beam scanning leading-out device of irradiation accelerator

Country Status (1)

Country Link
CN (1) CN111726928B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112822831A (en) * 2021-02-09 2021-05-18 上海高鹰科技有限公司 Irradiation accelerator and beam irradiation uniformity adjusting method thereof

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101562060A (en) * 2009-05-27 2009-10-21 山东蓝孚电子加速器技术有限公司 Safe extraction system of electron beams
CN202262020U (en) * 2011-08-04 2012-05-30 舟山雷大电子科技有限公司 Titanium window side blowing cooling device of electronic accelerator
CN204157151U (en) * 2014-09-25 2015-02-11 广东天安新材料股份有限公司 Cooling device and use the electron radiation accelerator of this cooling device
CN104619109A (en) * 2015-02-26 2015-05-13 无锡鑫宏业特塑线缆有限公司 Electron accelerator titanium window cooling air nozzle
CN204539605U (en) * 2015-03-16 2015-08-05 武汉久瑞电气有限公司 A kind of scan box of industrial irradiation electron accelerator
CN205017677U (en) * 2015-09-07 2016-02-03 四川润祥辐照技术有限公司 A scanning box for electron accelerator
CN206574501U (en) * 2017-03-07 2017-10-20 惠州华大生物科技有限公司 Irradiation device for electronic accelerator
CN207475961U (en) * 2017-12-08 2018-06-08 广州华大生物科技有限公司 A kind of high-voltage accelerator Electron irradiation device
CN210537011U (en) * 2018-08-14 2020-05-15 浙江大镭核技术应用设备有限公司 Beam scanning output shielding box of irradiation accelerator

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101562060A (en) * 2009-05-27 2009-10-21 山东蓝孚电子加速器技术有限公司 Safe extraction system of electron beams
CN202262020U (en) * 2011-08-04 2012-05-30 舟山雷大电子科技有限公司 Titanium window side blowing cooling device of electronic accelerator
CN204157151U (en) * 2014-09-25 2015-02-11 广东天安新材料股份有限公司 Cooling device and use the electron radiation accelerator of this cooling device
CN104619109A (en) * 2015-02-26 2015-05-13 无锡鑫宏业特塑线缆有限公司 Electron accelerator titanium window cooling air nozzle
CN204539605U (en) * 2015-03-16 2015-08-05 武汉久瑞电气有限公司 A kind of scan box of industrial irradiation electron accelerator
CN205017677U (en) * 2015-09-07 2016-02-03 四川润祥辐照技术有限公司 A scanning box for electron accelerator
CN206574501U (en) * 2017-03-07 2017-10-20 惠州华大生物科技有限公司 Irradiation device for electronic accelerator
CN207475961U (en) * 2017-12-08 2018-06-08 广州华大生物科技有限公司 A kind of high-voltage accelerator Electron irradiation device
CN210537011U (en) * 2018-08-14 2020-05-15 浙江大镭核技术应用设备有限公司 Beam scanning output shielding box of irradiation accelerator

Also Published As

Publication number Publication date
CN111726928A (en) 2020-09-29

Similar Documents

Publication Publication Date Title
CN111726928B (en) Beam scanning leading-out device of irradiation accelerator
CN205750274U (en) A kind of exposing machine of circuit board
CN208315373U (en) Cooling device is used in a kind of processing of dry-type transformer
CN217785841U (en) High pressure positive blower heat absorption cooling system
CN111601448B (en) Titanium film cooling system for scanning box of irradiation accelerator
CN204442821U (en) A kind of electron accelerator titanium window cooling tuyere
CN104619109A (en) Electron accelerator titanium window cooling air nozzle
JP2009245725A (en) Electron beam generating apparatus
CN221058479U (en) Diamond electron window accelerator
CN214255245U (en) Weak current box with adjust inside temperature function
CN210683923U (en) Cooling device for optical vacuum coating
CN212319407U (en) Pipe exhaust blowing device
CN112040627B (en) High-energy electron irradiation accelerator
CN220887621U (en) Circulated heat dissipation vacuum gas quenching stove
CN220073552U (en) Cooling device of laser machine
CN218692293U (en) Wafer box cleaning machine
CN216852943U (en) Electron accelerator scanning box with wind circulation structure
CN217014775U (en) Hot air system of disinfection cabinet
CN201450663U (en) Beam blowing device
CN112151203A (en) Electron accelerator irradiation box radiating by air cooling
JP2008081763A (en) Target assembly unit and sputtering apparatus
CN217817708U (en) Quick cooling device is used in nut processing
CN219473650U (en) Industrial swirl burner
CN218603263U (en) Motor support capable of stably and firmly supporting
CN213113478U (en) Efficient cooling device for ultrahigh vacuum sputtering coating machine

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant