CN213113478U - Efficient cooling device for ultrahigh vacuum sputtering coating machine - Google Patents
Efficient cooling device for ultrahigh vacuum sputtering coating machine Download PDFInfo
- Publication number
- CN213113478U CN213113478U CN202022088996.XU CN202022088996U CN213113478U CN 213113478 U CN213113478 U CN 213113478U CN 202022088996 U CN202022088996 U CN 202022088996U CN 213113478 U CN213113478 U CN 213113478U
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- Prior art keywords
- water
- box
- coating machine
- fixedly connected
- cooling
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- Expired - Fee Related
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- 238000001816 cooling Methods 0.000 title claims abstract description 56
- 238000004544 sputter deposition Methods 0.000 title claims abstract description 19
- 239000011248 coating agent Substances 0.000 title claims abstract description 15
- 238000000576 coating method Methods 0.000 title claims abstract description 15
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 62
- 230000017525 heat dissipation Effects 0.000 claims description 14
- 230000000149 penetrating effect Effects 0.000 claims description 5
- 230000001681 protective effect Effects 0.000 claims description 5
- 238000007789 sealing Methods 0.000 claims description 5
- 239000007769 metal material Substances 0.000 claims description 3
- 238000009826 distribution Methods 0.000 abstract description 3
- 230000000694 effects Effects 0.000 description 5
- 238000001771 vacuum deposition Methods 0.000 description 4
- 238000001704 evaporation Methods 0.000 description 3
- 230000008020 evaporation Effects 0.000 description 3
- 239000000498 cooling water Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000001451 molecular beam epitaxy Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 238000001659 ion-beam spectroscopy Methods 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 230000003014 reinforcing effect Effects 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
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Abstract
The utility model discloses a high-efficient cooling device for ultrahigh vacuum sputtering coating machine, the power distribution box comprises a box body, four bracing pieces of bottom fixedly connected with in the box, four the common fixedly connected with of one end of bottom places the board in the box is kept away from to the bracing piece, be equipped with cooling body on the box, cooling body includes the water tank and the water pump of fixed connection bottom in the box, box inner wall fixedly connected with water-cooling tube and heat exchanger, water-cooling tube and heat exchanger intercommunication, the water tank passes through first connecting pipe and water-cooling tube intercommunication, the end of intaking of water pump passes through third connecting pipe and water tank intercommunication. The utility model discloses replaced traditional cooling methods, can directly cool off the air in the coating machine cavity, improved cooling efficiency greatly, can also directly dispel the heat to product itself, the circulation of air in the box can also be accelerated simultaneously, further improves cooling efficiency.
Description
Technical Field
The utility model relates to a cooling device technical field especially relates to a high-efficient cooling device for super high vacuum sputtering coating machine.
Background
The vacuum coating machine mainly refers to a coating machine needing to be carried out under a higher vacuum degree, and specifically comprises various types, including vacuum resistance heating evaporation, electron gun heating evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition, ion beam sputtering and the like, and the main idea is divided into two types, namely evaporation and sputtering.
Vacuum coating machine can produce a large amount of heats in the work, need timely effectual cooling, in order to ensure its normal work, present common cooling device is at vacuum coating machine cavity outside surface welding pipe, it cools off to lead to the cooling water in the pipe, this kind of structure, the cooling water is not with vacuum coating machine cavity direct contact, still need to reduce the temperature in the coating machine cavity indirectly through the temperature that reduces the coating machine shell, cooling rate is slow, the cooling is untimely, more can't direct effectual processing product to in the coating machine cools off, cooling efficiency is low, so, need design a high-efficient cooling device who is used for super high vacuum sputtering coating machine to solve above-mentioned problem.
SUMMERY OF THE UTILITY MODEL
The utility model aims at solving the defects in the prior art and providing a high-efficiency cooling device for an ultrahigh vacuum sputtering coating machine.
In order to achieve the above purpose, the utility model adopts the following technical scheme:
the utility model provides a high-efficient cooling device for ultrahigh vacuum sputtering coating machine, the power distribution box comprises a box body, four bracing pieces of bottom fixedly connected with in the box, four the common fixedly connected with of one end that the bottom in the box was kept away from to the bracing piece places the board, be equipped with cooling body on the box, cooling body includes the water tank and the water pump of fixed connection bottom in the box, box inner wall fixedly connected with water-cooled tube and heat exchanger, water-cooled tube and heat exchanger intercommunication, the water tank passes through first connecting pipe and water-cooled tube intercommunication, the end of intaking of water pump passes through third connecting pipe and water tank intercommunication, the play water end of water pump passes through second connecting pipe and heat exchanger intercommunication, be equipped with supplementary heat dissipation mechanism on.
Preferably, the auxiliary heat dissipation mechanism comprises a heat dissipation fan fixedly connected to the upper wall of the water tank, the heat dissipation fan is located right below the placing plate, a plurality of through holes are formed in the side wall of the placing plate in an equidistant penetrating mode, an air guiding cover is fixedly connected to the top in the box body, and the air guiding cover is located right above the placing plate.
Preferably, the upper wall of the cooling fan is fixedly connected with a protective mesh enclosure, and the protective mesh enclosure is made of a metal material.
Preferably, an opening is formed in the side wall of the box body in a penetrating mode, and a sealing box door is rotatably connected to the inner wall of the opening.
Preferably, the upper wall of the water tank is communicated with a water feeding pipe, and a pipe cover is arranged on the water feeding pipe.
Preferably, the four support rods are respectively located at four corners of the lower wall of the placing plate, and the four support rods are welded on the lower wall of the placing plate.
The utility model discloses following beneficial effect has:
1. the utility model discloses a set up cooling body, the staff places the product of treating processing on placing the board in the box, then close sealed chamber door, and start the water pump, under the effect of water pump, hydroenergy in the water tank can get into the heat exchanger through third connecting pipe and second connecting pipe, the heat exchanger can reduce the temperature of water, the water through the heat exchanger cooling can be through snakelike distributed water-cooling pipe, then flow back to the water tank through first connecting pipe, the water-cooling pipe that the surface temperature is lower can cool down the temperature air in the box, traditional cooling method has been replaced, can directly cool off the air in the coating machine cavity, cooling efficiency is greatly improved;
2. the utility model discloses a set up supplementary heat dissipation mechanism, can start radiator fan when starting the water pump, the high velocity air who blows off radiator fan can drive the heat on product surface, and high velocity air can flow back under the effect of wind scooper behind the wind scooper that flows simultaneously, makes blowing that high velocity air can concentrate more once more to the product, can directly dispel the heat to product itself, can also accelerate the circulation of air in the box simultaneously, further improves cooling efficiency.
Drawings
FIG. 1 is a schematic structural view of a high-efficiency cooling device for an ultra-high vacuum sputter coating machine according to the present invention;
FIG. 2 is a schematic structural view of a high-efficiency cooling device for an ultra-high vacuum sputter coating machine according to the present invention;
fig. 3 is an enlarged view of the structure at the position A of the high-efficiency cooling device for the ultra-high vacuum sputter coating machine provided by the utility model.
In the figure: the water cooling device comprises a box body 1, a water tank 2, a first connecting pipe 3, a water cooling pipe 4, a cooling fan 5, a protective mesh enclosure 6, an air guide cover 7, a sealed box door 8, a water pump 9, a water adding pipe 10, a supporting rod 11, a placing plate 12, a through hole 13, a heat exchanger 14, a second connecting pipe 15 and a third connecting pipe 16.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments.
Referring to fig. 1-3, a high-efficiency cooling device for an ultrahigh vacuum sputtering coating machine comprises a box body 1, an opening is arranged on the side wall of the box body 1 in a penetrating manner, a sealing box door 8 is rotatably connected to the inner wall of the opening, a handle is fixedly connected to the side wall of the sealing box door 8, an anti-slip sleeve is sleeved on the side wall of the handle to facilitate a worker to open the sealing box door 8, four support rods 11 are fixedly connected to the bottom of the box body 1, a placing plate 12 is fixedly connected to one end of each support rod 11 away from the bottom of the box body 1, the four support rods 11 are respectively positioned at four corners of the lower wall of the placing plate 12 to stabilize the whole structure of the device, the four support rods 11 are welded to the lower wall of the placing plate 12, a cooling mechanism is arranged on the box body 1, the cooling mechanism comprises a, because the water in the water tank 2 can be heated and evaporated gradually, so need the staff regularly to add water in to water tank 2 through filler pipe 10, 1 inner wall fixedly connected with water-cooling tube 4 of box and heat exchanger 14, heat exchanger 14 can cool down the water that flows out from water tank 2, water-cooling tube 4 and heat exchanger 14 intercommunication, water tank 2 is through first connecting pipe 3 and water-cooling tube 4 intercommunication, water pump 9's the end of intaking is through third connecting pipe 16 and 2 intercommunications of water tank, water pump 9's play water end is through second connecting pipe 15 and 14 intercommunications of heat exchanger.
Be equipped with supplementary heat dissipation mechanism on box 1, supplementary heat dissipation mechanism includes radiator fan 5 of fixed connection at 2 upper walls of water tank, radiator fan 5 upper wall fixedly connected with protection screen panel 6, protection screen panel 6 is made by metal material, play the guard action to radiator fan 5, radiator fan 5 is located places board 12 under, it is equipped with a plurality of through-holes 13 to place board 12 lateral wall equidistant running through, top fixedly connected with wind scooper 7 in the box 1, wind scooper 7 is located places board 12 directly over, under the effect of wind scooper 7, the high velocity air can be more concentrated blow to the product, thereby the reinforcing is to the radiating effect of product.
The utility model discloses during the use, the staff will treat that the product of processing is placed on placing board 12 in box 1, then close sealed chamber door 8, and start water pump 9, under water pump 9's effect, hydroenergy in the water tank 2 can get into in heat exchanger 14 through third connecting pipe 16 and second connecting pipe 15, heat exchanger 14 can reduce the temperature of water, the water of through heat exchanger 14 cooling can be through the water-cooling tube 4 of snakelike distribution, then flow back to in the water tank 2 through first connecting pipe 3, the lower water-cooling tube 4 of surface temperature can cool down the temperature air in the box 1.
The water pump 9 is started, the heat dissipation fan 5 can be started, the high-speed airflow blown by the heat dissipation fan 5 can drive heat on the surface of a product, and meanwhile, the high-speed airflow flows back to the air guide cover 7 under the action of the air guide cover 7, so that the high-speed airflow can be blown to the product more intensively.
The above, only be the concrete implementation of the preferred embodiment of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art is in the technical scope of the present invention, according to the technical solution of the present invention and the utility model, the concept of which is equivalent to replace or change, should be covered within the protection scope of the present invention.
Claims (6)
1. A high-efficiency cooling device for an ultrahigh vacuum sputtering coating machine comprises a box body (1) and is characterized in that four supporting rods (11) are fixedly connected to the bottom in the box body (1), a placing plate (12) is fixedly connected to one end, far away from the bottom in the box body (1), of each supporting rod (11), a cooling mechanism is arranged on the box body (1) and comprises a water tank (2) and a water pump (9) which are fixedly connected to the bottom in the box body (1), a water cooling pipe (4) and a heat exchanger (14) are fixedly connected to the inner wall of the box body (1), the water cooling pipe (4) is communicated with the heat exchanger (14), the water tank (2) is communicated with the water cooling pipe (4) through a first connecting pipe (3), the water inlet end of the water pump (9) is communicated with the water tank (2) through a third connecting pipe (16), and the water outlet end of the water pump (9) is communicated with the heat exchanger (14) through a, and an auxiliary heat dissipation mechanism is arranged on the box body (1).
2. The efficient cooling device for the ultrahigh vacuum sputter coating machine is characterized in that the auxiliary heat dissipation mechanism comprises a heat dissipation fan (5) fixedly connected to the upper wall of the water tank (2), the heat dissipation fan (5) is positioned right below the placing plate (12), a plurality of through holes (13) are formed in the side wall of the placing plate (12) in an equidistant penetrating mode, a wind scooper (7) is fixedly connected to the inner top of the box body (1), and the wind scooper (7) is positioned right above the placing plate (12).
3. The high-efficiency cooling device for the ultrahigh vacuum sputter coating machine according to claim 2, characterized in that a protective mesh (6) is fixedly connected to the upper wall of the heat dissipation fan (5), and the protective mesh (6) is made of a metal material.
4. The high-efficiency cooling device for the ultrahigh vacuum sputter coating machine according to claim 2 is characterized in that an opening is formed in the side wall of the box body (1) in a penetrating mode, and a sealing box door (8) is rotatably connected to the inner wall of the opening.
5. The high-efficiency cooling device for the ultrahigh vacuum sputter coating machine according to claim 2 is characterized in that a water feeding pipe (10) is communicated with the upper wall of the water tank (2), and a pipe cover is arranged on the water feeding pipe (10).
6. The high-efficiency cooling device for the ultrahigh vacuum sputter coating machine according to claim 1, characterized in that four of said supporting rods (11) are respectively positioned at four corners of the lower wall of the placing plate (12), and four of said supporting rods (11) are welded on the lower wall of the placing plate (12).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022088996.XU CN213113478U (en) | 2020-09-21 | 2020-09-21 | Efficient cooling device for ultrahigh vacuum sputtering coating machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022088996.XU CN213113478U (en) | 2020-09-21 | 2020-09-21 | Efficient cooling device for ultrahigh vacuum sputtering coating machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN213113478U true CN213113478U (en) | 2021-05-04 |
Family
ID=75664392
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202022088996.XU Expired - Fee Related CN213113478U (en) | 2020-09-21 | 2020-09-21 | Efficient cooling device for ultrahigh vacuum sputtering coating machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN213113478U (en) |
-
2020
- 2020-09-21 CN CN202022088996.XU patent/CN213113478U/en not_active Expired - Fee Related
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| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20210504 |